JP5773194B2 - 太陽電池の製造方法 - Google Patents
太陽電池の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 239000010409 thin film Substances 0.000 claims description 228
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 114
- 229910052710 silicon Inorganic materials 0.000 claims description 114
- 239000010703 silicon Substances 0.000 claims description 114
- 239000000758 substrate Substances 0.000 claims description 80
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 64
- 230000015572 biosynthetic process Effects 0.000 claims description 55
- 238000010438 heat treatment Methods 0.000 claims description 48
- 229910021424 microcrystalline silicon Inorganic materials 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 27
- 238000009616 inductively coupled plasma Methods 0.000 claims description 17
- 238000005229 chemical vapour deposition Methods 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 239000013078 crystal Substances 0.000 claims description 6
- 238000011282 treatment Methods 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 230000001939 inductive effect Effects 0.000 claims description 3
- 238000005755 formation reaction Methods 0.000 description 54
- 239000010408 film Substances 0.000 description 49
- 229910021417 amorphous silicon Inorganic materials 0.000 description 23
- 230000007547 defect Effects 0.000 description 19
- 239000007789 gas Substances 0.000 description 19
- 239000001257 hydrogen Substances 0.000 description 17
- 229910052739 hydrogen Inorganic materials 0.000 description 17
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 14
- 230000000052 comparative effect Effects 0.000 description 13
- 239000012535 impurity Substances 0.000 description 12
- 239000004020 conductor Substances 0.000 description 9
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 6
- 230000005684 electric field Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000001069 Raman spectroscopy Methods 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 5
- 229910000077 silane Inorganic materials 0.000 description 5
- 230000004913 activation Effects 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910021423 nanocrystalline silicon Inorganic materials 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
- H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
- H01L31/1824—Special manufacturing methods for microcrystalline Si, uc-Si
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- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
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Description
52 シリコン薄膜
54、56 i型のシリコン薄膜
58 p型のシリコン薄膜
60 n型のシリコン薄膜
74 i型のシリコン薄膜
Claims (7)
- 結晶シリコン基板上にシリコン薄膜を形成した構造を有する太陽電池の製造方法であって、
誘導結合によってプラズマを生成する誘導結合型のプラズマCVD法によって、前記結晶シリコン基板上に、前記シリコン薄膜として、微小なシリコン結晶を含む微結晶シリコン薄膜を形成する薄膜形成工程と、
前記結晶シリコン基板上に前記微結晶シリコン薄膜を形成したものに、5×105 Pa以上の圧力の水蒸気雰囲気中で熱処理を施す水蒸気熱処理工程とを備えている、ことを特徴とする太陽電池の製造方法。 - 前記薄膜形成工程における前記結晶シリコン基板の温度を100℃〜300℃にする請求項1記載の太陽電池の製造方法。
- 前記水蒸気熱処理工程における温度を150℃〜300℃、水蒸気圧力を5×105 Pa〜1.5×106 Pa、処理時間を0.5時間〜3時間にする請求項1または2記載の太陽電池の製造方法。
- 前記太陽電池は、結晶シリコン基板の両面にi型のシリコン薄膜を形成し、かつ一方のi型のシリコン薄膜の表面にp型のシリコン薄膜を形成し、他方のi型のシリコン薄膜の表面にn型のシリコン薄膜を形成した構造を有するものであり、
