JP5633061B2 - Package type vacuum pump unit - Google Patents

Description

  The present invention controls a vacuum output generated in a vacuum pump having a structure in which a rotor in a cylinder is rotated in a non-contact state by a driving force of an electric motor by an inverter capable of adjusting a frequency of electric power supplied to the electric motor. The present invention relates to a package type vacuum pump unit capable of performing

  In the rotary vane pump, since there is a possibility that the function may be deteriorated due to defective popping out of the blade when the rotational speed is lowered, an operation method of controlling the vacuum output by controlling the rotational speed with an inverter is not adopted. For this reason, in this rotary vane pump, the vacuum pressure (output vacuum pressure) output from the vacuum pump is adjusted by a spring-type valve structure so that air is allowed to leak when the vacuum pressure exceeds the set vacuum pressure. A vacuum controller capable of inhaling air is used.

  According to this vacuum controller, it can be maintained at a constant vacuum pressure, and also functions as a safety valve for preventing the reaching operation (deadline operation). However, since this rotary vane pump is always operated in a state in which a constant rotational speed is maintained, it cannot be operated to save energy when the vacuum output may be small.

  On the other hand, the non-contact type vacuum pump with a structure in which the rotor in the cylinder is rotated in a non-contact state does not have the possibility of the above-mentioned deterioration in function, so that it is possible to perform a rotational speed control operation by an inverter. become. Examples of the non-contact type vacuum pump include a claw pump, a roots pump, and a screw pump.

  As a vacuum pump that is controlled by an inverter, for example, an actual intake pressure (output vacuum pressure) is detected at an intake port of a dry vacuum pump, and a set intake pressure (set vacuum pressure) is set by a vacuum exhaust capacity control device (controller). And the output frequency of the inverter, and hence the rotation speed of the pump, are controlled by using the deviation of the comparison (see Patent Document 1). According to this, when the vacuum chamber is evacuated by a pump, the automatic pressure adjustment valve (vacuum controller) is not required, and the actual intake pressure (output vacuum pressure) is used at a pressure higher than the ultimate pressure. In this case, an energy saving effect can be expected by lowering the rotational speed.

  However, in the case of a specification that does not install a vacuum chamber, when the rotation speed of the rotor in the non-contact type vacuum pump is a lower limit by inverter control, and the output vacuum pressure is a degree of vacuum higher than the set vacuum pressure, The inverter cannot be controlled to lower the output vacuum pressure. Unlike compressed air, it is difficult to store a vacuum pressure of up to 1 atm. Therefore, it is practically meaningless to install a vacuum chamber when the exhaust flow rate is above a certain level, and it is rare to install a vacuum chamber.

  In the inverter control, the lower limit is set for the rotation speed of the rotor of the vacuum pump for the following reason. If the rotational speed of the rotor exceeds the lower limit and becomes low speed, the oil may not be sufficiently lubricated by pumping up the oil stored in the gearbox, and the rotating shaft of the electric motor and the vacuum pump This is because the number of rotations of the cooling fan (impeller) fixed to the coupling connecting the rotor rotation shaft is also low, and cooling may not be sufficiently performed.

  Further, according to the present applicant, first, as a pneumatic device station, a pneumatic device for generating negative or positive air pressure such as a vacuum pump and a blower, and a plurality of pneumatic devices can be stored and stored in a closed space. And a blower that generates a cooling airflow that flows in one direction from the lower side to the upper side in the storage box so as to cool the storage box heated by the pneumatic device. (See Patent Document 2) has been proposed. According to this, a plurality of pneumatic devices can be housed centrally and soundproofed, and can be suitably cooled and managed centrally. However, in this pneumatic equipment station, energy saving by inverter control has not been studied.

JP 05-231381 A (first page) JP 2007-127114 A (first page)

The problem to be solved regarding the package type vacuum pump unit is that an appropriate energy-saving operation cannot be performed by inverter control for a lower set vacuum pressure.
Accordingly, an object of the present invention is to provide a package type vacuum pump unit that can appropriately perform energy saving operation by inverter control even for a lower set vacuum pressure.

