JP5687031B2 - Configuration information setting device and configuration information setting program - Google Patents

Description

  The present invention relates to a configuration information setting device used for setting configuration information of a substrate processing apparatus, and a configuration information setting program.

  Patent Document 1 discloses an apparatus that inputs information related to an apparatus configuration in an apparatus for processing a workpiece and simulates a conveyance speed and the like.

JP 05-57580 A

However, in the setting of the work processing apparatus described in Patent Document 1, each apparatus must be set according to an irregular apparatus shape, which is complicated. In particular, in a cluster system or the like, connection information (hereinafter also referred to as “address” or “transport address”) necessary for specifying a transport destination during substrate transport is obtained by acquiring configuration information. However, the system is too complicated for this purpose.
Conventionally, each time the configuration of the cluster system is determined, it is uniquely set by the system creator, and each time the device configuration is changed, it takes time to set the identification information of each module. Furthermore, every time the device configuration is changed, a complicated transport address is changed, which causes a malfunction, and it is necessary to separate the transport address from the user setting.

  An object of the present invention is to provide a configuration information setting device and a configuration information setting program capable of easily setting configuration information of a substrate processing apparatus.

In order to achieve such an object, the present invention includes at least a transport module that transports a substrate, and a process module that is connected to the transport module and that performs a process on a substrate transported from the transport module. A device for generating configuration information of a substrate processing apparatus provided as a module, a polygonal lattice display means for displaying a polygonal lattice having sides corresponding to the substrate transfer port of the transfer module, and a setting position of the module specified, the position specification acquisition means for acquiring the position on the polygon grid displayed by the polygonal grid display means, depending on the acquisition of the position by the position specification acquisition means, setting of the module is made in the lattice region A module display means for displaying that is recognized, and a module installed at the position obtained by the position designation obtaining means. Module identification information acquisition means for acquiring module identification information; and configuration information generation means for generating device configuration information in which the module identification information acquired by the module identification information acquisition means is associated with the installation position. It is characterized by that.

  The polygon grid display means not only displays the polygon grid actually, but also recognizes the polygon grid, for example, when displaying a quadrangular grid, such as when ticking only the outer frame with numbers. This includes the case where a simple display is performed.

  According to the present invention, setting of device configuration information of a substrate is facilitated.

It is explanatory drawing which showed the substrate processing system which concerns on one Embodiment of this invention. It is a flowchart for demonstrating operation | movement of a structure information setting apparatus. It is the screen schematic which showed an example of the virtual field which concerns on one Embodiment of this invention. It is a screen schematic diagram showing a setting state of device configuration information in a virtual field according to an embodiment of the present invention. It is explanatory drawing which showed an example of the identification value of each edge | side of a core icon based on one Embodiment of this invention. It is explanatory drawing which showed an example of the apparatus structure information table which concerns on one Embodiment of this invention. It is a figure which shows the example of conversion of the conveyance procedure data which concern on one Embodiment of this invention. It is a figure for demonstrating the other example of this invention. It is a figure which shows the example of a display of a hexagonal conveyance module. It is a figure which shows the example which displays a connection impossible part. It is a figure which shows the setting screen of a two-layered substrate processing apparatus. It is a flow in the case of having a route determination function. It is a figure which shows a route determination state.

  FIG. 1 is an explanatory view showing a substrate processing system. The substrate processing system of FIG. 1 includes a substrate processing apparatus 100 and a configuration information setting apparatus 500. The substrate processing apparatus 100 includes a control device 700, an arbitrary number of process modules 400, an arbitrary number of transfer modules 600, and an EFEM (Equipment Front End Module) 110.

  A processing apparatus and a process module 400 as a substrate transfer destination include a chamber for processing a substrate, for example, an etching chamber capable of dry etching, a temperature adjustment chamber capable of heating and cooling, or a film forming chamber. Have The film formation chamber is a chamber capable of film formation by, for example, a sputtering method or a CVD (Chemical Vapor Deposition) method. Each process module 400 is provided with each substrate processing member such as an exhaust pump, a plasma generation power source, and a gas introduction system according to the type of chamber in the module. In addition, each process module 400 is provided with a control device such as a PLC (programmable logic controller) for controlling each substrate processing member in the module and executing a predetermined process on the substrate. Yes.

