JP5804895B2 - Photoelectric conversion device and method for manufacturing photoelectric conversion device - Google Patents

Description

  The present invention relates to a photoelectric conversion device and a manufacturing method thereof.

  There is a solar cell module in which a laminate in which a transparent conductive film layer, a photoelectric conversion layer, and a back electrode are laminated is arranged on a glass substrate. In this solar cell module, the power generation efficiency can be reduced by the sheet resistance of the transparent conductive film layer made of a conductive metal oxide layer or the like.

  Therefore, a technique for reducing sheet resistance of the conductive metal oxide layer by providing a finger electrode having a narrow line width and a preset pattern in combination with the conductive metal oxide layer has been proposed (for example, patents). Literature 1 etc.). In this technique, a plurality of finger electrodes are connected to a common electrode for output arranged at both ends of the solar cell. The plurality of finger electrodes and the common electrodes at both ends can be integrally formed by printing using a metal paste or the like.

JP 2011-96774 A

  Here, usually, the finger electrode and the common electrode at both ends can be integrally formed by screen printing in which the squeegee is advanced along the extending direction of the finger electrode.

  However, the extending direction of the common electrode is orthogonal to the direction of travel of the squeegee (also referred to as the printing direction). For this reason, in the pattern of the common electrode formed at the initial stage of printing, bleeding due to a rapid supply of a large amount of metal paste or the like may occur. Therefore, the thickness of the common electrode can vary greatly from the design value. Here, in the form in which the ribbon-like tab for output is attached to the common electrode, the reliability of the attachment of the tab to the common electrode may be reduced due to a large variation in the thickness of the common electrode. As a result, the power generation efficiency of the solar cell can be reduced.

  Also, in the pattern near the edge of the finger electrode with a narrow line width formed following the common electrode pattern during printing, the line width is larger than the design value due to a sudden change in the amount of metal paste applied. Can vary. For this reason, the path | route where the light from the outside reaches to a photoelectric converting layer may be interrupted | blocked by the part whose line | wire width is larger than a design value among finger electrodes. On the other hand, the electrical resistance can increase in a portion where the line width of the finger electrode is narrower than the design value. As a result, the power generation efficiency of the solar cell can be reduced.

  Therefore, a photoelectric conversion device capable of increasing the power generation efficiency depending on the shape of the electrode and a method for manufacturing the same are desired.

In order to solve the above problems, a photoelectric conversion device according to one embodiment is a photoelectric conversion device including an electrode unit formed by application of a metal paste on the substrate, it is disposed on the substrate and the metal A first output electrode portion formed by applying a paste; a second output electrode portion disposed on the substrate in one direction away from the first output electrode portion; and formed by applying the metal paste ; It has. Further, the photoelectric conversion device includes at least one photoelectric conversion cell disposed between the first output electrode portion and the second output electrode portion on the substrate, and the one or more photoelectric conversion cells from the first output electrode portion. A plurality of linear conductive portions extending in the one direction over one main surface of the photoelectric conversion cell and formed by applying the metal paste . In the photoelectric conversion device, the first output electrode portion includes a first region located on one end side of the first output electrode portion in the one direction, and the first output electrode portion in the one direction. A second region located on the end side and connected to the plurality of linear conductive portions. Further, in the photoelectric conversion device, the first region includes one or more protrusions protruding in a direction opposite to the one direction.

  The manufacturing method of the photoelectric conversion device according to another aspect includes a preparation step of preparing a substrate, a forming step of forming a stacked body including a photoelectric conversion layer and an electrode layer on the substrate, and the substrate and the stack. By applying the coating liquid in one direction on the upper surface of the body, a pattern of the output electrode portion and a plurality of linear conductors extending in the one direction from the output electrode portion to one main surface of the laminate And a coating process for sequentially forming the pattern of the part. In the method for manufacturing the photoelectric conversion device, in the coating step, the width in the other direction perpendicular to the one direction is gradually increased on the substrate according to the distance from one edge of the substrate in the one direction. By applying the coating solution so as to expand, a pattern of the first region is formed so as to be located on one end side of the output electrode portion, and then the other end side of the output electrode portion A pattern of a second region connected to the plurality of linear conductive portions is formed so as to be located at the position.

  The manufacturing method of the photoelectric conversion device according to another aspect includes a preparation step of preparing a substrate, a pattern of an output electrode unit by applying a coating liquid in one direction on the substrate, and the output electrode unit from the output electrode unit A coating process that sequentially forms a pattern of a plurality of linear conductive portions extending in one direction, and a laminate including a photoelectric conversion layer and an electrode layer on the substrate and the plurality of linear conductive portions. Forming step of forming. In the manufacturing method of the photoelectric conversion device, in the coating step, the width in the other direction perpendicular to the one direction is gradually increased on the substrate according to the distance from one edge of the substrate in the one direction. By applying the coating solution so as to expand, a pattern of the first region is formed so as to be located on one end side of the output electrode portion, and then the other end side of the output electrode portion A pattern of a second region connected to the plurality of linear conductive portions is formed so as to be located at the position.

  According to the photoelectric conversion device according to the above aspect, the power generation efficiency can be increased depending on the shape of the electrode.

  According to any of the method for manufacturing a photoelectric conversion device according to another aspect and the method for manufacturing a photoelectric conversion device according to another aspect, a photoelectric conversion device whose power generation efficiency can be increased depending on the shape of the electrode can be manufactured.

It is a top view which shows typically the structure of the photoelectric conversion apparatus which concerns on one Embodiment. It is a figure which shows the XZ cross section in the position shown with the dashed-dotted line II-II in FIG. It is a top view which shows typically the structure of a 1st output electrode part. It is a figure which shows XZ cross section in the position shown with the dashed-dotted line IV-IV in FIG. It is a figure which shows the XZ cross section in the state by which the 1st conductor is distribute | arranged on the 1st output electrode part. It is a flowchart which shows the manufacturing flow of the photoelectric conversion apparatus which concerns on one Embodiment. It is a figure which shows typically the state in the middle of manufacture of the photoelectric conversion apparatus which concerns on one Embodiment. It is a figure which shows typically the state in the middle of manufacture of the photoelectric conversion apparatus which concerns on one Embodiment. It is a figure which shows typically the state in the middle of manufacture of the photoelectric conversion apparatus which concerns on one Embodiment. It is a figure which shows typically the state in the middle of manufacture of the photoelectric conversion apparatus which concerns on one Embodiment. It is a figure which shows typically the state in the middle of manufacture of the photoelectric conversion apparatus which concerns on one Embodiment. It is a figure which shows typically the state in the middle of manufacture of the photoelectric conversion apparatus which concerns on one Embodiment. It is a figure which shows typically the state in the middle of manufacture of the photoelectric conversion apparatus which concerns on one Embodiment. It is a figure which shows typically the state in the middle of manufacture of the photoelectric conversion apparatus which concerns on one Embodiment. It is a figure which shows typically the state in the middle of formation of the 1st output electrode part. It is a figure which shows typically the state in the middle of formation of the 1st output electrode part. It is a figure which shows typically the state in the middle of formation of the 1st output electrode part. It is sectional drawing which shows typically the structure of the photoelectric conversion apparatus which concerns on one Embodiment. It is a top view which shows typically the structure of the 1st output electrode part which concerns on a 1st modification. It is a figure which shows the YZ cross section in the position shown with the dashed-dotted line XX-XX in FIG. It is a top view which shows the YZ cross section of the state by which the 1st conductor is distribute | arranged on the 1st output electrode part which concerns on a 1st modification. It is a top view which shows typically the structure of the 1st output electrode part which concerns on a 2nd modification. It is a top view which shows typically the structure of the 1st output electrode part which concerns on a 3rd modification. It is a top view which shows typically the structure of the 1st output electrode part which concerns on a 4th modification. It is a top view which shows typically the structure of the 1st output electrode part which concerns on a 5th modification. It is a top view which shows typically the structure of the 1st output electrode part which concerns on a 6th modification. It is a top view which shows typically the structure of the 1st output electrode part which concerns on a 7th modification.

