JP5854385B2 - Silicone polymer - Google Patents

Description

  The present invention relates to a silicone copolymer useful as a heat resistant material for electronic parts such as liquid crystal display elements and semiconductor elements.

  In recent years, as electronic materials used for electronic components such as liquid crystal display elements and semiconductor elements, high transparency that is highly transmissive with visible light, heat resistance and resistance to withstand various processing steps when manufacturing elements. There is an increasing need for resins that have properties such as chemical properties and crack resistance. For example, a wiring used as a conductive portion of a semiconductor generates a high heat due to an increase in current that flows due to high functionality and high density in recent years. Therefore, the insulating film used in the process is required to be more heat resistant, and a high heat resistant material capable of forming a film at 500 ° C. or higher is required. Among them, silicone resins having a silsesquioxane skeleton are particularly excellent in heat resistance, and have been widely used by utilizing these characteristics.

  On the other hand, the flatness of the film surface is important in LSI production, and a film that does not crack on the film surface after film formation by heating is required. For example, in a multilayer wiring process of LSI manufacturing, if a film formed by heating has cracks, when a film is formed on it, a newly formed film is not uniform and a nonuniform film is formed. There is a possibility. When the film thus formed is exposed to light, irregular reflection or scattering of light occurs near the non-uniform film interface, and a uniform pattern cannot be formed. Thus, since cracks on the film surface often affect film characteristics such as optical characteristics and mechanical characteristics, a film that does not normally crack is required.

  For example, the crack resistance of a cured film obtained by dissolving a general silicone composition synthesized with a phenyl group or methyl group in a solvent and heating and curing at 400 ° C. is evaluated. Therefore, it is difficult to adapt to a process used at a high temperature of 500 ° C. or higher (see Patent Document 1).

  In order to improve heat resistance, heat resistance is improved by using a material containing a cage-shaped silsesquioxane structure, but film formation is not performed only at a temperature of about 350 ° C. It is not known whether or not it has the heat resistance, and the structure is complicated and industrialization is difficult, so that it cannot be applied to mass production (see Patent Document 2).

  On the other hand, a silicone copolymer having a hydroxyl group in its side chain, such as a phenol group, is used as a chemically amplified resist material because the resin itself dissolves in an alkaline aqueous solution such as sodium hydroxide (patent) References 3 and 4).

  Since this silicone copolymer having a phenol group can also be used as a resist material, it is presumed that the material has excellent heat resistance, but there is no example of evaluating the characteristics at a high temperature of 300 ° C. or higher. Heat resistance is unknown. In addition, in the material in which the hydroxyl group of phenol is protected with an alkyl group such as a methyl group, the thermal characteristics have not been evaluated, and thus the thermal characteristics of the material could not be understood.

  From the above, a new silicone material that can be formed at a temperature of 500 ° C. or higher, has high transparency, and does not crack in the obtained film has been demanded.

JP 2007-238848 A JP 2006-45516 A Japanese Patent Laid-Open No. 9-274319 JP-A-8-334901

  The present invention is a silicone material that can be formed at a temperature of 500 ° C. or higher, has high transparency, does not crack in the obtained film, and has high heat resistance and high solvent resistance. It was made for the purpose of providing a novel silicone copolymer that can be formed.

  The present invention provides a general formula

(In the formula, A represents a methylene group, B represents a methyl group, R represents a hydrocarbon group, a and b represent mol%, a represents 30 to 100 mol%, and b represents 0 to 70 mol%. A + b = 100, n is 1 or 2.)
And a silicone polymer having a plurality of peaks obtained by gel permeation chromatography measurement.

  The silicone copolymer of the present invention is in close contact with the substrate even after being heated at 500 ° C. or higher after spin coating on a substrate such as a silicon wafer, and has high crack resistance and high heat resistance. It becomes an excellent material.

  In addition, since the silicone copolymer of the present invention is a material having good transparency in the visible light wavelength, and excellent adhesion and crack resistance, it can be used for electronic parts such as liquid crystal display elements and semiconductor elements and after firing. Since it has high crack resistance, it can be used as a high heat resistant material such as a solar cell.

  Further, the silicone copolymer of the present invention can be applied not only to the electronic field but also to a wide range of fields such as paints and adhesives.

2 is a measurement result of gel permeation chromatography of Example 1. 2 is a measurement result of gel permeation chromatography of Example 1. It was divided at the inflection point to show the number of peaks. 6 is a measurement result of gel permeation chromatography of Example 5. 6 is a measurement result of gel permeation chromatography of Example 5. It was divided at the inflection point to show the number of peaks. 4 is a measurement result of gel permeation chromatography of Comparative Example 1. 4 is a measurement result of gel permeation chromatography of Comparative Example 2.

