JP2006125095A - Grating and clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a grating and a clean room, facilitating the work for fixing a manufacturing apparatus to the floor surface of a clean room. <P>SOLUTION: This grating 10 constitutes the floor surface of the clean room, and has a screw hole 12 opened to the surface thereof. By this constitution, the manufacturing apparatus is placed on the surface of the grating laid on the floor surface of the clean room. Subsequently, one end of the fixing metal fitting is fitted to the manufacturing apparatus. The through hole at the other end of the fixing metal fitting and the screw hole of the grating are superposed in a plan view. Further, the screw is passed through the through hole at the other end of the fixing metal fitting and the screw hole of the grating from above the fixing metal fitting, and screw-fitted to thereby fix the manufacturing apparatus to the floor surface of the clean room. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a grating and a clean room, and more particularly to a technique for fixing a manufacturing apparatus to a grating constituting a floor surface of a clean room.

  Electronic devices such as LSI and TFT are manufactured in a clean room in which dust and fine particles in the air are eliminated as much as possible. Such a clean room has a structure in which both the ceiling and the floor can circulate air, and a structure in which clean air passing through a filter is supplied from the ceiling to the floor (that is, a downflow structure). It has become. Moreover, the floor surface of a clean room provided with many through holes for air circulation is called grating (for example, refer to Patent Documents 1 and 2). An apparatus for manufacturing an electronic device (hereinafter referred to as “manufacturing apparatus”) is arranged on such a grating.

  By the way, if the manufacturing device is not fixed to the grating and is left alone, there is a possibility that the manufacturing device will fall down if an earthquake or the like with a large shaking occurs, so work near the manufacturing device. It is dangerous for the person. In addition, a large number of piping for supplying extremely toxic gases, chemicals, flammable gases, etc. to the human body are attached to a manufacturing apparatus such as a CVD apparatus or an etching apparatus, but the manufacturing apparatus falls over. There is also a risk that the pipes will break and these will leak out. Therefore, in order to eliminate such danger, it is necessary to fix the manufacturing apparatus to the grating.

  FIG. 8 is a conceptual diagram showing a conventional method for fixing the manufacturing apparatus 90 to the grating 99. As shown in FIG. In FIG. 8, 90 is a manufacturing apparatus, 91 is an adjuster bolt attached to the bottom surface of the manufacturing apparatus, 93 is a fixing bracket attached to a screw rod of the adjuster bolt, 95 is a bolt, and 97 is a nut. 99 is a grating. The adjuster bolt 91 is an adjustment tool for adjusting the height of the manufacturing apparatus 90 or leveling it. In general, four or more adjuster bolts 91 are attached to one manufacturing apparatus 90. In addition, one end of the fixing bracket 93 can be fixed to the screw rod of the adjuster bolt 91, and a through hole is formed at the other end.

  A method for fixing the manufacturing apparatus 90 to the grating 99 is as follows. First, as many fixing bolts 93 as the number of adjuster bolts 91 are prepared. Next, one end of the fixing metal fitting 93 is attached to the screw rods of all the adjuster bolts 91. Next, the through hole at the other end of the fixing fitting 93 is overlapped with the through hole of the grating 99. Further, when the through hole of the fixing metal fitting 93 and the through hole of the grating 99 do not overlap well, a through hole may be formed in the grating 99 using a drill.

Then, the operator inserts the bolt 95 into the through hole of the fixing bracket 93 and the through hole of the grating 99 from the fixing bracket 93 side, and tightens the nut 95 to the bolt 95 that has come out on the back side of the grating 99. . In this way, the other end of the fixing metal fitting 93 is fixed to the grating 99.
FIG. 9 is a plan view showing a state in which the fixing metal fitting 93 is attached to the grating 99. As shown in FIG. 9, the shape of the through hole 92 of the grating 99 in plan view is often a round hole shape elongated in one direction. For this reason, even if the bolt 95 is inserted into the through hole 92 and tightened with the nut 97, the bolt 95 moves to the space in the longitudinal direction of the through hole 92, and the fixing metal fitting 93 and the grating 99 are not fixed. It might be enough.