  Hereinafter, an embodiment and various modifications of the present invention will be described with reference to the drawings. In the drawings, parts having the same configuration and function are denoted by the same reference numerals, and redundant description is omitted in the following description. Further, the drawings are schematically shown, and the sizes, positional relationships, and the like of various structures in the drawings are not accurately illustrated. 1 to 5 and FIGS. 7 to 27 are provided with a right-handed XYZ coordinate system in which the arrangement direction of photoelectric conversion cells 10 (the right direction in the drawing of FIG. 1) is the X-axis direction.

<(1) One Embodiment>
<(1-1) Schematic configuration of photoelectric conversion device>
As shown in FIGS. 1 and 2, the photoelectric conversion device 1 includes a substrate 101, a plurality of photoelectric conversion cells 10, first and second output electrode portions 12 a and 12 b, and a plurality of linear conductive portions 105. The first and second conductors 13a and 13b are provided.

  The substrate 101 supports the plurality of photoelectric conversion cells 10. As main materials included in the substrate 1, for example, glass, ceramics, resin, metal, and the like can be employed. In the present embodiment, an example in which the substrate 101 is blue plate glass (soda lime glass) is shown. The thickness of the substrate 101 may be about 1 mm or more and about 3 mm or less. Further, for example, the shape of the substrate 101 may be a flat plate shape, and one main surface (also referred to as an upper surface) of the + Z side of the substrate 101 may be substantially flat. For example, a substrate in which an insulating film is coated on a metal substrate may be used as the substrate 101.

  The first output electrode portion 12 a is disposed in the vicinity of the end portion on the −X side as one end portion in the X-axis direction as one direction on the substrate 101. The first output electrode portion 12a extends in the Y-axis direction as another direction perpendicular to one direction. In the present embodiment, a lower electrode layer 102 extending from the most-X side photoelectric conversion cell 10 among the plurality of photoelectric conversion cells 10 is disposed on the substrate 101, and the lower electrode layer 102 is disposed on the lower electrode layer 102. The first output electrode portion 12a is disposed.

  The second output electrode portion 12 b is disposed in the vicinity of the + X side end portion as the other end portion in the X-axis direction on the substrate 101. That is, the second output electrode portion 12b is disposed on the substrate 101 so as to be separated from the first output electrode portion 12a in one direction. The second output electrode portion 12b extends in the Y-axis direction. In the present embodiment, the lower electrode layer 102 extending from the most + X side photoelectric conversion cell 10 among the plurality of photoelectric conversion cells 10 is disposed on the substrate 101, and the lower electrode layer 102 is disposed on the lower electrode layer 102. A two-output electrode portion 12b is arranged.

  The plurality of photoelectric conversion cells 10 are planarly arranged on the substrate 101 between the first output electrode portion 12a and the second output electrode portion 12b along the X-axis direction. A plurality of photoelectric conversion cells 10 are electrically connected in series by a plurality of linear conductive portions 105. FIG. 1 illustrates a configuration in which eight photoelectric conversion cells 10 are arranged in the X-axis direction.

  The plurality of linear conductive portions 105 extend in the X-axis direction from the first output electrode portion 12a to the second output electrode portion 12b through one main surface of the plurality of photoelectric conversion cells 10. In addition, the plurality of linear conductive portions 105 are separated in the Y-axis direction. The linear conductive portions 105 arranged on a straight line along the X axis are divided by a groove portion P3 that defines an end portion of each photoelectric conversion cell 10. For this reason, each linear conductive part 105 is extended from the 1st output electrode part 12a here, and is extended in the X-axis direction on one main surface of the some photoelectric conversion cell 10. FIG. Each linear conductive portion 105 extends from one main surface of the photoelectric conversion cell 10 on the most + X side among the plurality of photoelectric conversion cells 10 to the second output electrode portion 12b.

  Here, the first and second output electrode portions 12a and 12b and the plurality of linear conductive portions 105 are dried after, for example, a metal paste as a coating liquid is applied by screen printing or the like, and the metal paste is solidified. Can be formed. The metal paste can be produced, for example, by adding particles having high light reflectivity and conductivity to a binder such as a translucent resin. Here, as the resin having translucency, for example, an epoxy resin or the like may be employed. Moreover, as particles contained in the metal paste, for example, metal particles such as Cu, Al, Ni, and an alloy of Zn and Ag can be adopted. In this case, the linear conductive portion 105 includes a large number of particles having conductivity, and the conductivity in the linear conductive portion 105 can be ensured by the large number of particles coming into contact with each other.

  The first conductor 13a is a conductor as an output tab arranged on the first output electrode portion 12a. The first conductor 13 a is electrically connected to a terminal or the like in a power supply box disposed on the back surface of the substrate 101 through a through hole 14 a provided in the substrate 101.

  The second conductor 13b is a conductor serving as an output tab disposed on the second output electrode portion 12b. The second conductor 13b is electrically connected to a terminal or the like in a power supply box disposed on the back surface of the substrate 101 through a through hole 14b provided in the substrate 101.

  The first and second conductors 13a and 13b may have a ribbon-like form having a width of 1 mm or more and 10 mm or less and a thickness of 0.08 μm or more and 1 μm or less, for example. As the material of the first and second conductors 13a and 13b, for example, a material having excellent conductivity such as Cu, Al, and Nichrome which is an alloy of Ni and Cr can be adopted.

  Also, the one photoelectric conversion cell 10 and the other photoelectric conversion cell 10 are separated between one adjacent photoelectric conversion cell 10 and the other photoelectric conversion cell 10 among the plurality of photoelectric conversion cells 10. A groove P3 as a region is arranged. In other words, the one photoelectric conversion cell 10 and the other photoelectric conversion cell 10 are separated via the groove portion P3. Specifically, the groove portion P3 extends in the Y-axis direction between one adjacent photoelectric conversion cell 10 and the other photoelectric conversion cell 10. The groove portion P3 is arranged from one main surface (also referred to as an upper surface) of the + Z side of the photoelectric conversion cell 10 to one main surface (also referred to as an upper surface) of the lower electrode layer 102. The width of the groove P3 may be, for example, about 40 μm or more and about 1000 μm or less. In addition, when the photoelectric conversion apparatus 1 is modularized, for example, an insulating material such as a resin enters the grooves P3.

  With the above configuration, a voltage generated by photoelectric conversion in the plurality of photoelectric conversion cells 10 can be output via the power supply box.

<(1-2) Configuration of photoelectric conversion cell>
Each photoelectric conversion cell 10 includes a lower electrode layer 102, a photoelectric conversion layer 103, and an upper electrode layer 104. Each photoelectric conversion cell 10 is provided with grooves P1 and P2. And in the photoelectric conversion apparatus 1 which concerns on this embodiment, the main surface by which the upper electrode layer 104 is distribute | arranged is a light-receiving surface.

  The lower electrode layer 102 is a conductive layer disposed on the upper surface of the substrate 1. As main materials included in the lower electrode layer 102, various conductive metals such as molybdenum, aluminum, titanium, tantalum, and gold can be employed, for example. Further, the thickness of the lower electrode layer 102 may be about 0.2 μm or more and about 1 μm or less, for example. The lower electrode layer 102 can be formed by, for example, a sputtering method or an evaporation method.

