JP5571472B2 - Heater unit with shaft and heater unit manufacturing method with shaft - Google Patents

Description

  The present invention relates to a heater unit with a shaft for heating while supporting a semiconductor substrate, and a method for manufacturing a heater unit with a shaft.

  In a semiconductor substrate manufacturing process, such as annealing, the semiconductor substrate is heat-treated in a vacuum chamber. Evenly heating the semiconductor substrate and reducing the temperature distribution has a large effect on the yield. In recent years, more precise temperature control has been desired.

  In this heat treatment of a semiconductor substrate, a heater with a shaft for heating while supporting the semiconductor substrate is known. A heater with a shaft is composed of a heater plate on which a semiconductor substrate as an object to be heated is placed, a sheath heater embedded therein, and a shaft that supports the heater plate. The heater with a shaft has a problem that it is difficult to input heat to the center portion of the shaft due to restrictions on the routing of the sheath heater wire, and heat is easily radiated through the shaft, so that the temperature at the center portion of the plate is lowered.

  On the other hand, a technique has been proposed in which the temperature distribution of the heater plate is improved by combining the materials used for the heater plate, and the temperature distribution of the semiconductor substrate placed thereon is made uniform.

  Further, in the ceramic heater in which the heater plate is a ceramic sintered body, the shaft portion that supports the heater plate has a first member made of a ceramic sintered body having the same composition as the heater plate, and has a lower thermal conductivity than the heater plate. A technique for preventing heat dissipation by providing a second member made of a ceramic sintered body is disclosed (see Patent Document 1).

JP 2009-176469 A

  However, in order to improve the temperature distribution of the heater by combining different materials by brazing etc., joining is difficult due to the complicated shape of the material, and strain due to the difference in thermal expansion is different between different materials because the joining temperature is high. There was a problem of accumulating. Furthermore, there are restrictions on the materials that can be selected due to the relationship between the melting point of the materials and the bonding temperature, and it has been difficult to improve the temperature distribution to a desired extent.

  The present invention has been made in view of the above, and has a heater unit with a shaft and a shaft that improve the temperature distribution of the heater by combining different materials and eliminate distortion when joining different materials. An object is to provide a heater unit manufacturing method.

  In order to solve the above-described problems and achieve the object, a heater unit with a shaft according to the present invention includes a heater plate that places and heats an object to be heated, and a heater with a shaft that has a shaft that supports the heater plate. The heater plate includes a flat base portion joined to the shaft, a first plate portion laminated on an outer peripheral portion of the base portion, and a material constituting the first plate portion. A second plate part selected from a material having a high thermal conductivity and stacked so as to fill an inner peripheral side of the first plate part, and the first plate part and the second plate part include the first plate part and the second plate part. The solid-state material powder constituting each of the first plate portion and the second plate portion is applied to the base portion at a temperature lower than the melting point of the material powder by a heated compressed gas. Characterized in that it is formed by blowing, respectively.

  Moreover, the heater unit with a shaft according to the present invention is the above-described invention, wherein the heater plate includes a mounting portion that is provided on the first plate portion and the second plate portion and mounts an object to be heated. The placement unit is configured to spray the solid-state material powder constituting the placement unit on the first plate unit and the second plate unit with a heated compressed gas at a temperature lower than the melting point of the material powder. It is formed.

  Moreover, the heater unit with a shaft according to the present invention is characterized in that, in the above invention, the base portion and the placement portion are made of the same material as the first plate portion.

  In the heater unit with a shaft according to the present invention, in the above invention, the heater plate has a lower thermal conductivity than a material constituting the first plate portion between the base portion and the second plate portion. A third plate portion selected from a material, wherein the third plate portion is a material powder in a solid state constituting the third plate portion at a temperature lower than the melting point of the material powder by a heated compressed gas. It is formed by spraying on a base part.

  Moreover, the heater unit with a shaft according to the present invention is characterized in that, in the above invention, the heater plate includes a sheath heater disposed in the first plate portion and the second plate portion.

  In the heater unit with a shaft according to the present invention, the first plate portion is made of aluminum or an aluminum alloy, and the second plate portion is made of copper or a copper alloy.

  The heater unit with a shaft according to the present invention is characterized in that, in the above invention, the third plate portion is made of titanium or a titanium alloy.

  Moreover, the heater unit with a shaft according to the present invention is characterized in that, in the above invention, the first plate portion is made of stainless steel and the second plate portion is made of aluminum or an aluminum alloy.

  A heater unit with a shaft according to the present invention is a heater unit with a shaft having a heater plate for placing and heating an object to be heated and a shaft for supporting the heater plate, wherein the heater plate includes the shaft. A plate-like base portion joined to the base portion, a third plate portion selected from a material having a lower thermal conductivity than the material constituting the base portion, and laminated at the center of the base portion; and the base portion A mounting portion on which the object to be heated stacked on the base portion and the third plate portion is placed, wherein the third plate portion and the placement portion are The solid-state material powder constituting each of the third plate portion and the placement portion is placed on the base portion at a temperature lower than the melting point of the material powder by a heated compressed gas. Characterized in that it is formed by blowing, respectively.

