JP5664673B2 - Resin paste composition - Google Patents

Resin paste composition Download PDF

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Publication number
JP5664673B2
JP5664673B2 JP2013013193A JP2013013193A JP5664673B2 JP 5664673 B2 JP5664673 B2 JP 5664673B2 JP 2013013193 A JP2013013193 A JP 2013013193A JP 2013013193 A JP2013013193 A JP 2013013193A JP 5664673 B2 JP5664673 B2 JP 5664673B2
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JP
Japan
Prior art keywords
paste composition
resin paste
meth
silver powder
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013013193A
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Japanese (ja)
Other versions
JP2014145011A (en
Inventor
愉加吏 井上
愉加吏 井上
賢 藤田
賢 藤田
山田　和彦
和彦 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Showa Denko Materials Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd, Showa Denko Materials Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP2013013193A priority Critical patent/JP5664673B2/en
Priority to CN201380039424.2A priority patent/CN104487530B/en
Priority to PCT/JP2013/058136 priority patent/WO2014115343A1/en
Priority to TW102110572A priority patent/TWI600743B/en
Publication of JP2014145011A publication Critical patent/JP2014145011A/en
Application granted granted Critical
Publication of JP5664673B2 publication Critical patent/JP5664673B2/en
Active legal-status Critical Current
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J9/00—Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
    • C09J9/02—Electrically-conducting adhesives
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D4/00—Coating compositions, e.g. paints, varnishes or lacquers, based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; Coating compositions, based on monomers of macromolecular compounds of groups C09D183/00 - C09D183/16
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    • H01L2924/151—Die mounting substrate
    • H01L2924/156—Material
    • H01L2924/157—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2924/15738—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
    • H01L2924/15747—Copper [Cu] as principal constituent

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Description

本発明は、樹脂ペースト組成物に関するものである。   The present invention relates to a resin paste composition.

従来、半導体装置に用いられるダイボンディング材としては、Ａｕ−Ｓｉ共晶、半田、樹脂ペースト組成物などが知られているが、作業性及びコストの点から樹脂ペースト組成物が広く使用されている。   Conventionally, Au—Si eutectic, solder, resin paste composition, and the like are known as die bonding materials used in semiconductor devices, but resin paste compositions are widely used in terms of workability and cost. .

一般に、半導体装置は半導体チップなどの素子をダイボンディング材によりリードフレームなどの支持部材に接着して製造している。ダイボンディング材には、半導体素子とリードフレームなどの支持部材とを接着する高い接着強度が要求される一方、それらの熱膨張率の差から生じるストレスを吸収する性能も要求される。高い接着強度と同時に、熱膨張率の差に起因する反りの発生の低減を実現するため、特許文献１のようなエポキシ樹脂とアクリル樹脂とのハイブリッドの樹脂系の樹脂ペースト組成物が提案されている。   Generally, a semiconductor device is manufactured by adhering an element such as a semiconductor chip to a support member such as a lead frame with a die bonding material. The die bonding material is required to have a high bonding strength for bonding the semiconductor element and a support member such as a lead frame, while also being required to absorb the stress caused by the difference in their thermal expansion coefficients. In order to realize a reduction in warpage due to a difference in thermal expansion coefficient at the same time as a high adhesive strength, a hybrid resin-based resin paste composition of an epoxy resin and an acrylic resin as in Patent Document 1 has been proposed. Yes.

ところで、半導体チップなどの半導体素子は、高集積化及び微細化に伴い電気伝導性、熱伝導性など、特性の高信頼性が要求されている。そのため、ダイボンディング材に用いられる樹脂ペースト組成物にも、接着強度に加えて、電気伝導性や熱伝導性が求められる。このような性能を樹脂ペースト組成物に付与するため、導電性フィラーとしては、例えば金粉、銀粉、銅粉などの金属粉を使用することが考えられており、現在では銀粉を用いた樹脂ペースト組成物が主に用いられている。銀粉は、金粉ほどの希少価値ではなく、銅粉のように酸化されやすく保存安定性に劣るものでもなく、さらに作業性や機械特性に優れ、樹脂ペースト組成物に要求される諸特性も優れているからである。   By the way, semiconductor elements such as semiconductor chips are required to have high reliability in characteristics such as electrical conductivity and thermal conductivity along with high integration and miniaturization. Therefore, the resin paste composition used for the die bonding material is required to have electrical conductivity and thermal conductivity in addition to the adhesive strength. In order to impart such performance to the resin paste composition, it is considered to use, for example, metal powder such as gold powder, silver powder, and copper powder as the conductive filler, and at present, a resin paste composition using silver powder. Things are mainly used. Silver powder is not as rare as gold powder, it is not easily oxidized and inferior in storage stability like copper powder, and it has excellent workability and mechanical properties, as well as various properties required for resin paste compositions. Because.

しかし、銀粉も貴金属であり、希少価値が高く高価な材料であることから、樹脂ペースト組成物に用いられる導電性フィラーとして、銀粉と、より入手の容易で安価な他の導電性フィラーとを併用したものの開発が行われている。   However, since silver powder is also a precious metal and is a rare and expensive material, silver powder is used in combination with other easily available and inexpensive conductive fillers as conductive fillers used in resin paste compositions. Development of what has been done.

そこで、より入手が容易で安価な他の導電性フィラーとして、安定性、導電性の観点からアルミニウム粉を選定し、銀粉と併用することが検討されている（特許文献２参照）。しかし、特許文献２に記載される金属含有ペーストは、アルミニウムの金属粉末と銀などの金属粉末との体積比は５：９５〜４０：６０と、銀などの金属粉末の使用量を十分に減らしているとはいえないものである。また、ペースト中の銀粉の量を極端に削減した場合、従来の銀粉を含有する樹脂ペースト組成物と比較して同等以上の特性を有するといえるものでもない。このように、ペースト中の銀粉の量を削減しつつも、従来の銀粉を多く含有する従来の樹脂ペースト組成物と同等以上の特性を有する樹脂ペースト組成物は得られていない現状にある。   Therefore, as other conductive fillers that are easier to obtain and less expensive, it has been studied to select aluminum powder from the viewpoint of stability and conductivity and use it together with silver powder (see Patent Document 2). However, in the metal-containing paste described in Patent Document 2, the volume ratio of the metal powder of aluminum and the metal powder such as silver is 5:95 to 40:60, and the amount of metal powder such as silver is sufficiently reduced. It cannot be said that it is. Moreover, when the quantity of the silver powder in a paste is reduced extremely, it cannot be said that it has the characteristic more than equivalent compared with the resin paste composition containing the conventional silver powder. Thus, while reducing the amount of silver powder in the paste, a resin paste composition having characteristics equal to or higher than that of a conventional resin paste composition containing a large amount of conventional silver powder has not been obtained.

特開２００２−１２７３８号公報JP 2002-12738 A 特許第４５６９１０９号公報Japanese Patent No. 4569109

本発明は、半導体チップなどの導体素子とリードフレームなどの支持部材との接着に好適に用いられ、希少価値が高く高価な材料である銀の使用量を低減しつつ、電気導電性、熱伝導性及び接着性に優れ、かつ塗布作業性、機械特性にも優れる安価な樹脂ペースト組成物、及び該樹脂ペースト組成物を用いた半導体装置を提供することを目的とする。   The present invention is suitably used for bonding a conductive element such as a semiconductor chip and a support member such as a lead frame, and reduces the amount of silver, which is a rare and expensive material, while maintaining electrical conductivity and thermal conductivity. An object of the present invention is to provide an inexpensive resin paste composition that is excellent in properties and adhesiveness, and excellent in coating workability and mechanical properties, and a semiconductor device using the resin paste composition.

本発明者らは、前記課題を解決するために鋭意研究を重ねた結果、下記の発明により解決できることを見出した。すなわち本発明は、下記の樹脂ペースト組成物、及び該樹脂ペースト組成物を用いた半導体装置を提供するものである。   As a result of intensive studies to solve the above-mentioned problems, the present inventors have found that the problem can be solved by the following invention. That is, the present invention provides the following resin paste composition and a semiconductor device using the resin paste composition.

１．（Ａ）（メタ）アクリル化合物、（Ｂ）バインダー樹脂、（Ｃ）アミン化合物、（Ｄ）重合開始剤、（Ｅ）可とう化剤、（Ｆ）銀粉、及び（Ｇ）アルミニウム粉を含有する樹脂ペースト組成物であって、該樹脂ペースト組成物中の（Ｆ）銀粉の含有量は４０質量％以下であり、該（Ｇ）アルミニウム粉／該（Ｆ）銀粉の質量比が０．８〜３．５であり、該（Ｆ）銀粉がタップ密度２．５ｇ／１００ｃｍ3以下である第１の銀粉を含有し、かつ該樹脂ペースト組成物中の該第１の銀粉の含有量が５質量％以上である導体素子接着用樹脂ペースト組成物。
２．さらに、（Ｈ）カップリング剤を含む上記１に記載の導体素子接着用樹脂ペースト組成物。
３．半導体素子と支持部材とが、上記１又は２に記載の導体素子接着用樹脂ペースト組成物の硬化物により接合され、かつ該半導体素子と該支持部材の少なくとも一部とが封止剤により封止されてなる半導体装置。 1. (A) (meth) acryl compound, (B) binder resin, (C) amine compound, (D) polymerization initiator, (E) flexible agent, (F) silver powder, and (G) aluminum powder It is a resin paste composition, Comprising: Content of (F) silver powder in this resin paste composition is 40 mass% or less, Mass ratio of this (G) aluminum powder / this (F) silver powder is 0.8- 3.5, the (F) silver powder contains the first silver powder having a tap density of 2.5 g / 100 cm 3 or less, and the content of the first silver powder in the resin paste composition is 5 mass. % Resin element paste composition for bonding conductive elements.
2. Furthermore, the resin paste composition for conductor element adhesion of said 1 containing (H) coupling agent.
3. The semiconductor element and the support member are joined by a cured product of the resin paste composition for bonding a conductor element described in 1 or 2 above, and the semiconductor element and at least a part of the support member are sealed with a sealant A semiconductor device.

本発明によれば、半導体チップなどの導体素子とリードフレームなどの支持部材との接着に好適に用いられ、希少価値が高く高価な材料である銀の使用量を低減しつつ、電気導電性、熱伝導性及び接着性に優れ、かつ塗布作業性、機械特性にも優れる安価な樹脂ペースト組成物、及び該樹脂ペースト組成物を用いた半導体装置が得られる。   According to the present invention, it is suitably used for adhesion between a conductor element such as a semiconductor chip and a support member such as a lead frame, while reducing the amount of silver used, which is a rare and expensive material, electric conductivity, An inexpensive resin paste composition excellent in thermal conductivity and adhesiveness and excellent in application workability and mechanical properties, and a semiconductor device using the resin paste composition are obtained.

樹脂ペースト組成物に用いたアルミニウム粉の粒子の外観を示す電子顕微鏡写真である。It is an electron micrograph which shows the external appearance of the particle | grains of the aluminum powder used for the resin paste composition. 体積抵抗率を測定するための試料の作製手順（ａ）〜（ｄ）を説明するための模式図である。It is a schematic diagram for demonstrating the preparation procedures (a)-(d) of the sample for measuring volume resistivity.

〔導体素子接着用樹脂ペースト組成物〕
本発明の導体素子接着用樹脂ペースト組成物は、（Ａ）（メタ）アクリル化合物、（Ｂ）バインダー樹脂、（Ｃ）アミン化合物、（Ｄ）重合開始剤、（Ｅ）可とう化剤、（Ｆ）銀粉、及び（Ｇ）アルミニウム粉を含有する樹脂ペースト組成物であって、該樹脂ペースト組成物中の（Ｆ）銀粉の含有量は４０質量％以下であり、該（Ｇ）アルミニウム粉／該（Ｆ）銀粉の質量比が０．８〜３．５であり、該（Ｆ）銀粉がタップ密度２．５ｇ／１００ｃｍ3以下である第１の銀粉を含有し、かつ該樹脂ペースト組成物中の該第１の銀粉の含有量が５質量％以上である導体素子接着用樹脂ペースト組成物である。以下、各成分について説明する。 [Resin paste composition for bonding conductive elements]
The resin paste composition for bonding conductive elements of the present invention comprises (A) (meth) acrylic compound, (B) binder resin, (C) amine compound, (D) polymerization initiator, (E) flexible agent, ( A resin paste composition containing F) silver powder and (G) aluminum powder, wherein the content of (F) silver powder in the resin paste composition is 40% by mass or less, and (G) aluminum powder / The mass ratio of the (F) silver powder is 0.8 to 3.5, the (F) the silver powder contains a first silver powder having a tap density of 2.5 g / 100 cm 3 or less, and the resin paste composition It is the resin paste composition for conductor element adhesion whose content of this 1st silver powder in it is 5 mass% or more. Hereinafter, each component will be described.