  A transfer module 600 as a transfer apparatus has a transfer chamber in which a transfer robot (not shown) as a substrate transfer means is arranged. The transfer chamber is connected to another chamber and has a plurality of connection ports as locations where the substrate can be transferred. In this embodiment, the transfer chamber has four connection ports. Needless to say, the number of connection ports of the transfer chamber is not limited to four.

  The transfer module 600 is connected to the process module 400 via a connection port. Of the plurality of connection ports, a connection port to which the process module is connected becomes a connection location. Further, the transfer module 600 can be connected to another transfer module via a connection port. The transport module 600 is provided with various components such as an exhaust pump and an aligner (not shown). In addition, the transfer module 600 is provided with a control device such as a PLC for controlling each component to execute a substrate transfer operation. The transfer module 600 transfers the substrate to each process module 400 using a transfer robot. In this embodiment, the transfer robot has an arm that can rotate and extend, and transfers the substrate to the designated process module 400. The aligner performs transfer of the substrate between the transfer robots and correction of the positional deviation of the substrate. Further, the transfer module 600 can be connected to the EFEM 110 that is an input / output port of the substrate via a load lock. The load lock is a device for introducing a substrate into a transfer line provided in the transfer module 600 and for detaching the substrate from the transfer line. The EFEM 110 is a device for introducing a substrate from the atmosphere side to a transfer line or a load lock, or for transferring the substrate to the atmosphere side.

  The control device 700 is configured by a PC (personal computer), a PLC, or the like. The control device 700 controls the process module 400, the transfer module 600, and the EFEM 110. In the present embodiment, transfer procedure data specifying the order and transfer destination for transferring one substrate is acquired from the configuration information setting device 500, and each transfer module 600 is supplied with the transfer procedure data at a predetermined timing based on the transfer procedure data. Make the transport run. Further, the process module 400 is caused to execute a predetermined process at a predetermined timing.

  The configuration information setting apparatus 500 generates apparatus configuration information of the substrate processing apparatus including at least module identification information and information on a connection position of a module corresponding to the module identification information based on an input from the user. In the present embodiment, the transfer procedure data conversion process (described later) is performed based on the apparatus configuration information generated as described above, and is output to the substrate processing apparatus 100. Note that the configuration information setting device 500 may be configured by two or more PCs. The configuration information setting apparatus 500 and the substrate processing apparatus 100 are connected via a network based on a standard such as a LAN (Local Area Network) or RS-232C, thereby enabling data communication.

  The configuration information setting device 500 is connected to the CPU 501 via a CPU 501, a display device 506 such as a liquid crystal display, an input device 507 such as a keyboard, and a system bus 508, and an I / F 505 that controls the display device 506 and the input device 507. Etc. The CPU 501 controls various processes based on a program (for example, the program shown in FIG. 2) stored in the memory unit. The memory unit includes a storage device 504 such as a hard disk drive, a RAM 502 that is a system work memory for the CPU 501 to operate, a ROM 503 that stores programs, system software, and the like.

FIG. 2 is a flowchart for explaining the operation of the configuration information setting apparatus 500. Hereinafter, this flow will be described with reference to FIGS.
First, in step S <b> 101, the configuration information setting device 500 displays a polygonal lattice on the display device 506. In the present embodiment, a quadrangular lattice 200 (hereinafter also referred to as “virtual field 200”) as shown in FIG. 3 is displayed. In this embodiment, the unit cell is a polygon having sides corresponding to the connection ports of the transfer module as many as the number of connection ports of the transfer module. Accordingly, since the transfer module 400 has four connection ports, a quadrangular lattice is used.
Further, in the example of FIG. 3, scales capable of identifying each unit cell region (each field region) are swayed in both the row direction and the column direction. Thereby, not only can the user accurately recognize and set the position where the module should be set, but also the user can recognize the address.
In this state, it waits for the input of the position where the module should be set from the user (step S102). If it is detected via the input device 507 that an area on the quadrangular lattice has been designated (step S102: YES), the input of information on the module (hereinafter, module information) is awaited (step S103). At this time, although not shown, for example, a screen for accepting input of module information may be displayed together with various input items. Of course, it is also possible to accept an input of designation of module information before accepting designation of a position where a module is to be set.
When module information is acquired in step S103 (step S103: YES), a corresponding module icon is displayed (step S104). In the example of FIG. 4, core icons 301 and 302 associated with the transfer module 600, process icons 303 to 307 associated with the process module 400, and an EFEM icon associated with the EFEM 110 are used.