  A method for manufacturing a heater unit with a shaft according to the present invention is a method for manufacturing a heater unit with a shaft having a heater plate for placing and heating an object to be heated, and a shaft for supporting the heater plate, wherein the shaft An arrangement step in which a sheath heater is disposed on a flat base portion to be joined to the outer peripheral portion of the base portion, and a solid-state material powder is heated at a temperature lower than the melting point of the material powder by a heated compressed gas. The first plate portion stacking step for forming the first plate portion by spraying on the base, and the thermal conductivity of the material constituting the first plate portion so as to fill the inner peripheral side of the first plate portion. Spraying the material powder in a solid state selected from materials having a high content on the base with a heated compressed gas at a temperature lower than the melting point of the material powder. More, characterized in that it comprises a second plate portion laminating step of forming the second plate portion.

  The method for manufacturing a shaft-equipped heater unit according to the present invention is characterized in that, in the above invention, the second plate portion laminating step is performed prior to the first plate portion laminating step.

  Further, the method for manufacturing a heater unit with a shaft according to the present invention is the above-described invention, wherein the material powder in a solid phase is heated with compressed gas after the laminating step of the first plate portion and the second plate portion. Including a placement portion stacking step of forming a placement portion by spraying the first plate portion and the second plate portion at a temperature lower than the melting point of the powder, the base portion, the first plate portion, The parts are made of the same material.

  Moreover, the heater unit manufacturing method with a shaft which concerns on this invention is lower in heat conductivity than the material which comprises the said 1st plate part in the said invention before the lamination process of the said 1st plate part and the said 2nd plate part. A third plate part is formed on the base by spraying the material powder in a solid phase selected from the material onto the base part with a heated compressed gas at a temperature lower than the melting point of the material powder. A plate portion laminating step is included.

  A method for manufacturing a heater unit with a shaft according to the present invention is a method for manufacturing a heater unit with a shaft having a heater plate for placing and heating an object to be heated, and a shaft for supporting the heater plate, wherein the shaft The material powder in a solid phase selected from a material having a lower thermal conductivity than the material constituting the base part is heated and compressed in a groove formed in the center part of a flat base part joined to the base part. A third plate portion stacking step for forming a third plate portion on the base by spraying with a gas at a temperature lower than the melting point of the material powder, and an arrangement in which a sheath heater is disposed on the base portion and the third plate portion And the same material as that constituting the base portion on the base portion and the third plate portion where the sheath heater is disposed. The material powder is sprayed with a heated compressed gas at a temperature lower than the melting point of the material powder, thereby forming a placement part for placing an object to be heated on the base part and the third plate part. And a partial lamination step.

  In the heater unit with a shaft of the present invention, the second plate portion at the center of the heater plate on which the object to be heated is placed is made of a material having a higher thermal conductivity than the material constituting the base portion and the first plate portion. The plate portion and the second plate portion are formed by the so-called cold spray method in which a solid phase powder material is sprayed and laminated with a compressed gas having a melting point or less to improve the temperature distribution of the heater and the heater due to thermal fatigue. There is an effect that it is possible to effectively prevent peeling, cracking and the like at the interface between different materials of the plate.

FIG. 1 is a cross-sectional view showing a configuration of a heater unit with a shaft according to Embodiment 1 of the present invention. FIG. 2 is a flowchart for explaining a method of manufacturing the heater unit with a shaft according to the first embodiment of the present invention. FIG. 3 is an explanatory view showing an outline of a thermal spraying apparatus used for manufacturing the heater unit with a shaft according to the first embodiment of the present invention. FIG. 4 is a cross-sectional view showing a manufacturing process of the heater unit with a shaft according to the first embodiment of the present invention. FIG. 5 is a cross-sectional view showing a manufacturing process of the heater unit with a shaft according to the first embodiment of the present invention. FIG. 6 is a cross-sectional view illustrating a manufacturing process of the heater unit with a shaft according to the first embodiment of the present invention. FIG. 7 is a cross-sectional view showing a manufacturing process of the heater unit with a shaft according to the first embodiment of the present invention. FIG. 8 is a cross-sectional view showing the configuration of the heater unit with a shaft according to the first modification of the first embodiment of the present invention. FIG. 9 is a cross-sectional view showing a configuration of a heater unit with a shaft according to the second modification of the first embodiment of the present invention. FIG. 10 is a cross-sectional view showing the configuration of the heater unit with a shaft according to the second embodiment of the present invention. FIG. 11 is a flowchart illustrating a method for manufacturing the heater unit with a shaft according to the second embodiment of the present invention. FIG. 12 is a cross-sectional view illustrating a manufacturing process of the heater unit with a shaft according to the second embodiment of the present invention. FIG. 13: is sectional drawing which shows the manufacturing process of the heater unit with a shaft which concerns on Embodiment 2 of this invention. FIG. 14 is a cross-sectional view illustrating a manufacturing process of the heater unit with a shaft according to the second embodiment of the present invention. FIG. 15 is a cross-sectional view showing a manufacturing process of the heater unit with a shaft according to the second embodiment of the present invention. FIG. 16 is a cross-sectional view showing a manufacturing process of the heater unit with a shaft according to the second embodiment of the present invention. FIG. 17 is a cross-sectional view illustrating a manufacturing process of the heater unit with a shaft according to the second embodiment of the present invention. FIG. 18 is a cross-sectional view showing a configuration of a heater unit with a shaft according to the first modification of the second embodiment of the present invention. FIG. 19 is a cross-sectional view showing a configuration of a heater unit with a shaft according to the second modification of the second embodiment of the present invention. FIG. 20 is a cross-sectional view showing a configuration of a heater unit with a shaft according to Embodiment 3 of the present invention. FIG. 21 is a flowchart illustrating a method for manufacturing the heater unit with a shaft according to the third embodiment of the present invention. FIG. 22 is a cross-sectional view showing a configuration of a heater unit with a shaft according to the first modification of the third embodiment of the present invention. FIG. 23 is a cross-sectional view illustrating a configuration of a heater unit with a shaft according to the second modification of the third embodiment of the present invention.

