469488 A7 ___J7__ 五、發明說明（1 ) 【發明所屬之技術領域】 本發明係有關製造電漿顯示裝置之真空製造裝置，尤 其關於可提高生產量之真空裝置。 (請先閱讀背面之注意事項再填寫本頁) 【習知技術】 近年，可構成薄型而、大畫面之電漿顯示裝置受到注目 。第9圖之符號101係表示AC型之電漿顯示裝置之構 造，而具有前面板1 2 0與後面板1 3 0。 在前面板1 2 0與後面板1 3 0之表面分別設有電極 121與電極131。前面板120與後面板130彼此 面對。前面板1 2 0上之各電極1 2 1與後面板上之各電 極1 3 1，係分別形成爲細長。前面板1 2 0上之各電極 1 2 1，係彼此平行地配置，又，同樣地，後面板1 3 0 上之各電極1 3 1，也彼此平行地配置。 前面板120上之各電極12 1，與後面板130上 之各電極131，係互相向成垂直之方向延伸。此ACM 之電漿顯示裝置，係複數電極121，131之中，選擇 適當之電極1 2 1，1 3 1藉施加電壓，構成爲可將電漿 顯示裝置1 0 1上所需位置發光。 此電漿顯示裝置1 0 1之前面板1 2 0之製造工程時 ，參照第8圖，首先，準備透明基板141(第8圖（a ))。在此透明基板1 4 1上形成透明導電膜（例如 ITO膜）142 (該圖（b))，接著，形成金屬薄膜 1 4 3 (該圖（c ))。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 4.69 46 8 A7 _B7____ 五、發明說明（2 ) (請先閱讀背面之注意事項再填寫本頁) 形成透明導電膜1 4 2與金屬薄膜1 4 3之圖案，形 成由透明電極1 4 4與補助電極1 4 5所成之電極1 2 1 後（該圖（d))，在其電極121表面形成透明介電質 層（例如低熔點玻璃層）1 4 6 (該圖（e ))。 最後，將透明基板1 4 1搬入真空槽內，在透明介電 質層1 4 6表面使用澱積、法形成以M g 〇所成之保舊膜 1 4 7 (該圖（f ))，取出於真空槽外後，與使另外形 成之後面板1 3 0平行成爲對向，進行相對性之對準位置 〇 其次，封裝前面板1 2 0與後面板1 3 0真空排氣殘 留於面板120，130間之大氣，將面板120， 1 3 0間成爲真空狀態之後，進行時效處理。 接著，將放電用氣體導入於面板1 2 0，1 3 0間， 製作電漿顯示裝置之後，進行動作測試。 然後，以如上述之製造工程，因保護膜1 4 7暫且會 暴露於大氣，所以受到水分之影響，具有劣化之問題（ MgO變質爲Mg (OH) 2)。又，封裝後因進行加熱 脫氣及時效處理，必須經由留於面板1 2 0，1 3 0間之 小孔進行真空排氣，所以加熱脫氣及時效處理需要花費長 時間，也具有生產量低之問題。 【發明所欲解決之問題】 本發明係爲了解決上述習知技術之不妥情形所發明者 ，其目的係提供一種可製造生產量高’高品質之電漿顯示 本紙張尺度適用中國國家標準（CNS)A4規格（210^ 297公釐） 4 g g ^ 6 β附牛：第89ii03(H號專利申請案 4 ^ 中文說明書修正頁 A7民國90年U月呈 B7 7c年//月久日 修正補充 五、發明說明f ) 裝置之真空裝置。 【解決問題之手段】 爲了解決上述問題， 面板之電漿顯示裝置之真 上述前面板形成薄膜之成 面板在真空環境中相對性 述成膜室與上述對準位置 不暴露於大氣進行搬送》 又，本發明之真空裝 上述成膜室，就可搬入於 又，上述對準位置室 爲仍維持真空環境。 又，本發明之真空裝 具有裝封室之裝配生產線 之上述前面板與後面板， 室搬入於上述裝封室內， 上述前面板與後面板之間 又，於本發明之真空 置內部配置有加熱裝置之 性對準位置狀態之上述前 時效處理室內，邊真空排 裝置發熱，可構成爲將上 態下加以加熱。 本發明係欲製造 空裝置|具有： 膜室，與將上述 地對準位置之對 室之間，保構成 置，係上述後面 上述對準位置室 ，係搬入上述後 具有前面板與後 在真空環境中在 前面板與上述後 準位置室，在上 爲上述前面扳可 板爲構成不通過 內。 面板時，可構成 (請先閱讀背面之注意事項再填莴本頁) -rr 置，係 ，將被 可不暴 在被上 導入氣 裝置， 時效處 面板與 氣上述 述前面 在上述對 上述相對 露於大氣 述相對性 體，可構 係在上述 理室，密 後面板之 時效處理 板與後面 準位置室 性對準位 從上述對 對準位置 成爲密封 裝配生產 封經被上 前’搬入 室內使上 板被對準 連接於 置狀態 準位置 狀態之 0 線，設 述相對 於上述 述加熱 /JL. cca jf lx 位置狀 ---訂---------44v 本紙張尺度適用中國國家標率（CNS)A4規格（210 X 297公« ) 469468 A7 ____；_B7___ 五、發明說明（4 ) (請先閱讀背面之注意事項再填寫本頁) 又，在上述裝配生產線上，設具有電源之時效處理室 ，將被相對性對準位置之上述前面板與上述後面板，在密 封之前，搬入上述時效室內，將上述時效室內邊真空排氣 導入放電用氣體，以上述電源對於具有上述前面板與上述 後面板之電極施加電壓，在上述前面板與上述後面板之間 可構成爲使其產生放電。· 又，在本發明之真空裝置，在上述時效室與上述密封 室之間，設具有電源之檢查室，在上述時效室內完成之上 述前面板與上述後面板，在加以密封之前搬入上述檢查室 內，邊真空排氣上述檢查室內，由上述電源對於上述前面 板與上述後面板所具之電極施加電壓，在上述前面板與上 * 述後面板之間可構成爲使其產生放電6 經濟部智慧財產局員工消費合作社印製 另一方面，本發明之電漿顯示裝置之製造方法，係將 前面板搬入於成膜室內，在真空環境中形成薄膜之後，將 上述前面板不暴露於大氣搬入於位置對準位置室內，上述 前面板與上述前面板係另外地所搬入之後面板在上述位置 對準室內相對性地對準位置之後，在上述前面板與上述後 面板之間導入放電氣體之狀態下，來密封上述前面板與上 述後面板之製造方法》 本發明係構成爲如上述，將構成電漿顯示裝置之前面 板搬入於成膜室內，在真空環境中形成薄膜之後，不暴露 於大氣搬入於對準位置室內，在真空環境中可對準與後面 板間之位置。所以，對於在成膜室內之薄膜不吸附水分等 之氣體，可使薄膜品質不至於劣化。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 4 6 9 46 8 A7 _ ._B7_ 五、發明說明（5 ) (請先閱讀背面之注意事項再填寫本頁) 關於後面板，也進行脫氣處理後，搬入於對準位室內 即可。此時，後面板之脫氣時間因較前面板之薄膜形成所 花費之時間爲長，所以，若將後面板連續複數枚進行脫氣 處理時，產生量就不會降低。 進行前面板與後面板之位置對準之後，於被對準位置 之狀態下，不暴露於大氣、加以加熱，進行互相勢向之前面 板表面與後面板表面之脫氣之後，若進行氣體封入及密封 (封裝處理）時，處理時間就可縮短。這種密封前之脫氣 處理，係稱爲時效處理。 除了由加熱之時效處理之外，也可以在對準位置狀態 下在置於前面扳與後面板之間導入鈍性氣體等之放電用氣 體，在前面板與後面板之間施加電壓，在前面板與後面板 間之產生由於放電之電漿，由其電漿之脫氣進行時效處理 0 再者，也可以由加熱進行時效處理之後，進行由電漿 之時效處理。 又，在進行密封之前，在前面板與後面板之電極施加 電壓使其發光，若檢查發光狀態時，就不必對於不良品進 行密封處理。 ' 如以上，於本發明係爲了製造電漿顯示裝置，將前面 板及後面板在真空環境內連續地處理。 【發明之實施形態】 參照第1圖，符號1係表示本發明一例之真空裝置。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 469468 A7 _,_B7_____ 五、發明說明（6 ) (請先閱讀背面之注意事項再填寫本頁) 此真空裝置1係具有；前面板側製造生產線上2 0 ’與後 面板側製造生產線上3 0，與位置對準位置1 1，與裝配 生產線4 0。 前面板側製造生產線上2 0與後面板側製造生產線上 3 0，係位於電漿顯示裝置製造工程之對準位置室1 1之 前段，而連接於對準位置、室1 1之入口側。裝配生產線 4 0係位於製造工程之對準位置室1 1之後段，而連接於 對準位置室1 1之出口側。 在前面板側製造生產線上2 0具有；搬入室2 1，與 配置於該搬入室2 1與對準位置室1 1間之成膜室2 2。 又，後面板側製造生產線上3 0係具有；搬入室3 1，與 配置於^搬入室3 1與對準位置室11間之脫氣室3 2。 此真空裝置1所具之各室預先被抽引成真空環境。 首先，若說明使用前面板側製造生產線上2 0之製造 工程時，將搬入室2 1開放於大氣，將形成爲如第8 ( e )圖所示不具保護膜1 4 7之透明介電質層1 4 6之前面 板，搬入於搬入室21內。 將搬入室2 1內部加以真空排氣後，將搬入室2 1內 部連接於成膜室2 2內部，將前面板搬入於成膜室2 2內 〇 茲成膜室2 2之構造一例表示於第3圖。此成膜室 2 2係具有真空室7 1，在該真空室7 1底壁上配置有蒸 發源7 3，又在頂板側配置有面板保持器（panel hoder) 74。在真空室7 1外，配置有氣體導入系78。氣體導 本紙張尺度適用中固國家標準（CNS)A4規格（210 X 297公釐） 469468 A7 j____B7 _ 五、發明說明（7 ) 入系7 8係依氣體鋼瓶8 1 ’與質量控制器8 3之順序連 接’構成爲將塡充於职!體鋼瓶8 1內之氧氣由質量控制器 8 3邊控制流量可導入於真空室7 1內。 -------------裝--- (請先閱讀背面之沒意事項再填寫本頁) 在蒸發源7 3內配置有由Mg 0所形成之澱積材料 8 6 ’所導入氧氣之真空室7 1內在既定壓力下安定之後 ’對於澱積材料8 6照射'電子光束，在真空室7 1內將釋 出澱積材料8 6之蒸氣。 第3圖之符號6係表示配置於成膜室2 2內之前面板 ’在其背面設有加熱器7 6。通電於其加熱器7 6，以加 熱前面板並且從蒸發源7 3釋出澱積材料8 6之蒸氣8 8 時’在前面板6表面之透明介電質層1 4 6表面，成長由 * -4 如第8 ( f )之1 47所示之NgO所成之保護膜。其保 護膜形成爲既定膜厚時，就結束成膜處理，連接成膜室 2 2內與對準位置室1 1內，將前面板搬入於對準位置室 1 1。第1圖之符號6係表示搬入於對準位置室1 1內之 前面板。按，於此雖然使用澱積法形成Mg 0膜，但是， ...... ..... - ·.. 但是本發明可以並非使用其，而也可以使用噴濺（ ·> " " . spputtering )法，離子電鏡（ion plating )法，或 C V D 法 ί t .形成。 ί 與如與上述之前面板6之製造方法並行，於後面板側 ί 丨製造生產線30，進行後面板之脫氣處理。 : 於此，若說明後面扳之處理時’首先，後面板係經由 ： 搬入室3 1搬入於脫氣室3 2內。脫氣室3 2內係構成爲 • 可加熱複數枚之後面板，依序加熱其等複數枚之後面板， 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 4 6 9 ^6 8 a? :_._ B7___ 五、發明說明（8 ) 進行脫氣處理，從結束脫氣處理之後面板，搬入於對準位 置室1 1內。 (請先閲讀背面之注意事項再填寫本頁) 脫氣室3 2內之環境係進行真空排氣直到變成既定壓 力之後，就可將面板搬入於對準位置室1 1內。對準位置 室1 1內已變成真空環境，因此，從結束脫氣處理之後面 板從脫氣室3 2搬送於對準位置室1 1時，後面板爲不會 暴露於大氣，又，在對準位置室1 1內不至侵入從後面板 釋出之氣體或大氣。 按，於此，係以由加熱之脫氣處理爲例做了說明，但 是加熱的同時也可倂用由電漿之粒子幅射（bonbard )。 第1圖之符號7，係表示搬入於對準位置室1 1內之 後面板β此對準位置室1 1，係如第4圖所示，具有真空 槽6 1，在該真空槽6 1底壁上，設有前面板用之載置台 62。在該載置台62底面，設有軸65，其下端部係經 由伸縮囊6 6導出於真空槽6 1外，而連接於馬達6 7。 在真空槽6 1之頂板側，配置有後面板用之保持台 63，在該保持台63，設有基板保持機構64。 經濟部智慧財產局員工消費合作社印製 搬入於對準位置室1 1內之前面板6，將MgO保護 膜朝向上方載置於載置台6 2上。又，搬入於對準位置室 1 1內之後面板7係使用基板保持機構6 4，將成膜面朝 下方保持於保持台6 3。 