JP5737722B2 - 積分光学導波路型干渉計 - Google Patents
積分光学導波路型干渉計 Download PDFInfo
- Publication number
- JP5737722B2 JP5737722B2 JP2011546799A JP2011546799A JP5737722B2 JP 5737722 B2 JP5737722 B2 JP 5737722B2 JP 2011546799 A JP2011546799 A JP 2011546799A JP 2011546799 A JP2011546799 A JP 2011546799A JP 5737722 B2 JP5737722 B2 JP 5737722B2
- Authority
- JP
- Japan
- Prior art keywords
- polymer
- core layer
- cladding
- waveguide
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 38
- 238000005253 cladding Methods 0.000 claims abstract description 79
- 229920000642 polymer Polymers 0.000 claims abstract description 64
- 239000010410 layer Substances 0.000 claims abstract description 58
- 239000000463 material Substances 0.000 claims abstract description 49
- 239000012792 core layer Substances 0.000 claims abstract description 48
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 230000008878 coupling Effects 0.000 claims abstract description 5
- 238000010168 coupling process Methods 0.000 claims abstract description 5
- 238000005859 coupling reaction Methods 0.000 claims abstract description 5
- 230000005855 radiation Effects 0.000 claims abstract description 3
- 239000000126 substance Substances 0.000 claims abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- -1 pentabromophenyl Chemical group 0.000 claims description 8
- 125000003118 aryl group Chemical group 0.000 claims description 6
- 239000006260 foam Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims description 4
- 229910052731 fluorine Inorganic materials 0.000 claims description 4
- 239000011737 fluorine Substances 0.000 claims description 4
- 230000014509 gene expression Effects 0.000 claims description 4
- 229920000058 polyacrylate Polymers 0.000 claims description 4
- 229920000193 polymethacrylate Polymers 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229920000620 organic polymer Polymers 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- YJCVRMIJBXTMNR-UHFFFAOYSA-N 1,3-dichloro-2-ethenylbenzene Chemical compound ClC1=CC=CC(Cl)=C1C=C YJCVRMIJBXTMNR-UHFFFAOYSA-N 0.000 claims description 2
- ISRGONDNXBCDBM-UHFFFAOYSA-N 2-chlorostyrene Chemical compound ClC1=CC=CC=C1C=C ISRGONDNXBCDBM-UHFFFAOYSA-N 0.000 claims description 2
- PZNHAQALPSHGRA-UHFFFAOYSA-N 2-n-ethenylbenzene-1,2-dicarboxamide Chemical compound NC(=O)C1=CC=CC=C1C(=O)NC=C PZNHAQALPSHGRA-UHFFFAOYSA-N 0.000 claims description 2
- ORNUPNRNNSVZTC-UHFFFAOYSA-N 2-vinylthiophene Chemical compound C=CC1=CC=CS1 ORNUPNRNNSVZTC-UHFFFAOYSA-N 0.000 claims description 2
- 239000004593 Epoxy Substances 0.000 claims description 2
- 239000004642 Polyimide Substances 0.000 claims description 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 2
- 239000005383 fluoride glass Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 239000000178 monomer Substances 0.000 claims description 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 2
- 229920001721 polyimide Polymers 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 2
- 239000004408 titanium dioxide Substances 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 2
- PTRVLELMDKQITQ-UHFFFAOYSA-N 2-methyl-n-naphthalen-1-ylprop-2-enamide Chemical compound C1=CC=C2C(NC(=O)C(=C)C)=CC=CC2=C1 PTRVLELMDKQITQ-UHFFFAOYSA-N 0.000 claims 1
- 230000010354 integration Effects 0.000 claims 1
- 230000001902 propagating effect Effects 0.000 abstract description 2
- 239000012491 analyte Substances 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- 239000004814 polyurethane Substances 0.000 description 4
- 229920002635 polyurethane Polymers 0.000 description 4
- 239000011651 chromium Substances 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- AYYISYPLHCSQGL-UHFFFAOYSA-N (2,3,4,5,6-pentachlorophenyl) 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1=C(Cl)C(Cl)=C(Cl)C(Cl)=C1Cl AYYISYPLHCSQGL-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- HVYCQBKSRWZZGX-UHFFFAOYSA-N naphthalen-1-yl 2-methylprop-2-enoate Chemical compound C1=CC=C2C(OC(=O)C(=C)C)=CC=CC2=C1 HVYCQBKSRWZZGX-UHFFFAOYSA-N 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
