JP5761860B2 - インプリントシステム、及びインプリント方法 - Google Patents

インプリントシステム、及びインプリント方法 Download PDF

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Publication number
JP5761860B2
JP5761860B2 JP2012065609A JP2012065609A JP5761860B2 JP 5761860 B2 JP5761860 B2 JP 5761860B2 JP 2012065609 A JP2012065609 A JP 2012065609A JP 2012065609 A JP2012065609 A JP 2012065609A JP 5761860 B2 JP5761860 B2 JP 5761860B2
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Japan
Prior art keywords
liquid
functional liquid
substrate
drive voltage
mold
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Expired - Fee Related
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JP2012065609A
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English (en)
Japanese (ja)
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JP2012213761A (ja
JP2012213761A5 (https=
Inventor
児玉　憲一
憲一 児玉
児玉　邦彦
邦彦 児玉
大松　禎
禎 大松
哲史 若松
哲史 若松
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Fujifilm Corp
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Fujifilm Corp
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Priority to JP2012065609A priority Critical patent/JP5761860B2/ja
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Publication of JP2012213761A5 publication Critical patent/JP2012213761A5/ja
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Publication of JP5761860B2 publication Critical patent/JP5761860B2/ja
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  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
JP2012065609A 2011-03-25 2012-03-22 インプリントシステム、及びインプリント方法 Expired - Fee Related JP5761860B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012065609A JP5761860B2 (ja) 2011-03-25 2012-03-22 インプリントシステム、及びインプリント方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011068532 2011-03-25
JP2011068532 2011-03-25
JP2012065609A JP5761860B2 (ja) 2011-03-25 2012-03-22 インプリントシステム、及びインプリント方法

Publications (3)

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JP2012213761A JP2012213761A (ja) 2012-11-08
JP2012213761A5 JP2012213761A5 (https=) 2014-05-22
JP5761860B2 true JP5761860B2 (ja) 2015-08-12

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JP2012065609A Expired - Fee Related JP5761860B2 (ja) 2011-03-25 2012-03-22 インプリントシステム、及びインプリント方法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0755215Y2 (ja) 1989-09-27 1995-12-20 ナショナル住宅産業株式会社 外壁パネルへの屋根パネル取り付け構造

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6329437B2 (ja) * 2014-06-10 2018-05-23 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
KR101819654B1 (ko) * 2015-05-22 2018-01-17 한국기계연구원 용액 공정 장치 및 이를 이용한 다층 구조 소자의 제조 방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3322276B2 (ja) * 1991-11-07 2002-09-09 セイコーエプソン株式会社 インクジェット式記録ヘッドの駆動方法、及びその装置
JP2004155192A (ja) * 2002-11-06 2004-06-03 Oce Technol Bv 印刷方法
US8076386B2 (en) * 2004-02-23 2011-12-13 Molecular Imprints, Inc. Materials for imprint lithography
JP5100609B2 (ja) * 2008-10-27 2012-12-19 株式会社東芝 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0755215Y2 (ja) 1989-09-27 1995-12-20 ナショナル住宅産業株式会社 外壁パネルへの屋根パネル取り付け構造

Also Published As

Publication number Publication date
JP2012213761A (ja) 2012-11-08

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