JP5766313B2 - 膨張熱プラズマ装置 - Google Patents
膨張熱プラズマ装置 Download PDFInfo
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- JP5766313B2 JP5766313B2 JP2014011359A JP2014011359A JP5766313B2 JP 5766313 B2 JP5766313 B2 JP 5766313B2 JP 2014011359 A JP2014011359 A JP 2014011359A JP 2014011359 A JP2014011359 A JP 2014011359A JP 5766313 B2 JP5766313 B2 JP 5766313B2
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 32
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- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
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- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
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- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
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- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
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- 229910052734 helium Inorganic materials 0.000 description 1
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
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- 238000005286 illumination Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
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- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 239000001272 nitrous oxide Substances 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- HMMGMWAXVFQUOA-UHFFFAOYSA-N octamethylcyclotetrasiloxane Chemical compound C[Si]1(C)O[Si](C)(C)O[Si](C)(C)O[Si](C)(C)O1 HMMGMWAXVFQUOA-UHFFFAOYSA-N 0.000 description 1
- 150000001282 organosilanes Chemical class 0.000 description 1
- 125000005375 organosiloxane group Chemical group 0.000 description 1
- 238000000678 plasma activation Methods 0.000 description 1
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- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
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- 239000011593 sulfur Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- UHUUYVZLXJHWDV-UHFFFAOYSA-N trimethyl(methylsilyloxy)silane Chemical compound C[SiH2]O[Si](C)(C)C UHUUYVZLXJHWDV-UHFFFAOYSA-N 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3452—Supplementary electrodes between cathode and anode, e.g. cascade
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3463—Oblique nozzles
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
(a)当該陰極板の一体部分である固定陰極チップを含む陰極板、
(b)1以上のカスケード板、
(c)前記陰極板と前記カスケード板との間に配設された1以上の隔離板、
(d)陽極板、及び
(e)ガス用入口
を含んでなるプラズマ発生用アセンブリであって、前記陰極板、隔離板、カスケード板及び陽極板は互いに「電気絶縁」されており、前記電気絶縁された陰極板、隔離板及びカスケード板はプラズマ発生室を画定し、前記陰極チップは前記プラズマ発生室内に配設されているアセンブリに関する。
(1)堆積室と、
(2)1以上のプラズマ発生用アセンブリと
を含んでなる基材の表面処理用の堆積装置であって、前記プラズマ発生用アセンブリは
(a)当該陰極板の一体部分である固定陰極チップを含む陰極板、
(b)1以上のカスケード板、
(c)前記陰極板と前記カスケード板との間に配設された1以上の隔離板、
(d)陽極板、及び
(e)ガス用入口
を含み、前記陰極板、隔離板、カスケード板及び陽極板は互いに「電気絶縁」されており、前記電気絶縁された陰極板、隔離板及びカスケード板はプラズマ発生室を画定し、前記陰極チップは前記プラズマ発生室内に配設されている堆積装置に関する。
(a)1以上の陰極、1以上のカスケード板、及び隔離板又は陰極ハウジングの少なくとも一方を含むレトロフィット可能なサブアセンブリであって、前記隔離板又は陰極ハウジングは前記陰極板と前記カスケード板との間に配設されているサブアセンブリ、
(b)陽極板、並びに
(c)ガス用入口
を含んでなるプラズマ発生用アセンブリであって、前記陰極、隔離板又は陰極ハウジング、カスケード板及び陽極板は互いに「電気絶縁」されており、前記電気絶縁された陰極板、隔離板又は陰極ハウジング、及びカスケード板はプラズマ発生室を画定し、前記陰極は前記プラズマ発生室内に配設されているアセンブリに関する。
12 陰極板
14 陰極チップ
16 隔離板
18 カスケード板
20 ガス用入口
22 陽極板
24 プラズマ発生室
26 ガスケット
34 開口
36 拡張開口
42 水入口
44 水出口
Claims (10)
- (a)陰極板の一体部分である固定陰極チップを含む陰極板、