  The lower electrode layer 102 is provided with a groove P1. The groove part P1 extends linearly in the Y-axis direction. Since the groove portion P1 is disposed in the lower electrode layer 102, the lower electrode layer 102 is separated in the X-axis direction. The width of the groove part P1 may be, for example, about 50 μm or more and about 400 μm or less.

  The photoelectric conversion layer 103 is disposed on the upper surface of the lower electrode layer 102. The photoelectric conversion layer 103 includes a light absorption layer 131 and a buffer layer 132. The light absorption layer 131 and the buffer layer 132 are laminated on the lower electrode layer 102 in this order.

  The light absorption layer 131 is disposed on the upper surface of the lower electrode layer 102. Here, in each groove part P <b> 1 arranged in the lower electrode layer 102, an extending portion of the light absorption layer 131 arranged immediately above is embedded. Thereby, one lower electrode layer 102 and the other lower electrode layer 102 which are adjacent to each other through the groove portion P1 are electrically separated.

  The light absorption layer 131 mainly includes a semiconductor having the first conductivity type, and absorbs light to generate an electric charge. Here, as the semiconductor having the first conductivity type, for example, a I-III-VI group compound semiconductor which is a chalcopyrite compound semiconductor may be employed. The first conductivity type may be, for example, a p-type conductivity type.

  The I-III-VI group compound semiconductor is a semiconductor mainly containing an I-III-VI group compound. Note that the semiconductor mainly containing the I-III-VI group compound means that the semiconductor contains 70 mol% or more of the I-III-VI group compound. Also in the following description, “mainly included” means “70 mol% or more included”. I-III-VI group compounds mainly consist of group IB elements (also referred to as group 11 elements), group III-B elements (also referred to as group 13 elements), and group VI-B elements (also referred to as group 16 elements). It is a compound contained in.

Examples of the I-III-VI group compound include Cu (In, Ga) Se ₂ (also referred to as CIGS), Cu (In, Ga) (Se, S) ₂ (also referred to as CIGSS), and CuInSe ₂ (also referred to as CIS). ) Etc. may be employed. Note that Cu (In, Ga) Se ₂ is a compound mainly containing Cu, In, Ga, and Se. Cu (In, Ga) (Se, S) ₂ is a compound mainly containing Cu, In, Ga, Se, and S.

  Note that if the light absorption layer 131 mainly contains an I-III-VI group compound semiconductor, the efficiency of photoelectric conversion by the light absorption layer 131 can be improved even if the thickness of the light absorption layer 131 is 10 μm or less. obtain. For this reason, the thickness of the light absorption layer 131 should just be about 1 micrometer or more and about 3 micrometers or less, for example.

  The light absorption layer 131 can be formed by a vacuum process such as sputtering or vapor deposition. The light absorption layer 131 can also be formed by a process called a coating method or a printing method. In the coating method or the printing method, for example, a solution containing a metal element mainly contained in the light absorption layer 131 is applied on the upper surface of the lower electrode layer 102, and then drying and heat treatment are performed.

  The buffer layer 132 is disposed on one main surface (also referred to as an upper surface) of the light absorption layer 131 on the + Z side. The buffer layer 132 mainly includes a semiconductor having a second conductivity type different from the first conductivity type of the light absorption layer 131. Here, semiconductors having different conductivity types are semiconductors having different conductive carriers. The second conductivity type may be an n-type conductivity type, for example. The conductivity type of the light absorption layer 131 may be n-type, and the conductivity type of the buffer layer 132 may be p-type. Here, a heterojunction region is formed between the light absorption layer 131 and the buffer layer 132. For this reason, in the photoelectric conversion cell 10, photoelectric conversion can occur in the light absorption layer 131 and the buffer layer 132 that form the heterojunction region.

The buffer layer 132 mainly includes a compound semiconductor. Examples of the compound semiconductor included in the buffer layer 132 include CdS, In ₂ S ₃ , ZnS, ZnO, In ₂ Se ₃ , In (OH, S), (Zn, In) (Se, OH), and (Zn, Mg) O or the like can be employed. If the buffer layer 132 has a resistivity of 1 Ω · cm or more, the generation of leakage current can be suppressed.

  The buffer layer 132 can be formed by, for example, a chemical bath deposition (CBD) method or the like. The thickness of the buffer layer 132 may be, for example, 10 nm or more and 200 nm or less. When the thickness of the buffer layer 132 is not less than 100 nm and not more than 200 nm, the buffer layer 132 is hardly damaged when the upper electrode layer 104 is formed on the buffer layer 132 by a sputtering method or the like.

  The upper electrode layer 104 is arranged on one main surface (also referred to as an upper surface) of the + Z side of the photoelectric conversion layer 103. The upper electrode layer 104 may be a transparent conductive layer having an n-type conductivity, for example. The upper electrode layer 104 serves as an electrode for extracting charges generated in the photoelectric conversion layer 103. The upper electrode layer 104 only needs to mainly contain a material having a lower resistivity than the buffer layer 132. The upper electrode layer 104 may include what is called a window layer, or may include a window layer and a transparent conductive layer.

The upper electrode layer 104 mainly includes a material having a wide forbidden band, transparent, and low resistance. As such a material, for example, ZnO, a compound of ZnO, and a metal oxide semiconductor such as ITO and SnO ₂ containing Sn can be adopted. The ZnO compound may be any compound containing any one of Al, B, Ga, In and F, for example.

  The upper electrode layer 104 can be formed by sputtering, vapor deposition, chemical vapor deposition (CVD), or the like. The thickness of the upper electrode layer 104 may be about 0.1 μm or more and about 2 μm or less, for example. Here, if the upper electrode layer 104 has a resistivity of less than 1 Ω · cm and a sheet resistance of 50 Ω / □ or less, electric charges are favorably extracted from the photoelectric conversion layer 103 through the upper electrode layer 104. Can be.

  Here, if the buffer layer 132 and the upper electrode layer 104 have a property of easily transmitting light with respect to the wavelength band of light that can be absorbed by the light absorption layer 131 (also referred to as light transmission property), A decrease in light absorption efficiency in the absorption layer 131 can be suppressed. Further, when the thickness of the upper electrode layer 104 is 0.05 μm or more and 0.5 μm or less, the light transmittance in the upper electrode layer 104 is improved, and the current generated by the photoelectric conversion is improved by the upper electrode layer 104. Can be transmitted. Further, if the absolute refractive index of the upper electrode layer 104 and the absolute refractive index of the buffer layer 132 are substantially the same, incident light loss caused by light reflection at the interface between the upper electrode layer 104 and the buffer layer 132 is reduced. Can be reduced.

  The charges generated in the photoelectric conversion layer 103 and taken out in the upper electrode layer 104 are collected by the linear conductive portion 105 disposed on the upper electrode layer 104. Here, since the linear conductive portion 105 is provided, the conductivity of the upper electrode layer 104 is supplemented, so that the upper electrode layer 104 can be thinned. As a result, securing of charge extraction efficiency and improvement in light transmittance in the upper electrode layer 104 can both be achieved.

  Further, the linear conductive portion 105 is connected to the lower electrode layer 102 extending from the lower portion of the adjacent photoelectric conversion cell 10 disposed in the + X direction through the groove portion P2. That is, for the adjacent photoelectric conversion cells 10, the upper electrode layer 104 of one photoelectric conversion cell 10 and the lower electrode layer 102 of the other photoelectric conversion cell 10 are electrically connected by the linear conductive portion 105. Yes.

