JP5865329B2 - Encoder - Google Patents

Description

  The present invention relates to an encoder that detects the position and the like of an object to be detected.

  Various encoders such as an optical encoder, a magnetic encoder, and an electrostatic encoder that detect a moving position of a linear moving body, a rotating position of a rotating moving body, and the like have been proposed. For example, the encoder proposed in Japanese Patent Laid-Open No. 2004-228561 makes it possible to easily change the specifications of an encoder by providing a detachable signal processing circuit that digitizes a signal detected by a sensor. FIG. 20 (a) and FIG. 20 (b) are configuration diagrams.

  FIG. 20A shows a case where the signal processing circuit 103 is mounted inside the sensor head 101. In this case, a two-phase analog signal (only one is shown in FIG. 20A) corresponding to the movement of the detected object is output from the sensor signal detection amplification circuit 102 to the signal processing circuit 103. Here, these two-phase analog signals are generally periodic signals whose phases are shifted by 90 degrees.

The signal processing circuit 103 is a circuit that digitizes (binarizes) an input two-phase analog signal. Further, the signal processing circuit 103 includes an interpolation division circuit that performs interpolation division processing on the input analog signal. The interpolation division circuit determines an interpolation position within one cycle of the analog signal. Can be sought. For example, the above-described two-phase analog signals are respectively converted into an A-phase analog signal (Vsinθ) and a B-phase analog signal (Vcosθ) that are generally used for encoder signals, and values obtained by digitally converting these signals are Va and Vb. Then,
Va / Vb = Vsinθ / Vcosθ = tanθ
θ = tan ^-1 (Va / Vb)
The interpolation position within one period can be obtained from After the signal is digitized in this way, a digital signal is output from the sensor head 101 to the control device 104.

  On the other hand, FIG. 20B shows a case where the signal processing circuit 103 is provided inside the control device 104. In this case, the signal processing circuit 103 is not mounted in the sensor head 101. That is, in this case, an analog signal is output from the sensor head 101 to the control device 104 and then digitized by the signal processing circuit 103 inside the control device 104.

JP-A-10-253392

  In the encoder proposed in Patent Document 1, it is necessary to prepare a plurality of signal processing circuits in advance according to the signal input specifications of the control device 104. That is, in order to cope with a specification that is not prepared in advance, it is necessary to newly manufacture a signal processing circuit that can correspond to the specification.

  For example, when the scale periodic pattern is 20 μm, a low-resolution digital signal output with a resolution of about 5 μm, a high-resolution digital signal with a resolution of about 1 μm, depending on the application of the encoder and the specifications of the control circuit 105 at that time. A signal in various output modes such as an output and an AB phase analog signal that is not subjected to digital conversion is required depending on the application. Such various output mode signals are preferably generated and output by one type of sensor head. However, the encoder of Patent Document 1 can output only one of an analog signal and a digital signal having a specific resolution with a specific standard in the case of FIG. 20A and FIG. 20B, respectively. .

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an encoder capable of supporting various functions and performance devices with one type of sensor head.

In order to achieve the above object, an encoder according to a first aspect of the present invention includes a sensor head and a scale on which a pattern of a predetermined period is formed, and the relative displacement between the scale and the sensor head. In the encoder that generates an output signal based on a plurality of analog signals according to the output and outputs from the sensor head, the sensor head includes a sensor that outputs the plurality of analog signals according to the relative displacement, and the plurality of the plurality of analog signals. a signal processing unit that performs predetermined signal processing on the basis of the analog signal, the setting switch related to the output signal or the signal processing, provided in advance corresponding to the output destination signal specifications or processing specifications of the output signal possess a setting switching portion that performs by the switching of the connection configuration through a plurality of electrodes or wiring, the above signal processing unit and the setting switching portion, in a single integrated circuit, One, characterized in that it is made integrally configured with the sensor.

  ADVANTAGE OF THE INVENTION According to this invention, the encoder which can respond | correspond to the apparatus of various functions and performance with one type of sensor head can be provided.

It is a block diagram which shows the structure of the encoder which concerns on the 1st Embodiment of this invention. It is a block diagram which shows the internal structure of the sensor head in the encoder which concerns on the 2nd Embodiment of this invention. It is a figure for demonstrating operation | movement of an offset setting switching part. It is a figure for demonstrating operation | movement of a hysteresis setting switching part. It is a figure for demonstrating the operation | movement of a serialization circuit. It is a figure for demonstrating the production | generation method of a moving direction discrimination | determination signal. It is a block diagram at the time of comprising the sensor head of 2nd Embodiment with the optical sensor head. It is the schematic inside a sensor head in the encoder which concerns on the 3rd Embodiment of this invention. It is a figure which shows the example of the schematic of IC inside a sensor head which outputs a signal independently from each extraction electrode of IC inside a sensor head. It is a figure which shows another example of the schematic of IC inside a sensor head which outputs a signal independently from each extraction electrode of IC inside a sensor head. It is an external view of the encoder which concerns on the 4th Embodiment of this invention. It is a figure which shows the example of the setting switch in 4th Embodiment. It is a block diagram which shows the internal structure of the sensor head in the encoder which concerns on 4th Embodiment. It is the schematic of IC inside a sensor head in an encoder concerning a 5th embodiment of the present invention. It is a figure which shows the example of the setting switch in 5th Embodiment. It is the schematic of IC inside a sensor head in an encoder concerning a 6th embodiment of the present invention. It is a block diagram which shows the internal structure of the sensor head in the encoder which concerns on 6th Embodiment. It is a figure which shows the example of the setting switch in 6th Embodiment. It is the schematic of the sensor head in the encoder which concerns on the 7th Embodiment of this invention. It is a block diagram which shows the structure of a prior art example.

[First Embodiment]
FIG. 1 is a configuration diagram of an encoder according to the first embodiment of the present invention. That is, the encoder according to the first embodiment includes a scale 1 and a sensor head 2. FIG. 1 also shows a position information output device 7 that detects position information of the detected object from the output of the sensor head 2 and a control device that controls the position of the detected object 6 based on the output of the position information output device 7. 8 is also illustrated.

