JP5720121B2 - Epoxy resin composition for sealing and electronic component device - Google Patents
Epoxy resin composition for sealing and electronic component device Download PDFInfo
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Description
本発明は、厳しい信頼性を要求される電子部品装置の封止用に特に好適な封止用エポキシ樹脂組成物、及びこの組成物で封止された素子を備えた電子部品装置に関する。 The present invention relates to an epoxy resin composition for sealing particularly suitable for sealing an electronic component device that requires strict reliability, and an electronic component device including an element sealed with this composition.
トランジスタ、ＩＣ、ＬＳＩ等の半導体素子は、主にエポキシ樹脂組成物を用いて封止され電子部品装置として使用される。また、電子部品装置の低コスト化、小型・軽量化、高性能・高機能化を図るために素子の高密度実装化、配線の微細化、多層化、多ピン化、素子のパッケージに対する占有面積増大化等が進んでいる。これに伴い、電子部品装置は、固形のエポキシ樹脂を用いたトランスファ成形によるＤＩＰ（デュアルインラインパッケージ）等の従来のピン挿入タイプからＰＰＧＡ（プラスチックピングリッドアレイ）、ＢＧＡ（ボールグリッドアレイ）、ＣＳＰ（チップサイズパッケージ）等の表面実装タイプのパッケージへ主流が移行しており、一部用途ではベアチップ実装も行われている。
この際用いられる封止材には液状のエポキシ樹脂組成物が多用されている。この種の液状エポキシ樹脂組成物は、通常、液状エポキシ樹脂と低粘度化に有利な酸無水物系硬化剤をベース樹脂として用い、さらに硬化促進剤、無機充填剤、カップリング剤、着色剤、レベリング剤等の各種添加剤を適宜配合した酸無水物系エポキシ樹脂組成物である。
Semiconductor elements such as transistors, ICs, and LSIs are mainly sealed with an epoxy resin composition and used as an electronic component device. Also, in order to reduce the cost, size, weight, performance, and functionality of electronic component devices, high-density mounting of devices, finer wiring, multiple layers, multiple pins, and the area occupied by the device package Increasing etc. are progressing. Along with this, electronic component devices have changed from conventional pin insertion types such as DIP (dual in-line package) by transfer molding using solid epoxy resin to PPGA (plastic pin grid array), BGA (ball grid array), CSP ( The mainstream has shifted to surface mount type packages such as chip size packages), and bare chip mounting is also performed in some applications.
A liquid epoxy resin composition is frequently used as the sealing material used at this time. This type of liquid epoxy resin composition usually uses a liquid epoxy resin and an acid anhydride-based curing agent advantageous for lowering viscosity as a base resin, and further includes a curing accelerator, an inorganic filler, a coupling agent, a colorant, An acid anhydride epoxy resin composition appropriately blended with various additives such as a leveling agent.
しかしながら、上記酸無水物系エポキシ樹脂組成物は、ＰＣＴ（プレッシャークッカー：１２１℃、０．２ＭＰａ、１００％ＲＨ）試験等の耐湿試験において有機基材、無機基材との接着力が急激に低下しやすい。そのため、樹脂／半導体チップ／有機基材との熱膨張係数の違いによって発生する熱ストレスによって、界面剥離を生じやすい。このため、上記酸無水物系エポキシ樹脂組成物を用いて封止された電子部品装置は、耐湿信頼性や耐熱衝撃性に乏しいという欠点を有する。
本発明は、このような事情に鑑みなされたもので、耐湿接着力、低応力性に優れた封止用エポキシ樹脂組成物、及びこれにより封止された素子を備えた信頼性（耐湿性、耐熱衝撃性）の高い電子部品装置を提供することを目的とする。
However, the above-mentioned acid anhydride epoxy resin composition has a sharp decrease in adhesive strength with organic and inorganic substrates in a moisture resistance test such as a PCT (pressure cooker: 121 ° C., 0.2 MPa, 100% RH) test. It's easy to do. Therefore, interfacial delamination is likely to occur due to thermal stress generated by the difference in thermal expansion coefficient between resin / semiconductor chip / organic substrate. For this reason, the electronic component apparatus sealed using the said acid anhydride type epoxy resin composition has the fault that moisture resistance reliability and thermal shock resistance are scarce.
The present invention has been made in view of such circumstances, and is provided with an epoxy resin composition for sealing excellent in moisture-resistant adhesive strength and low stress properties, and reliability (moisture resistance, An object is to provide an electronic component device having high thermal shock resistance.
本発明者らは上記の課題を解決するために鋭意検討を重ね、耐湿接着性、低応力性に優れたエポキシ樹脂組成物を得るために各種硬化剤、各種低応力化剤について検討した結果、硬化剤としては液状芳香族アミンを含む硬化剤を用いると各種基材との耐湿接着力が向上して耐湿信頼性に優れ、低応力剤としては液状可とう化剤よりもゴム粒子（固形）を用いた場合に耐熱性の低下が少なく低応力効果に優れ、液状芳香族アミンを含む硬化剤とゴム粒子を配合した封止用液状エポキシ樹脂組成物により上記の目的を達成しうることを見い出し、本発明を完成するに至った。また、ゴム粒子としてアクリルゴムからなるゴム粒子、好ましくはコアシェル型アクリルゴムからなるゴム粒子を用いることにより、さらに高い耐湿性改善効果が得られることを見い出した。 As a result of studying various curing agents and various low-stressing agents in order to obtain an epoxy resin composition excellent in moisture-resistant adhesiveness and low-stress properties, the present inventors repeated extensive studies to solve the above problems, When a curing agent containing a liquid aromatic amine is used as the curing agent, the moisture resistance adhesion to various substrates is improved and the moisture resistance reliability is excellent. As a low stress agent, rubber particles (solid) than the liquid flexible agent. It is found that the above-mentioned object can be achieved by a liquid epoxy resin composition for sealing containing a curing agent containing a liquid aromatic amine and rubber particles, which has a low heat resistance and excellent low-stress effect. The present invention has been completed. Further, it has been found that by using rubber particles made of acrylic rubber as rubber particles, preferably rubber particles made of core-shell type acrylic rubber, a higher effect of improving moisture resistance can be obtained.