  Here, the groove part P2 extends linearly in the Y-axis direction. The groove portion P2 is arranged from one main surface (also referred to as an upper surface) of the upper electrode layer 104 to the upper surface of the lower electrode layer 102. For this reason, the groove part P <b> 2 separates the stacked body in which the photoelectric conversion layer 103 and the upper electrode layer 104 are stacked in one photoelectric conversion cell 10 in the X-axis direction. In addition, the structure by which the hanging part of the upper electrode layer 104 is distribute | arranged in the groove part P2 may be employ | adopted.

  Further, when each photoelectric conversion cell 10 is seen through from above the light receiving surface (here, + Z side), the groove portion P1, the groove portion P2, and the groove portion P3 are arranged in this order in the + X direction. Therefore, the lower electrode layer 102 extends from the lower part of the other photoelectric conversion cell 10 to the lower part of the one photoelectric conversion cell 10 between the one adjacent photoelectric conversion cell 10 and the other photoelectric conversion cell 10. doing. In the one photoelectric conversion cell 10, between the one lower electrode layer 102 and the other lower electrode layer 102 adjacent to each other in the X-axis direction, over the groove P1 from above the one lower electrode layer 102. The photoelectric conversion layer 103 is disposed on the other lower electrode layer 102. Here, the other lower electrode layer 102 is the lower electrode layer 102 extending from the lower part of the other photoelectric conversion cell 10 to the lower part of the one photoelectric conversion cell 10.

  Further, when each photoelectric conversion cell 10 is seen through from above the light receiving surface (here, + Z side), each photoelectric conversion cell 10 includes a region sandwiched between the groove portion P1 and the groove portion P3 including the groove portion P2. There are a region where the groove portion P1 is disposed and a remaining region. The remaining region is a region contributing to power generation in each photoelectric conversion cell 10.

  In the present embodiment, in each photoelectric conversion cell 10, the photoelectric conversion layer 103 is arranged from the lower electrode layer 102 to the adjacent lower electrode layer 102. However, the present invention is not limited to this. For example, the photoelectric conversion layer 103 should just be distribute | arranged from the upper part of the lower electrode layer 102 to the inside of the groove part P1.

  In the photoelectric conversion cell 10 having the above configuration, the charges collected by the upper electrode layer 104 and the plurality of linear conductive portions 105 are transmitted to the adjacent photoelectric conversion cell 10 arranged in the + X direction. Thereby, the adjacent photoelectric conversion cells 10 are electrically connected in series.

  In addition, when the width of the linear conductive portion 105 is 50 μm or more and 400 μm or less, good conduction between the adjacent photoelectric conversion cells 10 is ensured, and a decrease in the amount of light incident on the light absorption layer 131 is suppressed. Can be done. The interval in the Y-axis direction of the plurality of linear conductive portions 105 arranged in one photoelectric conversion cell 10 may be about 2.5 mm, for example.

<(1-3) Configuration of output electrode section>
The first and second output electrode portions 12a and 12b have the same configuration although the directions in the X-axis direction are reversed. Therefore, here, the configuration of the first output electrode portion 12a will be described as an example.

  FIG. 3 shows a portion of the first output electrode portion 12a along the Y-axis direction.

  As shown in FIG. 3, the first output electrode portion 12a has a first region A1, a second region A2, and a third region A3. The first region A1 is a region located on the −X side end (also referred to as one end) E1 side of the first output electrode portion 12a in the X-axis direction. The second region A2 is a region located on the + X side end (also referred to as the other end) E2 side of the first output electrode portion 12a in the X-axis direction. The third area A3 is an area located between the first area A1 and the second area A2.

  The first region A1 includes a plurality of convex portions CV1 projecting in the −X direction opposite to the X-axis direction. In each convex portion CV1, the width in the Y-axis direction becomes narrower as it goes in the −X direction. In other words, in each convex portion CV1, the width in the Y-axis direction increases in accordance with the distance from the one end E1 in the X-axis direction.

  With the above configuration, for example, when the pattern of the first output electrode portion 12a is formed in the + X direction from the one end E1 side by screen printing or the like using a metal paste, the application amount of the metal paste can be gradually increased. For this reason, it can be difficult to generate so-called blurring of the pattern near the one end E1 of the pattern of the first output electrode portion 12a. As a result, the reliability of attaching the first conductor 13a to the first output electrode portion 12a is improved, and the power generation efficiency in the photoelectric conversion device 1 can be improved.

  Further, as shown in FIG. 4, each convex portion CV1 includes a one-way inclined portion 12u. In each one-way inclined portion 12u, the thickness in the Z-axis direction as the normal direction of the upper surface of the substrate 101 increases in accordance with the distance from the one end E1 in the + X direction.

  Thus, the presence of the portion where the thickness of the first output electrode portion 12a is thin can reduce the degree to which heat dissipation from the photoelectric conversion device 1 is hindered by the presence of the first output electrode portion 12a. . As a result, the photoelectric conversion performance in the photoelectric conversion cell 10 can be improved, and the power generation efficiency in the photoelectric conversion device 1 can be improved. In addition, it is difficult for moisture to enter the photoelectric conversion device 1 due to thermal expansion of each layer in the photoelectric conversion device 1. Therefore, it is difficult for the photoelectric conversion device 1 to deteriorate.

  Further, due to the presence of each one-way inclined portion 12u, the thickness in the Z-axis direction in the vicinity of one end E1 of the first output electrode portion 12a is reduced. For this reason, for example, when the pattern of the first output electrode portion 12a is formed in the + X direction from the one end E1 side by screen printing or the like using a metal paste, the coating amount of the metal paste can be gradually increased. For this reason, it can be difficult to generate so-called blurring of the pattern near the one end E1 of the pattern of the first output electrode portion 12a. As a result, the reliability of attaching the first conductor 13a to the first output electrode portion 12a is improved, and the power generation efficiency in the photoelectric conversion device 1 can be improved.

  The second region A2 is connected to the plurality of linear conductive portions 105 at the other end E2. The second region A2 includes a plurality of width reduction portions D1. Each width decreasing portion D1 is connected to each linear conductive portion 105 at each connection portion CN1 with the width in the Y-axis direction decreasing according to the distance from the one end E1 in the + X direction. In other words, each width decreasing portion D1 has a width in the Y-axis direction that increases in accordance with the distance from the other end E2 in the −X direction.

  Due to the presence of the width reducing portion D1, for example, a pattern from the first output electrode portion 12a to the plurality of linear conductive portions 105 is formed in the + X direction from the one end portion E1 side by screen printing using a metal paste or the like. In this case, the amount of the metal paste applied can change gradually. For this reason, the line width of the pattern of the linear conductive portion 105 in the vicinity of the connection portion CN1 is difficult to deviate from the design value. As a result, the power generation efficiency in the photoelectric conversion device 1 can be improved.

  Further, as shown in FIG. 4, each width reducing portion D1 includes a unidirectional inclined portion 12d. In each unidirectional inclined portion 12d, the thickness in the + Z direction decreases according to the distance from the one end E1 in the + X direction.

  The third region A3 is a region where the width in the Y-axis direction and the thickness in the Z-axis direction are substantially constant regardless of the position in the X-axis direction.