前記薄膜形成工程によって、前記i型のシリコン薄膜としてi型の前記微結晶シリコン薄膜を形成し、
その後前記水蒸気熱処理工程を実行する請求項1、2または3記載の太陽電池の製造方法。 - 前記太陽電池は、結晶シリコン基板の両面にi型のシリコン薄膜を形成し、かつ一方のi型のシリコン薄膜の表面にp型のシリコン薄膜を形成し、他方のi型のシリコン薄膜の表面にn型のシリコン薄膜を形成した構造を有するものであり、
前記薄膜形成工程によって、前記p型のシリコン薄膜およびn型のシリコン薄膜として、p型の前記微結晶シリコン薄膜およびn型の前記微結晶シリコン薄膜をそれぞれ形成し、
その後前記水蒸気熱処理工程を実行する請求項1、2または3記載の太陽電池の製造方法。 - 前記太陽電池は、結晶シリコン基板の両面にi型のシリコン薄膜を形成し、かつ一方のi型のシリコン薄膜の表面にp型のシリコン薄膜を形成し、他方のi型のシリコン薄膜の表面にn型のシリコン薄膜を形成した構造を有するものであり、
前記薄膜形成工程によって、前記i型のシリコン薄膜としてi型の前記微結晶シリコン薄膜を形成し、かつ前記p型のシリコン薄膜およびn型のシリコン薄膜として、p型の前記微結晶シリコン薄膜およびn型の前記微結晶シリコン薄膜をそれぞれ形成し、
その後前記水蒸気熱処理工程を実行する請求項1、2または3記載の太陽電池の製造方法。 - 前記太陽電池は、結晶シリコン基板上にi型のシリコン薄膜を形成し、当該シリコン薄膜上に互いに仕事関数の異なる第1および第2の電極を形成した構造を有するものであり、
前記薄膜形成工程によって、前記i型のシリコン薄膜としてi型の前記微結晶シリコン薄膜を形成し、
その後前記水蒸気熱処理工程を実行する請求項1、2または3記載の太陽電池の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011152562A JP5773194B2 (ja) | 2011-07-11 | 2011-07-11 | 太陽電池の製造方法 |
CN201280034187.6A CN103688371A (zh) | 2011-07-11 | 2012-02-03 | 太阳能电池及其制造方法 |
PCT/JP2012/052464 WO2013008482A1 (ja) | 2011-07-11 | 2012-02-03 | 太陽電池およびその製造方法 |
US14/131,205 US20140144495A1 (en) | 2011-07-11 | 2012-02-03 | Solar cell and method for manufacturing the same |
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JP2011152562A JP5773194B2 (ja) | 2011-07-11 | 2011-07-11 | 太陽電池の製造方法 |
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JP2013021095A JP2013021095A (ja) | 2013-01-31 |
JP5773194B2 true JP5773194B2 (ja) | 2015-09-02 |
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US20150380581A1 (en) * | 2014-06-27 | 2015-12-31 | Michael C. Johnson | Passivation of light-receiving surfaces of solar cells with crystalline silicon |
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CA918297A (en) * | 1969-09-24 | 1973-01-02 | Tanimura Shigeru | Semiconductor device and method of making |
JP2003298078A (ja) * | 2002-03-29 | 2003-10-17 | Ebara Corp | 光起電力素子 |
US20060130891A1 (en) * | 2004-10-29 | 2006-06-22 | Carlson David E | Back-contact photovoltaic cells |
US7375378B2 (en) * | 2005-05-12 | 2008-05-20 | General Electric Company | Surface passivated photovoltaic devices |
JP5309426B2 (ja) * | 2006-03-29 | 2013-10-09 | 株式会社Ihi | 微結晶シリコン膜形成方法及び太陽電池 |
JP2007281156A (ja) * | 2006-04-06 | 2007-10-25 | Japan Advanced Institute Of Science & Technology Hokuriku | 裏面電極型半導体へテロ接合太陽電池ならびにその製造方法と製造装置 |
JP2009135277A (ja) * | 2007-11-30 | 2009-06-18 | Tokyo Electron Ltd | 膜の形成方法、薄膜トランジスタ、太陽電池、製造装置および表示装置 |
US20110056552A1 (en) * | 2008-03-19 | 2011-03-10 | Sanyo Electric Co., Ltd. | Solar cell and method for manufacturing the same |
EP2105972A3 (en) * | 2008-03-28 | 2015-06-10 | Semiconductor Energy Laboratory Co, Ltd. | Photoelectric conversion device and method for manufacturing the same |
JP2010205804A (ja) * | 2009-02-27 | 2010-09-16 | Mitsubishi Heavy Ind Ltd | 光電変換装置 |
JP5334664B2 (ja) * | 2009-04-22 | 2013-11-06 | 株式会社 セルバック | 光電変換デバイスの製造方法および光電変換デバイス |
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US20140144495A1 (en) | 2014-05-29 |
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WO2013008482A1 (ja) | 2013-01-17 |
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