すなわち、本発明は、
（１）下記の（Ａ）〜（Ｄ）成分を含有してなる封止用エポキシ樹脂組成物：（Ａ）液状エポキシ樹脂、（Ｂ）液状芳香族アミンを含む硬化剤、（Ｃ）ゴム粒子、（Ｄ）無機充填剤、
（２）（Ｃ）成分のゴム粒子がアクリルゴムからなる上記（１）記載の封止用エポキシ樹脂組成物、
（３）アクリルゴムからなるゴム粒子がコアシェル型アクリルゴム粒子である上記（２）記載の封止用エポキシ樹脂組成物、及び
（４）コアシェル型アクリルゴム粒子が、ガラス転移温度が−８０〜０℃のゴム状ポリマからなるコア部と、ガラス転移温度が５０〜１５０℃のガラス状ポリマからなるシェル部とを備える上記（３）記載の封止用エポキシ樹脂組成物、
（５）（Ｂ）成分に含まれる液状芳香族アミンが３，３’−ジエチル−４，４’−ジアミノジフェニルメタン及び／又はジエチルトルエンジアミンである上記（１）〜（４）のいずれかに記載の封止用エポキシ樹脂組成物、並びに
（６）上記（１）〜（５）のいずれかに記載の封止用エポキシ樹脂組成物により封止された素子を備えた電子部品装置に関する。
That is, the present invention
(1) Sealing epoxy resin composition containing the following components (A) to (D): (A) liquid epoxy resin, (B) curing agent containing liquid aromatic amine, (C) rubber particles , (D) inorganic filler,
(2) The epoxy resin composition for sealing according to the above (1), wherein the rubber particles of the component (C) are made of acrylic rubber,
(3) The sealing epoxy resin composition according to (2) above, wherein the rubber particles made of acrylic rubber are core-shell type acrylic rubber particles, and (4) the glass-transition temperature of the core-shell type acrylic rubber particles is -80 to 0. The epoxy resin composition for sealing according to the above (3), comprising a core part made of a rubbery polymer at ° C and a shell part made of a glassy polymer having a glass transition temperature of 50 to 150 ° C,
(5) The liquid aromatic amine contained in the component (B) is 3,3′-diethyl-4,4′-diaminodiphenylmethane and / or diethyltoluenediamine, according to any one of the above (1) to (4) And (6) an electronic component device including an element sealed with the sealing epoxy resin composition according to any one of (1) to (5).
本発明に係る封止用エポキシ樹脂組成物は、吸湿後においても各種基材との接着力が高く、この封止用エポキシ樹脂組成物を用いて素子を封止すれば耐湿信頼性及び耐熱衝撃性に優れる電子部品装置を得ることができるので、その工業的価値は大である。 The epoxy resin composition for sealing according to the present invention has high adhesive strength with various substrates even after moisture absorption. If the element is sealed using this epoxy resin composition for sealing, moisture resistance reliability and thermal shock are provided. Since an electronic component device having excellent properties can be obtained, its industrial value is great.
本発明で用いる（Ａ）成分の液状エポキシ樹脂としては、一分子中に１個以上のエポキシ基を有するもので常温で液状であれば制限はなく、封止用エポキシ樹脂組成物で一般に使用されている液状エポキシ樹脂を用いることができる。また、本発明の封止用エポキシ樹脂組成物には、本発明の効果が達成される範囲内であれば固形エポキシ樹脂を併用することもできるが、併用する固形エポキシ樹脂はエポキシ樹脂全量に対して２０重量％以下とすることが好ましい。
本発明で使用できるエポキシ樹脂としては、例えば、ビスフェノールＡ、ビスフェノールＦ、ビスフェノールＡＤ、ビスフェノールＳ、水添ビスフェノールＡ等のジグリシジルエーテル型エポキシ樹脂、オルソクレゾールノボラック型エポキシ樹脂を代表とするフェノール類とアルデヒド類のノボラック樹脂をエポキシ化したもの、フタル酸、ダイマー酸等の多塩基酸とエピクロルヒドリンの反応により得られるグリシジルエステル型エポキシ樹脂、ジアミノジフェニルメタン、イソシアヌル酸等のポリアミンとエピクロルヒドリンの反応により得られるグリシジルアミン型エポキシ樹脂、オレフィン結合を過酢酸等の過酸により酸化して得られる線状脂肪族エポキシ樹脂、脂環族エポキシ樹脂などが挙げられ、これらを単独で用いても２種以上を組み合わせて用いてもよい。
これらのエポキシ樹脂は十分に精製されたもので、イオン性不純物はできるだけ少ないものが好ましく、例えば、遊離のＮａ+、Ｃｌ-等のイオン性不純物は５００ｐｐｍであることが好ましい。
The liquid epoxy resin of component (A) used in the present invention is not limited as long as it has one or more epoxy groups in one molecule and is liquid at room temperature, and is generally used in epoxy resin compositions for sealing. A liquid epoxy resin can be used. In addition, the epoxy resin composition for sealing of the present invention can be used in combination with a solid epoxy resin as long as the effects of the present invention are achieved, but the solid epoxy resin used in combination is based on the total amount of the epoxy resin. And preferably 20% by weight or less.
Examples of epoxy resins that can be used in the present invention include diglycidyl ether type epoxy resins such as bisphenol A, bisphenol F, bisphenol AD, bisphenol S, hydrogenated bisphenol A, and phenols typified by orthocresol novolac type epoxy resins. Epoxylated aldehyde novolak resin, glycidyl ester epoxy resin obtained by reaction of polybasic acid such as phthalic acid and dimer acid and epichlorohydrin, glycidyl obtained by reaction of polyamine such as diaminodiphenylmethane, isocyanuric acid and epichlorohydrin Examples include amine-type epoxy resins, linear aliphatic epoxy resins obtained by oxidizing olefinic bonds with peracids such as peracetic acid, alicyclic epoxy resins, and the like. It may be used in combination on.
These epoxy resins has been substantially purified, ionic impurities are preferably those as small as possible, for example, the free Na +, Cl - ionic impurities such as is preferably 500 ppm.