In step S105, the apparatus configuration information is generated based on the position where the module acquired in steps S102 and S103 should be set and the module information corresponding to the module to be set in this position.
FIG. 6 is an explanatory diagram showing an example of the device configuration information. In FIG. 6, a module ID (module identification information), a module name (module type information), and a profile path (location where input data and the like are stored) are received by the user I / F of the configuration information setting device 500. Then, it is registered in the storage device 504 in association with each module as a device configuration information table. Also, information that can specify the installation position and connection relationship of each module is registered in the apparatus configuration information table as an address. This address is used as information for specifying the substrate transfer destination when the substrate is transferred. Each process module and the address of each process module are also set in the control device 700 on the substrate processing apparatus 100 side. Setting to the control device 700 may be performed by the configuration information setting device 500 or a system administrator.

  An address assignment method in the present embodiment will be described. In the present embodiment, field identification information is combined with the transfer module 600, field identification information of the transfer module 600 connected to the process module 400 is combined with the process module 400, and the connection port number of the transfer module 600 is combined. An address is used. Specifically, in FIG. 4, each side of the core icons 301 and 302 indicates the installation position of the connection port on the transfer module 600. For each side of the core icon, an identification value (Station number) for identifying the side is set in advance and stored in the storage device 504.

  Each process icon is provided with a connection location instruction section indicating a connection location with the transfer module. In FIG. 4, of the sides of the process icon, the side having the shortest side among the sides of the trapezoidal shaded portion is used as the connection location instruction unit.

In FIG. 4, for example, the core icon 301 is arranged in an area 201 having a matrix number “24” as field identification information. Further, for example, the process icon 303 is arranged in the area 201 of the matrix number “23”, and the connection location instruction unit 303a of the process icon 303 is associated with the area corresponding to the transfer module 600 of the core icon 301 (area of the matrix number “24”). 201). For this reason, the adjacent part of the connection part instruction | indication part 303a and the area | region 201 of the matrix number "24" becomes a connection part of the conveyance module 600 and the process module 400, and the identification value (Station number) is 2. Accordingly, “242” is set as the address of the process module 400 (module identification information “Ch-B” in FIGS. 4 and 6) corresponding to the process icon 303.
Returning to FIG. 2, the configuration information setting apparatus 500 acquires transport procedure data (step S106) and converts it into transport procedure data that can be used in the substrate processing apparatus 100 (step S107). In the present embodiment, the transport order data in which the transport order and the module identification information are associated is converted into transport order data in which the transport order and the address are associated with each other by referring to the configuration information table.

  In the example of FIG. 7, transfer order data (recipe information) describing a processing procedure for a substrate is acquired by input from a user I / F or the like. The recipe information is, for example, Ch-A → Ch-C → Ch-B. In this recipe information, the ID (module identification information) of the module to which the substrate is transported is used as transport destination designation data. In the recipe information, process paths between modules are indicated by arrows. For this reason, this recipe information (that is, the substrate is conveyed and processed in the order of the module identified by Ch-A, the module identified by Ch-C, and the module identified by Ch-B (conveyance of the substrate). In this embodiment, process module identification information (Ch-ID) is basically used as the transport destination designation data, but if the data can identify the transport destination, The format is not limited, and may be a combination of process module type information (Ch-Name) and other information, for example.

Next, in step S107, based on the apparatus configuration information table, the transfer destination designation data (module ID) in the recipe information is converted into the address of the module that is the transfer destination. As a result, the transport order data after conversion is “142 → 243 → 242” and is transmitted to the substrate processing apparatus 100. Upon receiving this, the substrate processing apparatus 100 converts the data into more detailed control data (for example, “14 Core 2 out → 14 Core 3 in → 24 Core 1 out → 24 Core 3 in”), and controls each transfer module 600.
As described above, when the transport procedure data is input by the user, it is used as module identification information, which is converted by the configuration information setting device 500 or the substrate processing apparatus 100 and used on the user side. You can easily set recipes without memorizing rules. Further, even if the connection position of the apparatus is changed, it is not necessary to modify the transport sequence data itself, so that it is possible to prevent malfunction due to a mistake during correction.