Therefore, as shown in FIG. 9, when the shape of the through hole 92 is a long and narrow round hole, at least two fixing points by the bolt 95 are used, and the play of one of the bolts 95 out of these bolts 95 is set. By making the direction (upward direction indicated by the arrow in the figure) different from the direction of play of the other bolt 95 (downward direction indicated by the arrow in the figure), the fixing bracket 93 and the grating 99 can be securely fixed. I was supposed to.
JP 09-302894 A JP 2001-164687 A

  In the conventional fixing method shown in FIG. 8, in order to tighten the nut 97, an operator has to reach out under the floor or to sink under the floor with the nut 97, which is a dangerous work. There was a problem that workability was bad. Further, when an operator extends his hand under the floor, it is necessary to move away the adjacent grating 99 in order to make a space for putting his hand in, and there is a problem of maintaining cleanliness and increasing dangerous work.

  Therefore, the present invention has been made paying attention to such an unsolved problem of the conventional technology, and provides a grating and a clean room that facilitate the fixing operation of the manufacturing apparatus to the floor surface of the clean room. Objective.

[Invention 1] In order to achieve the above object, the grating according to Invention 1 is a grating that constitutes a floor surface of a clean room, and is characterized by having a screw hole opened on the surface thereof.
If it is such a structure, a manufacturing apparatus can be fixed to grating (namely, floor surface of a clean room) using a screw hole.

  For example, the manufacturing apparatus is placed on the surface of the grating laid on the floor surface of the clean room. Next, one end of the fixing bracket is attached to the manufacturing apparatus. Then, the through hole at the other end of the fixing metal fitting and the grating screw hole are overlapped in a plan view. Then, the manufacturing apparatus can be fixed to the grating by screwing the screw through the through hole and the screw hole of the grating on the other end of the fixing metal from above the fixing metal.

Compared to the conventional example, it is not necessary for an operator to reach out under the floor or to sink under the floor, and the manufacturing apparatus can be easily fixed to the floor surface.
[Invention 2] The grating according to Invention 2 is characterized in that, in the grating according to Invention 1, a plurality of the screw holes are formed in the surface.
Here, the arrangement of the screw holes when the grating is viewed from a plane is, for example, a shape (hereinafter referred to as “grid shape”) arranged at each intersection position on the lattice, or along a plurality of radiations. This is a shape (hereinafter, referred to as “radial”) disposed at a certain position, or a shape (hereinafter referred to as “spiral”) disposed at a position along the spiral. Also, other arrangements may be used.

According to the grating of the invention 2, an arbitrary screw hole can be selected from a plurality of screw holes and used. Therefore, for example, the mounting position of the fixing bracket and the direction thereof can be selected relatively freely. Further, by disposing the screw holes in the entire grating in a lattice shape, a radial shape, a spiral shape, etc. in a plan view, the strength of the grating can be prevented from being reduced so much.
[Invention 3] The grating according to Invention 3 is the grating according to Invention 1 or Invention 2, comprising the upper grating, the lower grating disposed facing the back surface of the upper grating, the upper grating, and the lower grating. A vibration absorbing member interposed therebetween, and the upper grating is provided with the screw hole.

With such a configuration, even when the entire clean room is shaken by an earthquake, for example, the vibration transmitted from the lower grating to the upper grating can be absorbed to some extent by the vibration absorbing member.
[Invention 4] A clean room according to Invention 4 is characterized by having the grating described in any one of Inventions 1 to 3 on a floor surface.

  With such a configuration, it is not necessary for the operator to extend his hand under the floor or dive under the floor as compared with the conventional example, and the manufacturing apparatus can be easily fixed to the floor surface.

