JP5736788B2 - Seismic fixing device - Google Patents

Description

  The present invention, for example, transports an object to be transported by a transport vehicle such as a vehicle traveling along a track in a factory to its processing device, storage, shelf, etc. (hereinafter simply referred to as “processing device”). In order to transfer efficiently between vehicles, equipment or equipment (hereinafter simply referred to as “equipment”) such as buffers, buffer storage and other temporary holding equipment, which are installed between the two, are installed on the factory floor. TECHNICAL FIELD OF THE INVENTION

  As a part of this type of seismic fixing device, positioning metal fittings and fixed so that it can be positioned with respect to the floor on the equipment side with wheels on the bottom so that it can move toward the installation location on the floor in the factory A fitting is provided. In response to this, a positioning bracket or a fixing bracket is provided on the floor side as another part of this type of seismic fixing device. Here, the “factory” is, for example, a semiconductor device manufacturing factory, a liquid crystal device manufacturing factory, or the like. The “conveyed object” conveyed by a vehicle or the like in the factory is, for example, a FOUP (Front Opening Unified Pod) that accommodates a wafer or the like used in a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus. The “device” is, for example, a buffer.

  In addition, this type of seismic fixing device is configured to be firmly fixed so as to satisfy seismic standards determined by laws and standards.

  For example, Patent Document 1 discloses an example of an apparatus for fixing equipment on the floor, and Patent Document 2 discloses an example of an earthquake-proof installation apparatus for equipment. When the equipment is fixed to the factory floor, when the factory is operating, for example, the transfer of the object to be transported between the transport vehicle and the processing device is performed with high accuracy via the equipment that is positioned accurately. It becomes possible.

JP 2004-190345 A Japanese Patent Application Laid-Open No. 07-091025

  However, if the “factory floor” is a clean room floor, for example, a large number of gratings or grating panels each having a side of 50 to 60 cm are laid in a matrix. Are provided with special structures for increasing the strength of the grating itself, such as ribs, frames, beams, etc. (hereinafter simply referred to as “ribs”), which are supported by pillars at their four corners. Here, when trying to open holes in the grating for providing a kind of fixing device according to the background art, if the holes are formed in these four corners and edges, the strength of the grating is reduced and the holes are opened. There is a technical problem that the work itself is difficult or impossible in practice. On the other hand, from the factory owner's point of view, the line design can be changed even in the same factory, so that the equipment cannot be fixed at an arbitrary position on the floor, or the floor is In order to increase the risk of damage, the usability of the device is significantly deteriorated or the device cannot be used in practice.

  In addition, the equipment is movable, that is, it can be removed by removing the seismic fixing relatively easily in order to carry out maintenance and repairs regularly or irregularly according to the line design and specifications in the factory. It is definitely desirable. On the other hand, when it is installed, it is necessary to accurately perform positioning with respect to the floor, that is, with respect to the track of the transport vehicle, the transport vehicle, the processing device, etc. in the factory. For this reason, installation work including seismic fixing work takes a long time such as several hours or days in order to obtain positioning accuracy, and particularly labor and time calibration for equipment called “teaching”. There is a technical problem that such a complicated or complicated high-level positioning operation is required for each installation and seismic fixation.

  In particular, considering that it is necessary to clear the legal and standard seismic standards with this type of fixing device, it is assumed that the solution of any of the above problems will be even more difficult.

  The present invention has been made in view of the above-described problems, for example, and provides an earthquake-resistant fixing device that can fix the device itself or the cart of the device at a desired position on the floor and can withstand a strong earthquake. And

<1>
A floor-side member provided on a floor in which a plurality of flat floor members are spread at a distance from the foundation by way of a plurality of struts erected from at least one of the foundation and the foundation structure on the foundation. When, and a device-side member provided with the floor to the body of movable equipment, said equipment comprising a seismic fixed device for seismic fixed to the floor, the floor side member, the lower end Attached to the foundation or the base structure under the floor of the floor at a position facing the through hole opened in the flat plate-like floor member, and is inserted into or faces the through hole on the upper end side. A floor-side connecting member that opens or protrudes upward coaxially with the through-hole, and the equipment-side member can be connected to the floor-side connecting member via the through-hole on the lower end side. on the side, it is fixed to the base plate of the present body Comprising a device-side connecting member, the floor-side member and the apparatus-side member respectively, a plurality provided for one of the devices, the plurality of the apparatus-side member is one of the floor side member, the apparatus The side connecting member has a shape that can be connected to the floor side connecting member via the through hole on the lower end side, and a receiving member for horizontal positioning attached to the base plate on the upper end side. For the first equipment side connecting member and the other floor side member having the protruding portion, (i) for fixing opened at a position facing the through hole in the base plate as the equipment side connecting member In the hole, the vertical position is fixed in an adjustable manner, and has a coaxial through hole that is coaxial with the through hole, and a fixing member for vertical positioning inside, and (ii) on the lower end side, the coaxial through hole and the The floor side connecting member through the through hole And it has a connectable shape, the upper end, has a wider head than the coaxial through hole to have a lower surface in contact with the edge on the upper surface of the fixing member, and a second apparatus-side coupling member.

  According to the present invention, the earthquake-resistant fixing device earthquake-fixes equipment on the floor by the floor-side member and the equipment-side member that can be connected to each other.

  Here, the “floor” according to the present invention is formed by laying a plurality of flat floor members such as a grating or a grating panel in a matrix. Here, in particular, the plurality of flat floor members typically include a plurality of support columns erected from at least one of a foundation such as a concrete floor of a factory and a foundation structure such as a joist installed on the foundation. It is spread with a distance from the foundation. In other words, the “floor” refers to the upper floor portion in the double floor structure, that is, the floor on which the object including the equipment is actually placed. Such a floor is configured such that, for example, by a support or leg provided at the four corners of the grating, a space of, for example, several centimeters to several tens of centimeters is separated from the base surface, that is, a space is provided between the floor and the base. Has been. In the case of a typical grating, the planar shape is, for example, a rectangle or square having a side of 50 to 60 cm, and ribs or the like having a height of about several centimeters are provided on the edges of the four sides. And supported by the support. The “factory” is typically a semiconductor device manufacturing factory or a liquid crystal device manufacturing factory, but is not limited to these factories as long as such a floor exists.

  The “equipment” according to the present invention is optional as long as it is necessary to be seismically fixed to such a floor. “Equipment”, for example, efficiently transfers objects to be transported by a transport vehicle such as a vehicle traveling on a track laid on a factory ceiling or the like between the processing device and the transport vehicle. Therefore, a device such as a buffer or a buffer device or a buffer storage is installed between the two as appropriate. Furthermore, “equipment” is a broad concept including not only a shelf but also equipment that includes an electric mechanism, a mechanical mechanism, and the like. The “conveyed object” is a FOUP that accommodates, for example, a wafer used in a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus.

  When the equipment is seismically fixed, the equipment is first moved to its installation location, for example, according to the layout design of the production line in the factory. For example, the vehicle is moved to a space between the stop position of the vehicle (in other words, the transfer position) when stopping for transfer on the track laid on the ceiling, and the processing device or the like. This movement is performed by human power or power by moving means such as wheels and casters provided at the bottom of the main body or the bottom of the carriage on which the device is placed so that the device can move. Or you may be carried to the installation place in the lifted state by human power or a lift.