  Embodiments of a heater unit with a shaft and a method for manufacturing a heater unit with a shaft according to the present invention will be described below in detail with reference to the drawings. In addition, this invention is not limited to these embodiment, A various change is possible in the range which does not deviate from the summary of this invention.

(Embodiment 1)
FIG. 1 is a cross-sectional view showing a configuration of a heater unit 100 with a shaft according to Embodiment 1 of the present invention. The shaft-equipped heater unit 100 includes a substantially disc-shaped heater plate 1 and a shaft portion 2 that supports the heater plate 1. The heater unit with shaft 100 is usually installed in a box-shaped housing in a process chamber which is a reaction chamber of a semiconductor manufacturing apparatus. The inside of the housing is airtight so as to be in a vacuum state. In the first embodiment, the disk-shaped heater plate 1 is used. However, the present invention is not limited to this, and may be any shape that takes into consideration the shape of the object to be heated. Good.

  The heater plate 1 includes a base part 3 joined to the shaft part 2, a first plate part 4 stacked on the outer peripheral part of the base part 3, and a central part of the base part 3, and the first plate part 4 2nd plate part 5 laminated | stacked so that the inner peripheral side may be filled, and the mounting part 7 which mounts the semiconductor substrate which is a to-be-heated material is provided.

  The base portion 3 has a disk-shaped opening 13 at the center, and the sheath heater 6 is disposed on the base portion 3 on substantially one surface. A power supply line 8 that supplies power to the sheath heater 6 is connected to an external power source via the opening 13. The sheath heater 6 has a resistance heating element such as a nichrome wire inside and an insulator in which powder such as magnesia is solidified on the outer periphery thereof, and supplies power to the resistance heating element to generate heat.

  The first plate portion 4 is stacked on the outer peripheral portion of the base portion 3. The base part 3, the first plate part 4, and the mounting part 7 to be described later are usually made of the same material. This material is appropriately selected based on the operating temperature range as the heater plate 1. The material of the heater plate 1 is preferably a metal having a high thermal conductivity. For example, aluminum or an aluminum alloy (thermal conductivity: 100 to 240 W / m · K) is preferably used, but is not limited thereto. Depending on the operating temperature range of the heater plate 1, iron or iron alloy (thermal conductivity: 10 to 80 W / m · K), copper or copper alloy (thermal conductivity: 100 to 400 W / m · K), nickel or nickel Alloy (thermal conductivity: 5 to 100 W / m · K), titanium or titanium alloy (thermal conductivity: 5 to 30 W / m · K), indium (thermal conductivity: 82 W / m · K, at room temperature), lead (Thermal conductivity: 35 W / m · K, at room temperature), magnesium (thermal conductivity: 156 W / m · K, at room temperature), tin (thermal conductivity: 67 W / m · K, at room temperature), silver (heat Conductivity: 420 W / m · K, normal temperature ), Zinc (thermal conductivity: 116W / m · K, may be selected from normal temperature), and the like.

  The second plate portion 5 is a central portion of the base portion 3 and is laminated so as to fill the inner peripheral side of the first plate portion 4. The second plate portion 5 is selected from a material having a higher thermal conductivity than the material constituting the first plate portion 4. When aluminum or an aluminum alloy is selected as the first plate portion, the second plate portion 5 has a higher thermal conductivity. Materials such as copper or copper alloys are preferably used. When stainless steel is used as the first plate member, a material having higher thermal conductivity than stainless steel, for example, aluminum or an aluminum alloy is preferably used as the second plate portion 5. If the second plate portion 5 is made of a material having a higher thermal conductivity than the first plate portion 4, the outer peripheral portion of the heater plate 1 even when heat is radiated from the center portion of the base portion 3 in contact with the shaft portion 2 to the shaft portion 2. Therefore, the temperature distribution of the heater plate 1 can be improved. Moreover, it is preferable to make the magnitude | size of the 2nd plate part 5 larger than the outer diameter of the shaft part 2 mentioned later. In addition, the thickness of the second plate portion varies depending on the diameter and thickness of the heater plate 1, but in order to easily transfer heat from the outer peripheral portion of the heater plate 1 to the center portion, the thickness of the heater plate 1. It is preferable that it is more than half the length.

  The mounting unit 7 is stacked on the first plate unit 4 and the second plate unit 5 and mounts a semiconductor substrate which is an object to be heated. A spacer that reduces contact between the semiconductor substrate and the surface of the heater plate 1 (mounting unit 7) may be installed on the mounting unit 7. Although the heater plate 100 with a shaft according to the first embodiment includes the placement portion 7, it is not always necessary to provide the placement portion 7, and an object to be heated is placed on the first plate portion 4 and the second plate portion 5. It may be placed. When aluminum or an aluminum alloy is used as the first plate member 4 and copper or a copper alloy is used as the second plate portion 5, it is preferable to provide the placement portion 7 in order to prevent copper contamination to the object to be heated.

