JP5623716B2 - Drill for processing, processing apparatus, and method for manufacturing processed body - Google Patents

Description

  The present invention relates to a technique for processing a workpiece by grinding.

  Grinding is widely used for processing a workpiece such as glass. As shown in FIG. 10, the grinding is generally performed by rotating the machining drill 900 with the tip 910 in contact with the workpiece 950.

  During this grinding, strong friction is generated between the tip 910 and the workpiece 950, and the tip 910 is highly heated, so that it rapidly deteriorates. If this state is left as it is, the tool life of the machining drill 900 is shortened, the machining cost is increased, and the quality of the workpiece is reduced due to grinding with the deteriorated tip 910. Therefore, in order to suppress such a situation, a technique for supplying the liquid L into the machining drill 900 is disclosed (for example, see Patent Document 1).

JP-A-7-108523

  However, in the conventional machining drill 900, the liquid L is unlikely to enter the gap between the tip 910 and the workpiece 950, so that the tip 910 to be cooled most is insufficiently cooled. Further, as a result of the delay of the flow of the liquid L, the discharge of the cutting powder is hindered, and the remaining cutting powder tends to cause a crack in the workpiece 950. As described above, the conventional machining drill 900 has a short tool life, and it is difficult to sufficiently ensure the quality of the workpiece 950.

  The present invention has been made in view of the above circumstances, and provides a machining drill, a machining apparatus, and a machining body manufacturing method capable of prolonging the tool life and improving the quality and machining speed of the machined body. The purpose is to do.

  The present inventors have found that the liquid can be smoothly introduced into the gap between the core drill tip and the workpiece by ejecting the liquid at a predetermined angle with respect to the axial direction of the core drill. It came to be completed. Specifically, the present invention provides the following.

(1) A processing drill comprising: a cylindrical core drill; and an ejection portion from which liquid is ejected from an inner space of the core drill toward the tip of the core drill,
The processing drill in which the liquid is ejected from the ejection part at a predetermined angle with respect to the axial direction of the core drill.

(2) A processing drill comprising a cylindrical core drill, and an ejection portion from which liquid is ejected from the internal space of the core drill toward the tip of the core drill,
The ejection part includes an introduction path through which the liquid is introduced, and an ejection path that communicates the introduction path with the internal space of the core drill and extends at a predetermined angle with respect to the axial direction of the core drill. .

  (3) The processing drill according to (1) or (2), wherein the predetermined angle is 10 ° or more.

  (4) The processing drill according to any one of (1) to (3), wherein the core drill has a shape that collides with a liquid ejected from the ejection portion.

  (5) The drill for processing according to (2), wherein the number of openings in the ejection path is one.

  (6) The processing drill according to any one of (1) to (5), wherein the core drill and the ejection portion are connected via a rotation suppression mechanism that suppresses relative rotation along the axial direction.

  (7) The processing drill according to any one of (1) to (6), a rotation unit that rotates the core drill along the axial direction, and a liquid introduction unit that introduces the liquid into the ejection portion. Processing equipment.

  (8) The processing apparatus according to (7), wherein the liquid introduction unit includes an introduction pressure adjusting unit that adjusts an introduction pressure of the liquid.

  (9) A method for manufacturing a processed body, in which the processed body is manufactured by grinding the workpiece at the tip of the core drill using the processing apparatus according to (7) or (8).

  (10) The manufacturing method according to (9), wherein the liquid is introduced into the ejection part at a pressure of 0.05 MPa to 1 MPa.

  (11) When the core drill is separated from the workpiece, the liquid is ejected from the tip of the core drill in a direction perpendicular to the axial direction or a direction closer to the base end. (9) or the production method according to (10).

  (12) The manufacturing method according to any one of (9) to (11), wherein the workpiece includes amorphous glass and / or crystalline glass.

  (13) The manufacturing method according to any one of (9) to (12), further including a surface treatment step of treating and removing the surface of the workpiece after grinding.

  According to the present invention, since the liquid is ejected at a predetermined angle with respect to the axial direction of the core drill, the liquid can easily enter the gap between the core drill tip and the workpiece. Thereby, tool life can be lengthened and the quality and processing speed of a processed body can be improved.