The present invention has the following configuration in order to achieve the above object.
According to one form of the package type vacuum pump unit according to the present invention, a vacuum pump having a structure in which a rotor in a cylinder is rotated in a non-contact state by a driving force of an electric motor, and control of vacuum output by the vacuum pump. An inverter that can adjust the frequency of the electric power supplied to the electric motor so as to be capable of measuring, a vacuum pressure sensor that measures an output vacuum pressure in a flow path on a vacuum output side of the vacuum pump, and the vacuum pressure sensor A controller that controls the output vacuum pressure to be the set vacuum pressure by comparing the output vacuum pressure with the set vacuum pressure and adjusting the rotational speed of the rotor by the inverter; and the vacuum pump and the inverter A storage box to be stored, and a cooling box installed in the storage box to cool the vacuum pump and the inverter. Comprising a cooling fan unit and for circulating air, the outside air in the flow path of the vacuum output of the vacuum pump is operated to reduce the vacuum degree of the output vacuum pressure by causing an opening to be sucked A pressure regulating valve, and the controller operates the pressure regulating valve when the rotation speed of the rotor is a lower limit controlled by the inverter and the output vacuum pressure is higher than the set vacuum pressure. The output vacuum pressure is controlled to be the set vacuum pressure by lowering the degree of vacuum of the output vacuum pressure.

Further, according to one aspect of the package type vacuum pump unit according to the present invention, a vacuum pump having a structure in which a rotor in a cylinder is rotated in a non-contact state by a driving force of an electric motor, and a vacuum output by the vacuum pump. An inverter that can adjust the frequency of the electric power supplied to the electric motor so that control of the vacuum pump is possible, a vacuum pressure sensor that measures an output vacuum pressure in a flow path on a vacuum output side of the vacuum pump, and a vacuum pressure sensor. The controller that controls the output vacuum pressure to be the set vacuum pressure by comparing the output vacuum pressure with the set vacuum pressure and adjusting the rotation speed of the rotor by the inverter, the vacuum pump, A storage box for storing the inverter, and installed in the storage box to cool the vacuum pump and the inverter. A plurality of vacuum pumps are housed in the storage box, and at least one of the vacuum pumps is provided so that the number of rotations can be adjusted by the inverter, A controller is connected to and controlled by at least one of the inverters.

Further, according to one aspect of the package type vacuum pump unit according to the present invention, the cooling fan device is disposed at an upper portion of the storage box, and is provided so that the cooling air flows upward from below. It can be.

  Further, according to one aspect of the package type vacuum pump unit according to the present invention, when the output vacuum pressure is higher than the upper limit set vacuum pressure in the flow path on the vacuum output side of the vacuum pump, outside air is generated. A safety valve that operates so as to reduce the degree of vacuum of the output vacuum pressure by generating an opening so as to be sucked can be provided.

  According to the package type vacuum pump unit according to the present invention, there is a particularly advantageous effect that energy saving operation can be appropriately performed by inverter control even at a lower set vacuum pressure.

It is a block diagram which shows the operating method of the vacuum pump which concerns on this invention, and the form example of a vacuum pump unit. It is a flowchart figure explaining the control method of the example of a form of FIG. BRIEF DESCRIPTION OF THE DRAWINGS (a) which shows the form example of the package type vacuum pump unit which concerns on this invention is a front view, (b) is a side view. It is a top view of the example of a form of FIG. It is the assembly perspective view which abbreviate | omitted the side panel of the example of FIG.

DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of a package type vacuum pump unit according to the present invention will be described in detail with reference to the accompanying drawings (FIGS. 1 to 5).
The package type vacuum pump unit according to the present invention supplies the electric motor 20 with a vacuum output generated in the vacuum pump 10 having a structure in which the rotor in the cylinder is rotated in a non-contact state by the driving force of the electric motor 20. This is based on the function that can be controlled by the inverter 30 that can adjust the frequency of the power to be generated. Note that the cylinder forms a space where gas is sucked and exhausted, and the rotor is a rotating body that rotates about its axis, for example, a claw shape, a roots shape, a screw shape, or the like. Is mentioned.

  As shown in FIGS. 3 and 5, the vacuum pump 10 is a non-contact type pump in which the rotor in the cylinder 10 a is rotated in a non-contact state by the driving force of the electric motor 20. Reference numeral 21 denotes a silencer, which is a part of a flow path of exhaust discharged from the cylinder 10a. Examples of the non-contact type vacuum pump include a claw pump, a roots pump, and a screw pump.

  The inverter 30 is connected to a power source (not shown), is connected so as to be controlled by a controller 60 described later, and is connected so as to supply electric power whose frequency is adjusted to the electric motor 20. (See FIG. 1).

  According to this inverter 30, when the actually required vacuum output is smaller than the rated vacuum output, the number of rotations of the vacuum pump 10 (rotary pump) is reduced to appropriately adjust the vacuum pressure and the exhaust flow rate. be able to. According to this, energy consumption can be reduced because power consumption can be reduced, noise reduction can be achieved, longer life can be expected due to lower oil temperature and bearing temperature, and maintenance time can be extended. Can be expected.