  And as FIG. 5 shows, the 1st conductor 13a is distribute | arranged from 3rd area | region A3 on 1st area | region A1 in the 1st output electrode part 12a. That is, the first conductor 13a is disposed on the one-way inclined portion 12u. Thereby, for example, when the lower electrode layer 102 as one conductive layer is disposed under the first output electrode portion 12a, the thickness in the vicinity of the one end E1 of the first output electrode portion 12a is reduced. The first conductor 13a and the lower electrode layer 102 are electrically connected through the portion. For this reason, the electrical resistance between the 1st conductor 13a and the lower electrode layer 102 can be reduced. As a result, the power generation efficiency in the photoelectric conversion device 1 can be improved.

  In addition, heat is easily transferred from the substrate 101 and lower electrode layer 102 side to the first conductor 13a through the portion where the thickness of the first output electrode portion 12a is thin. For this reason, heat dissipation from the photoelectric conversion device 1 can be promoted. As a result, the photoelectric conversion performance in the photoelectric conversion cell 10 can be improved, and the power generation efficiency in the photoelectric conversion device 1 can be improved. In addition, it is difficult for moisture to enter the photoelectric conversion device 1 due to thermal expansion of each layer in the photoelectric conversion device 1. Therefore, it is difficult for the photoelectric conversion device 1 to deteriorate.

<(1-4) Manufacturing Method of Photoelectric Conversion Device>
Here, an example of a manufacturing process of the photoelectric conversion device 1 having the above configuration will be described. FIG. 6 is a flowchart illustrating the manufacturing flow of the photoelectric conversion device 1. 7 to 14 are cross-sectional views schematically showing a state in the process of manufacturing the photoelectric conversion device 1. 15 to 17 are plan views schematically showing a state in the middle of forming the first output electrode portion 12a. In FIG. 15 to FIG. 17, the direction of travel of the squeegee is indicated by an arrow AR1.

  First, in step Sp1 of FIG. 6, a substrate 101 (see FIG. 7) is prepared. The substrate 101 may be a flat plate having a substantially rectangular board surface, for example.

  In step Sp2, the lower electrode layer 102 (see FIG. 8) as one conductive layer is formed on the substrate 101. The lower electrode layer 102 can be formed, for example, on substantially the entire main surface of the cleaned substrate 101 by using a sputtering method, an evaporation method, or the like.

  In step Sp3, a groove portion P1 (see FIG. 9) extending linearly in the Y-axis direction is formed from a predetermined formation target position on the upper surface of the lower electrode layer 102 to the upper surface of the substrate 101 immediately below it. The groove portion P1 can be formed, for example, by irradiating a predetermined formation target position while scanning with a YAG laser or other laser light.

  In Step Sp4, the light absorption layer 131 (see FIG. 10) is formed on the lower electrode layer. Here, for example, a coating is formed by applying a solution containing a metal element mainly contained in the light absorption layer 131 on the lower electrode layer 102 and then drying, and the coating is formed on the coating. The light absorption layer 131 can be formed by performing the heat treatment.

  In Step Sp5, the buffer layer 132 (see FIG. 11) is formed on the light absorption layer 131. Thereby, the photoelectric conversion layer 103 in which the light absorption layer 131 and the buffer layer 132 are laminated is formed. The buffer layer 132 can be formed by, for example, a chemical bath deposition (CBD) method. Specifically, for example, the buffer layer 132 mainly containing CdS can be formed by immersing the light absorption layer 131 in a solution prepared by dissolving cadmium acetate and thiourea in aqueous ammonia. .

  In step Sp6, the upper electrode layer 104 (see FIG. 12) is formed on the photoelectric conversion layer 103. The upper electrode layer 104 can be formed by, for example, a sputtering method, a vapor deposition method, a chemical vapor deposition (CVD) method, or the like. Specifically, for example, the transparent upper electrode layer 104 mainly containing ZnO to which Al is added is formed on the buffer layer 132.

  Through the processes of Steps Sp1 to Sp6, the stacked body 110 including the photoelectric conversion layer 103, the lower electrode layer 102 as the electrode layer, and the upper electrode layer 104 is formed on the substrate 101.

  In step Sp7, a groove P2 (see FIG. 13) extending linearly in the Y-axis direction is formed in a region from a predetermined formation target position to the upper surface of the lower electrode layer 102 on the upper surface of the upper electrode layer 104. The The groove portion P2 can be formed by mechanical scribing or the like using a scribe needle.

  In step Sp8, a metal paste as a coating solution is applied on the substrate 101 and the upper surface of the laminate 110 in the X-axis direction. At this time, a pattern of the first output electrode portion 12a, a pattern of the plurality of linear conductive portions 105 (see FIG. 14), and a pattern of the second output electrode portion 12b are sequentially formed. Specifically, in the present embodiment, the patterns of the first and second output electrode portions 12 a and 12 b are formed on the upper surface of the lower electrode layer 102 formed on the substrate 101. In addition, a plurality of patterns of linear conductive portions 105 are formed on the upper surface of the lower electrode layer 102 formed on the substrate 101 and the upper surface of the multilayer body 110.

  These metal paste patterns can be formed by, for example, screen printing. In the screen printing, for example, first, a printing plate is prepared in which a desired pattern is formed with an emulsion on a screen mesh stretched on a frame. The pattern of the printing plate can be adjusted by providing openings in the emulsion in accordance with the pattern of the metal paste to be formed. Next, the desired pattern is filled with a metal paste. While the squeegee is moved in the X-axis direction, the metal paste discharged from the opening is applied onto the substrate 101 and the upper surface of the laminate 110 by transfer. At this time, a part of the pattern of the plurality of linear conductive portions 105 is also formed in the groove portion P2.

  Here, a process of applying a metal paste for forming a pattern from the first output electrode portion 12a to the plurality of linear conductive portions 105 will be described.

  First, as shown in FIG. 15, a metal paste is applied on the substrate 101 so that the width in the Y-axis direction gradually increases according to the distance from one edge of the substrate 101 in the X-axis direction on the −X side. Applied. At this time, the pattern of 1st area | region A1 located in the one end part E1 side of the 1st output electrode part 12a is formed.

  By such an application method that gradually increases the amount of the metal paste applied, the so-called bleeding that the pattern undulates can hardly occur near the one end E1 of the pattern of the first output electrode portion 12a. Further, the pattern of the first region A1 can form the unidirectional inclined portion 12u by using a printing plate in which the shape of the opening of the emulsion is tapered. In addition, the inclination angle of the one-way inclination portion 12u can be adjusted by changing the moving speed of the squeegee. At this time, the one-way inclined portion 12u is more easily formed if the viscosity of the metal paste is 80 Pa · s or less.

  Next, as shown in FIGS. 16 and 17, after the third region A <b> 3 is formed, a plurality of linear conductive portions are positioned so as to be located on the other end E <b> 2 side of the first output electrode portion 12 a. A pattern of a plurality of connection portions CN1 respectively connected to 105 is formed. Specifically, for example, the metal paste is applied so that the width in the Y-axis direction gradually decreases in accordance with the distance from one edge portion of the −X side of the substrate 101 in the X-axis direction. At this time, patterns of a plurality of width reduction portions D1 included in the second region A2 can be formed. The pattern of each width reduction part D1 includes the pattern of the connection part CN1 connected to the linear conductive part 105, respectively.

  Due to the presence of the pattern of the width reducing portion D1, the pattern of each linear conductive portion 105 is formed after the amount of application of the metal paste is gradually reduced. For this reason, the line width of the pattern of the linear conductive portion 105 in the vicinity of the connection portion CN1 is difficult to deviate from the design value. When the pattern of the second region A2 is formed, the unidirectionally inclined portion 12d can be formed by using a printing plate in which the shape of the opening of the emulsion is tapered. Further, the inclination angle of the one-way inclination portion 12d can be adjusted by changing the moving speed of the squeegee. At this time, the one-way inclined portion 12u is more easily formed if the viscosity of the metal paste is 80 Pa · s or less.