  The present invention provides a general formula

(In the formula, A represents a methylene group, B represents a methyl group, R represents a hydrocarbon group, a and b represent mol%, a represents 30 to 100 mol%, and b represents 0 to 70 mol%. A + b = 100, n is 1 or 2.)
Having a repeating unit represented by
It is a silicone polymer having a plurality of peaks obtained by measurement by gel permeation chromatography.

  The following structure of the silicone copolymer of the present invention

Represents a silsesquioxane skeleton, wherein each silicon atom is bonded to three oxygen atoms, and each oxygen atom is bonded to two silicon atoms. The silsesquioxane skeleton has, for example, the following general formula

It can be shown by the structural formula shown in

The silicone polymers of the present invention, A is main styrene group.

The silicone polymers of the present invention, B is a methyltransferase group.

  R represents a hydrocarbon group. When R is a hydrocarbon group, it becomes difficult to color the heat-cured film when a film is formed by heating the silicone copolymer.

  A preferred hydrocarbon group is a linear hydrocarbon group having 1 to 20 carbon atoms, a branched hydrocarbon group, or a cyclic hydrocarbon group. As the linear hydrocarbon group having 1 to 20 carbon atoms, a methyl group, Examples thereof include hydrocarbon groups such as an ethyl group, an n-propyl group, an n-butyl group, and an n-pentyl group. As the branched hydrocarbon group, a hydrocarbon group such as isopropyl group and isobutyl group is preferable. As the cyclic hydrocarbon group, a cyclic hydrocarbon group such as a cyclopentyl group, a cyclohexyl group, or a cycloheptyl group is preferable, and a bridged hydrocarbon group having a norbornane skeleton is also preferable. Among these hydrocarbon groups, hydrocarbon groups having 1 to 5 carbon atoms such as a methyl group, an ethyl group, and a propyl group improve the silicon content of the entire silicone copolymer. It is more preferable from the viewpoint of improvement, and a methyl group is more preferable from the viewpoint of availability of raw materials.

  R is preferably a phenyl group, a benzyl group, a phenethyl group, a phenylpropyl group, a diphenylmethyl group, a cinnamyl group, a styryl group, a trityl group, a substituent having a benzene ring and a hydrocarbon group, or a toluyl group. And an aromatic hydrocarbon group having a substituent bonded to a benzene ring, such as a cumenyl group, a mesyl group, or a xylyl group. A substituent may be bonded to the benzene ring such as a 4-methylphenylethyl group, a 4-methylphenylpropyl group, or a 2,4-dimethylphenylethyl group. An aromatic hydrocarbon group is more preferable because it can improve the heat resistance of the resin. When there is no substituent between the aromatic ring and the silicon atom, the glass transition temperature is generally lower and the heat resistance may be worse than when there is a substituent. Group, cumenyl group, mesyl group, xylyl group and other aromatic hydrocarbon groups are particularly preferred, and generally easily available phenyl groups are more preferred.

  In the silicone polymer of the present invention, the general formula

(In the formula, A represents a methylene group, B represents a methyl group, R represents a hydrocarbon group, a and b represent mol%, a represents 30 to 100 mol%, and b represents 0 to 70 mol%. A + b = 100.)
In the above, n represents an integer of 1 or 2, and n = 1 is preferable from the viewpoint of obtaining raw materials.

  The component a represents an alkoxyphenyl unit and is a unit that suppresses cracks in the heat-cured film, and a represents 30 to 100 mol%. R of b component is a site | part which improves the characteristic of a silicone copolymer, and is a unit which improves body heat property or improves a silicon content rate, b shows 0-70 mol%. In the silicone polymer of the present invention, a + b = 100.

  a is preferably 30 to 90 mol%, more preferably 50 to 90 mol%, and still more preferably 70 to 90 mol%. b is preferably 10 to 70 mol%, preferably 10 to 50 mol%, and more preferably 10 to 30 mol%.

  The silicone polymer of the present invention preferably has the following general formula

(In the formula, A represents a methylene group, B represents a methyl group, and n represents 1 or 2)
It is a silicone polymer which consists only of structural units shown.

  The silicone polymer of the present invention is a silicone polymer having a plurality of peaks obtained by measurement by gel permeation chromatography. Gel permeation chromatography is often abbreviated as GPC. This analysis uses an analytical column that can separate polymers according to the size of the molecule, and uses Tosoh's HLC-8220GPC system, and Tosoh's TSKgel SuperHZ3000, TSKgel SuperHZ2000, and TSKgel1000 are connected in series for analysis. Detection is performed by RI, and one TSKgelSuperH-RC is used as a reference column. Tetrahydrofuran manufactured by Wako Pure Chemicals is used as the developing solvent, and the flow rate between the column and the reference column is 0.35 mL / min. The measurement temperature is 40 ° C. for both the plunger pump and the column. The sample is prepared by setting 1 μL of about 0.025 g of a silicone polymer diluted with 10 mL of tetrahydrofuran. For molecular weight distribution calculation, Tosoh's TSK standard polystyrene (A-500, A-1000, A-2500, A-5000, F-1, F-2, F-4, F-10, F-20, F- 40, F-80) as a standard substance.