- G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
- G01N33/54366—Apparatus specially adapted for solid-phase testing
- G01N33/54373—Apparatus specially adapted for solid-phase testing involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
- G01N2021/7706—Reagent provision
- G01N2021/7736—Reagent provision exposed, cladding free
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N2021/7769—Measurement method of reaction-produced change in sensor
- G01N2021/7779—Measurement method of reaction-produced change in sensor interferometric
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/02—Materials and properties organic material
- G02F2202/022—Materials and properties organic material polymeric
Landscapes
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Hematology (AREA)
- Molecular Biology (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Nonlinear Science (AREA)
- Pathology (AREA)
- Biomedical Technology (AREA)
- Biochemistry (AREA)
- Urology & Nephrology (AREA)
- Food Science & Technology (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Cell Biology (AREA)
- Biotechnology (AREA)
- Medicinal Chemistry (AREA)
- Plasma & Fusion (AREA)
- Microbiology (AREA)
- Optical Integrated Circuits (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP09151982A EP2214049B1 (en) | 2009-02-03 | 2009-02-03 | Integrated optical waveguide interferometric sensor |
| EP09151982.7 | 2009-02-03 | ||
| PCT/EP2010/050743 WO2010089209A1 (en) | 2009-02-03 | 2010-01-22 | Integrated optical waveguide interferometric sensor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012517023A JP2012517023A (ja) | 2012-07-26 |
| JP2012517023A5 JP2012517023A5 (enExample) | 2015-01-22 |
| JP5737722B2 true JP5737722B2 (ja) | 2015-06-17 |
Family
ID=40801771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011546799A Expired - Fee Related JP5737722B2 (ja) | 2009-02-03 | 2010-01-22 | 積分光学導波路型干渉計 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US9151968B2 (enExample) |
| EP (1) | EP2214049B1 (enExample) |
| JP (1) | JP5737722B2 (enExample) |
| CN (1) | CN102292665B (enExample) |
| AT (1) | ATE536565T1 (enExample) |
| DK (1) | DK2214049T3 (enExample) |
| ES (1) | ES2373848T3 (enExample) |
| PL (1) | PL2214049T3 (enExample) |
| SG (1) | SG173446A1 (enExample) |
| WO (1) | WO2010089209A1 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010090514A1 (en) * | 2009-02-04 | 2010-08-12 | Ostendum Holding B.V., Et Al | System for analysis of a fluid |
| SG188759A1 (en) * | 2011-09-21 | 2013-04-30 | Agency Science Tech & Res | Optical circuit for sensing a biological entity in a fluid and method of configuring the same |
| GB201117649D0 (en) * | 2011-10-12 | 2011-11-23 | Univ Gent | Resonant biosensor |
| KR101369926B1 (ko) * | 2012-03-07 | 2014-03-06 | 한국광기술원 | 광대역 광스플리터 및 이를 이용한 다파장 대역의 이미지 확보가 가능한 광학 단층 영상기기 |
| EP2941636B1 (en) * | 2013-01-11 | 2018-03-07 | Lumense Inc. | System and method for sensing ammonia in a fluid |
| US20150077756A1 (en) * | 2013-06-13 | 2015-03-19 | Lumense, Inc. | System and method for continuous real-time monitoring of water at contaminated sites |
| JP5951589B2 (ja) * | 2013-11-28 | 2016-07-13 | 日本碍子株式会社 | 光導波路素子 |
| US9453791B2 (en) * | 2014-07-01 | 2016-09-27 | Octrolix Bv | Flow cytometry system and method |
| GR1009480B (el) | 2017-02-17 | 2019-03-19 | Amo Gmbh | Μεθοδος κατασκευης ολοκληρωμενου πλασμο-φωτονικου βιοαισθητηρα και συσκευη για το σκοπο αυτο |
| CN111164417B (zh) * | 2017-09-01 | 2023-06-23 | 迈普有限公司 | 基于光子干涉仪的传感 |
| US11509275B2 (en) * | 2018-04-20 | 2022-11-22 | Neophotonics Corporation | Method and apparatus for bias control with a large dynamic range for Mach-Zehnder modulators |
| US11619543B2 (en) * | 2018-08-20 | 2023-04-04 | Technion Research & Development Foundation Limited | Polymer-coated high-index waveguide for acoustic sensing |