於其狀態，前面板6與後面板7係成爲互相平行，由 馬達6 7之致動驅動軸6 5，使前面板6與後面板7相對 性地迴轉移動，對準位置成爲既定位置關係，使用夾具暫 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐〉 =-t-h=- A7 4 6 9^68 B7____ 五、發明說明（9 )469488 A7 ___J7__ 5. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a vacuum manufacturing device for manufacturing a plasma display device, and particularly to a vacuum device that can increase the throughput. (Please read the precautions on the back before filling this page.) [Knowledge technology] In recent years, plasma display devices that can form thin and large screens have attracted attention. Reference numeral 101 in FIG. 9 indicates the structure of an AC type plasma display device, and has a front panel 120 and a rear panel 130. Electrodes 121 and 131 are respectively provided on the surfaces of the front panel 120 and the rear panel 130. The front panel 120 and the rear panel 130 face each other. Each of the electrodes 1 2 1 on the front panel 1 2 0 and each of the electrodes 1 3 1 on the rear panel are formed to be elongated. The electrodes 1 2 1 on the front panel 120 are arranged in parallel with each other, and similarly, the electrodes 1 3 1 on the rear panel 130 are arranged in parallel with each other. Each electrode 121 on the front panel 120 and each electrode 131 on the rear panel 130 extend perpendicular to each other. The plasma display device of the ACM is a plurality of electrodes 121 and 131. An appropriate electrode 1 2 1, 1 3 1 is selected by applying a voltage, and is configured to emit light at a desired position on the plasma display device 101. In the manufacturing process of the plasma display device 101 and the front panel 120, referring to FIG. 8, first, a transparent substrate 141 is prepared (FIG. 8 (a)). A transparent conductive film (such as an ITO film) 142 is formed on the transparent substrate 1 4 1 (FIG. (B)), and then a metal thin film 1 4 3 (FIG. (C)) is formed. This paper size is in accordance with China National Standard (CNS) A4 specification (210 X 297 mm) 4.69 46 8 A7 _B7____ V. Description of the invention (2) (Please read the precautions on the back before filling this page) Form a transparent conductive film 1 4 2 and a metal thin film 1 4 3 to form an electrode 1 2 1 formed of the transparent electrode 1 4 4 and the auxiliary electrode 1 4 5 (the figure (d)), and a transparent dielectric layer is formed on the surface of the electrode 121 (For example, a low-melting glass layer) 1 4 6 (the figure (e)). Finally, the transparent substrate 1 4 1 is moved into a vacuum chamber, and a deposited film 1 4 7 made of M g 0 is formed on the surface of the transparent dielectric layer 1 4 6 by deposition (this figure (f)), After being taken out of the vacuum tank, it is parallel to the rear panel 130 which is formed separately, and is aligned with relative position. Second, the front panel 120 and the rear panel 130 are packaged with vacuum exhaust remaining on the panel 120. In the atmosphere of 130 rooms, after the panels 120 and 130 are brought into a vacuum state, an aging treatment is performed. Next, a discharge gas was introduced between the panels 120 and 130, and after a plasma display device was manufactured, an operation test was performed. Then, according to the manufacturing process described above, the protective film 1 4 7 is temporarily exposed to the atmosphere, so it is affected by moisture and has a problem of deterioration (the MgO is changed to Mg (OH) 2). In addition, because of heat degassing and aging treatment after encapsulation, vacuum exhaust must be performed through the small holes left between the panel 120 and 130, so heating degassing and aging treatment takes a long time and has a throughput. Low problem. [Problems to be Solved by the Invention] The present invention is an inventor in order to solve the above-mentioned inconveniences of the conventional technology. The purpose of the present invention is to provide a high-quality plasma that can be manufactured with high production volume. CNS) A4 specification (210 ^ 297 mm) 4 gg ^ 6 β attached to cattle: No. 89ii03 (H patent application 4 ^ Chinese manual amendment page A7 U.S. 90 month B7 7c year // month long day amendment 5. Description of the invention f) Vacuum device of the device. [Means for solving the problem] In order to solve the above problem, the plasma display device of the panel is true. The above-mentioned front panel is formed into a thin film. The front panel is formed in a vacuum environment. According to the present invention, the above-mentioned film-forming chamber can be vacuum-mounted, and the alignment chamber can be maintained in a vacuum environment. In addition, the vacuum pack of the present invention has the front panel and the rear panel of the assembly production line with a sealing chamber, and the chamber is moved into the packaging chamber. Between the front panel and the rear panel, heating is arranged inside the vacuum chamber of the present invention. In the above-mentioned pre-aging treatment chamber where the device is aligned with the position, the vacuum exhaust device generates heat and can be configured to be heated in the upper state. The present invention is to manufacture an empty device. It has: a membrane chamber and a pair of chambers for aligning the above ground, and a structure is maintained, which is the above-mentioned alignment position