  The scale 1 is disposed on the moving detection object 6 and has a physical, electrical, or optical pattern having a predetermined period. The sensor head 2 detects the movement of the periodic pattern due to the movement of the detection object 6, processes the detection result, and outputs it to the position information output device 7. Here, the sensor head 2 includes a sensor 3, a signal processing unit 4, and a setting switching unit 5. Here, the signal processing unit 4 and the setting switching unit 5 are configured by an integrated circuit (hereinafter referred to as an IC).

  The sensor 3 is arranged so as to face the scale 1, detects the movement of the periodic pattern of the scale 1, and generates a periodic analog signal corresponding to the detected movement (displacement of the scale 1). The signal is output to the signal processor 4. Here, the detection method of the sensor 3 includes an optical method, a magnetic method, a capacitance method, and the like, and the periodic pattern of the scale 1 is optical, magnetic, or corresponding to the detection method of the sensor 3. It has an electrical pattern.

  The signal processing unit 4 processes the periodic analog signal input from the sensor 3. Here, in the signal processing unit 4, signal processing is performed by the setting switching unit 5 in order to generate and output various analog signals or various digital signals corresponding to the input signal specifications of the position information output device 7 constituted by a counter or the like. Setting switching of the unit 4 is performed. That is, the setting switching unit 5 is provided for switching the setting of the signal output from the sensor head 2. The setting switching unit 5 can generate analog signals or various digital signals in various signal processing modes, and can output signals from the sensor head 2 in various signal output modes.

  Here, an interpolation division circuit may be provided inside the signal processing unit 4. That is, when the digital signal is generated in the signal processing unit 4, if the number of divisions by the interpolation division circuit can be set and switched, digital signals having different resolutions can be output to the position information output device 7.

  The position information output device 7 detects the position information of the detected object 6 from the signal input from the sensor head 2 and outputs this position information to the control device 8. The control device 8 controls the movement of the detected body 6 based on the input position information.

  As described above, according to the first embodiment, it is possible to generate and output various signals using one type of sensor head. As a result, a large number of position information output devices 7 or control devices 8 having different signal input specifications can be handled with one type of sensor head. For example, even when the control accuracy of the detection target 6 is further increased, it is only necessary to perform setting switching of the setting switching unit 5 in the sensor head 2. For this reason, since it can respond with one kind of sensor head, the specification can be changed at low cost.

  Here, as a matter of course, various modifications and changes can be made to each configuration of the first embodiment. For example, in FIG. 1, the detection target 6 is illustrated as performing a linear motion, but is not limited thereto, and may be a rotational motion. In this case, the rotational position of the detected object 6 is detected by configuring the scale 1 as a circumferentially formed physical, electrical, or optical pattern having a predetermined period. It is also possible to detect the speed of the detected object 6 using the encoder of FIG. In this case, for example, a time change of the position information detected by the position information output device 7 may be detected.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. FIG. 2 is a block diagram showing a detailed configuration inside the sensor head 2 of FIG. Here, the configuration of the scale 1, the position information output device 7, and the control device 8 arranged on the detected object 6 is the same as that described in the first embodiment, and therefore, illustration thereof is omitted here.

  Here, the analog signal processing circuit 41, the offset adjustment circuit 42, the amplification factor adjustment circuit 43, the digital signal processing circuit 44, the interpolation division circuit 45, the serialization circuit 46, and the reference position signal digitization circuit 47 in FIG. It is included in the signal processing unit 4 of FIG. Also, an offset setting switching unit 51, an amplitude amplification factor setting switching unit 52, a hysteresis setting switching unit 53, a division number setting switching unit 54, a signal output response speed band setting switching unit 55, a signal output setting switching unit 56, and a reference position analog / Digital setting switching unit 57 is included in setting switching unit 5 of FIG.

  Next, the configuration and operation of FIG. 2 will be described according to the flow of signals output from the sensor 3. That is, the sensor 3 outputs a two-phase analog signal called a so-called AB-phase analog signal that is approximately 90 degrees out of phase in accordance with the movement of the detected object 6.

  Here, as shown in FIG. 3, the AB phase analog signal output from the sensor 3 has a so-called offset in which the amplitude center potential of the signal deviates from the reference potential by superimposing a DC component on the signal. There is. For this reason, the AB phase analog signal output from the sensor 3 is first input to the offset adjustment circuit 42 in the analog signal processing circuit 41 to adjust the offset. Here, in the second embodiment, an offset setting switching unit 51 is provided in the offset adjustment circuit 42 so that the offset magnitude of the AB phase analog signal can be set and switched by the offset setting switching unit 51. It has become. Here, as one example of the adjustment method of the offset amount, several potential generation circuits having different offset adjustment amounts are formed in the offset adjustment circuit 42 in advance, and the offset setting switching unit 51 switches the wiring pattern or the logic circuit. There is a method of switching to a desired offset amount.

  Thus, by minimizing the offset of the analog signal, the interpolation accuracy in the interpolation division circuit 45 thereafter can be improved, and a highly accurate sensor head can be obtained.

  Here, “setting switching” in the offset setting switching unit 51 includes not only a case where switching is always possible, but also a case where the setting cannot be changed again once the setting is made at the time of manufacturing the product. The same applies to other setting switching units described later.

  The AB phase analog signal that has been offset-adjusted in this way is output to the system of the digital signal processing circuit 44 for generating various digital signals and the amplification factor adjusting circuit 43 for generating various analog signals. .