  Reference numeral 40 denotes a vacuum pressure sensor, which is provided so as to measure the output vacuum pressure in the flow path 11 on the vacuum output side of the vacuum pump 10. As the vacuum pressure sensor 40, it is possible to appropriately perform control automation by using a sensor that can output measurement data (measurement pressure) by an electrical signal.

Reference numeral 50 denotes a pressure adjusting valve that operates to lower the degree of vacuum of the output vacuum pressure by generating an opening so that outside air is sucked in the flow path 11 on the vacuum output side of the vacuum pump 10.
As the pressure regulating valve 50, an electromagnetic opening / closing valve can be used. According to this, it becomes possible to automate the control for outputting a vacuum pressure with a low degree of vacuum at a low cost with a simple configuration. Further, an electromagnetic proportional control valve can be used as the pressure adjusting valve 50. According to this, it becomes possible to automate the control for outputting the vacuum pressure with a low degree of vacuum, and more precise control is possible.

  Reference numeral 60 denotes a controller, which compares the output vacuum pressure measured by the vacuum pressure sensor 40 with the set vacuum pressure, and adjusts the rotation speed of the rotor of the vacuum pump 10 by the inverter 30, thereby changing the output vacuum pressure to the set vacuum pressure. When the rotation speed of the rotor is the lower limit by the control of the inverter 30 and the output vacuum pressure is higher than the set vacuum pressure, the pressure adjusting valve 50 is operated to make the vacuum of the output vacuum pressure It is provided so as to control to a set vacuum pressure by decreasing the degree.

That is, according to the embodiment of the vacuum pump unit according to the above configuration, the pressure (output vacuum pressure) can be adjusted by the rotation speed control (inverter frequency control). . Thereby, the above-described effects such as energy saving can be realized.
In the low pressure range (the range of the output vacuum pressure when the required degree of vacuum is low), the pressure adjustment valve 50 is operated to adjust the pressure. According to this, in the vacuum pump unit, it is possible to adjust the pressure within a wider range of output vacuum pressure, and it is possible to meet a wide range of user needs.

  By the way, the lower limit of the frequency controlled by the inverter 30 can be set to 20 Hz, for example. The reason why the lower limit of the frequency is set in this way is that, with regard to oil lubrication of the vacuum pump 10, if the rotational speed is small, there is a possibility that the oil will be lifted up in the gearbox and there is a possibility that the lubricating oil will be insufficient. There is a possibility that the air volume for cooling by the cooling fan (impeller) fixed to the rotating shaft of the pump 10 is lowered, and the vacuum pump may be overheated. For this reason, in the low pressure range which should be pressure-regulated below a lower limit frequency, pressure regulation by rotation speed control (inverter control) may not be performed appropriately. Therefore, in the low pressure range, the pressure adjustment valve 50 is operated to adjust the pressure in a state where air is leaked (a state where outside air is sucked). In the embodiment shown in FIG. 1, an electromagnetic on-off valve as the pressure regulating valve 50 is provided so as to perform an intermittent operation.

  Reference numeral 70 denotes a safety valve, which generates an opening so that outside air is sucked when the output vacuum pressure is higher than the upper limit set vacuum pressure in the flow path 11 on the vacuum output side of the vacuum pump 10 to thereby output vacuum pressure. Operates to reduce the vacuum level.

  According to the safety valve 70, it is possible to prevent a cutoff operation by using a spring-type safety valve having the same structure as the vacuum controller as a safety device, assuming the worst case of a control system failure. Therefore, it is possible to prevent an overcurrent from occurring due to an increase in required torque due to the shut-off operation, and secure a safe operation.

As shown in FIGS. 3 to 5, reference numeral 80 denotes a storage box that stores the vacuum pump 10 and stores all components including electrical components such as the inverter 30 and the controller 60 in this embodiment. Thus, the vacuum pump unit is packaged. Moreover, according to this storage box 80, since the vacuum pump 10 is stored in a closed space and sound-insulated, it is a soundproof box.
In this embodiment, two vacuum pumps 10 are stored, but only one unit may be stored, or a plurality of three or more units may be stored.

As shown in FIGS. 3 and 4, reference numeral 90 denotes a cooling fan device, which is installed in the storage box 80 and is provided to cool the vacuum pump 10 by circulating cooling air. The cooling fan device 90 can be circulated by using outside air as cooling air and taking in the outside air and exhausting it as indicated by arrows in the figure. The inner space of the storage box 80 is a suitable passage (flow path) for cooling air (outside air). Reference numeral 91 denotes a cooling air exhaust port provided on the top plate surface of the storage box 80.
If a cooling device such as a water-cooled cooler is installed in the storage box 80, the cooling air can be circulated.