Hereinafter, the grating and the clean room according to the present invention will be described with reference to the drawings.
(1) 1st Embodiment FIG. 1: (A) and (B) are the top views which show the structural example of the grating 10 which concerns on 1st Embodiment of this invention, and AA 'arrow sectional drawing. The grating 10 shown to FIG. 1 (A) and (B) comprises the floor surface of a clean room.

As shown in FIG. 1A, a plurality of through holes 11 for air circulation are formed in the grating 10 at regular intervals. Further, as shown in FIGS. 1A and 1B, the grating 10 is formed with a plurality of screw holes 12 opened on the surface thereof. The arrangement shape of these screw holes 12 in a plan view is, for example, a lattice shape as shown in FIG.
Although not shown, a plurality of beams are stretched around the floor of the clean room in a lattice pattern at regular intervals. The beam and the grating 10 are respectively provided with through openings for passing bolts. The bolts are passed through the openings and tightened with nuts under the floor of the clean room to fix the grating 10 to the beam. It is possible. The grating 10 is made of, for example, a casting.

FIG. 2 is a plan view showing a configuration example of the fixing bracket 60. As shown in FIG. 2, the fixing bracket 60 has a through-opening portion 62 for fixing a screw rod 72 of an adjuster bolt 70 (see FIG. 3) at one end, and passes a screw through the other end. A plurality of through holes 64.
Further, the adjuster bolt 70 supports and fixes an apparatus (manufacturing apparatus) for manufacturing an electronic device on the grating 10 (see FIG. 1), and height from the bottom surface of the manufacturing apparatus to the surface of the grating 10. It is for adjusting the thickness. As shown in FIG. 2, one end of the fixing metal 60 can divide the opening 62 by a plane perpendicular to the plane.

  When fixing one end of the fixing bracket 60 to the screw rod 72 of the adjuster bolt 70, as shown in FIG. 2, the screw rod 72 is sandwiched between the side walls of the divided openings 62, and then the fixing bracket 60 is fixed. A screw 66 is fitted from the horizontal direction to the side surface of one end of the two, and these openings 62 are integrated. The fixing bracket 60 as shown in FIG. 2 is made of, for example, a suspension. Next, a method for fixing the manufacturing apparatus to the grating 10 using the fixing bracket 60 will be described.

FIG. 3 is a conceptual diagram showing a fixed example of the manufacturing apparatus 80. First, the adjuster bolt 70 is attached to the bottom surface of the manufacturing apparatus 80. For example, a screw hole is formed on the bottom surface of the manufacturing apparatus 80. The length of the threaded rod 72 extending from the bottom surface of the manufacturing apparatus 80 is adjusted by screwing the end of the threaded rod 72 in which the thread groove is formed into this threaded hole and rotating it.
Next, the base 74 of the adjuster bolt 70 is placed on the grating 10. Then, one end of the fixing metal fitting 60 is temporarily fixed to the screw rod 72 of the adjuster bolt 70. Next, the other end of the fixing bracket 60 is rotated around the screw rod 72, and the through hole 64 formed in the other end of the fixing bracket 60 and the screw hole 12 formed in the grating 10 are formed. Overlay in plan view. Here, not all of the through holes 64 are overlaid on the screw holes 12, but arbitrary through holes 64 are overlaid on the screw holes 12 from among the plurality of through holes 64.

Then, a screw 68 is screwed into the through hole 64 at the other end of the fixing bracket 60 and the screw hole 12 of the grating 10 from above the fixing bracket 60. Thereby, this manufacturing apparatus 80 is fixed to the floor surface of a clean room.
Thus, according to the grating 10 which concerns on 1st Embodiment of this invention, the manufacturing apparatus 80 can be fixed to the floor surface of a clean room using the screw hole 12. FIG. Compared to the conventional example, it is not necessary for the operator to reach out under the floor or dive under the floor.