  First, the digital signal processing circuit 44 will be described. The digital signal processing circuit 44 is a circuit for digitizing the input AB phase analog signal. In the digital signal processing circuit 44, the input analog signal is converted into a digital signal by a predetermined division number in, for example, an interpolation division circuit 45. The digital signal generation in the interpolation division circuit 45 includes a case where a plurality of analog signals are simply binarized into digital signals. Here, in the second embodiment, a division number setting switching unit 54 is provided inside the interpolation division circuit 45 so that the division number at the time of digitization can be set and switched. For example, an analog signal corresponding to a movement amount of 20 μm in one cycle is divided into two, that is, if it is simply binarized, a digital signal corresponding to a movement amount of 10 μm can be obtained. A digital signal corresponding to a movement amount of 2 μm is obtained. Examples of the interpolation division method include a resistance division method using resistors, a phase tracking method using a ROM table, and a method for calculating the rotation angle of a Lissajous diagram of A-phase and B-phase analog signals by calculation. . In the resistance division method, switching of the resistance division number can be performed by switching of wiring patterns or a logic circuit. In the phase tracking method using the ROM table, the ROM table can be switched by a wiring pattern or a logic circuit. In the method obtained by calculation, the calculation coefficient is switched by a wiring pattern or a logic circuit. Can do. There is also a method using a comparator for simple binarization.

  Furthermore, a hysteresis setting switching unit 53 for setting the resistance against noise included in the analog signal at the time of digitization is provided in the interpolation division circuit 45. The hysteresis of the hysteresis setting switching unit 53 means a hysteresis given to a threshold voltage generally used when binarizing an analog signal. Next, this hysteresis will be described in more detail.

  FIG. 4A is a diagram showing a change in waveform when binarization is performed by the comparator in a state where there is no noise in the analog signal. In this case, since there is no noise in the analog signal, the binarization process is performed without any problem even if the threshold voltage has no hysteresis. On the other hand, FIG. 4B is a diagram showing a change in waveform when binarization is performed without adding hysteresis to the threshold voltage in a state where noise is on the analog signal. In this case, a so-called chattering phenomenon occurs in which the noise component signal is erroneously binarized. In this case, erroneous counting of pulses occurs in the position information output device 7, and as a result, the position information detected by the position information output device 7 is distorted. In addition, depending on how the control device 8 is controlled, a so-called chatter phenomenon occurs in which the detected object 6 repeats reciprocation.

  In order to solve this problem, hysteresis is given to the threshold voltage at the time of binarization like the threshold voltage 1 and the threshold voltage 2 shown in FIG. In this way, chattering can be prevented. Here, as the hysteresis is increased, the pulse width when digitized becomes more varied, and the position detection accuracy of the encoder becomes worse. For this reason, it is desirable to set the magnitude of hysteresis according to the magnitude of noise riding on the input analog signal and the required detection accuracy. Therefore, in the second embodiment, the hysteresis size is switched by the hysteresis setting switching unit 53. Here, as an example of a method for adjusting the magnitude of hysteresis, several types of different feedback resistors are formed in advance in the hysteresis adjustment operational amplifier circuit, and the desired hysteresis magnitude can be changed by switching the wiring pattern or logic circuit. There is a method to switch to Sasa.

  The signal (hereinafter referred to as an AB phase digital signal) that has been interpolated and digitized by the interpolating / dividing circuit 45 in this manner is output to the signal output response speed band setting switching unit 55 and the serializing circuit 46.

  As an example of the serialization circuit 46, as shown in FIG. 5, a process of generating one digital signal (hereinafter referred to as a single-phase digital signal) by combining the AB phase digital signals is performed. Here, in the AB phase digital signal, the moving direction of the detection target 6 is detected by the phase difference between the digital signals. That is, if the single-phase digital signal is simply generated by combining the AB phase digital signals, the phase difference between the two signals, that is, the information on the moving direction cannot be known. Therefore, for example, as shown in FIG. 6, the serialization circuit 46 generates a movement direction determination signal from the phase relationship between the A phase digital signal and the B phase digital signal having different phases, and the movement direction determination signal and the single phase Processing to output a digital signal as a set signal is also performed. The set signal processed in the serialization circuit 46 in this way is output to the signal output response speed band setting switching unit 55.

  In addition to the above AB phase digital signal and single phase digital signal, the digital signal processing circuit 44 includes a digital signal corresponding to a plurality of output formats such as a multi-bit signal or a USB (Universal Serial Bus) interface compatible signal. May be provided, and a switching unit for selecting at least one of the output formats may be provided.

  Next, the amplification factor adjustment circuit 43 will be described. The amplification factor adjustment circuit 43 is a circuit for adjusting the amplitude of the input AB phase analog signal. That is, the amplification factor adjustment circuit 43 is provided with an amplitude amplification factor setting switching unit 52, and the amplitude of the AB phase analog signal is set and switched according to the setting of the amplitude amplification factor setting switching unit 52. Here, as an example of the method for adjusting the amplitude amplification factor, like the method for adjusting the hysteresis, several types of different feedback resistors are formed in advance in the amplitude amplification operational amplifier circuit, and switching of the wiring pattern or logic circuit is performed. There is a method of switching to a desired amplification factor. Examples of the amplitude setting switching include switching between a normal mode that can be set to a user's desired amplitude and an inspection mode that can be set to the amplitude at the time of shipping inspection of the sensor head. In this way, the AB phase analog signal in which the amplitude is set is output to the signal output response speed band setting switching unit 55.

  The signal output response speed band setting switching unit 55 sets the response speed band of the output signal in accordance with the processing circuit specifications of the device (position information output device 7 in FIG. 1) as the receiving side of the signal output from the sensor head 2. Set. For example, if a signal is output from the sensor head 2 at a speed faster than the signal response speed of the counter in the position information output device 7, the counter cannot follow up and is detected by the position information output device 7 as a result. The location information will be confused. Therefore, in the second embodiment, the signal output response speed band setting switching unit 55 switches the output response speed band of the signal output from the sensor head 2 in accordance with the specifications of the position information output device 7, thereby Prevent information corruption. Here, as an example of the response speed band adjustment method, several types of output synchronization clock circuits having different clock frequencies are formed in advance, and switching to a desired response speed band by switching a wiring pattern or a logic circuit is performed. There is.

  The signal output response speed band setting switching unit 55 may be provided inside the analog signal processing circuit 41 or the digital signal processing circuit 44 to switch the response speed band when an analog signal or a digital signal is processed.