  As described above, the cooling pump device 90 can cool the vacuum pump 10, thereby further lowering the lower limit of the frequency controlled by the inverter 30 as described above, and further increasing the rotational speed (rotational speed) of the rotor of the vacuum pump 10. It is possible to reduce the speed and to eliminate the setting of the lower limit. That is, overheating of the vacuum pump 10 due to a decrease in the number of rotations of the cooling fan (impeller) fixed to the rotating shaft of the vacuum pump 10 as the frequency decreases is caused by the cooling fan device 90 installed separately. This is because it can be resolved. According to this, it becomes possible to eliminate the need for the pressure regulating valve 50 that operates in a low pressure region, and the device configuration can be simplified. It should be noted that oil lubrication can be dealt with by other well-known techniques, for example, using a grease-enclosed bearing.

  In addition, in the storage box 80 of this embodiment, at least one stage of the mounting table 81 on which the vacuum pump 10 is mounted is provided in the middle of the height direction. In this embodiment, a two-stage mounting table portion 81 is provided. And the mounting base part 81 has the opening part 82 so that the flow of cooling air may be permitted as shown in FIG.

  Thus, the plurality of vacuum pumps 10 can be suitably accommodated in a three-dimensional manner by the plurality of mounting table portions 81. Therefore, the installation space can be reduced. Further, since the mounting table 81 has the opening 82, the cooling air flows smoothly, and the inside of the storage box 80 can be suitably cooled. Moreover, ventilation resistance can be suppressed low and the burden of the air blower (cooling fan device 90) can be reduced.

Furthermore, the cooling fan device 90 according to the present embodiment is disposed at the upper part of the storage box 80 and is provided so that the cooling air flows upward from below (see FIGS. 3 and 4).
Since the cooling air is thus sucked from the lower side and discharged to the upper side, the one-way cooling air from the bottom to the top together with the rising air flow of the air heated by each vacuum pump 10. This flow can be suitably generated. That is, it is possible to efficiently blow air by matching the convection phenomenon with the air flow by the cooling fan device 90.

  The cooling fan device 90 can reliably obtain the above-described cooling effect by being operated at a constant speed. However, the cooling fan device 90 can be controlled in accordance with the operating state (the number of rotations) and the environment of the vacuum pump 10 or can be turned on. It is possible to further save energy by performing -OFF control.

  Further, in the present invention, a plurality of vacuum pumps 10 are provided, and at least one of the vacuum pumps 10 is provided so that the rotation speed can be adjusted by the inverter 30, and the controller 60 is connected to at least one inverter 30. It can be provided so that it can be controlled. In this embodiment, as shown in FIG. 1, two vacuum pumps 10, 10 are provided, and are connected to inverters 30, 30 and controlled by a controller 60.

Thus, the number control can be performed by providing the plurality of vacuum pumps 10 whose rotation speed is adjusted by the plurality of inverters 30.
For example, when the flow rate requested by the user is less than the rated amount of one vacuum pump 10, only one vacuum pump 10 needs to be operated, and the second and subsequent units are increased according to the increase in required vacuum output. The vacuum pump 10 may be operated.
It should be noted that the vacuum pump 10 that is operating in the unit control may be stopped when there is no air flow and the pressure is maintained. Also, when air flows and the pressure decreases, first, the number of rotations of the operating vacuum pump 10 is increased to increase the pressure, and if that is not sufficient, the next one vacuum pump 10 is controlled to start. do it.

In addition, by controlling the number of the plurality of vacuum pumps 10, if one vacuum pump 10 is abnormal and cannot be operated, the other vacuum pumps 10 may be operated, and the maintenance time of the plurality of units can be shifted. It becomes possible to complement each other.
In the case of a combination of one constant speed vacuum pump 10 and a vacuum pump 10 under inverter control, in the case of full operation of the constant speed vacuum pump 10 and operation at + α flow rate, the + α portion is the pressure at the lower limit of the inverter frequency. Since there is a possibility that the operation is performed with control by the regulating valve, there is a possibility that power is wasted. On the other hand, in the case of the configuration using only the vacuum pump 10 by inverter control, the above-described waste does not occur, which is advantageous for realizing energy saving.

Next, the operation method of the vacuum pump of this embodiment will be described based on the flowchart of FIG.
First, the set vacuum pressure value is input to the controller 60 by the user setting the pressure, and the operation switch (SW) is turned on.
Next, the output vacuum pressure (measured pressure) in the flow path on the vacuum output side of the vacuum pump 10 is compared with the set vacuum pressure (set pressure), PID control is started, and the inverter 30 controls the rotor of the vacuum pump 10. The measurement pressure is controlled to be the set pressure by adjusting the rotation speed.