（Ａ）（メタ）アクリル化合物は、該化合物中に（メタ）アクリロイル基を有する化合物であれば特に制限はなく、好ましくは該化合物中に１個以上の（メタ）アクリロイルオキシ基を有する（メタ）アクリル酸エステル化合物であることが好ましい。このような（メタ）アクリル化合物としては、以下の一般式（Ｉ）〜（Ｘ）で表される化合物が好ましく挙げられる。   The (A) (meth) acrylic compound is not particularly limited as long as it is a compound having a (meth) acryloyl group in the compound, and preferably has at least one (meth) acryloyloxy group in the compound (meth) ) An acrylic ester compound is preferred. Preferred examples of such (meth) acrylic compounds include compounds represented by the following general formulas (I) to (X).

一般式（Ｉ）中、Ｒ1は水素又はメチル基を表し、Ｒ2は炭素数１〜１００、好ましくは炭素数１〜３６の２価の脂肪族又は環状構造を持つ脂肪族炭化水素基を表す。 In the general formula (I), R 1 represents hydrogen or a methyl group, and R 2 represents an aliphatic hydrocarbon group having a divalent aliphatic or cyclic structure having 1 to 100 carbon atoms, preferably 1 to 36 carbon atoms. Represent.

一般式（Ｉ）で表される（メタ）アクリル化合物としては、メチル（メタ）アクリレート、エチル（メタ）アクリレート、ｎ−プロピル（メタ）アクリレート、イソプロピル（メタ）アクリレート、ｎ−ブチル（メタ）アクリレート、イソブチル（メタ）アクリレート、ｔ−ブチル（メタ）アクリレート、アミル（メタ）アクリレート、イソアミル（メタ）アクリレート、ヘキシル（メタ）アクリレート、ヘプチル（メタ）アクリレート、オクチル（メタ）アクリレート、２−エチルヘキシル（メタ）アクリレート、ノニル（メタ）アクリレート、デシル（メタ）アクリレート、イソデシル（メタ）アクリレート、ラウリル（メタ）アクリレート、トリデシル（メタ）アクリレート、ヘキサデシル（メタ）アクリレート、ステアリル（メタ）アクリレート、イソステアリル（メタ）アクリレート、シクロヘキシル（メタ）アクリレート、イソボルニル（メタ）アクリレート、トリシクロ［５．２．１．０2,6］デシル（メタ）アクリレート、２−（トリシクロ）［５．２．１．０2,6］デカ−３−エン−８又は９−イルオキシエチル（メタ）アクリレートなどの（メタ）アクリレート化合物が好ましく挙げられる。 Examples of the (meth) acrylic compound represented by the general formula (I) include methyl (meth) acrylate, ethyl (meth) acrylate, n-propyl (meth) acrylate, isopropyl (meth) acrylate, and n-butyl (meth) acrylate. , Isobutyl (meth) acrylate, t-butyl (meth) acrylate, amyl (meth) acrylate, isoamyl (meth) acrylate, hexyl (meth) acrylate, heptyl (meth) acrylate, octyl (meth) acrylate, 2-ethylhexyl (meth) ) Acrylate, nonyl (meth) acrylate, decyl (meth) acrylate, isodecyl (meth) acrylate, lauryl (meth) acrylate, tridecyl (meth) acrylate, hexadecyl (meth) acrylate, stearyl (meth) Acrylate, isostearyl (meth) acrylate, cyclohexyl (meth) acrylate, isobornyl (meth) acrylate, tricyclo [5.2.1.0 2, 6] decyl (meth) acrylate, 2- (tricyclo) [5.2. 1.0 2,6 ] Deca-3-ene-8 or 9-yloxyethyl (meth) acrylate and other (meth) acrylate compounds are preferred.

一般式（ＩＩ）中、Ｒ1及びＲ2はそれぞれ前記のものと同じである。 In general formula (II), R 1 and R 2 are the same as defined above.

一般式（ＩＩ）で表される（メタ）アクリル化合物としては、２−ヒドロキシエチル（メタ）アクリレート、２−ヒドロキシプロピル（メタ）アクリレート、ダイマージオールモノ（メタ）アクリレートなどの（メタ）アクリレート化合物が好ましく挙げられる。   Examples of the (meth) acrylic compound represented by the general formula (II) include (meth) acrylate compounds such as 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, and dimer diol mono (meth) acrylate. Preferably mentioned.

一般式（ＩＩＩ）中、Ｒ1は前記のものと同じであり、Ｒ3は水素、メチル基又はフェノキシメチル基を表し、Ｒ4は水素、炭素数１〜６のアルキル基、フェニル基又はベンゾイル基を表し、ｎは１〜５０の整数を表す。 In general formula (III), R 1 is the same as described above, R 3 represents hydrogen, a methyl group or a phenoxymethyl group, R 4 represents hydrogen, an alkyl group having 1 to 6 carbon atoms, a phenyl group or benzoyl. Represents a group, and n represents an integer of 1 to 50.

一般式（ＩＩＩ）で表される（メタ）アクリル化合物としては、ジエチレングリコール（メタ）アクリレート、ポリエチレングリコール（メタ）アクリレート、ポリプロピレングリコール（メタ）アクリレート、２−メトキシエチル（メタ）アクリレート、２−エトキシエチル（メタ）アクリレート、２−ブトキシエチル（メタ）アクリレート、メトキシジエチレングリコール（メタ）アクリレート、メトキシポリエチレングリコール（メタ）アクリレート、２−フェノキシエチル（メタ）アクリレート、フェノキシジエチレングリコール（メタ）アクリレート、フェノキシポリエチレングリコール（メタ）アクリレート、２−ベンゾイルオキシエチル（メタ）アクリレート、２−ヒドロキシ−３−フェノキシプロピル（メタ）アクリレートなどの（メタ）アクリレート化合物が好ましく挙げられる。   Examples of the (meth) acrylic compound represented by the general formula (III) include diethylene glycol (meth) acrylate, polyethylene glycol (meth) acrylate, polypropylene glycol (meth) acrylate, 2-methoxyethyl (meth) acrylate, and 2-ethoxyethyl. (Meth) acrylate, 2-butoxyethyl (meth) acrylate, methoxydiethylene glycol (meth) acrylate, methoxypolyethylene glycol (meth) acrylate, 2-phenoxyethyl (meth) acrylate, phenoxydiethylene glycol (meth) acrylate, phenoxypolyethylene glycol (meta ) Acrylate, 2-benzoyloxyethyl (meth) acrylate, 2-hydroxy-3-phenoxypropyl (meth) acrylate Which (meth) acrylate compound can preferably be cited.

一般式（ＩＶ）中、Ｒ1は前記のものと同じであり、Ｒ5はフェニル基、ニトリル基、−Ｓｉ（ＯＲ6）3（Ｒ6は炭素数１〜６のアルキル基を表す）又は下記の式で表される１価の基を表す。 In general formula (IV), R 1 is the same as described above, R 5 is a phenyl group, a nitrile group, —Si (OR 6 ) 3 (R 6 represents an alkyl group having 1 to 6 carbon atoms) or Represents a monovalent group represented by the following formula.

ここで、Ｒ7、Ｒ8及びＲ9はそれぞれ独立に水素又は炭素数１〜６のアルキル基を表し、Ｒ10は水素又は炭素数１〜６のアルキル基又はフェニル基を表し、ｍは０、１、２又は３の数を表す。 Here, R 7 , R 8 and R 9 each independently represent hydrogen or an alkyl group having 1 to 6 carbon atoms, R 10 represents hydrogen, an alkyl group having 1 to 6 carbon atoms or a phenyl group, and m is 0. , 1, 2 or 3.

一般式（ＩＶ）で表される（メタ）アクリル化合物としては、ベンジル（メタ）アクリレート、２−シアノエチル（メタ）アクリレート、γ−（メタ）アクリロキシプロピルトリメトキシシラン、グリシジル（メタ）アクリレート、テトラヒドロフルフリル（メタ）アクリレート、テトラヒドロピラニル（メタ）アクリレート、ジメチルアミノエチル（メタ）アクリレート、ジエチルアミノエチル（メタ）アクリレート、１，２，２，６，６−ペンタメチルピペリジニル（メタ）アクリレート、２，２，６，６−テトラメチルピペリジニル（メタ）アクリレート、（メタ）アクリロキシエチルホスフェート、（メタ）アクリロキシエチルフェニルアシッドホスフェート、β−（メタ）アクリロイルオキシエチルハイドロジェンフタレート、β−（メタ）アクリロイルオキシエチルハイドロジェンサクシネートなどの（メタ）アクリレート化合物が好ましく挙げられる。   Examples of the (meth) acrylic compound represented by the general formula (IV) include benzyl (meth) acrylate, 2-cyanoethyl (meth) acrylate, γ- (meth) acryloxypropyltrimethoxysilane, glycidyl (meth) acrylate, tetrahydro Furfuryl (meth) acrylate, tetrahydropyranyl (meth) acrylate, dimethylaminoethyl (meth) acrylate, diethylaminoethyl (meth) acrylate, 1,2,2,6,6-pentamethylpiperidinyl (meth) acrylate, 2,2,6,6-tetramethylpiperidinyl (meth) acrylate, (meth) acryloxyethyl phosphate, (meth) acryloxyethyl phenyl acid phosphate, β- (meth) acryloyloxyethyl hydrogen phthalate, β- Meth) acryloyl and oxyethyl hydrogen succinate (meth) acrylate compound can preferably be cited.

一般式（Ｖ）中、Ｒ1及びＲ2はそれぞれ前記のものと同じである。 In general formula (V), R 1 and R 2 are the same as defined above.

一般式（Ｖ）で表される化合物としては、エチレングリコールジ（メタ）アクリレート、１，４−ブタンジオールジ（メタ）アクリレート、１，６−ヘキサンジオールジ（メタ）アクリレート、１，９−ノナンジオールジ（メタ）アクリレート、１，３−ブタンジオールジ（メタ）アクリレート、ネオペンチルグリコールジ（メタ）アクリレート、ダイマージオールジ（メタ）アクリレート、ジメチロールトリシクロデカンジ（メタ）アクリレートなどのジ（メタ）アクリレート化合物が好ましく挙げられる。   Examples of the compound represented by the general formula (V) include ethylene glycol di (meth) acrylate, 1,4-butanediol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, and 1,9-nonane. Di (di) (meth) acrylate, 1,3-butanediol di (meth) acrylate, neopentyl glycol di (meth) acrylate, dimer diol di (meth) acrylate, dimethylol tricyclodecane di (meth) acrylate and other di (meth) acrylates Preferred are meth) acrylate compounds.

一般式（ＶＩ）中、Ｒ1、Ｒ3及びｎはそれぞれ前記のものと同じである。ただし、Ｒ3が水素又はメチル基であるとき、ｎは１ではない。 In general formula (VI), R 1 , R 3 and n are the same as defined above. However, n is not 1 when R 3 is hydrogen or a methyl group.

一般式（ＶＩ）で表される化合物としては、ジエチレングリコールジ（メタ）アクリレート、トリエチレングリコールジ（メタ）アクリレート、テトラエチレングリコールジ（メタ）アクリレート、ポリエチレングリコールジ（メタ）アクリレート、トリプロピレングリコールジ（メタ）アクリレート、ポリプロピレングリコールジ（メタ）アクリレートなどのジ（メタ）アクリレート化合物が好ましく挙げられる。   Examples of the compound represented by the general formula (VI) include diethylene glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, tetraethylene glycol di (meth) acrylate, polyethylene glycol di (meth) acrylate, and tripropylene glycol di Preferred are di (meth) acrylate compounds such as (meth) acrylate and polypropylene glycol di (meth) acrylate.

一般式（ＶＩＩ）中、Ｒ1は前記のものと同じであり、Ｒ11及びＲ12はそれぞれ独立に水素又はメチル基を表す。 In general formula (VII), R 1 is the same as described above, and R 11 and R 12 each independently represent hydrogen or a methyl group.