  Further, the grating 10 has a plurality of screw holes 12 opened on the surface thereof. Accordingly, any screw hole 12 can be selected and used from among the plurality of screw holes 12, so that the mounting position and direction of the fixing metal fitting 60 can be selected relatively freely. Since there is no play in the screw hole 12 of the grating 10 as compared with the conventional example, it is sufficient that the other end of the fixing bracket 60 and the grating 10 are fixed at least one place. Therefore, alignment of the through hole 64 of the fixing bracket 60 and the screw hole 12 of the grating 10 is easy. Further, by arranging such screw holes 12 in a lattice shape in plan view, the strength of the grating 10 can be prevented from being reduced so much.

In the first embodiment, the grating 10 having the screw holes 12 corresponds to “grating” of the present invention.
In the first embodiment, as shown in FIG. 1A, the case where the plurality of screw holes 12 are arranged in a lattice shape in a plan view has been described. It is not limited to. For example, as shown in FIG. 4, the screw holes 12 may be arranged in a spiral shape with the central portion of the grating 10 as the center. Further, as shown in FIG. 5, the screw holes 12 may be arranged radially from the center of the grating 10 (for convenience of drawing, the through holes 11 for air circulation are shown in FIGS. 4 and 5). Is omitted.)

As shown in FIG. 4 or FIG. 5, even when the screw hole 12 is arranged, any screw hole 12 can be selected and used from among the plurality of screw holes 12. Or, the direction can be selected relatively freely. On the other hand, the strength of the grating 10 can be prevented from being reduced so much.
(2) 2nd Embodiment FIG. 6: is sectional drawing which shows the structural example of the grating 100 which concerns on 2nd Embodiment. In FIG. 6, parts having the same configurations as those in FIGS. 1 and 3 are given the same reference numerals, and detailed descriptions thereof are omitted.

  As shown in FIG. 6, the grating 100 includes an upper grating 10, a lower grating 20, and a vibration absorbing member 30. Among these, the lower grating 20 is disposed so as to face the back surface of the upper grating 10. The lower grating 20 is formed with a plurality of through holes (not shown) for air circulation at regular intervals, but is not formed with a screw hole 12 like the upper grating 10.

  Further, the vibration absorbing member 30 has one end attached to the surface of the lower grating 20 and the other end attached to the back surface of the upper grating 10. The vibration absorbing member 30 is an elastic body, for example, and can expand and contract in the horizontal direction and the vertical direction. The vibration absorbing member 30 and the upper grating 10 and the vibration absorbing member 30 and the lower grating 20 are joined by, for example, an adhesive.

Thus, according to the grating 100 which concerns on 2nd Embodiment of this invention, the manufacturing apparatus 80 can be fixed to the floor surface of a clean room using the screw hole 12 similarly to 1st Embodiment. Compared to the conventional example, it is not necessary for the operator to reach out under the floor or dive under the floor.
Further, the upper grating 10 and the lower grating 20 are laminated with the vibration absorbing member 30 interposed therebetween. Therefore, even when the entire clean room is shaken due to an earthquake, for example, the vibration transmitted from the lower grating 20 to the upper grating 10 can be absorbed to some extent by the vibration absorbing member 30. Therefore, it is possible to further promote earthquake countermeasures in the clean room as compared with the first embodiment.

  By the way, as a countermeasure against earthquakes in a clean room, the grating 100 described in the second embodiment may be laid on the entire floor surface. However, the grating 100 has a double structure with the vibration absorbing member 30 interposed therebetween. Therefore, compared with the conventional grating 99 (refer FIG. 8), there exists a possibility that cost may become high. Therefore, as shown in FIG. 6, the grating 100 is installed only in a specific area on the floor surface of the clean room where the pedestal 74 of the adjuster bolt 70 is directly placed, and in the other areas, the conventional grating 99 is provided. May be laid.