chamber, which has a front panel and a vacuum in the rear after being moved into the above. In the environment, the front panel and the above-mentioned rear position room are above, and the above-mentioned front spanner is configured not to pass inside. The panel can be constructed (please read the precautions on the back before filling in the lettuce page) -rr placement, that is, it can be introduced into the air device without being exposed to the aging. The relative body in the atmosphere can be structured in the above-mentioned processing room, the aging treatment board of the dense rear panel and the rear quasi-positional room alignment position has changed from the above-mentioned alignment position to the sealed assembly production. The upper plate is aligned and connected to the 0 line in the quasi-position state of the set state, and the position is set relative to the above-mentioned heating / JL. Cca jf lx position state --- order --------- 44v This paper size applies to China National Standard Rate (CNS) A4 specification (210 X 297 male «) 469468 A7 ____; _B7___ V. Description of the invention (4) (Please read the precautions on the back before filling this page) Also, in the above assembly production line, it is set to have The aging treatment room of the power supply will move the front panel and the rear panel, which are aligned relative to each other, into the aging room before sealing, and introduce the exhaust gas into the aging room. Said front panel having a voltage applied to the electrodes of the rear panel, between the front panel and the rear panel may be configured to produce a discharge. In the vacuum device of the present invention, an inspection room having a power source is provided between the aging room and the sealed room, and the front panel and the rear panel completed in the aging room are moved into the inspection room before being sealed. In the above-mentioned inspection room, the power is applied to the electrodes on the front panel and the rear panel by a vacuum while the vacuum is exhausted, and a discharge may be formed between the front panel and the rear panel. 6 Ministry of Economic Affairs Printed by the Consumer Cooperative of the Property Bureau. On the other hand, the manufacturing method of the plasma display device of the present invention is to move the front panel into a film forming chamber, and after forming a thin film in a vacuum environment, the front panel is not exposed to the atmosphere and is moved to Positioned in the position room, after the front panel and the front panel are carried separately, after the panels are relatively aligned in the position alignment room, a state in which a discharge gas is introduced between the front panel and the rear panel To seal the manufacturing method of the front panel and the rear panel. The present invention is structured as described above. A plasma display panel to the front loading apparatus in the deposition chamber, after forming a thin film in a vacuum environment, without exposure to air to a loaded chamber aligned position, may be aligned with a position between the rear plate in a vacuum environment. Therefore, the film in the film forming chamber does not adsorb gas such as moisture, so that the film quality is not deteriorated. This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) 4 6 9 46 8 A7 _ ._B7_ V. Description of the invention (5) (Please read the notes on the back before filling this page) After the panel is degassed, it can be carried into the alignment chamber. At this time, the degassing time of the rear panel is longer than the time it takes to form a thin film on the front panel. Therefore, if the rear panel is degassed continuously, the amount of generated gas will not decrease. After aligning the positions of the front panel and the rear panel, in the state of being aligned, do not expose to the atmosphere, heat them, and perform degassing toward the front panel surface and the rear panel surface with each other. When sealing (packaging), the processing time can be shortened. This degassing treatment before sealing is called aging treatment. In addition to the aging treatment by heating, a discharge gas such as a blunt gas can be introduced between the front panel and the rear panel in an aligned position, and a voltage can be applied between the front panel and the rear panel. The plasma generated between the panel and the rear panel is aging treated by the degassing of the plasma due to the discharge. Furthermore, the aging treatment by the plasma may also be performed after the aging treatment by heating. In addition, before sealing, a voltage is applied to the electrodes of the front panel and the rear panel to cause light emission. If the light emission state is checked, it is not necessary to perform sealing treatment for defective products. As described above, in the present invention, in order to manufacture a plasma display device, the front panel and the rear panel are continuously processed in a vacuum environment. [Embodiment of the invention] Referring to Fig. 1, reference numeral 1 denotes a vacuum device according to an example of the present invention. This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) 469468 A7 _, _ B7_____ V. Description of the invention (6) (Please read the precautions on the back before filling