  As described above, in this embodiment, the virtual field is configured in a lattice pattern. Accordingly, a matrix number that is information indicating the position of the region can be used as the identification information (field identification information) of each region. In this case, the addresses of the transfer module and the process module also indicate the position of the module in the virtual field, and the connection relationship between the modules can be determined based on the address.

Although the embodiment has been described above, the application of the present invention is not limited to the above embodiment.
Note that the shape of the virtual field is not limited to a quadrangle formed by a grid area in which the areas 201 are arranged in a grid pattern. Further, the shape of the region 201 is not limited to a quadrangle, and can be appropriately changed according to the configuration of the transport module (for example, the number of connection ports included in the transport module). For example, a hexagonal lattice or a triangle as shown in FIG. It may be a lattice. In FIG. 8, reference numeral 341 denotes a process icon, 342 denotes an EFEM icon, and 343 denotes a core icon.

  However, in the case of a quadrangular lattice, for example, the same lattice region can be used even when a hexagonal conveyance module 601 as shown in FIG. In this case, for example, even when there are only an odd number of five connection ports, for example, as shown in FIG. 10, it is possible to display an inaccessible location by a user setting or a preset setting. Good. In the figure, 309 is a core icon, 308 is a process icon, 321 is an EFEM icon corresponding to EFEM, and Tr is a transfer robot.

  Further, for example, when the transfer chamber is also connected in the vertical direction, the unit cell may be a three-dimensional lattice (triangular prism lattice, cubic lattice, hexagonal prism lattice, etc.) having a solid shape. However, even when the transfer chambers are connected in the vertical direction, a two-dimensional grid may be displayed and set for each layer as shown in FIG. At this time, the modules to be installed correspondingly in two or more layers are set in other layers when the installation position is designated in any of the layers (installation at the position indicated by the icon 311). A prompt icon 312 may be displayed.

Further, the configuration information setting device 500 may further have a route determination function. An example of the flow in this case is shown in FIG. In the example of FIG. 12, transfer procedure data and apparatus configuration information are acquired (steps S201 and S202), and a module that executes the same type of processing as the module specified by the transfer procedure data based on these is provided in the substrate processing apparatus. (Step S203). This can be determined from, for example, information of “module name” in the device configuration information table shown in FIG. 6, and another item may be provided for this determination. As a result, when it is found that there are a plurality of similar modules (step S204: YES), the module specified by the transfer procedure data and the route via the same module are extracted, and the number of transfers between modules of each route is calculated. Calculate (step S205). After calculating the number of inter-module transports for all paths (step S206), the path with the smallest inter-module transport number is determined (step S207) and output as the shortest path (step S208).
In the example shown in FIG. 13, among Ch-D and Ch-G, which are the same type of process modules, the route 1 that passes through Ch-D has five inter-module transport numbers, and the route 2 that passes through Ch-G. Since the transport distance becomes longer, route 2 is selected. In FIG. 13, reference numeral 322 denotes a process icon.
Thereby, the time concerning a process can be shortened.

  In the above-described embodiment, the present invention is applied to a core-type substrate processing apparatus in which a process chamber is connected around the transfer chamber. However, the present invention is not limited to this, and a processing member is further provided in the transfer chamber having transfer means. The present invention can also be applied to a substrate processing apparatus of a type (for example, in-line type) that can carry out both transfer and process.

  Further, although it is used as an address setting device, it is not limited to address setting, and may be used as a configuration information setting device in a substrate processing apparatus. In other words, when a plurality of transfer chambers are connected to each other, each position at which each transfer chamber is arranged is displayed as an image. On the other hand, the position of the transfer chamber or process chamber to be actually arranged is designated, and the transfer chamber or process is displayed. You may comprise as an apparatus which acquires the information of a chamber and stores the response | compatibility with the information of a conveyance chamber or a process chamber, and identification information.