(b)1つ以上のカスケード板、
(c)前記陰極板と前記カスケード板との間に配設された1つ以上の隔離板、
(d)陽極板、及び
(e)ガス用入口
を備えたプラズマ発生用アセンブリであって、
前記陰極板、隔離板、カスケード板及び陽極板が互いに電気絶縁されており、前記電気絶縁された陰極板、隔離板及びカスケード板がプラズマ発生室を画定し、前記固定陰極チップが前記プラズマ発生室内に配設されていて、
前記陰極板、前記1つ以上のカスケード板、前記1つ以上の隔離板及び前記陽極板の各々が内部冷却路を備え、前記内部冷却路が、前記陰極板、カスケード板、隔離板及び陽極板の各々に画定された同軸穴を介して互いに接続されていて、前記内部冷却路の一部が、1つ以上の入口と1つ以上の出口との間における冷却媒体用の複数の回路を画定し、前記複数の回路のうちの一つの回路が、前記陰極板、前記隔離板、前記カスケード板及び前記陽極板の各々の内部に配置されている、アセンブリ。 - 電気絶縁が、Oリングを伴う電気絶縁スペーサー及びガスケットからなる群から選択される部品を窒化ホウ素製の中心リングと共に使用する技術の1つによって達成され、前記電気絶縁スペーサー及びガスケットの厚さは前記中心リングより大きい、請求項1記載のアセンブリ。
- 前記陰極板、隔離板及びカスケード板の各々が厚さによって特徴づけられ、前記厚さが略等しい、請求項1記載のアセンブリ。
- 前記陰極板、隔離板及びカスケード板が銅(Cu)からなる、請求項1記載のアセンブリ。
- 前記隔離板が直径を有するように形成された開口を有し、前記直径が前記プラズマ発生室の直径を画定し、前記カスケード板がプラズマ流のための制限通路を含み、前記制限通路が前記プラズマ発生室の前記直径より小さい直径を有する、請求項1記載のアセンブリ。
- 前記冷却媒体が水である、請求項1記載のアセンブリ。
- (a)堆積室と、
(b)請求項1から6のいずれか一項に記載の1つ以上のアセンブリと
を備えた基材の表面処理用の堆積装置。 - 堆積室と、
1つ以上のプラズマ発生用アセンブリと
を備えたプラズマ堆積用装置であって、前記プラズマ発生用アセンブリが、
(a)1つ以上の陰極板と、1つ以上のカスケード板と、隔離板又は陰極ハウジングの少なくとも一方とを含むレトロフィット可能なサブアセンブリであって、前記隔離板又は陰極ハウジングが前記陰極板と前記カスケード板との間に配設されている、サブアセンブリと、
(b)陽極板と、
(c)ガス用入口と
を備え、
前記陰極板、隔離板又は陰極ハウジング、カスケード板及び陽極板が互いに電気絶縁されており、前記電気絶縁された陰極板、隔離板又は陰極ハウジング、及びカスケード板がプラズマ発生室を画定し、前記陰極板が前記プラズマ発生室内に配設されていて、
前記陰極板、前記1つ以上のカスケード板、前記1つ以上の隔離板及び前記陽極板の各々が内部冷却路を備え、前記内部冷却路が、前記陰極板、カスケード板、隔離板及び陽極板の各々に画定された同軸穴を介して互いに接続されていて、前記内部冷却路の一部が、1つ以上の入口と1つ以上の出口との間における冷却媒体用の複数の回路を画定し、前記複数の回路のうちの一つの回路が、前記陰極板、前記隔離板、前記カスケード板及び前記陽極板の各々の内部に配置されていることを特徴とする装置。 - 前記レトロフィット可能なサブアセンブリが、プラズマ堆積室内に1トル以下の真空を維持しながら前記プラズマ発生用アセンブリから取外しできる、請求項8記載の装置。
- 前記陰極板が固定陰極チップを含む陰極板であり、前記固定陰極チップが前記陰極板の一体部分である、請求項8記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/881,949 US7703413B2 (en) | 2004-06-28 | 2004-06-28 | Expanded thermal plasma apparatus |
US10/881,949 | 2004-06-28 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2007518257A Division JP5855325B2 (ja) | 2004-06-28 | 2005-06-22 | 膨張熱プラズマ装置 |
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JP2014089983A JP2014089983A (ja) | 2014-05-15 |
JP5766313B2 true JP5766313B2 (ja) | 2015-08-19 |
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JP2007518257A Active JP5855325B2 (ja) | 2004-06-28 | 2005-06-22 | 膨張熱プラズマ装置 |
JP2014011359A Active JP5766313B2 (ja) | 2004-06-28 | 2014-01-24 | 膨張熱プラズマ装置 |
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US (1) | US7703413B2 (ja) |
EP (1) | EP1767071B1 (ja) |
JP (2) | JP5855325B2 (ja) |
WO (1) | WO2006012179A2 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8216679B2 (en) * | 2005-07-27 | 2012-07-10 | Exatec Llc | Glazing system for vehicle tops and windows |
WO2008134621A1 (en) * | 2007-04-27 | 2008-11-06 | Exatec, Llc | Abrasion resistant plastic glazing with in-mold coating |
KR101462700B1 (ko) | 2007-05-01 | 2014-11-26 | 엑사테크 엘.엘.씨. | 캡슐화된 플라스틱 패널 및 그 제조 방법 |
US9950481B2 (en) * | 2007-05-01 | 2018-04-24 | Exatec Llc | Edge healing and field repair of plasma coating |
US20080286537A1 (en) * | 2007-05-09 | 2008-11-20 | Christophe Lefaux | Pre-dry treatment of ink in decorative plastic glazing |
US20120258555A1 (en) * | 2011-04-11 | 2012-10-11 | Lam Research Corporation | Multi-Frequency Hollow Cathode and Systems Implementing the Same |
KR101871867B1 (ko) | 2011-04-14 | 2018-06-27 | 엑사테크 엘.엘.씨. | 유기 수지 라미네이트 |
WO2015172237A1 (en) | 2014-05-16 | 2015-11-19 | Pyrogenesis Canada Inc. | Energy efficient high power plasma torch |