一般式（ＶＩＩ）で表される化合物としては、ビスフェノールＡ、ビスフェノールＦ又はビスフェノールＡＤ１モルとグリシジル（メタ）アクリレート２モルとを反応させたジ（メタ）アクリレート化合物が好ましく挙げられる。   Preferred examples of the compound represented by the general formula (VII) include di (meth) acrylate compounds obtained by reacting 1 mol of bisphenol A, bisphenol F or bisphenol AD with 2 mol of glycidyl (meth) acrylate.

一般式（ＶＩＩＩ）中、Ｒ1、Ｒ11及びＲ12はそれぞれ前記のものと同じであり、Ｒ13及びＲ14はそれぞれ独立に水素又はメチル基を表し、ｐ及びｑはそれぞれ独立に１〜２０の整数を表す。 In general formula (VIII), R 1 , R 11 and R 12 are the same as defined above, R 13 and R 14 each independently represent hydrogen or a methyl group, and p and q are each independently 1 to 1 Represents an integer of 20.

一般式（ＶＩＩＩ）で表される化合物としては、ビスフェノールＡ、ビスフェノールＦ又はビスフェノールＡＤのポリエチレンオキサイド付加物のジ（メタ）アクリレート化合物が好ましく挙げられる。   Preferred examples of the compound represented by the general formula (VIII) include di (meth) acrylate compounds of polyethylene oxide adducts of bisphenol A, bisphenol F, or bisphenol AD.

一般式（ＩＸ）中、Ｒ1は前記のものを表し、Ｒ15、Ｒ16、Ｒ17及びＲ18はそれぞれ独立に水素又はメチル基を表し、ｘは１〜２０の整数を表す。 In the general formula (IX), R 1 represents the above, R 15 , R 16 , R 17 and R 18 each independently represent hydrogen or a methyl group, and x represents an integer of 1-20.

一般式（ＩＸ）で表される化合物としては、ビス（（メタ）アクリロキシプロピル）ポリジメチルシロキサン、ビス（（メタ）アクリロキシプロピル）メチルシロキサン−ジメチルシロキサンコポリマーなどのジ（メタ）アクリレート化合物が好ましく挙げられる。   Examples of the compound represented by the general formula (IX) include di (meth) acrylate compounds such as bis ((meth) acryloxypropyl) polydimethylsiloxane and bis ((meth) acryloxypropyl) methylsiloxane-dimethylsiloxane copolymer. Preferably mentioned.

一般式（Ｘ）中、Ｒ1は前記のものを表し、ｒ、ｓ、ｔ及びｕはそれぞれ独立に繰り返し数の平均値を示す０以上の数であり、ｒ＋ｔは０．１以上、好ましくは０．３〜５であり、ｓ＋ｕは１以上、好ましくは１〜１００である。 In general formula (X), R 1 represents the above, r, s, t and u are each independently a number of 0 or more indicating the average number of repetitions, and r + t is 0.1 or more, preferably 0.3 to 5 and s + u is 1 or more, preferably 1 to 100.

一般式（Ｘ）で示される化合物としては、無水マレイン酸を付加させたポリブタジエンと、２−ヒドロキシエチル（メタ）アクリレートとを反応させて得られる反応物及びその水素添加物があり、例えばＭＭ−１０００−８０、ＭＡＣ−１０００−８０（共に、日本石油化学（株）、商品名）などがある。   Examples of the compound represented by the general formula (X) include a reaction product obtained by reacting polybutadiene added with maleic anhydride and 2-hydroxyethyl (meth) acrylate, and a hydrogenated product thereof. 1000-80, MAC-1000-80 (both are Nippon Petrochemical Co., Ltd., trade name).

本発明において、（Ａ）（メタ）アクリル化合物としては、上記の化合物、好ましくは上記の（メタ）アクリル酸エステル化合物を単独で、又は複数種を組み合わせて使用することができる。   In the present invention, as the (A) (meth) acrylic compound, the above-mentioned compound, preferably the above-mentioned (meth) acrylic acid ester compound can be used alone or in combination.

本発明において、（Ａ）（メタ）アクリル化合物としては、特定の（Ｆ）銀粉と（Ｇ）アルミニウム粉とを組み合わせて用いると、電気伝導性、接着性、熱伝導性に優れ、かつ塗布作業性、機械特性にも優れ、ダイボンディング用として好適に用いることができる樹脂ペースト組成物が得られる点で、上記のような（メタ）アクリル酸エステル化合物が好ましい。   In the present invention, as the (A) (meth) acrylic compound, when a specific (F) silver powder and (G) aluminum powder are used in combination, they are excellent in electrical conductivity, adhesiveness, and thermal conductivity, and are applied. The (meth) acrylic acid ester compound as described above is preferable in that a resin paste composition that is excellent in properties and mechanical properties and can be suitably used for die bonding is obtained.

（Ｂ）バインダー樹脂としては、エポキシ樹脂、シリコーン樹脂、ウレタン樹脂、アクリル樹脂などの樹脂が好ましく挙げられる。これらの樹脂の中でも、上記の（Ａ）（メタ）アクリル化合物との組み合わせの観点から、エポキシ樹脂が好ましい。   (B) As binder resin, resin, such as an epoxy resin, a silicone resin, a urethane resin, an acrylic resin, is mentioned preferably. Among these resins, an epoxy resin is preferable from the viewpoint of combination with the (A) (meth) acrylic compound.

エポキシ樹脂としては、１分子中に２個以上のエポキシ基を有する化合物が好ましい。このようなエポキシ樹脂としては、例えばビスフェノールＡ型エポキシ樹脂［ＡＥＲ−Ｘ８５０１（旭化成工業（株）、商品名）、Ｒ−３０１（油化シェルエポキシ（株）、商品名）、ＹＬ−９８０（油化シェルエポキシ（株）、商品名）］、ビスフェノールＦ型エポキシ樹脂［ＹＤＦ−１７０（東都化成（株）、商品名）］、ビスフェノールＡＤ型エポキシ樹脂［Ｒ−１７１０（三井化学（株）、商品名）］、フェノールノボラック型エポキシ樹脂［Ｎ−７３０Ｓ（ＤＩＣ（株）、商品名）、Ｑｕａｔｒｅｘ−２０１０（ダウ・ケミカル社、商品名）］、クレゾールノボラック型エポキシ樹脂［ＹＤＣＮ−７０２Ｓ（東都化成（株）、商品名）、ＥＯＣＮ−１００（日本化薬（株）、商品名）］、多官能エポキシ樹脂［ＥＰＰＮ−５０１（日本化薬（株）、商品名）、ＴＡＣＴＩＸ−７４２（ダウ・ケミカル社、商品名）、ＶＧ−３０１０（三井化学（株）、商品名）、１０３２Ｓ（油化シェルエポキシ（株）、商品名）］、ナフタレン骨格を有するエポキシ樹脂［ＨＰ−４０３２（ＤＩＣ（株）、商品名）］、脂環式エポキシ樹脂［ＣＥＬー３０００（（株）ダイセル、商品名）］、エポキシ化ポリブタジエン［ＰＢ−３６００（（株）ダイセル、商品名）、Ｅ−１０００−６．５（日本石油化学（株）、商品名）］、アミン型エポキシ樹脂［ＥＬＭ−１００（住友化学（株）、商品名）、ＹＨ−４３４Ｌ（東都化成（株）、商品名）］、レゾルシン型エポキシ樹脂［デナコールＥＸ−２０１（ナガセ化成工業（株）、商品名）］、ネオペンチルグリコール型エポキシ樹脂［デナコールＥＸ−２１１（ナガセ化成工業（株）、商品名）］、ヘキサンディネルグリコール型エポキシ樹脂［デナコールＥＸ−２１２（ナガセ化成工業（株）、商品名）］、エチレン・プロピレングリコール型エポキシ樹脂［デナコールＥＸ−８１０、８１１、８５０、８５１、８２１、８３０、８３２、８４１、８６１（ナガセ化成工業（株）、商品名）］、下記一般式（ＸＩ）で表されるエポキシ樹脂［Ｅ−ＸＬ−２４、Ｅ−ＸＬ−３Ｌ（三井化学（株）、商品名）］   As the epoxy resin, a compound having two or more epoxy groups in one molecule is preferable. As such an epoxy resin, for example, bisphenol A type epoxy resin [AER-X8501 (Asahi Kasei Kogyo Co., Ltd., trade name), R-301 (Okasei Shell Epoxy Co., Ltd., trade name), YL-980 (Oil) Kasei Shell Epoxy Co., Ltd., trade name)], bisphenol F type epoxy resin [YDF-170 (Toto Kasei Co., Ltd., trade name)], bisphenol AD type epoxy resin [R-1710 (Mitsui Chemicals, Inc.) Name)], phenol novolac type epoxy resin [N-730S (DIC Corporation, trade name), Quatrex-2010 (Dow Chemical Co., trade name)], cresol novolac type epoxy resin [YDCN-702S (Tohto Kasei ( Co., Ltd., trade name), EOCN-100 (Nippon Kayaku Co., Ltd., trade name)], polyfunctional epoxy resin [EPPN-501 ( Honka Pharmaceutical Co., Ltd., trade name), TACTIX-742 (Dow Chemical Co., trade name), VG-3010 (Mitsui Chemicals, trade name), 1032S (Oka Chemical Shell Epoxy Co., Ltd.), trade name )], Epoxy resin having a naphthalene skeleton [HP-4032 (DIC Corporation, trade name)], alicyclic epoxy resin [CEL-3000 (Daicel Corporation, trade name)], epoxidized polybutadiene [PB- 3600 (Daicel Co., Ltd., trade name), E-1000-6.5 (Nippon Petrochemical Co., Ltd., trade name)], amine type epoxy resin [ELM-100 (Sumitomo Chemical Co., Ltd., trade name)], YH-434L (Toto Kasei Co., Ltd., trade name)], resorcinol type epoxy resin [Denacol EX-201 (Nagase Kasei Kogyo Co., Ltd., trade name)], neopentyl glycol type epoxy resin [De Cole EX-211 (Nagase Kasei Kogyo Co., Ltd., trade name)], hexane dinel glycol type epoxy resin [Denacol EX-212 (Nagase Kasei Kogyo Co., Ltd., trade name)], ethylene propylene glycol type epoxy resin [ Denacol EX-810, 811, 850, 851, 821, 830, 832, 841, 861 (Nagase Kasei Kogyo Co., Ltd., trade name)], an epoxy resin represented by the following general formula (XI) [E-XL- 24, E-XL-3L (Mitsui Chemicals, Inc., trade name)]

などが好ましく挙げられる。一般式（ＸＩ）中、ｖは０〜５の整数を表す。
これらのエポキシ樹脂のなかでも、ビスフェノールＦ型エポキシ樹脂、エポキシ化ポリブタジエン、ノボラック型エポキシ樹脂が好ましい。バインダー樹脂としてこれらの樹脂を用いると、電気伝導性、接着性、熱伝導性に優れ、かつ塗布作業性、機械特性にも優れ、ダイボンディング用として好適に用いることができる樹脂ペースト組成物が得られるからである。また、これらのエポキシ樹脂は、１種単独で用いてもよいし、２種以上を組み合わせて用いてもよい。 Etc. are preferable. In general formula (XI), v represents an integer of 0 to 5.
Among these epoxy resins, bisphenol F type epoxy resin, epoxidized polybutadiene, and novolac type epoxy resin are preferable. When these resins are used as the binder resin, a resin paste composition that is excellent in electrical conductivity, adhesiveness, and thermal conductivity, is excellent in coating workability and mechanical properties, and can be suitably used for die bonding is obtained. Because it is. Moreover, these epoxy resins may be used individually by 1 type, and may be used in combination of 2 or more type.

（Ｂ）バインダー樹脂、とりわけエポキシ樹脂の分子量又は数平均分子量は、１６０〜３０００のものが好ましい。数平均分子量はゲルパーミエーションクロマトグラフィーにより標準ポリスチレンの検量線を利用して測定（以下、ＧＰＣ法という）した値である。（Ｂ）バインダー樹脂の分子量又は数平均分子量が１６０以上であると優れた接着性を有し、３０００以下であると樹脂ペースト組成物の粘度が上昇しすぎることなく良好な作業性が得られる。
エポキシ当量が８０〜１０００であることが好ましく、１００〜５００であることがより好ましい。（Ｂ）バインダー樹脂のエポキシ当量が８０以上であると優れた接着性を有し、１０００以下であると樹脂ペースト組成物の硬化時に未反応硬化物が残留することによる硬化後の熱履歴でアウトガスの発生を抑制できるので好ましい。 (B) The binder resin, particularly the epoxy resin, preferably has a molecular weight or number average molecular weight of 160 to 3000. The number average molecular weight is a value measured by gel permeation chromatography using a standard polystyrene calibration curve (hereinafter referred to as GPC method). (B) When the molecular weight or number average molecular weight of the binder resin is 160 or more, excellent adhesiveness is obtained, and when it is 3000 or less, good workability can be obtained without excessively increasing the viscosity of the resin paste composition.
It is preferable that epoxy equivalent is 80-1000, and it is more preferable that it is 100-500. (B) When the epoxy equivalent of the binder resin is 80 or more, it has excellent adhesiveness, and when it is 1000 or less, it is outgassed by the heat history after curing due to unreacted cured product remaining when the resin paste composition is cured. Since generation | occurrence | production of can be suppressed, it is preferable.

