JP5769381B2 - Solar cell element and solar cell module using the same - Google Patents

Solar cell element and solar cell module using the same Download PDF

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JP5769381B2
JP5769381B2 JP2010066142A JP2010066142A JP5769381B2 JP 5769381 B2 JP5769381 B2 JP 5769381B2 JP 2010066142 A JP2010066142 A JP 2010066142A JP 2010066142 A JP2010066142 A JP 2010066142A JP 5769381 B2 JP5769381 B2 JP 5769381B2
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bus bar
output
output extraction
solar cell
semiconductor substrate
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JP2010171445A (en
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修一 藤井
修一 藤井
高橋 宏明
宏明 高橋
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Kyocera Corp
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description

本発明は半導体基板の表裏面に出力取出用バスバー部が設けられた太陽電池素子とそれを用いた太陽電池モジュールに関する。   The present invention relates to a solar cell element in which an output extraction bus bar portion is provided on the front and back surfaces of a semiconductor substrate, and a solar cell module using the solar cell element.

太陽電池素子の一般的な構造を図4に示す。図4(a)は断面図、図4(b)は裏側から見た図である。図4(a)(b)において、11は一導電型(例えばP型)を示す半導体基板、11aは半導体基板11の表面部分にリン原子が高濃度に拡散され他の導電型を呈する領域、12は一主面側の反射防止膜、13は半導体接合部である。この反射防止膜12は電極に相当する部分がエッチングされもしくはその上から電極が形成される。14は裏面から出力を取り出すための銀電極、15は裏面アルミニウム電極であり、これがシリコン基板11に焼き付けられた際には裏面で発生したキャリアが再結合することを防ぐ裏面電界層としての効果があることも知られている。裏面では銀を主成分とする電極14とアルミニウムを主成分とする電極15が形成されるが、両者は電気的伝導を保つために、互いの一部分が重なり合うことが必要になる。16は隣接する太陽電池同志を接続する配線部材がハンダ付けされる表面電極の出力取出用バスバー部であり、この出力取出用バスバー部16と垂直に集電用フィンガー電極17が多数設けられている。表面電極16、17及び裏面電極14、15の配置は、両者が半導体基板11を挟んで重なる位置に配置するようにする。   A general structure of the solar cell element is shown in FIG. 4A is a cross-sectional view, and FIG. 4B is a view as seen from the back side. 4 (a) and 4 (b), 11 is a semiconductor substrate having one conductivity type (for example, P-type), 11a is a region in which phosphorus atoms are diffused in a high concentration on the surface portion of the semiconductor substrate 11 and exhibit other conductivity types, Reference numeral 12 denotes an antireflection film on one main surface side, and reference numeral 13 denotes a semiconductor junction. The antireflection film 12 is etched at a portion corresponding to the electrode or an electrode is formed thereon. 14 is a silver electrode for extracting output from the back surface, and 15 is a back surface aluminum electrode. When this is baked on the silicon substrate 11, the effect as a back surface electric field layer that prevents recombination of carriers generated on the back surface is obtained. It is also known that there is. On the back side, an electrode 14 mainly composed of silver and an electrode 15 mainly composed of aluminum are formed. However, in order to maintain electrical conduction, it is necessary that a part of each other overlap. Reference numeral 16 denotes an output extraction bus bar portion of a surface electrode to which wiring members connecting adjacent solar cells are soldered. A large number of current collecting finger electrodes 17 are provided perpendicular to the output extraction bus bar portion 16. . The front electrodes 16 and 17 and the back electrodes 14 and 15 are arranged at positions where they overlap with the semiconductor substrate 11 interposed therebetween.