本発明に用いられる（Ｂ）成分の液状芳香族アミンを含む硬化剤は、常温で液状の芳香環を有するアミンを含むものであれば特に制限はなく、例えば、市販品として、エピキュア−Ｗ、エピキュア−Ｚ（油化シェルエポキシ株式会社製商品名）、カヤハードＡ−Ａ、カヤハードＡ−Ｂ、カヤハードＡ−Ｓ（日本化薬株式会社製商品名）、トートアミンＨＭ−２０５（東都化成株式会社製商品名）、アデカハードナーＥＨ−１０１（旭電化工業株式会社製商品名）、エポミックＱ−６４０、エポミックＱ−６４３（三井化学株式会社製商品名）、ＤＥＴＤＡ８０（Ｌｏｎｚａ社製商品名）等が入手可能で、これらは単独で用いても２種類以上を組み合わせて用いてもよい。
硬化剤に含まれる液状芳香族アミンとしては、保存安定性の観点からは、３，３’−ジエチル−４，４’−ジアミノジフェニルメタン及びジエチルトルエンジアミンが好ましく、硬化剤はこれらのいずれか又はこれらの混合物を主成分とすることが好ましい。ジエチルトルエンジアミンとしては、３，５−ジエチルトルエン−２，４−ジアミン及び３，５−ジエチルトルエン−２，６−ジアミンが挙げられ、これらを単独で用いても混合物を用いてもよいが、３，５−ジエチルトルエン−２，４−ジアミンを６０重量％以上含むものが好ましい。
The curing agent containing the liquid aromatic amine as the component (B) used in the present invention is not particularly limited as long as it contains an amine having a liquid aromatic ring at room temperature. For example, as a commercial product, EpiCure-W, EpiCure-Z (trade name, manufactured by Yuka Shell Epoxy Co., Ltd.), Kayahard A-A, Kayahard AB, Kayahard AS (trade name, manufactured by Nippon Kayaku Co., Ltd.), Totoamine HM-205 (Toto Kasei Co., Ltd.) Product name), Adeka Hardener EH-101 (Asahi Denka Kogyo Co., Ltd. product name), Epomic Q-640, Epomic Q-643 (Mitsui Chemicals Co., Ltd. product name), DETDA80 (Lonza product name), etc. These are available, and these may be used alone or in combination of two or more.
As the liquid aromatic amine contained in the curing agent, 3,3′-diethyl-4,4′-diaminodiphenylmethane and diethyltoluenediamine are preferable from the viewpoint of storage stability, and the curing agent is any one of these or these It is preferable to use a mixture of Examples of diethyltoluenediamine include 3,5-diethyltoluene-2,4-diamine and 3,5-diethyltoluene-2,6-diamine, and these may be used alone or as a mixture. Those containing 60% by weight or more of 3,5-diethyltoluene-2,4-diamine are preferred.
また、本発明の封止用エポキシ樹脂組成物には、本発明の効果が達成される範囲内であれば（Ｂ）成分の液状芳香族アミンを含む硬化剤以外に、フェノール性硬化剤、酸無水物等の封止用エポキシ樹脂組成物で一般に使用されている硬化剤を併用することができ、固形硬化剤も併用することもできる。他の硬化剤を併用する場合、（Ｂ）成分の液状芳香族アミンを含む硬化剤の配合量は、その性能を発揮するために硬化剤全量に対して６０重量％以上とすることが好ましい。 In addition, the epoxy resin composition for sealing of the present invention includes a phenolic curing agent, an acid in addition to the curing agent containing the liquid aromatic amine as the component (B) as long as the effect of the present invention is achieved. A curing agent generally used in an epoxy resin composition for sealing such as an anhydride can be used in combination, and a solid curing agent can also be used in combination. When another curing agent is used in combination, the blending amount of the curing agent containing the liquid aromatic amine as the component (B) is preferably 60% by weight or more based on the total amount of the curing agent in order to exhibit its performance.
（Ａ）成分を含むエポキシ樹脂と（Ｂ）成分を含む硬化剤との当量比は特に制限はないが、それぞれの未反応分を少なく抑えるために、エポキシ樹脂に対して硬化剤を０．７〜１．６当量の範囲に設定することが好ましく、０．８〜１．４当量がより好ましく、０．９〜１．２当量がさらに好ましい。 The equivalent ratio of the epoxy resin containing the component (A) and the curing agent containing the component (B) is not particularly limited, but in order to suppress each unreacted component to a small amount, It is preferable to set in the range of -1.6 equivalent, 0.8-1.4 equivalent is more preferable, 0.9-1.2 equivalent is further more preferable.
本発明の（Ｃ）成分のゴム粒子としては、特に制限はないが、耐湿接着力及び耐湿信頼性向上の観点からはアクリル系重合体、すなわちアクリルゴムからなるゴム粒子が好ましく、コアシェル型アクリル系重合体、すなわちコアシェル型アクリルゴム粒子がより好ましい。
コアシェル型アクリルゴム粒子は、ガラス転移温度が−８０〜０℃のゴム状ポリマからなるコア部と、ガラス転移温度が５０〜１５０℃のガラス状ポリマからなるシェル部とを備えることが、接着力向上および低応力効果の観点で好ましく、シェル部を形成するポリマに一部カルボキシル基、水酸基、エポキシ基等の官能基が含まれるとエポキシ樹脂組成物との相溶性・分散性が一層向上するためより好ましい。
The rubber particles of the component (C) of the present invention are not particularly limited, but acrylic polymers, that is, rubber particles made of acrylic rubber are preferable from the viewpoint of improving moisture resistance and moisture resistance reliability. A polymer, that is, a core-shell type acrylic rubber particle is more preferable.
The core-shell type acrylic rubber particles have an adhesive strength that includes a core part made of a rubbery polymer having a glass transition temperature of −80 to 0 ° C. and a shell part made of a glassy polymer having a glass transition temperature of 50 to 150 ° C. In view of improvement and low stress effect, compatibility and dispersibility with the epoxy resin composition are further improved if the polymer forming the shell part partially contains functional groups such as carboxyl group, hydroxyl group and epoxy group. More preferred.