  The silicone polymer having a plurality of peaks obtained by the gel permeation chromatography measurement of the present invention is a silicone polymer having a plurality of peaks obtained by separating the molecular weight distribution region at the inflection point, and a silicone having two or more peaks. A polymer is shown. When the molecular weight distribution is high, the number of peaks obtained is large, but since the polymer has a high degree of dispersion, characteristics may not be obtained. Therefore, the number of peaks is preferably 2 to 10, and more preferably 2 to 5.

  Since gel permeation chromatography is a peak that appears by distinguishing the size of a molecule, the presence of a plurality of peaks usually indicates that the silicone polymer of the present invention has a plurality of molecular three-dimensional structures.

  In the silicone polymer of the present invention, the following cage structure may be included in the three-dimensional structure of the molecule. Typical saddle type structure is the following general formula

(In the formula, R represents a general organic group)
A T8 structure having eight silicon atoms represented by the following general formula:

(In the formula, R represents a general organic group)
A T10 structure having 10 silicon atoms represented by the following general formula:

(In the formula, R represents a general organic group)
The T12 structure which has 12 silicon atoms shown by these is mentioned. These structures are not fully condensed, but have a partial Si-OH residue.

(In the formula, R represents a general organic group)
Is also included.

  The silicone polymer of the present invention generally has, for example, the following general formula:

(In the formula, X represents a hydrolyzable group, and n represents 1 to 3.)
And the following general formula

(In the formula, X represents a hydrolyzable group, and n represents 1 to 3.)
As described above, it is synthesized from two reactions of a hydrolysis reaction and a polycondensation reaction. Unlike general radical condensation, the degree of polymerization can be controlled from the monomers used and reaction conditions.

  The silicone copolymer of the present invention preferably has a weight average molecular weight (in terms of polystyrene) in the range of 500 to 20,000, more preferably 1,000 to 20,000, and 1,000 to 8. More preferred is in the range of 1,000. The silicone copolymer of the present invention preferably has a dispersity in the range of 1.1 to 2.5, and more preferably in the range of 1.1 to 1.8.

  The silicone polymer of the present invention is preferably soluble in an organic solvent, and is a ketone solvent such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, methylcyclohexanone, methanol, ethanol, isopropanol, n-butanol, cyclohexanol, etc. Alcohol solvents, aromatic hydrocarbon solvents such as benzene, toluene, xylene, ester solvents such as methyl acetate, ethyl acetate, butyl acetate, ethyl lactate, ether solvents such as diethyl ether, dibutyl ether, tetrahydrofuran, acetonitrile, benzonitrile, etc. Soluble in glycol solvents such as nitrile solvents, propylene glycol dimethyl ether, propylene glycol diethyl ether, propylene glycol monomethyl ether acetate, etc. For example, when dissolved in an organic solvent such as propylene glycol monomethyl ether acetate, a silicone copolymer dissolved in an organic solvent can be spin-coated on a silicon wafer or glass substrate to adjust the film thickness on the substrate. It is particularly preferable to dissolve in a solvent having a high boiling point because a flat and dense film can be formed.

  The silicone copolymer of the present invention preferably has the following general formula

(In the formula, A represents a methylene group, B represents a methyl group, X represents a hydrolyzable group, and n represents 1 or 2)
Can be synthesized by hydrolysis and condensation polymerization.

  Here, X represents a hydrolyzable group, preferably a halogen atom of chlorine, bromine or iodine, or an alkoxy group such as a methoxy group, an ethoxy group, a propoxy group or a butoxy group, particularly a chlorine atom, a methoxy group or an ethoxy group. Is particularly preferred because of the availability of raw materials and high reactivity.

  This hydrolysis and polycondensation reaction is carried out using water, but it is usually preferred to carry out by adding a catalyst. In this case, although both an acidic catalyst and a basic catalyst can be used, it is preferable that the number of terminal silanols is small in view of control of molecular weight distribution and heat resistance of the resin, and basic catalysts are more preferable for hydrolysis and polycondensation reactions. As the basic catalyst, inorganic basic catalysts, quaternary ammonium salts and amines are preferable. Examples of the inorganic basic catalyst include sodium hydroxide and potassium hydroxide. The quaternary ammonium salts include tetrabutylammonium fluoride, benzyltributylammonium chloride, benzyltriethylammonium chloride, benzyltrimethylammonium chloride, tetra n-butylammonium chloride, tetraethylammonium chloride, tetramethylammonium chloride, benzyltrin-butylammonium. Bromide, benzyltriethylammonium bromide, benzyltrimethylammonium bromide, n-octyltrimethylammonium bromide, hexyltrimethylammonium bromide, tetrabutylammonium bromide, tetraethylammonium bromide, tetradecyltrimethylammonium bromide, tetramethylammonium Romide, tetra-n-propylammonium bromide, tetrabutylammonium iodide, tetraethylammonium iodide, tetramethylammonium iodide, tetra-n-propylammonium iodide, trimethylphenylammonium iodide, benzyltrimethylammonium hydroxide, phenyltrimethylammonium hydroxy Tetrabutylammonium hydroxide, tetraethylammonium hydroxide, tetramethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydrogen sulfate, tetrabutylammonium tetrafluoroborate, tetramethylammonium thiocyanate, tetramethylammonium p- G Such as Enns Gandolfo sulfonate, and the like. Examples of amines include trimethylamine, triethylamine, pyridine, N, N-dimethylaminopyridine and the like.