US11037765B2 (en) * | 2018-07-03 | 2021-06-15 | Tokyo Electron Limited | Resonant structure for electron cyclotron resonant (ECR) plasma ionization |
CN114557138A (zh) * | 2019-10-02 | 2022-05-27 | 韩国水力原子力株式会社 | 等离子体炬 |
CN112911780B (zh) * | 2019-11-19 | 2024-07-16 | 核工业西南物理研究院 | 一种级联式等离子体发生器 |
CN115365083B (zh) * | 2021-05-17 | 2024-06-11 | 亨泰光学股份有限公司 | 双向阳极电浆化学气相沉积镀膜设备 |
CN113727507B (zh) * | 2021-08-17 | 2023-03-24 | 哈尔滨工业大学 | 一种多通道电弧等离子体源级联铜片水冷装置及其优化方法 |
Family Cites Families (15)
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US4035684A (en) * | 1976-02-23 | 1977-07-12 | Ustav Pro Vyzkum, Vyrobu A Vyuziti Radiosotopu | Stabilized plasmatron |
DE3430383A1 (de) * | 1984-08-17 | 1986-02-27 | Plasmainvent AG, Zug | Plasmaspritzbrenner fuer innenbeschichtungen |
US4780591A (en) | 1986-06-13 | 1988-10-25 | The Perkin-Elmer Corporation | Plasma gun with adjustable cathode |
NL8701530A (nl) * | 1987-06-30 | 1989-01-16 | Stichting Fund Ond Material | Werkwijze voor het behandelen van oppervlakken van substraten met behulp van een plasma en reactor voor het uitvoeren van die werkwijze. |
US5227603A (en) * | 1988-09-13 | 1993-07-13 | Commonwealth Scientific & Industrial Research Organisation | Electric arc generating device having three electrodes |
JPH0864542A (ja) * | 1994-08-25 | 1996-03-08 | Plasma Syst:Kk | 半導体処理装置用真空チャンバーおよびその製造方法 |
US5455401A (en) * | 1994-10-12 | 1995-10-03 | Aerojet General Corporation | Plasma torch electrode |
DE19828704A1 (de) * | 1998-06-26 | 1999-12-30 | Thomson Tubes Electroniques Gm | Plasmabeschleuniger-Anordnung |
US6261694B1 (en) * | 1999-03-17 | 2001-07-17 | General Electric Company | Infrared reflecting coatings |
US6397776B1 (en) * | 2001-06-11 | 2002-06-04 | General Electric Company | Apparatus for large area chemical vapor deposition using multiple expanding thermal plasma generators |
AU2002323204A1 (en) * | 2001-08-16 | 2003-03-03 | Dow Global Technologies Inc. | Cascade arc plasma and abrasion resistant coatings made therefrom |
NL1021185C2 (nl) * | 2002-07-30 | 2004-02-03 | Fom Inst Voor Plasmafysica | Inrichting voor het behandelen van een oppervlak van een substraat en een plasmabron. |
US20040040833A1 (en) * | 2002-08-27 | 2004-03-04 | General Electric Company | Apparatus and method for plasma treating an article |
NL1023491C2 (nl) * | 2003-05-21 | 2004-11-24 | Otb Groep B V | Cascadebron. |
JP4926653B2 (ja) * | 2006-10-31 | 2012-05-09 | 京セラ株式会社 | プラズマ発生体、反応装置及び光源装置 |
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2004
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2005
- 2005-06-22 EP EP05766790.9A patent/EP1767071B1/en active Active
- 2005-06-22 JP JP2007518257A patent/JP5855325B2/ja active Active
- 2005-06-22 WO PCT/US2005/022185 patent/WO2006012179A2/en not_active Application Discontinuation
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JP2014089983A (ja) | 2014-05-15 |
EP1767071A2 (en) | 2007-03-28 |
JP2008504652A (ja) | 2008-02-14 |
WO2006012179A3 (en) | 2007-01-18 |
US7703413B2 (en) | 2010-04-27 |
US20050284374A1 (en) | 2005-12-29 |
JP5855325B2 (ja) | 2016-02-09 |
EP1767071B1 (en) | 2015-10-21 |
WO2006012179A2 (en) | 2006-02-02 |
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