It is a figure which shows the use condition of a processing apparatus provided with the drill for a process which concerns on one Embodiment of this invention. It is an expanded sectional view of the drill for processing of FIG. It is a schematic diagram which shows the behavior of the liquid at the time of use of the processing apparatus of FIG. It is a schematic diagram which shows the behavior of the liquid when the core drill of the processing apparatus of FIG. 1 is separated from the workpiece. It is a figure which shows another use condition of the processing apparatus of FIG. It is a schematic diagram which shows the behavior of the liquid at the time of use of the processing apparatus of FIG. It is a figure which shows the use condition of a processing apparatus provided with the drill for a process which concerns on another embodiment of this invention. It is a photograph which shows the use condition of the processing apparatus provided with the processing drill which concerns on one Example of this invention. It is a photograph which shows the use condition of a processing apparatus provided with the processing drill which concerns on a comparative example. It is a figure which shows the use condition of the processing drill which concerns on a prior art example.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, in description of each embodiment other than 1st Embodiment, the same code | symbol is attached | subjected about what is common in 1st Embodiment, and the description is abbreviate | omitted.

  FIG. 1 is a diagram illustrating a usage state of a processing apparatus 10 including a processing drill 20 according to an embodiment of the present invention. As shown in FIG. 1, in the method for manufacturing a processed body according to the present invention, a workpiece 90 is ground by a tip 211 of a core drill 21 provided in the processing drill 20. Specifically, the driving force of the driving source 311 is increased by operating the driving source 311 included in the rotating unit 31 of the driving device 30 in a state where the tip 211 is in contact with the abutting surface 91 of the workpiece 90. It is transmitted to the shank 23 via the rotating shaft 313, and the core drill 21 provided on the shank 23 rotates. As a result, the tip 211 grinds the contact surface 91, and a processed body having a desired shape is manufactured.

  As described above, strong friction is generated between the tip 211 and the abutting surface 91, and the tip 211 is highly heated and easily consumed. Further, if the cutting powder generated by grinding the contact surface 91 is accumulated, the cutting powder easily causes a crack in the workpiece 90. Therefore, the liquid L is ejected from the ejection port 27 formed at the tip of the core drill 21 toward the tip 211 of the core drill 21. Thereby, suppression of the above situation is expected.

  Specifically, the liquid from the liquid source 41 of the liquid introduction unit 40 is introduced into the shank 23 through the supply pipe 43. Since the ejection part 25 which connects the supply pipe | tube 43 to the ejection port 27 is provided in the inside of the shank 23, the liquid L which distribute | circulated this ejection part 25 will be ejected from the ejection port 27. FIG.

  FIG. 2 is an enlarged cross-sectional view of the processing drill 20 of FIG. As shown in FIG. 2, the ejection portion 25 according to the present embodiment includes an introduction path 251 through which the liquid L is introduced, the introduction path 251 communicating with the internal space IS of the core drill 21, and the axial direction AX of the core drill 21. , And an ejection path 253 extending at a predetermined angle Θ. As a result, the liquid L is ejected at a predetermined angle Θ with respect to the axial direction AX.

  Thereby, as shown in FIG. 3, in the processing apparatus 10 of this embodiment, the liquid L enters between the end surface 213 and the contact surface 91 and flows to the outer surface 214 side. Since the liquid L is smoothly distributed to the outside as described above, the core drill 21 is sufficiently cooled around the tip 211 and the discharge of the cutting powder is promoted. Thereby, the tool life of the core drill 21 can be prolonged, and the quality and processing speed of the processed body can be improved.

  In the present embodiment, since the liquid L is ejected at an angle with respect to the axial direction AX, the ejection path 253 extends at an angle with respect to the axial direction AX. However, the present invention is not limited thereto. For example, the liquid is ejected from an ejection path extending along the axial direction AX or any other direction, and the ejected liquid is applied to a plate-like member extending at an angle in the axial direction so that the liquid moving direction is You may change into the direction which makes an angle with a direction.

  If the predetermined angle Θ is too small, the liquid easily enters the gap between the end surface 213 and the contact surface 91, while if too large, the collision position of the liquid on the inner surface 212 moves away from the tip 211. As a result, similarly, the entry of the liquid into the gap between the end surface 213 and the contact surface 91 tends to be insufficient. Therefore, the lower limit of the predetermined angle Θ is preferably 10 °, more preferably 20 °, and most preferably 30 °. The upper limit of the predetermined angle Θ is preferably 80 °, more preferably 60 °, and most preferably 45 °.