  Among these, considering molecular weight control, quaternary ammonium salts are preferable, among which benzyltributylammonium chloride, benzyltrimethylammonium chloride, tetra n-butylammonium chloride, tetramethylammonium chloride, benzyltrin-butylammonium bromide, Benzyltrimethylammonium bromide, hexyltrimethylammonium bromide, tetrabutylammonium bromide, tetradecyltrimethylammonium bromide, tetramethylammonium bromide, benzyltrimethylammonium hydroxide, phenyltrimethylammonium hydroxide, tetrabutylammonium hydroxide, tetraethylammonium hydroxide, tetra Methyl Nmo onium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydrogensulfate sulfate, tetrabutylammonium tetrafluoroborate, tetramethylammonium thiocyanate, tetramethylammonium p- toluenesulfonate is particularly preferred. Furthermore, tetramethylammonium hydroxide capable of controlling the hydrolysis rate of the monomer with a strong base is most preferable.

  The amount of the catalyst used is preferably 0.001 to 1.0 equivalent, more preferably 0.01 to 0.5 equivalent, relative to the number of moles of the raw material monomer.

  As the hydrolysis and polycondensation conditions, a reaction temperature of 0 to 100 ° C. is preferable, and the reaction proceeds easily by using a catalyst, and 20 to 50 ° C. is more preferable.

  Water is necessary for the hydrolysis and polycondensation reaction, but it is preferably used in an amount of 0.1 to 20 equivalents, particularly preferably 0.5 to 1 equivalent, based on the number of moles of the raw material monomer.

  In this reaction, an organic solvent is preferably used. Examples of the organic solvent include aprotic solvents such as toluene and xylene, ketone solvents such as methyl ethyl ketone and methyl isobutyl ketone, and alcohol solvents such as methanol, ethanol and 2-propanol. , Ether solvents such as diethyl ether and tetrahydrofuran, and the like can be used. Moreover, since the obtained siloxane resin is dissolved in a high-boiling solvent such as propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, diethylene glycol monomethyl ether, or ethyl lactate, it may be used as it is as a reaction solvent. When an aprotic solvent is used, it is presumed that the hydrolysis reaction is slowed because it is not mixed with water. In such a case, it is desirable to add a water-soluble alcohol solvent to cause the hydrolysis reaction.

  After completion of the reaction, a non-polar solvent is added to separate the reaction product and water, and the reaction product dissolved in an organic solvent is recovered. After washing with water, the solvent is distilled off to obtain the desired product. Can be obtained.

  In this way, the silicone copolymer of the present invention can be synthesized.

  Hereinafter, the present invention will be specifically described with reference to examples.

  In the following examples, the following apparatus was used for the measurement, and general reagents purchased from reagent manufacturers (Tokyo Chemicals, Wako Pure Chemicals, Nacalai Tesque, Azmax, Shin-Etsu Chemical) were used as raw materials.

Measuring device NMR measurement
A 400 MHz NMR measuring instrument manufactured by JEOL was used. About 20 to 30 mg of the synthesized compound was dissolved in about 1 g of CDCl3 (tetramethylsilane (abbreviated as TMS) internal standard 0.5% w / w) manufactured by Wako Pure Chemical Industries, and the total amount of the solution was transferred to an NMR tube. Measurement was performed with auto-lock and the number of integrations was 16 times. The TMS peak was analyzed as the standard 0 ppm.

IR measurement
Shimadzu IR Prestige-21 was used. A small amount of the synthesized product was applied to the KBr plate, and sandwiched between different KBr plates to transmit infrared light.

GC measurement Shimadzu GC-2010 series was used. In the GC-2010 series manufactured by Shimadzu, DB-5 (length 30 m × film thickness 0.5 mm I.D.) manufactured by J & W was used as the column. Measurement conditions are inlet temperature: 250 ° C., detector temperature: 300 ° C., column temperature: 50 ° C. (2 min hold), then 10 ° C./min up, and then 300 μC (2 min hold) and 0.1 μm directly. Purity was calculated by the implantation Area ratio.

