JP5574929B2 - 色素吸着装置 - Google Patents
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- JP5574929B2 JP5574929B2 JP2010262344A JP2010262344A JP5574929B2 JP 5574929 B2 JP5574929 B2 JP 5574929B2 JP 2010262344 A JP2010262344 A JP 2010262344A JP 2010262344 A JP2010262344 A JP 2010262344A JP 5574929 B2 JP5574929 B2 JP 5574929B2
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description
[システム全体の構成]
[色素吸着ユニットの構成]
[色素吸着ユニットの作用/基板搬入動作]
[色素吸着ユニットの作用/色素溶液供給・流れ制御の動作]
[他の実施形態または変形例]
18 搬送装置
20 色素吸着ユニット(色素吸着装置)
26 チャック部
28 搬送駆動部
30 処理槽
32 ボート
34 ボート搬送部
36 上蓋
38a,38b,38c 保持部
44 昇降アーム
46 電磁石
72 上蓋操作部
80 第1色素溶液供給部
82 第2色素溶液供給部
84 第1流れ制御部
86 第2流れ制御部
88L 左側上部ポート
88R 右側上部ポート
90L 左側上部ポート
90R 右側上部ポート
98,100 基板支持部
104 本体張出部
106 蓋体張出部
170 コントローラ
Claims (28)
- 基板の被処理面に形成されている多孔質の半導体層に色素を吸着させる色素吸着装置であって、
前記基板の被処理面を横に向けて前記基板を一列に複数並べて着脱可能に保持するボートと、
前記ボートおよびこれに保持される前記複数の基板を上面開口から出し入れ可能に収容する処理槽と、
前記処理槽の上面開口を塞ぐための上蓋と、
前記ボートを前記処理槽に出し入れするための第1の搬送部と、
前記処理槽内で前記ボートに保持される前記複数の基板が前記色素を所定の溶媒に溶かした色素溶液に浸かるように、前記処理槽内に前記色素溶液を供給する色素溶液供給部と、
処理中に前記処理槽内で前記色素溶液の流れを制御するための流れ制御部と
を有する色素吸着装置。 - 処理中に前記上蓋を被せられている前記処理槽内の前記色素溶液の液面の圧力は大気圧よりも高い、請求項1に記載の色素吸着装置。
- 処理中に前記上蓋を被せられている前記処理槽の内部が隙間なく前記色素溶液で満たされる、請求項1に記載の色素吸着装置。
- 前記処理槽にそれぞれ少なくとも1つの第1および第2のポートが設けられ、
前記色素溶液供給部は、前記第1および第2のポートの少なくとも一方を用いて前記処理槽への前記色素溶液の供給を行い、
前記流れ制御部は、前記第1のポートと前記第2のポートとを用いて前記色素溶液の流れの制御を行う、
請求項1〜3のいずれか一項に記載の色素吸着装置。 - 前記流れ制御部は、前記処理槽の中と外との間で前記色素溶液を循環させる、請求項4に記載の色素吸着装置。
- 前記色素溶液供給部は、前記第1のポートと前記第2のポートとを用いて前記処理槽内で前記色素溶液の旧液を新液と置換する、請求項4に記載の色素吸着装置。
- 前記流れ制御部は、前記第1のポートと前記第2のポートとを用いて前記処理槽内で前記色素溶液の旧液を新液と置換しながら前記色素溶液の流れを制御する、請求項4に記載の色素吸着装置。
- 前記処理槽に排液用の第3のポートが設けられ、
前記色素溶液供給部は、前記第1および第2のポートの少なくとも一方と前記第3のポートとを用いて前記処理槽内で前記色素溶液の旧液を新液と置換し、
前記流れ制御部は、前記第1および第2のポートの少なくとも一方と前記第3のポートとを用いて前記処理槽内で前記色素溶液の旧液を新液と置換しながら前記色素溶液の流れを制御する、
請求項4または請求項5に記載の色素吸着装置。 - 前記流れ制御部は、処理中に前記色素溶液の流れの向きを可変する、請求項1〜8のいずれか一項に記載の色素吸着装置。
- 前記流れ制御部は、処理中に前記色素溶液の流量を可変する、請求項1〜8のいずれか一項に記載の色素吸着装置。
- 前記流れ制御部は、処理中に前記処理槽内の圧力を可変する、請求項1〜8のいずれか一項に記載の色素吸着装置。
- 前記処理槽内で前記ボートから独立して各々の前記基板をその裏面に接触して支持する基板支持部を有する、請求項1〜11のいずれか一項に記載の色素吸着装置。
- 前記基板支持部は、前記ボート上に一列に並んで保持される前記複数の基板に対応した間隔で一列に並んで前記処理槽に設けられる複数の支持部材を有し、各々の前記支持部材が各対応する前記基板の裏面に接触し得る、請求項12に記載の色素吸着装置。
