JP5728536B2 - Apparatus for forming a film on a substrate - Google Patents

Description

  The present invention relates to an apparatus for forming a film on a substrate.

Conventionally, a plasma display panel (PDP) has been widely used in the field of display devices, and recently, a high-quality, low-cost PDP with a large screen is required (Patent Document 1, Non-Patent Document 1). ).
At present, as shown in FIG. 12, in the PDP, a front substrate 34 in which sustain electrodes 32 and scanning electrodes 33 are formed on a glass substrate 31 and a rear substrate 37 in which address electrodes 36 are formed on a glass substrate 35 are bonded together. The three-electrode surface discharge type obtained by this is the mainstream. A discharge gas is sealed between the front substrate 34 and the back substrate 37. When a voltage is applied between the scan electrode 32 and the address electrode 36 to generate a discharge, the sealed discharge gas is plasma. And ultraviolet rays are emitted. If the phosphor 39 is disposed at a position where the emitted ultraviolet rays are irradiated, the phosphors are excited by the ultraviolet rays and visible light is emitted.

  A dielectric film 38 is formed on the sustain electrode 32 and the scan electrode 33 in the PDP, and a metal oxide such as MgO or SrO is used on the dielectric film 38 for the purpose of protecting the dielectric film 38 and emitting secondary electrons. A protective film 40 for the film is formed.

  As a method for forming a high-throughput and stable protective film such as an MgO film on a large glass substrate such as the above-described PDP, a glass substrate is used as a support member called a carrier or a tray (hereinafter referred to as “carrier”). An in-line type film forming apparatus is used which forms a film while passing over an evaporation source using a means for carrying and transporting. In particular, it is a large-sized substrate, and pass-through film formation is used to form a (111) -oriented MgO film, and the mask used for film formation is also supported by a mask integrated with a carrier or the like. It is set on a carrier or the like with a frame for holding the structure or mask.

In batch type film forming apparatuses and inter-back type film forming apparatuses that use carriers as means for transporting glass substrates or holding during vapor deposition, in particular, in-line type film forming apparatuses have the following problems and problems. is there.
1. Since a carrier for mounting a glass substrate or the like is used, the size of the apparatus increases with an increase in the high tact and the size of the glass substrate.
2. It is necessary to periodically remove the carrier and the like and the protective film such as MgO and SrO based on the mask. For this reason, it is necessary to remove the carrier and the mask from the film forming apparatus, and the apparatus must be stopped for a long time. Don't be.
3. The protective film such as MgO or SrO that adheres to the carrier and the mask may be peeled off and fall into the apparatus and adhere to the substrate before film formation, causing defects. Clean the apparatus regularly. Must.
4). Since the carrier and the mask and the mask are once taken out into the atmosphere at the time of unloading and loading the glass substrate, moisture adheres to the MgO, SrO system, etc., and there is a possibility that the film quality is deteriorated as a released gas during film formation. For this reason, equipment such as CDA (Clean Dry Air) is necessary so that moisture is not adsorbed on the carrier and the mask, and costs for CDA equipment and operation are required (see Patent Document 2).
5. As a method for preventing moisture from adsorbing to the carrier and the mask, there is a method of circulating the carrier and the mask in a vacuum or a controlled atmosphere in addition to the CDA, but the apparatus becomes large. Moreover, it is necessary to replace the handling mechanism part of the glass substrate inside the apparatus with the change of the glass substrate size (replacement).
6). Similarly to the glass substrate, the carrier and the mask need to be heated, and wasteful energy is required.

JP 2004-285426 A

“Flat Panel Display Dictionary”, p.737-p.738, published on December 25, 2001, Industrial Research Committee

  Therefore, the present invention is not required to increase the size of the apparatus to form a film on a substrate constituting a large flat panel display, and does not require a carrier or the like, and is a film forming apparatus having excellent maintainability. The purpose is to provide.

