JP5682373B2 - Curve motion device, optical measurement device, X-ray device, and machine tool - Google Patents

Description

  The present invention relates to a curved motion apparatus.

  For example, a curved motion apparatus that is applied to a device with a predetermined rotational motion or curved motion, such as an optical measurement device, an X-ray device, a CT scanner, a stage device, an amusement device, or a machine tool is known.

  For example, Patent Documents 1 to 3 describe a curved motion device in which a plurality of arc-shaped curved track rails having a constant curvature are arranged in a rail pedestal shape.

JP 2009-024842 A JP 2009-127647 A JP 2010-127345 A

  However, the curved motion apparatus described in Patent Documents 1 to 3 does not consider durability in a severe environment such as being exposed to wind and rain or corroding or rusting with a chemical solution. The curved motion device has a gap or a seating surface formed on assembly, such as a joint between a plurality of curved track rails, a fastening bolt seat surface between the rail pedestal and the curved track rail, and a minute gap between the rail pedestal and the curved track rail. Have. The gap or the seating surface easily infiltrates or accumulates moisture, dust, and chemicals, and may lead to corrosion or rust of the curved track rail.

  This invention is made | formed in view of the above, Comprising: It aims at providing the curved motion apparatus which can reduce the risk of corrosion or rust of a curved track rail.

  The curved motion device of the present invention includes a rail pedestal, an endless annular curved track rail integrally formed with the rail pedestal or integrally metal-bonded, and a slider that slides on the curved track rail. To do.

  As a result, the clearance or seating surface formed during assembly, such as the fastening bolt seating surface between the rail pedestal and the arcuate track, and the minute clearance between the rail pedestal and the curved track rail, is reduced. For this reason, a possibility that moisture, dust, or a chemical may enter or accumulate in the gap or the seating surface is reduced. As a result, the curved track rail is corroded or the curved track rail is rusted, and the slider is prevented from sliding on the curved track rail. Moreover, the surrounding contamination by corrosion or rust is reduced. Further, durability in harsh environments such as exposure to wind and rain or corrosion or rusting with chemicals is improved.

  As a desirable mode of the present invention, it is preferable that the curved track rail is formed by concentrically arranging a plurality of curved track rails having different diameters, and connecting the slider with a moving table. Thereby, the roundness of the track surface of a curved track rail or the coaxiality of the track surface of curve track rails can be made highly accurate. For this reason, the slider arrange | positioned at the some curved track rail from which a diameter differs can be connected with a moving stand. Moreover, the load (moment load or axial load) applied to the moving table is distributed and applied to a plurality of curved track rails having different diameters. As a result, the life of the curved track rail can be extended.

  As a desirable mode of the present invention, it is preferable that the rail pedestal and the curved track rail project the curved track rail from the rail pedestal by forging. Thereby, a curve track rail is trained and rigidity increases. Further, since there is no gap between the curved track rail and the rail base and it is not necessary to assemble with bolts, the bolt seat surface can be reduced. As a result, the risk of corrosion or rusting on the curved track rail is reduced.

  As a desirable mode of the present invention, it is preferable that the rail pedestal and the curved track rail are integrated by joining the rail pedestal and the curved track rail by welding. As a result, there is no gap between the curved track rail and the rail pedestal, and the bolt seat surface can be reduced because it is not necessary to assemble with a bolt. As a result, the risk of corrosion or rusting on the curved track rail is reduced.

  As a desirable mode of the present invention, it is preferable that the rail base and the curved track rail are formed of carbon steel. Thereby, high hardness is obtained at the time of quenching.

  As a desirable aspect of the present invention, it is preferable that the rail pedestal and the curved track rail are subjected to rust prevention treatment. This reduces the risk of rusting. Moreover, since the joints, gaps, or seating surfaces are reduced, the risk that the chemical solution for the cleaning treatment before the rust prevention treatment will remain is reduced. For this reason, the quality of a rust prevention process improves.

  ADVANTAGE OF THE INVENTION According to this invention, the curved motion apparatus which can reduce the risk of corrosion or rust of a curved track rail can be provided.

FIG. 1 is an overall perspective view of the curvilinear motion device according to the first embodiment. FIG. 2 is a partially broken perspective view showing the slider of the curved motion device of the first embodiment. FIG. 3 is a conceptual diagram illustrating an example of an induction hardening process for the curved track rail of the curved motion device according to the first embodiment. FIG. 4 is a perspective view illustrating a part of the curved track rail of the curved motion device according to the first embodiment. FIG. 5 is a perspective view showing an example in which a relief portion of the slider is formed on a part of the curved track rail of the curved motion device according to the first embodiment. FIG. 6 is an overall perspective view of the curved motion device of the second embodiment.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the constituent elements described below can be appropriately combined.

(Embodiment 1)
FIG. 1 is an overall perspective view of the curvilinear motion device according to the first embodiment. FIG. 2 is a partially broken perspective view showing the slider of the curved motion device of the first embodiment. A curved motion device 100 shown in FIG. 1 includes a rail base 30, a plurality of curved track rails 10A and 10B, a plurality of sliders 20 and 20, and a moving table 40. The non-quenched part A will be described later.

  The rail pedestal 30 has a donut disk shape. The shape of the rail pedestal 30 is not limited to this, and may be a disk shape or a rectangular plate shape. It is preferable that tapped holes are formed on the back surface of the rail base 30 opposite to the curved track rails 10A and 10B. The tapped holes can be fastened with bolts from the machine base on the rear surface of the rail pedestal, and can be fixed easily. Moreover, since it provided in the reverse surface opposite to curve track rail 10A, 10B, even if rust generate | occur | produces, the influence on curve track rail 10A, 10B can be reduced. In addition, it is more preferable that the pilot hole of the tap hole is a blind hole.

  The curved track rails 10A and 10B are formed in two endless rings having different diameters. The curved track rails 10A and 10B are arranged on the rail pedestal 30 and arranged concentrically. The sliders 20 and 20 are attached so as to be slidable along the curved track rails 10A and 10B. The moving table 40 has a structure in which the inner and outer sliders 20 are connected by the moving table 40.

  As shown in FIG. 2, the curved track rails 10A and 10B have a rail body 11 having a rectangular cross section and a circular shape. The rail body 11 has an integral structure formed integrally with the rail pedestal 30. Thereby, the bolt crevice hole which exists in the rail upper surface of a general linear motion guide can be reduced. The curved track rails 10A and 10B and the rail pedestal 30 are made of structural carbon steel. The curved track rails 10A and 10B and the rail pedestal 30 are made of, for example, high carbon steel (for example, JIS standard S55C).

  In order to form the rail body 11 and the rail base 30 integrally, it is preferable to form the metal base material by hot forging (forging). For example, a metal base material is compressed by a hammer or a press between a pair of upper and lower molds having a gap that forms the shape of the rail body 11 and the rail pedestal 30, and filled in the mold. Can be formed by modeling. Alternatively, the metal base material may be compressed by a hammer and the rail body 11 may be protruded from the rail base 30 without being three-dimensionally constrained by a mold. Thereby, the rail main body 11 is pushed up from the rail base 30 by forging, and is made into the integral structure. That is, the integrated structure is a structure in which the rail body 11 protrudes from the rail base 30 with the same material as the rail base 30 by forging.

  Moreover, the rail main body 11 is forged and the rigidity of the rail main body 11 increases by forming the rail main body 11 and the rail base 30 integrally by hot forging (forging process). Moreover, since there is no gap between the rail body 11 and the rail base 30 and it is not necessary to assemble with bolts, the bolt seat surface can be reduced. As a result, the risk of corrosion or rusting is reduced. Further, the number of parts is reduced, and the curved motion device 100 can be provided at a low cost.

  In order to integrally form the rail body 11 and the rail base 30, the metal base material may be cast and formed. For example, it is formed by modeling by filling a metal base material into a metal mold between a pair of upper and lower molds having a gap that forms the shape of the rail body 11 and the rail base 30 when combined. Can do. The rail main body 11 protrudes from the rail pedestal 30 with the same material of the rail pedestal 30 by casting.

  The rail body 11 includes rail-side upper raceway surfaces 12a and 12a and rail-side lower raceway surfaces 12b and 12b each having a circular arc cross section on both side surfaces, that is, the inner peripheral surface and the outer peripheral surface of the rail main body 11, respectively. Are formed continuously and parallel along the longitudinal direction.

  In the curved track rails 10A and 10B, after the rail body 11 is integrally formed on the rail base 30, the track surfaces 12a, 12a, 12b and 12b are ground or cut. Thereby, the roundness and coaxiality of the curved track rails 10A and 10B are adjusted.

  The curved track rails 10A and 10B and the rail pedestal 30 are preferably subjected to heat treatment to remove stress. Since the rail body 11 is pushed up from the rail pedestal 30 by forging to form an integral structure, a difference in thermal expansion hardly occurs and the rigidity is high. After the heat treatment, the curved track rails 10A and 10B are subjected to finish cutting of the track surfaces 12a, 12a, 12b, and 12b with a CBN (cubic boron nitride) cutting edge. As a result, the raceway surfaces 12a, 12a, 12b, and 12b are preferable because of high accuracy.

  After finishing, the curved track rails 10A and 10B and the rail base 30 are subjected to rust prevention treatment. For example, it is preferable to subject the curved track rails 10 </ b> A and 10 </ b> B and the rail pedestal 30 to the entire low temperature chromium plating. Thereby, the possibility of rusting of the curved track rails 10A and 10B can be reduced.

  The sliders 20 and 20 have the same structure as the slider used in a general linear guide device. The sliders 20 and 20 have a U-shaped slider body 21 that is downwardly U-shaped so as to straddle the rail bodies 11 of the curved track rails 10A and 10B, and downward U-shapes that are respectively attached to both end surfaces of the slider body 21 in the sliding direction. End caps 22 and 22 and a plurality of rolling elements (balls) B are included.

  The sliders 20 and 20 are preferably subjected to rust prevention treatment. Thereby, the risk of rusting of the sliders 20 and 20 is reduced. For example, like the curved track rails 10A and 10B and the rail pedestal 30, the sliders 20 and 20 are preferably subjected to fluorinated low temperature chromium plating.

  On both sides of the inner surface of the slider body 21, the upper side of the slider side having the same circular arc shape so as to face the upper raceway surfaces 12a, 12a and the lower raceway surfaces 12b, 12b on the curved track rails 10A, 10B side, respectively. Track surfaces 23a and 23a (only one shown in FIG. 2) and slider-side lower track surfaces 23b and 23b (also only one shown in FIG. 2) are formed vertically.

  Further, in the slider body 21, there are upper passage holes 24a, 24a (only one is shown in FIG. 2) and lower passage holes 24b, 24b (only one is shown in FIG. 2) so as to penetrate in the longitudinal direction. Is formed.

  In addition, four upper passage holes 24a and 24a and upper and lower raceway surfaces 23a and 23a, and lower passage holes 24b and 24b and lower slider-side raceway surfaces 23b and 23b are provided in the end caps 22 and 22, respectively. They are communicated with each other by a formed curved path-shaped direction changing hole (not shown). As a result, a total of four circulation paths 25, 25, 25, 25 (only two are shown in FIG. 2) are formed.

  As shown in the figure, in these four circulation paths 25, 25, 25, 25, a plurality of rolling elements B made of steel are arranged in a daisy chain, and these rolling elements B roll inside. However, by circulating, the sliders 20 and 20 slide smoothly on the curved track rails 10A and 10B, respectively.

  Further, the moving table 40 that connects the inner and outer sliders 20 and 20 is formed of, for example, a rectangular metal plate having a flat upper surface. As shown in FIGS. 1 and 2, the movable table 40 is installed so as to span between the upper surfaces of the inner and outer sliders 20, 20. The movable table 40 integrally connects the inner and outer sliders 20 and 20 by fastening bolts (not shown) from the upper surface using bolt holes 21 a formed on the upper surface of the slider body 21. A predetermined device (annular movable device) (not shown) can be attached to the upper part of the movable table 40.

  FIG. 3 is a conceptual diagram illustrating an example of an induction hardening process for the curved track rail of the curved motion device according to the first embodiment. FIG. 4 is a perspective view illustrating a part of the curved track rail of the curved motion device according to the first embodiment. In the curved motion device 100 of the present embodiment, it is preferable to quench the curved track rails 10A and 10B as shown in FIG. As shown in FIG. 4, a hardened portion Q by heat treatment is continuously provided along the circumferential direction in a portion including the track surfaces 12a, 12a, 12b, 12b on which at least the slider 20 slides on the curved track rails 10A, 10B. Is formed. Moreover, it has the structure which has the non-hardening part A in which the heat processing shown in FIG.1 and FIG.4 is not performed between the starting point S and the end point T of the quenching part Q. FIG.

  The quenching part Q can be formed, for example, by induction hardening with an induction hardening apparatus 200 configured as shown in FIG. The induction hardening apparatus 200 includes at least a pair of high-frequency (dielectric heating) coils 60 and 60 arranged on the inside and outside of the curved track rails 10A and 10B and on the same phase when viewed from the center of the curved track rails 10A and 10B. And at least a pair of cooling means 70, 70 disposed downstream of the high-frequency coils 60, 60 in the transfer direction and the curved track rails 10 </ b> A, 10 </ b> B are controlled along the circumferential direction while controlling the induction hardening. It consists of a controller and not.

  The induction heating H is applied to the high-frequency coils 60, 60 while slowly rotating the curved track rails 10A, 10B along the circumferential direction by the controller. The induction heating H heats both side surfaces of each of the curved track rails 10A, 10B including the track surfaces 12a, 12a, 12b, 12b shown in FIG. 4 to the A1 transformation point or higher (about 700 ° C. or higher) of the steel. As shown in FIG. 3, immediately after heating, the cooling means 70, 70 cools the heated portion by spraying a cooling liquid C and quenches. Thereby, the hardened part Q excellent in abrasion resistance and mechanical strength is formed in the raceway surfaces 12a, 12a, 12b, and 12b shown in FIG.

  As shown in FIG. 4, the non-hardened part A is formed between the start point S and the end point T so that the start point S and the end point T of the hardened part Q of each of the curved track rails 10A and 10B do not overlap. The non-quenched part A can suppress the occurrence of cracks due to the overlap of quenching.

  Further, the non-quenched portion A formed between the start point S and the end point T of the quenched portion Q is formed in substantially the same phase on the inner peripheral side and the outer peripheral side of the curved track rails 10A and 10B, respectively. This is because, by arranging them in the same phase, it is possible not only to quench the both raceway surfaces 12a, 12a, 12b and 12b at the same time, but also to ignore deformation due to quenching. That is, although the quenching may be performed for each side, the curved track rails 10A and 10B are deformed by quenching, so that the cap adjustment with the high-frequency coil 60 is necessary again when quenching the other side, and the processing is troublesome. Because it becomes.

  Further, local induction hardening can be performed by using induction hardening as a heat treatment for forming the quenched portion Q. This eliminates the need for a large heat treatment furnace such as carburizing and quenching. As a result, an enormous capital investment is not required, and the production space can be saved. Since local continuous quenching is also possible by flame quenching, a flame quenching apparatus can be used instead of the induction quenching apparatus 200 as described above.

  The circumferential length of the non-quenched portion A is preferably shorter than the circumferential length of the slider 20. That is, even when the slider 20 reaches the non-quenched portion A, which has lower mechanical strength than the hardened portion Q, the possibility that the full load of the slider 20 is applied to the non-quenched portion A is reduced. For this reason, early peeling and abrasion of the non-hardened part A can be reduced.

  Further, as shown in FIG. 5, a relief portion R (gradual dent) where the load of the slider 20 hardly acts may be formed in a range including the non-quenched portion A. When the rolling element B of the slider 20 rolls while supporting the load with respect to the non-quenched part A, which has a lower mechanical strength than the hardened part Q, the non-hardened part A peels off early due to insufficient hardness and strength. Or wear may occur. On the other hand, if the relief portion R where the load of the slider 20 does not act is formed in the range including the non-quenched portion A, even when the slider 20 reaches the non-quenched portion A, the slider with respect to the non-quenched portion A The risk of applying a total load of 20 is reduced. For this reason, peeling or abrasion of the non-quenched portion A can be reduced.

  In the curved motion device 100 of the first embodiment, a large load (moment load or axial load) applied to the sliders 20 and 20 of the moving table 40 is distributed by two endless annular curved track rails 10A and 10B having different diameters. Can receive. As a result, it is possible to reduce the need to widen the curved track rails 10A and 10B or increase the size of the sliders 20 and 20, and it is possible to reduce the weight of the curved exercise device 100 and reduce the manufacturing cost.

  Moreover, it becomes easy to arrange a linear motor for driving, a position sensor, and the like between the curved track rails 10A and 10B and in the vicinity thereof.

  In addition, the curved motion apparatus 100 of this Embodiment 1 demonstrated by the example provided with the inner and outer pair (two) curved track rail 10A, 10B. Further, the curved track rails may be provided in three or more concentric circles, and the inner and outer sliders 20 may be connected together by one moving table 40. Further, a plurality of moving platforms 40 that connect the inner and outer sliders 20 and 20 may be provided independently on the same curved track rail.

  As described above, in the curved motion device 100 of the present embodiment, the curved track rails 10 </ b> A and 10 </ b> B are integrally formed on the rail pedestal 30. Accordingly, the curved motion device 100 according to the first embodiment includes a joint between the plurality of curved track rails 10A and 10B, a fastening bolt seat surface between the rail pedestal 30 and the curved track rails 10A and 10B, a rail pedestal 30 and the curved track rail. A gap or a seating surface formed in assembling such as a minute gap between 10A and 10B is reduced. For this reason, a possibility that moisture, dust, or a chemical may enter or accumulate in the gap or the seating surface is reduced. As a result, it is reduced that the curved track rails 10A and 10B are corroded or rusted and the sliders 20 and 20 become obstacles to slide on the curved track rails 10A and 10B. Moreover, the surrounding contamination by corrosion or rust is reduced. Further, durability in harsh environments such as exposure to wind and rain or corrosion or rusting with chemicals is improved.

  Moreover, since the seam, the gap, or the seating surface is reduced on the curved track rails 10A and 10B, the curved motion device 100 reduces the possibility that the chemical solution of the cleaning process before the rust prevention process remains. Yes. For this reason, the quality of a rust prevention process improves.

  Moreover, since the curved motion apparatus 100 does not require the bolts that fasten the curved track rails 10A and 10B and the rail pedestal 30, the possibility of peeling off the rust-proofing process when the bolts are fastened is reduced.

  Further, since each of the curved track rails 10A and 10B is integrally formed on the rail pedestal 30 and has an integral structure, the rigidity is higher than that of a curved motion apparatus that has been assembled with a conventional bolt.

  In the curved motion device 100 according to the first embodiment, a plurality of curved track rails 10A and 10B are integrated on the rail base 30 in a concentric multiple manner. As a result, the movement of the movable table 40 can be made smoother. Conventionally, in order for the inner and outer sliders 20 and 20 connected by the moving base 40 to operate smoothly, the curved track rails 10A and 10B are arranged on the rail pedestal 30 so that their roundness and coaxiality become extremely small. However, it is difficult to assemble thin-walled members such as the curved track rails 10A and 10B while maintaining a high degree of roundness and maintaining the same degree of coaxiality.

  In contrast, the curved motion device 100 according to the first embodiment includes the curved track rails 10 </ b> A and 10 </ b> B integrally formed on the rail pedestal 30. As a result, the raceway surfaces 12a, 12a, 12b, and 12b can be processed using the rail pedestal 30 as a reference. Therefore, the work for aligning the center of rotation and the center of the curved motion device 100 can be shortened and a highly accurate circular locus can be obtained. The track surfaces 12a, 12a, 12b, 12b of the multiple curved track rails on the rail pedestal 30 may be processed simultaneously.

  Since it can be processed simultaneously with one chuck, highly accurate coaxiality can be obtained. Further, since the raceway surfaces 12a and 12a or the raceway surfaces 12b and 12b can be on the same plane by simultaneous machining, all the sliders 20 and 20 can travel on the same plane. Therefore, even if the sliders 20 and 20 are connected to each other, a rotational force and a twist are hardly generated, and an effect of maintaining the posture accuracy of the movable table 40 can be exhibited.