  In this installation place, first, a floor-side member is provided on the floor before or after the operation of actually installing the equipment. A through hole having a diameter of, for example, several centimeters in diameter and at least 1 centimeter in diameter is opened in the flat floor member before or after the operation of actually installing the equipment. The floor side member is attached to the base or the foundation structure at a position facing the through hole or facing the through hole on the lower end side. The floor side connecting member is inserted into or faces the through hole on the upper end side of the floor side member. The floor side connecting member may be inserted partway through the through hole, may not reach the entrance of the through hole, or may be inserted through the through hole. The floor side connecting member opens or protrudes on the upper side coaxially with the through hole. Specifically, for example, an elongated hole that is equal to or smaller than the inner diameter of the through hole is formed on the same axis as the through hole in which the female thread is cut. May be. Alternatively, it may have a protruding shape coaxial with the through hole and having an outer diameter smaller than the inner diameter of the through hole. In addition, it is desirable to change the screw diameter of the connecting member according to the load caused by the earthquake. Therefore, structurally, the through hole in the floor is preferably larger than the screw diameter.

  On the other hand, the apparatus side member is provided in at least one of the main body of the apparatus and the carriage in parallel with or in parallel with the operation of actually installing the apparatus. Here, the “main body” is, for example, an outer box or outer frame of the buffer storage, and includes a base plate with a caster at the bottom. That is, in this case, the base plate forms the bottom plate of the main body. On the other hand, the “cart” includes, for example, a base plate on which a buffer storage is placed and a caster at the bottom.

  When the equipment is moved and stopped so that the equipment-side member configured in this manner is located at the same position as the floor-side member when viewed in plan on the floor, the equipment-side connecting member has a base plate at its upper end side. And is connected to the floor-side connecting member via a through hole on the lower end side. For example, the device side connecting member has a male screw cut at the lower end side, and is engaged with the floor side connecting member cut through the through hole through the through hole. Or conversely, the apparatus side connecting member has a female screw cut on the lower end side, and is engaged with the floor side connecting member cut off the male screw through a through hole in the manner of screw tightening. In either case, both are firmly connected. The device-side connecting member and the base plate are fixed only at the initial setting, and thereafter, the device may be attached and detached while being fixed.

  In particular, the mechanical strength for seismic fixation of equipment on the floor is based on the base plate, equipment-side member, floor-side member, and the foundation or foundation structure existing under the floor to which the floor-side member is attached. Depends mainly on. In other words, the strength here is less or less dependent on the flat floor member. That is, compared to a flat plate member such as a grating, it is easy to be made stronger, and a foundation such as a concrete floor or the like, which is conventionally made stronger, A structure is obtained in which the equipment is integrally fixed to the assembled steel structure foundation such as joists through the seismic fixing device. In other words, in the present invention, “equipment is fixed to the floor” is apparently fixed to the floor, but actually, a foundation or foundation structure stronger than the floor under the floor through the floor. It can also be understood that it is fixed to. By such fixing, the mechanical strength for fixing, that is, seismic fixing can be easily and remarkably increased without much or little depending on the strength of a flat plate member such as grating. After installing the device on the floor, the weight of the device is reduced by not raising the contact portion with the surface of the flat plate member in the device or the carriage completely or not from the surface. (That is, the device side member, the floor side member, the base, the foundation structure, etc.) and the flat plate member may be dispersed.

  When it is desired to release the seismic fixation, for example, the device can be disconnected from the floor member by releasing the engagement between the floor side connecting member and the device side connecting member in the manner of loosening the screws. Therefore, it is easy to adopt a relatively simple structure when connecting and when releasing the connection.

  Moreover, once the lower end side of the floor side member is attached to the base or the foundation structure, the horizontal position on the floor is immovable thereafter unless it is removed. That is, after that, positioning for the horizontal position is basically unnecessary.

  In addition, if the fact that the length in the vertical direction or the vertical direction of both of the equipment side member and the floor side member is invariable is used, that is, the height of the seismic fixing device at the time of connection is unchanged. As long as the lower end side of the floor side member is not removed, the height of the equipment when it is seismically fixed is determined based on the vertical length or the unchanged height. In this case, the vertical position on the floor does not move after that. Therefore, by using the horizontal position of the earthquake-resistant fixing device as a reference and the height of the earthquake-resistant fixing device as a reference, the earthquake-resistant fixing can be performed with extremely excellent reproducibility of the position. In other words, if seismic fixing is performed using the seismic fixing device, extremely high positional accuracy can be obtained even by repeatedly releasing and fixing, and various operations related to positioning such as calibration such as teaching, If it is done only once at the time of the first seismic fixation, there is basically no need to do it thereafter.

  Therefore, for example, it is extremely advantageous when the maintenance / repair is performed regularly or irregularly according to the line design / specifications in the factory. For example, generation of long working hours such as several hours or days for obtaining positioning accuracy, which is necessary for fixing work in the background art, and troublesome or complicated advanced positioning work including teaching etc. I can prevent it.

As described above, with the seismic fixing device of the present invention, it is relatively easy and quick to fix firmly so as to satisfy the seismic standards determined by laws and standards. Moreover, positioning can be performed with high accuracy while being relatively easy and can be fixed and released.
<2>
In one aspect of the earthquake-resistant fixing device according to the present invention, a plurality of the floor-side members and the equipment-side members are provided for one of the equipments, and a plurality of the equipment-side members are one floor-side member. On the other hand, the device side connecting member has a shape that can be connected to the floor side connecting member via the through-hole on the lower end side, and for horizontal positioning attached to the base plate on the upper end side. With respect to the first equipment side connecting member and the other floor side member having a receiving part on the receiving member, as the equipment side connecting member, (i) at a position facing the through hole in the base plate In the fixing hole opened, the vertical position is fixed so as to be adjustable, and a vertical positioning fixing member having a coaxial through hole coaxial with the through hole, and (ii) on the lower end side, Coaxial through hole and front through the through hole A second device side connection having a shape connectable to the floor side connection member and having a head on the upper end side wider than the coaxial through hole so that the lower surface is in contact with the upper surface of the fixing member. A member.

  According to this aspect, when the device is moved and stopped so that the device-side member is located at the same position as the floor-side member when viewed in plan on the floor, the first device-side connecting member is at its upper end side. It is fixed to the base plate, and is connected to the floor side connecting member via a through hole at the lower end side. At this time, the fixing to the base plate is realized by receiving the protruding portion on the receiving member, which is a stopper fitting cut off in one horizontal direction, for example. Thereby, the horizontal position of the base plate at the location where the receiving member is attached to the first equipment side connecting member is defined by the horizontal position of the first equipment side connecting member already fixed to the floor.

  On the other hand, the second device side connecting member is connected to the floor side connecting member via the series of both the coaxial through hole opened in the fixing member and the through hole opened in the flat floor member at the lower end side. Connected. At this time, the fixing of the base plate is realized by first inserting or fitting the second device side connecting member into the coaxial through hole in the horizontal direction. Secondly, in the vertical direction or the vertical direction, this is realized by the lower surface of the second device side connecting member having the edge at the edge of the upper surface of the fixing member. As a result, the horizontal position and the vertical position of the base plate at the location where the fixing hole for fixing the fixing member is opened, the horizontal position and the vertical position of the second device side connecting member already fixed to the floor. It is prescribed by. In particular, at the time of the first seismic fixation, if the vertical position of the fixing member is adjusted and then fixed, the vertical position of the fixing member can be changed even after repeated release and fixing. As long as it does not move in the fixing hole, extremely high positional accuracy can be obtained. If the work such as teaching is performed only once together with the work of adjusting the vertical position of the fixed member at first, the necessity of performing it after that is basically eliminated.