このような太陽電池素子の出力取出用バスバー部14、16には出力取出用銅箔等(不図示)を半田付けするためにあらかじめ半田被覆されている。この半田被覆は、ディップ法、噴流式等が採用される。ところで銀を主成分とする裏面電極の出力取出用バスバー部14とアルミニウムを主成分とする裏面電極の集電部15は、両者が重なり合う部分では基板材料のシリコン、出力取出用バスバー部材料の銀、集電部用材料のアルミニウムという熱膨張率の異なるものが集まるために、焼成した後に応力の集中が起こり、太陽電池素子にクラックが発生したり、割れたりするという問題があった。銀から成る出力取出用バスバー部14とアルミニウムから成る集電部15とが重なり合う部分で割れなどが発生した場合には、この部分の出力は取り出すことができず、出力の損失を引き起こすという問題があった。   The output extraction bus bar portions 14 and 16 of such solar cell elements are preliminarily coated with solder in order to solder an output extraction copper foil or the like (not shown). For this solder coating, a dip method, a jet type, or the like is employed. By the way, the output electrode bus bar portion 14 of the back electrode mainly composed of silver and the current collector portion 15 of the back electrode mainly composed of aluminum are silicon of the substrate material and silver of the output electrode bus bar portion material in the portion where they overlap each other. Since the materials for the current collector part, aluminum, having different coefficients of thermal expansion are collected, stress concentration occurs after firing, and there is a problem that the solar cell element is cracked or cracked. If a crack or the like occurs in a portion where the output output bus bar portion 14 made of silver and the current collector portion 15 made of aluminum overlap, the output of this portion cannot be taken out, resulting in a loss of output. there were.

本発明は上記問題に鑑みてなされたものであり、裏面電極の出力取出用バスバー部と集電部の重なり部分で割れが発生しても出力損失を最小限に抑えることを目的とする。   The present invention has been made in view of the above problems, and an object of the present invention is to suppress output loss to a minimum even if a crack occurs in an overlapping portion between an output extraction bus bar portion and a current collecting portion of a back electrode.

上記目的を達成するために、本発明の一形態に係る太陽電池素子は、表面及び裏面を有する半導体基板と、該半導体基板の表面側及び裏面側のそれぞれに配置された複数の出力取出用バスバー部と、前記半導体基板の裏面側に配置された集電部と、を備え前記半導
体基板の裏面側に配置された前記出力取出用バスバー部は、第1出力取出用バスバー部と、該第1出力取出用バスバー部の両端のそれぞれから隔てて配置された、第2出力取出用バスバー部と、第3出力取出用バスバー部とを有しており前記集電部は、前記第1出力取出用バスバー部の前記両端、前記第2出力取出用バスバー部の内側、及び、前記第3出力取出用バスバー部の内側のそれぞれに重なっているとともに、記半導体基板の表面側に配置された前記出力取出用バスバー部が、前記第2出力取出用バスバー部の短手方向の側端部と前記第1出力取出用バスバー部の短手方向における前記第2出力取出用バスバー部側の端部との間、および前記第3出力取出用バスバー部の短手方向の側端部と前記第1出力取出用バスバー部の短手方向における前記第3出力取出用バスバー部側の端部との間に配置されていることを特徴とする。
To achieve the above object, a solar cell element according to an embodiment of the present invention includes a semiconductor substrate having a front surface and a back surface, and a plurality of output extraction bus bars arranged on the front surface side and the back surface side of the semiconductor substrate. a Department, said and a current collecting part disposed on the back side of the semiconductor substrate, the output extraction bus bar portion disposed on the back surface side of the semiconductor substrate, the first output extraction bus bar section, said 1 is spaced from the respective ends of the output extraction bus bar portion, and the second output extraction bus bar portion, and a third output extraction bus bar unit, the current collector, the first output wherein both ends of the take-out bus bar unit, the inner side of the second output extraction bus bar portions, and, together with the overlap on each of the inner side of the third output extraction bus bar portion, disposed on the surface side of the front Symbol semiconductor substrate Output output bar Bar portion, between the lateral direction of the inner side end portion and the first output and the second output extraction bus bar portion of the end portion in the lateral direction of the take-out bus bar portion of the second output extraction bus bar unit , and disposed between the third output and the third output extraction bus bar portion of the end portion in the lateral direction of the inner side end portion and the first output extraction bus bar portions in the widthwise direction of the take-out bus bar unit It is characterized by being.

また、本発明の一形態に係る太陽電池モジュールは、複数を接続線で接続して、前記太陽電池素子の表面側に透光性部材を、前記太陽電池素子の裏面側に裏面部材をそれぞれ配設して一体化したことを特徴とする。   Further, in the solar cell module according to one embodiment of the present invention, a plurality of solar cell modules are connected by connection lines, and a translucent member is arranged on the front surface side of the solar cell element and a back member is arranged on the back surface side of the solar cell element. It is characterized by being installed and integrated.