this page) This vacuum device 1 has ; 20 'on the front panel side production line and 30 on the rear panel side production line, aligned with position 1 1 and 40 with the assembly line. The front panel side manufacturing production line 20 and the rear panel side manufacturing production line 30 are located in front of the alignment position room 11 of the plasma display device manufacturing process, and are connected to the alignment position and the entrance side of the room 11. The assembly line 40 is located after the alignment position chamber 11 in the manufacturing process, and is connected to the exit side of the alignment position chamber 11. The front panel side production line 20 has: a carry-in chamber 21 and a film-forming chamber 22 disposed between the carry-in chamber 21 and the alignment position chamber 11. The rear panel side manufacturing line 30 includes a carry-in chamber 31 and a degassing chamber 32 disposed between the carry-in chamber 31 and the alignment position chamber 11. The chambers of the vacuum device 1 are drawn in advance into a vacuum environment. First, if the manufacturing process on the front panel side production line 20 is explained, the moving room 21 will be opened to the atmosphere, and it will be formed as a transparent dielectric without protective film 1 4 7 as shown in Fig. 8 (e). The front panel on the floor 1 4 6 is carried in the carry-in room 21. After the inside of the carrying-in chamber 21 is evacuated, the inside of the carrying-in chamber 21 is connected to the inside of the film-forming chamber 22, and the front panel is moved into the film-forming chamber 22. An example of the structure of the film-forming chamber 22 is shown in FIG. Figure 3. The film forming chamber 2 2 has a vacuum chamber 7 1. A vapor source 7 3 is arranged on the bottom wall of the vacuum chamber 7 1, and a panel hoder 74 is arranged on the top plate side. A gas introduction system 78 is arranged outside the vacuum chamber 71. The size of the gas guide paper is applicable to the National Solid State Standard (CNS) A4 specification (210 X 297 mm) 469468 A7 j____B7 _ V. Description of the invention (7) Entry system 7 8 series according to gas cylinder 8 1 'and quality controller 8 3 The sequence connection 'is configured to fill the job! The oxygen in the body cylinder 81 is controlled by the mass controller 8 and the flow can be introduced into the vacuum chamber 71. ------------- Install --- (Please read the unintentional matter on the back before filling in this page) The evaporation source 7 3 is equipped with a deposition material made of Mg 0 8 6 'After the inside of the vacuum chamber 71 where the oxygen is introduced is stabilized at a predetermined pressure', the deposition material 86 is irradiated with an electron beam, and the vapor of the deposition material 86 is released in the vacuum chamber 71. Reference numeral 6 in FIG. 3 indicates that a front panel ′ disposed in the film forming chamber 22 is provided with a heater 76 on the rear surface thereof. When the heater 7 6 is energized to heat the front panel and the vapor 8 8 of the deposition material 8 6 is released from the evaporation source 7 3, the surface of the transparent dielectric layer 1 4 6 on the surface of the front panel 6 is grown by * -4 A protective film made of NgO as shown in 1 47 of 8 (f). When the protective film is formed to a predetermined film thickness, the film forming process is terminated, and the inside of the film forming chamber 22 and the alignment position chamber 11 are connected, and the front panel is moved into the alignment position chamber 11 1. Reference numeral 6 in FIG. 1 indicates a front panel carried in the alignment position chamber 11. According to this, although the Mg 0 film is formed by the deposition method here, ...... .....-· .. However, the present invention may not use it, but may also use sputtering (· > & quot ". spputtering) method, ion plating (ion plating) method, or CVD method. In parallel with the manufacturing method of the front panel 6 described above, a production line 30 is manufactured on the rear panel side to perform degassing treatment of the rear panel. : Here, if we explain the processing of the subsequent pull ’, first, the rear panel is moved into the degassing chamber 3 2 via: The interior of the degassing chamber 3 2 is: • A plurality of rear panels can be heated, and the plurality of rear panels can be sequentially heated. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 4 6 9 ^ 6 8 a?: _._ B7___ V. Description of the invention (8) The degassing process is performed. After the degassing process is completed, the panel is moved into the alignment position chamber 1 1. (Please read the precautions on the back before filling in this page) The environment in the degassing chamber 3 2 is evacuated until it reaches a predetermined pressure, and then the panel can be moved into the alignment position chamber 1 1. The alignment position chamber 11 has become a vacuum environment. Therefore, when the panel is transferred from the degassing chamber 3 2 to the alignment position chamber 11 after the degassing process is completed, the rear panel is not exposed to the atmosphere. The quasi-position chamber 11 does not intrude into the gas or atmosphere released from the rear panel. According to this, the degassing treatment by heating is taken as an example to explain, but the particle radiation (plasma) by plasma can also be used while heating. The symbol 7 in FIG. 1 indicates that the panel β has been moved into the alignment position chamber 11 and the alignment position chamber 11 has a vacuum tank 6 1 as shown in FIG. 4. On the wall, a mounting table 62 for a front panel is provided. A shaft 65 is provided on the bottom surface of the mounting table 62, and a lower end portion thereof is led out of the vacuum tank 61 through the expansion bag 66, and is connected to the motor 67. A holding table 63 for a rear panel is arranged on the top plate side of the vacuum chamber 61, and a substrate holding mechanism 64 is provided on the holding table 63. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Moved into the front panel 6 in the alignment room 11 and placed the MgO protective film on the mounting table 62. In addition, after being carried into the alignment position chamber 11, the panel 7 uses a substrate holding mechanism 64, and holds the film-forming surface on the holding stage 63. In its state, the front panel 6 and the rear panel 7 are parallel to each other, and the drive shaft 65 is actuated by the motor 67 to rotate the front panel 6 and the rear panel 7 relatively, and the alignment position becomes a predetermined position relationship. The size of the paper used in the fixture is temporarily applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm> = -th =-A7 4 6 9 ^ 68 B7____ V. Description of the invention (9)
I 時固定成不偏移。 <請先間讀背面之注意事項再填寫本頁) 在對準位置室1 1後方之裝配生產線4 0，係從對準 位置室1 1側依序以時效室4 1，與檢查室4 2，與封裝 室4 3之順序裝設。在對準位置室1 1內進行相對性對準 位置之前面板6與後面板7將搬入於時效室4 1內。 在時效室4 1，設有'未圖示之放電用電極，邊進行真 空排氣導入鈍性氣體，對於所搬入之前面板6與後面板7 施加電壓，在前面板6與後面板7間產生放電，由其放電 釋出前面板6表面或後面板7表面所吸附之氣體。 此工程係稱爲時效處理，結束時效處理之前面板6及 後面板7將被搬入於檢査室4 2內。 量 按，也可以在時效室4 1並設加熱裝置，在時效處理 前將前面板6及後面板7加熱至200〜500 °C，前面 板6表面與後面板7表面之吸附氣體藉進行脫氣進行時效 處理。 又，不進行由於放電之時效處理，也可以只進行由加 熱之時效處理。 經濟部智慧財產局員工消費合作社印製 將時效室4 1之一例表示於第5圖"此檢查室4 2係 具有；真空槽91，與電源93，94a，94b，與檢 查電極_95，96a，96b。檢查電極95，96a， 96b，係其一端爲配置於真空槽9 1內，他端爲氣密地 導出於真空槽9 1外。 電源93，94a，94b係配置於真空槽91外， 被導出於各檢查電極95，96a，96b之真空槽91 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐ί A7 469^6 8 _____B7______ 五、發明說明（1C)) 外之部分，係分別連接於電源93，94a ’ 94b ° (請先閱讀背面之注意事項再填寫本頁) 分別形成於被搬入於檢查室4 2內之前面板6與後面 板7上，對於表面露出之電極，抵接檢查電極9 5 ’ 9 6 a，9 6 b之先端部，在真空槽9 1內導入氬氣或氖氣’ 氙氣等鈍氣到既定壓力之後，起動電源9 3 ’ 9 4 a ’ 9 4 b對於前面板6與後面板7施加電壓。於是’在一組 面板6，7間產生電漿，若爲良品時，就沒有缺陷地發光 。按，第1圖，第5圖之符號5 6，係表示裝設於檢查室 4 2之氣體導入系，從此氣體導入系5 6導入鈍性氣體。 檢查其發光狀態，若是良品時，就搬入於封裝室4 3 內進行處理β若是不良品時，就不會進行在封裝室4 3內 ν>. 之處理^取出於大氣中，除去可再生或可使用之面板後將 其他加以廢棄。 經濟部智慧財產局員工消費合作社印製 屬於良品，搬入於封裝室4 3內之前面板6及後面板 7將進行裝封處理。此封裝處理，係將前面板6與後面扳 7間封入鈍性氣體之狀態下所進行之密封處理，在說明封 裝處理時之前面板6之周邊部分，預先設有密封層，密封 層密接於前面板6，邊將封裝室4 3內真空排氣，將加熱 配置有前面板6與後面板7之密封層部分，熔化密封層將 前面板6與後面板7暫時密封。於此狀態下在連接前面板 6與後面板7之部分，具有一部分貫通孔，留於一組面板 6，7間之殘留氣體，係隨著封裝室4 3之真空排氣，加 以排氣。 暫且密封後’當封裝室4 3內之真空環境回復到既定 -13- 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） A7 469 46 8 B7__ 五、發明說明（11 > 壓力時，在封裝室4 3內，導入氖氣，氙氣等放電用氣體 到既定壓力，將一組面板6，7間充滿放電用.氣體。並且 ，在充滿狀態下，堵塞貫通孔，當將其一組之面板6，7 間以氣密密封時，就可得到電漿顯示面板。按，第1圖之 符號5 7，係表示設於封裝室4 3之氣體導入系統。從此 氣體導入系統5 7放電用氣體將被導入於封裝室4 3內。 最後，將所製造之電漿顯示面板搬入於搬出室4 4， 阻斷與封裝室4 3之間後，若將大氣導入於搬出室4 4時 ，就可取出電漿顯示裝置。 如以上所說明，前面板6與後面板7，係分別搬入於 搬送搬室21，3 1之後，到從搬出室44取出爲止，因 一直在真空環境中受到處理，所以形成於前面板6表面之I is fixed so that it is not offset. < Please read the precautions on the back before filling in this page) The assembly line 4 0 behind the alignment position room 1 1 is from the alignment position room 1 1 side to the aging room 4 1 and the inspection room 4 in order. 2. Install in sequence with the packaging room 43. Relative alignment is performed in the alignment position chamber 11. The front panel 6 and the rear panel 7 are carried in the aging chamber 41. The aging chamber 41 is provided with a discharge electrode (not shown), and inert gas is introduced while performing vacuum evacuation. A voltage is applied to the front panel 6 and the rear panel 7 that are carried in, and generated between the front panel 6 and the rear panel 7. Discharge, which discharges the gas adsorbed on the surface of the front panel 6 or the surface of the rear panel 7. This process is called aging treatment, and the front panel 6 and the rear panel 7 will be moved into the inspection room 4 2 after the aging treatment. You can also install heating devices in the aging room 41 to heat the front panel 6 and the rear panel 7 to 200 ~ 500 ° C before aging treatment. The adsorbed gas on the surface of the front panel 6 and the surface of the rear panel 7 can be removed by aging. Gas for aging treatment. In addition, the aging treatment due to discharge may not be performed, and only the aging treatment by heating may be performed. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs has printed an example of the aging room 41 as shown in Figure 5 "This inspection room 4 2 has; a vacuum tank 91, a power source 93, 94a, 94b, and an inspection electrode _95, 96a, 96b. The inspection electrodes 95, 96a, and 96b are arranged at one end inside the vacuum tank 91 and the other ends are led out airtightly outside the vacuum tank 91. The power supplies 93, 94a, and 94b are arranged outside the vacuum tank 91, and are led out of the vacuum tanks 91 of the inspection electrodes 95, 96a, and 96b. This paper is sized to the Chinese National Standard (CNS) A4 (210 X 297 mm) A7 469 ^ 6 8 _____B7______ V. The description of the invention (1C)) is connected to the power supply 93, 94a '94b ° (please read the precautions on the back before filling this page) separately formed in the inspection room 4 2 On the inner front panel 6 and the rear panel 7, the exposed electrodes are in contact with the front ends of the inspection electrodes 9 5 '9 6 a and 9 6 b, and argon or neon is introduced into the vacuum chamber 9 1. After the gas reaches a predetermined pressure, the starting power supply 9 3 '9 4 a' 9 4 b applies a voltage to the front panel 6 and the rear panel 7. Therefore, a plasma is generated between a group of panels 6, 7, and if it is a good product, it will emit light without defects. The reference numerals 6 and 6 in Fig. 1 and Fig. 5 indicate a gas introduction system installed in the examination room 42, and from this gas introduction system 56, an inert gas is introduced. Check the light-emitting state. If it is a good product, it will be moved into the packaging chamber 4 3 for processing. Β If it is a defective product, it will not be processed in the packaging chamber 4 3 ν >. Take it out to the atmosphere, remove it for regeneration or Dispose of other panels after use. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is a good product, and the front panel 6 and rear panel 7 moved into the packaging room 4 3 will be packed. This packaging process is a sealing process performed in a state in which a blunt gas is sealed between the front panel 6 and the rear panel 7. When explaining the packaging process, a peripheral layer of the front panel 6 is provided with a sealing layer in advance, and the sealing layer is closely attached to the front In the panel 6, while the inside of the packaging chamber 43 is evacuated, the sealing layer portion of the front panel 6 and the rear panel 7 is heated, and the sealing layer is melted to temporarily seal the front panel 6 and the rear panel 7. In this state, the part connecting the front panel 6 and the rear panel 7 has a part of through holes, and the residual gas left between a group of panels 6 and 7 is exhausted in accordance with the vacuum exhaust of the packaging chamber 43. After being temporarily sealed, when the vacuum environment in the packaging chamber 4 3 returns to the established -13- This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) A7 469 46 8 B7__ V. Description of the invention (11 & gt When pressure is applied, discharge gas such as neon gas or xenon gas is introduced into the sealing chamber 4 3 to a predetermined pressure, and a group of panels 6 and 7 is filled with discharge gas. In addition, in the full state, the through holes are blocked. Plasma display panels can be obtained by hermetically sealing the panels 6 and 7 of one group. Pressing the symbol 5 7 in the first figure shows the gas introduction system installed in the packaging chamber 43. From this gas introduction The discharge gas of the system 57 will be introduced into the packaging chamber 43. Finally, the manufactured plasma display panel will be carried into the carry-out chamber 44, and the space between the plasma display panel and the packaging chamber 43 will be blocked. The plasma display device can be taken out at the time of the room 44. As explained above, the front panel 6 and the rear panel 7 are respectively moved into the transportation room 21, 31, and then removed from the transportation room 44 because It is processed in a vacuum environment, so it is formed on the front panel. It
Mg 0保護膜不至於暴露於大氣，所以，保護膜不會劣化 〇 又，前面板6與後面板7，係被脫氣，進行對準位置 後，不至於暴露大氣受到時效處理，所以由時效處理欲釋 出之吸附氣體少，可在短時間結束時效處理。 對於使用本發明方法所形成之電漿顯示裝置之時效時 間之放電開始電壓V f與放電維持電壓V S之測試。 茲將M g 0膜之蒸發條件表示於下表。 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） I ! t''裝— !!訂- Ilf--- 線" (請先閱讀背面之注意事項再填寫本頁) -14- 46 9 4-6 8 A7 B7 五、發明說明（12 ) 【表1】蒸發條件 蒸發物質 MgO 到達壓力 5.8 X 1 0'8torr 蒸發源-基板間距離， 500mm 蒸發源加熱法 電子光束加熱 澱積中壓力（⑴導入） ' 1.7 X 10'4torr 基板溫度 160 °C 澱積時間 6分46秒 基板膜厚 7000A 澱積速度 1 7.2 A/sec 又，將其電漿顯示裝置之電極構造，與放電電壓之測 試條件分別表示於下表2與表3。 【表2】電極之構造 鉛低熔點玻璃 45 ± 5 /z m ITO放電間隙 50 + 2 μ m kr ·Ε__L Tw 【表3】放電電壓測定條件 氣體 Ne-4%Xe 放電壓力 2 OOtorr 放電頻率 10kHz - - - „ V 裝--------，訂-------線厂----------------- I (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公s ) -15-The protective film of Mg 0 will not be exposed to the atmosphere, so the protective film will not be deteriorated. Also, the front panel 6 and the rear panel 7 are degassed. After the alignment position is performed, the exposed atmosphere will not be subjected to aging treatment. There is less adsorption gas to be released during treatment, and the aging treatment can be finished in a short time. The test of the discharge start voltage V f and the discharge sustain voltage V S of the aging time of the plasma display device formed by the method of the present invention. The evaporation conditions of the M g 0 film are shown in the following table. This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) I! T '' pack — !! order-Ilf --- line " (Please read the precautions on the back before filling this page) -14- 46 9 4-6 8 A7 B7 V. Description of the invention (12) [Table 1] Evaporation conditions Evaporation substance MgO reach pressure 5.8 X 1 0'8torr Evaporation source-substrate distance, 500mm Evaporation source heating method electron beam heating Pressure during deposition (⑴Introduction) '1.7 X 10'4torr Substrate temperature 160 ° C Deposition time 6 minutes 46 seconds Substrate film thickness 7000A Deposition speed 17.2 A / sec In addition, the electrode structure of its plasma display device, The test conditions and discharge voltage are shown in Table 2 and Table 3, respectively. [Table 2] Electrode structure Lead low melting point glass 45 ± 5 / zm ITO discharge gap 50 + 2 μm kr · E__L Tw [Table 3] Measurement conditions of discharge voltage Gas Ne-4% Xe Discharge pressure 2 OOtorr Discharge frequency 10kHz- --„V installation --------, order ------- line factory ----------------- I (Please read the precautions on the back first (Fill in this page again) The paper size is applicable to China National Standard (CNS) A4 (210 X 297 males) -15-