  The shaft portion 2 includes a shaft main body portion 9 that supports the heater plate 1 and a flange portion 10 that is joined to the heater plate 1. The shaft main body 9 has a hollow cylindrical shape, and the power supply line 8 is disposed inside. The flange portion 10 is joined to the base portion 3 disposed on the shaft side of the heater plate 1 by welding or brazing. Although the shaft-equipped heater 100 according to the first embodiment connects the shaft portion 2 and the heater plate 1 via the flange portion 10, the end portion of the shaft portion 2 and the heater are provided without providing the flange portion 10. The plate 1 may be joined by welding or brazing. Note that the shaft portion 2 and the base portion 3 can also be laminated by a cold spray method described later.

  Next, with reference to FIGS. 2-7, the manufacturing method of the heater unit 100 with a shaft which concerns on Embodiment 1 is demonstrated. FIG. 2 is a flowchart for explaining a method of manufacturing the heater unit with shaft 100 according to Embodiment 1 of the present invention. FIG. 3 is an explanatory view showing an outline of a thermal spraying apparatus used for manufacturing the heater unit with a shaft according to the first embodiment of the present invention. 4-7 is sectional drawing explaining the manufacturing process of the heater unit 100 with a shaft.

  As shown in the flowchart of FIG. 2, the opening 13 of the base 3 is first masked with the masking member 11 (step S101). The base part 3 may be formed by machining or casting. Thereafter, as shown in FIG. 4, the sheath heater 6 is disposed on substantially one surface of the base portion 3 (step S102).

  Then, the powder material of the 2nd plate part 5 is cold-sprayed on the base part 3 using the thermal spray apparatus 50 as shown in FIG. 3 (step S103). The thermal spraying device 50 is heated by the gas heater 40 that heats the compressed gas below the melting point, the powder material that sprays the sprayed material, and is supplied to the spray gun 44, and the spray gun 44. A gas nozzle 45 for injecting the material powder mixed with the compressed gas onto the substrate.

  As the compressed gas, helium, nitrogen, air or the like is used. The supplied compressed gas is supplied to the gas heater 40 and the powder supply device 41 by valves 42 and 43, respectively. The compressed gas supplied to the gas heater 40 is heated to, for example, 50 to 700 ° C. and then supplied to the spray gun 44. More preferably, the upper limit temperature of the thermal spray material powder heated by the compressed gas is kept below the melting point of the material. This is because the oxidation of the material can be suppressed by keeping the powder heating temperature below the melting point of the material. The compressed gas supplied to the powder supply device 41 supplies, for example, material powder having a particle size of about 10 to 100 μm in the powder supply device 41 to the spray gun 44 so as to have a predetermined discharge amount. The heated compressed gas is converted into a supersonic flow (about 340 m / s or more) by a gas nozzle 45 having a tapered tapered shape. The powder material supplied to the spray gun 44 is accelerated by the injection of the compressed gas into the supersonic flow, and collides with the substrate at a high speed in the solid state to form a film. Any apparatus capable of forming a film by colliding material powder against a substrate in a solid phase can be used for manufacturing the heater unit 100 with a shaft according to the first embodiment, and is limited to the thermal spraying apparatus 50 of FIG. Is not to be done.

  As shown in FIG. 5, the powder material of the second plate portion 5 is laminated by cold spray to form the second plate portion 5 at the center of the base portion 3 (step S <b> 103), and then the powder of the first plate portion 4. The material is laminated by cold spraying on the outer periphery of the base portion 3 outside the second plate portion 5 to form the first plate portion 4 (see step S104, FIG. 6). The upper surfaces of the laminated first plate portion 4 and second plate portion 5 form a flush horizontal surface. In addition, you may perform the lamination process (step S103) of the 2nd plate part 5, and the lamination process (step S104) of the 1st plate part 4 before and after each process.

  Then, as shown in FIG. 7, the powder material of the mounting part 7 is laminated | stacked by the cold spray on the 1st plate part 4 and the 2nd plate part 5, and the mounting part 7 for desired thickness is formed. (Step S105).

  After all the materials are laminated, the masking member 11 is removed (step S106), and the flange portion 10 of the shaft portion 2 and the base portion 3 of the heater plate 1 are joined by welding or brazing (step S107). Subsequently, the power supply line 8 and the sheath heater 6 are connected via the shaft portion 2 and the opening portion 13 of the base portion 3 (step S108). When the sheath heater 6 is long enough to protrude from the shaft portion 2, the connection of the power supply line 8 may be unnecessary.

  In the manufacturing process described above, the heater unit 100 with a shaft is manufactured by using the base part 3 that has been previously formed into a predetermined shape by cutting, casting, or the like, but the base part 3 and the shaft part 2 are also the first plate part. 4. Similarly to the second plate portion 5 and the placement portion 7, it may be formed by a cold spray method.

  As described above, when the heater plate 1 is manufactured by the cold spray method using different materials, since the compressed gas temperature is low, there is almost no oxidation or thermal alteration of the material used, and a dense and highly adhesive film is formed. I can do it. Further, according to the cold spray method, necessary materials can be laminated and integrated at an arbitrary location, so that the temperature distribution of the heater plate 1 can be effectively improved. Furthermore, since the temperature at the time of joining can be lowered, there is no accumulation of strain due to a difference in thermal expansion between materials, and there is an excellent effect that peeling and cracking at the material interface can be prevented. According to the manufacturing method described above, the heater unit 100 with a shaft was manufactured by stacking and forming the first plate part 4 with aluminum, the second plate part 5 with copper, and the mounting part 7 with aluminum. Compared with the heater unit with a shaft formed in (1), the temperature drop of the central portion of the heater plate 1 is suppressed, and the temperature distribution of the entire heater plate 1 is effectively improved.