以上のように、本発明の一形態に係る太陽電池素子によれば、セル割れが発生する可能性があるのは中央の銀電極の両端とセル両端に配置した銀電極の内側であるが、同時に2箇所以上での割れが発生しなければ、何れの位置で割れが発生しても出力を取り出すことが可能となり、出力の損失を最低限に抑える効果がある。   As described above, according to the solar cell element according to one embodiment of the present invention, cell cracks may occur on both ends of the central silver electrode and on the inner side of the silver electrode disposed on both ends of the cell. If cracks do not occur at two or more locations at the same time, the output can be taken out regardless of where the cracks occur, and the effect of minimizing output loss is obtained.

また、本発明の一形態に係る太陽電池モジュールによれば、出力損失を極力低減した太陽電池モジュールとなる。   Moreover, according to the solar cell module which concerns on one form of this invention, it becomes a solar cell module which reduced output loss as much as possible.

本発明に係る太陽電池素子を示す図である。It is a figure which shows the solar cell element which concerns on this invention. 本発明に係る太陽電池素子のセル割れと出力損失との関係を示す図である。It is a figure which shows the relationship between the cell crack of the solar cell element which concerns on this invention, and an output loss. 本発明に係る太陽電池素子の製造方法を示す図である。It is a figure which shows the manufacturing method of the solar cell element which concerns on this invention. 従来の太陽電池素子を示す断面図である。It is sectional drawing which shows the conventional solar cell element.

以下、本発明を添付図面に基づき詳細に説明する。図1は本発明の太陽電池素子の構造を示す図であり、(a)は断面図、(b)は太陽電池素子を裏面側から見た図である。図1(a)(b)において、1は一導電型(例えばP型)を示す半導体基板、1aは半導体基板1の表面部分にリン原子が高濃度に拡散され他の導電型を呈する領域、2は一主面側の反射防止膜、3は半導体接合部である。この反射防止膜2は電極に相当する部分がエッチングされもしくはその上から電極が形成される。4は裏面から出力を取り出すための銀電極、5は裏面アルミニウム電極であり、一般にこれがシリコン1に焼き付けられた際には裏面で発生したキャリアが再結合することを防ぐ裏面電界層としての効果があることも知られている。裏面では銀を主成分とする電極4とアルミニウムを主成分とする電極5が形成されるが、両者は電気的伝導を保つために、互いの一部分が重なり合うことが必要になる。6は隣接する太陽電池同志を接続する配線部材がハンダ付けされる表面電極のバスバー部、図示されていないが反射防止膜2の表面に沿ってバスバー部6と垂直にフィンガー電極7が設置されている。表面電極6、7及び裏面電極4、5の配置は、両者が半導体基板1を挟んで重なる位置に配置するようにする。   Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a diagram showing the structure of a solar cell element of the present invention, where (a) is a cross-sectional view and (b) is a diagram of the solar cell element as viewed from the back side. 1A and 1B, 1 is a semiconductor substrate having one conductivity type (for example, P-type), 1a is a region exhibiting another conductivity type in which phosphorus atoms are diffused at a high concentration on the surface portion of the semiconductor substrate 1, Reference numeral 2 denotes an antireflection film on one main surface side, and 3 denotes a semiconductor junction. In the antireflection film 2, a portion corresponding to the electrode is etched or an electrode is formed thereon. 4 is a silver electrode for taking out output from the back surface, and 5 is a back surface aluminum electrode. Generally, when this is baked on silicon 1, it has an effect as a back surface electric field layer that prevents recombination of carriers generated on the back surface. It is also known that there is. On the back surface, an electrode 4 mainly composed of silver and an electrode 5 mainly composed of aluminum are formed. However, in order to maintain electrical conduction, both of them need to overlap each other. Reference numeral 6 denotes a bus bar portion of a surface electrode on which wiring members connecting adjacent solar cells are soldered, and a finger electrode 7 is installed perpendicularly to the bus bar portion 6 along the surface of the antireflection film 2 (not shown). Yes. The front electrodes 6 and 7 and the back electrodes 4 and 5 are arranged at positions where they overlap with the semiconductor substrate 1 interposed therebetween.