  FIG. 4 is a schematic diagram showing the behavior of the liquid when the core drill 21 of the processing apparatus 10 of FIG. 1 is separated from the workpiece 90. As shown in FIG. 4, when the liquid L ejected at a predetermined angle Θ with respect to the axial direction AX collides with the inner surface 212, it is scattered in multiple directions when the core drill 21 is separated from the workpiece 90. . Thereby, it becomes easier for the liquid L to enter the gap between the end surface 213 and the contact surface 91, the tool life of the core drill 21 can be further prolonged, and the quality and processing speed of the processed body can be improved. Therefore, the core drill 21 preferably has a shape that collides with the liquid L ejected from the ejection portion 25. However, it is assumed that the liquid L does not collide with the inner surface 212 due to the shape of the core drill 21 or the consumption of the tip 211. It is easy to change and is included in the present invention.

  The “shape colliding with the liquid ejected from the ejection part” can be realized by appropriately setting the inner diameter R and the length LG of the core drill 21 according to the predetermined angle Θ. It has been found that the above-described scattering phenomenon occurs remarkably when the liquid L collides with the vicinity of the tip 211 in the inner surface 212. For this reason, it is preferable to design the core drill 21 so that the tip 211 is positioned on the extension line of the ejection path 253.

  The length LG is preferably set as appropriate in consideration of wear of the core drill 21 accompanying grinding. That is, if the length LG is too small, the core drill 21 is consumed and the core drill 21 needs to be replaced soon. On the other hand, if the length LG is too long, the angle for causing the liquid L to collide with the vicinity of the tip 211. As a result of the reduction in Θ, it is difficult to sufficiently promote the flow of the liquid L.

  Further, the number of the ejection ports 27 is not particularly limited, but is preferably one as shown in FIG. Thereby, since the flow of the liquid L is simplified, distribution can be promoted and the amount of the liquid L used can be reduced. However, the present invention is not limited to this, and the number of the ejection ports 27 may be two or more, and thereby the degree of freedom of the supply amount of the liquid L can be expanded.

  By the way, in order to obtain a desired effect, it is necessary to supply the liquid L over the entire circumference of the contact surface 91, and for this purpose, it is necessary to rotate the ejection portion 25 about the axial direction AX. . Here, in order to rotate the ejection part 25 about the axial direction AX, it is preferable that the core drill 21 and the ejection part 25 are connected via a rotation suppression mechanism that suppresses relative rotation along the axial direction AX. . Specifically, the rotation suppression mechanism may be a mechanism for fixing the core drill 21 and the ejection portion 25 to each other. Thereby, the drive source for rotating the ejection part 25 can be substituted with the drive apparatus 30, and the increase in a number of parts can be prevented. However, the present invention is not limited to this, and a mechanism for rotating the ejection portion 25 may be separately installed. As a result, the liquid L is ejected to the entire circumference of the tip 211, so that the cooling efficiency of the tip 211 can be expected to be improved.

  In order to further promote the circulation of the liquid L, it is preferable that the ejection pressure of the liquid L is sufficiently high. However, even if the ejection pressure is excessive, the improvement in the promotion of the circulation of the liquid L is saturated. Therefore, returning to FIG. 1, the liquid introduction unit 40 preferably has an introduction pump 45 as an introduction pressure adjusting means for adjusting the introduction pressure of the liquid L. Thereby, since the introduction pressure of the liquid L can be adjusted appropriately, the circulation of the liquid L can be promoted with the minimum necessary introduction pressure. The lower limit of the introduction pressure is preferably 0.05 MPa, more preferably 0.1 MPa, and most preferably 0.2 MPa. Further, the upper limit of the introduction pressure is preferably 1 MPa, more preferably 0.5 MPa, and most preferably 0.3 MPa.

  The core drill 21 may have a conventionally known configuration, for example, a metal bond, a resin bond, or electrodeposition, but preferably has a metal bond excellent in wear resistance.

  Although the processing apparatus 10 which concerns on this embodiment may be used in order to excavate a hole as shown in FIG. 1 (that is, only to advance along the axial direction AX), it is not restricted to this. For example, as shown in FIGS. 5 to 6, the machining drill 20 is moved in the horizontal direction (left and right and front and back in FIG. 5) (that is, the drive device 30 also includes a drive source that moves in the horizontal direction. The thickness of the workpiece 90A can be reduced over a predetermined area. In particular, when processing the workpiece 90A provided with the hole 95, in the conventional processing apparatus, the liquid passes downward through the hole 95, and the gap between the end surface 213 and the contact surface 91A is reduced. Intrusion is significantly inhibited. However, according to the processing apparatus 10 of this embodiment, as shown in FIG. 6, the liquid L sufficiently enters the gap between the end surface 213 and the contact surface 91 </ b> A regardless of the presence or absence of the hole 95. The life can be prolonged, and the quality and processing speed of the processed body can be improved.