In order to solve the above-mentioned problems, the present inventors have found a solving means as follows as a result of intensive studies.
A first embodiment of the present invention relating to an apparatus for forming a film on a substrate is an apparatus for forming a film on a substrate, the apparatus comprising an evaporation source and an evaporation source in a film forming chamber. An electron gun for irradiating an electron beam, and the film formation chamber is configured so that a plurality of evaporation sources can be disposed at positions facing the substrate, and the substrate is stationary during the film formation. And a substrate transfer means for transferring only the substrate to the stationary position in the film forming chamber is provided outside the film forming chamber, and a mask is sent below the stationary position at a predetermined pitch. A mask moving mechanism is provided so that the mask can be moved between the winding shafts.
Further, according to the second embodiment of the present invention, in the film forming apparatus according to the first embodiment, an area obtained by dividing the periphery of the evaporation surface of each evaporation source at a predetermined interval is a beam irradiation area. The electron gun irradiates an electron beam sequentially in a circumferential direction with respect to the beam irradiation region.
The third embodiment of the present invention is characterized in that, in the film forming apparatus according to the first embodiment, the electron gun irradiates each of the evaporation sources linearly with the electron beam. To do.
According to a fourth embodiment of the present invention, in the film forming apparatus according to the first embodiment, a removing means for removing a film forming material is provided between the winding shafts. .
Further, the fifth embodiment of the present invention is the film forming apparatus according to the first embodiment, wherein the adhesion preventing plate can be fed at a predetermined pitch above the stationary position. A moving mechanism is provided.

According to the present invention, even when a large panel of 32 inches or more is formed in a film forming chamber, the substrate is supported by a substrate support member such as a carrier and moved without forming a film, and the film is formed stationary. The length of the substrate in the film chamber in the transport direction can be suppressed to about 70% as compared with the conventional apparatus.
In addition, handling of glass substrates in a vacuum, such as from a preparation chamber to a heating chamber, from a heating chamber to a film formation chamber, and from a film formation chamber to an extraction chamber, can be performed by a vacuum robot or a glass-only transport mechanism. Thus, a carrier for conveying the glass substrate or the like becomes unnecessary. As a result, it has the following effects.
(1) The cleaning cost of the carrier or the like is not required, and about 3% of the running cost of the apparatus can be reduced.
(2) Heating energy such as carriers and emissions due to cooling are eliminated, and electric power can be reduced by about 20 to 30%.
(3) Since no carrier or the like is required, the apparatus cost can be reduced by about 5% to 10%.
(4) A maintenance cart for handling the carrier or the like or an exchange mechanism for the carrier or the like is not necessary.
(5) The labor cost related to maintenance and handling of the carrier can be reduced, and about 30% to 50% of the labor cost related to maintenance can be reduced.

Explanatory drawing of an example of the apparatus structure used in the best form of implementation of this invention Side view of the inside of the deposition chamber Inside plan (A) An explanatory view for explaining irradiation of an electron beam to a ring hearth used in the apparatus, (b) an explanatory view for explaining irradiation of an electron beam to a rectangular hearth. The graph which shows the relationship of the electron beam rate of an example of the ring hearth Illustration of electron beam oscillation Explanatory drawing of the modification of the apparatus structure used in this invention ((a), (b)) Explanatory drawing of device configuration of conventional example XRD evaluation result of protective film of Example SEM images of the surface and cross section of the MgO film formed in this example SEM image of the surface and cross-section of MgO film deposited by conventional example Description perspective view of PDP

Next, embodiments of the present invention will be described with reference to the drawings.
As shown in FIG. 1, the apparatus to be used includes a transfer chamber 3 for loading and unloading a substrate 2 such as glass into / from the film forming chamber 1 and a substrate 2 from the film forming chamber 1. It is comprised from the heating chamber 4 and the preparation / removal chamber 5 which are connected through this.
The substrate 2 is carried into the film forming chamber 1 by the robot hand 6 in the transfer chamber 3 of FIG. Specifically, a common opening 7 for carrying in / out the substrate 2 as shown in FIG. 2 is provided on the upper side surface of the film forming chamber 1 made of metal such as stainless steel. The substrate 2 is directly carried into the upper space of the film forming chamber 1 by the robot hand 6 through the opening 7 without using a substrate support member such as a carrier.