図1(b)に示すように、出力取出用の裏面銀電極の配置パターンを半導体基板1の裏面側の中央に一本4b(第1出力取出用バスバー部)と半導体基板の対向する両端に一本ずつ4a(第2出力取出用バスバー部)、4c(第3出力取出用バスバー部)を配置する。アルミニウムの配置パターン5は裏面銀電極4bの両端と裏面銀電極4a、4cの内側だけで重なればよい。 As shown in FIG. 1B, the arrangement pattern of the back surface silver electrode for output extraction is arranged at the center of the back surface side of the semiconductor substrate 1 4b (first output extraction bus bar portion) and opposite ends of the semiconductor substrate. 4a (second output extraction bus bar portion) and 4c (third output extraction bus bar portion) are arranged one by one. The arrangement pattern 5 of aluminum should just overlap with the both ends of the back surface silver electrode 4b, and the inner surface of the back surface silver electrodes 4a and 4c.

この結果、セル割れが発生する可能性があるのは中央の銀電極4bの両端とセル両端に配置した銀電極4a、4cの内側であるが、同時に2箇所以上で割れが発生しなければ、何れの位置で割れが発生しても出力を取り出すことが可能となり、出力の損失を最低限に抑える効果がある。   As a result, cell cracks may occur at both ends of the central silver electrode 4b and the inner side of the silver electrodes 4a and 4c arranged at both ends of the cell, but if cracks do not occur at two or more locations at the same time, It is possible to take out the output regardless of where the crack occurs, and there is an effect of minimizing output loss.

つまり、図2に示すように、セルの割れが発生しやすい個所は図の丸1〜丸4線で示した箇所である。   That is, as shown in FIG. 2, the portion where the cell is likely to crack is the portion indicated by circle 1 to circle 4 in the figure.

リード線(出力取り出し用の銅箔)は表電極6(2本)と裏面電極4(3本)の合計5本であるが、セルの割れが同時に2箇所以上割れるというのは、丸1と丸2、丸3、丸4のいずれかが割れるとか、丸2と丸3、丸4のいずれかが割れるということである。丸1が割れたとき出力は中央の銀電極4bと他方端部の銀電極4cにより取り出すことができる。また、丸2が割れたときには裏面銀電極4bは裏面銀電極4c側のセルと裏面銀電極4a側のセルの2つに分かれているが、一方は裏面銀電極4aのみでもう一方は裏面銀電極4bと裏面銀電極4cで出力を取り出すことができる。   There are a total of five lead wires (copper foil for output extraction) of the front electrode 6 (two) and the back electrode 4 (three). One of the circle 2, the circle 3 and the circle 4 is broken, or the circle 2, the circle 3 and the circle 4 are broken. When the circle 1 is broken, the output can be taken out by the central silver electrode 4b and the silver electrode 4c at the other end. Further, when the circle 2 is broken, the back surface silver electrode 4b is divided into a cell on the back surface silver electrode 4c side and a cell on the back surface silver electrode 4a side, one of which is only the back surface silver electrode 4a and the other is the back surface silver electrode. An output can be taken out by the electrode 4b and the back surface silver electrode 4c.

丸3がわれたときは丸2が割れたときと同じである。丸4が割れたときには丸1が割れたときと同じである。   When the circle 3 is broken, it is the same as when the circle 2 is broken. When the circle 4 is broken, it is the same as when the circle 1 is broken.

裏面の電極が2本の場合、例えば4cがないときは、丸3で割れが発生すると、丸3−丸4にかけての出力を取り出すことができなくなる。これは裏面電極が2本の場合には、電極の配置をどのようにしても必ず起こる。   When there are two electrodes on the back surface, for example, when there is no 4c, if a crack occurs in the circle 3, the output from the circle 3 to the circle 4 cannot be taken out. This always occurs regardless of the arrangement of the electrodes when there are two back electrodes.

なお、図1では裏面電極の各々の出力取出部を連続した一本のパターンで示したが、必ずしも連続でなくてもよく、直線状に並んだドットパターンなどでもよい。   In FIG. 1, each output extraction portion of the back electrode is shown as a continuous pattern. However, it is not necessarily continuous, and may be a dot pattern arranged in a straight line.

次に、図3に基づいて、本発明の太陽電池素子の製造方法を説明する。   Next, based on FIG. 3, the manufacturing method of the solar cell element of this invention is demonstrated.