  In the processing apparatus 10 according to the embodiment, the diameter of the core drill 21 is smaller than the diameter of the shank 23, but the present invention is not limited to this. For example, like the processing apparatus 10B shown in FIG. 7, the diameter of the core drill 21B may be larger than the diameter of the shank 23B. Thereby, the workpiece 90B is processed while leaving the lid portion 97 having a width corresponding to the width of the flange portion 216 of the core drill 21B (that is, depending on the difference between the diameter of the core drill 21B and the diameter of the shank 23B). Thus, it is possible to save the trouble of separately installing the lid after processing. As described above, by appropriately selecting the shapes of the core drill 21 and the shank 23, it is possible to manufacture workpieces having various shapes.

  Moreover, in the said embodiment, although the introduction of the liquid L to the front-end | tip 211 was performed from the interior space IS of the core drill 21, you may perform from the outer side of the core drill 21 further. For example, as shown in FIGS. 5 to 7, when the space sufficient to arrange the liquid introduction device on the outer periphery of the tip 211 can be secured, it is particularly preferable to introduce the liquid L from the outside of the core drill 21 in parallel. preferable. However, as shown in FIG. 3, even when the gap between the outer surface 214 and the side surface 93 is narrow and it is difficult to arrange the liquid introduction device on the outer periphery of the tip 211, the tool life is sufficiently prolonged, The quality of the processed body and the processing speed can be improved.

  In the above embodiment, one machining drill 20 is used, but a plurality of machining drills 20 may be used simultaneously (so-called multi-head method). Thereby, the manufacturing efficiency of a processed body can be improved more.

  The workpiece is not particularly limited and may be made of any material, but the machining drill according to the present invention is particularly suitable for machining hard brittle materials. The hard and brittle material preferably includes amorphous glass and / or crystalline glass. Examples of the crystallized glass include low expansion crystallized glass in which β-quartz and / or β-quartz solid solution is precipitated as a crystal phase. Since these glasses are generally hard and brittle, it is difficult to process them with a drill. However, according to the processing apparatus 10 of this embodiment, it can be processed with high quality at a high processing speed.

  Moreover, after grinding in this way, you may further have the surface treatment process of processing and removing the surface of a to-be-processed body. Thereby, since the fine crack which may remain on the surface of a to-be-processed body is removed, a further high quality processed body can be manufactured. In the present invention, the depth of the crack that can remain is significantly smaller than that of the conventional method (though it is not particularly limited, but it is 5 μm or less), which is advantageous in that the thickness of the surface to be removed is sufficient. The surface treatment procedure may follow a conventionally known method.

  A contact surface 91A (width of about 80 mm) of a ring-shaped workpiece 90A (made of polycrystalline silicon) shown in FIG. During this time, the surface of the workpiece 90A was continuously observed, and the core drill 21 was moved horizontally at the maximum speed at which no roughness was visually observed on the surface.

<Examples 1 and 2>
In Example 1, the processing apparatus 10 was used, the core drill 21 whose tip 211 was made of metal resin, the outer diameter was 18 mm, the length was 9 mm, the thickness was 1.5 mm, and the diameter of the ejection port 27 was 2.5 mm. . The liquid introduction pressure was 0.3 MPa. In Example 2, a core drill in which the ejection path 253 is orthogonal to the axial direction AX is used, and in Comparative Example 1, the same conditions as in Example 1 are used except that a core drill in which the ejection path 253 is parallel to the axial direction AX is used. We performed grinding with.

  In Example 1 and Comparative Example 1, the behavior of the liquid when the core drill is separated from the workpiece is shown in FIGS. As shown in FIG. 8, in the example, the liquid was scattered from the distal end of the core drill toward the proximal end side from the direction orthogonal to the axial direction. On the other hand, in the comparative example, as shown in FIG. 9, the liquid was only ejected along the axial direction of the core drill, and was not substantially scattered. Although not shown, in Example 2, although the liquid was scattered, there was almost no scattering in the direction orthogonal to the axial direction or the direction closer to the base end.