  The substrate 2 carried into the film forming chamber 1 is placed on the mask 8. The mask 8 is a mask having a predetermined width in the transport direction (hereinafter referred to as the short direction) of the substrate 2 in the film formation chamber 1 and the direction perpendicular to the direction (hereinafter referred to as the longitudinal direction). 8 is composed of two types of mask moving mechanisms 9 and 10 capable of sending 8 at a predetermined pitch, and each mask moving mechanism 9 and 10 has a take-up reel and a take-up reel so that the mask 8 can be stored compactly. A shaft for rotating each reel extends to the outside of the film forming chamber, and although not shown, the mask 8 can be wound up and rewound at a predetermined pitch by being driven by a driving source such as a DC motor. Composed. Further, the mask moving mechanisms 9 and 10 can adjust the tension applied to the mask 8 between the shafts by adjusting the rotation of the shafts, whereby the mask 8 can be brought into close contact with the substrate 2. In this embodiment, since the film formation is performed with the substrate 2 stationary at the position where the substrate 2 is in close contact with the mask 8, this position is the stationary position. In this specification, the stationary position of the substrate 2 is The position where the substrate 2 is stationary when the film is formed on the entire surface of the substrate 2.

  Further, as shown in FIG. 2, an adhesion prevention plate 11 having an opening at the center fixed to the inner wall of the film forming chamber 1 is provided below the mask moving mechanisms 9 and 10. Above, a protection plate 13 that can be wound up by a protection plate moving mechanism 12 configured to be rewound and unwindable in the same manner as the mechanism, and a heater 14 for heating the substrate 2 thereabove. Is provided.

As shown in FIG. 3, ring hearths 15 are arranged in two rows and two columns at the bottom of the film forming chamber 1, and each ring hearth 15 is arranged in the vertical direction of the film forming chamber 1 as shown in FIG. The rotary shaft 16 is supported so as to be rotatable.
Further, as shown in FIG. 3, electron guns 17 are arranged in the vicinity of each ring hearth 15, and in this embodiment, electrons are formed outside the film formation chamber 1 in both sides of the substrate 2 transport direction. A gun 17 is arranged.

In the above apparatus, the substrate 2 is carried to a stationary position, evacuated, and a process gas such as oxygen or oxygen and H ₂ O is supplied into the film forming chamber 1 up to about 1 × 10 ⁻² Pa to ² × 10 ⁻¹ Pa. In the state where the temperature of the substrate 2 is set to 200 ° C. to 250 ° C. by the heater 14, the electron beam 17 irradiates the ring hearth 15 with an electron beam with an output of 10 kW to 150 kW.
As shown in FIG. 4A, the circumferential portion of the upper surface (evaporation surface) of each ring hearth 15 has a beam irradiation region 15a [A (x1, y1), B (x2 , Y1), C (x1, y2), D (x2, y2)], and irradiating each irradiation point 15a with an electron beam from each electron gun 17 for a predetermined time (20 msec to 100 msec). The protective film is formed on the substrate 2 by moving them in the order of [A → B → C → D] in a certain time (100 μsec to 1000 μsec). The beam irradiation order to the beam irradiation areas A to D may be A → C → B → D, A → D → B → C, or the like regardless of the above order.

As described above, the protective film can be formed while the substrate 2 is stationary. According to the apparatus described above, the space of the film formation chamber 1 can be reduced as compared with the film formation chamber of the pass-through film formation apparatus using a carrier or the like.
Further, in the conventional pass-through film forming apparatus, a mask is provided on a carrier or the like. However, according to the above apparatus, a protective film can be formed only by providing only the mask 8 in the film forming chamber 1. Become. Therefore, the mask can be easily exchanged simply by disposing the mask moving mechanisms 9 and 10 in the film forming chamber 1 and in the mask exchanging chamber and the buffer chamber provided in the vicinity of the film forming chamber. As a result, in the conventional pass-through film forming apparatus, it takes 60 to 120 minutes to change the mask and raise the mask temperature to 100 ° C. to 250 ° C. According to the present embodiment, The same work can be completed in about 10 minutes.
Further, a removing means for removing a film-forming substance such as a scraper is disposed between the unwinding reel and the take-up reel of each mask moving mechanism 9, 10 so that the mask 8 is formed when the mask 8 is wound at a predetermined pitch. If the film material is removed, the reel can be rewound and reused in a vacuum state after the winding is completed, so that the life of the mask 8 can be greatly increased, and the cleaning can be performed. Can also be done easily.
Moreover, in this Embodiment, since the protection board 13 can also be wound up freely, the replacement period of the protection board 13 can be extended.

  The irradiation time at each irradiation point is appropriately selected depending on the material charged in the ring hearth 15 as shown in FIG. 5 showing the relationship between the electron beam irradiation time on the MgO ring hearth 15 and the vapor deposition rate. Among these, it is preferable to set it to 20 to 100 msec. This is because when each irradiation region is irradiated with an electron beam, a high evaporation rate can be obtained with respect to the power of the input electron beam.