GPC measurement
Using the Tosoh HLC-8220GPC system, Tosoh TSKgel SuperHZ3000, TSKgel SuperHZ2000, and TSKgel1000 were connected in series for analysis. Detection was performed by RI, and one TSKgelSuperH-RC was used as a reference column. Tetrahydrofuran manufactured by Wako Pure Chemicals was used as the developing solvent, and the flow rate between the column and the reference column was 0.35 mL / min. The measurement temperature was 40 ° C. for both the plunger pump and the column. The sample was prepared by setting 1 μL of about 0.025 g of a silicone polymer diluted with 10 mL of tetrahydrofuran. For molecular weight distribution calculation, Tosoh's TSK standard polystyrene (A-500, A-1000, A-2500, A-5000, F-1, F-2, F-4, F-10, F-20, F- 40, F-80) as a standard substance.

Synthesis example 1
Synthesis example of 4-methoxybenzyltrimethoxysilane To a 500 mL four-necked flask equipped with a stirrer, reflux condenser, dropping funnel and thermometer, 19.0 g (0.784 mol) of magnesium and 300 mL of tetrahydrofuran were added, and the iodine side was adjusted. added. A small amount of 4-methoxybenzyl chloride was added dropwise thereto to start the reaction, and then a total of 116.9 g (0.746 mol) of 4-methoxybenzyl chloride was added dropwise at 5 to 10 ° C. to prepare a Grignard reagent.

  Next, 568 g (3.73 mol) of normal methyl silicate was charged into a 1000 mL four-necked flask equipped with a stirrer, a reflux condenser, a dropping funnel, and a thermometer, and 2 Grignard reagents previously adjusted at a temperature of 70 to 80 ° C. It was added dropwise over time. After cooling and filtering the precipitated magnesium salt, the solvent was distilled off, and 122 g (0.495 mol) of a 128-135 ° C. fraction was recovered at a reduced pressure of 5 mmHg. As a result of GC analysis of the obtained fraction, GC purity was 98.8%, and NMR and IR analysis revealed that it was 4-methoxybenzyltrimethoxysilane.

  The spectrum data of the obtained compound is shown below.

Infrared absorption spectrum (IR) data
2839,2941cm ^-1 (-CH3, Ar), 1080cm ^-1 (Si-O)
Nuclear magnetic resonance spectra (NMR) data ⁽¹ H-NMR solvent: CDCl?)
2.15 (s, 2H, -CH2-), 3.52 (s, 9H, -OCH3), 3.76 (s, 3H, CH3-O-), 6.78-6.80 (d, J = 8.5Hz, 2H, Ar-H) 7.07-7.09 (d, J = 8.5 Hz, 2H, Ar—H) ppm.

Example 1
Synthesis of 4-methoxybenzylsilsesquioxane with three peaks obtained by gel permeation chromatography measurement

  A 500 mL four-necked flask equipped with a stirrer, reflux condenser, dropping funnel and thermometer was charged with 2.6 g of 25% tetramethylammonium hydroxide aqueous solution and 9.4 g of water, and 60 mL of 2-propanol and 30 mL of toluene were added. It was. Thereto, a 30 mL solution of 4-methoxybenzyltrimethoxysilane in 59.2 g (0.244 mol) in toluene was placed in a dropping funnel and added dropwise at a temperature of 35 to 45 ° C. with stirring. After completion of the dropwise addition, the mixture was aged for 2 hours, cooled to room temperature, and extracted with 90 mL of toluene and 90 mL of water. After putting into the separatory funnel and discharging the aqueous layer, it was washed with dilute acetic acid aqueous solution, and after discharging the aqueous layer, it was washed with water four times. Thereafter, the oil layer was filtered with a 0.5 μm PTFE filter, and then toluene was distilled off to obtain 46.8 g of cage-shaped 4-methoxybenzylsilsesquioxane.

  The spectrum data of the obtained copolymer is shown below.

Infrared absorption spectrum (IR) data
1038-1296cm ^-1 (Si-O), 2833-3030 cm ^-1 (CH), 3410 cm ^-1 (Si-OH)
Nuclear magnetic resonance spectrum (NMR) data ( ¹ H-NMR δ (ppm), solvent: CDCl ₃ )
1.78 (bs, 2H, -CH2-), 3.68 (bs, 3H, CH3-O-), 6.72 (bs, 4H, Ar-H) ppm.

GPC analysis data: Mw = 2,320, Mn = 2,050, Mw / Mn = 1.13 (polystyrene conversion)
1 and 2 show the measurement results of gel permeation chromatography of Example 1. FIG. In the figure, ◯ indicates a calibration curve measured with polystyrene, and the rightmost ◯ indicates a weight average molecular weight (Mw) 500. The peak in between is the peak of the silicone copolymer. In FIG. 2, it was divided at the inflection point to show the number of peaks. There were two inflection points and the number of peaks was three.

