JP5839852B2 - 垂直型発光素子及びその製造方法 - Google Patents
垂直型発光素子及びその製造方法 Download PDFInfo
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- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18322—Position of the structure
- H01S5/18327—Structure being part of a DBR
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- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18341—Intra-cavity contacts
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- H—ELECTRICITY
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- H01S2301/00—Functional characteristics
- H01S2301/02—ASE (amplified spontaneous emission), noise; Reduction thereof
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- H—ELECTRICITY
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/16—Semiconductor lasers with special structural design to influence the modes, e.g. specific multimode
- H01S2301/166—Single transverse or lateral mode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18311—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement using selective oxidation
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- H—ELECTRICITY
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18322—Position of the structure
- H01S5/1833—Position of the structure with more than one structure
- H01S5/18333—Position of the structure with more than one structure only above the active layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18358—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] containing spacer layers to adjust the phase of the light wave in the cavity
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18361—Structure of the reflectors, e.g. hybrid mirrors
- H01S5/18369—Structure of the reflectors, e.g. hybrid mirrors based on dielectric materials
Description
特許文献1 特開2003−332683号公報
Claims (10)
- 垂直型発光素子であって、
互いに対向して形成され、光を共振させる下側多層反射膜および上側多層反射膜と、
前記上側多層反射膜の下に形成され、前記上側多層反射膜と異なる組成の層を含み、傾斜した側面を有する中間層と、
前記光の共振方向と平行な断面において前記中間層を挟み、前記中間層の前記側面に沿って形成され、且つ、上端が前記中間層の上面よりも上側となるように形成された電極部と
を備え、
前記上側多層反射膜における各層は、前記中間層の上面と対向する位置に設けられた略平坦な平坦部と、前記平坦部を囲む突出部とを有し、
それぞれの前記平坦部の面積は、前記中間層からの距離に応じて減少し、
前記突出部の頂点を結んだ2つの線が、前記上側多層反射膜の下層から上層に向かって互いに近づくように傾斜しており、
前記中間層は、
前記上側多層反射膜と異なる組成の下側層と、
前記下側層の上に形成され、前記上側多層反射膜と同じ組成の上側層とを有し、
前記傾斜した側面は、前記下側層と、前記上側層の一部とに形成される
垂直型発光素子。 - 前記上側多層反射膜は、前記中間層を挟んで前記電極部を形成した後に、前記中間層上に積層して形成された
請求項1に記載の垂直型発光素子。 - 前記中間層、前記電極部および前記上側多層反射膜が形成されたメサポスト部を更に備え、
前記電極部の前記中間層側の端部が、前記メサポスト部の周縁側の端部よりも上方に延伸した
請求項1または2に記載の垂直型発光素子。 - 前記電極部の前記中間層側の端部は垂直方向を向いている側面を有し、
前記2つの線は前記電極部の前記垂直方向を向いている側面の頂点を通る
請求項1から3のいずれか一項に記載の垂直型発光素子。 - 前記中間層および前記下側多層反射膜の間に形成され、光を生成する活性層を更に備え、
前記電極部の前記中間層側の端部と前記活性層との距離が、前記メサポスト部の周縁側の端部と前記活性層との距離より大きい
請求項3に記載の垂直型発光素子。 - 前記電極部は、前記中間層と接して形成される
請求項1から5のいずれか一項に記載の垂直型発光素子。 - 前記中間層は、誘電体層を含む
請求項1から6のいずれか一項に記載の垂直型発光素子。 - 垂直型発光素子を製造する製造方法であって、
互いに対向して形成され、光を共振させる下側多層反射膜および上側多層反射膜を形成する段階と、
前記上側多層反射膜の下に形成され、前記上側多層反射膜と異なる組成の層を含み、傾斜した側面を有する中間層を形成する段階と、
前記光の共振方向と平行な断面において前記中間層を挟み、前記中間層の前記側面に沿って形成され、且つ、上端が前記中間層の上面よりも上側となるように形成された電極部を形成する段階と
を備え、
前記電極部を形成した後に前記上側多層反射膜を前記中間層および前記電極部上に形成することで、前記中間層の上面と対向する位置に設けられた略平坦な平坦部と、前記平坦部を囲む突出部とを有する前記上側多層反射膜を形成し、
それぞれの前記平坦部の面積は、前記中間層からの距離に応じて減少し、
前記突出部の頂点を結んだ2つの線が、前記上側多層反射膜の下層から上層に向かって互いに近づくように傾斜しており、
前記中間層は、
前記上側多層反射膜と異なる組成の下側層と、
前記下側層の上に形成され、前記上側多層反射膜と同じ組成の上側層とを有し、
前記傾斜した側面を、前記下側層と、前記上側層の一部とに形成する製造方法。 - 前記中間層を形成した後に前記電極部を形成する
請求項8に記載の製造方法。 - 前記電極部の前記中間層側の端部は垂直方向を向いている側面を有し、
前記2つの線は前記電極部の前記垂直方向を向いている側面の頂点を通る
請求項8または9に記載の製造方法。
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JP2011141074A JP5839852B2 (ja) | 2011-06-24 | 2011-06-24 | 垂直型発光素子及びその製造方法 |
US13/530,255 US8861562B2 (en) | 2011-06-24 | 2012-06-22 | Vertical light emitting device and manufacturing method |
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WO2014191005A1 (en) * | 2013-05-31 | 2014-12-04 | Danmarks Tekniske Universitet | A wavelength tunable photon source with sealed inner volume |
JP6479308B2 (ja) * | 2013-08-09 | 2019-03-06 | ソニー株式会社 | 面発光レーザ素子及びその製造方法 |
JP6780505B2 (ja) * | 2015-02-05 | 2020-11-04 | ソニー株式会社 | 発光素子及びその製造方法 |
US20180200970A1 (en) * | 2017-01-17 | 2018-07-19 | Mid-South Control Line, Llc | Method and Apparatus for Encapsulating Tubing with Material Having Engineered Weakened Portions |
JP7331859B2 (ja) * | 2018-10-12 | 2023-08-23 | ソニーグループ株式会社 | 発光素子 |
JP7367484B2 (ja) | 2019-11-22 | 2023-10-24 | 株式会社リコー | 面発光レーザ素子、面発光レーザ、面発光レーザ装置、光源装置及び検出装置 |
JP7406365B2 (ja) | 2019-12-19 | 2023-12-27 | スタンレー電気株式会社 | 垂直共振器型発光素子 |
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JP2003332683A (ja) | 2002-05-17 | 2003-11-21 | Furukawa Electric Co Ltd:The | 面発光レーザ素子 |
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