Ό 9 46 B Α7 Β7 I才 五、發明說明（13 ) 作爲比較例，將在上表1之蒸發條件所形成之M g 0 膜之前面板’暴露於大氣（濕度5. 4%) 3 0分鐘之後， 在真空環境中以3 5 0 t進行3小時加熱脫氣，測定了放 電開始電壓V f 與放電維持電壓Vs 。電極構造與測定條件，係如上表2 .，表3所示。按 ’此比較例之前面板，加熱脫氣開始時之壓力係8 X 10’5t 〇 r r，結束時之壓力係6 . 2xl0’6t 〇 r r 茲將測定結果表示於第6圖，第7圖。暴露於大氣之 比較例，係放電開始電壓V f，放電維持電壓V s都高，曉 得了本實施例爲較優異。又，直到電壓變成一定爲止之時 間’係比較例之情形時爲需要約1 0分鐘，與此相對，本 實施例之情形時爲約2分鐘，曉得了本實施例者較快。 按，於上述時效室41，加熱前面板6與後面板7進 行脫氣時，若併用電漿粒子幅射時，將一組面板6，7只 要升溫至室溫或1 0 0 °C左右即可，所以不需要冷卻時間 ，生產量更加提高而較佳。 茲說明本發明之其他實施形態如下。 參照第2圖，符號2係本發明之第二例之真空裝置， 具有；與第一例之真空裝置1相同構造相同配置之前面板 側製造生產線上2 0，後面板側製造生產線上3 0 ’對準 位置室11。 另一方面，此真空裝置2，係具有與第一例之真空裝 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -16 - I — l· ----I — Λ.,裝-----J1-訂·1'·!---線广w - 一 ί請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 4 69 46 8 A7 B7 五、發明說明（14 ) 置1不同之裝配生產線50。 其裝配生產線5 0，係具有搬送通路5 5，搬送通路 5 5之一端係連接於對準位置室1 1。 搬送通路5 5內部係被抽引成真空，邊維持對準位置 室1 1之真空環境，在對準位置室1 1將被對準位置之前 面板6及後面板7，暫且'固定之狀態下，構成爲可搬入於 搬送通路5 5內。 在與搬送通路5 5之對準位置室1 1相反側之先端， 設有取出室5 3，在搬送通路5 5之對準位置室1 1與取 出室53之間，設有複數之處理室511〜514。在各處 理室5 1 1〜5 1 4設有加熱裝置與氣體導入系統（未圖示 。），各處理室5 1 1〜5 1 4係構成爲相同構造。 欲進行對準位置後之處理時，將在對準位置室1 1被 對準位置之前面板6與後面板7，搬入於空處理室5 1 1 。在其處理室511內，邊進行真空排氣進行時效處理， 導入放電用之氣體，不加以移動進行發光檢查。 接著，停止放電用氣體之導入，在相同處理室5 1 1 內邊進行真空排氣封裝前面板6與後面板7。 ‘ 熔著後，處理室5 1 1內之真空環境直到回復到既定 之壓力時，在處理室5 1 1內，再次導入放電用氣體，面 板6，7間由其放電用氣體充滿之狀態下進行密封虞理時 ，就可得到電漿顯示裝置。 在上述處理室5 1 1內進行處理之時段，將在對準位 置室1 1內被對準位置之前面板6與後面板7，搬入於另 本紙張尺度適用中國國家標準（CNS>A4規格（210 X 297公釐〉-17 - --------------------- -------線，ί 一 (請先閱讀背面之注意事項再填寫本頁) A7 4 6 9 468 B7_ 五、發明說明（15 ) 外之處理室5 1 2〜5 1 4，如上述並行進行，時效，檢查 ，密封（氣體封入及密封處理）之各項處理。 結束在處理室5 1 2〜5 1 4內之處理，所製作之電漿 顯示裝置，係經由搬送通路5 5搬入於搬出室5 3內，阻 斷搬出室5 3與搬送通路5 5之間之後，在搬出室5 3導 入大氣，搬出電漿顯示裝啬。 ‘ 像這樣，於第二例之真空裝置，係需要花費長時間之 時效處理，因在各處理室5 1 1〜5 1 4並行進行，所以， 可連續處理多數之前面板6及後面板7» 如以上所說明，若使用本發明之真空裝置，保護膜（ MgO)就不至於劣化，又，時效處理也快，所以可將高 品質之電漿顯示面板以低成本製造。 按，於上述第一例，第二例之真空裝置，係發光檢査， 後，進行氣體封入，但是也可以在氣體封入後進行發光檢 查。又，也可以在對準位置室內，進行時效處理或發光檢 查。 【發明之效果】 可形成高品質之M g Ο膜。 可提高電漿顯示裝置製造之生產量。 圖式之簡單處理 第1圖係本發明之第一例之真空裝置。 第2圖係本發明之第二例之真空裝置。 ------------I, ' 裝--------^訂-L---,----線 L (請先閱讀背面之注意事項再填寫本頁> 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -18- 469 46 8 A7 B7 五、發明說明（16 ) 第3圖係可使用本發明之Mg 0膜成膜裝置之一例。 第4圖係可使用本發明之對準位置室之槪略構成圖。 第5圖係用來說明檢查室之圖。 第6圖係表示時效時間與放電開始電壓及放電維持電 壓之關係圖表。 第_ 7圖係表示時效時B與放電開始電壓及放電維持電 壓之關係圖表。 第\8 C a )〜（f )圖：說明前面板之製造工程之圖 〇 第\&.圖係用來說明電漿顯示面板之圖。 ----------------,"'裝 i (請先閱讀背面之注意事項本頁) 明 說 之 坛 號 符 -SJ_ 經濟部智慧財產局員工消費合作社印製 12 4 9 置 室 裝 置， 空’.’位室’ '真板板準膜室 *面面對成裝 ,前後· ·封 3 b 4 源 電 Ϊ% 本紙張尺度適用中画國家標準（CNS)A4規格（210 X 297公釐） -19-Ό 9 46 B Α7 Β7 I. Fifth, the description of the invention (13) As a comparative example, the front panel of the Mg 0 film formed under the evaporation conditions in Table 1 above was exposed to the atmosphere (humidity 5.4%) for 30 minutes. After that, it was degassed by heating at 350 ° C. for 3 hours in a vacuum environment, and the discharge start voltage V f and the discharge sustain voltage Vs were measured. The electrode structure and measurement conditions are shown in Table 2 and Table 3 above. According to the front panel of this comparative example, the pressure at the start of heating degassing is 8 X 10'5 t 0 r r, and the pressure at the end is 6. 2 x 10 '6 t 0 r r. The measurement results are shown in Fig. 6 and Fig. 7. In the comparative example exposed to the atmosphere, the discharge starting voltage V f and the discharge sustaining voltage V s are both high, and it is understood that this embodiment is superior. In addition, the time until the voltage becomes constant is about 10 minutes in the case of the comparative example, while it is about 2 minutes in the case of this embodiment, and the person who knows this embodiment is faster. Press, in the aging room 41, when heating the front panel 6 and the rear panel 7 for degassing, if the plasma particles are radiated together, the set of panels 6, 7 need only be heated to room temperature or about 100 ° C. Yes, so no cooling time is required, and the throughput is better. Other embodiments of the present invention are described below. Referring to FIG. 2, symbol 2 is a vacuum device of the second example of the present invention, which has the same structure and the same configuration as the vacuum device 1 of the first example and has a front panel production line 20 and a rear panel production line 3 0 ′ Alignment position chamber 11. On the other hand, this vacuum device 2 has the same size as the first example of the vacuum-loaded paper, which is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) -16-I — l · ---- I — Λ., Installed ----- J1-Order · 1 '·! --- Xian Guangw-Please read the notes on the back before filling out this page) Printed by the Intellectual Property