JP5866679B2 - 高周波伝送線路 - Google Patents
高周波伝送線路 Download PDFInfo
- Publication number
- JP5866679B2 JP5866679B2 JP2011138936A JP2011138936A JP5866679B2 JP 5866679 B2 JP5866679 B2 JP 5866679B2 JP 2011138936 A JP2011138936 A JP 2011138936A JP 2011138936 A JP2011138936 A JP 2011138936A JP 5866679 B2 JP5866679 B2 JP 5866679B2
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- Prior art keywords
- hard
- insulator
- frequency transmission
- transmission line
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
−プラズマ生成装置の動作−
−実施形態の効果−
−実施形態の変形例1−
−実施形態の変形例2−
−実施形態の変形例3−
《その他の実施形態》
51 中心導体(給電導体)
52 絶縁体
53 外側導体(接地導体)
54 被覆カバー
55 硬質体
Claims (1)
- 高周波電力を送るための給電導体と接地された接地導体とに絶縁体が挟まれた高周波伝送線路であって、
前記絶縁体は、高周波の伝送方向に連なる複数の硬質体により構成され、
前記絶縁体が隣り合う硬質体の接続箇所で曲げ可能に、複数の硬質体が保持されており、
前記硬質体の各々は、円筒状に形成され、
前記給電導体が、線状に形成されて前記複数の硬質体の内側を貫通し、前記接地導体が、前記複数の硬質体の外側を被覆し、
前記複数の硬質体では、各硬質体の円筒の内周面が一端から高周波の伝送方向における下流側である他端へ向かって窄まり、前記隣り合う硬質体において、上流側の硬質体が下流側の硬質体の内側に嵌め込まれていることを特徴とする高周波伝送線路。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011138936A JP5866679B2 (ja) | 2011-06-22 | 2011-06-22 | 高周波伝送線路 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011138936A JP5866679B2 (ja) | 2011-06-22 | 2011-06-22 | 高周波伝送線路 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013009055A JP2013009055A (ja) | 2013-01-10 |
JP5866679B2 true JP5866679B2 (ja) | 2016-02-17 |
Family
ID=47676071
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011138936A Expired - Fee Related JP5866679B2 (ja) | 2011-06-22 | 2011-06-22 | 高周波伝送線路 |
Country Status (1)
Country | Link |
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JP (1) | JP5866679B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6336196B2 (ja) * | 2015-03-03 | 2018-06-06 | 三菱電機株式会社 | 半導体製造装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1131287B (de) * | 1957-10-02 | 1962-06-14 | Kabelwerk Vacha Veb | Perlenisolierung fuer Hochfrequenzkabel |
JPS4863286A (ja) * | 1971-12-08 | 1973-09-03 | ||
DE10240238A1 (de) * | 2002-08-31 | 2004-03-18 | Robert Bosch Gmbh | Anschlußleitung für einen Meßfühler |
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2011
- 2011-06-22 JP JP2011138936A patent/JP5866679B2/ja not_active Expired - Fee Related
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JP2013009055A (ja) | 2013-01-10 |
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