  In addition, as a modification 1 of the heater unit 100 with a shaft according to the first embodiment, a heater unit 100A with a shaft illustrated in FIG. 8 is illustrated. The heater unit with shaft 100A does not have an opening at the center of the base portion 3A. Accordingly, when the first plate portion 4 and the second plate portion 5 are laminated by the cold spray method, masking is not necessary, and the manufacturing process can be shortened.

  Moreover, as a modification 2 of the heater unit 100 with a shaft according to the first embodiment, a heater unit 100B with a shaft shown in FIG. 9 is illustrated. In the heater unit with shaft 100B, the interface between the first plate portion 4B and the second plate portion 5B has a tapered cross section unlike the heater unit with shaft 100 of the first embodiment. By forming the interface between the first plate portion 4B and the second plate portion 5B in a tapered shape, the temperature distribution of the plate heater 1B can be improved more precisely.

  Further, as a third modification of the heater unit 100 with a shaft according to the first embodiment, the arrangement height of the sheath heater 6 arranged in the first plate portion 4 and the second plate portion 5 is changed, and the temperature of the plate heater is changed. Distribution may be improved.

(Embodiment 2)
In the heater unit with shaft 200 according to the second embodiment, a third plate selected from a material having a lower thermal conductivity than the material constituting the first plate portion 4 between the base portion 30 and the second plate portion 5. It differs from the heater unit 100 with a shaft of Embodiment 1 by the point provided with the part 12. FIG. Hereinafter, the heater unit with shaft 200 according to the second embodiment will be described with reference to the drawings. FIG. 10 is a cross-sectional view showing a configuration of a heater unit with shaft 200 according to Embodiment 2 of the present invention.

  As shown in FIG. 10, the base portion 30 of the shaft-equipped heater unit 200 has a groove portion 14 drilled in the center thereof. The third plate portion 12 is laminated on the groove portion 14. The third plate portion 12 is selected from materials having a lower thermal conductivity than the material constituting the first plate portion 4, and when the first plate member is aluminum or an aluminum alloy, titanium or a titanium alloy is preferably used. Is done. By using a material having a lower thermal conductivity than the first plate portion 4 as the third plate portion 12, heat dissipation from the heater plate 20 to the shaft portion 2 is reduced, and the temperature distribution of the heater plate 20 is effectively reduced. Can improve.

  Next, with reference to FIGS. 11-17, the manufacturing method of the heater unit 200 with a shaft which concerns on Embodiment 2 is demonstrated. FIG. 11 is a flowchart for explaining a method for manufacturing the shaft-equipped uter unit 200 according to the second embodiment of the present invention. 12-17 is sectional drawing explaining the manufacturing process of the heater unit 200 with a shaft. As shown in the flowchart of FIG. 11, the opening 13 of the base 30 is first masked with the masking member 11 (see step S201, FIG. 12). The base portion 30 having the opening portion 13 and the groove portion 14 in the central portion may be processed and formed by cutting or casting.

  Subsequently, as shown in FIG. 13, the powder material of the third plate portion 12 is cold sprayed on the groove portion 14 of the base portion 30 using the thermal spraying apparatus 50 (see FIG. 3) as described in the first embodiment. Are stacked to form the third plate portion 12 (step S202). The thermal spraying apparatus is not limited to the one shown in FIG. 3, and any structure can be used as long as the apparatus can form a film by colliding the material powder against the base material in a solid state. The upper surfaces of the laminated third plate portion 12 and base portion 30 form a flush horizontal plane.

  Thereafter, as shown in FIG. 14, the sheath heater 6 is disposed on the entire horizontal plane including the base portion 30 and the third plate portion 12 (step S <b> 203).

  Thereafter, as shown in FIG. 15, the powder material of the second plate portion 5 is laminated on the third plate 12 by cold spray using the thermal spraying device 50 or the like to form the second plate portion 5 (step S204). ).

  After the second plate portion 5 is laminated, the powder material of the first plate portion 4 is laminated by cold spray so as to be in contact with the second plate portion 5 on the outer peripheral portion of the base portion 30, as shown in FIG. One plate portion 4 is formed (step S205). The upper surfaces of the laminated first plate portion 4 and second plate portion 5 form a flush horizontal surface. In addition, the lamination process (step S204) of the 2nd plate part 5 and the lamination process (step S205) of the 1st plate part 4 may be performed before and after each process.

  Then, as shown in FIG. 17, the powder material of the mounting part 7 is cold-sprayed on the 1st plate part 4 and the 2nd plate 5 part, and the mounting part 7 is formed (step S206).

  After all the materials are laminated, the masking member 11 is removed (step S207), and the flange portion 10 of the shaft portion 2 and the base portion 30 of the heater plate 20 are joined by welding or brazing (step S208). Subsequently, the power supply line 8 and the sheath heater 6 are connected via the shaft portion 2 and the opening portion 13 of the base portion 30 (step S209).