  In particular, since the first device-side connecting member is received by the receiving portion that moves from the side, the first device-side connecting member can be fixed first as described above in the operation of horizontally moving the device. Further, since the second device side connecting member is inserted or fitted into the coaxial through hole opened in the fixing member, the second device side connecting member can be fixed as described above while the horizontal position of the device is fixed. .

  As a result, it is possible to easily and quickly perform the firm fixing so as to satisfy the earthquake resistance standard. In addition, positioning can be performed with high accuracy while being able to be fixed and released.

<3>
In this aspect, a female screw is cut in the fixing hole, and the fixing member is engaged with the female screw and has the coaxial through hole, and the base of the male screw member. The male screw member moves in the axial direction in the female screw by engaging with the tip side viewed from the lower side of the plate and contacting the lower surface of the base plate around the fixing hole. And a nut member with a female thread for blocking.

  If comprised in this way, the up-down direction position of the fixing member with respect to a base board can be easily adjusted with the operation | movement which tightens the screw with respect to a nut member, or loosens a screw | thread. Therefore, the adjustment of the height direction of the apparatus at the time of earthquake-resistant fixation can be easily implemented by adjusting the fixing member. Once the vertical position of the fixing member is adjusted and the vertical position is fixed to the fixing hole, extremely high positional accuracy can be obtained even after repeated release and fixing. I can do it.

<4>
In an aspect in which the device-side member includes the first and second device-side connecting members, the protrusion has a constriction, and the receiving member is notched laterally and the notched side. When the receiving member is fitted to the constriction on at least one of the receiving member and the constricted surface of the constriction, the receiving member is forced vertically upward from the constriction. A taper may be formed to receive.

  If comprised in this way, when the 1st apparatus side connection member is received by the receiving part which moves from a side, from the force which moves a base board to a horizontal direction, it acts by a taper, for example, stopper metal fittings An upward component force is generated with respect to the receiving portion (that is, with respect to the base plate or the device). Therefore, the movable means provided on the bottom of the base plate for moving the base plate such as casters and wheels is lifted from the floor to a greater or lesser extent, or at least such a movable means via the base plate. The load on the equipment is reduced more or less. As a result, positioning can be performed with higher accuracy regardless of the presence of casters, wheels, and the like. In addition, it can reduce the load on casters, wheels, etc., and the load on the floors of gratings, etc. through this after seismic fixing, the life of the equipment side including casters, wheels, etc., and the floors of gratings, etc. It is also possible to extend the life of the battery.

  In addition, as long as a projection part and a receiving part fit mutually, a reverse relationship may be sufficient as a shape. That is, for example, the receiving member has a shape of a projection having a constriction, and the protruding portion is notched to the side while projecting to the receiving portion side, and the side from the notched side is It may have a shape that fits into the constriction.

<5>
In another aspect of the seismic fixing device according to the present invention, the floor member is configured such that the height at the tip on the upper end side is the same as or lower than the surface height of the floor.

  According to this aspect, the height at the upper end or the uppermost surface of the floor-side member that is directed upward is the same as the surface height of the floor or is lower than the surface height of the floor. For this reason, when an apparatus is removed and the fixing device does not play a fixing role, it is possible to prevent a part of the floor side member from protruding from the floor and remaining. Therefore, the usability of the factory is improved, and a desirable environment can be constructed in the factory from the viewpoint of safety. Furthermore, when trying to use the floor member again, it can be used as it is.

<6>
In another aspect of the seismic fixing device according to the present invention, the floor member is passed over the plurality of joists in a direction intersecting with the joists forming a part of the foundation structure at a lower end side, It is attached to a rod-like structure that forms the other part of the foundation structure, and the rod-like structure is configured to be attachable to the joist at an arbitrary position in the extending direction of the joist, and the floor side The member is configured to be attachable to the rod-like structure at an arbitrary position in the extending direction of the rod-like structure on the lower end side.

  According to this aspect, the position of the horizontal first direction in the floor-side member (that is, the extending direction of the joist) can be determined depending on where the rod-like structure is attached to the joist. The position of the floor side member in the second horizontal direction (that is, the direction intersecting or perpendicular to the extending direction of the joists, in other words, the direction intersecting or orthogonal to the first horizontal direction) can be determined depending on where the body is attached. Therefore, since the two-dimensional position in the horizontal plane can be freely determined as long as the joists and rod-like structures are present, the degree of freedom with respect to the position where the seismic fixing device can be seismically fixed is remarkably increased. As a result, the degree of freedom regarding the position where the device can be installed is greatly increased. Therefore, the production line in the factory can be designed with a high degree of freedom, which is extremely advantageous in practice.

<7>
In another aspect of the earthquake-resistant fixing device according to the present invention, the base plate is provided with a portion configured to be capable of attaching the device-side member when the device is fixed by the earthquake-resistant fixing device . As viewed in a plan view above, with respect to one through hole, the at least one through hole is located within a region that can be opened by a predetermined distance from each of the four sides of each of the flat floor members. The four are separated from each other.

  According to the present invention, when installing equipment, any one of the “parts configured to be able to attach equipment side members” provided by four can be opened in a flat floor member. Located in a safe area. Therefore, the plant owner's request for the flat floor member such as grating is prevented while preventing the occurrence of holes in the four corners and edges and causing a decrease in the strength of the flat floor member such as grating. The through-hole for fixing to the desired position along can be opened. Moreover, it is possible to avoid a situation in which the opening work is difficult due to the presence of ribs and the like. In other words, even if fixing by opening a through hole in a flat floor member such as grating without fixing to a flat and uniform concrete floor surface or foundation surface, a flat plate shape such as grating. Regardless of the relationship with the special construction of the floor member, it can be easily fixed at an arbitrary position. Moreover, even if the device is fixed at an arbitrary position, it is possible to prevent a situation in which the strength of the essential floor is hindered.

<8>
In this aspect, each of the flat plate members has a rectangular shape when viewed in plan on the floor , and the region where the hole can be opened is defined as a region separated from each side by a predetermined length L or more. cage, the through hole is viewed in plan on the floor, a circular diameter R, the four portions provided site is viewed in plan on the floor, one side 2L + R or It may be provided so that it may be located in each vertex of the rectangle of length.

  If comprised in this way, about any one among "the part comprised so that an apparatus side member can be attached" provided by four, it is surely possible to open a hole in a flat floor member geometrically. It can be located in the area. That is, such a situation can be reliably and easily secured according to mathematical rules. In particular, by setting the length of one side of the rectangle to a value equal to 2L + R or to a value substantially equal to 2L + R including a slight margin, it is not necessary to expand the rectangle indiscriminately. That is, the horizontal positions of the four parts can be arranged close to each other, in other words, the four parts can be arranged in a relatively narrow area. Considering that the base plate has a limited area, such a configuration in which the four portions are provided on the base plate is very advantageous in practice.

  In addition, since such four parts are provided with respect to one apparatus side member, if there are m apparatus side members (however, m is a natural number of 2 or more) (that is, there are m floor side members). For example, such four parts are provided as m sets, with the four parts as one set.