ゴム粒子の平均粒径としては、特に制限はないが、０．０１〜２０μｍの範囲が好ましく、より好ましくは０．１〜１０μｍの範囲である。平均粒径が０．０１μｍ未満では液状エポキシ樹脂組成物への分散性に劣る傾向があり、２０μｍを超えると低応力化改善効果が低くなる傾向や、液状封止材としての微細間隙への浸透性・流動性が低下しボイド、未充填を招きやすくなる傾向がある。 Although there is no restriction | limiting in particular as an average particle diameter of a rubber particle, The range of 0.01-20 micrometers is preferable, More preferably, it is the range of 0.1-10 micrometers. If the average particle size is less than 0.01 μm, the dispersibility in the liquid epoxy resin composition tends to be inferior, and if it exceeds 20 μm, the effect of reducing stress reduction tends to be low, and the penetration into the fine gaps as a liquid sealing material Tends to cause voids and unfilling.
ゴム粒子の配合量は、封止用エポキシ樹脂組成物全体の１〜３０重量％の範囲に設定されるのが好ましく、より好ましくは２〜２５重量％、さらに好ましくは３〜２０重量％である。ゴム粒子の配合量が１重量％未満では低応力効果が低くなる傾向があり、３０重量％を超えると液状封止材の粘度が上昇し成形性（流動特性）に劣る傾向がある。これらのゴム粒子としては、例えば、武田薬品工業株式会社、日本ゼオン株式会社等から市販品が入手可能である。 The blending amount of the rubber particles is preferably set in the range of 1 to 30% by weight of the entire epoxy resin composition for sealing, more preferably 2 to 25% by weight, and further preferably 3 to 20% by weight. . If the blending amount of the rubber particles is less than 1% by weight, the low stress effect tends to be low, and if it exceeds 30% by weight, the viscosity of the liquid sealing material tends to increase and the moldability (flow characteristics) tends to be poor. As these rubber particles, for example, commercially available products are available from Takeda Pharmaceutical Company Limited, Nippon Zeon Co., Ltd.
上記（Ａ）〜（Ｃ）成分と共に用いられる（Ｄ）成分の無機充填剤としては、例えば、溶融シリカ、結晶シリカ等のシリカ、炭酸カルシウム、クレー、酸化アルミナ等のアルミナ、窒化珪素、炭化珪素、窒化ホウ素、珪酸カルシウム、チタン酸カリウム、窒化アルミ、ベリリア、ジルコニア、ジルコン、フォステライト、ステアタイト、スピネル、ムライト、チタニア等の粉体、又はこれらを球形化したビーズ、ガラス繊維などが挙げられる。さらに、難燃効果のある無機充填剤としては水酸化アルミニウム、水酸化マグネシウム、硼酸亜鉛、モリブデン酸亜鉛等が挙げられる。これらの無機充填剤は単独で用いても２種類以上を組み合わせて用いてもよい。なかでもシリカが好ましく、液状封止材の微細間隙への流動性・浸透性の観点からは球形シリカがより好ましい。 Examples of the inorganic filler of the component (D) used together with the components (A) to (C) include silica such as fused silica and crystalline silica, alumina such as calcium carbonate, clay and alumina oxide, silicon nitride and silicon carbide. , Boron nitride, calcium silicate, potassium titanate, aluminum nitride, beryllia, zirconia, zircon, fosterite, steatite, spinel, mullite, titania, etc., or spherical beads of these, glass fibers, etc. . Furthermore, examples of the inorganic filler having a flame retardant effect include aluminum hydroxide, magnesium hydroxide, zinc borate, and zinc molybdate. These inorganic fillers may be used alone or in combination of two or more. Of these, silica is preferred, and spherical silica is more preferred from the viewpoint of fluidity and permeability into the fine gaps of the liquid sealing material.
無機充填剤の平均粒径は、特に球形シリカの場合、１〜２０μｍの範囲が好ましく、平均粒径２〜１０μｍの範囲がより好ましい。平均粒径が１μｍ未満では液状樹脂への分散性に劣る傾向や液状封止材にチキソトロピック性が付与されて流動特性に劣る傾向があり、２０μｍを超えるとフィラ沈降を起こしやすくなる傾向や、液状封止材としての微細間隙への浸透性・流動性が低下してボイド・未充填を招きやすくなる傾向がある。 The average particle diameter of the inorganic filler is preferably in the range of 1 to 20 μm, more preferably in the range of 2 to 10 μm, particularly in the case of spherical silica. If the average particle size is less than 1 μm, the dispersibility in the liquid resin tends to be inferior, and the liquid sealing material tends to have thixotropic properties and inferior flow characteristics, and if it exceeds 20 μm, the tendency to cause filler sedimentation, There is a tendency that the permeability / fluidity to the fine gaps as the liquid sealing material is lowered and voids / unfilled are easily caused.
無機充填剤の配合量は、封止用エポキシ樹脂組成物全体の２０〜９０重量％の範囲に設定されるのが好ましく、より好ましくは２５〜８０重量％、さらに好ましくは３０〜６０重量％である。配合量が２０重量％未満では熱膨張係数の低減効果が低くなる傾向があり、９０重量％を超えると封止用エポキシ樹脂組成物の粘度が上昇し、流動性・浸透性およびディスペンス性の低下を招く傾向がある。 The blending amount of the inorganic filler is preferably set in the range of 20 to 90% by weight of the entire epoxy resin composition for sealing, more preferably 25 to 80% by weight, still more preferably 30 to 60% by weight. is there. If the blending amount is less than 20% by weight, the effect of reducing the thermal expansion coefficient tends to be low. If the blending amount exceeds 90% by weight, the viscosity of the epoxy resin composition for sealing increases, and the fluidity / penetration and dispensing properties decrease. Tend to invite.