<Examples 3 and 4>
In Examples 3 and 4 and Comparative Example 2, the same procedure as in Examples 1, 2 and Comparative Example 1 was used, except that the workpiece was made of single crystal silicon instead of polycrystalline silicon. Then, grinding was performed.

<Examples 5 and 6>
In Examples 5 and 6 and Comparative Example 3, a workpiece made of low expansion crystallized glass in which β-quartz and β-quartz solid solution is precipitated as a crystal phase is used instead of polycrystalline silicon. Except for this point, grinding was performed in the same procedure as in Examples 1 and 2 and Comparative Example 1, respectively.

  Table 1 shows the results of grinding in Examples and Comparative Examples. The machining speed is a relative value of the relative speed of the horizontal movement with respect to the above-described core drill workpiece, and the tool life is a relative value of the length of the tip 211 consumed during grinding. Further, after removing the surface of the processed body by a thickness of 5 μm by using a colloidal silica free abrasive grain and a suede type polishing pad, the surface was observed with a scanning white interference microscope (NEWVIEW manufactured by ZYGO) and generated on the surface. The frequency of cracks was evaluated in three stages (◎: excellent, ○: good, x: poor). The results are shown in Table 1.

  As shown in Table 1, in the example, it was possible to manufacture a high-quality processed body having a shallow crack at a high processing speed while prolonging the tool life as compared with the comparative example. As a result, it was found that by jetting the liquid at an angle with respect to the axial direction of the core drill, the tool life can be prolonged and the quality of the workpiece can be improved at a high machining speed.

  In particular, in Examples 1, 3, and 5, all of the machining speed, tool life, and cracks are highly evaluated. Therefore, the predetermined angle Θ is set to less than 90 °, and the liquid is ejected so as to collide with the vicinity of the core drill tip. When the core drill is separated from the work piece, the liquid is scattered from the distal end of the core drill in a direction orthogonal to the axial direction or a direction closer to the proximal end, thereby prolonging the tool life and It was found that the quality of the workpiece can be improved at a higher processing speed.

  The present invention is not limited to the above-described embodiment, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.

DESCRIPTION OF SYMBOLS 10 Processing apparatus 20 Processing drill 21 Core drill 211 Tip 25 Ejection part 251 Introduction path 253 Ejection path 27 Ejection port 31 Rotating part (rotating means)
40 Liquid introduction part (liquid introduction means)
45 Introduction pump (Introduction pressure adjusting means)
90, 90A Workpiece AX Axial direction L Liquid Θ Predetermined angle

Claims (8)

A processing drill comprising: a cylindrical core drill; and an ejection portion from which liquid is ejected from the internal space of the core drill toward the tip of the core drill;
Rotating means for rotating the core drill along the axial direction;
And a liquid introduction means for introducing the liquids to the ejection part,
The ejection part includes an inlet passage which the liquid is introduced, ejection path extending at an more than 80 ° of the angle of 10 ° or more with respect to the axial direction of and the core drill communicates this introduction path in the internal space of the core drill and, the possess,
The tip of the core drill is located on the extension line of the ejection path,
When the liquid is ejected from the ejection path while the core drill is separated from the workpiece, the liquid collides with the tip of the core drill, and the direction perpendicular to the axial direction from the tip of the core drill or the same A processing device that scatters radially toward the proximal side . The processing apparatus according to claim 1, wherein the number of openings in the ejection path is one. The processing apparatus according to claim 1, wherein the core drill and the ejection portion are connected via a rotation suppression mechanism that suppresses relative rotation along the axial direction. The processing apparatus according to claim 1, wherein the liquid introduction unit includes an introduction pressure adjusting unit that adjusts an introduction pressure of the liquid. A method of manufacturing a workpiece using the processing device according to any one of claims 1 to 4 , wherein a workpiece is manufactured by grinding a workpiece at a tip of the core drill ,
When the core drill is separated from the workpiece, the liquid is ejected from the core drill in a direction perpendicular to the axial direction or a direction proximal to the axial direction from the tip of the core drill. line cormorant way method to scattered radially with. The manufacturing method according to claim 5, wherein the liquid is introduced into the ejection portion at a pressure of 0.05 MPa to 1 MPa. The manufacturing method according to claim 5 or 6, wherein the workpiece includes amorphous glass and / or crystalline glass. The manufacturing method according to claim 5 , further comprising a surface treatment step of treating and removing the surface of the workpiece after grinding.