  The operation and other advantages of the present invention will become apparent from the best mode for carrying out the invention described below.

1 is a schematic perspective view showing an overall configuration of a manufacturing system, showing a buffer device fixed by an earthquake-resistant fixing device of an embodiment together with a vehicle and a manufacturing device. FIG. 2 is a schematic cross-sectional view of the manufacturing system of FIG. 1. It is a schematic top view which shows the structure of the floor of embodiment. It is a schematic perspective view which shows one grating which comprises the floor in embodiment with the support | pillar which supports this. It is a schematic sectional view showing an earthquake-resistant fixing device in an embodiment together with a base plate of a carriage on which a buffer device is placed, and a floor and a base. It is a schematic perspective view which shows a mode that the underfloor of embodiment is comprised. It is a perspective view which expands and shows the 1st apparatus side member of embodiment. In embodiment, it is schematic sectional drawing which shows a mode that a 1st apparatus side member and a floor side member are connected. It is a perspective view which expands and shows the 2nd apparatus side member of embodiment. In embodiment, it is schematic sectional drawing which shows a mode that a vertical position is adjusted with the 2nd apparatus side member, and also a 2nd apparatus side member and a floor side member are connected. It is a bottom view which shows typically arrangement of four equipment side members to be fixed in a base board of an embodiment. For one of the four device-side members in FIG. 11, one attachable portion where the device-side member is actually attached and three attachable portions that are not actually attached (that is, a total of four portions). It is a partial enlarged bottom view which expands and shows two attachment possible parts). FIG. 13 is a schematic plan view showing where the positions of the four attachable portions in FIG. 12 are set in relation to an area where opening is possible in grating. It is a perspective view of the stopper metal fitting of FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<Embodiment>
<Configuration of manufacturing system>
First, a configuration of a manufacturing system including a buffer device that is an example of the “apparatus” according to the present invention that is seismically fixed by the seismic fixing device according to the embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is a perspective view schematically showing the appearance of the manufacturing system, and FIG. 2 is a cross-sectional view schematically showing a cross section when it is cut in the front-rear direction in FIG.

  As shown in FIGS. 1 and 2, the manufacturing system 100 includes a rail 1, a vehicle 10, a manufacturing device 20, and a buffer device 30. The manufacturing system 100 travels the vehicle 10 along the rail 1 and transports a FOUP 3 that can accommodate a plurality of wafers (that is, an example of a “conveyed object” according to the present invention) 3 to the manufacturing apparatus 20. And a manufacturing function for manufacturing a semiconductor element by performing various processes on the wafer in the FOUP 3 in the manufacturing apparatus 20.

  The rail 1 serves as a track for the vehicle 10 to travel as an example of the “track” according to the present invention. The rail 1 is laid on the ceiling of a facility where the manufacturing system 100 is installed.

  The vehicle 10 is an OHT (Overhead Hoist Transport) driven by a linear motor as an example of the “transport vehicle” according to the present invention, and is attached to the rail 1 so as to be suspended. . The vehicle 10 travels along the rail 1 and transports the FOUP 3 to a stocker (not shown), an OHT buffer, a large stocker, and the like in addition to the manufacturing apparatus 20. Operations such as traveling and transporting in the vehicle 10 are controlled by a controller (not shown) in the manufacturing system 100. Here, for convenience of explanation, only one vehicle 10 is shown on the rail 1, but more (for example, several tens or several hundreds) vehicles 10 are typically provided.

  The vehicle 10 includes a hoist mechanism 11 including a winding unit 12 having a winding shaft (not shown), a winding belt 13, and a gripper 14. One end of the winding belt 13 is fixed to the winding shaft, and the other end is fixed to the gripper 14. The take-up unit 12 is configured to rotate a take-up shaft using a motor (not shown) as power and to take up or unwind the take-up belt 13 from one end. The gripper 14 is configured to be displaceable into a gripping state in which the upper part (that is, the flange) 3a of the FOUP 3 is gripped at both ends bent inward, or a releasing state in which the flange 3a of the FOUP 3 is released. The hoist mechanism 11 having such a configuration moves the gripper 14 in the vertical direction below the rail 1 and displaces the gripper 14 in the vertical position by winding or unwinding the winding belt 13. By doing so, the FOUP 3 can be transferred from the vehicle 10 side to the buffer device 30 side, or can be transferred from the buffer device 30 side to the vehicle 10 side. Thus, in the present embodiment, the transfer path by the vehicle 10 extends vertically downward from the transfer position of the vehicle 10 (that is, the stop position shown in FIG. 1), and is configured to transfer the FOUP 3 vertically. Has been.

  As an example of the “processing apparatus” according to the present invention, the manufacturing apparatus 20 is a FOUP 3 and, in fact, a predetermined type of processing (for example, exposure processing, film formation processing, heat treatment, etc.) on a wafer accommodated in the FOUP 3 I do. The manufacturing apparatus 20 includes a processing unit (not shown) that performs a predetermined type of processing on the wafer, and has two openings H1 and H2 through which the wafer to be processed can be taken in and out. Yes. The manufacturing apparatus 20 includes two load ports LP1 and LP2 that function as ports for transferring the FOUP 3 to and from the buffer apparatus 30 on the outside adjacent to the two openings H1 and H2 and below the rail 1, respectively. Prepare. The manufacturing apparatus 20 includes an internal / external transfer mechanism (not shown) that takes in and out the wafer inside the FOUP 3 transferred to each of the two load ports LP1 and LP2 through the opening H1 or H2. Operations such as predetermined processing and wafer loading / unloading in the manufacturing apparatus 20 are controlled by a controller of the manufacturing system 100. Here, for convenience of explanation, only one manufacturing apparatus 20 is shown below the rail 1, but typically more processing (for example, several or hundreds) is performed on the FOUP 3. ) Manufacturing apparatus 20 is provided. Further, the number of openings and load ports is not limited to two, but may be three or more, and there may be various modes for their arrangement.

  The buffer device 30 is referred to as, for example, SAFL (Stand Alone Front Loader: trade name), and between the vehicle 10 and the manufacturing apparatus 20 so that the FOUP 3 is efficiently transferred between the vehicle 10 and the manufacturing apparatus 20. FOUP3 will be transferred to Here, for convenience of explanation, only one buffer device 30 corresponding to one load port LP1 is shown in the manufacturing apparatus 20 including two load ports LP1 and LP2. However, as another embodiment, Two buffer devices 30 respectively corresponding to the load ports LP1 and LP2 may be provided.

  The buffer device 30 includes a main body 31, an OHT port P1, a buffer P2, and a transfer mechanism 32. In FIG. 2, the main body 31 is a casing configured in an inverted L shape so that it can be assembled to the load port LP1 from the front side (that is, the left side in FIG. 2). The main body 31 is arranged so that, when assembled, the longitudinal direction is along a direction perpendicular to the direction of the rail 1 (that is, an example of “horizontal direction” according to the present invention, which is the X direction in FIG. 2). The The main body 31 has a length (that is, a length Lx in FIG. 2) in which at least two FOUPs 3 can be arranged in the X direction, and a length in which at least one FOUP 3 can be arranged in the direction of the rail 1. Have For convenience of explanation, the configuration of the buffer device 30 in which the main body 31 is assembled to the load port LP1 will be described here.

