JP5598730B2 - アクチュエータ素子とその使用 - Google Patents
アクチュエータ素子とその使用 Download PDFInfo
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- JP5598730B2 JP5598730B2 JP2011523303A JP2011523303A JP5598730B2 JP 5598730 B2 JP5598730 B2 JP 5598730B2 JP 2011523303 A JP2011523303 A JP 2011523303A JP 2011523303 A JP2011523303 A JP 2011523303A JP 5598730 B2 JP5598730 B2 JP 5598730B2
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 33
- 239000002041 carbon nanotube Substances 0.000 claims description 33
- 238000000926 separation method Methods 0.000 claims description 32
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 31
- 239000004033 plastic Substances 0.000 claims description 27
- 229920003023 plastic Polymers 0.000 claims description 27
- 239000000463 material Substances 0.000 claims description 10
- 238000009826 distribution Methods 0.000 claims description 5
- 239000002109 single walled nanotube Substances 0.000 claims description 3
- 230000004888 barrier function Effects 0.000 claims description 2
- 238000002955 isolation Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 229920000058 polyacrylate Polymers 0.000 claims description 2
- 229920002635 polyurethane Polymers 0.000 claims description 2
- 239000004814 polyurethane Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000002834 transmittance Methods 0.000 claims description 2
- 238000013016 damping Methods 0.000 claims 1
- 230000005284 excitation Effects 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 6
- 239000002131 composite material Substances 0.000 description 4
- 229920001971 elastomer Polymers 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 238000006116 polymerization reaction Methods 0.000 description 4
- 239000000806 elastomer Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 229920002379 silicone rubber Polymers 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 230000009477 glass transition Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000006068 polycondensation reaction Methods 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- OQMIRQSWHKCKNJ-UHFFFAOYSA-N 1,1-difluoroethene;1,1,2,3,3,3-hexafluoroprop-1-ene Chemical group FC(F)=C.FC(F)=C(F)C(F)(F)F OQMIRQSWHKCKNJ-UHFFFAOYSA-N 0.000 description 1
- IQQRAVYLUAZUGX-UHFFFAOYSA-N 1-butyl-3-methylimidazolium Chemical compound CCCCN1C=C[N+](C)=C1 IQQRAVYLUAZUGX-UHFFFAOYSA-N 0.000 description 1
- 229920002595 Dielectric elastomer Polymers 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920002959 polymer blend Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 229920002725 thermoplastic elastomer Polymers 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/857—Macromolecular compositions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/877—Conductive materials
- H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/506—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a cylindrical shape and having stacking in the radial direction, e.g. coaxial or spiral type rolls
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Micromachines (AREA)
- Carbon And Carbon Compounds (AREA)
Description
2 誘電分離層
Claims (16)
- アクチュエータ素子であって、
各導電性電極が少なくとも1つの誘電分離層をその両面から境界又は障壁層を介することなく直接的に包囲し、前記分離層と前記電極を同一のエントロピー弾性により変形可能なプラスチック母材を用いてそれぞれ同様に使用温度で形成し、少なくとも前記電極を形成する前記プラスチックにカーボンナノチューブを埋め込む、
アクチュエータ素子。 - 前記プラスチック母材に埋め込む電極のカーボンナノチューブの割合を0.01から30重量パーセントの範囲に維持すること、を特徴とする請求項1に記載のアクチュエータ素子。
- 少なくとも8:1の長さ対外径比を有するカーボンナノチューブを埋め込むこと、を特徴とする請求項1又は2に記載のアクチュエータ素子。