  In step Sp9, the metal paste pattern is solidified by performing a drying process on the pattern of the metal paste formed in step Sp8. At this time, the first output electrode portion 12a, the plurality of linear conductive portions 105, and the second output electrode portion 12b are formed.

  In Step Sp10, the upper surface of the upper electrode layer 104 and the upper surfaces of the plurality of linear conductive portions 105 extend linearly in the Y-axis direction in a region extending from a predetermined formation target position to the upper surface of the lower electrode layer 102. Groove P3 (see FIGS. 1, 2 and 18) is formed.

  In step Sp11, the first conductor 13a is affixed on the first output electrode part 12a, and the second conductor 13b is affixed on the second output electrode part 12b.

  Here, for example, first and second conductors 13a and 13b having a back surface coated with silver paste are placed on the first and second output electrode portions 12a and 12b, respectively. The silver paste may be, for example, a material in which silver particles are dispersed in a thermosetting resin. Next, the first and second conductors 13a and 13b are pressed from the + Z side as the upper side. Then, the first and second conductors 13a and 13b are subjected to heat treatment in a heat treatment furnace heated to a predetermined temperature, whereby the thermosetting resin in the silver paste is cured. The predetermined temperature may be about 200 ° C., for example. As a result, the first and second conductors 13a and 13b are attached to the first and second output electrode portions 12a and 12b, respectively.

  The first and second conductors 13a and 13b covered with the solder are heated by the hot air method, so that the first and second conductors 13a and 13b are formed on the first and second output electrode portions 12a and 12b. May be attached by bonding. For example, when Sn—Pb-based eutectic solder is used, the heating temperature may be 180 ° C. or higher and 200 ° C. or lower. Further, when Sn—Ag—Cu Pb-free solder is used, the heating temperature may be 200 ° C. or higher and 220 ° C. or lower.

<Summary of (1-5) One Embodiment>
As described above, in the photoelectric conversion device 1 according to this embodiment, the first region A1 on the one end E1 side of the first output electrode portion 12a includes the plurality of convex portions CV1 projecting in the −X direction. It is out. Thereby, for example, when the pattern of the first output electrode portion 12a is formed in the X-axis direction from the one end E1 side by screen printing or the like using a metal paste, the application amount of the metal paste can be gradually increased. As a result, the so-called bleeding in which the pattern undulates can hardly occur near the one end E1 of the pattern of the first output electrode portion 12a. As a result, the reliability of attaching the first conductor 13a to the first output electrode portion 12a is improved, and the power generation efficiency in the photoelectric conversion device 1 can be improved.

  In addition, the second region A2 on the other end E2 side of the first output electrode portion 12a has a width in the Y-axis direction that decreases according to the distance from the one end E1 in the + X direction. Connected. Thereby, for example, when a pattern from the first output electrode portion 12a to the plurality of linear conductive portions 105 is formed in the X-axis direction from the one end E1 side by screen printing or the like using a metal paste, The coating amount can change gradually. For this reason, the line width of the pattern of the linear conductive portion 105 in the vicinity of the connection portion CN1 is difficult to deviate from the design value. As a result, the power generation efficiency in the photoelectric conversion device 1 can be improved.

<(2) Modification>
Note that the present invention is not limited to the above-described embodiment, and various modifications and improvements can be made without departing from the gist of the present invention.

  For example, various variations can be considered for the forms of the first and second output electrode portions 12a and 12b. Hereinafter, as a specific example, the first output electrode portions 12aA to 12aG according to the first to seventh modifications will be described.

<(2-1) First Modification>
As shown in FIG. 19, the first output electrode portion 12aA according to the first modification is divided into a plurality of divided electrode portions 12DA based on the first output electrode portion 12a according to the above-described embodiment. The first to third areas A1 to A3 are changed to the first to third areas A1A to A3A.

  The plurality of divided electrode portions 12DA included in the first output electrode portion 12aA are arranged away from each other in the Y-axis direction.

  In this way, if the plurality of divided electrode portions 12DA are separated from each other in the Y-axis direction, the amount of metal paste necessary for forming the first output electrode portion 12a can be reduced. That is, it is possible to reduce the waste of resources and the manufacturing cost. In addition, the presence of the portion where the plurality of divided electrode portions 12DA are not formed can reduce the degree to which heat dissipation from the photoelectric conversion device 1 is hindered by the presence of the first output electrode portion 12aA. As a result, the photoelectric conversion performance in the photoelectric conversion cell 10 is improved. In addition, it is difficult for moisture to enter the photoelectric conversion device 1 due to thermal expansion of each layer in the photoelectric conversion device 1. Therefore, it is difficult for the photoelectric conversion device 1 to deteriorate.

  Even when the plurality of divided electrode portions 12DA are separated from each other in the Y-axis direction, the voltage obtained by photoelectric conversion in the photoelectric conversion layer 103 by attaching the first conductor 13a on the first output electrode portion 12aA. Output can be secured.

  In addition, in the first area A1A, a plurality of convex portions CV1 are arranged as in the first area A1 according to the above-described embodiment. Each divided electrode portion 12DA only needs to include at least one convex portion CV1 among the plurality of convex portions CV1. In addition, in the second region A2A, a plurality of connection portions CN1 respectively connected to the linear conductive portions 105 are arranged in the same manner as the second region A2 according to the embodiment. Each divided electrode portion 12DA only needs to include at least one connection portion CN1 among the plurality of connection portions CN1. FIG. 19 illustrates a configuration in which each divided electrode portion 12DA includes one convex portion CV1 and one connection portion CN1. As a result, the so-called blur in which the pattern undulates can hardly occur near the one end E1 of the pattern of each divided electrode portion 12DA.

  Further, as shown in FIG. 20, each divided electrode portion 12DA includes an other-direction inclined portion 12sA on both the + Y side and the −Y side. In each other-direction inclined portion 12sA, the thickness in the Z-axis direction increases in accordance with the distance from the end edge portion of the divided electrode portion 12DA in the ± Y direction. The other-direction inclined portion 12sA is formed by using a printing plate in which the shape of the emulsion opening is tapered when the metal paste is applied to form the pattern of each divided electrode portion 12DA. Can be done. Further, the inclination angle of the other-direction inclination portion 12sA can be adjusted by changing the moving speed of the squeegee.

  Thus, the presence of the portion where the thickness of the divided electrode portion 12DA is reduced can reduce the degree to which heat dissipation from the photoelectric conversion device 1 is hindered by the presence of the first output electrode portion 12aA. As a result, the photoelectric conversion performance in the photoelectric conversion cell 10 is improved. In addition, it is difficult for moisture to enter the photoelectric conversion device 1 due to thermal expansion of each layer in the photoelectric conversion device 1. Therefore, it is difficult for the photoelectric conversion device 1 to deteriorate.

  And as FIG. 21 shows, the 1st conductor 13a is distribute | arranged on the 1st output electrode part 12a. That is, the first conductor 13a is disposed on the other-direction inclined portion 12sA. As a result, for example, when the lower electrode layer 102 as one conductive layer is disposed under the first output electrode portion 12aA, the first inclined portion 12sA passes through the portion where the thickness is reduced. The electrical resistance between the one conductor 13a and the lower electrode layer 102 can be reduced. Further, there is a portion where the first conductor 13a and the lower electrode layer 102 are in direct contact. For this reason, the electrical resistance between the 1st conductor 13a and the lower electrode layer 102 can be reduced. As a result, the power generation efficiency in the photoelectric conversion device 1 can be improved.