  The signal whose output response speed band setting has been switched by the signal output response speed band setting switching unit 55 is output to the signal output setting switching unit 56. The signal output setting switching unit 56 selects and selects at least one set of input AB-phase analog signal, AB-phase digital signal, and set signal of the single-phase digital signal and the movement direction determination signal. The signal is output to the position information output device 7. At this time, two or more sets of signals may be output simultaneously. As a result, for example, it is possible to detect the position with a digital signal and apply stop servo with an analog signal, etc., and stop control without chattering phenomenon resulting from digital signal control becomes possible.

  The sensor 3 has a function of detecting the reference position of the scale 1. That is, the reference position analog signal output from the sensor 3 is digitized by the reference position signal digitizing circuit 47. In the second embodiment, the reference position signal output from the sensor head 2 can be switched between an analog signal and a digital signal. This switching is performed according to the setting of the reference position analog / digital setting switching unit 57. Here, the digitalization of the reference position analog signal includes a method of using a comparator, similarly to the binarization of the AB phase analog signal.

  As described above, according to the second embodiment, various types of AB phase analog signals, various types of AB phase digital signals, various types of single phase digital signals, and analog or digital reference position signals can be obtained with one type of sensor head. It is possible to output signals in various signal output modes. As a result, a large number of position information output devices 7 or control devices 8 having different signal input specifications can be handled with one type of sensor head. Further, for example, even when the control accuracy of the detection target 6 is further increased, it is only necessary to perform setting switching of various setting switching units inside the sensor head 2. For this reason, since it can respond with one kind of sensor head, the specification can be changed at low cost.

  Further, the offset can be reduced as much as possible by the offset setting switching unit 51. This improves the interpolation accuracy in the interpolation division circuit 45, so that a more accurate sensor head can be obtained.

  Furthermore, the amplitude can be easily changed by the amplitude amplification factor setting switching unit 52 between the shipping inspection mode and the normal mode of the sensor head. As a result, if the inspection is performed in the inspection mode in which the standard width is narrower than the AB phase analog amplitude standard, trouble due to AB phase amplitude abnormality in the normal mode can be prevented.

  Here, as a matter of course, the various configurations of the second embodiment can be variously modified and changed. For example, it is not necessary to provide all of the various setting switching units described above in the sensor head 2. That is, even if some configurations are omitted from the configuration in FIG. Further, for example, the signal output setting switching unit 56 is arranged immediately after the AB-phase analog signal output from the sensor 3, and the signal output response speed band setting switching unit 55 is not arranged after the analog signal processing system. It may be arranged only after this processing system. In other words, it is desirable to arrange the circuits in accordance with the type and number of setting switching units required.

  Further, as an amplitude that can be set in the amplitude amplification factor setting switching unit 52, an amplitude for a setting mode used when setting the scale 1 and the sensor head 2 may be included. That is, by performing the setting while confirming the signal for the setting mode, it is possible to suppress trouble due to an AB phase amplitude abnormality in the normal mode.

  Further, the sensor head may have a function of detecting the reference position with accuracy by synchronizing the reference position signal and the AB phase analog signal, and may have a switching function for setting the synchronization position at this time. .

  The analog signal is not limited to an AB phase signal that is 90 degrees out of phase, and may be a plurality of analog signals having a predetermined phase difference. Correspondingly, the digital signal may be a multiphase signal (hereinafter referred to as a multiphase digital signal).

  Further, the encoder of the second embodiment may be an optical type. The configuration of the sensor head in this case is shown in FIG. In this case, a light detection sensor is used as the sensor 3 and a scale 1 having an optical pattern with a predetermined period is used. Here, in FIG. 7, a function of switching the light output of the light source 9 by the light output setting switching unit 58 of the light source is provided according to the amplitude specification of the AB phase analog signal. As a result, when the analog signal level output from the sensor head is small, it may be raised to an appropriate signal level. Conversely, when the analog signal level is too high, for example, the circuit potential is likely to be saturated, the optical output may be lowered. Is possible. Therefore, from the viewpoint of the life of the light source, it is better to set the light output small. However, for example, in the case where high resolution and high resolution of the analog signal are required, the light output is set large to increase the analog signal level. The optical output can be set according to the application. In addition, the auto power control mode makes it possible to always keep the light intensity entering the light detection sensor constant or the amplitude of the analog signal constant, and obtain a highly accurate optical encoder by stabilizing the encoder signal. Can do.

[Third Embodiment]
Next, a third embodiment of the present invention will be described. FIG. 8 is a schematic diagram showing a state in which the sensor 3 inside the sensor head, the signal processing unit 4 and the setting switching unit 5 are actually integrated into an IC. That is, in FIG. 8, the signal processing unit 4 and the setting switching unit 5 are illustrated as the accumulation unit 13. Further, the extraction electrode 12 is electrically connected to the integrated portion 13. Here, in FIG. 8, as an example of the extraction electrode 12, at least one of a voltage input electrode (V), a ground electrode (GND), an AB phase analog signal, an AB phase digital signal, and a single phase digital signal is shown. A pair of signal output electrodes and a reference position signal output electrode are shown.

  Here, the configuration of the scale 1 and the position information output device 7 is the same as that of the first embodiment, and the signal flow from the sensor 3 to the various setting switching units is the same as that of the second embodiment. Then, explanation is omitted.

  That is, the setting switching unit 5 is configured in an electronic circuit inside the integration unit 13. The setting switching in the setting switching unit 5 is performed by setting and switching the connection configuration of the thin film conductive wiring pattern of the electronic circuit, for example. This connection configuration is performed by setting the configuration of a mask pattern for photolithography when forming a thin film conductive wiring pattern in an IC manufacturing process or the like. Alternatively, the thin film conductive wiring pattern may be cut using a laser or the like.

