JP5684374B2 - 経年劣化特性を改善した角速度センサ - Google Patents
経年劣化特性を改善した角速度センサ Download PDFInfo
- Publication number
- JP5684374B2 JP5684374B2 JP2013510671A JP2013510671A JP5684374B2 JP 5684374 B2 JP5684374 B2 JP 5684374B2 JP 2013510671 A JP2013510671 A JP 2013510671A JP 2013510671 A JP2013510671 A JP 2013510671A JP 5684374 B2 JP5684374 B2 JP 5684374B2
- Authority
- JP
- Japan
- Prior art keywords
- primary
- sensor
- transducer element
- angular velocity
- transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000032683 aging Effects 0.000 title claims description 12
- 239000000463 material Substances 0.000 claims description 20
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 13
- 230000001419 dependent effect Effects 0.000 claims description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 9
- 230000001133 acceleration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 239000013590 bulk material Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000002431 foraging effect Effects 0.000 description 1
- 239000000411 inducer Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/42—Devices characterised by the use of electric or magnetic means
- G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB1008526.4A GB201008526D0 (en) | 2010-05-21 | 2010-05-21 | Sensor |
| GB1008526.4 | 2010-05-21 | ||
| PCT/GB2011/000758 WO2011144899A1 (en) | 2010-05-21 | 2011-05-19 | Angular rate sensor with improved ageing properties |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013531783A JP2013531783A (ja) | 2013-08-08 |
| JP5684374B2 true JP5684374B2 (ja) | 2015-03-11 |
Family
ID=42341134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013510671A Active JP5684374B2 (ja) | 2010-05-21 | 2011-05-19 | 経年劣化特性を改善した角速度センサ |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9234907B2 (de) |
| EP (1) | EP2572162B1 (de) |
| JP (1) | JP5684374B2 (de) |
| KR (1) | KR20130073920A (de) |
| CN (1) | CN102906539B (de) |
| GB (1) | GB201008526D0 (de) |
| WO (1) | WO2011144899A1 (de) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101462772B1 (ko) * | 2013-04-12 | 2014-11-20 | 삼성전기주식회사 | 직각 위상 에러 제거수단을 갖는 자가발진 회로 및 그를 이용한 직각 위상 에러 제거방법 |
| GB201313389D0 (en) | 2013-07-26 | 2013-09-11 | Atlantic Inertial Systems Ltd | Signal processing |
| CN104215234B (zh) * | 2014-09-18 | 2017-08-11 | 中国人民解放军国防科学技术大学 | 一种利用双节点电极消除圆柱壳体陀螺温度漂移的方法 |
| US10488199B2 (en) | 2014-12-18 | 2019-11-26 | Innalabs Limited | Gyroscope with piezoelectric monocrystal transducers |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5349855A (en) * | 1992-04-07 | 1994-09-27 | The Charles Stark Draper Laboratory, Inc. | Comb drive micromechanical tuning fork gyro |
| GB2266588B (en) | 1992-04-24 | 1995-11-15 | British Aerospace | Vibrating rate sensor tuning |
| GB9220977D0 (en) * | 1992-10-06 | 1992-11-18 | British Aerospace | Method of and apparatus for compensating for material instabilities in piezoelectric materials |
| JPH1047966A (ja) * | 1996-07-31 | 1998-02-20 | Aisin Seiki Co Ltd | 角速度センサ |
| GB2322196B (en) | 1997-02-18 | 2000-10-18 | British Aerospace | A vibrating structure gyroscope |
| JP2003121156A (ja) * | 2001-10-19 | 2003-04-23 | Matsushita Electric Ind Co Ltd | 振動ジャイロの駆動方法及びその調整方法 |
| GB0227098D0 (en) * | 2002-11-20 | 2002-12-24 | Bae Systems Plc | Method of calibrating bias drift with temperature for a vibrating structure gyroscope |
| CN101191749B (zh) | 2006-11-30 | 2011-08-10 | 西门子Vdo汽车公司 | 扭矩传感器中磁滞的降低 |
| JP2009180506A (ja) * | 2008-01-29 | 2009-08-13 | Sumitomo Precision Prod Co Ltd | 角速度センサ |
| WO2009119204A1 (ja) * | 2008-03-25 | 2009-10-01 | 住友精密工業株式会社 | 圧電体膜を用いた振動ジャイロ |
-
2010
- 2010-05-21 GB GBGB1008526.4A patent/GB201008526D0/en not_active Ceased
-
2011
- 2011-05-19 US US13/698,342 patent/US9234907B2/en active Active
- 2011-05-19 WO PCT/GB2011/000758 patent/WO2011144899A1/en active Application Filing
- 2011-05-19 KR KR1020127033223A patent/KR20130073920A/ko not_active Application Discontinuation
- 2011-05-19 CN CN201180025327.9A patent/CN102906539B/zh active Active
- 2011-05-19 EP EP11723999.6A patent/EP2572162B1/de active Active
- 2011-05-19 JP JP2013510671A patent/JP5684374B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20130233074A1 (en) | 2013-09-12 |
| EP2572162A1 (de) | 2013-03-27 |
| US9234907B2 (en) | 2016-01-12 |
| EP2572162B1 (de) | 2017-08-16 |
| JP2013531783A (ja) | 2013-08-08 |
| WO2011144899A1 (en) | 2011-11-24 |
| CN102906539A (zh) | 2013-01-30 |
| KR20130073920A (ko) | 2013-07-03 |
| CN102906539B (zh) | 2016-06-22 |
| GB201008526D0 (en) | 2010-07-07 |
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