- 各々の前記支持部材は、前記処理槽の底部から上方に延びる棒状または板状の本体張出部を有する、請求項13に記載の色素吸着装置。
- 前記基板支持部は、前記ボート上に一列に並んで保持される前記複数の基板に対応した間隔で一列に並んで前記上蓋に設けられる複数の支持部材を有し、各々の前記支持部材が各対応する前記基板の裏面に接触し得る、請求項12に記載の色素吸着装置。
- 各々の前記支持部材は、前記上蓋の下面から下方に延びる棒状または板状の蓋体張出部を有する、請求項15に記載の色素吸着装置。
- 各々の前記支持部材は、1枚の前記基板のみに接触し得てこれを支持する、請求項13〜16のいずれか一項に記載の色素吸着装置。
- 前記ボート上で前記複数の基板は、相隣接する各一対の前記基板がそれぞれの被処理面を互いに逆方向に向けるように、一列に並んで配置され、
各々の前記支持部材は、相隣接する各一対の前記基板に接触し得てそれらを支持する、
請求項13〜16のいずれか一項に記載の色素吸着装置。 - 前記処理槽内で各々の前記基板の裏面に沿った前記色素溶液の流れを抑制する流れ抑制部を有する、請求項1〜11のいずれか一項に記載の色素吸着装置。
- 前記流れ抑制部は、前記ボート上に一列に並んで保持される前記複数の基板に対応した間隔で一列に並んで前記処理槽に設けられる複数の流れ抑制部材を有し、各々の前記流れ抑制部材が各対応する前記基板の裏面に沿った前記色素溶液の流れを抑制する、請求項19に記載の色素吸着装置。
- 各々の前記流れ抑制部材は、前記処理槽の底部から上方に延びる棒状または板状の本体バッフルを有する、請求項20に記載の色素吸着装置。
- 前記流れ抑制部は、前記ボート上に一列に並んで保持される前記複数の基板に対応した間隔で一列に並んで前記上蓋に設けられる複数の流れ抑制部材を有し、各々の前記流れ抑制部材が各対応する前記基板の裏面に沿った前記色素溶液の流れを抑制する、請求項19に記載の色素吸着装置。
- 各々の前記流れ抑制部材は、前記上蓋の下面から下方に延びる棒状または板状の蓋体バッフルを有する、請求項22に記載の色素吸着装置。
- 各々の前記流れ抑制部材は、1枚の前記基板に対して局所的にその裏面の近傍で前記色素溶液の流れを抑制する、請求項20〜23のいずれか一項に記載の色素吸着装置。
- 前記ボート上で前記複数の基板は、相隣接する各一対の前記基板がそれぞれの被処理面を逆方向に向けるように、一列に並んで配置され、
各々の前記流れ抑制部材は、相隣接する各一対の前記基板に対して局所的にそれらの裏面の近傍で前記色素溶液の流れを抑制する、
請求項20〜23のいずれか一項に記載の色素吸着装置。 - 前記第1の搬送部は、
前記上蓋から分離して前記ボートと着脱可能に結合するアームを有し、
色素吸着処理のために前記ボートを前記複数の基板と一緒に前記処理槽の中に収容する間は前記アームを前記ボートから離脱させ、
前記ボートを前記処理槽の外で搬送し、または前記処理槽に出し入れする時は前記アームを前記ボートに結合させる、
請求項1〜25のいずれか一項に記載の色素吸着装置。 - 前記第1の搬送部は、
前記ボートと一体に結合しているアームと、
前記上蓋を前記アームに着脱可能に固定する上蓋固定部と
を有し、
色素吸着処理のために前記ボートを前記複数の基板と一緒に前記処理槽の中に収容する間は、前記上蓋固定部により前記アームに前記上蓋を固定した状態で前記処理槽の上面開口を前記上蓋で塞ぎ、
前記処理槽の外で、前記ボートに前記複数の基板をローディングし、または前記ボートから前記複数の基板をアンローディングする時は、前記上蓋固定部を解除させて、前記アーム上で前記上蓋を退避させ、または前記アームから前記上蓋を分離させる、
請求項1〜25のいずれか一項に記載の色素吸着装置。 - 前記第1の搬送部と前記複数の基板の受け渡しを行う第2の搬送部を有する、請求項1〜27のいずれか一項に記載の色素吸着装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
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JP2010262344A JP5574929B2 (ja) | 2010-11-25 | 2010-11-25 | 色素吸着装置 |
CN2011800564206A CN103222107A (zh) | 2010-11-25 | 2011-09-27 | 色素吸附装置及色素吸附方法 |
KR1020137013365A KR20140004088A (ko) | 2010-11-25 | 2011-09-27 | 색소 흡착 장치 및 색소 흡착 방법 |
PCT/JP2011/005415 WO2012070176A1 (ja) | 2010-11-25 | 2011-09-27 | 色素吸着装置及び色素吸着方法 |