  In the main body 31, an OHT port P1, a buffer P2, and a transfer mechanism 32 are installed. The main body 31 is provided with an opening H11 that can pass the FOUP 3 between the OHT port P1 and the vehicle 10 on the upper surface corresponding to the vertical direction of the rail 1 (indicated by the alternate long and short dash line G1 in FIG. 2). Yes. Further, an opening H12 is provided on a side surface adjacent to the FOUP 3 placed on the load port LP1 so that the FOUP 3 can be transferred to and from the load port LP1 (that is, the manufacturing apparatus 20).

  The OHT port P1 functions as a port in the buffer device 30 for transferring the FOUP 3 that has undergone or has undergone predetermined processing in the manufacturing apparatus 20 to and from the vehicle 10 through the opening H11. The OHT port P1 is located above the load port LP1 in the vertical direction of the rail 1 so that the vehicle 10 can be transferred in a short time by vertical transfer of the vehicle 10 (that is, transfer in which the FOUP 3 is moved only in the vertical direction at the time of transfer). Is installed. As is apparent from FIGS. 1 and 2, the OHT port P1 is transferred when the vehicle 10 vertically transfers the FOUP 3 to the load port LP1 of the manufacturing apparatus 20 if the buffer device 30 is removed. It exists in a position that blocks the course. Therefore, when viewed from the vehicle 10, it is only necessary to perform the transfer operation with respect to the port located at the same position in plan view, that is, vertically below the transfer position, regardless of the presence or absence of the buffer device 30. That is, as long as the height of the port is different from the vehicle 10, the control for the vehicle 10 to perform the transfer operation is almost the same regardless of the presence or absence of the buffer device 30, so it is very difficult in practice. It is advantageous.

  The buffer P2 functions as a temporary mounting shelf for mounting at least temporarily the FOUP 3 on which a predetermined type of processing has been performed or has been performed in the manufacturing apparatus 20. The buffer P2 is disposed below the load port LP1 in the vertical direction of the rail 1 and in the X direction so as not to prevent the transfer of the FOUP 3 by the transfer mechanism 32 described later.

  The transfer mechanism 32 moves among the load port LP1, the OHT port P1, and the buffer P2, and transfers the FOUP 3 among them. The transfer mechanism 32 includes a gripping portion 33, a horizontal movement mechanism, and an elevating mechanism, and is installed on the forefront side (that is, the left side in FIG. 2) of the main body portion 31. The gripping part 33 has a pair of flat plate-like parts, and these parts enter the lower part of the flange 3a from the X direction and hold both ends of the flange 3a from the lower part to hold the FOUP 3. As shown in FIG. 2, the horizontal movement mechanism includes a rail portion 34 a that is installed so that its longitudinal direction is parallel to the X direction, and a slide portion 34 b that can slide in the X direction along the rail portion. . The grip 33 is fixed to the tip of the horizontal movement mechanism (that is, the end on the manufacturing apparatus 20 side of the slide 34b). The elevating mechanism is fixed to the rotation band 35a that can rotate in the vertical direction using a motor (not shown) as a power source, and moves in the vertical direction as the rotation band rotates. And an elevating part 35b. One end of a rail portion 34a is fixed to the elevating part 35b.

  The transfer mechanism 32 moves the grip portion 33 in the X direction and the vertical direction between the load port LP1, the OHT port P1, and the buffer P2 by the mutual operation of the horizontal movement mechanism and the lifting mechanism described above. By gripping or releasing the FOUP 3, the FOUP 3 is transferred between them. Operations such as movement in the transfer mechanism 32 and transfer of the FOUP 3 are controlled by a controller of the manufacturing system 100.

  The buffer device 30 transfers the FOUP 3 to and from the vehicle 10 using the OHT port P1 through the opening H11. The buffer device 30 delivers the FOUP 3 to and from the manufacturing device 20 using the load port LP1 through the opening H12. Furthermore, the buffer device 30 moves the FOUP 3 between the OHT port P1 and the load port LP1 directly or via the buffer P2 by operating the gripping portion 33, the slide portion 34b, and the elevating portion 35b therein. Do it.

  In order to perform the transfer operation as described above, the buffer device 30 is transported from other places inside and outside the factory at the time of initial introduction, and then the installation position of the manufacturing apparatus 20 and the stop position of the vehicle 10 are moved. On the other hand, it is installed in a form that is accurately positioned. Alternatively, the buffer device 30 is maintained or repaired regularly or irregularly. For this reason, the buffer device 30 is placed on the base plate 50 that forms the main body of the carriage having the four casters 38 at the bottom. The buffer device 30 can be moved on the improved floor by human power or power using the rolling of the casters 38.

  For example, the buffer device 30 is firmly fixed so that the positional relationship between the main body portion 31 and the base plate 50 is not changed by screwing, riveting, adhesive fastening, or welding. Placed or fixed. The bottom plate of the main body 31 of the buffer device 30 may also serve as the base plate 50. In any case, the buffer device 30 placed on the base plate 50 is not simply installed on the floor, but together with the base plate 50 or the carriage so as to satisfy legal standards or standard standards, Need to be seismic fixed.

  Therefore, in the present embodiment, in particular, the base plate 50 is provided with two types of first seismic fixing device 51 and second seismic fixing device 52 as an example of the “seismic fixing device” according to the present invention. The first seismic fixing devices 51 are provided at the two corners of the base plate 50 on the side close to the manufacturing device 20, and the second seismic fixing devices 52 are provided at the two corners of the base plate 50 on the side far from the manufacturing device 20. The first seismic fixing device 51 and the second seismic fixing device 52 have different structures in the upper floor portion as will be described in detail later, and the structures in the lower floor portion, that is, the portion fixed to the floor side are the same. is there.

  Next, with reference to FIG.3 and FIG.4, the structure which can apply the seismic fixing apparatus which concerns on this embodiment and the structure under the floor is demonstrated. FIG. 3 is a plan view of the floor structure, and FIG. 4 is a view of the back side of one of the gratings constituting the floor, and is shown together with the supporting columns that support the grating.

  As shown in FIG. 3, the floor is formed by laying a grating 201 as an example of a “flat plate member” according to the present invention in a matrix. The plurality of gratings 201 are installed on a foundation 200 that is a concrete floor, and on a joist 211 that is an example of a “foundation structure” according to the present invention, via a plurality of columns 201 </ b> C that are vertically erected. Laid down. That is, between the grating 201 and the base 200, a space corresponding to the height of the joists 211 and the pillars 201C is spread, and a double floor structure is constructed. The pillars 201C are erected so as to be positioned at the four corners of the grating 201, and the corners of the four adjacent gratings 201 on the upper surface formed wider than the pillar body of one pillar 201C. Support.

  A rod-like structure 212 is passed between two joists 211 adjacent to each other. Although only one rod-like structure 212 is illustrated, as will be described later, a plurality of rod-like structures 212 are disposed at positions corresponding to locations where a plurality of seismic fixing devices are fixed. The rod-like structure 212 can be attached to any position in the direction indicated by the arrow AR1 and the arrow AR2 on the joist 211 in the drawing.

  As shown in FIG. 4, the grating 201 has ribs 201 </ b> R at the edges of its four sides. The pillars 201 </ b> C are arranged to support the lower surface of the grating rib 201 </ b> R at the four corners of the grating 201. The main surface of the grating 201 is provided with a large number of small air holes 201h having a diameter of several cm to 2 cm for air circulation over the entire area.