  If the setting switching of the setting switching unit 5 is performed in this manner, the setting switching of the setting switching unit 5 can be performed by switching the connection configuration of the thin-film conductive wiring pattern even if all the elements inside the IC 11 are used. It is. Here, the cutting process of the thin film conductive wiring pattern by a laser or the like may be performed at the final stage at the time of manufacturing the IC or the sensor head. Note that the method of cutting the thin film conductive wiring pattern is not limited to laser, and for example, a fuse may be formed in a part of the wiring pattern and the fuse may be electrically cut. It goes without saying that other physical methods, thermal methods, optical methods, and the like may be used.

  As described above, according to the third embodiment, various AB phase analog signals and various AB digital signals can be obtained only by switching the connection configuration of the thin film conductive wiring pattern even if all the elements in the IC 11 are used. It is possible to provide a sensor head that can cope with various signal output modes such as a signal, various single-phase digital signals, and analog or digital reference position signals. Thereby, a sensor head can be mass-produced and it leads to cost reduction. Further, the sensor head can be miniaturized by making the signal processing unit and the setting switching unit into an IC.

  Here, as a matter of course, each configuration of the third embodiment can be variously modified and changed. For example, it is not necessary to provide all of the setting switching units described above in the IC 11, and the arrangement of various setting switching units in the IC can be changed. That is, it is only necessary to realize a sensor head that satisfies the desired sensor performance even if some configurations are omitted from the configuration of FIG.

  Furthermore, the analog signal is not limited to an AB phase signal that is 90 degrees out of phase, and may be a plurality of analog signals having a predetermined phase difference, and may be a digital signal or a multiphase signal correspondingly.

  Further, the configuration of the various setting switching units is not limited to that formed by a thin film conductive wiring pattern. For example, a mode in which a non-volatile memory such as EPROM or EEPROM is provided in the IC and the setting information of the setting switching unit 5 is recorded in the non-volatile memory is also conceivable. In this case, the setting switching of various setting switching units can be performed by changing the setting information recorded in the nonvolatile memory. Here, the recording medium for recording the setting information of the setting switching unit 5 is not limited to the nonvolatile memory.

  Further, the sensor 3 and the stacking unit 13 may be configured separately, or a part of the signal processing unit 4 may be formed separately from the stacking unit 13.

  Further, various output signals such as an AB phase analog signal, an AB phase digital signal, a single phase digital signal, an analog or digital reference position signal can be output from the independent extraction electrodes 12, and desired signals can be output simultaneously. May be possible. Thereby, for example, an AB phase analog signal and an AB phase digital signal can be simultaneously output from the sensor head.

  Further, as shown in FIG. 9, various output signals such as an AB phase analog signal, an AB phase digital signal, a single phase digital signal, an analog or digital reference position signal can be output from the independent extraction electrodes 12, respectively. The signal output setting switching unit 56 may be configured to switch various output signals on and off. Thus, for example, when it is desired to obtain an analog signal with a high S / N, the digital signal is set to OFF, and only the analog signal is output from the output terminal. Can be obtained.

  Further, as shown in FIG. 10, various output signals such as an AB phase analog signal, an AB phase digital signal, a single phase digital signal, an analog or digital reference position signal can be output from the independent extraction electrodes 12, respectively. The connection between the extraction electrode 12 and the external wiring 16a may be selectively connected by a conductive wire. Here, the external wiring 16a is a wiring electrode formed on a sensor package, a wiring electrode formed on a flexible printed board, a cable wiring, or the like.

[Fourth Embodiment]
Next, a fourth embodiment of the present invention will be described. FIG. 11 is a schematic diagram of an IC inside the sensor head of the fourth embodiment, and FIG. 13 is a diagram showing an internal configuration of the IC 11 of FIG. Here, in FIG. 11, in addition to the extraction electrode 12 of FIG. 8, it corresponds to the signal output setting switching electrode 14 which is an electrode corresponding to the signal output setting switching unit 56 and the reference position analog / digital setting switching unit 57. A reference position analog / digital setting switching electrode 15 is provided.

  That is, in the fourth embodiment, various setting switching electrodes are provided on the extraction electrode 12, and the setting switching is performed by switching the potential applied to this electrode or the impedance connected to the setting switching electrode. As an example of such setting switching, FIG. 12A shows the relationship between the potential of the signal output setting switching electrode 14 and the output signal mode corresponding to the potential, and FIG. 12B shows the reference position analog / digital setting switching electrode. The relationship between the potential of 15 and the output signal mode corresponding to the potential is shown.

  That is, in the fourth embodiment, as shown in FIG. 12A, the potential applied to the signal output setting switching electrode 14 can be switched in three stages of low, middle, and high. That is, in the fourth embodiment, an AB phase analog signal is output when the potential of the signal output setting switching electrode 14 is, for example, a high potential. Further, an AB phase digital signal is output when the potential of the signal output setting switching electrode 14 is a middle potential, and a set signal of a single phase digital signal and a moving direction determination signal is output when the potential is a low potential.

  Here, the signal output setting switching unit 56 that is electrically connected to the signal output setting switching electrode 14 has an AB phase analog signal, an AB phase digital signal, or a single phase with the potential of the signal output setting switching electrode 14 as a switch. For example, a semiconductor analog switch circuit is used to select one of the set signals of the digital signal and the moving direction determination signal.

  It is also possible to connect an impedance instead of applying a potential to the signal output setting switching electrode 14 and use the impedance as a switch.

  On the other hand, as shown in FIG. 12B, the potential of the reference position analog / digital setting switching electrode 15 can be switched between two stages of low and high. That is, the reference position analog signal is output when the potential of the reference position analog / digital setting switching electrode 15 is high, and the reference position digital signal is output when the potential is low.

  Here, the reference position analog / digital setting switching unit 57 that is electrically connected to the reference position analog / digital setting switching electrode 15 has the potential of the reference position analog / digital setting switching electrode 15 as a switch. For example, a semiconductor analog switch circuit is used to select either the signal or the reference position digital signal.

  Instead of applying a potential to the reference position analog / digital setting switching electrode 15, it is also possible to connect an impedance and use the impedance value as a switch.