  When the grating 100 is laid selectively as described above, the grating 100 is fixed to the beam 120 under the floor of the clean room together with the conventional grating 99. Moreover, it is preferable to match the height of the surface of the grating 100 with the height of the surface of the conventional grating 99. In this way, the height of the surface is matched to eliminate the step, thereby preventing the operator from whispering.

  Moreover, in said 2nd Embodiment, joining between the vibration-absorbing member 30 and the upper grating 10 and between this vibration-absorbing member 30 and the lower grating 20 are each demonstrated, for example with an adhesive agent. did. However, the manufacturing apparatus 80 is fixed to the upper grating 10 via the fixing bracket 60 and the adjuster bolt 70. These manufacturing apparatuses 80 generally have a considerable weight. For this reason, when a large vibration that causes the manufacturing apparatus 80 to fall is transmitted, a large force is applied to the bonding portion by the adhesive, and the upper grating 10 and the vibration absorbing member 30 may be separated from each other. .

  Therefore, a metal fitting 35 having a U-shape in cross-sectional view as shown in FIG. 7 may be attached to the grating 100 described in the second embodiment. That is, a recess extending in the horizontal direction is provided on the side surface of the upper grating 10, and one end of the metal fitting 35 is fitted into the recess via, for example, the elastic body 33. Further, the other end of the metal fitting 35 is hooked on the back surface of the lower grating 20. With such a configuration, it is possible to prevent the upper grating 10 and the vibration absorbing member 30 from separating without significantly impairing the stretchability of the vibration absorbing member 30 in the horizontal direction and the vertical direction.

In the second embodiment, the upper grating 10 corresponds to the “upper grating” of the present invention, and the lower grating 20 corresponds to the “lower grating” of the present invention. Further, the grating 100 having a structure in which these are laminated via the vibration absorbing member 30 corresponds to the “grating” of the present invention.
The clean room according to the embodiment of the present invention has, for example, at least one of the grating 10 shown in FIG. 1 or the grating 100 shown in FIG. 6 on the floor surface. With such a configuration, the manufacturing apparatus 80 can be easily fixed to the floor surface of the clean room without the operator having to extend his hand under the floor or sink under the floor as compared with the conventional example.

The figure which shows the structural example of the grating 10 which concerns on 1st Embodiment. The figure which shows the structural example of the metal fitting 60 for fixation. The figure which shows the example of fixation of the manufacturing apparatus 80. FIG. The figure which shows an example (helical form) of the arrangement | positioning shape by planar view of the screw hole 12. FIG. The figure which shows an example (radial form) of the arrangement | positioning shape by planar view of the screw hole 12. FIG. The figure which shows the structural example of the grating 100 which concerns on 2nd Embodiment. The figure which shows an example of the fixing method of the grating 10 and the vibrational absorption member 30. The figure which shows the fixing method to the grating 99 of the manufacturing apparatus 90 which concerns on a prior art example. The figure which shows the attachment state of the fixing metal fitting 93 which concerns on a prior art example.

Explanation of symbols

  10 (upper) grating, 11 through hole for air flow, 12 screw hole, 20 lower grating, 30 vibration absorbing member, 33 elastic body, 35 metal fitting, 60 fixing metal fitting, 62 opening, 64 through hole, 66, 68 screws, 70 adjuster bolts, 72 threaded rods, 80 manufacturing equipment, 90 manufacturing equipment, 91 adjuster bolts, 92 grating through holes, 93 adjuster bolt threaded bars, 95 bolts, 97 nuts 99 grating (conventional product), 100 Grating, 120 beams

Claims (4)

A grating that forms the floor of a clean room,
Grating characterized by having a screw hole opened on its surface.   The grating according to claim 1, wherein the grating has a plurality of screw holes that open to the surface. Upper grating,
A lower grating disposed to face the back surface of the upper grating;
A vibration absorbing member interposed between the upper grating and the lower grating,
The grating according to claim 1, wherein the screw hole is provided in the upper grating.   A clean room having the grating according to any one of claims 1 to 3 on a floor surface.

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