EP11842523.0A EP2645468A1 (en) | 2010-11-25 | 2011-09-27 | Dye adsorption apparatus and dye adsorption method |
US13/989,151 US9093222B2 (en) | 2010-11-25 | 2011-09-27 | Dye adsorption apparatus and dye adsorption method |
TW100142315A TW201246574A (en) | 2010-11-25 | 2011-11-18 | Dye adsorption apparatus and dye adsorption method |
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EP (1) | EP2645468A1 (ja) |
JP (1) | JP5574929B2 (ja) |
KR (1) | KR20140004088A (ja) |
CN (1) | CN103222107A (ja) |
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JP6228597B2 (ja) * | 2013-09-20 | 2017-11-08 | 積水化学工業株式会社 | 色素増感太陽電池用電極の製造方法 |
US11220758B2 (en) * | 2016-06-15 | 2022-01-11 | Seoul Viosys Co., Ltd. | Systems and methods for thermal hydro-synthesis of semiconductor materials by holding a substrate wafer within a chamber in a vertical direction |
TWI604622B (zh) * | 2016-07-14 | 2017-11-01 | 財團法人工業技術研究院 | 電極吸附染料的方法及其裝置 |
CN106531678A (zh) * | 2017-01-05 | 2017-03-22 | 江西比太科技有限公司 | 硅片抓取装置及使用该装置的太阳能电池生产设备 |
KR102185097B1 (ko) * | 2018-06-18 | 2020-12-01 | 에스케이실트론 주식회사 | 웨이퍼 세정장치 |
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JP2000348783A (ja) * | 1999-06-01 | 2000-12-15 | Nikon Corp | 色素増感型太陽電池の製造方法 |
JP4414036B2 (ja) | 1999-12-27 | 2010-02-10 | シャープ株式会社 | 色素増感型太陽電池の作製方法 |
JP4574816B2 (ja) * | 2000-08-25 | 2010-11-04 | シャープ株式会社 | カラー太陽電池およびその作製方法 |
JP4854971B2 (ja) | 2005-03-07 | 2012-01-18 | 藤森工業株式会社 | 色素増感型太陽電池モジュール |
EP2403051A4 (en) * | 2009-02-25 | 2013-03-06 | Tokyo Electron Ltd | METHOD AND DEVICE FOR DYE ABSORPTION FOR A PHOTOSENSIBILIZER DYE, METHOD AND DEVICE FOR PREPARING A COLOR-SENSITIZED SOLAR CELL AND COLOR-SENSITIZED SOLAR CELL |
KR101335190B1 (ko) * | 2010-02-25 | 2013-11-29 | 고쿠리츠 다이가쿠 호진 큐슈 코교 다이가쿠 | 색소 증감 태양 전지의 제조 장치 및 색소 증감 태양 전지의 제조 방법 |
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WO2012070176A1 (ja) | 2012-05-31 |
CN103222107A (zh) | 2013-07-24 |
EP2645468A1 (en) | 2013-10-02 |
JP2012113981A (ja) | 2012-06-14 |
US9093222B2 (en) | 2015-07-28 |
US20130316485A1 (en) | 2013-11-28 |
KR20140004088A (ko) | 2014-01-10 |
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