  Next, with reference to FIG.5 and FIG.6, the structure of an earthquake-resistant fixing device is demonstrated. FIG. 5 shows the first seismic fixing device 51 and the second seismic fixing device 52 together with the base plate 50, the grating 201, the base 200, and the like, and FIG. .

  As shown in FIG. 5, the first seismic fixing device 51 includes a floor side member 701 erected from a rod-like structure 212 passed to the joist 211, a first equipment side member 501 provided on the base plate 50, and including. The second seismic fixing device 52 includes a floor side member 701 and a second equipment side member 601 provided on the base plate 50. The floor member 701 is common between the first seismic fixing device 51 and the second seismic fixing device 52.

  The floor side member 701 is attached to the rod-like structure 212 on the lower end side, and is inserted into the through hole 201H opened in the grating 201 on the upper end side. The floor side member 701 functions as an example of the “floor side connecting member” according to the present invention. The floor-side member 701 is configured to be connectable to the lower end side of the first device-side member 501 that functions as an example of the “first device-side connecting member” of the present invention in one through hole 201H. In addition, it is configured to be connectable to the lower end side of the second device side member 601 that functions as an example of the “second device side connection member” of the present invention in the other through hole 201H.

  As shown in FIG. 6, under the floor, the joist 211 is firmly placed on the base 200 in order to erect the column 201 c shown by the dotted line in the figure, regardless of whether or not an earthquake-resistant fixing device is necessary. It is attached (see the upper part of FIG. 6).

  Next, in parallel with or in parallel with the work of actually installing the buffer device 30, the rod-like structures 212 are respectively placed under the floor where the first earthquake-resistant fixing device 51 and the second earthquake-resistant fixing device 52 should be fixed. Are mounted on the joists 211 (see the middle of FIG. 6). The position adjustment in the direction along the joist 211 is made depending on where the joist 211 is attached to the rod-like structure 212. That is, as indicated by the arrows AR1 and AR2, the position adjustment in this direction is easy because the rod-like structure 212 can be attached to an arbitrary portion of the joist 211.

  Next, the floor side member 701 is already firmly attached to the joist 211 on the rod-like structure 212 under the floor where the first seismic fixing device 51 and the second seismic fixing device 52 are to be fixed. (See the lower part of FIG. 6). The attachment here is, for example, screwed to the rod-like structure 212 at four locations around the wide portion on the lower end side of the floor member 701. The position adjustment in the direction along the bar-shaped structure 212 is made depending on where the floor-side member 701 is attached to the bar-shaped structure 212. That is, as indicated by the arrows AR3 and AR4, the position adjustment in this direction is easy because the floor-side member 701 can be attached to an arbitrary portion of the rod-like structure 212. The floor member 701 has an elongated screw hole 701n that is open upward and has a female screw extending in the vertical direction coaxially with the through hole 201H.

  During the underfloor construction work shown in FIG. 6, only one or a plurality of peripheral gratings 201 in the place to be fixed by the first seismic fixing device 51 or the second seismic fixing device 52 are temporarily removed. The mounting operation is relatively easy.

  In the grating 201 in the place to be fixed by the first seismic fixing device 51 or the second seismic fixing device 52, either before or after such underfloor construction work, a through hole having a diameter of 2 to 3 cm, for example, is provided. 201H is opened. At this time, the existing air hole 201h has a smaller diameter than the through-hole 201H, and therefore hardly needs to be considered.

  On the other hand, the first device side member 501 is provided on the floor facing the floor side member 701 before or after the operation of actually installing the buffer device 30, and the second device side member 601 is provided on the floor. Provided on the base plate 50 and the floor facing the side member 701.

  Since it is comprised as mentioned above, when performing earthquake-proof fixation, the buffer apparatus 30 is moved to the installation position which faces the manufacturing apparatus 20 with the caster 38, and the 1st apparatus side member 501 and the 2nd apparatus side member 601 is stopped so as to be in the same horizontal position as the floor member 701. Then, the 1st apparatus side member 501 and the 2nd apparatus side member 601 are each fixed to the base board 50 in those upper end sides, and the floor side member 701 is each via the through-hole 201H in those lower end sides. Concatenated with

  At this time, the mechanical strength for seismically fixing the buffer device 30 on the floor is as follows: the base plate 50, the first equipment side member 501, the second equipment side member 601, the floor side member 701, the rod-like structure 212, and the joist 211. And it depends mainly on the foundation 200. In other words, the intensity here is almost independent of the grating 201. In particular, since the through hole 201H is opened in addition to the existing air hole 201h, the strength itself of the grating 201 is somewhat reduced. However, the seismic fixing according to the present embodiment passes through the grating 201 or through the grating 201. Then, it is directly performed between the base plate 50 and the rod-like structure 212. For this reason, even if the strength of the grating 201 drops to a level that cannot be ignored by opening the air holes 201h and particularly the through holes 201H, it is possible to prevent problems as far as seismic fixing is concerned. is there. In addition, after installing the buffer apparatus 30 on the floor, the caster 38 is not lifted completely or at all from the surface of the grating 201, so that the weight of the buffer apparatus 30 is adjusted to the parts under the floor (that is, the first device side member 501). , Second device side member 601, rod-like structure 212, joist 211, etc.) and grating 201 may be dispersed.

  Next, with reference to FIGS. 7-10, the structure of the earthquake-resistant fixing apparatus shown in FIG.5 and FIG.6 is demonstrated in detail. Here, FIG. 7 shows the first seismic fixing device 51 in an enlarged manner, and FIG. 8 shows how the first seismic fixing device 51 is connected to the underfloor member 701. FIG. 9 shows the second seismic fixing device 52 in an enlarged manner, and FIG. 10 shows how the second seismic fixing device 52 is connected to the floor side member 701 after the vertical position of the second seismic fixing device 52 is adjusted to the base plate 50.

  As shown in FIGS. 7 and 8, the first equipment side member 501 constituting the first seismic fixing device 51 is connected to the screw hole 701n of the floor side member 701 through the through hole 201H on the lower end side. A possible male screw 501S is cut. On the upper end side of the first device side member 501, a protrusion having a constricted portion 501n received by a receiving member 801 (see FIG. 7) attached to the base plate 50 is formed.

  As shown in FIG. 8, prior to the buffer device 30 being moved during seismic fixation, the first device-side member 501 is vertical as shown by the arrow AR11 in the left part of FIG. It is inserted through the through hole 201H downward. Further, the first device side member 501 is screwed into the screw hole 701n of the floor side member 701 with a male screw 501S as shown in the right part of FIG. The floor member 701 is firmly attached to the rod-like structure 212 in advance with screws 711.

  As shown in FIG. 7, for fixing between the first device side member 501 and the base plate 50, a constriction metal 501 n at the upper end of the first device side member 501 is received by the stopper metal 8 cut out in one horizontal direction. To be realized. In particular, since the first seismic fixing device 51 is received by the receiving portion 801 that moves from the side, the rough fixing as described above can be performed first by the operation of horizontally moving the buffer device 30.

  As a result, the first seismic fixing member 51 is determined uniquely and reproducibly with respect to the position in the two horizontal directions. In other words, the position of the base plate 50 in the two horizontal directions with respect to the first device side member 501 is generally fixed by the first seismic fixing member 51.