  Here, the configurations of the scale 1 and the position information output device 7 are the same as those of the first embodiment, and the signal flow from the sensor 3 to the various setting switching units is the same as that of the second embodiment. Description is omitted.

  Here, the setting switching in the signal output setting switching unit 56 and the reference position analog / digital setting switching unit 57 has been described, but the same setting switching electrode is also used in other setting switching units such as the division number setting switching unit. Needless to say, various settings can be switched by switching the potential of this electrode.

  As described above, according to the fourth embodiment, with one type of IC 11, various AB phase analog signals, various AB phase digital signals, various single phase digital signals, analog or digital reference position signals, etc. Since various signal output modes are possible, it is possible to cope with many position information output devices 7 or control devices 8 having different signal input specifications with the same sensor head. Further, since the IC 11 can be easily reduced in cost by mass production and can be reduced in size, a low-cost and small sensor head can be obtained.

  Here, naturally, various modifications and changes can be made to each configuration of the fourth embodiment. For example, as described in the third embodiment, it is not necessary to provide all the various setting switching units in the IC 11, and the arrangement of the various setting switching units in the IC can be changed. That is, it is only necessary to realize a sensor head that satisfies the desired sensor performance even if some configurations are omitted from the configuration of FIG.

  Furthermore, the analog signal is not limited to an AB phase signal that is 90 degrees out of phase, and may be a plurality of analog signals having a predetermined phase difference, and may be a digital signal or a multiphase signal correspondingly.

  Various configurations such as a configuration using a thin film electric pattern and a configuration using a nonvolatile memory can be considered for the configuration of the various setting switching units.

  Further, a plurality of potentials are set for one setting switching electrode. For example, the function of the division number setting switching unit 54, the function of the amplitude gain setting switching unit 52, and the function of the signal output setting switching unit 56 are set. It is also possible to switch between the normal mode and inspection mode of the AB phase analog signal, switch the number of divisions of the AB phase digital signal, and switch the signal output mode using one setting switching electrode. It is.

[Fifth Embodiment]
Next, a fifth embodiment of the present invention will be described. Here, the configurations of the scale 1 and the position information output device 7 are the same as those of the first embodiment, and the signal flow from the sensor 3 to the various setting switching units is the same as that of the second embodiment. Then, explanation is omitted.

  In the fifth embodiment, the setting of the setting switching unit is switched using an electrode (hereinafter referred to as a package electrode) attached to the package of the sensor head 2. That is, in the fifth embodiment, as shown in FIG. 14, the setting switching of various setting switching units is performed depending on the presence or absence of electrical connection between the extraction electrode 12 of the IC 11 and the package electrode 16 to which a predetermined potential is applied. Do. Here, FIG. 14 shows an example in which the signal output setting switching electrode 14, the reference position analog / digital setting switching electrode 15 and the package electrode 16 are electrically connected by a wire 17.

  FIG. 15A shows the relationship between the potential of the package electrode 16 and the output signal mode corresponding to the potential. FIG. 15B shows the potential of the package electrode 16 and the reference position signal corresponding to the potential. The relationship with the output signal mode is shown. That is, as shown in FIG. 15A, when the signal output setting switching electrode 14 and the package electrode 16 are not electrically connected, an AB phase analog signal is output, and the signal output setting switching electrode 14 and the ground ( When the package electrode 16 at the GND) potential is electrically connected, an AB phase digital signal is output. Further, when the signal output setting switching electrode 14 and the package electrode 16 having a predetermined potential (V) potential are electrically connected, a set signal of a single-phase digital signal and a moving direction determination signal is output.

  Also, as shown in FIG. 15B, when the reference position analog / digital setting switching electrode 15 and the package electrode 16 are not electrically connected, a reference position analog signal is output, and the reference position analog / digital setting is performed. When the switching electrode 15 and the package electrode 16 having the GND potential are electrically connected, a reference position digital signal is output.

  Here, the signal output setting switching electrode 14 and the reference position analog / digital setting switching electrode 15 are electrically connected to the signal output setting switching unit 56 and the reference position analog / digital setting switching unit 57, respectively, as in the fourth embodiment. Similarly to the fourth embodiment, the signal output setting switching unit 56 and the reference position analog / digital setting switching unit 57 may be configured by a semiconductor analog switch circuit, for example. However, when an electrical wire is not connected to the setting switching electrode, the potential is not specified. For example, an intermediate potential between V and GND is input to the signal output setting switching unit 56 and the reference position analog / digital setting switching unit 57. Should be formed.

  Here, although not shown in FIG. 14, other setting switching units such as the division number setting switching unit 54 are similarly provided with setting switching electrodes on the IC 11, and this electrode and the package electrode 16 are connected to the electrical wires. It goes without saying that setting switching can be performed by connection.

  As described above, according to the fifth embodiment, with one type of IC 11, various AB phase analog signals, various AB phase digital signals, various single phase digital signals, analog or digital reference position signals, etc. Since various signal output modes are possible, it leads to cost reduction by mass production. Moreover, since it can be comprised with IC, a sensor head can be reduced in size.

  Here, as for the structure of 5th Embodiment, various deformation | transformation and a change are naturally possible. For example, the fifth embodiment can be variously modified and changed similarly to the third embodiment. Further, the electrical connection between the setting switching electrode of the IC 11 and the package electrode 16 is not limited to a wire, and may be performed using a conductive adhesive or the like such as silver paste.

  Furthermore, if the package electrode 16 capable of applying a plurality of potentials is provided, setting switching of a plurality of setting switching units can be performed using one setting switching electrode provided in the IC 11.

[Sixth Embodiment]
Next, a sixth embodiment of the present invention will be described. Here, the configurations of the scale 1 and the position information output device 7 are the same as those of the first embodiment, and the signal flow from the sensor 3 to the various setting switching units is the same as that of the second embodiment. Description is omitted.

  In the sixth embodiment, as shown in FIG. 16, the extraction electrode 12 of the IC 11 and the switch electrode provided on the package electrode 16 of the sensor head 2 are electrically connected via the wire 17 to turn the switch ON / OFF. To switch settings.