- 使用する前記プラスチックが、使用温度で限界点に到達するまでに少なくとも5%伸長できること、を特徴とする請求項1から3のいずれか一項に記載のアクチュエータ素子。
- 単層カーボンナノチューブを埋め込むこと、を特徴とする請求項1から4のいずれか一項に記載のアクチュエータ素子。
- 100nmの最大外径を有するカーボンナノチューブを使用すること、を特徴とする請求項1から5のいずれか一項に記載のアクチュエータ素子。
- 前記電極と前記分離層が相互に直接結合すること、を特徴とする請求項1から6のいずれか一項に記載のアクチュエータ素子。
- 複数のアクチュエータ素子が積層体を形成すること、を特徴とする請求項1から7のいずれか一項に記載のアクチュエータ素子。
- 前記分離層が、前記電極における割合よりも少ない割合でカーボンナノチューブを含むこと、を特徴とする請求項1から8のいずれか一項に記載のアクチュエータ素子。
- 可視光線の波長範囲の少なくとも一部の範囲において、少なくとも50%の透過性を有すること、を特徴とする請求項1から9のいずれか一項に記載のアクチュエータ素子。
- カーボンナノチューブが規定の長さ対外径比を有すること、及び/又は、前記カーボンナノチューブが、前記誘電分離層の比誘電率を最大とする周波数に直接影響する分布及び/又は前記比誘電率を最大にできる周波数間隔の幅に直接影響する分布を有すること、
を特徴とする請求項1から10のいずれか一項に記載のアクチュエータ素子。 - 前記誘電分離層が100nmから5mmの層厚を有し、前記電極が100nmから5mmの層厚を有すること、を特徴とする請求項1から11のいずれか一項に記載のアクチュエータ素子。
- 電極と分離層を積層した積層体を、端面で開口したハウジング要素内に配置し、電極を接続する電気コネクタを、前記ハウジング要素の内壁に設けること、を特徴とする請求項1から12のいずれか一項に記載のアクチュエータ素子。
- 表面を機能化したカーボンナノチューブを使用すること、を特徴とする請求項1から13のいずれか一項に記載のアクチュエータ素子。
- 前記分離層と前記電極の前記エントロピー弾性により変形可能なプラスチック母材を、ポリウレタン、ポリアクリレート、又はシリコンから形成すること、を特徴とする請求項1から14のいずれか一項に記載のアクチュエータ素子。
- センサ素子、アクチュエータ/センサ素子、光学素子、振動減衰及び/又は励起素子としての、請求項1から15のいずれか一項に記載のアクチュエータ素子の使用。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008039757.1 | 2008-08-20 | ||
DE102008039757A DE102008039757A1 (de) | 2008-08-20 | 2008-08-20 | Aktorelement sowie seine Verwendung |
PCT/DE2009/001198 WO2010020242A2 (de) | 2008-08-20 | 2009-08-19 | Aktorelement sowie seine verwendung |
Publications (3)
Publication Number | Publication Date |
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JP2012500611A JP2012500611A (ja) | 2012-01-05 |
JP2012500611A5 JP2012500611A5 (ja) | 2012-07-19 |
JP5598730B2 true JP5598730B2 (ja) | 2014-10-01 |
Family
ID=41531929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2011523303A Expired - Fee Related JP5598730B2 (ja) | 2008-08-20 | 2009-08-19 | アクチュエータ素子とその使用 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8373335B2 (ja) |
EP (1) | EP2316141B1 (ja) |
JP (1) | JP5598730B2 (ja) |
DE (1) | DE102008039757A1 (ja) |
WO (1) | WO2010020242A2 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009059024A1 (de) * | 2009-12-18 | 2011-06-22 | Robert Bosch GmbH, 70469 | Energietransformer mit elektroaktivem Polymer |
CN101840991B (zh) * | 2010-04-30 | 2012-01-25 | 清华大学 | 电致动结构及电致动元件 |
JP5647874B2 (ja) * | 2010-05-25 | 2015-01-07 | 株式会社イデアルスター | フッ化ビニリデンとトリフルオロエチレン共重合体とカーボンナノチューブとのブレンド配向膜及びその製造方法 |
DE102012016376B4 (de) | 2012-08-13 | 2019-05-16 | Technische Universität Dresden | Verfahren zur geometrischen Strukturierung oder zum Zuschneiden dielektrischer Elastomeraktoren |
DE102012016378B4 (de) | 2012-08-13 | 2020-06-18 | Technische Universität Dresden | Dielektrischer Elastomeraktor und Verfahren zu seiner Herstellung |
DE102012016375B4 (de) | 2012-08-13 | 2018-05-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung dielektrischer Elastomeraktoren |
WO2014157627A1 (ja) | 2013-03-29 | 2014-10-02 | バンドー化学株式会社 | 静電容量型センサシート及び静電容量型センサ |
DE102014200241A1 (de) * | 2014-01-09 | 2015-07-09 | Robert Bosch Gmbh | EAP-Vorrichtung, Verwendung einer EAP-Endloshybridfolie sowie Verfahren zur Herstellung der EAP-Vorrichtung |
CN105336841B (zh) * | 2014-07-23 | 2018-08-17 | 清华大学 | 电热致动器 |
CN105336846B (zh) * | 2014-07-23 | 2018-11-09 | 清华大学 | 电热致动复合材料及电热致动器 |
DE102016213565A1 (de) | 2016-07-25 | 2018-01-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Filter für die Separation von unerwünschten Bestandteilen aus einem Fluid-strom |
DE102018218637B3 (de) * | 2018-10-31 | 2020-02-20 | Festo Ag & Co. Kg | Elektroaktive Polymeraktuatoreinrichtung |
