JP5759154B2 - 面外櫛形駆動の加速度計 - Google Patents

面外櫛形駆動の加速度計 Download PDF

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Publication number
JP5759154B2
JP5759154B2 JP2010268287A JP2010268287A JP5759154B2 JP 5759154 B2 JP5759154 B2 JP 5759154B2 JP 2010268287 A JP2010268287 A JP 2010268287A JP 2010268287 A JP2010268287 A JP 2010268287A JP 5759154 B2 JP5759154 B2 JP 5759154B2
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Japan
Prior art keywords
rotor
stator
teeth
substrate
drive
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Expired - Fee Related
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JP2010268287A
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Japanese (ja)
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JP2011169889A5 (enExample
JP2011169889A (ja
Inventor
マイケル・フォスター
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Honeywell International Inc
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Honeywell International Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
JP2010268287A 2010-02-19 2010-12-01 面外櫛形駆動の加速度計 Expired - Fee Related JP5759154B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/709,184 US8505380B2 (en) 2010-02-19 2010-02-19 Out-of plane comb-drive accelerometer
US12/709,184 2010-02-19

Publications (3)

Publication Number Publication Date
JP2011169889A JP2011169889A (ja) 2011-09-01
JP2011169889A5 JP2011169889A5 (enExample) 2014-05-15
JP5759154B2 true JP5759154B2 (ja) 2015-08-05

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ID=44006900

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JP2010268287A Expired - Fee Related JP5759154B2 (ja) 2010-02-19 2010-12-01 面外櫛形駆動の加速度計

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US (1) US8505380B2 (enExample)
EP (1) EP2362231A1 (enExample)
JP (1) JP5759154B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5967018B2 (ja) * 2013-05-31 2016-08-10 株式会社デンソー 容量式物理量センサ
WO2017160995A1 (en) * 2016-03-16 2017-09-21 Roger Laine Cyclohexylamine-based compounds and uses thereof
CN113702664B (zh) * 2021-07-20 2023-03-10 北京航天控制仪器研究所 一种宽频带mems加速度计及其制备方法
EP4428542B1 (en) * 2023-03-07 2025-06-18 Murata Manufacturing Co., Ltd. In-plane and out-of-plane accelerometer

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6199874B1 (en) * 1993-05-26 2001-03-13 Cornell Research Foundation Inc. Microelectromechanical accelerometer for automotive applications
US6000280A (en) * 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers
US6230566B1 (en) * 1999-10-01 2001-05-15 The Regents Of The University Of California Micromachined low frequency rocking accelerometer with capacitive pickoff
JP2006170704A (ja) * 2004-12-14 2006-06-29 Mitsubishi Electric Corp 容量型加速度検出装置
US7258010B2 (en) * 2005-03-09 2007-08-21 Honeywell International Inc. MEMS device with thinned comb fingers
US7469588B2 (en) * 2006-05-16 2008-12-30 Honeywell International Inc. MEMS vertical comb drive with improved vibration performance
JP2008292426A (ja) * 2007-05-28 2008-12-04 Panasonic Electric Works Co Ltd 静電容量式センサ
US7690254B2 (en) * 2007-07-26 2010-04-06 Honeywell International Inc. Sensor with position-independent drive electrodes in multi-layer silicon on insulator substrate
US7578190B2 (en) * 2007-08-03 2009-08-25 Freescale Semiconductor, Inc. Symmetrical differential capacitive sensor and method of making same
US8171793B2 (en) * 2008-07-31 2012-05-08 Honeywell International Inc. Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer
US8418555B2 (en) 2009-06-26 2013-04-16 Honeywell International Inc. Bidirectional, out-of-plane, comb drive accelerometer

Also Published As

Publication number Publication date
US20110203372A1 (en) 2011-08-25
US8505380B2 (en) 2013-08-13
EP2362231A1 (en) 2011-08-31
JP2011169889A (ja) 2011-09-01

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