  Here, FIG. 16 shows an example in which the setting switching electrodes of the two setting switching electrodes 18 and 19 are electrically connected to the switch electrodes SW1 and SW2. In addition, as shown in FIG. 17, the setting switching electrodes 18 and 19 are electrically connected to various setting switching units via a switching circuit 59. The switching circuit 59 performs setting switching of various setting switching units according to the potential state of the setting switching electrodes 18 and 19.

  Here, FIG. 18 shows an example of setting switching of the setting switching unit by the combination of ON / OFF of each switch electrode. 18 is an example in which setting switching of the amplitude gain setting switching unit 52, the division number setting switching unit 54, and the signal output setting switching unit 56 is performed by turning ON / OFF the setting switching electrodes 18 and 19. The ON of the electrode SW is set to the V potential, and the OFF is set to the GND potential. If there are two switch electrodes SW, a total of four types of setting switching are possible.

  Here, for example, when SW1 and SW2 are both OFF and in the GND potential state, the switching circuit 59 is configured with a switch potential for selecting the AB phase analog signal in the inspection mode from the switching circuit 59 to the amplitude amplification factor setting switching unit 52, and the signal If the switching circuit 59 is configured with a logic circuit that sends a switch potential for selecting an AB phase analog signal to the output setting switching unit 56, an AB phase analog signal in the inspection mode is output from the sensor head. Also, when SW1 is in the V potential state and SW2 is in the GND potential state, the AB circuit in the low resolution mode in which the AB phase analog signal is simply binarized from the switching circuit 59 to the division number setting switching unit 54. A logic circuit that sends a switch potential for selecting a digital signal is configured in the switching circuit 59, and a logic circuit that sends a switch potential for selecting the AB phase digital signal is configured in the switching circuit 59 in the signal output setting switching unit 56. For example, an AB phase digital signal in the low resolution mode is output from the sensor head. Similarly, when SW1 and SW2 are both on and in the V potential state, a logic circuit that outputs the AB phase analog signal in the normal mode from the sensor head is used. When SW1 is off and the GND potential state is on, and when SW2 is on, the sensor is on the V potential state. A logic circuit that outputs an AB phase digital signal in the high resolution mode from the head may be configured in the switching circuit 59.

  Here, for example, a semiconductor analog switch may be formed in the amplitude amplification factor setting switching unit 52, the signal output setting switching unit 56, and the division number setting switching unit 54. If there are three switch electrodes SW, eight types of setting switching can be performed.

  As described above, according to the sixth embodiment, various types of AB phase analog signals, various types of AB phase digital signals, various types of single phase digital signals, and analog or digital reference position signals can be obtained with one type of sensor head. Since the signal can be output from the sensor head in various signal output modes such as those described above, a large number of position information output devices 7 or control devices 8 having different signal input specifications can be handled by one type of sensor head. Further, since the IC 11 can be easily reduced in cost by mass production and can be reduced in size, a low-cost and small sensor head can be obtained.

  Further, the offset can be reduced as much as possible by the offset setting switching unit 51, and the interpolation accuracy in the interpolation division circuit 45 is improved, so that a more accurate sensor head can be obtained.

  Furthermore, the amplitude can be easily changed by the amplitude amplification factor setting switching unit 52 between the shipping inspection mode and the normal mode of the sensor head. As a result, if the inspection is performed in the inspection mode in which the standard width is narrower than the AB phase analog amplitude standard, trouble due to AB phase amplitude abnormality in the normal mode can be prevented.

  Here, naturally, various modifications and changes can be made to each configuration of the sixth embodiment. For example, the sixth embodiment can be variously modified and changed similarly to the third embodiment. Further, the electrical connection between the setting switching electrodes 18 and 19 of the IC 11 and the switch electrodes SW1 and SW2 is not limited to wires, and may be performed using a conductive adhesive or the like using silver paste or the like.

[Seventh Embodiment]
Next, a seventh embodiment of the present invention will be described. 19 shows an IC 20 in which the light source 9, the light source driving circuit 10, the sensor 3, various signal processing circuits, and various setting switching units (including the light output setting switching unit 58 of the light source) shown in FIG. The outline of the sensor head including the package 21 is shown.

  Here, the configurations of the scale 1 and the position information output device 7 are the same as those of the first embodiment, and the signal flow from the sensor 3 is the same as that of the second embodiment, so the description thereof is omitted here.

  That is, the encoder of the seventh embodiment is an optical encoder having the light source 9 in the sensor head. Therefore, the sensor 3 is a light detection sensor, and an optical pattern having a predetermined period is formed on the scale 1. Here, in the seventh embodiment, it is possible to switch the light output of the light source 9 according to the amplitude specification of the AB phase analog signal. For example, if the amplitude of the AB phase analog signal may be small, the life of the light source 9 can be extended by keeping the light output of the light source 9 low. The light source 9 here also includes a light emitting element such as a light emitting diode (LED) or a laser diode (LD). That is, the light source 9 used in the seventh embodiment may be anything as long as it can form an image corresponding to the periodic optical pattern of the scale 1 on the sensor 3.

  Here, the connection between the package electrode 16 and the extraction electrode, the switching method of the potential of the setting switching electrode, and the like are in accordance with the fifth or sixth embodiment described above.

  As described above, according to the seventh embodiment, in addition to obtaining the same effects as those of the third to sixth embodiments, the light output setting switching unit 58 of the light source is provided, so that the light source The effect of prolonging the service life is obtained.

  Here, as a matter of course, each configuration of the seventh embodiment can be variously modified and changed. For example, in the seventh embodiment, various modifications and changes similar to those in the third to sixth embodiments are possible. Further, in the seventh embodiment, output switching in the light output setting switching unit 58 of the light source is automated, and auto power control is performed in which the light intensity input to the light detection sensor is always constant or the analog signal amplitude is always constant. As a result, the light intensity entering the light detection sensor can be kept constant or the analog signal amplitude can be kept constant, and a highly accurate optical encoder can be obtained by stabilizing the encoder signal.