Further, it is preferable that the irradiation region is swung with a predetermined width during the electron beam irradiation. For example, as shown in FIGS. 6A and 6B, the X-axis direction and the Y-axis direction are used. It is preferable to oscillate with a triangular wave of 222 Hz to 500 Hz, a square waveform of 50 Hz to 100 Hz, an arbitrary waveform generated by a function generator, or the like. This is because the splash of the evaporating material is eliminated from the beam irradiation point, and it can be uniformly evaporated.
Further, in the present embodiment, there are four electron beam irradiation points 15a on the ring hearth 15, but the circumferential portion of the upper surface of the ring hearth 15 is divided at a predetermined interval such as an equal interval. If there is, the number is not particularly limited, and the irradiation area may be increased to form a circumference. Further, the number of ring hearts 15 to be arranged is four in two rows and two columns in the present embodiment, but is not necessarily limited to four, and the film thickness distribution of the protective film with respect to the substrate 2 The (111) peak intensity and the film density may correspond to those irradiated with the electron beam.
In addition to the ring hearth, as shown in FIG. 4B, a rectangular hearth 15 ′ may be used to irradiate the linear irradiation region 15a with an electron beam in a linear manner. In this case, the (111) intensity distribution of crystal orientation can be improved.

In the above-described embodiment of the invention, the substrate 2 can be made of high strain point glass for PDP, soda lime glass, or the like.
Moreover, the material thrown into the ring hearth 15 is not particularly limited as long as it is a material that can be used as a material for the protective film, and is composed of, for example, MgO, SrO, or the like formed in a grain shape or a pellet shape.
As for the mask 8, it is preferable to employ a metal strip such as stainless steel having a thickness of about 0.2 mm. This is because the heat capacity is very small and the preheating of the mask 8 can be made unnecessary.
Moreover, it is preferable to employ | adopt the metal strip | belt-like bodies, such as stainless steel about thickness 0.2mm, also about the adhesion prevention board 13. As shown in FIG. This is because, if the film adhesion amount on the deposition preventive plate 13 becomes 2 mm to 5 mm, the replacement cycle of the deposition preventive plate 13 can be extended by sending it at a predetermined pitch.

  Further, the apparatus of the present invention is not limited to the apparatus mode of FIG. 1, and is connected to the film forming chamber 1 through the heating chamber 4 from the preparation / extraction chamber 5 as shown in FIG. Even an inter-back type apparatus or an in-line type apparatus in which the preparation chamber 18, the heating chamber 4, the film forming chamber 1, and the take-out chamber 19 as shown in FIG. 7B are connected in order can be used.

Next, a film was formed using the apparatus described in the best mode for carrying out the invention.
(Example)
A protective film was formed on the substrate of a 42-inch plasma display panel using FIGS. 1 to 6 described in the best mode for carrying out the invention.
In the film forming chamber 1, the length of the substrate 2 in the transport direction (L: see FIG. 2) was 1400 mm.
The electron beam irradiation conditions were as follows: irradiation points (beam irradiation regions) 15a on each ring hearth 15 shown in FIG. 4A were irradiated in the order of A → B → C → D. The irradiation time at each irradiation point was about 50 msec, and the movement time between each irradiation point was 500 μsec. Further, when irradiating the electron beam, the X-axis was oscillated with a triangular wave of 500 Hz as shown in FIG. Further, as shown in FIG. 6B, the Y-axis was made to oscillate the electron beam with a triangular wave of 222 Hz. In addition, the evaporation material thrown into the ring hearth 15 was made of a single crystal material of MgO.
The pressure during film formation is 9.0 × 10 ⁻² Pa, the oxygen introduction amount is 300 sccm, the heating temperature of the substrate 2 by the heater 12 is 250 ° C., the power of each electron gun 17 is 11.7 kW, An MgO film having a film formation rate of 270 Å / sec and a film thickness of 8000 で was formed in 30 seconds while 2 was kept stationary.
The mask 8 is made of a stainless steel metal strip having a thickness of about 0.2 mm and a length of 125,000 mm. When the MgO film has a thickness of 0.5 mm during film formation, the rewind type is used. With the mask moving mechanism 10, about 1200 mm obtained by adding about 220 mm to the length in the longitudinal direction of the 42-inch panel was wound as one pitch.
The deposition preventing plate 13 is made of a stainless steel metal strip having a thickness of about 0.2 mm and a length of 11,000 mm. When the MgO film has a thickness of 2 mm during the film formation, the winding type is taken up. The anti-adhesion plate moving mechanism 12 is wound up with a pitch of about 1200 mm, which is obtained by adding about 220 mm to the length of the 42-inch panel in the longitudinal direction.