まず、半導体基板1を用意する(図3(a)参照)。この半導体基板1は、単結晶又は多結晶シリコンなどから成る。この半導体基板1は、ボロン(B)などの一導電型半導体不純物を1×1016〜1018atoms/cm程度含有し、比抵抗1.5Ωcm程度の基板である。単結晶シリコンの場合は引き上げ法などによって形成され、多結晶シリコンの場合は鋳造法などによって形成される。多結晶シリコンは、大量生産が可能で製造コスト面で単結晶シリコンよりも有利である。引き上げ法や鋳造法によって形成されたインゴットを300μm程度の厚みにスライスして、10cm×10cmまたは15cm×15cm程度の大きさに切断してシリコン基板1とする。次に、この基板1の切断面を清浄化するために表面をフッ酸やフッ硝酸などでごく微量エッチングする。 First, the semiconductor substrate 1 is prepared (see FIG. 3A). The semiconductor substrate 1 is made of single crystal or polycrystalline silicon. This semiconductor substrate 1 is a substrate containing about 1 × 10 16 to 10 18 atoms / cm 3 of one conductivity type semiconductor impurity such as boron (B) and having a specific resistance of about 1.5 Ωcm. In the case of single crystal silicon, it is formed by a pulling method, and in the case of polycrystalline silicon, it is formed by a casting method or the like. Polycrystalline silicon can be mass-produced and is more advantageous than single crystal silicon in terms of manufacturing cost. An ingot formed by a pulling method or a casting method is sliced to a thickness of about 300 μm and cut into a size of about 10 cm × 10 cm or 15 cm × 15 cm to form a silicon substrate 1. Next, in order to clean the cut surface of the substrate 1, a very small amount of the surface is etched with hydrofluoric acid or hydrofluoric acid.

次に、半導体基板1を拡散炉中に配置して、オキシ塩化リン(POCl)などの中で加熱することによって、半導体基板1の表面部分にリン原子を拡散させてシート抵抗が30〜300Ω/□の他の導電型を呈する領域1aを形成し、半導体接合部3を形成する(図3(b)参照)。 Next, the semiconductor substrate 1 is placed in a diffusion furnace and heated in phosphorous oxychloride (POCl 3 ) or the like, thereby diffusing phosphorus atoms in the surface portion of the semiconductor substrate 1 so that the sheet resistance is 30 to 300Ω. A region 1a having another conductivity type is formed to form a semiconductor junction 3 (see FIG. 3B).

次に、半導体基板1の一主面側の他の導電型を呈する領域1aのみを残して他の部分を除去した後に、純水で洗浄する(図3(c)参照)。この半導体基板1の一主面側以外の他の導電型を呈する領域1aの除去は、半導体基板1の一主面側にレジスト膜を塗布し、フッ酸と硝酸の混合液を用いてエッチング除去した後、レジスト膜を除去することにより行なう。   Next, after removing other portions except for the region 1a exhibiting another conductivity type on the one main surface side of the semiconductor substrate 1, the substrate is washed with pure water (see FIG. 3C). The removal of the region 1a exhibiting a conductivity type other than the one main surface side of the semiconductor substrate 1 is performed by applying a resist film on the one main surface side of the semiconductor substrate 1 and performing etching removal using a mixed solution of hydrofluoric acid and nitric acid. After that, the resist film is removed.

次に、半導体基板1の一主面側に反射防止膜2を形成する(図3(d)参照)。この反射防止膜2は例えば窒化シリコン膜などから成り、例えばシラン(SiH)とアンモニア(NH)との混合ガスをグロー放電分解でプラズマ化させて堆積させるプラズマCVD法などで形成される。この反射防止膜2は、半導体基板1との屈折率差などを考慮して、屈折率が1.8〜2.3程度になるように形成され、厚み500〜1000Å程度の厚みに形成される。この窒化シリコン膜は形成する際にパッシベーション効果があり、反射防止の機能と併せて太陽電池の電気特性を向上させる効果がある。 Next, an antireflection film 2 is formed on one main surface side of the semiconductor substrate 1 (see FIG. 3D). The antireflection film 2 is made of, for example, a silicon nitride film, and is formed by, for example, a plasma CVD method in which a mixed gas of silane (SiH 4 ) and ammonia (NH 3 ) is plasmatized by glow discharge decomposition and deposited. This antireflection film 2 is formed so as to have a refractive index of about 1.8 to 2.3 in consideration of a refractive index difference with respect to the semiconductor substrate 1, and is formed to a thickness of about 500 to 1000 mm. . This silicon nitride film has a passivation effect when it is formed, and has an effect of improving the electric characteristics of the solar cell together with an antireflection function.