また、樹脂ペースト組成物中の（Ｂ）バインダー樹脂の含有量は、０．１〜２．０質量％が好ましく、０．５〜１．５質量％がより好ましい。（Ｂ）バインダー樹脂の含有量が０．１質量％以上であると優れた接着性を有し、２．０質量％以下であると樹脂ペースト組成物の粘度が上昇しすぎることなく良好な作業性が得られる。   Moreover, 0.1-2.0 mass% is preferable and, as for content of (B) binder resin in a resin paste composition, 0.5-1.5 mass% is more preferable. (B) When the content of the binder resin is 0.1% by mass or more, excellent adhesiveness is obtained, and when the content is 2.0% by mass or less, the viscosity of the resin paste composition does not increase excessively and the work is excellent. Sex is obtained.

また、エポキシ樹脂として、１分子中に１個のエポキシ基を有する化合物、単官能エポキシ化合物（反応性希釈剤）を含んでいてもよい。このような単官能エポキシ化合物としては、フェニルグリシジルエーテル（ＰＧＥ、日本化薬（株）、商品名）、アルキルフェノールモノグリシジルエーテル（ＰＰ−１０１、東都化成（株）、商品名）、脂肪族モノグリシジルエーテル（ＥＤ−５０２、（株）ＡＤＥＫＡ、商品名）、アルキルフェノールモノグリシジルエーテル（ＥＤ−５０９、（株）ＡＤＥＫＡ、商品名）、アルキルフェノールモノグリシジルエーテル（ＹＥＤ−１２２、油化シェルエポキシ（株）、商品名）、３−グリシドキシプロピルトリメトキシシラン（ＫＢＭ−４０３、信越化学工業（株）、商品名）、３−グリシドキシプロピルトリメトキシシラン、３−グリシドキシプロピルメチルジメトキシシラン、１−（３−グリシドキシプロピル）−１，１，３，３，３−ペンタメチルジシロキサン（ＴＳＬ−８３５０、ＴＳＬ−８３５５、ＴＳＬ−９９０５（東芝シリコーン（株）、商品名）などが挙げられる。   Moreover, as an epoxy resin, the compound which has one epoxy group in 1 molecule, and the monofunctional epoxy compound (reactive diluent) may be included. Examples of such monofunctional epoxy compounds include phenyl glycidyl ether (PGE, Nippon Kayaku Co., Ltd., trade name), alkylphenol monoglycidyl ether (PP-101, Toto Kasei Co., Ltd., trade name), aliphatic monoglycidyl. Ether (ED-502, ADEKA, trade name), alkylphenol monoglycidyl ether (ED-509, ADEKA, trade name), alkylphenol monoglycidyl ether (YED-122, Yuka Shell Epoxy), Trade name), 3-glycidoxypropyltrimethoxysilane (KBM-403, Shin-Etsu Chemical Co., Ltd., trade name), 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 1 -(3-glycidoxypropyl) -1,1,3,3 - pentamethyl disiloxane (TSL-8350, TSL-8355, TSL-9905 (Toshiba Silicone Co., trade name) and the like.

単官能エポキシ化合物は、本発明の樹脂ペースト組成物の特性を阻害しない範囲で使用されるが、（Ｂ）バインダー樹脂全量中、１０質量％以下で使用されることが好ましく、１〜５質量％で使用されることが好ましい。単官能エポキシ化合物の使用量が１０質量％以下であると樹脂ペースト組成物の粘度が上昇しすぎることなく良好な作業性が得られる。   The monofunctional epoxy compound is used as long as it does not impair the properties of the resin paste composition of the present invention, but it is preferably used in an amount of 10% by mass or less in the total amount of the (B) binder resin, and 1 to 5% by mass. Are preferably used. When the amount of the monofunctional epoxy compound used is 10% by mass or less, good workability can be obtained without excessive increase in the viscosity of the resin paste composition.

（Ｃ）アミン化合物は、上記の（Ｂ）バインダー樹脂がエポキシ樹脂の場合は、エポキシ樹脂の硬化剤としての機能を有するものであり、好ましくはジシアンジアミドや、以下の一般式（ＸＩＩ）で表される、   When the binder resin (B) is an epoxy resin, the (C) amine compound has a function as a curing agent for the epoxy resin, and is preferably represented by dicyandiamide or the following general formula (XII). The

二塩基酸ジヒドラジド［ＡＤＨ、ＰＤＨ、ＳＤＨ（いずれも（株）日本ファインケム、商品名）］（一般式（ＸＩＩ）中、Ｒ19はｍ−フェニレン基、ｐ−フェニレン基などの２価の芳香族基、炭素数２〜１２の直鎖又は分岐鎖のアルキレン基を表す。）、エポキシ樹脂とアミン化合物の反応物からなるマイクロカプセル型硬化剤［ノバキュア（旭化成工業（株）、商品名）］、ジアミノジフェニルメタン、ｍ−フェニレンジアミン、ｍ−キシレンジアミン、ジアミノジフェニルスルフォン、尿素、尿素誘導体、メラミンなどのポリアミン化合物が好ましく挙げられる。 Dibasic acid dihydrazide [ADH, PDH, SDH (all Nihon Finechem Co., Ltd., trade name)] (in the general formula (XII), R 19 is a divalent aromatic group such as m-phenylene group or p-phenylene group) Group, a C2-C12 linear or branched alkylene group.), A microcapsule type curing agent comprising a reaction product of an epoxy resin and an amine compound [Novacure (Asahi Kasei Kogyo Co., Ltd., trade name)], Preferable examples include polyamine compounds such as diaminodiphenylmethane, m-phenylenediamine, m-xylenediamine, diaminodiphenylsulfone, urea, urea derivatives, and melamine.

また、（Ｃ）アミン化合物としては、２−メチルイミダゾール、２−エチル−４−メチルイミダゾール、１−ベンジル−２−メチルイミダゾール、２−フェニルイミダゾール、２−フェニル−４−メチル−５−ヒドロキシメチルイミダゾールなどのイミダゾール化合物も好ましく挙げられる。これらの（Ｃ）アミン化合物は、１種単独で用いてもよいし、２種以上を組み合わせて用いてもよい。   Examples of (C) amine compounds include 2-methylimidazole, 2-ethyl-4-methylimidazole, 1-benzyl-2-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methyl-5-hydroxymethyl. Also preferred are imidazole compounds such as imidazole. These (C) amine compounds may be used individually by 1 type, and may be used in combination of 2 or more type.

（Ｃ）アミン化合物の配合量は、樹脂ペースト組成物に対して０．０５〜０．３質量％が好ましく、０．０７〜０．１５質量％がより好ましい。（Ｃ）アミン化合物の配合量が０．０５質量％以上であると硬化性に劣ることがなく、０．３質量％以下であると樹脂ペースト組成物の安定性が良好となる。   (C) 0.05-0.3 mass% is preferable with respect to the resin paste composition, and, as for the compounding quantity of an amine compound, 0.07-0.15 mass% is more preferable. (C) When the compounding amount of the amine compound is 0.05% by mass or more, the curability is not inferior, and when it is 0.3% by mass or less, the stability of the resin paste composition is improved.

（Ｄ）重合開始剤は、本発明の樹脂ペースト組成物の硬化を促進するために用いられるものであり、ラジカル重合開始剤が好ましい。ラジカル重合開始剤としては、ボイドの生成を抑える観点から、過酸化物系のラジカル重合開始剤が好ましく、また樹脂ペースト組成物の硬化性及び粘度安定性の点から、急速加熱試験での分解温度が７０〜１７０℃のものが好ましい。   (D) A polymerization initiator is used in order to accelerate | stimulate hardening of the resin paste composition of this invention, and a radical polymerization initiator is preferable. As the radical polymerization initiator, a peroxide-based radical polymerization initiator is preferable from the viewpoint of suppressing the formation of voids, and from the viewpoint of curability and viscosity stability of the resin paste composition, a decomposition temperature in a rapid heating test. Is preferably 70 to 170 ° C.

ラジカル重合開始剤としては、１，１，３，３−テトラメチルパーオキシ２−エチルヘキサノエート、１，１−ビス（ｔ−ブチルパーオキシ）シクロヘキサン、１，１−ビス（ｔ−ブチルパーオキシ）シクロドデカン、ジ−ｔ−ブチルパーオキシイソフタレート、ｔ−ブチルパーベンゾエート、ジクミルパーオキサイド、ｔ−ブチルクミルパーオキサイド、２，５−ジメチル−２，５−ジ（ｔ−ブチルパーオキシ）ヘキサン、２，５−ジメチル−２，５−ジ（ｔ−ブチルパーオキシ）ヘキシン、クメンハイドロパーオキサイドなどの過酸化物系ラジカル重合開始剤が好ましく挙げられる。   Examples of radical polymerization initiators include 1,1,3,3-tetramethylperoxy 2-ethylhexanoate, 1,1-bis (t-butylperoxy) cyclohexane, 1,1-bis (t-butylperoxide). Oxy) cyclododecane, di-t-butylperoxyisophthalate, t-butylperbenzoate, dicumyl peroxide, t-butylcumyl peroxide, 2,5-dimethyl-2,5-di (t-butylperoxy) Preferred are peroxide radical polymerization initiators such as hexane, 2,5-dimethyl-2,5-di (t-butylperoxy) hexyne, cumene hydroperoxide.

（Ｄ）重合開始剤の配合量は、樹脂ペースト組成物に対して０．１〜５質量％が好ましく、０．６〜１．５質量％がより好ましい。この配合量が０．１質量％以上であると、硬化性が低下することがなく、５質量％以下であると、揮発分が多くならず、硬化物中にボイドと呼ばれる空隙が生じ難くなる。   (D) 0.1-5 mass% is preferable with respect to the resin paste composition, and, as for the compounding quantity of a polymerization initiator, 0.6-1.5 mass% is more preferable. When the blending amount is 0.1% by mass or more, curability does not decrease, and when it is 5% by mass or less, the volatile content does not increase and voids called voids are hardly generated in the cured product. .

（Ｅ）可とう化剤は、本発明の樹脂ペースト組成物の硬化物に可とう性を付与するために用いられるものである。可とう化剤としては、ゴム成分や熱可塑性樹脂が好ましく挙げられる。
ゴム成分としては、ブタジエンの骨格を有するブタジエン系ゴムが好ましい。ブタジエン系ゴムとしては、エポキシ化ポリブタジエンゴム、マレイン化ポリブタジエン、アクリロニトリルブタジエンゴム、カルボキシ末端アクリロニトリルブタジエンゴム、アミノ末端アクリロニトリルブタジエンゴム、ビニル末端アクリロニトリルブタジエンゴム、スチレンブタジエンゴムなどの液状ゴムなどが好ましく挙げられる。 (E) The flexible agent is used for imparting flexibility to the cured product of the resin paste composition of the present invention. Preferred examples of the flexible agent include rubber components and thermoplastic resins.
As the rubber component, a butadiene rubber having a butadiene skeleton is preferable. Preferred examples of the butadiene rubber include liquid rubbers such as epoxidized polybutadiene rubber, maleated polybutadiene, acrylonitrile butadiene rubber, carboxy terminal acrylonitrile butadiene rubber, amino terminal acrylonitrile butadiene rubber, vinyl terminal acrylonitrile butadiene rubber, and styrene butadiene rubber.