Example 2
Synthesis of 4-methoxybenzylsilsesquioxane / phenylsilsesquioxane copolymer having three peaks obtained by gel permeation chromatography

(70:30 indicates the charged molar composition ratio of raw materials)
A 500 mL four-necked flask equipped with a stirrer, reflux condenser, dropping funnel and thermometer was charged with 2.1 g of 25% tetramethylammonium hydroxide aqueous solution and 7.5 g of water, and 60 mL of 2-propanol and 30 mL of toluene were added. It was. A solution of 47.4 g (0.195 mol) of 4-methoxybenzyltrimethoxysilane and 16.6 g (0.084 mol) of phenyltrimethoxysilane in 30 mL of toluene was placed in a dropping funnel and stirred at a temperature of 35 to 45 ° C. It was dripped at. After completion of the dropping, the mixture was aged for 2 hours and purified by the extraction method described in Example 1 to obtain 45.0 g of a cage-shaped 4-methoxybenzylsilsesquioxane / phenylsilsesquioxane copolymer.

  The spectrum data of the obtained copolymer is shown below.

Infrared absorption spectrum (IR) data
1026-1132cm ^-1 (Si-O), 2970-3071 cm ^-1 (CH), 3080-3700 cm ^-1 (Si-OH)
Nuclear magnetic resonance spectrum (NMR) data ( ¹ H-NMR δ (ppm), solvent: CDCl ₃ )
1.87 (bs, 1.4H, -CH2-), 3.69 (bs, 2.1H, CH3-O-), 6.10-7.50 (m, 5H, Ar-H) ppm.

GPC analysis data: Mw = 2,800, Mn = 2,210, Mw / Mn = 1.27 (polystyrene conversion)
The number of peaks was 3 from the GPC analysis results.

Example 3
Synthesis of 4-methoxybenzylsilsesquioxane / methylsilsesquioxane copolymer having peak 3 obtained by gel permeation chromatography measurement

(70:30 indicates the charged molar composition ratio of raw materials)
The synthesis was carried out in the same manner as in Example 3, except that phenyltrimethoxysilane was replaced with 11.4 g (0.084 mol) of methyltrimethoxysilane, and cage-shaped 4-methoxybenzylsilsesquioxane / methylsilsesquito. 38.7 g of an oxane copolymer was obtained.

  The spectrum data of the obtained copolymer is shown below.

Infrared absorption spectrum (IR) data
1026-1132cm ^-1 (Si-O), 2970-3071 cm ^-1 (CH), 3080-3700 cm ^-1 (Si-OH)
Nuclear magnetic resonance spectrum (NMR) data ( ¹ H-NMR δ (ppm), solvent: CDCl ₃ )
0.10 (bs, 1.8H, CH3-Si), 1.94 (bs, 1.4H, Ar-CH2-Si), 3.71 (bs, 2.1H, CH3-O-Ar), 6.72 (bs, 2.9H, Ar-H) ) Ppm.

GPC analysis data: Mw = 3,830, Mn = 2,250, Mw-Mn = 1.70 (polystyrene conversion)
The number of peaks was 3 from the GPC analysis results.

Example 4
Synthesis of 4-methoxybenzylsilsesquioxane / n-propylsilsesquioxane copolymer having three peaks obtained by gel permeation chromatography measurement

(70:30 indicates the charged molar composition ratio of raw materials)
The synthesis was carried out in the same manner as in Example 3, except that phenyltrimethoxysilane was replaced with 13.8 g (0.084 mol) of n-propyltrimethoxysilane and cage-shaped 4-methoxybenzylsilsesquioxane / methyl 40.2g of silsesquioxane copolymer was obtained.

  The spectrum data of the obtained copolymer is shown below.

Infrared absorption spectrum (IR) data
1026-1132cm ^-1 (Si-O), 2970-3071 cm ^-1 (CH), 3080-3700 cm ^-1 (Si-OH)
Nuclear magnetic resonance spectrum (NMR) data ( ¹ H-NMR δ (ppm), solvent: CDCl ₃ )
0.43 (bs, 0.6H, -CH2-Si), 0.87 (bs, 0.9H, CH3-), 1.24 (bs, 0.6H, -CH2-), 1.86 (bs, 1.4H, Ar-CH2-Si), 3.75 (bs, 2.1H, CH3-O-), 6.71 (bs, 2.9H, Ar-H) ppm
GPC analysis data: Mw = 2,770, Mn = 1,990, Mw / Mn = 1.39 (polystyrene conversion)
The number of peaks was 3 from the GPC analysis results.