次に、出力取出用バスバー部4を形成するための銀電極材料を塗布して乾燥した後(図3(e)参照)、裏面アルミニウム電極5を上記裏面銀電極材料の一部を覆わないように塗布して乾燥させる(図3(f)参照)。なお、この裏面電極の銀材料とアルミニウム材料を塗布する順番はこの逆でもよい。次に、表面電極材料6および7を塗布して乾燥する(図3(g)参照)。   Next, after applying and drying a silver electrode material for forming the output extraction bus bar portion 4 (see FIG. 3E), the back surface aluminum electrode 5 is not covered with a part of the back surface silver electrode material. And dried (see FIG. 3F). Note that the order of applying the silver material and the aluminum material of the back electrode may be reversed. Next, the surface electrode materials 6 and 7 are applied and dried (see FIG. 3G).

この電極材料5はアルミニウムと有機ビヒクルとガラスフリットをアルミニウム100重量部に対してそれぞれ10〜30重量部、0.1〜5重量部を添加してペースト状にしたものを、電極材料4、6は、銀と有機ビヒクルとガラスフリットを銀100重量部に対してそれぞれ10〜30重量部、0.1〜5重量部を添加してペースト状にしたものをスクリーン印刷法で印刷する。これら電極材料4、5、6は乾燥後に同時に600〜800℃で1〜30分程度焼成することにより焼き付けられる。   This electrode material 5 is prepared by adding 10 to 30 parts by weight and 0.1 to 5 parts by weight of aluminum, an organic vehicle, and glass frit to 100 parts by weight of aluminum, respectively. Is a screen printing method in which silver, an organic vehicle and glass frit are added in a paste form by adding 10 to 30 parts by weight and 0.1 to 5 parts by weight, respectively, with respect to 100 parts by weight of silver. These electrode materials 4, 5, and 6 are baked by baking at 600 to 800 ° C. for about 1 to 30 minutes at the same time after drying.

上述のような太陽電池を複数用意し、特定の太陽電池の表面電極と隣接する太陽電池の裏面電極を順次接続して、表面側にガラスなどの透光部材を配設するとともに、裏面側にポリエチレンのシートやアルミ箔などを配設して全体をエチレンビニルアセテートなどの透光性樹脂で接着して太陽電池モジュールを形成する。裏面電極の裏面アルミニウム5と銀4の重なり部分で割れが発生しても出力損失を最小限に抑える太陽電池を用いて、太陽電池モジュールを作成する。   Prepare a plurality of solar cells as described above, sequentially connect the surface electrode of the specific solar cell and the back electrode of the adjacent solar cell, and arrange a translucent member such as glass on the front side, and on the back side A polyethylene sheet, aluminum foil, or the like is disposed, and the whole is bonded with a light-transmitting resin such as ethylene vinyl acetate to form a solar cell module. A solar cell module is created using a solar cell that minimizes output loss even if cracks occur in the overlapping portion of the back surface aluminum 5 and silver 4 of the back electrode.

次に本発明の実施例を示す。半導体基板として15cm角で厚さ0.3mm、比抵抗1.5Ω・cmのP型シリコン基板を準備した。そして熱拡散法でオキシ塩化リン(POCl)を拡散源として、深さ0.5μmのN型拡散層を形成した。 Next, examples of the present invention will be described. A P-type silicon substrate having a 15 cm square, a thickness of 0.3 mm, and a specific resistance of 1.5 Ω · cm was prepared as a semiconductor substrate. Then, an N-type diffusion layer having a depth of 0.5 μm was formed by thermal diffusion using phosphorus oxychloride (POCl 3 ) as a diffusion source.

次に表面にプラズマCVD法で窒化シリコンの反射防止膜を800Åの厚さで形成し、不要部のN型拡散層を除去した。   Next, a silicon nitride antireflection film was formed on the surface by a plasma CVD method to a thickness of 800 mm, and unnecessary N-type diffusion layers were removed.