In this control, in this embodiment, the lower limit of the motor frequency by the inverter 30 that determines the rotational speed of the rotor of the vacuum pump 10 is set to 20 Hz.
As a result of the PID control, when the measured pressure becomes equal to the set pressure, the motor frequency is determined and the pump operation is performed, and the operation is continued without any disturbance.

When the measured pressure is not equal to the set pressure even by PID control (when the measured pressure is higher than the set pressure), the electromagnetic valve (pressure adjusting valve 50) is activated and the vacuum pump 10 is evacuated. An opening is generated so that outside air is sucked in the flow channel 11 on the output side, and the vacuum level of the output vacuum pressure (measurement pressure) is reduced to control the set pressure.
When the measured pressure exceeds the upper limit of the set pressure, the safety valve 70 is set to open by “safety valve operation”.

  As described above, the present invention has been described in various ways with preferred embodiments. However, the present invention is not limited to these embodiments, and many modifications can be made without departing from the spirit of the invention. That is.

DESCRIPTION OF SYMBOLS 10 Vacuum pump 10a Cylinder 11 Vacuum | suction flow path 20 Electric motor 21 Silencer 30 Inverter 40 Vacuum pressure sensor 50 Pressure adjustment valve 60 Controller 70 Safety valve 80 Storage box 81 Mounting base part 82 Opening part 90 Cooling fan apparatus

Claims (5)

A vacuum pump having a structure in which the rotor in the cylinder is rotated in a non-contact state by the driving force of the electric motor;
An inverter capable of adjusting the frequency of power supplied to the electric motor so that the vacuum output can be controlled by the vacuum pump;
A vacuum pressure sensor for measuring an output vacuum pressure in a flow path on a vacuum output side of the vacuum pump;
A controller that controls the output vacuum pressure to become the set vacuum pressure by comparing the output vacuum pressure measured by the vacuum pressure sensor with a set vacuum pressure and adjusting the rotational speed of the rotor by the inverter. When,
A storage box for storing the vacuum pump and the inverter;
A cooling fan device installed in the storage box and circulating cooling air so as to cool the vacuum pump and the inverter ;
A pressure regulating valve that operates to reduce the degree of vacuum of the output vacuum pressure by creating an opening so that outside air is sucked in the flow path on the vacuum output side of the vacuum pump;
The controller activates the pressure adjusting valve when the rotational speed of the rotor is a lower limit controlled by the inverter and the output vacuum pressure is higher than the set vacuum pressure, and the output vacuum pressure A package type vacuum pump unit , wherein the set vacuum pressure is controlled by lowering the degree of vacuum.   A plurality of the vacuum pumps are housed in the storage box, and at least one of the vacuum pumps is provided so that the rotation speed can be adjusted by the inverter, and the controller is connected to and controlled by the at least one inverter. The package type vacuum pump unit according to claim 1.   A vacuum pump having a structure in which the rotor in the cylinder is rotated in a non-contact state by the driving force of the electric motor;
  An inverter capable of adjusting the frequency of power supplied to the electric motor so that the vacuum output can be controlled by the vacuum pump;
  A vacuum pressure sensor for measuring an output vacuum pressure in a flow path on a vacuum output side of the vacuum pump;
  A controller that controls the output vacuum pressure to become the set vacuum pressure by comparing the output vacuum pressure measured by the vacuum pressure sensor with a set vacuum pressure and adjusting the rotational speed of the rotor by the inverter. When,
  A storage box for storing the vacuum pump and the inverter;
  A cooling fan device installed in the storage box and circulating cooling air so as to cool the vacuum pump and the inverter;
  A plurality of the vacuum pumps are housed in the storage box, and at least one of the vacuum pumps is provided so that the rotation speed can be adjusted by the inverter, and the controller is connected to and controlled by the at least one inverter. Package type vacuum pump unit characterized by The package type vacuum pump according to any one of claims 1 to 3, wherein the cooling fan device is disposed at an upper portion of the storage box and is provided so that cooling air flows upward from below. unit. In the flow path on the vacuum output side of the vacuum pump, when the output vacuum pressure becomes higher than the upper limit set vacuum pressure, an opening is created so that outside air is sucked in, thereby reducing the degree of vacuum of the output vacuum pressure. The package type vacuum pump unit according to any one of claims 1 to 4, further comprising a safety valve that operates so as to be lowered .

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