  In addition, as the address, the process chamber is obtained by adding the connection port identification number to the position information of the transfer chamber, but the position information may be set as an address for the process chamber. That is, in the present embodiment, the configuration information includes information indicating which connection port of the transport module is connected to the process module as one element thereof. The arrangement position of the process module may be included in the configuration information. In this embodiment, since field identification information is stored in the storage device 504 in advance, if the arrangement position of the process module on the virtual field can be specified, the field identification information corresponding to the arrangement position can be acquired. Therefore, the field identification information may be set to the address of the corresponding process module.

  Note that the designation of the placement location of the transfer module and the process module on the virtual field is not limited to the use of icons as shown in FIG. 4, and the user directly via the input device of the system control device 2. You may make it input. In this case, for example, in the virtual field shown in FIG. 2, the transport modules are arranged in the second row, fourth column and first row, fourth column of the virtual field 200, and the first row, third column, second row, third column. The user may input via the input device that the process modules are arranged in the first, third row, fourth column, second row, fifth column, and first row, fifth column, respectively. Since the field identification information for each area of the virtual field 200 is stored in the storage device 504, the address of the transfer module and the process module is set by extracting the field identification information of the area designated by the user input. can do.

  In the above-described embodiment, as shown in FIG. 1, the configuration information setting apparatus 500 and the substrate processing apparatus 100 are separated. However, even if the function of the configuration information setting apparatus 500 is incorporated in the control apparatus 200 of the substrate processing apparatus 100. Good. Similarly, the function of the control device 200 of the substrate processing apparatus 100 may be incorporated in the configuration information setting device 500.

  There is also a processing method in which a program for operating the configuration of the above-described embodiment so as to realize the function of the above-described embodiment is stored in a storage medium, the program stored in the storage medium is read as a code, and executed on a computer. It is included in the category of the above-mentioned embodiment. That is, a computer-readable storage medium is also included in the scope of the embodiments. In addition to the storage medium storing the computer program, the computer program itself is included in the above-described embodiment.

  As such a storage medium, for example, a floppy (registered trademark) disk, a hard disk, an optical disk, a magneto-optical disk, a CD-ROM, a magnetic tape, a nonvolatile memory card, and a ROM can be used.

  In addition, the processing is not limited to the single program stored in the above-described storage medium, but operates on the OS in cooperation with other software and expansion board functions to execute the operations of the above-described embodiments. This is also included in the category of the embodiment described above.

500 Configuration information setting device 100 Substrate processing device

Claims (3)

An apparatus for generating configuration information of a substrate processing apparatus including at least a process module that transports a substrate and a process module that is connected to the transport module and that performs a process on a substrate transported from the transport module. Because
A polygonal grid display means for displaying a polygonal grid having sides corresponding to the substrate transfer ports of the transfer module;
Position designation obtaining means for obtaining a position on the polygonal lattice displayed by the polygonal lattice display means, which is designated as a module setting position;
Depending on the acquisition of the position by the position specification acquiring unit, a module display means for displaying to recognize that the configuration of the module is made in the lattice region,
Module identification information acquisition means for acquiring identification information of a module installed at the position acquired by the position specification acquisition means;
Configuration information generating means for generating device configuration information in which the module identification information acquired by the module identification information acquiring means is associated with the installation position;
A configuration information setting device comprising:   2. The configuration information setting device according to claim 1, wherein the polygon lattice display means displays a quadrangular lattice. An apparatus for generating configuration information of a substrate processing apparatus including at least a process module that transports a substrate and a process module that is connected to the transport module and that performs a process on a substrate transported from the transport module. A program that is loaded and executed
A polygonal grid display means for displaying a polygonal grid having sides corresponding to the substrate transfer ports of the transfer module;
Position designation obtaining means for obtaining a position on the polygonal lattice displayed by the polygonal lattice display means, which is designated as a module setting position;
Depending on the acquisition of the position by the position specification acquiring unit, a module display means for displaying to recognize that the configuration of the module is made in the lattice region,
Module identification information acquisition means for acquiring identification information of a module installed at the position acquired by the position specification acquisition means;
Configuration information generating means for generating device configuration information in which the module identification information acquired by the module identification information acquiring means is associated with the installation position;
A configuration information setting program comprising: