JP5672785B2 - Semiconductor device and manufacturing method of semiconductor device - Google Patents

Description

  The present invention relates to a semiconductor device and a method for manufacturing the semiconductor device.

  The high frequency characteristics of the compound semiconductor device can be improved by miniaturizing the gate electrode. Therefore, the gate electrode of the compound semiconductor device for high frequency applications is formed by using an electron beam drawing technique as schematically shown in FIG.

JP 7-86582 A JP 2003-142500 A

  The high frequency characteristics of the compound semiconductor device can also be improved by shortening the distance Lsg between the source electrode and the gate electrode. Therefore, as a result of earnest research to develop a compound semiconductor device with better high-frequency characteristics, when Lsg is about 0.5 μm, as shown in FIG. It has been found that a phenomenon that an opening having a shape in which a part of the opening spreads toward the source electrode side (left side in FIG. 9) is formed frequently occurs. In other words, it has been found that when Lsg is about 0.5 μm, the phenomenon that the gate electrode forming electron beam fluctuates (the gate electrode forming electron beam is not manipulated linearly) frequently occurs. FIG. 9 is a SEM (scanning electron microscope) photograph of a portion of the compound semiconductor device in the middle of manufacture shown in FIG.

  When the above phenomenon occurs, naturally, a compound semiconductor device having a design in which the distance between the source electrode and the gate electrode and the shape of the gate electrode are as designed cannot be manufactured. The above phenomenon can occur even if it is not a compound semiconductor device, as long as it is a semiconductor device including two ohmic electrodes and a gate electrode disposed between them.

  Therefore, the problem of the disclosed technique is to manufacture a gate electrode that has two ohmic electrodes and a gate electrode disposed therebetween, and does not cause a defective gate electrode formation due to fluctuations in the electron beam for forming the gate electrode. An object of the present invention is to provide a semiconductor device that can be used.

  In addition, another problem of the disclosed technique is that a semiconductor device including two ohmic electrodes and a gate electrode disposed between the two ohmic electrodes has a gate electrode formation defect caused by fluctuation of an electron beam for forming the gate electrode. An object of the present invention is to provide a method of manufacturing a semiconductor device that can be manufactured in a form that does not occur.

  In order to solve the above problems, a semiconductor device according to one embodiment of the disclosed technology is a semiconductor device in which a first ohmic electrode, a gate electrode, and a second ohmic electrode are arranged in this order on one surface of a semiconductor substrate. The distance between the first ohmic electrode and the gate electrode is shorter than the distance between the second ohmic electrode and the gate electrode, and the first ohmic electrode is at least one corner on the side facing the gate electrode. Has a cut rectangular shape.

A semiconductor device according to another aspect of the disclosed technology is a semiconductor device in which a first ohmic electrode, a gate electrode, and a second ohmic electrode are arranged in this order on one surface of a semiconductor substrate. An active region surrounded by an inactive region on one side of the rectangular region in which the entire region of the first ohmic electrode and the entire region of the second ohmic electrode are disposed, a portion under the gate electrode, and the gate electrode An active region including a protruding portion protruding from a rectangular portion in a direction perpendicular to the arrangement direction of the electrodes, having a non-lower portion, is provided.

  In order to solve the other problems described above, a method for manufacturing a semiconductor device according to one embodiment of the disclosed technique includes a first ohmic electrode, a gate electrode, and a second ohmic electrode in this order on one surface of a semiconductor substrate. , A method of manufacturing a semiconductor device, wherein the distance between the first ohmic electrode and the gate electrode is shorter than the distance between the second ohmic electrode and the gate electrode, Forming a second ohmic electrode on the surface, forming an electrode having a rectangular shape in which at least one corner on the side facing the gate electrode is cut as the first ohmic electrode; In order to form, an electron beam drawing process performed after an electrode formation process is included.

  A method for manufacturing a semiconductor device according to another aspect of the disclosed technique is a method for manufacturing a semiconductor device including a first ohmic electrode, a gate electrode, and a second ohmic electrode. An active region, an active region surrounded by the inactive region, a rectangular portion in which the entire region of the first ohmic electrode and the entire region of the second ohmic electrode are disposed, and a portion under the gate electrode and the gate electrode Forming an active region including a protruding portion that protrudes in a direction perpendicular to the direction in which the electrodes are arranged from a rectangular portion having a non-lower portion; and on the active region formed on one surface of the substrate A step of forming the first ohmic electrode and the second ohmic electrode, and an electron beam drawing step performed to form a gate electrode having a shape crossing the rectangular portion and the protruding portion of the active region.

  If the above configuration / manufacturing procedure is employed, a semiconductor device including two ohmic electrodes and a gate electrode disposed between them is formed into a gate electrode formation defect caused by fluctuation of an electron beam for forming the gate electrode. It can be manufactured in a form that does not occur.

Sectional drawing of the semiconductor device which concerns on 1st Embodiment. Explanatory drawing of the shape and position of a source electrode with which the semiconductor device which concerns on 1st Embodiment is provided. Sectional drawing for demonstrating the manufacture procedure example of the semiconductor device which concerns on 1st Embodiment. Sectional drawing for demonstrating the manufacture procedure example of the semiconductor device which concerns on 1st Embodiment. Sectional drawing for demonstrating the manufacture procedure example of the semiconductor device which concerns on 1st Embodiment. Sectional drawing for demonstrating the manufacture procedure example of the semiconductor device which concerns on 1st Embodiment. Sectional drawing for demonstrating the manufacture procedure example of the semiconductor device which concerns on 1st Embodiment. Sectional drawing for demonstrating the manufacture procedure example of the semiconductor device which concerns on 1st Embodiment. Sectional drawing for demonstrating the manufacture procedure example of the semiconductor device which concerns on 1st Embodiment. Sectional drawing for demonstrating the manufacture procedure example of the semiconductor device which concerns on 1st Embodiment. Sectional drawing for demonstrating the manufacture procedure example of the semiconductor device which concerns on 1st Embodiment. Sectional drawing for demonstrating the manufacture procedure example of the semiconductor device which concerns on 1st Embodiment. Sectional drawing for demonstrating the manufacture procedure example of the semiconductor device which concerns on 1st Embodiment. Sectional drawing for demonstrating the manufacture procedure example of the semiconductor device which concerns on 1st Embodiment. Explanatory drawing of the structure of the semiconductor device which concerns on 2nd Embodiment. Explanatory drawing of the modification of the reason which employ | adopted the structure of FIG. 4, and the semiconductor device which concerns on 2nd Embodiment. Explanatory drawing of the structure of the semiconductor device which concerns on 3rd Embodiment. Sectional drawing of the semiconductor device which concerns on 3rd Embodiment. Explanatory drawing of the basic composition of a semiconductor device, and an electron beam operation location. The SEM photograph for demonstrating the phenomenon which arises at the time of gate electrode formation by electron beam drawing. Explanatory drawing of the location where the phenomenon shown in FIG. 9 occurs.

  Hereinafter, configurations and manufacturing procedures of three types of semiconductor devices developed by the inventors (hereinafter referred to as semiconductor devices 1 to 3 according to the first to third embodiments) will be described in detail with reference to the drawings.

<< First Embodiment >>
FIG. 1 is a cross-sectional view of the semiconductor device 1 according to the first embodiment in the middle of manufacture. 1 and the drawings used in the following description schematically show the configuration of the semiconductor device 1 (or the semiconductor devices 2 and 3) (the size and position of each part are appropriately changed). In addition, the size of each part in each figure is not matched. Further, in some drawings, the reference numeral “10” is omitted in order to avoid complication.

  As shown in FIG. 1, the semiconductor device 1 includes a semiconductor substrate 10, a source electrode 14s, a gate electrode 20, a drain electrode 14d, and the like.

  After forming the compound semiconductor layer on the substrate 11, the semiconductor substrate 10 is surrounded by an inactive region 13 in the compound semiconductor layer (on the substrate 11) by inactivating a part of the formed compound semiconductor layer. This is a member that defines a rectangular active region 12. Although details of the semiconductor substrate 10 will be described later, a semiconductor substrate 10 in which a plurality of active regions 12 are normally defined is used as the semiconductor substrate 10 of the semiconductor device 1.

  The source electrode 14s and the drain electrode 14d are electrodes formed at both ends (left and right ends in FIG. 1) of the active region 12 so that a distance between them (so-called gate length) becomes a predetermined length.

  The gate electrode 20 is a mushroom-type electrode formed by a gate electrode forming process including an electron beam drawing process after the source electrode 14s and the drain electrode 14d are formed. The gate electrode 20 is disposed at a location near the source electrode 14 s so as to cross the portion of the active region 12 between the source electrode 14 s and the drain electrode 14 d. Note that the location near the source electrode 14s refers to the distance (interval) Lsg between the lower end side portion of the gate electrode 20 (pattern portion: hereinafter referred to as the gate electrode 20a) and the source electrode 14s. This is a portion shorter than the distance Ldg between 20a and the drain electrode 14d.

  In order to improve performance (high frequency characteristics and the like), the semiconductor device 1 is configured (manufactured) as a device having a relatively short distance Lsg (for example, 0.5 μm).

  Then, as shown in FIG. 2, the semiconductor device 1 has a position where “Lsg” has such a value, “on the gate electrode 20 side and the drawing start position side of the gate electrode forming electron beam (upper side in FIG. 2). The device is provided with a source electrode 14s ″ having a rectangular shape with corners cut obliquely.

  Before describing a specific manufacturing procedure and the like of the semiconductor device 1, the reason why the above configuration is adopted for the semiconductor device 1 will be described.

  The semiconductor device 1 is obtained as a result of earnest and research in order to realize a high-performance compound semiconductor device.

  Specifically, at the time of development of the semiconductor device 1, manufacturing a semiconductor device (using a rectangular source electrode) in which Lsg is changed is performed. As a result, as described above, when Lsg is about 0.5 μm, the gate electrode formation due to the fluctuation of the electron beam for forming the gate electrode (hereinafter simply referred to as “electron beam fluctuation”) is performed. It is known that defects frequently occur.

  It is also known that even if Lsd> Lsg, the fluctuation of the electron beam hardly occurs if Lsg = about 1.0 μm. Therefore, when the Lsg is about 0.5 μm, the fluctuation of the electron beam is the difference between the source electrode side resistance from the electron beam spot position and the drain electrode side resistance from the electron beam spot position (hereinafter referred to as resistance difference). This is considered to be a phenomenon that occurs as a result of excessively large).

  Even if Lsg is about 0.5 μm, the fluctuation of the electron beam is settled when the electron beam is manipulated for a certain length on the active region (the electron beam is manipulated linearly). (See FIGS. 9 and 10). Therefore, if the resistance difference on the drawing start position side of the electron beam is not excessively increased, it is possible to prevent the occurrence of defective gate electrode formation due to fluctuations in the electron beam even if Lsg is about 0.5 μm. Can be considered.

  If the source electrode 14 s has a shape of “a rectangular shape in which the corner on the gate electrode 20 side and the drawing start position side of the gate electrode forming electron beam is obliquely cut”, the rectangular source electrode was used. As compared with the case, the resistance difference on the drawing start position side of the electron beam can be reduced. Further, if the shape of the source electrode 14s is such a shape, even if the electron beam fluctuates somewhat in the electron beam drawing start side portion on the active region (on the resist on the active region), it does not contact the source electrode. A gate electrode can also be formed.

  Therefore, when the semiconductor device is actually manufactured based on the above viewpoint, for example, as shown in FIG. 2, the shape of the source electrode 14s is set on a right triangle with each neighboring piece being approximately 0.5 μm from one corner of the rectangle. If the shape is removed, it has been confirmed that even if Lsg is about 0.5 μm, a defective gate electrode formation does not occur. Therefore, the above configuration is adopted in the semiconductor device 1.

  As described above, it is considered to be clear from the matters described above. Here, a more specific configuration example and a manufacturing procedure example of the semiconductor device 1 according to the first embodiment will be described with reference to FIGS. 3A to 3L. I will keep it.

At the time of manufacturing the semiconductor device 1, for example, as shown in FIG. 3A, a buffer layer 12a and a GaN electron transit layer 12b are formed on a semi-insulating SiC substrate (hereinafter referred to as the SiC substrate 11) as the substrate 11. The AlGaN electron supply layer 12c and the GaN surface layer 12d are epitaxially grown sequentially by MOCVD (Metal Organic Chemical Vapor Deposition). Buffer layer 12a is a layer formed on SiC substrate 11 in order to prevent lattice defects on the surface of SiC substrate 11 from propagating to electron transit layer 12b. For example, a GaN layer is formed as the buffer layer 12a.

  Next, as schematically shown in FIG. 3B, the region where the transistor is not formed in the compound semiconductor layer (stacked body of the layers 12a to 12d) formed on the SiC substrate 11 is inactivated by Ar ion implantation. (Inactive region 13). As is apparent from the configuration of the compound semiconductor layer, the transistor formed on the substrate 11 is a so-called HEMT (High Electron Mobility Transistor).

  Thereafter, the respective parts (parts having the same shape as the electrode 14s to be formed and the electrode 14d) of the GaN surface layer 12d under the source electrode 14s and the drain electrode 14d are removed by photolithography and dry etching.

  After completion of the above process, for example, a Ti layer having a thickness of 20 nm is formed on the AlGaN electron transit layer 12c exposed by removing the GaN surface layer 12d and on the resist provided for removing the GaN surface layer 12d. A 200 nm thick Al layer is formed by vapor deposition. Then, the Ti layer and the Al layer on the resist are removed together with the resist, and then heat treatment is performed, whereby the structure shown in FIG. 3C is manufactured. That is, a structure in which the source electrode 14s and the drain electrode 14d that are in ohmic contact with the active region 12 are formed on the active region 12 of the semiconductor substrate 10 is manufactured.

  Next, as shown in FIGS. 3D and 3E, a silicon nitride film 15 as an insulating film and a resist layer 16 for electron beam lithography are sequentially formed on the structure. Then, after applying an antistatic agent on the resist layer 16, electron beam exposure and development are performed, whereby an opening having a width of about 0.1 μm is formed in the portion of the resist layer 16 where the gate electrode 20a is to be formed. (FIG. 3E).

Thereafter, as shown in FIG. 3F, using the resist layer 16 having the opening as a mask, the portion of the silicon nitride film 15 below the opening is removed by dry etching using SF6. Then, after the resist layer 16 is removed as shown in FIG. 3G, resist layers 16 to 18 are formed on the silicon nitride film 15 as shown in FIG. 3H. The formation of the resist layers 16 to 18 is usually performed by repeatedly applying a resist material and baking. Moreover, as the resist layer 16, for example, a PMMA (Polymethyl methacrylate) layer manufactured by Microchem is formed, and as the resist layer 17, for example, PMG manufactured by Microchem is used.
An I (Poly Methyl Glutarimide) layer is formed. Further, as the resist layer 18, for example, a ZEP520 layer manufactured by Nippon Zeon Co., Ltd. is formed.

  After the formation of the resist layers 16 to 18, an antistatic agent is applied on the resist layer 18. Then, by performing electron beam drawing (exposure) and development, an opening having a width of about 0.8 μm is formed in a portion of the resist layer 18 where the gate electrode 20 is to be formed.

Next, using the resist layer 18 having the opening as a mask, the resist layer 17 is etched with an alkaline developer, whereby the structure shown in FIG. 3I is manufactured. Then, by electron beam drawing on the resist layer 16 having the structure, a portion (a portion having a width of about 0.1 μm) on the opening of the resist layer 16 provided in the silicon nitride film 15 is exposed. In this process, the electron beam fluctuates (see FIG. 9) in a semiconductor device in which Lsg is simply narrowed.

  Thereafter, the resist layer 16 is developed, and an opening having the same width (approximately 0.1 μm width) as the opening is formed on the opening of the resist layer 16 provided in the silicon nitride film 15 (FIG. 3J).

  After the openings reaching the GaN surface layer 12d are provided in the resist layers 16 to 18 as described above, the gate metal 19 (for example, 10 nm) is formed in the openings and on the resist layer 18 as shown in FIG. 3H. Thick Ni and 300 nm Au) are deposited. Next, the gate metal 19 on the resist layer 18 is removed together with the resist layers 16 to 18 using a heated organic solvent, and the source electrode 14s and the drain electrode 14d are formed on the active region 12 as shown in FIG. 3L. And the structure (the semiconductor device 1 in the middle of manufacture) in which the gate electrode 20 is formed is formed.

  Thereafter, a process for forming an interlayer insulating film, contact holes, wirings, and the like is performed, and the manufacture of the semiconductor device 1 is completed.

<< Second Embodiment >>
Hereinafter, the configuration of the semiconductor device 2 according to the second embodiment will be described with reference to FIG.

  The semiconductor device 2 is also a device composed of the same components as the semiconductor device 1 (the semiconductor substrate 10 including the active region 12, the source electrode 14s, the drain electrode 14d, and the like). However, the semiconductor device 2 is manufactured using the semiconductor substrate 10 in which the active region 12 having a shape as shown in FIG. 4 is defined.

  That is, when the semiconductor device 2 is manufactured, the semiconductor substrate 10 includes a rectangular portion in which the entire area of the source electrode 14s and the entire area of the drain electrode 14d are arranged, and an electron beam drawing start direction from the rectangular portion (see FIG. 4), an active region 12 "including a protruding portion 12a protruding about 5 μm, for example, is provided. It should be noted that the width (length in the left-right direction in FIG. 4) and position of the protruding portion 12a of the active region 12 are normally set so as not to protrude to the drain electrode 14d side from below the gate electrode 20a, and the source electrode 14s. The amount of protrusion to the side is determined to be longer than Lsg (for example, 1 μm).

  Then, in the semiconductor device 2, the rectangular source electrode 14 s and drain electrode 14 d and the mushroom gate electrode 20 are formed on the semiconductor substrate 10 having the active region 12 having such a shape in the same procedure as the semiconductor device 1. (See FIG. 1).

  That is, as already explained, the fluctuation of the electron beam is considered to be a phenomenon that occurs as a result of the resistance difference becoming excessively large. However, “even if Lsg is about 0.5 μm, if the electron beam is manipulated to a certain length on the active region, the fluctuation of the electron beam is reduced”, the source electrode 14s and the drain electrode The portion where the electron beam is irradiated before the portion between 14d (hereinafter referred to as the previous portion) is slightly reduced in resistance, thereby causing a defective formation of the gate electrode due to fluctuation of the electron beam. It is conceivable that this can be prevented.

  For this purpose, as schematically shown in FIG. 5, the protruding portion 12a of the active region 12 is formed so as to protrude from both the source electrode 14s side and the drain electrode 14d side from below the gate electrode 20a. It is also possible. However, when the protruding portion 12a has such a shape, the current flowing under the protruding portion 12a is included in the current flowing between the source electrode 14s and the drain electrode 14d. The phase / intensity of the current flowing under the protruding portion 12a is different from the current flowing through the other portions. Therefore, it is better to adopt the configuration shown in FIG. 4 where almost no such current flows. Thus, a semiconductor device with high performance can be obtained.

  Actually, when the semiconductor device 2 was manufactured so that the protruding portion 12a protrudes only on the source electrode 14s side, for example, as shown in FIG. 4, the protruding length of the protruding portion 12a (projected upward in FIG. 4). It was confirmed that when the Lsg was about 0.5 μm, no defective gate electrode formation occurred. Therefore, the above configuration is adopted for the semiconductor device 2.

<< Third Embodiment >>
Hereinafter, the configuration of the semiconductor device 3 according to the third embodiment will be described with reference to FIGS. FIG. 6 is a top view of the semiconductor device 3 in which the upper part of the gate electrode 20 and the silicon nitride film 15 are not shown. 7 is a cross-sectional view of a portion of the semiconductor device 3 indicated by AA ′ in FIG.

  Similar to the semiconductor device 1, the semiconductor device 3 also includes the “source electrode 14s having a rectangular shape in which the corner on the gate electrode 20 side and the drawing start position side of the gate electrode forming electron beam is obliquely cut”. Device.

  However, as shown in FIGS. 6 and 7, the source electrode 14s included in the semiconductor device 3 has a length in the direction perpendicular to the gate length direction (length in the vertical direction in FIG. 6) than that of the drain electrode 14d. Also, it is long by a predetermined length (for example, about 1 μm). The semiconductor device 3 is a device manufactured such that the end of the source electrode 14 s having such a shape on the side where the corner is cut is located on the inactive region 13.

  In other words, this semiconductor device 3 has a source electrode-side resistance in a former stage portion (a portion irradiated with an electron beam before a portion where the source electrode 14s and the drain electrode 14d are actually opposed at a short interval). And a region in which the drain electrode side resistance gradually changes.

  Although the specific reason is unknown (it is unknown whether the gate electrode formation failure could be prevented because the above-mentioned region was provided in the previous stage, or whether the above-mentioned region simply functions as a low-resistance region) However, even if this configuration is adopted, it has been confirmed that it is possible to prevent the occurrence of defective gate electrode formation due to fluctuations in the electron beam.

  Therefore, by adopting the configuration of the semiconductor device 3, a high-performance semiconductor device can be realized.

<Deformation>
Various modifications can be made to the semiconductor devices 1 to 3 according to the above-described embodiments. For example, for the reasons already described, it is possible to obtain a high-performance semiconductor device 2 when the configuration shown in FIG. 4 is adopted. However, the semiconductor device 2 is modified to have the configuration shown in FIG. You can also.

  The above-described techniques such as “changing the shape of the ohmic electrode closer to the gate electrode 20” and “protruding (stretching) the portion of the active region 12 closer to the gate electrode 20” are more effective for the drain electrode 14 d than for the source electrode 14 s. It can also be applied to a semiconductor device close to the gate electrode 20.

  In addition, the semiconductor device 1 can be modified to include the drain electrode 14d in which the upper left corner in FIG. 1 is cut. Such a deformation is particularly true when the distance Lsg between the source electrode 14s and the gate electrode 20a and the distance Ldg between the drain electrode 14d and the gate electrode 20a are both extremely short (for example, 0.5 μm). It is considered effective. This is because in such a case, the electron beam can fluctuate in any direction due to manufacturing errors or the like.

  Further, the semiconductor devices 1 to 3 are different from those described above in the size of each part, or different from those described above in the constituent materials (InP-based, GaN-based, SiGe-based compound semiconductor devices, compound semiconductors). Of course, the semiconductor device may be transformed into a semiconductor device that is not a device.

  As described above, the following additional notes are disclosed with respect to the disclosed technology.

(Appendix 1) A semiconductor device in which a first ohmic electrode, a gate electrode, and a second ohmic electrode are arranged in this order on one surface of a semiconductor substrate,
A distance between the first ohmic electrode and the gate electrode is shorter than a distance between the second ohmic electrode and the gate electrode;
The semiconductor device, wherein the first ohmic electrode has a rectangular shape in which at least one corner on the side facing the gate electrode is cut.

(Supplementary note 2) The supplementary note 1 is characterized in that the entire region of the first ohmic electrode and the entire region of the second ohmic electrode are disposed on an active region provided on the one surface of the semiconductor substrate. The semiconductor device described.

(Supplementary Note 3) An active region and an inactive region surrounding the active region are provided on the one surface of the semiconductor substrate so as to have a boundary parallel or perpendicular to the first direction in which the electrodes are arranged. And
A length of the first ohmic electrode in the first direction is longer than a length of the second ohmic electrode in the first direction;
An end of the first ohmic electrode in the first direction on the side where the corner is cut is disposed on the inactive region,
The remaining part of the first ohmic electrode and the entire area of the second ohmic electrode are disposed on the active region of the semiconductor substrate. The semiconductor device according to appendix 1, wherein

(Supplementary Note 4) A semiconductor device in which a first ohmic electrode, a gate electrode, and a second ohmic electrode are arranged in this order on one surface of a semiconductor substrate,
On the one surface of the semiconductor substrate,
An active region surrounded by an inactive region, wherein the entire region of the first ohmic electrode and the entire region of the second ohmic electrode are disposed; a portion under the gate electrode; and under the gate electrode An active region including a protruding portion protruding from the rectangular portion in a direction perpendicular to the direction in which the electrodes are arranged is provided.

(Supplementary Note 5) A distance between the first ohmic electrode and the gate electrode is shorter than a distance between the second ohmic electrode and the gate electrode.
The protruding portion of the active region is
The semiconductor device according to appendix 4, wherein the semiconductor device includes a portion under the gate electrode and a portion closer to the first ohmic electrode than the gate electrode.

(Supplementary note 6) The semiconductor device according to any one of supplementary notes 1 to 5, wherein the active region is made of a nitride semiconductor.

(Supplementary Note 7) A first ohmic electrode, a gate electrode, and a second ohmic electrode are arranged on one surface of the semiconductor substrate in this order, and the distance between the first ohmic electrode and the gate electrode is the second ohmic. A method of manufacturing a semiconductor device arranged to be shorter than a distance between an electrode and the gate electrode,
The second ohmic electrode is formed on the one surface of the semiconductor substrate, and an electrode having a rectangular shape in which at least one corner on the side facing the gate electrode is cut as the first ohmic electrode. An electrode forming step to be formed;
An electron beam drawing process performed after the electrode forming process to form a gate electrode;
A method for manufacturing a semiconductor device, comprising:

(Supplementary Note 8) A method of manufacturing a semiconductor device including a first ohmic electrode, a gate electrode, and a second ohmic electrode,
On one surface of the substrate, an inactive region, an active region surrounded by the inactive region, a rectangular portion in which the entire region of the first ohmic electrode and the entire region of the second ohmic electrode are disposed, And forming an active region including a protruding portion that protrudes in a direction perpendicular to the alignment direction of the electrodes from the rectangular portion including a portion that is under the gate electrode and a portion that is not under the gate electrode;
Forming the first ohmic electrode and the second ohmic electrode on the active region formed on the one surface of the substrate;
An electron beam drawing step performed to form the gate electrode having a shape crossing the rectangular portion and the protruding portion of the active region;
A method for manufacturing a semiconductor device, comprising:

(Supplementary note 9) a semiconductor substrate;
Two ohmic electrodes each having a rectangular shape with at least one corner cut, and two ohmic electrodes arranged on one surface of the semiconductor substrate at a predetermined interval so that the cut corners face each other Electrodes,
A gate electrode disposed in a gap portion between the two ohmic electrodes on the one surface of the semiconductor substrate;
A semiconductor device comprising:

1, 2, 3 Semiconductor device 10 Semiconductor substrate 11 Substrate 12 Active region 12a Buffer layer 12b GaN electron transit layer 12c AlGaN electron supply layer 12d GaN surface layer 13 Inactive region 14s Source electrode 14d Drain electrode 15 Silicon nitride films 16, 17, 18 Resist layer 19 Gate metal 20 Gate electrode

Claims (4)

A semiconductor device in which a first ohmic electrode, a gate electrode, and a second ohmic electrode are arranged in this order on one surface of a semiconductor substrate,
The distance between the gate electrode and the first ohmic electrode is shorter than the distance between the second ohmic electrode and the gate electrode,
Said first ohmic electrode, have a rectangular shape corners of hand on the side facing the gate electrode is cut,
On one surface of the semiconductor substrate, an active region and an inactive region surrounding the active region are provided so as to have a boundary parallel or perpendicular to a first direction which is a longitudinal direction of each electrode,
A length of the first ohmic electrode in the first direction is longer than a length of the second ohmic electrode in the first direction;
The end of the first ohmic electrode in the first direction on the side where the corner is cut is disposed on the inactive region,
The remaining portion of the first ohmic electrode and the entire area of the second ohmic electrode are disposed on the active region,
In order to form the gate electrode, the inactive region on the side where the corner in the first direction of the first ohmic electrode is cut is used as the electron beam drawing start position in the first direction of the first ohmic electrode. The operation of the electron beam is performed toward the side where the corner is not cut,
A semiconductor device. A semiconductor device in which a first ohmic electrode, a gate electrode, and a second ohmic electrode are arranged in this order on one surface of a semiconductor substrate,
On one surface of the semiconductor substrate,
A active region surrounded by inert regions, and the first rectangular portion whole of the whole and the second ohmic electrode of the first ohmic electrode is disposed, the portion and the gate electrode to be below the gate electrode including a portion that does not become lower, and the active region including a projecting portion projecting in a direction perpendicular to the longitudinal direction of each electrode from the second rectangular portion is provided,
The distance between the first ohmic electrode and the gate electrode is such that the second ohmic electrode
Shorter than the distance between the gate electrode,
The protruding portion of the active region has a portion that is under the gate electrode, and a portion that is closer to the first ohmic electrode than the gate electrode,
In order to form the gate electrode having a shape crossing the second rectangular portion and the protruding portion of the active region, the protruding portion of the active region is used as an electron beam drawing start position, and the second of the active region is formed. The manipulation of the electron beam is performed toward the portion under the gate electrode in the rectangular portion,
A semiconductor device. On one surface of the semiconductor substrate, a first ohmic electrode, a gate electrode and a second ohmic electrode, in this order, the distance between the first ohmic electrode and the gate electrode, the said second ohmic electrode gate A first direction in which an active region and an inactive region surrounding the active region are arranged on one surface of the semiconductor substrate so as to be shorter than a distance between the electrodes, and are a longitudinal direction of each electrode A method of manufacturing a semiconductor device provided to have a boundary parallel or perpendicular to
On one surface of the semiconductor substrate, thereby forming the second ohmic electrode, forming the a first ohmic electrode, the electrode having a rectangular shape with corners being cut hand on the side facing the gate electrode An electrode forming step,
To form the gate electrode, after the electrode forming step, the inactive region in the first side direction of the corner has been cut of the first ohmic electrode as a drawing start position of the electron beam, the first ohmic An electron beam drawing step in which the operation of the electron beam is performed toward the side where the corners in the first direction of the electrode are not cut ;
Only including,
A length of the first ohmic electrode in the first direction is longer than a length of the second ohmic electrode in the first direction;
The end of the first ohmic electrode in the first direction on the side where the corner is cut is disposed on the inactive region,
A method for manufacturing a semiconductor device, wherein the remaining portion of the first ohmic electrode and the entire area of the second ohmic electrode are disposed on the active region of the semiconductor substrate . A first ohmic electrode, a gate electrode, and a second ohmic electrode are arranged on one surface of the semiconductor substrate, and the distance between the first ohmic electrode and the gate electrode in this order is the second ohmic electrode and the gate. A method for manufacturing a semiconductor device arranged to be shorter than a distance between electrodes ,
On one surface of said semiconductor substrate, and an inert region, wherein a active region surrounded by inert regions, first the entire region of the entire region and the second ohmic electrode of the first ohmic electrode is arranged rectangular section, as well, the active region including a protruding portion protruding in a direction perpendicular from the second rectangular portion with a portion of the not a portion serving and the gate electrode under the under the gate electrode in the longitudinal direction of each electrode Forming a process; and
On the active region, forming a first ohmic electrode and the second ohmic electrode,
To form the gate electrode of the shape transverse to the second rectangular portion and the projecting portion of the active region, the projecting portion of the active region as a drawing start position of the electron beam, the second quadrature of the active region An electron beam drawing process in which the electron beam is steered toward a portion under the gate electrode in the shape portion ;
Only including,
The method of manufacturing a semiconductor device, wherein the protruding portion of the active region includes a portion under the gate electrode and a portion closer to the first ohmic electrode than the gate electrode .

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