Bureau Staff Consumer Cooperatives 4 69 46 8 A7 B7 V. Description of the invention (14) Set up a different assembly production line 50. The assembly production line 50 has a conveying path 55, and one end of the conveying path 55 is connected to the alignment position chamber 11. The inside of the conveying path 5 5 is drawn into a vacuum, while maintaining the vacuum environment of the alignment position chamber 1 1. In the alignment position chamber 11, the front panel 6 and the rear panel 7 will be aligned. Is configured to be carried in the transport path 55. A removal chamber 5 3 is provided at a leading end opposite to the alignment position chamber 11 of the transfer path 55, and a plurality of processing chambers are provided between the alignment position chamber 11 and the removal chamber 53 of the transfer path 55. 511 ~ 514. The processing chambers 5 1 1 to 5 1 4 are each provided with a heating device and a gas introduction system (not shown). Each of the processing chambers 5 1 1 to 5 1 4 has the same structure. When processing after the alignment position is desired, the front panel 6 and the rear panel 7 are brought into the empty processing chamber 5 1 1 before the alignment position chamber 11 is aligned. Inside the processing chamber 511, vacuum evacuating is performed for aging treatment, and a discharge gas is introduced, and the light emission inspection is performed without moving. Next, the introduction of the discharge gas is stopped, and the front panel 6 and the rear panel 7 are vacuum-evacuated inside the same processing chamber 5 1 1. '' After fusion, when the vacuum environment in the processing chamber 5 1 1 returns to a predetermined pressure, the discharge gas is introduced into the processing chamber 5 1 1 again, and the panels 6 and 7 are filled with the discharge gas. When sealing is performed, a plasma display device can be obtained. During the processing period in the above-mentioned processing chamber 5 1 1, the front panel 6 and the rear panel 7 will be aligned in the alignment position chamber 1 1, and will be moved to another paper standard applicable to the Chinese national standard (CNS > A4 specification ( 210 X 297 mm〉 -17---------------------- ------- line, ί one (Please read the precautions on the back before (Fill in this page) A7 4 6 9 468 B7_ V. Description of the invention (15) Out of the processing room 5 1 2 ~ 5 1 4, the above-mentioned parallel processing, aging, inspection, sealing (gas sealing and sealing processing) Finish the processing in the processing chambers 5 1 2 to 5 1 4. The produced plasma display device is carried into the transportation chamber 5 3 through the transportation path 5 5 and blocks the transportation chamber 5 3 and the transportation path 5 5 After that, the atmosphere is introduced into the removal chamber 53, and the plasma display device is removed. 'Like this, the vacuum device of the second example takes a long time to process, because each treatment chamber 5 1 1 ~ 5 1 4 is performed in parallel, so most of the front panel 6 and the rear panel 7 can be processed continuously »As explained above, if the vacuum device of the present invention is used, the protective film (MgO) No deterioration, and aging treatment is fast, so high-quality plasma display panels can be manufactured at low cost. According to the above-mentioned first and second examples, the vacuum device is light-emitting inspection, and then gas sealing However, it is also possible to perform a luminescence inspection after the gas is sealed. It is also possible to perform an aging treatment or a luminescence inspection in the alignment position room. [Effects of the invention] A high-quality Mg 〇 film can be formed. The plasma display device can be improved Production throughput. Simple processing of the drawings. Figure 1 shows the vacuum device of the first example of the present invention. Figure 2 shows the vacuum device of the second example of the present invention. ------------ I, 'Packing -------- ^ Order-L ---, ---- Line L (Please read the notes on the back before filling out this page> This paper size applies to Chinese National Standards (CNS) A4 specifications (210 X 297 mm) -18- 469 46 8 A7 B7 V. Description of the invention (16) Figure 3 shows an example of the Mg 0 film-forming device that can use the present invention. Figure 4 shows that the present invention can be used Figure 5 is a schematic diagram of the alignment position room. Figure 5 is a diagram for explaining the inspection room. Figure 6 is the aging time and the display. Diagram of the relationship between electric start voltage and discharge sustaining voltage. Figure _7 is a chart showing the relationship between aging time B and discharge starting voltage and discharge sustaining voltage. Figures \ 8 C a) ~ (f): Explain the manufacturing process of the front panel Figure 〇 The \ &. The picture is used to explain the plasma display panel. ----------------, " 'install i (Please read the precautions on the back first (This page) Ming altar symbol-SJ_ Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 12 4 9 Room installation device, empty '.' 位 室 '' True board quasi-membrane room * face to face, front and rear · · Seal 3 b 4% of power source This paper size is applicable to China Painting National Standard (CNS) A4 (210 X 297 mm) -19-