なお、本発明の封止用エポキシ樹脂組成物には、上記（Ａ）〜（Ｄ）成分以外に、必要に応じて他の添加剤を適宜配合することができる。前記の添加剤としてはカップリング剤、難燃剤、イオントラップ剤、触媒、希釈剤、着色剤、レベリング剤、消泡剤、溶剤等が挙げられる。
カップリング剤としては特に制限はなく、従来公知のものを用いることができるが、例えば、エポキシ基含有シラン、アミノ基含有シラン、メルカプト基含有シラン、ウレイド基含有シラン等のシラン系カップリング剤、有機チタネート等のチタン系カップリング剤、アルミニウムアルコレート等のアルミニウムキレート類、アルミニウム／ジルコニウム系カップリング剤などが挙げられ、これらを単独で用いても２種以上を組み合わせて用いてもよい。
In addition to the said (A)-(D) component, another additive can be suitably mix | blended with the epoxy resin composition for sealing of this invention as needed. Examples of the additive include a coupling agent, a flame retardant, an ion trap agent, a catalyst, a diluent, a colorant, a leveling agent, an antifoaming agent, and a solvent.
The coupling agent is not particularly limited, and conventionally known ones can be used. For example, silane coupling agents such as epoxy group-containing silane, amino group-containing silane, mercapto group-containing silane, ureido group-containing silane, Examples include titanium coupling agents such as organic titanates, aluminum chelates such as aluminum alcoholate, and aluminum / zirconium coupling agents. These may be used alone or in combination of two or more.
難燃剤としては特に制限はなく、従来公知のものを用いることができるが、例えば、ブロム化エポキシ樹脂、三酸化アンチモン、四酸化アンチモン、五酸化アンチモン等の酸化アンチモン、赤燐、リン酸エステル、メラミン、メラミン誘導体、トリアジン環を有する化合物、シクロホスファゼン等の燐窒素含有化合物等のリン窒素系化合物、金属水酸化物、酸化亜鉛、酸化鉄、酸化モリブデン、フェロセン等の金属化合物などが挙げられ、これらを単独で用いても２種以上を組み合わせて用いてもよい。 There are no particular limitations on the flame retardant, and conventionally known ones can be used. For example, brominated epoxy resins, antimony trioxide, antimony tetroxide, antimony pentoxide and other antimony oxides, red phosphorus, phosphate esters, Examples include melamine, melamine derivatives, compounds having a triazine ring, phosphorus nitrogen-based compounds such as phosphorus nitrogen-containing compounds such as cyclophosphazene, metal hydroxides, zinc oxide, iron oxide, molybdenum oxide, metal compounds such as ferrocene, and the like. These may be used alone or in combination of two or more.
イオントラップ剤としては特に制限はなく、従来公知のものを用いることができるが、例えば、ハイドロタルサイト類、ビスマス、アンチモン、ジルコニウム、チタン、スズ、マグネシウム、アルミニウム等の元素の含水酸化物などが挙げられ、中でも、ハイドロタルサイト類及びビスマスの含水酸化物が好ましい。これらのイオントラップ剤は単独で用いても２種以上を組み合わせて用いてもよい。 There are no particular limitations on the ion trapping agent, and conventionally known ones can be used. Examples include hydrotalcites, hydrated oxides of elements such as bismuth, antimony, zirconium, titanium, tin, magnesium, and aluminum. Among them, hydrotalcites and hydrated oxides of bismuth are preferable. These ion trapping agents may be used alone or in combination of two or more.
触媒としては硬化促進効果があれば特に制限はなく、従来公知のものを用いることができるが、例えば、シクロアミジン化合物、３級アミン類、イミダゾール類、有機ホスフィン類、リン化合物、テトラフェニルボロン塩及びこれらの誘導体などが挙げられ、これらを単独で用いても２種以上を組み合わせて用いてもよい。 The catalyst is not particularly limited as long as it has a curing accelerating effect, and a conventionally known catalyst can be used. For example, cycloamidine compounds, tertiary amines, imidazoles, organic phosphines, phosphorus compounds, tetraphenyl boron salts And derivatives thereof. These may be used alone or in combination of two or more.
本発明の封止用エポキシ樹脂組成物は、上記の各種成分を均一に分散混合できるのであれば、いかなる手法を用いても調製できるが、通常、各成分、添加剤等を三本ロール、擂潰機等を使って分散混練することによって製造される。 The epoxy resin composition for sealing of the present invention can be prepared by any method as long as the above-mentioned various components can be uniformly dispersed and mixed. Usually, each component, additive, etc. It is manufactured by dispersing and kneading using a crusher or the like.
本発明で得られる封止用エポキシ樹脂組成物により素子を封止して得られる電子部品装置としては、リードフレーム、配線済みのテープキャリア、配線板、ガラス、シリコンウエハ等の支持部材に、半導体チップ、トランジスタ、ダイオード、サイリスタ等の能動素子、コンデンサ、抵抗体、抵抗アレイ、コイル、スイッチ等の受動素子などの素子を搭載し、必要な部分を本発明の封止用エポキシ樹脂組成物で封止して得られる電子部品装置などが挙げられる。 As an electronic component device obtained by sealing an element with the sealing epoxy resin composition obtained in the present invention, a lead frame, a wired tape carrier, a wiring board, glass, a silicon wafer, a support member such as a semiconductor Active elements such as chips, transistors, diodes, and thyristors, and passive elements such as capacitors, resistors, resistor arrays, coils, and switches are mounted, and necessary portions are sealed with the sealing epoxy resin composition of the present invention. An electronic component device obtained by stopping the operation can be used.