ゴム成分としては、数平均分子量が５００〜１０，０００のものが好ましく、１，０００〜５，０００のものがより好ましい。分子量が５００以上であると、良好な可とう化効果が得られ、分子量が１０，０００以下であると樹脂ペースト組成物の粘度が上昇することなく、樹脂ペースト組成物の良好な作業性が得られる。数平均分子量は蒸気圧浸透法で測定した値又はＧＰＣ法により測定した値である。   The rubber component preferably has a number average molecular weight of 500 to 10,000, more preferably 1,000 to 5,000. When the molecular weight is 500 or more, a good flexibility effect is obtained, and when the molecular weight is 10,000 or less, the workability of the resin paste composition is obtained without increasing the viscosity of the resin paste composition. It is done. The number average molecular weight is a value measured by the vapor pressure infiltration method or a value measured by the GPC method.

（Ｅ）可とう化剤の配合量は、樹脂ペースト組成物に対して１〜１０質量％であることが好ましく、２〜６質量％であることがより好ましい。この配合量が１質量部以上であると良好な可とう化効果が得られ、１０質量％以下であると、粘度が増大することなく、樹脂ペースト組成物の良好な作業性が得られる。   (E) It is preferable that the compounding quantity of a flexible agent is 1-10 mass% with respect to a resin paste composition, and it is more preferable that it is 2-6 mass%. When the amount is 1 part by mass or more, a good flexibility effect is obtained, and when it is 10% by mass or less, the workability of the resin paste composition is obtained without increasing the viscosity.

（Ｆ）銀粉は、本発明の樹脂ペースト組成物に電気伝導性や熱伝導性を付与するために用いられる成分である。本発明においては、樹脂ペースト組成物中の（Ｆ）銀粉の含有量は４０質量％以下であり、該（Ｆ）銀粉がタップ密度２．５ｇ／１００ｃｍ3以下である第１の銀粉を含有しており、かつ樹脂ペースト組成物中の該第１の銀粉の含有量が５質量％以上であることを必須の要件とするものである。また、後述する（Ｇ）アルミニウム粉と該（Ｆ）銀粉との質量比（（Ｇ）アルミニウム粉／（Ｆ）銀粉）が、０．８〜３．５であることも必須の要件とする。 (F) Silver powder is a component used in order to provide electrical conductivity and thermal conductivity to the resin paste composition of the present invention. In the present invention, the content of the (F) silver powder in the resin paste composition is 40% by mass or less, and the (F) silver powder contains the first silver powder having a tap density of 2.5 g / 100 cm 3 or less. And the content of the first silver powder in the resin paste composition is 5% by mass or more. Moreover, it is also an essential requirement that the mass ratio ((G) aluminum powder / (F) silver powder) of (G) aluminum powder and the (F) silver powder, which will be described later, is 0.8 to 3.5.

本発明で用いられる（Ｆ）銀粉としては、平均粒径が１〜１０μｍのものであることが好ましく、特に、２〜８μｍであることがより好ましく、３〜６μｍであることがさらに好ましい。（Ｆ）銀粉の平均粒径が上記範囲内であると、樹脂ペースト組成物中の銀粉が沈降しづらくなり、樹脂ペースト組成物をディスペンスする際にニードル中でつまりが発生しないので好ましい。なお、（Ｆ）銀粉の平均粒径はレーザー回析法により測定した値である。   The silver powder (F) used in the present invention preferably has an average particle diameter of 1 to 10 μm, more preferably 2 to 8 μm, and further preferably 3 to 6 μm. (F) It is preferable that the average particle diameter of the silver powder is within the above range because the silver powder in the resin paste composition is difficult to settle and clogging does not occur in the needle when the resin paste composition is dispensed. In addition, the average particle diameter of (F) silver powder is the value measured by the laser diffraction method.

（Ｆ）銀粉は、タップ密度が２．５ｇ／ｃｍ3以下である第１の銀粉を少なくとも含む。タップ密度が２．５ｇ／ｃｍ3以下であると、優れた電気伝導度が得られ、また樹脂ペースト組成物の粘度が上昇しすぎることがなく良好な塗布作業性が得られる。同様の理由から、銀粉のタップ密度は、０．５〜２．５ｇ／ｃｍ3の範囲であることが好ましい。ここで、（Ｆ）銀粉のタップ密度はＪＩＳ Ｚ ２５１２に準じて、タップ密度測定器により測定を行い得られた値である。具体的には、銀粉１００ｇをはかり、ロートで１００ｍｌメスシリンダーに静かに落とす。シリンダーをタップ密度測定器に乗せて落下距離２０ｍｍ、６０回／分の速さで６００回落下させ、圧縮した銀粉の容積を測る。サンプル量を圧縮した銀粉の容積で割って算出した値である。 (F) Silver powder contains at least 1st silver powder whose tap density is 2.5 g / cm < 3 > or less. When the tap density is 2.5 g / cm 3 or less, excellent electrical conductivity is obtained, and the viscosity of the resin paste composition does not increase excessively and good coating workability is obtained. For the same reason, the tap density of the silver powder is preferably in the range of 0.5 to 2.5 g / cm 3 . Here, the tap density of the silver powder (F) is a value obtained by measuring with a tap density measuring device according to JIS Z 2512. Specifically, 100 g of silver powder is weighed and gently dropped into a 100 ml graduated cylinder with a funnel. The cylinder is placed on a tap density measuring device and dropped 600 times at a drop distance of 20 mm and a speed of 60 times / minute, and the volume of the compressed silver powder is measured. It is a value calculated by dividing the sample amount by the volume of the compressed silver powder.

本発明においては、（Ｆ）銀粉が第１の銀粉だけで構成されていてもよいし、樹脂ペースト組成物中の第１の銀粉の含有量が５質量％以上であれば、タップ密度が２．５ｇ／ｃｍ3を超える銀粉と混合したものであってもよい。また、第１の銀粉は、タップ密度が２．５ｇ／ｃｍ3以下で異なる複数種の銀粉からなるものであってもよい。
樹脂ペースト組成物中の第１の銀粉の含有量は、５質量％以上であることを要し、７．５質量％以上であることが好ましい。また、好ましい上限値は、（Ｆ）銀粉の含有量と同じ、すなわち（Ｆ）銀粉が第１の銀粉だけで構成されていることが好ましい。 In the present invention, (F) the silver powder may be composed of only the first silver powder, and if the content of the first silver powder in the resin paste composition is 5% by mass or more, the tap density is 2 It may be mixed with silver powder exceeding 5 g / cm 3 . The first silver powder may be composed of a plurality of different silver powders having a tap density of 2.5 g / cm 3 or less.
The content of the first silver powder in the resin paste composition needs to be 5% by mass or more, and is preferably 7.5% by mass or more. Moreover, it is preferable that a preferable upper limit is the same as content of (F) silver powder, ie, (F) silver powder is comprised only with 1st silver powder.

（Ｆ）銀粉のＢＥＴ比表面積が０．５〜２ｍ2／ｇであることが好ましい。ここで、（Ｆ）銀粉の比表面積はＢＥＴ法Ｎ2ガス吸着一点法により測定した値である。（Ｆ）銀粉のＢＥＴ比表面積が上記範囲内であると、樹脂ペースト組成物の粘度が上昇しすぎることなく、優れた電気導電性を有するので好ましい。 (F) It is preferable that the BET specific surface area of silver powder is 0.5-2 m < 2 > / g. Here, the specific surface area of (F) silver powder is a value measured by the BET method N 2 gas adsorption one point method. (F) It is preferable for the BET specific surface area of the silver powder to be in the above range because the resin paste composition has excellent electrical conductivity without excessively increasing the viscosity.

（Ｆ）銀粉の形状としては、粒状、フレーク状、球状、針状、不規則状などが好ましく挙げられ、なかでもフレーク状が好ましい。（Ｆ）銀粉の形状がフレーク状、不規則状の場合の平均粒径は、その外接球の直径を平均粒径とする。   (F) As a shape of silver powder, granular shape, flake shape, spherical shape, needle shape, irregular shape etc. are mentioned preferably, and flake shape is especially preferable. (F) The average particle diameter when the shape of the silver powder is flaky or irregular is the diameter of the circumscribed sphere.

（Ｆ）銀粉の含有量は、樹脂ペースト組成物に対して４０質量％以下であることを要し、好ましくは３〜４０質量％、より好ましくは１０〜３５質量％である。（Ｆ）銀粉の含有量が上記範囲内であると、電気導電性、熱伝導性及び接着性に加えて、塗布作業性、機械特性にも優れる安価な樹脂ペースト組成物が得られる。   (F) Content of silver powder needs to be 40 mass% or less with respect to a resin paste composition, Preferably it is 3-40 mass%, More preferably, it is 10-35 mass%. (F) When content of silver powder is in the said range, in addition to electrical conductivity, heat conductivity, and adhesiveness, an inexpensive resin paste composition excellent in coating workability and mechanical properties can be obtained.

（Ｇ）アルミニウム粉は、本発明の樹脂ペースト組成物に電気伝導性や熱伝導性を付与するために用いられる成分であり、従来は希少価値が高く高価な材料である銀粉を単独で用いていたところ、その一部を（Ｇ）アルミニウム粉に代替させることで、銀粉の使用量を低減するにも関わらず、優れた電気導電性、熱伝導性及び接着性に加えて、塗布作業性、機械特性にも優れる安価な樹脂ペースト組成物が得られる。
本発明で用いられる（Ｇ）アルミニウム粉としては、平均粒径が１〜６μｍのものであることが好ましく、特に、２〜５μｍであることがより好ましく、２〜４μｍであることがさらに好ましい。（Ｇ）アルミニウム粉の平均粒径が上記範囲内であると、樹脂ペースト組成物の濡れ拡がり性が低下することがないので半導体チップの傾きが発生することがない。なお、（Ｇ）アルミニウム粉の平均粒径はレーザー回析法により測定した値である。 (G) Aluminum powder is a component used for imparting electrical conductivity and thermal conductivity to the resin paste composition of the present invention. Conventionally, silver powder that is a rare and expensive material is used alone. However, in spite of reducing the amount of silver powder used by substituting a part thereof with (G) aluminum powder, in addition to excellent electrical conductivity, thermal conductivity and adhesiveness, application workability, An inexpensive resin paste composition having excellent mechanical properties can be obtained.
As (G) aluminum powder used by this invention, it is preferable that an average particle diameter is 1-6 micrometers, It is more preferable that it is 2-5 micrometers especially, It is further more preferable that it is 2-4 micrometers. (G) When the average particle diameter of the aluminum powder is within the above range, the wet spreadability of the resin paste composition does not decrease, and therefore the semiconductor chip does not tilt. In addition, the average particle diameter of (G) aluminum powder is the value measured by the laser diffraction method.

（Ｇ）アルミニウム粉の見かけ密度は０．４０〜１．２０ｇ／ｃｍ3が好ましく、０．５５〜１．００ｇ／ｃｍ3であることがより好ましい。 (G) the apparent density of the aluminum powder is preferably 0.40~1.20g / cm 3, more preferably 0.55~1.00g / cm 3.

また、（Ｇ）アルミニウム粉の形状としては、粒状、フレーク状、球状、針状、不規則状などが好ましく挙げられ、なかでも粒状、フレーク状が好ましい。（Ｇ）アルミニウム粉の形状がフレーク状、不規則状の場合の平均粒径は、その外接球の直径を平均粒径とする。   The shape of (G) aluminum powder is preferably granular, flaky, spherical, acicular, irregular, etc. Among them, granular and flaky are preferable. (G) The average particle diameter when the shape of the aluminum powder is flaky or irregular is the diameter of the circumscribed sphere.

（Ｇ）アルミニウム粉／（Ｆ）銀粉の質量比は、０．８〜３．５であることを要し、好ましくは１．０〜３．０である。該質量比が０．８未満であると熱伝導性が低下し、該質量比が３．５を超えると、接着性が低下し、作業性、塗布作業性が低下する場合がある。   The mass ratio of (G) aluminum powder / (F) silver powder needs to be 0.8 to 3.5, preferably 1.0 to 3.0. When the mass ratio is less than 0.8, the thermal conductivity is lowered, and when the mass ratio is more than 3.5, the adhesiveness is lowered and workability and coating workability may be lowered.

本発明の樹脂ペースト組成物は、さらに、（Ｈ）カップリング剤を含むことが好ましい。（Ｈ）カップリング剤を用いることで、リードフレームに対する接着性が向上する。
（Ｈ）カップリング剤としては特に制限はなく、例えば、シランカップリング剤、チタネート系カップリング剤、アルミニウム系カップリング剤、ジルコネート系カップリング剤、ジルコアルミネート系カップリング剤などの各種カップリング剤が好ましく挙げられる。 The resin paste composition of the present invention preferably further contains (H) a coupling agent. (H) Adhesiveness to the lead frame is improved by using the coupling agent.
(H) There are no particular limitations on the coupling agent, and various couplings such as, for example, silane coupling agents, titanate coupling agents, aluminum coupling agents, zirconate coupling agents, zircoaluminate coupling agents, etc. An agent is preferably mentioned.