  Further, when the slider 20 is connected by the moving table 40, the preload amount of the rolling elements B inside the sliders 20 and 20 may change due to misalignment. The curved motion device 100 according to the first embodiment can reduce the possibility that the preload amount of the rolling elements B inside the sliders 20 and 20 changes due to misalignment. As a result, the life of the curved motion device 100 can be extended.

  As shown in FIG. 1, the curved motion device 100 according to the present embodiment includes a curved track rail in which the non-hardened portions A of the curved track rails 10 </ b> A and 10 </ b> B are disposed on the inner side and a curved track rail disposed on the outer side. They are arranged so that they are not located in substantially the same phase. As a result, it is possible to avoid simultaneously positioning the sliders 20 and 20 connected by the moving base 40 in the non-quenched portion A of the curved track rails 10A and 10B, thereby extending the life of the curved motion device 100. it can.

  That is, similarly to the curved track rails 10A and 10B, even when the slider 20 reaches the non-quenched portion A having a lower mechanical strength than the quenched portion Q, the non-hardened portion A of the curved track rails 10A and 10B. On the other hand, since the two sliders 20 and 20 reach simultaneously and the entire load is not applied at the same time, early peeling and wear of the non-quenched portion A can be reduced.

(Embodiment 2)
FIG. 6 is an overall perspective view of the curved motion device of the second embodiment. The present embodiment is characterized in that the curved track rail and the rail pedestal are integrally metal-bonded by welding. In addition, the same code | symbol is attached | subjected to the same member as what was demonstrated in embodiment mentioned above, and the overlapping description is abbreviate | omitted.

  The curved track rails 10A and 10B have a rail body 15 having a rectangular cross section and a circular shape as shown in FIG. The rail body 15 is formed separately from the rail pedestal 30. In the curved motion device of the second embodiment, the rail body 15 and the rail base 30 are integrally metal-bonded. For example, the curvilinear motion device of the second embodiment forms the joint M by welding, and integrates the rail body 15 and the rail base 30. The joint M is preferably formed continuously along the circumferential direction of the curved track rails 10A and 10B. Moreover, it is preferable to form the junction M continuously over the entire circumference along the circumferential direction of the curved track rails 10A and 10B. More preferably, the joints M are formed continuously and in parallel along the longitudinal direction of the rail body 15 on both side surfaces of the rail body 15, that is, on the inner circumferential surface and the outer circumferential surface of the rail body 15.

  The curved track rails 10A and 10B and the rail pedestal 30 are preferably made of the same material, for example, the same carbon steel, in order to reduce the possibility that a difference in thermal expansion occurs due to a heat treatment for stress relaxation of welding described later. When the curved track rails 10A and 10B and the rail pedestal 30 are made of high carbon steel (for example, JIS standard S55C), the welding rod is welded and joined using austenitic stainless steel (for example, JIS standard SUS309). It is preferable to form M. Thereby, the crack by hydrogen diffusion can be suppressed.

  The curved track rails 10A and 10B are each formed by grinding or cutting the track surfaces 12a, 12a, 12b, and 12b after the rail body 15 is welded onto the rail pedestal 30 to form an integral structure. Thereby, the roundness and coaxiality of the curved track rails 10A and 10B are adjusted.

  The curved track rails 10A and 10B and the rail pedestal 30 are preferably subjected to heat treatment to remove stress. After the heat treatment, the curved track rails 10A and 10B are subjected to finish cutting of the track surfaces 12a, 12a, 12b, and 12b with a CBN (cubic boron nitride) cutting edge. As a result, the raceway surfaces 12a, 12a, 12b, and 12b are preferable because of high accuracy.

  After finishing, the curved track rails 10A and 10B, the rail pedestal 30, and the joint M are subjected to rust prevention treatment. For example, it is preferable that low temperature chromium plating is applied to the entire curved track rails 10A and 10B, the rail base 30, and the joint M. Thereby, the possibility of rusting of the curved track rails 10A and 10B can be reduced.