  Further, heat is transferred from the substrate 101 and the lower electrode layer 102 side to the first conductor 13a through the portion where each divided electrode portion 12DA is thin and the portion where the plurality of divided electrode portions 12DA are not provided. It becomes easy. For this reason, heat dissipation from the photoelectric conversion device 1 can be promoted. As a result, the photoelectric conversion performance in the photoelectric conversion cell 10 can be improved, and the power generation efficiency in the photoelectric conversion device 1 can be improved. In addition, it is difficult for moisture to enter the photoelectric conversion device 1 due to thermal expansion of each layer in the photoelectric conversion device 1. Therefore, it is difficult for the photoelectric conversion device 1 to deteriorate.

  Furthermore, as shown in FIG. 21, the first conductor 13a is stuck along the unevenness caused by the plurality of divided electrode portions 12DA. For this reason, it is difficult for the first conductor 13a to be separated from the first output electrode portion 12aA due to the so-called anchor effect. As a result, the power generation efficiency in the photoelectric conversion device 1 can be improved.

<(2-2) Second Modification>
As shown in FIG. 22, the first output electrode portion 12aB according to the second modified example is based on the first output electrode portion 12a according to the above-described embodiment, and the third region A3 is deleted. The second areas A1 and A2 are changed to the first and second areas A1B and A2B.

  The first region A1B includes a plurality of convex portions CV1B each having a shape changed from the plurality of convex portions CV1 according to the embodiment. Each convex portion CV1B has a semi-elliptical configuration protruding toward the -X direction.

  The second region A2B includes a plurality of width reduction portions D1B each having a shape changed from the plurality of width reduction portions D1 according to the embodiment. And two width reduction parts D1B are connected to the + X side of one convex part CV1B. Further, two convex portions CV1B adjacent in the Y-axis direction are connected to a common width reducing portion D1B.

  Even if the above configuration is adopted, the same effect as the one embodiment can be obtained.

<(2-3) Third Modification>
As shown in FIG. 23, the first output electrode portion 12aC according to the third modified example is based on the first output electrode portion 12a according to the above-described embodiment, and the third region A3 is deleted. The second areas A1 and A2 are changed to the first and second areas A1C and A2C.

  The first region A1C includes a plurality of convex portions CV1C each having a shape changed from the plurality of convex portions CV1 according to the embodiment. Each convex portion CV1C has an isosceles triangular configuration having a vertex at one end E1 on the −X side.

  The second region A2C includes a plurality of width reduction portions D1C each having a shape changed from the plurality of width reduction portions D1 according to the embodiment. Each width decreasing portion D1C has an isosceles triangular configuration that decreases as the width in the Y-axis direction approaches the other end portion E2 on the + X side.

  Even if the above configuration is adopted, the same effect as the one embodiment can be obtained.

<(2-4) Fourth Modification>
As shown in FIG. 24, the first output electrode portion 12aD according to the fourth modified example is based on the first output electrode portion 12a according to the above-described embodiment, and the third region A3 is deleted. The second areas A1 and A2 are changed to the first and second areas A1D and A2D.

  The first region A1D includes a plurality of convex portions CV1D each having a shape changed from the plurality of convex portions CV1 according to the embodiment. Each convex portion CV1D has an isosceles triangular configuration having a vertex at one end E1 on the −X side.

  The second region A2D includes a plurality of width reduction portions D1D each having a shape changed from the plurality of width reduction portions D1 according to the embodiment. And two width reduction parts D1D are connected to the + X side of one convex part CV1D. The two width reducing portions D1D are inclined with respect to the X axis. In addition, each of the connection portions CN1 except for the two connection portions CN1 at both ends in the Y-axis direction among the plurality of connection portions CN1 is shared by two width reduction portions D1D adjacent in the Y-axis direction. In other words, each of the linear conductive portions 105 except for the two linear conductive portions 105 at both ends in the Y-axis direction among the plurality of linear conductive portions 105 has two width reducing portions D1D adjacent to each other in the Y-axis direction. It is connected.

  Even if the above configuration is adopted, the same effect as the one embodiment can be obtained.

<(2-5) Fifth Modification>
As shown in FIG. 25, the first output electrode portion 12aE according to the fifth modified example is based on the first output electrode portion 12aA according to the first modified example, and the plurality of divided electrode portions 12DA are shaped. Are changed to a plurality of divided electrode portions 12DE.

  Each divided electrode portion 12DE has a substantially circular configuration. Each divided electrode portion 12DE has a first region A1E arranged at one end E1 on the −X side and a second region A2E arranged on the other end E2 on the + X side.

  The first region A1E is based on the first region A1A according to the above-described modification, and the plurality of convex portions CV1A are changed to the plurality of convex portions CV1E. Each convex portion CV1E has a semicircular configuration protruding in the −X direction.

  The second region A2E is based on the second region A2A according to the above-described modification, and the plurality of width reducing portions D1A are changed to the plurality of width reducing portions D1E. Each width reducing portion D1E has a semicircular configuration that decreases as the width in the Y-axis direction approaches the other end portion E2 on the + X side.

  Even if the above configuration is adopted, the same effects as those of the one embodiment and the one modification can be obtained. In addition, since the divided electrode portion 12DE has a substantially circular configuration, stress concentration generated in the divided electrode portion 12DE can be reduced.

<(2-6) Sixth Modification>
In the first output electrode portions 12a and 12aA to 12aE according to the embodiment and the first to fifth modifications, the first regions A1 and A1A to A1E include a plurality of convex portions CV1 and CV1A to CV1E. Not limited to this. For example, the first regions A1, A1A to A1E may be configured to include one or more convex portions CV1 and CV1A to CV1E protruding in the −X direction.

  As shown in FIG. 26, the first output electrode portion 12aF according to the sixth modified example is based on the first output electrode portion 12a according to the above-described embodiment, and the third region A3 is deleted. The second areas A1 and A2 are changed to the first and second areas A1F and A2F.

  The first region A1F includes one convex portion CV1F instead of the plurality of convex portions CV1 according to the one embodiment. The convex portion CV1F has a configuration protruding toward the -X direction.

  The second region A2F includes a plurality of width reducing portions D1F each having a shape changed from the plurality of width reducing portions D1 according to the embodiment. And several width reduction part D1F is connected to the + X side of one convex part CV1F.

  Even if the above configuration is adopted, the same effect as the one embodiment can be obtained. For example, since one convex portion CV1F is included in the first region A1F, when the metal paste is applied, so-called blurring occurs in the pattern near the one end E1 of the pattern of the first output electrode portion 12aF. Can be difficult to occur.

<(2-7) Seventh Modification>
In the first output electrode portions 12a and 12aA to 12aF according to the one embodiment and the first to sixth modifications, the plurality of width reducing portions D1 and D1A to D1F are included in the second regions A2 and A2A to A2F. However, it is not limited to this. For example, the second regions A2, A2A to A2F may not include the plurality of width reduction portions D1, D1A to D1F.

  As shown in FIG. 27, the first output electrode portion 12aG according to the seventh modification is based on the first output electrode portion 12a according to the above-described embodiment, and the second region A2 has a different shape. It has been changed to two areas A2G.

  The second region A2G is located on the other end E2 side of the first output electrode portion 12aG in the X-axis direction and is connected to the plurality of linear conductive portions 105. In the second region A1G, as in the third region A3, the width in the Y-axis direction and the thickness in the Z-axis direction are substantially constant regardless of the position in the X-axis direction.

  Even if the above configuration is adopted, among the effects obtained in the above-described embodiment, at least the first region A1 has the same effect as that obtained by having the convex portion CV1 protruding toward the −X side. Is obtained.