（Ｈ）カップリング剤の具体例としては、メチルトリメトキシシラン、メチルトリエトキシシラン、フェニルトリメトキシシラン、フェニルトリエトキシシラン、ビニルトリメトキシシラン、ビニルトリエトキシシラン、ビニルトリアセトキシシラン、ビニル−トリス（２−メトキシエトキシ）シラン、γ−メタクリロキシプロピルトリメトキシシラン、γ−メタクリロキシプロピルメチルジメトキシシラン、メチルトリ（メタクリロキシエトキシ）シラン、γ−アクリロキシプロピルトリメトキシシラン、γ−アミノプロピルトリメトキシシラン、γ−アミノプロピルトリエトキシシラン、Ｎ−β−（アミノエチル）−γ−アミノプロピルトリメトキシシラン、Ｎ−β−（アミノエチル）−γ−アミノプロピルメチルジメトキシシラン、Ｎ−β−（Ｎ−ビニルベンジルアミノエチル）−γ−アミノプロピルトリメトキシシラン、γ−アニリノプロピルトリメトキシシラン、γ−ウレイドプロピルトリメトキシシラン、γ−ウレイドプロピルトリエトキシシラン、３−（４，５−ジヒドロイミダゾリル）プロピルトリエトキシシラン、β−（３，４−エポキシシクロヘキシル）エチルトリメトキシシラン、γ−グリシドキシプロピルトリメトキシシラン、γ−グリシドキシプロピルメチルジエトキシシラン、γ−グリシドキシプロピルメチルジイソプロペノキシシラン、メチルトリグリシドキシシラン、γ−メルカプトプロピルトリメトキシシラン、γ−メルカプトプロピルトリエトキシシラン、γ−メルカプトプロピルメチルジメトキシシラン、トリメチルシリルイソシアネート、ジメチルシリルイソシアネート、フェニルシリルトリイソシアネート、テトライソシアネートシラン、メチルシリルトリイソシアネート、ビニルシリルトリイソシアネート、エトキシシラントリイソシアネートなどのシランカップリング剤；イソプロピルトリイソステアロイルチタネート、イソプロピルトリドデシルベンゼンスルホニルチタネート、イソプロピルトリス（ジオクチルパイロホスフェート）チタネート、テトライソプロピルビス（ジオクチルホスファイト）チタネート、テトラオクチルビス（ジトリデシルホスファイト）チタネート、テトラ（２，２−ジアリルオキシメチル−１−ブチル）ビス（ジ−トリデシル）ホスファイトチタネート、ビス（ジオクチルパイロホスフェート）オキシアセテートチタネート、ビス（ジオクチルパイロホスフェート）エチレンチタネート、イソプロピルトリオクタノイルチタネート、イソプロピルジメタクリルイソステアロイルチタネート、イソプロピル（ジオクチルホスフェート）チタネート、イソプロピルトリクミルフェニルチタネート、イソプロピルトリ（Ｎ−アミノエチル・アミノエチル）チタネート、ジクミルフェニルオキシアセテートチタネート、ジイソステアロイルエチレンチタネートなどのチタネート系カップリング剤；アセトアルコキシアルミニウムジイソプロピオネートなどのアルミニウム系カップリング剤；テトラプロピルジルコネート、テトラブチルジルコネート、テトラ（トリエタノールアミン）ジルコネート、テトライソプロピルジルコネート、ジルコニウムアセチルアセトネートアセチルアセトンジルコニウムブチレート、ステアリン酸ジルコニウムブチレートなどのジルコネート系カップリング剤などが好ましく挙げられる。   Specific examples of (H) coupling agents include methyltrimethoxysilane, methyltriethoxysilane, phenyltrimethoxysilane, phenyltriethoxysilane, vinyltrimethoxysilane, vinyltriethoxysilane, vinyltriacetoxysilane, vinyl-tris. (2-methoxyethoxy) silane, γ-methacryloxypropyltrimethoxysilane, γ-methacryloxypropylmethyldimethoxysilane, methyltri (methacryloxyethoxy) silane, γ-acryloxypropyltrimethoxysilane, γ-aminopropyltrimethoxysilane , Γ-aminopropyltriethoxysilane, N-β- (aminoethyl) -γ-aminopropyltrimethoxysilane, N-β- (aminoethyl) -γ-aminopropylmethyldimethoxysilane, N-β- N-vinylbenzylaminoethyl) -γ-aminopropyltrimethoxysilane, γ-anilinopropyltrimethoxysilane, γ-ureidopropyltrimethoxysilane, γ-ureidopropyltriethoxysilane, 3- (4,5-dihydroimidazolyl) ) Propyltriethoxysilane, β- (3,4-epoxycyclohexyl) ethyltrimethoxysilane, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropylmethyldiethoxysilane, γ-glycidoxypropylmethyldi Isopropenoxysilane, methyltriglycidoxysilane, γ-mercaptopropyltrimethoxysilane, γ-mercaptopropyltriethoxysilane, γ-mercaptopropylmethyldimethoxysilane, trimethylsilyl isocyanate, dimethylsilyl Silane coupling agents such as isocyanate, phenylsilyl triisocyanate, tetraisocyanate silane, methylsilyl triisocyanate, vinylsilyl triisocyanate, ethoxysilane triisocyanate; isopropyl triisostearoyl titanate, isopropyl tridodecylbenzenesulfonyl titanate, isopropyl tris (dioctyl pyro) Phosphate) titanate, tetraisopropyl bis (dioctyl phosphite) titanate, tetraoctyl bis (ditridecyl phosphite) titanate, tetra (2,2-diallyloxymethyl-1-butyl) bis (di-tridecyl) phosphite titanate, bis (Dioctyl pyrophosphate) oxyacetate titanate, bis (dioctyl pyrophos Fate) Ethylene titanate, isopropyl trioctanoyl titanate, isopropyl dimethacrylisostearoyl titanate, isopropyl (dioctyl phosphate) titanate, isopropyl tricumyl phenyl titanate, isopropyl tri (N-aminoethyl / aminoethyl) titanate, dicumyl phenyloxyacetate titanate , Titanate coupling agents such as diisostearoylethylene titanate; aluminum coupling agents such as acetoalkoxyaluminum diisopropionate; tetrapropyl zirconate, tetrabutyl zirconate, tetra (triethanolamine) zirconate, tetraisopropyl zirconate , Zirconium acetylacetonate acetylacetone Rate, etc. zirconate-based coupling agents such as stearic acid zirconium butyrate are preferably exemplified.

上記のうち、γ−グリシドキシプロピルトリメトキシシラン、γ−グリシドキシプロピルメチルジエトキシシランなどは、エポキシ樹脂として用い得る単官能エポキシ化合物（反応性希釈剤）として例示したものであるが、これらの化合物は両者の機能を有するものであるからシランカップリング剤としても例示したものである。   Among the above, γ-glycidoxypropyltrimethoxysilane, γ-glycidoxypropylmethyldiethoxysilane, and the like are exemplified as monofunctional epoxy compounds (reactive diluents) that can be used as epoxy resins. Since these compounds have both functions, they are also exemplified as silane coupling agents.

（Ｈ）カップリング剤の配合量は、樹脂ペースト組成物に対して０．５〜６．０質量％が好ましく、１．０〜５質量％が特に好ましい。この配合割合が０．５質量％以上であると接着強度の向上効果が得られ、６質量％以下であると揮発分が多くならず、硬化物中にボイドと呼ばれる空隙が生じ難くなる。   (H) 0.5 to 6.0 mass% is preferable with respect to the resin paste composition, and the blending amount of the coupling agent is particularly preferably 1.0 to 5 mass%. When the blending ratio is 0.5% by mass or more, an effect of improving the adhesive strength is obtained, and when it is 6% by mass or less, the volatile content does not increase and voids called voids are hardly generated in the cured product.

本発明の樹脂ペースト組成物には、さらに必要に応じて酸化カルシウム、酸化マグネシウムなどの吸湿剤や、フッ素系界面活性剤、ノニオン系界面活性剤、高級脂肪酸などの濡れ向上剤、シリコーン油などの消泡剤、無機イオン交換体などのイオントラップ剤などの各種添加剤を、単独又は数種類を組み合わせて、適宜添加することができる。   The resin paste composition of the present invention further includes a moisture absorbent such as calcium oxide and magnesium oxide, a fluorine surfactant, a nonionic surfactant, a wetting improver such as a higher fatty acid, silicone oil and the like as necessary. Various additives such as an anti-foaming agent and an ion trapping agent such as an inorganic ion exchanger can be appropriately added singly or in combination of several kinds.

本発明の樹脂ペースト組成物は、例えば以下のようにして得ることができる。本発明の樹脂ペーストを構成する（Ａ）〜（Ｇ）の各成分、及び所望により添加する各種添加剤を用意して、これらを一括して又は分割して、攪拌機、ハイブリッドミキサー、プラネタリーミキサーなどの分散、攪拌、混練可能な装置に投入し、必要に応じて加熱を行い、混合、溶解、解粒混練又は分散して、均一なペースト状として、樹脂ペースト組成物を得る。   The resin paste composition of the present invention can be obtained, for example, as follows. The components (A) to (G) constituting the resin paste of the present invention and various additives to be added as required are prepared, and these are collectively or divided, and a stirrer, hybrid mixer, planetary mixer The mixture is put into an apparatus capable of dispersing, stirring and kneading, heated as necessary, mixed, dissolved, pulverized and kneaded or dispersed to obtain a resin paste composition as a uniform paste.

得られた樹脂ペースト組成物は、希少価値が高く高価な材料である銀の使用量を低減しつつ、電気導電性、熱伝導性及び接着性に優れ、かつ塗布作業性、機械特性にも優れる安価な樹脂ペースト組成物であることから、導体素子接着用として用いられる。より具体的には、半導体チップなどの導体素子とリードフレームなどの支持部材との接着に好適に用いられる。   The obtained resin paste composition is excellent in electrical conductivity, thermal conductivity and adhesiveness as well as in coating workability and mechanical properties while reducing the amount of silver which is a rare and expensive material. Since it is an inexpensive resin paste composition, it is used for bonding conductive elements. More specifically, it is suitably used for bonding a conductor element such as a semiconductor chip and a support member such as a lead frame.

〔半導体装置〕
本発明の半導体装置は、半導体素子と支持部材とが、上記の本発明の導体素子接着用樹脂ペースト組成物の硬化物により接合され、かつ該半導体素子と該支持部材の一部とが封止剤により封止されてなることを特徴とするものである。 [Semiconductor device]
In the semiconductor device of the present invention, the semiconductor element and the support member are joined by the cured product of the above-described resin paste composition for bonding a conductor element of the present invention, and the semiconductor element and a part of the support member are sealed. It is sealed with an agent.

支持部材としては、例えば、銅リードフレームなどのリードフレーム、ガラスエポキシ基板（ガラス繊維強化エポキシ樹脂からなる基板）、ＢＴ基板（シアネートモノマー及びそのオリゴマーとビスマレイミドからなるＢＴレジン使用基板）などの有機基板が挙げられる。   Examples of the support member include organic materials such as a lead frame such as a copper lead frame, a glass epoxy substrate (a substrate made of glass fiber reinforced epoxy resin), and a BT substrate (a BT resin-use substrate made of cyanate monomer and its oligomer and bismaleimide). A substrate is mentioned.

本発明の半導体装置は、半導体素子と支持部材とが、本発明の樹脂ペースト組成物の硬化物により接合されている。半導体素子をリードフレームなどの支持部材に接着させるには、例えば、該支持部材上に樹脂ペースト組成物をディスペンス法により塗布した後、半導体素子を圧着し、その後オーブン又はヒートブロックなどの加熱装置を用いて加熱硬化することにより行うことができる。次いで、ワイヤボンド工程などを経た後、通常の方法により、すなわち封止剤を用いて該半導体素子と該支持部材の少なくとも一部とを封止することにより、本発明の半導体装置が得られる。   In the semiconductor device of the present invention, the semiconductor element and the support member are joined by the cured product of the resin paste composition of the present invention. In order to bond the semiconductor element to a support member such as a lead frame, for example, a resin paste composition is applied onto the support member by a dispensing method, and then the semiconductor element is pressure-bonded, and then a heating device such as an oven or a heat block is used. It can be performed by heating and curing. Next, after a wire bonding step or the like, the semiconductor device of the present invention is obtained by a normal method, that is, by sealing the semiconductor element and at least a part of the support member using a sealing agent.