  As shown in FIGS. 9 and 10, the second equipment side member 601 constituting the second seismic fixing device 52 is vertically moved with respect to the base plate 50 by a pair of vertically adjusting screw members 602 and nuts 603. After the adjustment, the base plate 50 can be fixed. The screw member 602 is opened at a position facing the through hole 201H in the base plate 50, and the vertical position can be adjusted in the fixing hole 50H in which the female screw is cut. The upper and lower positions of the screw member 602 are fixed by the nut 603. The pair of screw members 602 and nuts 603 constitute one example of the “fixing member” according to the present invention.

  Further, the screw member 602 has a coaxial through hole 602H that is coaxial with the through hole 201H. The second device side member 601 has a male screw 601S cut off on the lower end side thereof, which can be connected to the screw hole 701n of the floor side member 701 through the coaxial through hole 602H and the through hole 201H.

  As shown in FIG. 10, in the case of seismic fixation, the screw member 602 and the nut 603 are fixed to the base plate 50 as shown by arrows AR12 and AR13 in the left part of FIG. Within the vertical up and down direction. When the adjustment is finished, as shown in the center portion in FIG. 10, the second device side member 601 is placed in the coaxial through hole 602 </ b> H of the screw member 602 whose vertical position is fixed to the base plate 50 by the nut 603. It is inserted vertically downward as indicated by arrow AR11. Further, the second device side member 601 is inserted through the through hole 201H. Further, the second device side member 601 is screwed into the screw hole 701n of the floor side member 701 with a male screw 601S as shown in the right part of FIG. At this time, the lower surface of the second device side member 601 is defined with respect to the base plate 50 by the lower surface around the wide head contacting the upper surface of the screw member 602.

  As a result, the second seismic fixing member 52 is determined not only in the two horizontal positions but also in the vertical position or the vertical position uniquely and with reproducibility. If adjustment is necessary for positioning in relation to the stop position of the manufacturing apparatus 20 or the vehicle 10, for example, the operation shown in FIG. 10 may be performed again or repeatedly. Alternatively, the position adjustment of the floor side member 701 shown in FIG.

  The positioning / fixing by the second device-side member 601 is performed by inserting or fitting into the coaxial through hole 602H after the rough positioning / fixing by the first seismic fixing device 51 shown in FIGS. 7 and 8. The That is, the second apparatus-side connecting member 601 can be fixed as described above while the horizontal position of the base plate 50 is generally fixed by the first seismic fixing device 51. Therefore, as a work procedure related to earthquake-resistant fixing, the first earthquake-resistant fixing device 51 shown in FIGS. 7 and 8 is first fixed, and then the second equipment side member 601 shown in FIGS. 9 and 10 is used. Is preferably inserted into the through hole 201H through the coaxial through hole 602H or at least through the coaxial through hole 602H. If it does in this way, first, the buffer apparatus 30 mounted in the base board 50 will be moved using the caster 38 to the installation position which faces the manufacturing apparatus 20, and the horizontal two-way position by the 1st earthquake-resistant fixing apparatus 51 will be demonstrated. Since it is easy to determine the horizontal two-directional position and the vertical position by the second seismic fixing device 52 with high accuracy, it is very convenient in practice.

  In particular, at the time of the first seismic fixing, after adjusting the vertical position of the second seismic fixing device 52 including the adjustment of the screw member 602 and the nut 603, if the vertical position is fixed, then the fixing is released. Even if fixing is repeated, as long as the vertical position of the second seismic fixing device 52 with respect to the base plate 50 is stationary, extremely high positional accuracy can be obtained. If the work such as teaching is performed only once together with the work of adjusting the horizontal position of the first seismic fixing device 51 and the horizontal position and the vertical position of the second seismic fixing device 52, it is basically necessary to perform the work thereafter. Disappear.

  As described above, the buffer device 30 is firmly fixed to the floor so that the first seismic fixing device 51 and the first seismic fixing device 52 of the present embodiment satisfy the seismic standards determined by laws and standards. Can be performed relatively easily and quickly. Moreover, positioning can be performed with high accuracy while being relatively easy and can be fixed and released. For example, it is remarkably advantageous according to the line design / specifications in the factory, or when performing maintenance / repair of the buffer device 30 etc. regularly or irregularly.

  In addition, as shown in FIGS. 7 to 10, the floor side member 701 is configured such that the height of the upper end surface thereof is lower than the surface height of the floor made of the grating 201. Therefore, when the buffer device 30 is removed, it is possible to prevent a part of the floor member 701 from protruding from the floor and getting in the way.

  Next, with reference to FIGS. 11-13, the attachment position to the bottom part of the base board 50 of the 1st earthquake-resistant fixing device 51 and the 2nd earthquake-resistant fixing device 52 is demonstrated. FIG. 11 shows the arrangement of the two first seismic fixing devices 51 and two second seismic fixing devices 52 to be fixed on the base plate 50, and FIG. 12 shows one of the fixing devices in FIG. For each of the first seismic fixing devices 51, one attachable portion where the first seismic fixing device 51 is actually attached and three attachable portions which are not actually attached (that is, a total of four attachable portions). The enlarged region is shown. FIG. 13 shows where the positions of the four attachable parts in FIG. 12 are prepared in relation to the area where opening is possible in the grating 201 (the hatched area indicates the area where opening is not possible). ).

  As shown in FIG. 11, the two first seismic fixing devices 51 and the two second seismic fixing devices 52 are arranged in the areas indicated by circles in the vicinity of the casters 38 provided at the four corners of the base plate 50. Has been. In the following, the description will be continued with the first seismic fixing device 51 located in the upper left corner of FIG. 11 as an example.

  As shown in FIG. 12, four parts 51a, 51b, 51c and 51d are prepared in the vicinity of the caster 38 to which the first seismic fixing device 51 can be attached. These four parts are separated by a distance Dx in the horizontal direction in FIG. 12, and are separated by a distance Dy in the vertical direction in FIG. Further, FIG. 12 shows a state in which the actual first seismic fixing device 51 is attached to the part 51d. That is, the parts 51b, 51c, and 51d are candidates for the parts to be attached, but are not actually attached because of the relationship with the grating 201 described below. A hole or hole for attaching the metal fitting 801 may be formed in advance on such a candidate attachable portion, or an attachment position mark may be attached.

  Thus, by preparing four attachable parts in advance, the through holes 201H of the grating 201 are opened in relation to the four sides and the four corners of the grating 201 (see FIG. 4) determined according to the actual installation position. The possibility of avoiding the situation where the through-hole 201H must actually be opened in an area that should not be installed (that is, the first seismic fixing device 51 cannot be attached unless it is opened) is greatly increased. That is, if the distances Dx and Dy are determined in relation to an area that should not be opened in the grating 201, such a possibility can be greatly increased.

  As shown in FIG. 11, not only the first seismic fixing device 51 but also four parts 52 a, 52 b, 52 c and 52 d are prepared for the part to which the second seismic fixing device 52 can be attached. Thus, the same effect can be obtained.