  The shaft-equipped heater unit 200 according to the second embodiment includes a third plate portion 12 selected from a material having lower thermal conductivity than the first plate portion 4 between the base portion 30 and the second plate portion 5. As a result, the heat radiation from the heater plate 20 to the shaft portion 2 can be further reduced, and the temperature distribution of the heater plate 20 can be further effectively improved. In addition, since the heater plate 20 can be manufactured by cold spraying with a compressed gas having a melting point or lower using different materials, there is almost no oxidation or thermal alteration of the material used, and a dense and highly adhesive film can be formed. I can do it. Furthermore, according to the cold spray method, necessary materials can be arranged and integrated at arbitrary locations, the temperature distribution of the heater plate 20 can be effectively improved, and the temperature at the time of joining can be lowered, so that heat can be generated between the materials. There is no accumulation of strain due to the difference in expansion, and it has an excellent effect of preventing peeling and cracking at the material interface. According to the manufacturing method described above, the third plate portion 13 is made of titanium, the first plate portion 4 is made of aluminum, the second plate portion 5 is made of copper, and the mounting portion 7 is made of aluminum to form the heater unit 200 with a shaft. As a result of the manufacture, compared to a heater unit with a shaft in which the heater plate is formed only of aluminum, the temperature drop in the central portion of the heater plate 20 is suppressed, and the temperature distribution of the entire heater plate 20 is effectively improved.

  As a modification example 1 of the heater unit with shaft 200 according to the second embodiment, a heater unit with shaft 200A shown in FIG. 18 is exemplified. In the heater unit with shaft 200A, the thickness of the third plate portion 12A is made thicker than the thickness of the third plate portion 12 of the heater unit with shaft 200 according to the second embodiment. The heater plate 20A of the heater unit with shaft 200A cold sprays the powder material of the third plate portion 12A onto the groove portion 14 of the base portion 30, and the upper surface of the third plate portion 12A and the base portion 30 is flush with the horizontal plane. After the third plate portion 12A is laminated, the sheath heater 6 is wired on the base portion 30 and the third plate portion 12A, and the powder material of the third plate portion 12A is further cold sprayed to a desired thickness. What is necessary is just to laminate | stack three plate parts.

  In the modification 1, the heat radiation from the heater plate 20A to the shaft portion 2 is reduced by increasing the thickness of the third plate portion 12A. On the other hand, the thicker the second plate portion 5A, the faster the heat transfer from the outer peripheral portion to the center portion, and the temperature distribution of the heater plate 20A is improved. Therefore, it is preferable to improve the temperature distribution of the heater plate 20A by appropriately adjusting the thicknesses of the third plate portion 12A and the second plate portion 5A.

  Further, as a modified example 2 of the heater unit with shaft 200 according to the second embodiment, a heater unit with shaft 200B illustrated in FIG. 19 is illustrated. In the heater unit with shaft 200 </ b> B, the groove portion 14 </ b> B formed in the center portion of the base portion 30 </ b> B has substantially the same size as the outer diameter of the flange portion 10 of the shaft portion 2 and is smaller than the outer diameter of the second plate portion 5. The diameter of the second plate portion 5 is desirably a certain size, for example, the radius of the heater plate 20B or more, in order to cause heat transfer from the outer peripheral portion of the heater plate 20B to the central portion quickly. On the other hand, if the 3rd plate part 12B is a diameter comparable as the outer diameter of the flange part 10, the thermal radiation from the heater plate 20B to the shaft part 2 can be reduced. Therefore, it is preferable to improve the temperature distribution of the heater plate 20B by adjusting the diameter of the third plate portion 12B to a size that minimizes heat radiation from the heater plate 20B to the shaft portion 2.

(Embodiment 3)
The heater unit with shaft 300 according to Embodiment 3 does not have the first plate part and the second plate part, but only the third plate part that is stacked so as to fill the groove part drilled in the center part of the base part. Is different from the heater unit with shaft 100 of the first embodiment. Hereinafter, the heater unit with shaft 300 according to the third embodiment will be described with reference to the drawings. FIG. 20 is a cross-sectional view showing a configuration of a heater unit with shaft 200 according to Embodiment 2 of the present invention.

  As shown in FIG. 20, the base part 30 of the heater unit 300 with a shaft has a groove part 14 drilled in the center part. The third plate portion 12 is laminated on the groove portion 14. The third plate portion 12 is selected from a material having a lower thermal conductivity than the material constituting the base portion 30. When the base member is aluminum or an aluminum alloy, titanium or a titanium alloy is preferably used. Moreover, the heater unit 300 with a shaft does not have a 1st plate part and a 2nd plate part. For example, the mounting portion 70 of the heater unit with shaft 300 is formed to be thicker than the mounting portion 7 of the heater unit 100 with shaft having the first plate portion and the second plate portion. As the material constituting the mounting portion 70, the same material as that of the base portion 30 is usually selected. A third plate that uses a material that has a thicker mounting portion 70, controls the temperature of the mounting surface of the object to be heated of the heater plate 30 </ b> B, and has a lower thermal conductivity than the base portion 30 and the mounting portion 70. By providing the portion 12, heat radiation from the heater plate 20 to the shaft portion 2 can be reduced, and the temperature distribution of the heater plate 20 can be improved.

  Next, with reference to FIG. 21, the manufacturing method of the heater unit 300 with a shaft which concerns on Embodiment 3 is demonstrated. FIG. 21 is a flowchart for explaining a manufacturing method of the shaft-equipped uter unit 300 according to Embodiment 3 of the present invention. As shown in the flowchart of FIG. 21, the opening 13 of the base 30 is first masked with the masking member 11 (step S301). The base portion 30 having the opening portion 13 and the groove portion 14 in the central portion may be processed and formed by cutting or casting.