  Although the present invention has been described based on the above embodiments, the present invention is not limited to the above-described embodiments, and various modifications and applications are naturally possible within the scope of the gist of the present invention.

  Further, the above-described embodiments include various stages of the invention, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements. For example, even if some constituent requirements are deleted from all the constituent requirements shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and the effect described in the column of the effect of the invention Can be extracted as an invention.

  DESCRIPTION OF SYMBOLS 1 ... Scale, 2 ... Sensor head, 3 ... Sensor, 4 ... Signal processing part, 5 ... Setting switching part, 7 ... Position information output device, 8 ... Control apparatus, 9 ... Light source, 10 ... Light source drive circuit, 11, 20 ... IC, 12 ... Lead electrode, 13 ... Integration unit, 14 ... Signal output setting switching electrode, 15 ... Reference position analog / digital setting switching electrode, 16 ... Package electrode, 16a ... External wiring, 17 ... Wire, 18, 19 ... Setting switching electrode, 41 ... analog signal processing circuit, 42 ... offset adjustment circuit, 43 ... gain adjustment circuit, 44 ... digital signal processing circuit, 45 ... interpolation division circuit, 46 ... serialization circuit, 47 ... digital reference position signal 51 ... offset setting switching unit, 52 ... amplitude gain setting switching unit, 53 ... hysteresis setting switching unit, 54 ... divided number setting switching unit, 55 ... signal output response speed band setting Replacement part, 56 ... signal output setting switching unit, 57 ... reference position analog / digital setup switching unit, 58 ... optical output setting switching portion of the light source, 59 ... switching circuit

Claims (11)

A sensor head and a scale on which a pattern of a predetermined cycle is formed. An output signal is generated based on a plurality of analog signals according to relative displacement between the scale and the sensor head, and the sensor head In the output encoder,
The sensor head is
A sensor that outputs a plurality of analog signals according to the relative displacement;
A signal processing unit that performs predetermined signal processing based on the plurality of analog signals;
A setting switching unit that performs setting switching related to the output signal or signal processing by switching a connection configuration via a plurality of electrodes or wires provided in advance corresponding to the signal specification or processing specification of the output destination of the output signal;
Have
The encoder characterized in that the signal processing unit and the setting switching unit are configured as one integrated circuit and integrated with the sensor. The plurality of electrodes include a plurality of switch electrodes for setting switching,
2. The encoder according to claim 1, wherein the setting switching unit collectively performs the plurality of types of setting switching by switching one of the plurality of switch electrodes. The signal processor is
An analog signal processing circuit that processes a plurality of analog signals corresponding to the relative displacement output from the sensor;
A digital signal processing circuit that is connected in parallel with the analog signal processing circuit and that processes the plurality of analog signals output from the sensor to generate digital signals of a plurality of different output formats;
The setting switching unit is configured to select a signal to be output from among an analog signal signal-processed by the analog signal processing circuit and a plurality of digital signals of different output formats signal-processed by the digital signal processing circuit; The setting switching for adjusting the plurality of analog signals to be processed and the setting switching for switching the output format of the digital signal are collectively performed by switching the one switch electrode. The encoder according to 2. The analog signal processing circuit includes an offset setting switching unit that switches setting of offsets of the plurality of analog signals, and an amplitude amplification factor setting switching unit that switches amplification factors of the amplitudes of the plurality of analog signals as the setting switching unit. Have
The digital signal processing circuit includes a hysteresis setting switching unit that switches a setting of a width of a hysteresis applied to a threshold voltage when the digital signal is generated from the plurality of analog signals, and the digital signal from the plurality of analog signals. A division number setting switching unit that switches the number of divisions during the interpolation division process when generating, as the setting switching unit,
The sensor head includes a signal output response speed band setting switching unit that switches setting of response speed bands of a plurality of analog signals output from the analog signal processing circuit and digital signals output from the digital signal processing circuit. Have as part
By switching the one switch electrode, the offset setting switching unit, the amplitude amplification factor setting switching unit, the hysteresis setting switching unit, the division number setting switching unit, and the signal output response speed band setting switching unit are included. The encoder according to claim 3, wherein at least two or more of the switching are collectively performed. A light source;
A light source driving circuit having a light output setting switching unit for switching setting of light output of the light source as the setting switching unit;
Further comprising
The signal processing unit includes a digital signal processing circuit that generates a plurality of digital signals by performing signal processing on the plurality of analog signals output from the sensor,
The digital signal processing circuit has, as the setting switching unit, a division number setting switching unit that switches a division number in the interpolation division process when generating the digital signal from the plurality of analog signals.
When outputting a low-resolution digital signal from the digital signal processing circuit, the division number in the division number setting switching unit is set low, and the light output in the light output setting switching unit is set small. When a high-resolution digital signal is output from a processing circuit, the division number in the division number setting switching unit is set high, and the light output in the light output setting switching unit is set large. Item 3. The encoder according to item 2.   The encoder according to claim 1, wherein the setting switching includes a setting switching that can be set by a user and a setting switching that cannot be set by the user.   7. The encoder according to claim 6, wherein the setting switching that cannot be set by the user includes setting switching used for inspection and setting switching for adjusting characteristics of the encoder.   The encoder according to claim 6 or 7, wherein setting information of the setting switching unit is stored in a nonvolatile memory integrated with the integrated circuit. One of the analog signal and the digital signal of at least one multiplication number can be output as an output signal by switching,
The encoder according to claim 1, wherein the setting switching unit performs setting switching for adjusting the analog signal. A light source and a light source driving circuit having a light output setting switching unit that performs setting switching of light output of the light source as the setting switching unit are disposed in the same IC package as the encoder,
The encoder according to claim 1, wherein the amplitude of the analog signal is switched by the light output setting switching unit. The light receiving surface of the sensor and the light emitting surface of the light source are parallel to the bottom surface of the IC package, and the light receiving surface of the sensor and the light source are arranged adjacent to each other in the IC package. The encoder according to claim 10 .

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