このような電子部品装置としては、例えば、リードフレーム上に半導体素子を固定し、ボンディングパッド等の素子の端子部とリード部をワイヤボンディングやバンプで接続した後、本発明の封止用エポキシ樹脂組成物を用いてディスペンス方式等により封止してなる、ＰＬＣＣ（Plastic Leaded Chip Carrier）、ＱＦＰ（Quad Flat Package）、ＳＯＰ（Small Outline Package）、ＳＯＪ（Small Outline J-leaded package）、ＴＳＯＰ（Thin Small Outline Package）、ＴＱＦＰ（Thin Quad Flat Package）等の一般的な樹脂封止型ＩＣ、テープキャリアにバンプで接続した半導体チップを、本発明の封止用エポキシ樹脂組成物で封止したＴＣＰ（Tape Carrier Package）、配線板やガラス上に形成した配線に、ワイヤーボンディング、フリップチップボンディング、はんだ等で接続した半導体チップ、トランジスタ、ダイオード、サイリスタ等の能動素子及び／又はコンデンサ、抵抗体、コイル等の受動素子を、本発明の封止用エポキシ樹脂組成物で封止したＣＯＢ（Chip On Board）モジュール、ハイブリッドＩＣ、マルチチップモジュール、裏面に配線板接続用の端子を形成した有機基板の表面に素子を搭載し、バンプまたはワイヤボンディングにより素子と有機基板に形成された配線を接続した後、本発明の封止用エポキシ樹脂組成物で素子を封止したＢＧＡ（Ball Grid Array）、ＣＳＰ（Chip Size Package）などが挙げられる。また、プリント回路板にも本発明の封止用エポキシ樹脂組成物は有効に使用できる。 As such an electronic component device, for example, a semiconductor element is fixed on a lead frame, and a terminal portion and a lead portion of an element such as a bonding pad are connected by wire bonding or bump, and then the epoxy resin for sealing of the present invention is used. The composition is sealed by a dispensing method or the like, PLCC (Plastic Leaded Chip Carrier), QFP (Quad Flat Package), SOP (Small Outline Package), SOJ (Small Outline J-leaded package), TSOP (Thin Small outline package (TFP), general resin-encapsulated ICs such as TQFP (thin quad flat package), and semiconductor chips that are connected to a tape carrier by bumps are encapsulated with the sealing epoxy resin composition of the present invention (TCP Tape Carrier Package), a semiconductor chip connected to wiring formed on a wiring board or glass by wire bonding, flip chip bonding, solder, etc. COB (Chip On Board) module, hybrid in which active elements such as a capacitor, transistor, diode, thyristor and / or passive elements such as a capacitor, a resistor, and a coil are sealed with the sealing epoxy resin composition of the present invention An element is mounted on the surface of an IC, a multichip module, and an organic substrate on which a wiring board connection terminal is formed on the back surface, and the element and the wiring formed on the organic substrate are connected by bump or wire bonding. Examples thereof include BGA (Ball Grid Array) and CSP (Chip Size Package) in which the element is sealed with an epoxy resin composition for fixing. Moreover, the epoxy resin composition for sealing of the present invention can also be used effectively for printed circuit boards.
本発明の封止用エポキシ樹脂組成物を用いて素子を封止する方法としては、ディスペンス方式、注型方式、印刷方式等が挙げられる。 Examples of a method for sealing an element using the sealing epoxy resin composition of the present invention include a dispensing method, a casting method, a printing method, and the like.
次に実施例により本発明をさらに具体的に説明するが、本発明はこれらの実施例に限定されるものではない。実施例および比較例において行った特性試験の試験方法を以下にまとめて示す。なお、パッケージおよび試験片は、封止用エポキシ樹脂組成物を１５０℃、３時間の加熱条件でディスペンス方式により成形して作製した。
（１）粘度
封止用エポキシ樹脂組成物の２５℃の粘度をＥ型粘度計（回転数５ｒｐｍ）を用いて測定した。
（２）耐湿接着力
３０μｍ厚のアルミ箔又は７５μｍ厚のポリイミドフィルムの片面上に成形した試験片を作製し、オートグラフＡＧＳ−５００Ａ型（株式会社島津製作所製商品名）を用いて、ヘッドスピード３０ｍｍ／分の条件で、１０ｍｍ幅のアルミ箔又はポリイミドフィルムを垂直方向に引き剥がし、その強度（ピール強さ：Ｎ／ｍ）を測定した。この測定は、試験片成形直後、及び１２１℃、０．２ＭＰａ、１００％ＲＨのＰＣＴ条件で７２ｈ、１６８ｈ、２４０ｈ処理後に行った。
（３）耐湿信頼性
封止用エポキシ樹脂組成物で封止されたＴＥＧチップを搭載した評価用ＢＧＡパッケージ（基板はポリイミド）を、１２１℃、０．２ＭＰａ、１００％ＲＨのＰＣＴ条件で２４０ｈ処理後、超音波探傷装置ＡＴ５５００（日立建機株式会社製商品名）を用いて封止用エポキシ樹脂組成物とチップ及びポリイミドフィルムとの剥離の有無を確認した。また、アルミパッドの腐食の有無を赤外線顕微鏡により確認し、不良パッケージ数／測定パッケージ数で評価した。
（４）耐熱衝撃性
封止用エポキシ樹脂組成物で封止されたＴＥＧチップを搭載した評価用ＢＧＡパッケージを、−５０℃／１５０℃、各３０分のヒートサイクルで１０００サイクルで処理し、アルミ配線の断線不良を調べ、不良パッケージ数／測定パッケージ数で評価した。
EXAMPLES Next, although an Example demonstrates this invention further more concretely, this invention is not limited to these Examples. The test methods of the characteristic tests performed in the examples and comparative examples are summarized below. The package and the test piece were produced by molding the sealing epoxy resin composition at 150 ° C. for 3 hours by the dispensing method.
(1) Viscosity The viscosity at 25 ° C. of the epoxy resin composition for sealing was measured using an E-type viscometer (rotation speed: 5 rpm).
(2) Moisture resistant adhesive strength A test piece molded on one side of a 30 μm thick aluminum foil or a 75 μm thick polyimide film was prepared, and head speed was measured using an autograph AGS-500A type (trade name, manufactured by Shimadzu Corporation). Under the condition of 30 mm / min, a 10 mm wide aluminum foil or polyimide film was peeled off in the vertical direction, and its strength (peel strength: N / m) was measured. This measurement was performed immediately after the test piece molding and after treatment for 72 h, 168 h, and 240 h under PCT conditions of 121 ° C., 0.2 MPa, and 100% RH.
(3) Moisture resistance reliability The BGA package for evaluation (polyimide substrate) mounted with the TEG chip sealed with the sealing epoxy resin composition is treated for 240 hours under PCT conditions of 121 ° C., 0.2 MPa, 100% RH. Then, the presence or absence of peeling between the epoxy resin composition for sealing, the chip, and the polyimide film was confirmed using an ultrasonic flaw detector AT5500 (trade name, manufactured by Hitachi Construction Machinery Co., Ltd.). In addition, the presence or absence of corrosion of the aluminum pad was confirmed with an infrared microscope, and the number of defective packages / the number of measurement packages was evaluated.