  Subsequently, the powder material of the third plate portion 12 is laminated on the groove portion 14 of the base portion 30 by cold spray using the thermal spraying apparatus 50 (see FIG. 3) described in the first embodiment, and the third The plate part 12 is formed (step S302). The thermal spraying apparatus is not limited to the one shown in FIG. 3, and any structure can be used as long as the apparatus can form a film by colliding the material powder against the base material in a solid state. The upper surfaces of the laminated third plate portion 12 and base portion 30 form a flush horizontal plane.

  Thereafter, the sheath heater 6 is disposed on the entire horizontal plane including the base portion 30 and the third plate portion 12 (step S303).

  Subsequently, the powder material of the placement unit 70 is cold sprayed on the base unit 30 and the third plate unit 12 to form the placement unit 70 (step S304).

  After all the materials are laminated, the masking member 11 is removed (step S305), and the flange portion 10 of the shaft portion 2 and the base portion 30 of the heater plate 30 are joined by welding or brazing (step S306). Subsequently, the power supply line 8 and the sheath heater 6 are connected via the shaft portion 2 and the opening portion 13 of the base portion 30 (step S307).

  In the heater unit with shaft 300 according to the third embodiment, the groove portion 14 formed in the center of the base portion 30 is selected from a material having a lower thermal conductivity than the material constituting the base portion 30 and the mounting portion 70. Since the third plate portion 12 is laminated and formed, heat radiation from the heater plate 30 to the shaft portion 2 can be reduced, so that the temperature distribution of the heater plate 30 can be effectively improved. Further, since the heater plate 30 can be manufactured by using different materials and cold spraying with a compressed gas having a melting point or lower, there is almost no oxidation or thermal alteration of the materials used, and a dense and highly adhesive film can be formed. I can do it. Furthermore, according to the cold spray method, necessary materials can be arranged and integrated at arbitrary locations, the temperature distribution of the heater plate 30 can be effectively improved, and the temperature at the time of joining can be lowered, so that heat can be generated between the materials. There is no accumulation of strain due to the difference in expansion, and it has an excellent effect of preventing peeling and cracking at the material interface.

  Further, as a modified example 1 of the heater unit with shaft 300 according to the third embodiment, a heater unit with shaft 300A illustrated in FIG. 22 is illustrated. The heater unit with shaft 200A is configured such that the thickness of the third plate portion 12A is thicker than the thickness of the third plate portion 12 of the heater unit with shaft 300 according to the third embodiment. The heater plate 30A of the heater unit with shaft 300A cold sprays the powder material of the third plate portion 12A onto the groove portion 14 of the base portion 30, and the third plate portion 12A and the upper surface of the base portion 30 are flush with each other. After the third plate portion 12A is laminated, the sheath heater 6 is wired on the base portion 30 and the third plate portion 12A, and the powder material of the third plate portion 12A is further cold sprayed to a desired thickness. What is necessary is just to laminate | stack the 3 plate part 12A. In the first modification, the heat radiation from the heater plate 30A to the shaft portion 2 is further reduced by increasing the thickness of the third plate portion 12A.

  Furthermore, as a second modification of the heater unit 300 with a shaft according to the third embodiment, a heater unit 300B with a shaft shown in FIG. 23 is illustrated. The base portion 30C of the heater unit with shaft 300B does not have the groove portion. The 3rd plate part 12C which reduces the heat dissipation to the shaft part 2 is laminated | stacked and formed by the cold spray in the center part of the base part 30C. The first plate portion 40 is laminated by cold spray on the outer peripheral side of the third plate portion 12C. The upper surfaces of the first plate portion 40 and the third plate portion 12C form a flush horizontal surface, and the sheath heater 6 is disposed on the first plate portion 40 and the third plate portion 12C. For the first plate portion 40, the same material as that constituting the base portion 30C is usually selected. On the first plate portion 40 and the third plate portion 12C where the sheath heater 6 is disposed, the placement portion 70B is laminated and formed by cold spray. The placement unit 70 is generally made of the same material as that of the base unit 30C. The base part 30 </ b> C of the third modification does not have the groove part 14 and is formed thinner than the base part 30 of the third embodiment. The heater plate 300B with a shaft according to the modification 3 is easier to process because it is not necessary to form the groove portion 14 in the base portion 30C.

  The present invention can be used for a heater unit with a shaft formed by joining different materials and a heater unit manufacturing method with a shaft, and is particularly useful for a semiconductor manufacturing apparatus.

1, 1A, 1B, 20, 20A, 20B, 30A, 30B Heater plate 2 Shaft portion 3, 3A, 30, 30C Base portion 4 First plate portion 5 Second plate portion 6 Sheath heater 7 Placement portion 8 Power supply line 9 Shaft body 10 Flange 11 Masking member 12, 12A, 12B, 12C Third plate 13 Opening 14 Groove 40 Gas heater 41 Powder supply device 42, 43 Valve 44 Spray gun 45 Gas nozzle 50 Thermal spray device 100, 100A, 100B , 200, 200A, 200B, 300, 300A, 300C Heater unit with shaft

Claims (14)