<(2-8) Other modifications>
For example, in the one embodiment and the first to seventh modifications, eight photoelectric conversion cells 10 are included in the photoelectric conversion device 1, but the present invention is not limited to this. For example, the photoelectric conversion device 1 only needs to include one or more photoelectric conversion cells 10.

  In the embodiment and the first to seventh modifications, after the laminate 110 is formed on the substrate 101, a metal paste as a coating liquid is applied on the substrate 101 and the upper surface of the laminate 110. However, it is not limited to this.

  For example, before the stacked body 110 is formed on the substrate 101, a pattern of the first output electrode portion 12 a and the plurality of linear conductive portions 105 are formed by applying a metal paste as a coating solution on the substrate 101. The pattern and the pattern of the second output electrode portion 12b may be formed in order. At this time, the coating liquid may be applied on the substrate 101 in the X-axis direction. In addition, a coating process similar to that of the above-described embodiment may be employed for the coating process of the metal paste that forms a pattern from the first output electrode sections 12a, 12aA to 12aG to the plurality of linear conductive sections 105.

  In this case, the first output electrode portions 12a, 12aA to 12aG and the plurality of linear conductive portions 105 are formed by a drying process after the coating step. A stacked body 110 including the photoelectric conversion layer 103, the lower electrode layer 102 as the electrode layer, and the upper electrode layer 104 may be formed over the substrate 101 and the plurality of linear conductive portions 105.

  In the photoelectric conversion device manufactured by the above process, a main surface (also referred to as a back surface) of the substrate 101 on which the stacked body 110 is not formed becomes a light receiving surface. In addition, one main surface of the photoelectric conversion cell on which the plurality of linear conductive portions 105 are arranged is one main surface of the photoelectric conversion cell on the substrate 101 side. And even if the said structure is employ | adopted, the effect similar to the said one Embodiment and said 1st-7th modification is acquired.

  In the embodiment and the first to seventh modifications, the first output electrode portions 12a and 12aA to 12aG are arranged near the −X side end on the substrate 101, and the second output electrode portion 12b is arranged in the vicinity of the + X side end on the substrate 101, but is not limited thereto. For example, the first output electrode portions 12a and 12aA to 12aG are arranged in the vicinity of the + X side end portion on the substrate 101, and the second output electrode portion 12b is in the vicinity of the −X side end portion on the substrate 101. It may be arranged. In this case, for example, the pattern of the first output electrode portions 12a, 12aA to 12aG, the pattern of the plurality of linear conductive portions 105, and the pattern of the second output electrode portion 12b are sequentially formed in the -X direction as one direction. Just do it.

  It goes without saying that all or a part of each of the above-described embodiment and various modifications can be appropriately combined within a consistent range.

DESCRIPTION OF SYMBOLS 1,1A-1G Photoelectric conversion apparatus 10 Photoelectric conversion cell 12DA, 12DE Division | segmentation electrode part 12a, 12aA-12aG 1st output electrode part 12b 2nd output electrode part 12d One direction inclination part 12sA Other direction inclination part 12u One direction inclination part 101 Substrate 102 Lower electrode layer 103 Photoelectric conversion layer 104 Upper electrode layer 105 Linear conductive portion 110 Laminate 131 Light absorption layer 132 Buffer layer 13a First conductor 13b Second conductor A1, A1A to A1G First region A2, A2A to A2G First 2 region A3 3rd region CN1 connection part CV1, CV1A to CV1F Convex part D1, D1A to D1F Width reduction part E1 One end part E2 Other end part

Claims (10)

A photoelectric conversion device having an electrode portion formed by applying a metal paste on a substrate ,
A first output electrode portion disposed on the substrate and formed by application of the metal paste ;
A second output electrode portion disposed on the substrate in one direction away from the first output electrode portion and formed by applying the metal paste ;
One or more photoelectric conversion cells disposed between the first output electrode part and the second output electrode part on the substrate;
A plurality of linear conductive portions extending in the one direction from the first output electrode portion to one main surface of the one or more photoelectric conversion cells and formed by applying the metal paste. ,
The first output electrode part is located on one end side of the first output electrode part in the one direction, and on the other end side of the first output electrode part in the one direction. A second region connected to the plurality of linear conductive portions,
The first area includes a photoelectric conversion device including one or more protrusions protruding in a direction opposite to the one direction.   The width of the second region in the other direction perpendicular to the one direction decreases according to the distance from the one end of the first output electrode portion in the one direction, and is connected to each of the linear conductive portions. The photoelectric conversion device according to claim 1. The first output electrode part includes a plurality of divided electrode parts arranged apart from each other in the other direction perpendicular to the one direction,
The one or more convex portions include a plurality of convex portions,
Each of the divided electrode portions includes at least one convex portion of the plurality of convex portions and at least one connection portion connected to one linear conductive portion of the plurality of linear conductive portions. The photoelectric conversion device according to claim 1 or 2.   Each of the divided electrode portions includes an other-direction inclined portion in which a thickness in a normal direction of the upper surface of the substrate increases in accordance with a distance from an edge of the divided electrode portion in the other direction. Item 4. The photoelectric conversion device according to Item 3. An output conductor disposed on the first output electrode portion;
The photoelectric conversion device according to claim 4, wherein the conductor is disposed on the other-direction inclined portion.   Each of the convex portions includes a unidirectional inclined portion in which the thickness in the normal direction of the upper surface of the substrate increases in accordance with the distance from the one end portion of the first output electrode portion in the one direction. The photoelectric conversion device according to any one of claims 1 to 4. An output conductor disposed on the first output electrode portion;
The photoelectric conversion device according to claim 6, wherein the conductor is disposed on the one-way inclined portion. A preparation process for preparing a substrate;
Forming a laminate including a photoelectric conversion layer and an electrode layer on the substrate;
By applying the coating liquid in one direction on the substrate and on the top surface of the laminate, the output electrode portion pattern and the output electrode portion extend in the one direction from the main surface of the laminate. And a coating process for sequentially forming a plurality of linear conductive part patterns,
In the coating step, the coating liquid is coated on the substrate such that the width in the other direction perpendicular to the one direction gradually increases according to the distance from one edge of the substrate in the one direction. Then, a pattern of the first region is formed so as to be positioned on one end side of the output electrode portion, and then the plurality of linear shapes are positioned on the other end side of the output electrode portion. The manufacturing method of the photoelectric conversion apparatus which forms the pattern of the 2nd area | region connected to the electroconductive part. A preparation process for preparing a substrate;
Application in which a coating solution is applied in one direction on the substrate to sequentially form a pattern of the output electrode portion and a plurality of linear conductive portion patterns extending from the output electrode portion in the one direction. Process,
Forming a laminate including a photoelectric conversion layer and an electrode layer on the substrate and the plurality of linear conductive portions;
In the coating step, the coating liquid is coated on the substrate so that the width in the other direction perpendicular to the one direction gradually increases according to the distance from one edge of the substrate in the one direction. Then, a pattern of the first region is formed so as to be positioned on one end side of the output electrode portion, and then the plurality of linear shapes are positioned on the other end side of the output electrode portion. The manufacturing method of the photoelectric conversion apparatus which forms the pattern of the 2nd area | region connected to the electroconductive part.   In the application step, each line in the second region is applied by applying the application liquid so that the width in the other direction gradually decreases in accordance with the distance from the one edge in the one direction. The manufacturing method of the photoelectric conversion device according to claim 8 or 9 which forms a pattern of a plurality of connecting parts which are connected to each shape conductive part, respectively.

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