| US11226506B2 (en) | 2020-03-17 | 2022-01-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Heater structure with a gas-filled isolation structure to improve thermal efficiency in a modulator device |
| CN111609873A (zh) * | 2020-04-24 | 2020-09-01 | 中国地质大学(武汉) | 一种波导干涉仪传感器 |
| US20220091031A1 (en) * | 2020-09-18 | 2022-03-24 | Salvus, Llc | Interferometric Detection and Quantification System and Methods of Use in Chemical Processing |
| US11500151B2 (en) * | 2021-02-22 | 2022-11-15 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor arrangement and method of making |
| CN115128735B (zh) * | 2021-10-27 | 2024-05-07 | 赛丽科技(苏州)有限公司 | 光学传感器芯片和光学传感系统 |
| WO2023139408A1 (en) * | 2022-01-21 | 2023-07-27 | Bialoom Ltd | Optical interferometric sensor |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4940328A (en) * | 1988-11-04 | 1990-07-10 | Georgia Tech Research Corporation | Optical sensing apparatus and method |
| WO1995002191A1 (en) * | 1993-07-07 | 1995-01-19 | Tokin Corporation | Optical electric field sensor |
| US5644125A (en) * | 1994-11-23 | 1997-07-01 | Research Foundation Of State University Ny | Spectrometer employing a Mach Zehnder interferometer created by etching a waveguide on a substrate |
| FR2774887B1 (fr) * | 1998-02-13 | 2000-04-14 | Centre Nat Rech Scient | Capteur optique sur substrat de silicium et application a la mesure in situ d'un marqueur fluorescent dans les petites bronches |
| US6429023B1 (en) * | 1998-07-20 | 2002-08-06 | Shayda Technologies, Inc. | Biosensors with polymeric optical waveguides |
| US6240226B1 (en) | 1998-08-13 | 2001-05-29 | Lucent Technologies Inc. | Polymer material and method for optical switching and modulation |
| US6385383B1 (en) * | 1998-10-05 | 2002-05-07 | Lucent Technologies Inc. | Optical attenuator structure and method using polymer material |
| US6987603B2 (en) * | 2003-01-31 | 2006-01-17 | E Ink Corporation | Construction of electrophoretic displays |
| JP4249996B2 (ja) * | 2003-02-10 | 2009-04-08 | 日東電工株式会社 | ポリカルボジイミド共重合体からなるレンズ材料 |
| JP2005009944A (ja) * | 2003-06-18 | 2005-01-13 | Hitachi Ltd | 化学物質検出装置 |
| GB0415882D0 (en) * | 2004-07-15 | 2004-08-18 | Univ Southampton | Optical sensors |
| JP2006208518A (ja) * | 2005-01-26 | 2006-08-10 | Seikoh Giken Co Ltd | 熱光学効果型光導波路素子およびその製造方法 |
| US7228022B1 (en) * | 2005-08-16 | 2007-06-05 | The United States Of America As Represented By The Secretary Of The Navy | Polymer integrated optical transceiver |
| JP4695989B2 (ja) * | 2006-01-27 | 2011-06-08 | 富士通株式会社 | 差動m位相偏移変調信号の復調用干渉計 |
| US20080101744A1 (en) * | 2006-10-31 | 2008-05-01 | Honeywell International Inc. | Optical Waveguide Sensor Devices and Methods For Making and Using Them |
| WO2008082664A2 (en) * | 2006-12-29 | 2008-07-10 | Massachusetts Institute Of Technology | Fabrication-tolerant waveguides and resonators |
| US20100055666A1 (en) * | 2007-02-08 | 2010-03-04 | Koninklijke Philips Electronics N.V. | Biosensor with evanescent waveguide and integrated sensor |
| ES2465619T3 (es) * | 2007-07-19 | 2014-06-06 | Consejo Superior De Investigaciones Científicas | Interferómetro y sensor basados en una guía de onda óptica bimodal y procedimiento de detección |
| US7906839B2 (en) * | 2008-07-02 | 2011-03-15 | Stats Chippac, Ltd. | Semiconductor device and method of shunt test measurement for passive circuits |
-
2009
- 2009-02-03 ES ES09151982T patent/ES2373848T3/es active Active
- 2009-02-03 AT AT09151982T patent/ATE536565T1/de active
- 2009-02-03 EP EP09151982A patent/EP2214049B1/en active Active
- 2009-02-03 PL PL09151982T patent/PL2214049T3/pl unknown
- 2009-02-03 DK DK09151982.7T patent/DK2214049T3/da active
-
2010
- 2010-01-22 US US13/143,411 patent/US9151968B2/en active Active
- 2010-01-22 JP JP2011546799A patent/JP5737722B2/ja not_active Expired - Fee Related
- 2010-01-22 CN CN201080004588.8A patent/CN102292665B/zh not_active Expired - Fee Related