樹脂ペースト組成物の加熱硬化は、低温での長時間硬化の場合や、高温での速硬化の場合により異なるが、通常、温度１５０〜２２０℃、好ましくは１８０〜２００℃で、３０秒〜２時間、好ましくは１時間〜１時間３０分の加熱硬化を行う。   The heat curing of the resin paste composition differs depending on the case of long-time curing at a low temperature or the case of rapid curing at a high temperature, but usually at a temperature of 150 to 220 ° C., preferably 180 to 200 ° C., for 30 seconds to 2 Heat curing is performed for a time, preferably 1 hour to 1 hour 30 minutes.

以下に、本発明を実施例によりさらに具体的に説明するが、本発明は、これらの実施例によってなんら限定されるものではない。   EXAMPLES The present invention will be described more specifically with reference to examples. However, the present invention is not limited to these examples.

（評価方法）
（１）粘度（粘度の安定性）の測定及び塗布作業性の評価：
ａ）粘度の測定
各実施例及び比較例の樹脂ペースト組成物を、ＥＨＤ型回転粘度計（東京計器（株）製、３°コーン）を用いて２５℃における０．５ｒｐｍの３分後の粘度（Ｐａ・ｓ）を測定した。
ｂ）粘度の安定性
上記ａ）で測定した粘度を初期値とし、サンプリング時間を１日、３日、７日として、ＥＨＤ型回転粘度計（東京計器（株）製、３°コーン）を用いて２５℃における０．５ｒｐｍの３分後の粘度（Ｐａ・ｓ）を測定し、粘度の安定性を確認した。
ｃ）塗布作業性の評価
ディスペンサー（武蔵エンジニアリング（株）製）で連続打点を行った際、打点と打点の間の様子を目視で確認し、以下の基準で評価した。
○ 糸引きは全く確認されなかった。
△ わずかな糸引きが確認されたが、実用上問題なかった。
× 糸引きが確認された。
（２）剪断接着強度の測定
各実施例及び比較例の樹脂ペースト組成物をＮｉ／Ａｕメッキ付き銅フレーム、Ａｇリングめっき付き銅リードフレーム及びＡｇスポットめっき付き銅リードフレーム上に約０．５ｍｇ塗布し、この上に２ｍｍ×２ｍｍのＳｉチップ（厚さ約０．４ｍｍ）を圧着し、さらにオーブンで１８０℃まで３０分で昇温し１８０℃で１時間硬化させた。これを、自動接着力試験装置（ＢＴ４０００、Ｄａｇｅ社製）を用い、２６０℃／２０秒保持時の剪断接着強度（ＭＰａ）を測定した。なお剪断接着強度の測定は１０個の試験片について行い、その平均値を剪断接着強度（ＭＰａ）とした。
（３）体積抵抗率の測定
スライドグラス（東京硝子器機（株）製、寸法：７６×２６ｍｍ、厚さ：０．９〜１．２ｍｍ）に紙テープ（日東電工ＣＳシステム（株）製、Ｎｏ．７２１０Ｆ、寸法幅：１８ｍｍ、厚さ：０．１０ｍｍ）を図２（ａ）のように貼り、約２ｍｍの溝に樹脂ペースト組成物を置き（図２（ｂ））、スライドグラスで平らに伸ばし（図２（ｃ））、さらにオーブンで１８０℃で１時間硬化させて硬化物とし、体積抵抗率の測定用の試料を得た（図２（ｄ））。この硬化物をデジタルマルチメーター（ＴＲ６８４６、ＡＤＶＡＮＴＥＳＴ社製）を用いて、体積抵抗率（Ω・ｃｍ）を測定した。
（４）熱伝導率の測定
上記（３）と同じようにして得られた硬化物について、レーザーフラッシュ法により、比熱、比重、及び熱拡散率を下記の条件で測定した。
比熱測定装置：示差走差熱量計（Ｐａｒｋｉｎｇ−Ｅｌｍｅｒ社製ＤＳＣ）を用いて、温度：２５℃の条件で比熱を測定した。
比重測定装置：密度計（アルファーミラージュ製密度計）を用いて、室温（アルキメデス法）で比重を測定した。
熱拡散率：キセノンフラッシュアナライザー（ＬＦＡ４４７、ＮＥＴＺＳＣＨ社製）を用いて温度：２５℃の条件で熱拡散率を測定した。
（５）タップ密度の測定
銀粉のタップ密度はＪＩＳ Ｚ ２５１２に準じて、タップ密度測定器により測定を行い得られた値である。具体的には、銀粉１００ｇをはかり、ロートで１００ｍｌメスシリンダーに静かに落とした。シリンダーをタップ密度測定器に乗せて落下距離２０ｍｍを６０回／分の速さで６００回落下させ、圧縮した銀粉の容積を測った。サンプル量を圧縮した銀粉の容積で割ってタップ密度を算出した。
（６）平均粒子径の測定
銀粉をミクロスパテラで１〜２杯ビーカーにとり、イソプロピルアルコールを約６０ｍｌ入れて超音波ホモジナイザーで１分間分散した。これをレーザー回折式粒度分析計で、測定時間３０秒で２回連続測定して５０％累積径の平均値を平均粒径とした。 (Evaluation method)
(1) Measurement of viscosity (viscosity stability) and evaluation of coating workability:
a) Measurement of viscosity Viscosity after 3 minutes of 0.5 rpm at 25 ° C. using the resin paste composition of each Example and Comparative Example using an EHD type rotational viscometer (manufactured by Tokyo Keiki Co., Ltd., 3 ° cone). (Pa · s) was measured.
b) Viscosity stability Using the EHD rotational viscometer (Tokyo Keiki Co., Ltd., 3 ° cone) with the viscosity measured in a) above as the initial value and sampling times of 1, 3, and 7 days. The viscosity (Pa · s) after 3 minutes at 0.5 rpm at 25 ° C. was measured to confirm the stability of the viscosity.
c) Evaluation of coating workability When continuous hitting was performed with a dispenser (manufactured by Musashi Engineering Co., Ltd.), the state between the hitting points was visually confirmed and evaluated according to the following criteria.
○ No stringing was confirmed.
Δ Slight stringing was confirmed, but there was no practical problem.
× Stringing was confirmed.
(2) Measurement of Shear Adhesive Strength About 0.5 mg of the resin paste composition of each Example and Comparative Example was applied on a Ni / Au plated copper frame, an Ag ring plated copper lead frame, and an Ag spot plated copper lead frame. Then, a 2 mm × 2 mm Si chip (thickness: about 0.4 mm) was pressure-bonded thereon, and further heated to 180 ° C. in 30 minutes and cured at 180 ° C. for 1 hour. This was measured for shear adhesive strength (MPa) when held at 260 ° C. for 20 seconds using an automatic adhesive strength tester (BT4000, manufactured by Dage). The shear bond strength was measured for 10 test pieces, and the average value was defined as the shear bond strength (MPa).
(3) Measurement of volume resistivity Slide glass (manufactured by Tokyo Glass Equipment Co., Ltd., dimensions: 76 × 26 mm, thickness: 0.9 to 1.2 mm) and paper tape (manufactured by Nitto Denko CS System Co., Ltd., No. 7210F, Dimension width: 18 mm, Thickness: 0.10 mm) is pasted as shown in FIG. 2A, the resin paste composition is placed in a groove of about 2 mm (FIG. 2B), and flattened with a slide glass. (FIG. 2 (c)) was further cured in an oven at 180 ° C. for 1 hour to obtain a cured product, and a sample for measuring volume resistivity was obtained (FIG. 2 (d)). The volume resistivity (Ω · cm) of this cured product was measured using a digital multimeter (TR6846, manufactured by ADVANTEST).
(4) Measurement of thermal conductivity About the hardened | cured material obtained by carrying out similarly to said (3), specific heat, specific gravity, and thermal diffusivity were measured on condition of the following by the laser flash method.
Specific heat measuring device: Specific heat was measured under the condition of temperature: 25 ° C. using a differential scanning calorimeter (DSC manufactured by Parking-Elmer).
Specific gravity measuring device: Specific gravity was measured at room temperature (Archimedes method) using a density meter (Alpha Mirage density meter).
Thermal diffusivity: The thermal diffusivity was measured at a temperature of 25 ° C. using a xenon flash analyzer (LFA447, manufactured by NETZSCH).
(5) Measurement of tap density The tap density of silver powder is a value obtained by measuring with a tap density measuring device in accordance with JIS Z 2512. Specifically, 100 g of silver powder was weighed and gently dropped into a 100 ml graduated cylinder with a funnel. The cylinder was placed on a tap density measuring device and dropped at a dropping distance of 20 mm at a speed of 60 times / min. 600 times, and the volume of the compressed silver powder was measured. The tap density was calculated by dividing the sample amount by the volume of the compressed silver powder.
(6) Measurement of average particle diameter Silver powder was placed in a beaker of 1 to 2 cups with a micro spatula, about 60 ml of isopropyl alcohol was added, and the mixture was dispersed with an ultrasonic homogenizer for 1 minute. This was continuously measured twice with a laser diffraction particle size analyzer at a measurement time of 30 seconds, and the average value of 50% cumulative diameter was defined as the average particle diameter.

実施例１〜１０、比較例１〜６、参考例１
第１表、及び第２表に示す配合割合で、各材料を混合し、プラネタリーミキサーを用いて混練した後、６６６．６１Ｐａ（５トル（Ｔｏｒｒ））以下で１０分間脱泡処理を行い、樹脂ペースト組成物を得た。得られた樹脂ペースト組成物の特性（粘度及び粘度安定性、ダイシェア接着強度、体積抵抗率）を上記に示す方法で調べた。その結果を第１表に示す。 Examples 1 to 10, Comparative Examples 1 to 6, Reference Example 1
After mixing each material at the blending ratio shown in Table 1 and Table 2 and kneading using a planetary mixer, defoaming treatment is performed at 666.61 Pa (5 Torr) or less for 10 minutes, A resin paste composition was obtained. The properties (viscosity and viscosity stability, die shear adhesive strength, volume resistivity) of the obtained resin paste composition were examined by the method described above. The results are shown in Table 1.