(4) Thermal shock resistance An evaluation BGA package equipped with a TEG chip sealed with an epoxy resin composition for sealing was processed at 1000 cycles with a heat cycle of −50 ° C./150° C. for 30 minutes each, and aluminum Wiring disconnection defects were examined and evaluated by the number of defective packages / number of measurement packages.
＜実施例１〜７、比較例１〜３＞
液状エポキシ樹脂としてエポキシ当量１６０のビスフェノールＦ型エポキシ樹脂（東都化成株式会社製商品名ＹＤＦ−８１７０Ｃ）、硬化剤として活性水素当量６３の３，３’−ジエチル−４，４’−ジアミノジフェニルメタン（液状芳香族アミン１、日本化薬株式会社製商品名カヤハードＡ−Ａ）、活性水素当量１１４のエポミックＱ−６４０（液状芳香族アミン２、三井化学株式会社製商品名）、活性水素当量４５のエピキュアＷ（液状芳香族アミン３、油化シェルエポキシ株式会社製商品名）、活性水素当量４８のジエチルトルエンジアミン（液状芳香族アミン４、Ｌｏｎｚａ社製商品名ＤＥＴＤＡ８０）、酸無水物当量１６８のＭＨ−７００（液状酸無水物、新日本理化株式会社製商品名）、ゴム粒子としてスタフィロイドＡＣ−３３５５（ゴム粒子１、武田薬品工業株式会社製商品名）、スタフィロイドＡＣ−３８３２（ゴム粒子２、武田薬品工業株式会社製商品名）、平均粒径５μｍのシリコーンゴム粒子（ゴム粒子３）、無機充填剤として平均粒径４μｍの球状溶融シリカ、触媒として２−エチル−４−メチルイミダゾールを、それぞれ表１に示す組成で配合し、三本ロールにて混練分散した後、真空脱泡して、実施例１〜７及び比較例１〜３の封止用エポキシ樹脂組成物を作製した。各種評価結果を表２に示す。
<Examples 1-7, Comparative Examples 1-3>
Bisphenol F type epoxy resin having an epoxy equivalent of 160 (trade name YDF-8170C, manufactured by Toto Kasei Co., Ltd.) as a liquid epoxy resin, 3,3′-diethyl-4,4′-diaminodiphenylmethane having an active hydrogen equivalent of 63 as a curing agent (liquid Aromatic amine 1, Nippon Kayaku Co., Ltd. trade name Kayahard A-A), Epoxy Q-640 with active hydrogen equivalent 114 (liquid aromatic amine 2, Mitsui Chemicals trade name), epicure with active hydrogen equivalent 45 W (Liquid aromatic amine 3, product name manufactured by Yuka Shell Epoxy Co., Ltd.), diethyltoluenediamine having an active hydrogen equivalent of 48 (liquid aromatic amine 4, product name DETDA80 manufactured by Lonza), MH- of acid anhydride equivalent 168 700 (Liquid acid anhydride, trade name manufactured by Shin Nippon Rika Co., Ltd.), Staphyloid AC-33 as rubber particles 5 (rubber particles 1, trade name manufactured by Takeda Pharmaceutical Co., Ltd.), Staphyloid AC-3832 (rubber particles 2, trade name manufactured by Takeda Pharmaceutical Co., Ltd.), silicone rubber particles (rubber particles 3) having an average particle size of 5 μm, Spherical fused silica having an average particle size of 4 μm as an inorganic filler and 2-ethyl-4-methylimidazole as a catalyst are blended in the compositions shown in Table 1, kneaded and dispersed with three rolls, and then vacuum degassed The sealing epoxy resin compositions of Examples 1 to 7 and Comparative Examples 1 to 3 were produced. Various evaluation results are shown in Table 2.
本発明における（Ｂ）成分の液状芳香族アミンを含む硬化剤、及び（Ｃ）成分のゴム粒子を含まない比較例１では、耐湿接着力、耐湿信頼性及び耐熱衝撃性が著しく劣っていた。（Ｂ）成分を含んでいても（Ｃ）成分を含まない比較例２では、耐湿接着力及び耐湿性に改善効果が見られるものの耐熱衝撃性に劣り、（Ｃ）成分を含んでいても（Ｂ）成分を含まない比較例３では、耐熱衝撃性に改善効果が見られるものの耐湿接着力及び耐湿性に劣っていた。これに対して、実施例１〜７は、耐湿接着力及び耐湿信頼性に改善効果が見られ、かつゴム粒子配合による低応力化効果により、耐熱衝撃性にも優れていた。さらに、ゴム粒子としてコアシェル型アクリルゴム粒子を用いた実施例１〜５及び実施例７は、耐湿接着力が特に高く、その結果耐湿信頼性に著しい改善効果が見られた。 In Comparative Example 1 which does not include the (B) component liquid aromatic amine and the (C) component rubber particles in the present invention, the moisture resistance adhesive strength, moisture resistance reliability and thermal shock resistance were remarkably inferior. In Comparative Example 2 which contains the component (B) but does not contain the component (C), although the improvement effect is seen in the moisture-proof adhesive strength and moisture resistance, the thermal shock resistance is inferior, and the component (C) is contained ( In Comparative Example 3 not including the component B), although the improvement effect was seen in the thermal shock resistance, the moisture resistance adhesive strength and the moisture resistance were inferior. On the other hand, Examples 1 to 7 showed an improvement effect on the moisture-resistant adhesive strength and moisture-resistance reliability, and were also excellent in thermal shock resistance due to the effect of reducing stress due to the blending of rubber particles. Furthermore, Examples 1 to 5 and Example 7 using core-shell type acrylic rubber particles as the rubber particles had particularly high moisture-resistant adhesive strength, and as a result, a remarkable improvement effect was seen in moisture resistance reliability.
Claims (7)
The electronic component apparatus provided with the element sealed with the liquid epoxy resin composition for semiconductor element sealing of any one of Claims 1-5 .