  More specifically, as shown in FIG. 13, the base plate 50 has a portion where the first device side member 501 (or the second device side member 601) can be attached in a plan view on the floor. Each through-hole 201H is positioned so that at least one through-hole 201H is located within a predetermined distance from the four sides of each of the gratings 201 within a region where the through-hole 201H can be opened (in the non-hatched region in the figure). On the other hand, four are provided apart from each other. That is, in this case, each of the gratings 201 is planarly viewed on the floor, for example, has a square with a side of about 50 to 60 cm, and avoids the areas that should not be opened in the drawing and are hatched black. A region (that is, a non-hatched region in the figure) that can be opened at a predetermined length L or more from the side is defined. The through-hole 201H has a circular shape with a diameter R, and each of the four seismic fixing devices 51 (or second seismic fixing devices) that can be attached to each of the squares has a length of 2L + R or more on each side. It is prepared to be located at the apex.

  Therefore, any one of the four attachable portions provided in FIG. 11 and FIG. 12 that can be attached must be geometrically within the region where the opening of the grating 201 can be opened (in FIG. 13). , Unhatched area). That is, such a situation can be reliably and easily secured according to mathematical rules. In particular, by setting the length of one side of the square to a value equal to 2L + R or a value substantially equal to 2L + R including a slight margin, it is not necessary to expand the square in a dark manner. That is, it becomes possible to arrange the horizontal positions of the four parts close to each other.

  If the arrangement as shown in FIG. 13 is employed in this way, it is possible to reliably prevent the strength of the grating 201 from being reduced by the occurrence of a situation where the through holes 201H are opened at the four corners and edges of the grating 201. . In addition, the through hole 201H for fixing the buffer device 30 at a desired position in accordance with the desire of the factory owner with respect to the grating 201 is set to any position (that is, any one of the above-described four parts). Corresponding plane position). Even if the buffer device 30 is fixed at an arbitrary position, a situation in which the strength of the grating 201 is hindered can be prevented.

  Next, with reference to FIG. 14, the structure of the stopper metal fitting 801 as an example of the "receiving part" of the present invention will be described. FIG. 14 is an external perspective view of the metal fitting 801 shown in FIG.

  As shown in FIG. 14, when the base plate 50 is horizontally moved by the casters 38 in the metal fitting 801, the receiving member 801 is constricted 501n when the metal fitting 801 is fitted into the constriction 501n (see FIGS. 7 and 8). A taper 801t is formed so as to receive a force vertically upward. Therefore, when the metal fitting 801 fits into the constriction 501n (see FIGS. 7 and 8) due to the action of the vertically upward component force generated when the constriction 501n rides on the taper 801t, the buffer device 30 Greater or lesser lift from the floor, or at least the load applied to the floor via the casters 38, is reduced by more or less. As a result, positioning can be performed with higher accuracy regardless of the presence of the caster 38. In addition, it is possible to extend the life of the entire manufacturing system including the casters 38 and the life of the grating 201 by reducing the excessive weight after the seismic fixing.

  Note that the present invention is not limited to the above-described embodiments, and can be appropriately changed within the scope of the invention or the idea that can be read from the entire claims and the specification, and the seismic resistance accompanying such changes. The fixing device is also included in the technical scope of the present invention.

  DESCRIPTION OF SYMBOLS 3 ... FOUP, 10 ... Vehicle, 20 ... Manufacturing apparatus, 30 ... Buffer apparatus, 50 ... Base board, 51 ... 1st earthquake-resistant fixing apparatus, 52 ... 2nd earthquake-resistant fixing apparatus, 201 ... Grating, 201H ... Through-hole, 501 ... 1st apparatus side member, 601 ... 2nd apparatus side member, 701 ... Floor side member

Claims (8)

A floor-side member provided on a floor in which a plurality of flat floor members are spread at a distance from the base by way of a plurality of pillars erected from at least one of the base and the foundation structure on the base When, and a device-side member provided on the body of the movable device over the floor, a seismic fixed device for seismic fixing the device on the floor,
The floor side member is attached to the foundation or the foundation structure under the floor at a position opposite to a through hole opened in the flat plate floor member at a lower end side, and passes through the penetration at an upper end side. A floor-side connecting member that opens or protrudes upward on the same axis as the through-hole inserted into or facing the hole;
The device-side member, at the lower end is connectable to the floor side connecting member through the through hole at the upper end, provided with a device-side connecting member fixed to the base plate of the present body,
Each of the floor side member and the device side member is provided for one of the devices,
The plurality of device side members are:
One floor side member has a shape that can be connected to the floor side connection member via the through hole on the lower end side as the equipment side connection member, and is attached to the base plate on the upper end side. A first device-side connecting member having a protrusion that can be received by the horizontal positioning receiving member;
With respect to the other floor side members, as the equipment side connecting member, (i) in the fixing hole opened at a position facing the through hole in the base plate, the vertical position is fixed in an adjustable manner, A fixing member for vertical positioning having a coaxial through hole coaxial with the through hole, and (ii) on the lower end side, connectable to the floor side connecting member via the coaxial through hole and the through hole A second device-side connecting member having a shape and having a head portion wider than the coaxial through hole at the upper end side so as to have a lower surface abutting on an upper surface of the fixing member at an edge thereof;
Seismic fixing apparatus comprising: a. Further comprising a carriage on which the device is placed;
The device side member is provided in the cart in addition to or instead of the main body,
The device side connecting member is fixed to the base plate of the carriage.
The earthquake-resistant fixing device according to claim 1. A female screw is cut in the fixing hole,
The fixing member is
A male screw member engaged in the female screw and having the coaxial through hole;
The male screw member engages with the tip side seen from the lower side of the base plate and abuts the lower surface of the base plate around the fixing hole so that the male screw member passes through the female screw. seismic fixing device according to claim 1 or 2, characterized in that it has a nut member which female threaded for preventing the axial movement. The protrusion has a constriction;
The receiving member has a shape that is notched to the side and fits into the constriction from the notched side;
A taper is formed on at least one of the receiving member and the constricted surface of the constriction so that the receiving member receives a force from the constriction vertically upward when the receiving member is fitted to the constriction. The earthquake-proof fixing device according to any one of claims 1 to 3, wherein the earthquake-proof fixing device is provided.   The said floor side member is comprised so that the height in the front-end | tip front-end | tip may be the same as the surface height of the said floor, or it becomes lower, It is any one of Claim 1 to 4 characterized by the above-mentioned. Seismic fixing device. The floor-side member is attached to a rod-shaped structure that forms the other part of the foundation structure that is passed over the plurality of joists in a direction intersecting with the joists that form part of the foundation structure on the lower end side. And
The rod-shaped structure is configured to be attachable to the joist at an arbitrary position in the extending direction of the joist,
The floor member is configured to be attachable to the rod-like structure at an arbitrary position in the extending direction of the rod-like structure on the lower end side. The earthquake-resistant fixing device according to claim 1. Wherein the base plate, a portion configured to be fitted with the device-side member, when the device is secured by the seismic fixing device, in plan view on the floor, the flat floor member The four through holes are spaced apart from each other by four so that at least one of the through holes can be opened at a predetermined distance from the four sides of each of the through holes. The earthquake-proof fixing device according to any one of claims 1 to 6, wherein Each of the flat plate members has a rectangular shape when viewed in plan on the floor , and a region where the hole can be opened is defined as a region separated from each side by a predetermined length L or more,
The through hole is viewed in plan on the floor, a circular diameter R,
The four portions provided site is viewed in plan on the floor, according to claim one side and being provided to be positioned at the vertices of a rectangular 2L + R or longer 7 The seismic fixing device described in 1.