第１表及び第２表における略号は次の通りである。
（１）（Ａ）（メタ）アクリル化合物（（メタ）アクリル酸エステル化合物）
ＳＲ−３４９（Ｓａｒｔｏｍｅｒ社製エトキシ化ビスフェノールＡジアクリレートの製品名）
ＦＡ−５１２ＡＳ（日立化成（株）製ジシクロペンテニルオキシエチルアクリレートの製品名）
ＦＡ−５１２Ｍ（日立化成（株）製ジシクロペンテニルオキシエチルメタクリレートの製品名）
ＦＡ−５１３ＡＳ(日立化成（株）製ジシクロペンタニルアクリレートの製品名）
ＦＡ−５１３Ｍ(日立化成（株）製ジシクロペンタニルメタクリレートの製品名)
（２）（Ｂ）バインダー樹脂
Ｎ−６６５―ＥＸＰ（ＤＩＣ（株）製クレゾールノボラック型エポキシ樹脂の製品名、エポキシ当量：１９８〜２０８）
（３）（Ｃ）アミン化合物
Ｄｉｃｙ（ジャパンエポキシレジン（株）製、ジシアンジアミドの製品名）
（４）（Ｄ）重合開始剤
トリゴノックス２２−７０Ｅ（化薬アクゾ（株）製、１，１−ビス(ｔ−ブチルパーオキシ)シクロヘキサン、１０時間半減期温度：９１℃）
（５）（Ｅ）可とう化剤
エポリードＰＢ−４７００(（株）ダイセル製、エポキシ化ポリブタジエンの商品名、エポキシ当量：１５２．４〜１７７．８、数平均分子量＝３５００)
（６）（Ｆ）銀粉
ＡｇＣ−２１２ＤＨ（福田金属箔粉工業（株）製、形状：フレーク状、平均粒径：２．９μｍ、タップ密度：４．７５ｇ／ｃｍ3、比表面積：１．００ｍ2／ｇ）
ＴＣ−１０６（（株）徳力本店製、形状：フレーク状、平均粒径：７．０μｍ、タップ密度：１．９０ｇ／ｃｍ3、比表面積：１．１０ｍ2／ｇ）
ＴＣ−１０８（（株）徳力本店製、形状：フレーク状、平均粒径：７．０μｍ、タップ密度：２．００ｇ／ｃｍ3、比表面積：１．５０ｍ2／ｇ）
ＡｇＣ−Ａ（福田金属箔粉工業（株）製、形状：フレーク状、平均粒径：５．０μｍ、タップ密度：２．７０〜３．９０ｇ／ｃｍ3、比表面積：０．５５〜０．９０ｍ2／ｇ）
（７）（Ｇ）アルミニウム粉
Ｎｏ．８００Ｆ（ミナルコ（株）製のアルミニウム粉の製品名、形状：粒状、平均粒径：３．０〜３．６μｍ、見掛け密度：０．６〜１．０ｇ／ｃｍ3）
Ｎｏ．９００Ｆ（ミナルコ（株）製のアルミニウム粉の製品名、形状：粒状、平均粒径：２．０〜２．６μｍ、見掛け密度：０．６〜１．０ｇ／ｃｍ3）
なお、用いたアルミニウム粉について、それぞれの粒子の外観を示す電子顕微鏡写真を図１に示した。
（８）（Ｈ）カップリング剤
ＫＢＭ−４０３（信越化学工業（株）製、γ−グリシドキシプロピルトリメトキシシラン）
（９）その他の金属粉
ＲＤ１０−１２２０（東洋アルミニウム（株）製のニッケル粉の製品名、形状：フレーク状、平均粒径：１０〜１５μｍ）
２０％Ａｇ−Ｃｕ−ＭＡ（福田金属箔粉工業（株）製の銀コート銅粉の製品名、形状：フレーク状、平均粒径＝７．４μｍ、タップ密度：４．８０ｇ／ｃｍ3、比表面積：０．５０ｍ2／ｇ）
ＳＦＲ−Ｃｕ ５μｍ（日本アトマイズ加工（株）製の銅粉の製品名、形状：フレーク状、平均粒径：５．５μｍ） Abbreviations in Tables 1 and 2 are as follows.
(1) (A) (Meth) acrylic compound ((meth) acrylic ester compound)
SR-349 (product name of ethoxylated bisphenol A diacrylate manufactured by Sartomer)
FA-512AS (product name of dicyclopentenyloxyethyl acrylate manufactured by Hitachi Chemical Co., Ltd.)
FA-512M (product name of dicyclopentenyloxyethyl methacrylate manufactured by Hitachi Chemical Co., Ltd.)
FA-513AS (product name of dicyclopentanyl acrylate manufactured by Hitachi Chemical Co., Ltd.)
FA-513M (Product name of dicyclopentanyl methacrylate manufactured by Hitachi Chemical Co., Ltd.)
(2) (B) Binder resin N-665-EXP (product name of cresol novolac type epoxy resin manufactured by DIC Corporation, epoxy equivalent: 198-208)
(3) (C) Amine compound Dicy (product name of dicyandiamide, manufactured by Japan Epoxy Resin Co., Ltd.)
(4) (D) Polymerization initiator Trigonox 22-70E (manufactured by Kayaku Akzo Co., Ltd., 1,1-bis (t-butylperoxy) cyclohexane, 10 hour half-life temperature: 91 ° C.)
(5) (E) Flexible agent Epolide PB-4700 (manufactured by Daicel Corporation, trade name of epoxidized polybutadiene, epoxy equivalent: 152.4 to 177.8, number average molecular weight = 3500)
(6) (F) Silver powder AgC-212DH (manufactured by Fukuda Metal Foil Powder Industry Co., Ltd.), shape: flake shape, average particle size: 2.9 μm, tap density: 4.75 g / cm 3 , specific surface area: 1.00 m 2 / g)
TC-106 (manufactured by Tokuru Honten Co., Ltd., shape: flake shape, average particle size: 7.0 μm, tap density: 1.90 g / cm 3 , specific surface area: 1.10 m 2 / g)
TC-108 (manufactured by Tokuru Honten Co., Ltd., shape: flake shape, average particle size: 7.0 μm, tap density: 2.00 g / cm 3 , specific surface area: 1.50 m 2 / g)
AgC-A (Fukuda Metal Foil Powder Co., Ltd., shape: flake shape, average particle size: 5.0 μm, tap density: 2.70-3.90 g / cm 3 , specific surface area: 0.55-0. 90m 2 / g)
(7) (G) Aluminum powder no. 800F (Product name of aluminum powder manufactured by Minalco Co., Ltd., shape: granular, average particle size: 3.0 to 3.6 μm, apparent density: 0.6 to 1.0 g / cm 3 )
No. 900F (Product name of aluminum powder manufactured by Minalco Co., Ltd., shape: granular, average particle size: 2.0 to 2.6 μm, apparent density: 0.6 to 1.0 g / cm 3 )
In addition, about the used aluminum powder, the electron micrograph which shows the external appearance of each particle | grain was shown in FIG.
(8) (H) Coupling agent KBM-403 (manufactured by Shin-Etsu Chemical Co., Ltd., γ-glycidoxypropyltrimethoxysilane)
(9) Other metal powder RD10-1220 (product name of nickel powder manufactured by Toyo Aluminum Co., Ltd., shape: flake shape, average particle size: 10-15 μm)
20% Ag-Cu-MA (product name of silver-coated copper powder manufactured by Fukuda Metal Foil Powder Industry Co., Ltd., shape: flake shape, average particle size = 7.4 μm, tap density: 4.80 g / cm 3 , ratio Surface area: 0.50m 2 / g)
SFR-Cu 5 μm (product name, shape: flake shape, average particle size: 5.5 μm, manufactured by Nippon Atomizing Co., Ltd.)

第１表、及び第２表に示されるように、本発明の樹脂ペースト組成物は、従来の銀粉をフィラーに用いた樹脂ペースト組成物（参考例１）に比較して接着強度が同等、あるいは同等以上で、電気伝導性、熱伝導性、作業性に優れていることが確認された。また、タップ密度２．５ｇ／１００ｃｍ3以下の銀粉を含まない比較例１及び３の樹脂ペースト組成物は体積抵抗率が極めて大きく、銀粉／アルミニウムの質量比が本願発明の規定範囲外である比較例２の樹脂ペースト組成物は塗布作業性が悪く、体積抵抗率も悪く、また、アルミニウム粉以外の金属粉を含む比較例４〜６の樹脂ペースト組成物は体積抵抗率が極めて大きい（比較例４）、あるいはゲル化してしまいペースト組成物とならない（比較例５及び６）ことが確認された。
このことから、本発明の樹脂ペースト組成物によれば、希少価値が高い銀を大量に使うことなく、接着強度及び体積抵抗率などの特性が、従来の銀粉をフィラーに用いた樹脂ペースト組成物と同等以上にすることが可能であることが確認できた。 As shown in Tables 1 and 2, the resin paste composition of the present invention has the same adhesive strength as the resin paste composition (Reference Example 1) using conventional silver powder as a filler, or It was confirmed that the electrical conductivity, thermal conductivity, and workability were excellent. Further, the resin paste compositions of Comparative Examples 1 and 3 that do not contain silver powder having a tap density of 2.5 g / 100 cm 3 or less have a very large volume resistivity, and the mass ratio of silver powder / aluminum is outside the specified range of the present invention. The resin paste composition of Example 2 has poor application workability and poor volume resistivity, and the resin paste compositions of Comparative Examples 4 to 6 containing metal powder other than aluminum powder have extremely high volume resistivity (Comparative Example). 4) Or, it was confirmed that it gelled and did not become a paste composition (Comparative Examples 5 and 6).
Therefore, according to the resin paste composition of the present invention, without using a large amount of silver having a high rare value, characteristics such as adhesive strength and volume resistivity are obtained by using conventional silver powder as a filler. It was confirmed that it is possible to make it equal to or greater than.

本発明によれば、半導体チップなどの導体素子とリードフレームなどの支持部材との接着に好適に用いられ、希少価値が高く高価な材料である銀の使用量を低減しつつ、電気導電性、熱伝導性及び接着性に優れ、かつ塗布作業性、機械特性にも優れる安価な樹脂ペースト組成物、及び該樹脂ペースト組成物を用いた半導体装置が得られる。   According to the present invention, it is suitably used for adhesion between a conductor element such as a semiconductor chip and a support member such as a lead frame, while reducing the amount of silver used, which is a rare and expensive material, electric conductivity, An inexpensive resin paste composition excellent in thermal conductivity and adhesiveness and excellent in application workability and mechanical properties, and a semiconductor device using the resin paste composition are obtained.

Claims (9)

（Ａ）（メタ）アクリル化合物、（Ｂ）バインダー樹脂、（Ｃ）アミン化合物、（Ｄ）重合開始剤、（Ｅ）可とう化剤、（Ｆ）銀粉、及び（Ｇ）アルミニウム粉を含有する樹脂ペースト組成物であって、該樹脂ペースト組成物中の（Ｆ）銀粉の含有量は４０質量％以下であり、該（Ｇ）アルミニウム粉／該（Ｆ）銀粉の質量比が０．８〜３．５であり、該（Ｆ）銀粉がタップ密度２．５ｇ／１００ｃｍ3以下である第１の銀粉を含有し、かつ該樹脂ペースト組成物中の該第１の銀粉の含有量が５質量％以上である導体素子接着用樹脂ペースト組成物。 (A) (meth) acryl compound, (B) binder resin, (C) amine compound, (D) polymerization initiator, (E) flexible agent, (F) silver powder, and (G) aluminum powder It is a resin paste composition, Comprising: Content of (F) silver powder in this resin paste composition is 40 mass% or less, Mass ratio of this (G) aluminum powder / this (F) silver powder is 0.8- 3.5, the (F) silver powder contains the first silver powder having a tap density of 2.5 g / 100 cm 3 or less, and the content of the first silver powder in the resin paste composition is 5 mass. % Resin element paste composition for bonding conductive elements. （Ｆ）銀粉の形状がフレーク状であり、平均粒子径が１〜１０μｍである請求項１に記載の導体素子接着用樹脂ペースト組成物。   (F) The resin paste composition for bonding a conductive element according to claim 1, wherein the silver powder has a flake shape and an average particle diameter of 1 to 10 μm. （Ｇ）アルミニウム粉の形状が粒状であり、平均粒子径が１〜６μｍである請求項１又は２に記載の導体素子接着用樹脂ペースト組成物。   (G) The resin paste composition for bonding a conductive element according to claim 1 or 2, wherein the shape of the aluminum powder is granular and the average particle diameter is 1 to 6 µm. （Ａ）（メタ）アクリル化合物が、（メタ）アクリル酸エステル化合物である請求項１〜３のいずれかに記載の導体素子接着用樹脂ペースト組成物。   (A) The (meth) acrylic compound is a (meth) acrylic acid ester compound, The resin paste composition for conductor element adhesion in any one of Claims 1-3. （Ｂ）バインダー樹脂が、エポキシ樹脂である請求項１〜４のいずれかに記載の導体素子接着用樹脂ペースト組成物。   (B) Binder resin is epoxy resin, The resin paste composition for conductor element adhesion in any one of Claims 1-4. （Ｃ）アミン化合物がポリアミン化合物及びイミダゾール化合物から選ばれる少なくとも一種である請求項１〜５のいずれかに記載の導体素子接着用樹脂ペースト組成物。   (C) The amine compound is at least one selected from a polyamine compound and an imidazole compound, The resin paste composition for conductor element adhesion according to any one of claims 1 to 5. （Ｅ）可とう化剤がゴム成分である請求項１〜６のいずれかに記載の導体素子接着用樹脂ペースト組成物。   (E) The resin paste composition for bonding a conductive element according to any one of claims 1 to 6, wherein the flexible agent is a rubber component. さらに、（Ｈ）カップリング剤を含む請求項１〜７のいずれかに記載の導体素子接着用樹脂ペースト組成物。   Furthermore, the resin paste composition for conductor element adhesion in any one of Claims 1-7 containing a coupling agent (H). 半導体素子と支持部材とが、請求項１〜８のいずれかに記載の導体素子接着用樹脂ペースト組成物の硬化物により接合され、かつ該半導体素子と該支持部材の少なくとも一部とが封止剤により封止されてなる半導体装置。   The semiconductor element and the support member are joined by a cured product of the resin paste composition for bonding a conductor element according to any one of claims 1 to 8, and at least a part of the semiconductor element and the support member are sealed. A semiconductor device sealed with an agent.
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