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| JP2010132064A JP5720121B2 (en) | 1999-04-13 | 2010-06-09 | Epoxy resin composition for sealing and electronic component device |
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| JP10468899 | 1999-04-13 | ||
| JP1999104688 | 1999-04-13 | ||
| JP2000014192 | 2000-01-20 | ||
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| JP2010132064A JP5720121B2 (en) | 1999-04-13 | 2010-06-09 | Epoxy resin composition for sealing and electronic component device |
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| JP2000036027A Division JP4568940B2 (en) | 1999-04-13 | 2000-02-15 | Epoxy resin composition for sealing and electronic component device |
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| JP2010189664A JP2010189664A (en) | 2010-09-02 |
| JP5720121B2 true JP5720121B2 (en) | 2015-05-20 |
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| JP2010132064A Expired - Lifetime JP5720121B2 (en) | 1999-04-13 | 2010-06-09 | Epoxy resin composition for sealing and electronic component device |
| JP2014176966A Pending JP2014221922A (en) | 1999-04-13 | 2014-09-01 | Epoxy resin composition for sealing and electronic component device |
| JP2015219136A Pending JP2016026263A (en) | 1999-04-13 | 2015-11-09 | Epoxy resin composition for sealing and electronic component device |
| JP2016234655A Expired - Lifetime JP6340601B2 (en) | 1999-04-13 | 2016-12-02 | Epoxy resin composition for sealing and electronic component device |
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| JP2015219136A Pending JP2016026263A (en) | 1999-04-13 | 2015-11-09 | Epoxy resin composition for sealing and electronic component device |
| JP2016234655A Expired - Lifetime JP6340601B2 (en) | 1999-04-13 | 2016-12-02 | Epoxy resin composition for sealing and electronic component device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2010143949A (en) * | 2008-12-16 | 2010-07-01 | Shin-Etsu Chemical Co Ltd | Underfill material and semiconductor device using the same |
| KR20190003585A (en) * | 2016-04-28 | 2019-01-09 | 히타치가세이가부시끼가이샤 | Liquid epoxy resin composition for sealing and electronic component device |
| JP7213620B2 (en) * | 2018-03-22 | 2023-01-27 | 帝人株式会社 | Epoxy resin composition, prepreg, carbon fiber reinforced composite material and manufacturing method thereof |
| CN113474394B (en) * | 2019-02-26 | 2024-01-16 | 富士胶片株式会社 | Adhesive for endoscope, cured product thereof, endoscope, and method for producing same |
| JP7135970B2 (en) * | 2019-03-27 | 2022-09-13 | 味の素株式会社 | resin composition |
| JP7099490B2 (en) * | 2020-05-07 | 2022-07-12 | 昭和電工マテリアルズ株式会社 | Liquid resin composition for encapsulation and electronic component equipment |
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| JPS54127958A (en) * | 1978-03-29 | 1979-10-04 | Nippon Porimaa Kk | Dowdered * emulsion type of epoxy resin blend |
| JPS6181423A (en) * | 1984-09-28 | 1986-04-25 | Mitsui Toatsu Chem Inc | Thermosetting composition |
| JPH062806B2 (en) * | 1985-05-15 | 1994-01-12 | 三井東圧化学株式会社 | Aminobenzylamine composition |
| JPS62246920A (en) * | 1986-04-21 | 1987-10-28 | Nippon Zeon Co Ltd | Epoxy resin composition for semiconductor sealing |
| JPH0610247B2 (en) * | 1987-09-07 | 1994-02-09 | 住友ベークライト株式会社 | Liquid epoxy resin composition |
| JPH023414A (en) * | 1988-06-14 | 1990-01-09 | Mitsubishi Petrochem Co Ltd | One-package epoxy resin composition |
| JPH0256941A (en) * | 1988-08-20 | 1990-02-26 | Matsushita Electric Works Ltd | Sealing of semiconductor device |
| JP2740213B2 (en) * | 1988-12-20 | 1998-04-15 | 関西ペイント株式会社 | Bisphenol F type epoxy resin and coating composition containing the same |
| JPH04332722A (en) * | 1991-05-07 | 1992-11-19 | Toagosei Chem Ind Co Ltd | Epoxy resin composition |
| JP3357412B2 (en) * | 1992-03-16 | 2002-12-16 | 三井化学株式会社 | Liquid crystal sealing resin composition and method for manufacturing liquid crystal sealing cell |
| JPH0931306A (en) * | 1995-07-21 | 1997-02-04 | Minnesota Mining & Mfg Co <3M> | Heat-resistant toughened epoxy resin composition |
| JPH0940751A (en) * | 1995-07-27 | 1997-02-10 | Taiyo Ink Mfg Ltd | Impact-resistant insulating resin composition |
| JP3107360B2 (en) * | 1995-12-27 | 2000-11-06 | 住友ベークライト株式会社 | Liquid epoxy resin sealing material |
| JPH09316299A (en) * | 1996-05-27 | 1997-12-09 | Nof Corp | Epoxy resin composition |
| JP3112250B2 (en) * | 1996-07-31 | 2000-11-27 | アイシーケイ株式会社 | Polyurethane waterproof coating film forming material for on-site construction |
| JP3238340B2 (en) * | 1996-12-04 | 2001-12-10 | 住友ベークライト株式会社 | Liquid epoxy resin sealing material |
| JP3351974B2 (en) * | 1996-12-05 | 2002-12-03 | 住友ベークライト株式会社 | Liquid injection underfill material |
| JP3917279B2 (en) * | 1997-01-17 | 2007-05-23 | 中国塗料株式会社 | Non-tar epoxy resin coating composition and heavy anticorrosion coating film formed therefrom |
| JP4568940B2 (en) * | 1999-04-13 | 2010-10-27 | 日立化成工業株式会社 | Epoxy resin composition for sealing and electronic component device |
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2010
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| JP6340601B2 (en) | 2018-06-13 |
| JP2014221922A (en) | 2014-11-27 |
| JP2010189664A (en) | 2010-09-02 |
| JP2016026263A (en) | 2016-02-12 |
| JP2017057410A (en) | 2017-03-23 |
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