- 2010-01-22 WO PCT/EP2010/050743 patent/WO2010089209A1/en not_active Ceased
- 2010-01-22 SG SG2011053105A patent/SG173446A1/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DK2214049T3 (da) | 2012-03-26 |
| US9151968B2 (en) | 2015-10-06 |
| JP2012517023A (ja) | 2012-07-26 |
| CN102292665A (zh) | 2011-12-21 |
| PL2214049T3 (pl) | 2012-04-30 |
| US20110292398A1 (en) | 2011-12-01 |
| SG173446A1 (en) | 2011-09-29 |
| EP2214049B1 (en) | 2011-12-07 |
| EP2214049A1 (en) | 2010-08-04 |
| WO2010089209A1 (en) | 2010-08-12 |
| ATE536565T1 (de) | 2011-12-15 |
| ES2373848T3 (es) | 2012-02-09 |
| CN102292665B (zh) | 2014-06-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5737722B2 (ja) | 積分光学導波路型干渉計 | |
| Hopman et al. | Quasi-one-dimensional photonic crystal as a compact building-block for refractometric optical sensors | |
| Nedeljkovic et al. | Mid-infrared thermo-optic modulators in SoI | |
| Heideman et al. | Remote opto-chemical sensing with extreme sensitivity: design, fabrication and performance of a pigtailed integrated optical phase-modulated Mach–Zehnder interferometer system | |
| US9513437B2 (en) | Photonic integrated circuit incorporating a bandgap temperature sensor | |
| JP2012517023A5 (enExample) | ||
| US20170045689A1 (en) | Photonic integrated circuit incorporating a bandgap temperature sensor | |
| SE501108C2 (sv) | Sätt och anordning för bestämning av brytningsindex | |
| Liang et al. | Bimodal waveguide interferometer RI sensor fabricated on low-cost polymer platform | |
| US20130071061A1 (en) | Optical Circuit for Sensing a Biological Entity in a Fluid and Method of Configuring the Same | |
| van Gulik et al. | Refractive index sensing using a three-port interferometer and comparison with ring resonators | |
| Qian et al. | Demonstrations of centimeter-scale polymer resonator for resonant integrated optical gyroscope | |
| Zhang et al. | Silicon subwavelength-grating microdisks for optical sensing | |
| Guan et al. | All-silicon interferometer with multimode waveguides for temperature-insensitive filters and compact biosensors | |
| Chen et al. | Highly efficient thermal tuning interferometer in lithium niobate thin film using air bridge | |
| Ahmed et al. | Zero-crosstalk silicon photonic refractive index sensor with subwavelength gratings | |
| Kaur et al. | Highly sensitive refractive index sensor based on silicon nitride strip waveguide directional coupler | |
| Lee et al. | 2× 2 single-mode zero-gap directional-coupler thermo-optic waveguide switch on glass | |
| Amorim et al. | Mach-Zehnder interferometer-based evanescent refractometer inscribed at the surface of eagle2000 by femtosecond laser writing | |
| JPWO2019163924A1 (ja) | 導波路型光干渉計回路 | |
| Goncharenko et al. | Optimizing the structure of optical temperature sensors on the base of slot and double-slot ring waveguides with liquid crystal filling | |
| Chen et al. | High-sensitivity silicon nitride optical temperature sensor based on cascaded Mach-Zehnder interferometers | |
| Gylfason et al. | Reducing the temperature sensitivity of SOI waveguide-based biosensors | |
| Kaur et al. | Design and characteristics of a highly sensitive refractive index sensor based on a grating-assisted strip waveguide directional coupler | |
| Zhao et al. | Vernier effect of cascaded dual microring sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130107 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20131127 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131217 |
|
| A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20140317 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140902 |
|
| A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20141127 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150331 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150415 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5737722 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| LAPS | Cancellation because of no payment of annual fees |