A heater plate with a shaft having a heater plate for placing and heating an object to be heated, and a shaft for supporting the heater plate,
The heater plate is
A flat base portion joined to the shaft;
A first plate portion laminated on an outer peripheral portion of the base portion;
A second plate portion selected from a material having a higher thermal conductivity than the material constituting the first plate portion, and stacked so as to fill the inner peripheral side of the first plate portion;
With
The first plate portion and the second plate portion are made of a solid-state material powder constituting the first plate portion and the second plate portion, respectively, at a temperature lower than the melting point of the material powder by a heated compressed gas. A heater unit with a shaft, which is formed by spraying each of the base parts.   The heater plate is provided on the first plate portion and the second plate portion, and includes a placement portion on which an object to be heated is placed. The placement portion is in a solid phase that constitutes the placement portion. 2. The shaft according to claim 1, wherein the material powder is formed by spraying the material powder onto the first plate part and the second plate part at a temperature lower than the melting point of the material powder by a heated compressed gas. Heater unit.   The heater unit with a shaft according to claim 2, wherein the base portion and the placement portion are made of the same material as the first plate portion. The heater plate includes a third plate portion selected from a material having a lower thermal conductivity than a material constituting the first plate portion between the base portion and the second plate portion,
The third plate portion is formed by spraying the solid state material powder constituting the third plate portion onto the base portion with a heated compressed gas at a temperature lower than the melting point of the material powder. The heater unit with a shaft as described in any one of Claims 1-3.   The heater unit with a shaft according to any one of claims 1 to 4, wherein a sheath heater is disposed in the first plate portion and the second plate portion of the heater plate.   6. The heater unit with a shaft according to claim 1, wherein the first plate portion is made of aluminum or an aluminum alloy, and the second plate portion is made of copper or a copper alloy.   The heater unit with a shaft according to claim 6, wherein the third plate portion is made of titanium or a titanium alloy.   6. The heater unit with a shaft according to claim 1, wherein the first plate portion is made of stainless steel, and the second plate portion is made of aluminum or an aluminum alloy. A heater plate with a shaft having a heater plate for placing and heating an object to be heated, and a shaft for supporting the heater plate,
The heater plate is
A flat base portion joined to the shaft;
A third plate part selected from a material having a lower thermal conductivity than the material constituting the base part, and laminated at the center of the base part;
A mounting unit that is made of the same material as that forming the base unit, and that mounts an object to be heated that is stacked on the base unit and the third plate unit,
With
The third plate unit and the mounting unit are configured such that the base material powder constituting the third plate unit and the mounting unit is heated at a temperature lower than the melting point of the material powder by a heated compressed gas. A heater unit with a shaft, which is formed by spraying each part. A heater unit manufacturing method with a shaft having a heater plate for placing and heating an object to be heated, and a shaft for supporting the heater plate,
An arrangement step of arranging a sheath heater on a flat base portion joined to the shaft;
On the outer periphery of the base portion, the material powder of the solid phase, by spraying at a temperature below the melting point of the material powder temperature on the base portion by heating compressed gas, the first plate to form a first plate portion Partial lamination process,
The material powder in a solid state selected from materials having higher thermal conductivity than the material constituting the first plate portion so as to fill the inner peripheral side of the first plate portion is heated with compressed gas. A second plate portion laminating step of forming the second plate portion by spraying on the base portion at a temperature lower than the melting point of the powder;
A method for manufacturing a heater unit with a shaft, comprising: A heater unit manufacturing method with a shaft having a heater plate for placing and heating an object to be heated, and a shaft for supporting the heater plate,
An arrangement step of arranging a sheath heater on a flat base portion joined to the shaft;
At the center of the base portion, the solid-state powder selected from materials having higher thermal conductivity than the material constituting the first plate portion is heated at a temperature lower than the melting point of the material powder by heated compressed gas. A second plate portion laminating step of forming a second plate portion by spraying on the base portion with
A first plate that forms a first plate portion by spraying material powder in a solid state on the outer peripheral portion of the base portion onto the base portion with a heated compressed gas at a temperature lower than the melting point of the material powder. Partial lamination process,
Hints, the second plate portion laminating step, features and be Resid Yafuto Heater unit manufacturing method to be performed prior to the first plate portion laminating process. After the laminating step of the first plate portion and the second plate portion, the first and second plate portions of the solid-state material powder are heated to a temperature lower than the melting point of the material powder by heated compressed gas. Including a placement portion laminating step of forming a placement portion by spraying
The method for manufacturing a heater unit with a shaft according to claim 10, wherein the base portion, the first plate portion, and the placement portion are made of the same material. The base portion has a groove portion in the center portion thereof,
Prior to the laminating step of the first plate part and the second plate part, the compressed material gas is obtained by heating the material powder in a solid phase selected from a material having a lower thermal conductivity than the material constituting the first plate part. The method further comprises a third plate portion laminating step of forming a third plate portion on the base portion by spraying on the groove portion of the base portion at a temperature lower than the melting point of the material powder. The heater unit manufacturing method with a shaft as described in any one of -12. A heater unit manufacturing method with a shaft having a heater plate for placing and heating an object to be heated, and a shaft for supporting the heater plate,
The material powder in a solid state selected from a material having a lower thermal conductivity than the material constituting the base portion is heated in a groove portion drilled in the center portion of the flat base portion joined to the shaft. A third plate part stacking step of forming a third plate part on the base part by spraying at a temperature lower than the melting point of the material powder with the compressed gas,
An arrangement step of arranging a sheath heater on the base portion and the third plate portion;
The material powder made of the same material as that constituting the base portion is placed on the base portion and the third plate portion where the sheath heater is disposed at a temperature lower than the melting point of the material powder by a heated compressed gas. A mounting unit laminating step for forming a mounting unit for mounting the object to be heated on the base unit and the third plate unit by spraying;
A method for manufacturing a heater unit with a shaft, comprising:

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