Example 5
Synthesis of 4-methoxybenzylsilsesquioxane / phenylsilsesquioxane copolymer having three peaks obtained by gel permeation chromatography

(50:50 indicates the charged molar composition ratio of raw materials)
A 500 mL four-necked flask equipped with a stirrer, reflux condenser, dropping funnel and thermometer was charged with 2.1 g of 25% tetramethylammonium hydroxide aqueous solution and 7.5 g of water, and 60 mL of 2-propanol and 30 mL of toluene were added. It was. A toluene solution of 33.9 g (0.140 mol) of 4-methoxybenzyltrimethoxysilane and 27.8 g (0.140 mol) of phenyltrimethoxysilane was placed in a dropping funnel and stirred at a temperature of 35 to 45 ° C. It was dripped at. After completion of the dropping, the mixture was aged for 2 hours and purified by the extraction method described in Example 1 to obtain 43.2 g of 4-methoxybenzylsilsesquioxane / phenylsilsesquioxane copolymer.

  The spectrum data of the obtained copolymer is shown below.

Infrared absorption spectrum (IR) data
1026-1132cm ^-1 (Si-O), 2970-3071 cm ^-1 (CH), 3080-3700 cm ^-1 (Si-OH)
Nuclear magnetic resonance spectrum (NMR) data ( ¹ H-NMR δ (ppm), solvent: CDCl ₃ )
1.87 (bs, 1.4H, -CH2-), 3.69 (bs, 2.1H, CH3-O-), 6.10-7.50 (m, 5H, Ar-H)
GPC analysis data: Mw = 2,800, Mn = 2,210, Mw / Mn = 1.27 (polystyrene conversion)
The measurement result of the gel permeation chromatography of Example 5 was shown in FIG. 3, FIG. In the figure, ◯ indicates a calibration curve measured with polystyrene, and the rightmost ◯ indicates a weight average molecular weight (Mw) 500. The peak in between is the peak of the silicone copolymer. In FIG. 4, it was divided at the inflection point to show the number of peaks. There were 4 inflection points and the number of peaks was 5.

Comparative Example 1
Synthesis of 4-methoxybenzylsilsesquioxane polymer having one peak obtained by gel permeation chromatography measurement

  A 500 mL four-necked flask equipped with a stirrer, a reflux condenser, a dropping funnel and a thermometer was charged with 3.3 g of 35% aqueous hydrochloric acid and 120 g of water, and stirring was started. Moreover, the toluene 120mL solution of 4-methoxybenzyltrimethoxysilane 78.5g (0.324 mol) was dripped at 15-20 degreeC. Thereafter, the mixture was aged for 2 hours at a temperature of 15 to 20 ° C., extracted by adding toluene, removed the aqueous layer, washed 4 times with an aqueous sodium hydrogen carbonate solution, dilute acetic acid aqueous solution and water, concentrated the oil layer to 4- 57.5 g of a methoxybenzylsilsesquioxane condensation polymer was obtained.

  The spectrum data of the obtained copolymer is shown below.

Infrared absorption spectrum (IR) data
1026-1246cm ^-1 (Si-O), 2951-3071 cm ^-1 (CH), 3165-3603 cm ^-1 (Si-OH)
Nuclear magnetic resonance spectrum (NMR) data ( ¹ H-NMR δ (ppm), solvent: CDCl ₃ )
1.83 (bs, 2H, -CH2-), 3.68 (bs, 3H, CH3-O-), 6.69 (bs, 4H, Ar-H) ppm
GPC analysis data: Mw = 2,530, Mn = 1,610, Mw / Mn = 1.57 (polystyrene conversion)
In FIG. 5, the measurement result of the gel permeation chromatography of the comparative example 1 was shown. In the figure, ◯ indicates a calibration curve measured with polystyrene, and the rightmost ◯ indicates a weight average molecular weight (Mw) 500. The peak in between is the peak of the silicone copolymer. From the GPC analysis results, it was found that there was one peak shape.

Comparative Example 2
Synthesis of 4-methoxybenzylsilsesquioxane / phenylsilsesquioxane copolymer having one peak obtained by gel permeation chromatography measurement 2000 mL4 equipped with stirrer, reflux condenser, dropping funnel and thermometer A 1-necked flask was charged with 16.9 g of 35% aqueous hydrochloric acid and 584 g of water, and stirring was started. Moreover, the toluene 700mL solution of 4-methoxybenzyltrimethoxysilane 291.3g (1.20mol) and phenyltrimethoxysilane 92.7g (0.467mol) was dripped at 15-20 degreeC. Thereafter, the mixture was aged for 2 hours at a temperature of 15 to 20 ° C., extracted by adding toluene, removed the aqueous layer, washed 4 times with an aqueous sodium hydrogen carbonate solution, dilute acetic acid aqueous solution and water, concentrated the oil layer to 4- 255 g of methoxybenzylsilsesquioxane / phenylsilsesquioxane copolymer was obtained.

  The spectrum data of the obtained copolymer is shown below.