  As described above, in the curved motion device of the second embodiment, it is more preferable that the hardened portion Q having excellent wear resistance and mechanical strength is formed on the raceway surfaces 12a, 12a, 12b, and 12b shown in FIG. As shown in FIG. 4, the non-hardened part A is formed between the start point S and the end point T so that the start point S and the end point T of the hardened part Q of each of the curved track rails 10A and 10B do not overlap. The non-quenched part A can suppress the occurrence of cracks due to the overlap of quenching.

  Further, as shown in FIG. 5, a relief portion R (gradual dent) where the load of the slider 20 hardly acts may be formed in a range including the non-quenched portion A. When the rolling element B of the slider 20 rolls while supporting the load with respect to the non-quenched part A, which has a lower mechanical strength than the hardened part Q, the non-hardened part A peels off early due to insufficient hardness and strength. Or wear may occur. On the other hand, if the relief portion R where the load of the slider 20 does not act is formed in the range including the non-quenched portion A, even when the slider 20 reaches the non-quenched portion A, the slider with respect to the non-quenched portion A The risk of applying a total load of 20 is reduced. For this reason, peeling or abrasion of the non-quenched portion A can be reduced.

  As described above, the curved motion device of the second embodiment has an integral structure in which the curved track rails 10A and 10B are integrally formed on the rail base 30 by welding. Thereby, the curved motion apparatus of Embodiment 2 includes a joint between a plurality of curved track rails 10A and 10B, a fastening bolt seat surface between the rail pedestal 30 and the curved track rails 10A and 10B, a rail pedestal 30 and the curved track rail 10A, A gap or a seating surface formed in assembling such as a minute gap with 10B is reduced. For this reason, a possibility that moisture, dust, or a chemical may enter or accumulate in the gap or the seating surface is reduced. As a result, it is reduced that the curved track rails 10A and 10B are corroded or rusted and the sliders 20 and 20 become obstacles to slide on the curved track rails 10A and 10B. Moreover, the surrounding contamination by corrosion or rust is reduced. In addition, the number of parts such as bolts is reduced, and a curved motion apparatus can be provided at a low cost.

  In the curved motion device of the second embodiment, the curved track rails 10A and 10B are integrally formed on the rail pedestal 30 by welding to form an integral structure. For this reason, the curved motion apparatus of Embodiment 2 can increase rigidity compared with the case where the curved track rails 10A and 10B are assembled to the rail base 30 with bolts.

  Moreover, since the joint, gap, or seating surface is reduced on the curved track rails 10A and 10B, the curved motion device of the second embodiment may leave the chemical solution for the cleaning treatment before the rust prevention treatment. Has been reduced. For this reason, the quality of a rust prevention process improves.

  Moreover, since the curvilinear motion apparatus of Embodiment 2 does not require bolts that fasten the curved track rails 10A and 10B and the rail pedestal 30, the possibility of peeling off the rust prevention treatment when the bolts are fastened is reduced.

  The curvilinear motion apparatus of the first and second embodiments described above can be applied to any equipment that has a predetermined rotational motion or curvilinear motion, such as an optical measurement device, an X-ray device, a CT scanner, a stage device, an amusement device, or a machine tool. Is possible.

DESCRIPTION OF SYMBOLS 100 Curve motion apparatus 200 Induction hardening apparatus 10A, 10B Curve track rail 11 Rail main body 12a, 12b Track surface 20 Slider 30 Rail base 40 Moving table 60 High frequency coil 70 Cooling means B Rolling element

Claims (7)

Rail pedestal,
An endless annular curved track rail integrally formed with or integrally metal-bonded with the rail base;
A slider sliding on the curved track rail;
Including
The rail pedestal and the curved track rail project the curved track rail from the rail pedestal by forging .   The curved motion apparatus according to claim 1, wherein the curved track rail has a plurality of curved track rails having different diameters arranged concentrically, and the slider is connected by a moving base. Wherein the rail seat and the curved track rail curve exercise device according to any one of claims 1 or 2 are formed by carbon steel. The curved motion device according to any one of claims 1 to 3 , wherein the rail pedestal and the curved track rail are subjected to rust prevention treatment. An optical measuring device comprising the curvilinear motion device according to claim 1 . An X-ray device comprising the curvilinear motion device according to claim 1 . A machine tool comprising the curvilinear motion device according to any one of claims 1 to 4.

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