CN102822641B - 热式流量传感器 - Google Patents

热式流量传感器 Download PDF

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Publication number
CN102822641B
CN102822641B CN201180017273.1A CN201180017273A CN102822641B CN 102822641 B CN102822641 B CN 102822641B CN 201180017273 A CN201180017273 A CN 201180017273A CN 102822641 B CN102822641 B CN 102822641B
Authority
CN
China
Prior art keywords
resistance body
resistor
deformation
temperature
temperature detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201180017273.1A
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English (en)
Chinese (zh)
Other versions
CN102822641A (zh
Inventor
佐藤亮
半泽惠二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Astemo Ltd
Original Assignee
Hitachi Automotive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Automotive Systems Ltd filed Critical Hitachi Automotive Systems Ltd
Publication of CN102822641A publication Critical patent/CN102822641A/zh
Application granted granted Critical
Publication of CN102822641B publication Critical patent/CN102822641B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
CN201180017273.1A 2010-04-01 2011-04-01 热式流量传感器 Expired - Fee Related CN102822641B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010-084784 2010-04-01
JP2010084784A JP5542505B2 (ja) 2010-04-01 2010-04-01 熱式流量センサ
PCT/JP2011/058391 WO2011125923A1 (ja) 2010-04-01 2011-04-01 熱式流量センサ

Publications (2)

Publication Number Publication Date
CN102822641A CN102822641A (zh) 2012-12-12
CN102822641B true CN102822641B (zh) 2016-05-18

Family

ID=44762861

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180017273.1A Expired - Fee Related CN102822641B (zh) 2010-04-01 2011-04-01 热式流量传感器

Country Status (5)

Country Link
US (1) US8935959B2 (enExample)
EP (1) EP2554953A4 (enExample)
JP (1) JP5542505B2 (enExample)
CN (1) CN102822641B (enExample)
WO (1) WO2011125923A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011002947B3 (de) * 2011-01-20 2012-01-26 Siemens Aktiengesellschaft Messanordnung mit in Gaswegen angeordneten elektrisch beheizten Widerständen
JP5904959B2 (ja) 2013-03-08 2016-04-20 日立オートモティブシステムズ株式会社 熱式空気流量計
JP5968279B2 (ja) * 2013-08-01 2016-08-10 日立オートモティブシステムズ株式会社 熱式流量計
KR101581134B1 (ko) * 2013-10-28 2015-12-29 니혼 덴산 산쿄 가부시키가이샤 센서 장치
EP3225958B1 (en) * 2014-11-28 2021-09-01 Hitachi Automotive Systems, Ltd. Thermal-type flow rate sensor
US20160370809A1 (en) * 2015-06-19 2016-12-22 Hni Technologies Inc. Fluid flow system
JP6993893B2 (ja) * 2018-02-16 2022-02-10 日立Astemo株式会社 半導体素子及びそれを用いた流量測定装置
US11402253B2 (en) * 2018-06-26 2022-08-02 Minebea Mitsumi Inc. Fluid sensing apparatus and method for detecting failure of fluid sensor

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002048616A (ja) * 2000-08-07 2002-02-15 Hitachi Ltd 熱式空気流量センサ及び内燃機関制御装置
CN1561449A (zh) * 2001-09-28 2005-01-05 株式会社山武 流量测量装置
JP2005241279A (ja) * 2004-02-24 2005-09-08 Fujikin Inc 耐食金属製流体用センサ及びこれを用いた流体供給機器
JP2006098057A (ja) * 2004-09-28 2006-04-13 Hitachi Ltd 流量センサ
JP2007286008A (ja) * 2006-04-20 2007-11-01 Denso Corp メンブレンを有するセンサ装置およびその製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3637541A1 (de) * 1986-11-04 1988-05-05 Vdo Schindling Vorrichtung zur bestimmung des massenstromes und der durchflussrichtung
US4884443A (en) * 1987-12-23 1989-12-05 Siemens-Bendix Automotive Electronics L. P. Control and detection circuitry for mass airflow sensors
JPH0637334A (ja) * 1992-07-16 1994-02-10 Copal Electron Co Ltd 圧力センサの構造
US6631638B2 (en) * 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
US6647778B2 (en) * 2001-06-20 2003-11-18 Integrated Sensing Systems Integrated microtube sensing device
US6901794B2 (en) * 2003-10-16 2005-06-07 Festo Corporation Multiple technology flow sensor
US7171851B2 (en) * 2004-12-28 2007-02-06 Schlumberger Technology Corporation Temperature compensated strain measurement
JP2007024589A (ja) * 2005-07-13 2007-02-01 Hitachi Ltd 気体流量計測装置
JP2008170382A (ja) * 2007-01-15 2008-07-24 Hitachi Ltd 熱式流体流量センサ及びその製造方法
JP5276964B2 (ja) * 2008-12-08 2013-08-28 日立オートモティブシステムズ株式会社 熱式流体流量センサおよびその製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002048616A (ja) * 2000-08-07 2002-02-15 Hitachi Ltd 熱式空気流量センサ及び内燃機関制御装置
CN1561449A (zh) * 2001-09-28 2005-01-05 株式会社山武 流量测量装置
JP2005241279A (ja) * 2004-02-24 2005-09-08 Fujikin Inc 耐食金属製流体用センサ及びこれを用いた流体供給機器
JP2006098057A (ja) * 2004-09-28 2006-04-13 Hitachi Ltd 流量センサ
JP2007286008A (ja) * 2006-04-20 2007-11-01 Denso Corp メンブレンを有するセンサ装置およびその製造方法

Also Published As

Publication number Publication date
CN102822641A (zh) 2012-12-12
JP5542505B2 (ja) 2014-07-09
US8935959B2 (en) 2015-01-20
EP2554953A4 (en) 2015-01-21
JP2011215062A (ja) 2011-10-27
WO2011125923A1 (ja) 2011-10-13
EP2554953A1 (en) 2013-02-06
US20130025363A1 (en) 2013-01-31

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SE01 Entry into force of request for substantive examination
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GR01 Patent grant
CP01 Change in the name or title of a patent holder

Address after: Ibaraki

Patentee after: Hitachi astemo Co.,Ltd.

Address before: Ibaraki

Patentee before: HITACHI AUTOMOTIVE SYSTEMS, Ltd.

CP01 Change in the name or title of a patent holder
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160518

CF01 Termination of patent right due to non-payment of annual fee