Infrared absorption spectrum (IR) data
1026-1130cm ^-1 (Si-O), 2970-3070 cm ^-1 (CH), 3080-3700 cm ^-1 (Si-OH)
Nuclear magnetic resonance spectrum (NMR) data ( ¹ H-NMR δ (ppm), solvent: CDCl ₃ )
1.87 (bs, 1.4H, -CH2-), 3.69 (bs, 2.1H, CH3-O-), 6.10-7.50 (m, 5H, Ar-H)
GPC analysis data: Mw = 2,440, Mn = 2,190, Mw / Mn = 1.11 (polystyrene conversion)
In FIG. 6, the measurement result of the gel permeation chromatography of the comparative example 2 was shown. In the figure, ◯ indicates a calibration curve measured with polystyrene, and the rightmost ◯ indicates a weight average molecular weight (Mw) 500. The peak in between is the peak of the silicone copolymer. From the GPC analysis results, it was found that there was one peak shape.

Comparative Example 3
Synthesis of phenylsilsesquioxane / methylsilsesquioxane copolymer with one peak obtained by gel permeation chromatography

(Indicates a charged molar composition ratio of 70:30)
(50:50 in the structural formula is the molar ratio of the raw materials used)
A 500 mL four-necked flask equipped with a stirrer, a reflux condenser, a dropping funnel, and a thermometer was charged with 50.6 g of toluene and 33.4 g of water, and 3.13 g (0.03 mol) of 35% hydrochloric acid was added. . Next, a solution of 45.3 g (0.211 mol) of phenyltrimethoxysilane and 25.3 g of toluene of 12.5 g (0.091 mol) of methyltrimethoxysilane was added dropwise at 15 to 20 ° C. After completion of dropping, the mixture was aged at the same temperature for 2 hours. As a result of analyzing the reaction solution at this time by GC, it was found that no raw material remained. Next, toluene and water were added for extraction, and after washing with an aqueous sodium hydrogen carbonate solution, the solution was washed with water until the solution became neutral. The toluene oil layer was recovered, and toluene was removed to obtain 27.2 g of the target white solid compound.

  The spectrum data of the obtained copolymer is shown below.

Infrared absorption spectrum (IR) data
1028-1132cm ^-1 (Si-O), 2970-3070 cm ^-1 (CH), 3070-3700 cm ^-1 (Si-OH)
Nuclear magnetic resonance spectrum (NMR) data ( ¹ H-NMR δ (ppm), solvent: CDCl ₃ )
0.16 (bs), 7.00-7.57 (m), 7.57-7.90 (m)
GPC analysis data: Mw = 960, Mw / Mn = 1.25 (polystyrene conversion)
From the GPC analysis results, it was found that there was one peak shape.

<Evaluation of synthetic materials>
The manufactured silicone polymers of Examples 1 to 5 and Comparative Examples 1 and 2 were each dissolved in propylene glycol monomethyl ether acetate to obtain solutions adjusted to a solid content concentration of 40% by weight. . Thereafter, the solution is filtered through a PTFE (polytetrafluoroethylene) filter, and spin-coated for 30 seconds on a silicon wafer or glass substrate at a rotational speed such that the film thickness after removal of the solvent is 2.0 μm. . Thereafter, the solvent was removed over 100 ° C./30 seconds, and the film was finally baked in an electric furnace over 750 ° C./1 hour to obtain an insulating film.

[Heat-cured film properties]
The film thickness on the silicon wafer was measured with respect to the film formed by the above film forming method, and the presence or absence of cracks was confirmed. In particular, the case where no crack was generated and the film surface was glossy was rated as ◎.

<Evaluation results>
The evaluation results of the cured film and the overall evaluation based thereon are shown in Table 1 below.

  As described above, the silicone polymer having a plurality of peak shapes does not generate cracks in a cured film formed by heating at 500 ° C. or higher, and can form an excellent heating film. Therefore, the silicone copolymer of the present invention can be applied not only in the field of electronic materials but also in a wide range of fields such as paints and adhesives.

Claims (6)

The following general formula

(In the formula, A represents a methylene group, B represents a methyl group, R represents a hydrocarbon group, a and b represent mol%, a represents 30 to 100 mol%, and b represents 0 to 70 mol%. A + b = 100, n is 1 or 2.)
The silicone polymer which has the repeating unit shown by and has several peaks obtained by the measurement of a gel permeation chromatography. The silicone copolymer according to claim 1, wherein a is 30 to 90 mol%, b is 10 to 70 mol%, and a + b = 100. The following general formula

(In the formula, A represents a methylene group, B represents a methyl group, and n represents 1 or 2)
The silicone polymer according to claim 1, comprising only a structural unit represented by: The silicone polymer according to any one of claims 1 to 3, wherein a peak obtained by measurement by gel permeation chromatography is 3 or more. General formula

Is the general formula

The silicone copolymer according to any one of claims 1 to 4. The silicone copolymer according to any one of claims 1 to 5, having a weight average molecular weight of 1,000 to 20,000.

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