JP5662140B2 - カーボン・ナノチューブ又は半導体ナノワイヤを包含する複合ダイアフラムを用いたセンサ - Google Patents

カーボン・ナノチューブ又は半導体ナノワイヤを包含する複合ダイアフラムを用いたセンサ Download PDF

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JP5662140B2
JP5662140B2 JP2010500903A JP2010500903A JP5662140B2 JP 5662140 B2 JP5662140 B2 JP 5662140B2 JP 2010500903 A JP2010500903 A JP 2010500903A JP 2010500903 A JP2010500903 A JP 2010500903A JP 5662140 B2 JP5662140 B2 JP 5662140B2
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diaphragm
pressure
pressure sensor
mat
gpa
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Expired - Fee Related
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Japanese (ja)
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JP2010522443A (ja
Inventor
スワパン チャクラボルティ
スワパン チャクラボルティ
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ローズマウント インコーポレイテッド
ローズマウント インコーポレイテッド
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
    • G01F1/28—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow by drag-force, e.g. vane type or impact flowmeter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
  • Thin Film Transistor (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Measuring Volume Flow (AREA)
  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
JP2010500903A 2007-03-21 2008-02-04 カーボン・ナノチューブ又は半導体ナノワイヤを包含する複合ダイアフラムを用いたセンサ Expired - Fee Related JP5662140B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/726,128 US7437938B2 (en) 2007-03-21 2007-03-21 Sensor with composite diaphragm containing carbon nanotubes or semiconducting nanowires
US11/726,128 2007-03-21
PCT/US2008/001472 WO2008143720A2 (en) 2007-03-21 2008-02-04 Sensor with composite diaphragm containing carbon nanotubes or semiconducting nanowires

Publications (2)

Publication Number Publication Date
JP2010522443A JP2010522443A (ja) 2010-07-01
JP5662140B2 true JP5662140B2 (ja) 2015-01-28

Family

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JP2010500903A Expired - Fee Related JP5662140B2 (ja) 2007-03-21 2008-02-04 カーボン・ナノチューブ又は半導体ナノワイヤを包含する複合ダイアフラムを用いたセンサ

Country Status (5)

Country Link
US (1) US7437938B2 (zh)
EP (1) EP2130017B1 (zh)
JP (1) JP5662140B2 (zh)
CN (1) CN101669018B (zh)
WO (1) WO2008143720A2 (zh)

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Also Published As

Publication number Publication date
EP2130017A2 (en) 2009-12-09
US20080229839A1 (en) 2008-09-25
EP2130017A4 (en) 2013-12-25
JP2010522443A (ja) 2010-07-01
CN101669018A (zh) 2010-03-10
WO2008143720A3 (en) 2009-01-08
CN101669018B (zh) 2012-03-28
WO2008143720A2 (en) 2008-11-27
US7437938B2 (en) 2008-10-21
EP2130017B1 (en) 2017-07-12

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