裏面電極として出力取り出し用の銀を従来のパターン(2本)と本発明に係るパターン(3本)で塗布し、その後それぞれのパターンに応じたアルミニウムのパターンを印刷して表面にも銀ペーストをスクリーン印刷して750度15分で焼き付けた後、上記集電極表面を半田被覆して太陽電池を製造した。セル割れが発生した場合(1個所)の出力損失の比較を行った。その結果を表1に示した。   As the back electrode, silver for output extraction is applied in the conventional pattern (2) and the pattern according to the present invention (3), and then an aluminum pattern corresponding to each pattern is printed and silver paste is also applied to the surface. After screen printing and baking at 750 ° C. for 15 minutes, the surface of the collector electrode was solder-coated to manufacture a solar cell. Comparison of output loss when cell cracking occurred (1 place) was performed. The results are shown in Table 1.

Figure 0005769381
Figure 0005769381

表1に示した通り、セル割れが発生した際の出力損失は、従来パターンでは73.8%であったが、本発明によれば94.5%に抑えることができた。   As shown in Table 1, output loss when cell cracking occurred was 73.8% in the conventional pattern, but could be suppressed to 94.5% according to the present invention.

1:半導体基板
1a:他の導電型を呈する領域
2:反射防止膜
3:半導体接合部
4:裏面電極の出力取出用バスバー部
5:裏面電極の集電部
6:表面電極の出力取出用バスバー部
7:表面電極の集電用フィンガー部
1: Semiconductor substrate 1a: Region exhibiting other conductivity type 2: Antireflection film 3: Semiconductor junction 4: Bus electrode bar for back electrode output 5: Current collector for back electrode 6: Bus bar for output of front electrode Part 7: Current electrode finger collection part

Claims (3)

表面及び裏面を有する半導体基板と、
該半導体基板の表面側及び裏面側のそれぞれに配置された複数の出力取出用バスバー部と、
前記半導体基板の裏面側に配置された集電部と、を備え
前記半導体基板の裏面側に配置された前記出力取出用バスバー部は、第1出力取出用バスバー部と、該第1出力取出用バスバー部の両端のそれぞれから隔てて配置された、第2出力取出用バスバー部と、第3出力取出用バスバー部とを有しており
前記集電部は、前記第1出力取出用バスバー部の前記両端、前記第2出力取出用バスバー部の内側、及び、前記第3出力取出用バスバー部の内側のそれぞれに重なっているとともに、
記半導体基板の表面側に配置された前記出力取出用バスバー部が、前記第2出力取出用バスバー部の短手方向の側端部と前記第1出力取出用バスバー部の短手方向における前記第2出力取出用バスバー部側の端部との間、および前記第3出力取出用バスバー部の短手方向の側端部と前記第1出力取出用バスバー部の短手方向における前記第3出力取出用バスバー部側の端部との間に配置されている、太陽電池素子。
A semiconductor substrate having a front surface and a back surface;
A plurality of output extraction bus bar portions disposed on the front side and the back side of the semiconductor substrate, and
A current collector disposed on the back side of the semiconductor substrate ,
The output extraction bus bar portion disposed on the back surface side of the semiconductor substrate includes a first output extraction bus bar section, which is spaced from both ends of the first output extraction bus bar section, the second output extraction And a third output extraction bus bar part ,
The current collector overlaps the both ends of the first output extraction bus bar part, the inner side of the second output extraction bus bar part, and the inner side of the third output extraction bus bar part, respectively.
The output extraction bus bar portion disposed on the surface side of the front Symbol semiconductor substrate, in the lateral direction of the first output extraction bus bar section and the second output inner side end portion in the short direction of the take-out bus bar unit wherein in said between the second output extraction bus bar portion of the end portion, and the third output short direction of the inner side end portion and the first output extraction bus bar portions in the widthwise direction of the take-out bus bar portion first 3 A solar cell element disposed between the end portion on the output output bus bar portion side .
前記集電部はアルミニウムを含み、前記半導体基板の裏面側に配置された前記出力取出用バスバー部は銀を含むことを特徴とする請求項1に記載の太陽電池素子。 The current collector comprises aluminum, the solar battery cell of claim 1 wherein the output extraction bus bar portion disposed on the back surface side of the semiconductor substrate which comprises silver. 請求項1または2に記載の太陽電池素子の複数を接続線で接続して、前記太陽電池素子の表面側に透光性部材を、前記太陽電池素子の裏面側に裏面部材をそれぞれ配設して一体化したことを特徴とする太陽電池モジュール。 A plurality of solar cell elements according to claim 1 or 2 are connected by a connection line, a translucent member is disposed on the front surface side of the solar cell element, and a back surface member is disposed on the back surface side of the solar cell element. A solar cell module characterized by being integrated.
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