JP5542505B2 - 熱式流量センサ - Google Patents

熱式流量センサ Download PDF

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Publication number
JP5542505B2
JP5542505B2 JP2010084784A JP2010084784A JP5542505B2 JP 5542505 B2 JP5542505 B2 JP 5542505B2 JP 2010084784 A JP2010084784 A JP 2010084784A JP 2010084784 A JP2010084784 A JP 2010084784A JP 5542505 B2 JP5542505 B2 JP 5542505B2
Authority
JP
Japan
Prior art keywords
resistor
flow sensor
diaphragm
strain
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010084784A
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English (en)
Japanese (ja)
Other versions
JP2011215062A5 (enExample
JP2011215062A (ja
Inventor
亮 佐藤
恵二 半沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Astemo Ltd
Original Assignee
Hitachi Automotive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Automotive Systems Ltd filed Critical Hitachi Automotive Systems Ltd
Priority to JP2010084784A priority Critical patent/JP5542505B2/ja
Priority to EP11765823.7A priority patent/EP2554953A4/en
Priority to US13/638,259 priority patent/US8935959B2/en
Priority to CN201180017273.1A priority patent/CN102822641B/zh
Priority to PCT/JP2011/058391 priority patent/WO2011125923A1/ja
Publication of JP2011215062A publication Critical patent/JP2011215062A/ja
Publication of JP2011215062A5 publication Critical patent/JP2011215062A5/ja
Application granted granted Critical
Publication of JP5542505B2 publication Critical patent/JP5542505B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP2010084784A 2010-04-01 2010-04-01 熱式流量センサ Expired - Fee Related JP5542505B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010084784A JP5542505B2 (ja) 2010-04-01 2010-04-01 熱式流量センサ
EP11765823.7A EP2554953A4 (en) 2010-04-01 2011-04-01 THERMAL FLOW SENSOR
US13/638,259 US8935959B2 (en) 2010-04-01 2011-04-01 Thermal type flow rate sensor
CN201180017273.1A CN102822641B (zh) 2010-04-01 2011-04-01 热式流量传感器
PCT/JP2011/058391 WO2011125923A1 (ja) 2010-04-01 2011-04-01 熱式流量センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010084784A JP5542505B2 (ja) 2010-04-01 2010-04-01 熱式流量センサ

Publications (3)

Publication Number Publication Date
JP2011215062A JP2011215062A (ja) 2011-10-27
JP2011215062A5 JP2011215062A5 (enExample) 2012-10-25
JP5542505B2 true JP5542505B2 (ja) 2014-07-09

Family

ID=44762861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010084784A Expired - Fee Related JP5542505B2 (ja) 2010-04-01 2010-04-01 熱式流量センサ

Country Status (5)

Country Link
US (1) US8935959B2 (enExample)
EP (1) EP2554953A4 (enExample)
JP (1) JP5542505B2 (enExample)
CN (1) CN102822641B (enExample)
WO (1) WO2011125923A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015031580A (ja) * 2013-08-01 2015-02-16 日立オートモティブシステムズ株式会社 熱式流量計

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011002947B3 (de) * 2011-01-20 2012-01-26 Siemens Aktiengesellschaft Messanordnung mit in Gaswegen angeordneten elektrisch beheizten Widerständen
JP5904959B2 (ja) 2013-03-08 2016-04-20 日立オートモティブシステムズ株式会社 熱式空気流量計
KR101581134B1 (ko) * 2013-10-28 2015-12-29 니혼 덴산 산쿄 가부시키가이샤 센서 장치
EP3225958B1 (en) * 2014-11-28 2021-09-01 Hitachi Automotive Systems, Ltd. Thermal-type flow rate sensor
US20160370809A1 (en) * 2015-06-19 2016-12-22 Hni Technologies Inc. Fluid flow system
JP6993893B2 (ja) * 2018-02-16 2022-02-10 日立Astemo株式会社 半導体素子及びそれを用いた流量測定装置
US11402253B2 (en) * 2018-06-26 2022-08-02 Minebea Mitsumi Inc. Fluid sensing apparatus and method for detecting failure of fluid sensor

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3637541A1 (de) * 1986-11-04 1988-05-05 Vdo Schindling Vorrichtung zur bestimmung des massenstromes und der durchflussrichtung
US4884443A (en) * 1987-12-23 1989-12-05 Siemens-Bendix Automotive Electronics L. P. Control and detection circuitry for mass airflow sensors
JPH0637334A (ja) * 1992-07-16 1994-02-10 Copal Electron Co Ltd 圧力センサの構造
JP2002048616A (ja) 2000-08-07 2002-02-15 Hitachi Ltd 熱式空気流量センサ及び内燃機関制御装置
US6631638B2 (en) * 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
US6647778B2 (en) * 2001-06-20 2003-11-18 Integrated Sensing Systems Integrated microtube sensing device
JP2003106887A (ja) * 2001-09-28 2003-04-09 Yamatake Corp 流量計測装置
US6901794B2 (en) * 2003-10-16 2005-06-07 Festo Corporation Multiple technology flow sensor
JP2005241279A (ja) * 2004-02-24 2005-09-08 Fujikin Inc 耐食金属製流体用センサ及びこれを用いた流体供給機器
JP4881554B2 (ja) * 2004-09-28 2012-02-22 日立オートモティブシステムズ株式会社 流量センサ
US7171851B2 (en) * 2004-12-28 2007-02-06 Schlumberger Technology Corporation Temperature compensated strain measurement
JP2007024589A (ja) * 2005-07-13 2007-02-01 Hitachi Ltd 気体流量計測装置
JP4797771B2 (ja) * 2006-04-20 2011-10-19 株式会社デンソー メンブレンを有するセンサ装置およびその製造方法
JP2008170382A (ja) * 2007-01-15 2008-07-24 Hitachi Ltd 熱式流体流量センサ及びその製造方法
JP5276964B2 (ja) * 2008-12-08 2013-08-28 日立オートモティブシステムズ株式会社 熱式流体流量センサおよびその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015031580A (ja) * 2013-08-01 2015-02-16 日立オートモティブシステムズ株式会社 熱式流量計

Also Published As

Publication number Publication date
CN102822641A (zh) 2012-12-12
US8935959B2 (en) 2015-01-20
EP2554953A4 (en) 2015-01-21
JP2011215062A (ja) 2011-10-27
CN102822641B (zh) 2016-05-18
WO2011125923A1 (ja) 2011-10-13
EP2554953A1 (en) 2013-02-06
US20130025363A1 (en) 2013-01-31

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