Family Cites Families (20)
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WO1999017929A1 (en) * | 1997-10-03 | 1999-04-15 | The Trustees Of The University Of Pennsylvania | Polymeric electrostrictive systems |
ES2394501T3 (es) | 1999-07-20 | 2013-02-01 | Sri International | Traductores de polímeros electroactivos |
US7276090B2 (en) | 2000-07-10 | 2007-10-02 | Environmental Robots, Inc. | Method of fabricating a dry electro-active polymeric synthetic muscle |
DE10058096A1 (de) * | 2000-11-23 | 2002-06-06 | Fraunhofer Ges Forschung | Adaptronisches Mikrosystem und Verfahren zur Herstellung |
DE10208188B4 (de) * | 2002-02-20 | 2006-05-24 | Amaxa Gmbh | Behälter mit zumindest einer Elektrode |
GB2392309B (en) | 2002-08-22 | 2004-10-27 | Leica Microsys Lithography Ltd | Substrate loading and unloading apparatus |
DE10244312A1 (de) * | 2002-09-23 | 2004-04-01 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Aktuator mit Nanotubes, insbesondere Carbon-Nanotubes, Schichten aus Kohlenstoff-Nanotubes sowie ihre Herstellung und Anwendung |
DE10328374A1 (de) * | 2003-06-24 | 2005-02-03 | Siemens Ag | Piezoelektrisches Bauteil mit elektrischen Anschlusselementen und Verwendung des Bauteils |
EP1698372B1 (de) * | 2003-10-24 | 2009-11-25 | Lonza Cologne AG | Verfahren zur Herstellung eines elektrisch kontaktierbaren Bereichs auf einem dotierten Polymer und nach dem Verfahren herstellbare Elektroden |
JP4277103B2 (ja) * | 2004-02-03 | 2009-06-10 | 国立大学法人信州大学 | カーボンナノファイバーを用いる高分子アクチュエータ |
EP1784890A4 (en) * | 2004-06-14 | 2010-04-07 | Massachusetts Inst Technology | ELECTROCHEMICAL METHODS, DEVICES AND STRUCTURES |
JP2005326825A (ja) * | 2005-03-18 | 2005-11-24 | Kenji Sato | 生物由来の素材を用いた液晶デバイス、フレキシブル透明基板およびカーボンナノチューブ保持体 |
WO2006123317A2 (en) | 2005-05-19 | 2006-11-23 | Ecole Polytechnique Federale De Lausanne (Epfl) | Dielectric electroactive polymer |
ITPI20050095A1 (it) * | 2005-09-05 | 2005-12-05 | Federico Carpi | Attuatore, sensore e generator a polimeri elettroattivi in configurazione ripiegata |
JP5021918B2 (ja) * | 2005-09-07 | 2012-09-12 | 帝人化成株式会社 | ガラス繊維強化難燃性樹脂組成物 |
TWI350793B (en) * | 2006-03-08 | 2011-10-21 | E Ink Corp | Methods for production of electro-optic displays |
KR100801595B1 (ko) * | 2006-11-09 | 2008-02-05 | 제일모직주식회사 | 탄소나노튜브 복합체 조성물 및 이를 이용한 투명 전도성필름 |
US20080128663A1 (en) * | 2006-12-01 | 2008-06-05 | Ivanhoe Chaput | Positive temperature coefficient polymeric formulation |
WO2009017911A1 (en) * | 2007-06-26 | 2009-02-05 | Nanomix, Inc. | Nanoelectronic electrochemical test device |
JP5269673B2 (ja) * | 2009-03-31 | 2013-08-21 | 株式会社リコー | 表示素子及び表示素子の製造方法 |
-
2008
- 2008-08-20 DE DE102008039757A patent/DE102008039757A1/de not_active Withdrawn
-
2009
- 2009-08-19 JP JP2011523303A patent/JP5598730B2/ja not_active Expired - Fee Related
- 2009-08-19 EP EP09741196.1A patent/EP2316141B1/de active Active
- 2009-08-19 US US13/059,527 patent/US8373335B2/en active Active
- 2009-08-19 WO PCT/DE2009/001198 patent/WO2010020242A2/de active Application Filing
Also Published As
Publication number | Publication date |
---|---|
EP2316141A2 (de) | 2011-05-04 |
DE102008039757A1 (de) | 2010-02-25 |
EP2316141B1 (de) | 2014-12-10 |
JP2012500611A (ja) | 2012-01-05 |
WO2010020242A3 (de) | 2010-04-15 |
US20110187238A1 (en) | 2011-08-04 |
WO2010020242A2 (de) | 2010-02-25 |
US8373335B2 (en) | 2013-02-12 |
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