(Conventional example)
As shown in FIG. 8, the apparatus configuration used in the conventional example has a length (L) in the transport direction of the substrate 2 in the film formation chamber 1 of 2000 mm, and a carrier for transporting the substrate 2 into the film formation chamber 1. Or what provided the tray was used. Then, two types of ring hearths 15 were installed at positions facing the substrate 2 in the transport direction of the substrate 2, and film formation was performed while transporting the substrate 2 under the same process conditions as those in the example.

As a result of evaluating the crystallinity by XRD (X-Ray Diffraction), the protective film formed according to the example was oriented to (111) as shown in FIG. 9, and the strength was 1763 cps.
Moreover, it was confirmed that the refractive index was 1.67 to 1.68 and the film density was comparable to that of the conventional example.
Furthermore, as a result of comparing the SEM image (FIG. 10) of the surface and cross section of the MgO film formed in this example with the SEM image (FIG. 11) of the surface and cross section of the MgO film formed according to the conventional example, It was confirmed that a film was obtained.
Further, when the length L in the conveyance direction of the substrate 2 of the apparatus used in the present embodiment is compared with the length L of the conventional example, the apparatus used in the present embodiment only needs 70% compared to the conventional example. I understood it.

In the case of this embodiment, since the mask 8 is sent by the take-up type mask moving mechanism 10, it is possible to perform film formation on 64,800 substrates 2 in calculation, and it takes 720 hours (about approximately 30 days), it was found that continuous film formation was possible.
Similarly, it has been found that by adopting a winding-type deposition-preventing plate mechanism, continuous operation is possible with approximately 9 windings in 30 days of operation.

DESCRIPTION OF SYMBOLS 1 Deposition chamber 2 Substrate 3 Transfer chamber 4 Heating chamber 5 Preparation / removal chamber 6 Robot hand 7 Opening 8 Mask 9 Mask moving mechanism (short direction)
10 Mask moving mechanism (longitudinal direction)
11 Fixed deposition plate 12 Bonding plate moving mechanism (proof plate)
13 Protection plate 14 Heater 15 Ring hearth 15 'Rectangular hearth 15a Irradiation point (beam irradiation area)
DESCRIPTION OF SYMBOLS 16 Rotating shaft 17 Electron gun 18 Preparation chamber 19 Extraction chamber 31 Glass substrate 32 Sustain electrode 33 Scan electrode 34 Front substrate 35 Glass substrate 36 Address electrode 37 Back substrate 38 Dielectric film 39 Phosphor 40 Protective film

Claims (5)

An apparatus for forming a film on a substrate, the apparatus comprising: an evaporation source in a film forming chamber; and an electron gun for irradiating an electron beam to the evaporation source, A plurality of evaporation sources can be arranged at positions facing the substrate, a stationary position is provided for stationary the substrate during film formation, and only the substrate is placed at the stationary position in the film formation chamber. A substrate transfer means for transferring is provided outside the film formation chamber, and a mask moving mechanism is provided below the stationary position so that the mask can be sent at a predetermined pitch. The mask moving mechanism winds the mask. An apparatus for forming a film, characterized in that it can be fed between take-up shafts.   A region obtained by dividing a peripheral portion of the evaporation surface of each evaporation source at a predetermined interval is defined as a beam irradiation region, and the electron gun sequentially irradiates the beam irradiation region with an electron beam in a circumferential direction. Item 2. The film forming apparatus according to Item 1.   2. The film forming apparatus according to claim 1, wherein the electron gun irradiates each of the evaporation sources with the electron beam linearly.   2. The film forming apparatus according to claim 1, further comprising a removing unit for removing a film forming substance between the winding shafts.   2. The film forming apparatus according to claim 1, wherein a deposition plate moving mechanism is provided above the stationary position so that the deposition plates can be fed at a predetermined pitch.

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