JP5537629B2 - Spatial and spectral wavefront analysis measurement method and apparatus - Google Patents

Abstract

A method and apparatus for wavefront analysis including obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase, obtaining a plurality of intensity maps of the plurality of phase changed transformed wavefronts and employing the plurality of intensity maps to obtain an output indicating the amplitude and phase of the wavefront being analyzed.

Description

  The present invention relates to general wavefront analysis and various applications of wavefront analysis.

The following patents and publications are recognized as the latest technical information in the field.
US patent:
5,969,855; 5,969,853; 5,936,253; 5,870,191; 5,814,815; 5,751,475; 5,619,372; 5,600,440; 5,471,303; 5,446,540; 5,235,587; 4,407,569; 4,190,366;
Patents outside the United States:
JP 9230247 (Summary), JP 9179029 (Summary), JP 8094936 (Summary), JP 7261089 (Summary), JP7225341 (Summary), JP 6186504 (Summary);
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  A wavefront analysis method according to a preferred embodiment of the present invention is provided. The method includes obtaining a plurality of converted wavefronts with various phase changes corresponding to a wavefront to be analyzed having amplitude and phase, obtaining a plurality of intensity maps of the plurality of converted wavefronts with phase changes, and the plurality Is used to obtain an output indicating the amplitude and phase of the wavefront to be analyzed.

  In addition, a wavefront analyzer according to a preferred embodiment of the present invention is provided, and the wavefront analyzer provides a plurality of variously phase-changed converted wavefronts corresponding to the wavefront to be analyzed having amplitude and phase. An apparatus, an intensity map generator for providing a plurality of intensity maps of the plurality of variously phase-converted converted wavefronts, and an output for displaying the amplitude and phase of the wavefront to be analyzed using the plurality of intensity maps An intensity utilization device using the plurality of intensity maps is provided.

  A surface mapping method according to another preferred embodiment of the present invention is provided. The method reflects light emission from the surface and obtains a plurality of differently converted wavefronts corresponding to the surface mapping wavefront and obtains a plurality of intensity maps of the plurality of differently converted wavefronts, and A surface mapping wavefront having amplitude and phase is obtained by analyzing the surface mapping wavefront by obtaining an output indicating the amplitude and phase of the surface mapping wavefront using a plurality of intensity maps.

  The present invention further provides a surface mapping device according to a preferred embodiment of the present invention. The apparatus includes a wavefront acquisition device that obtains a surface mapped wavefront having an amplitude and phase by reflecting radiation from a surface, and the surface mapped wavefront is analyzed and a plurality of various phase changes corresponding to the surface mapped wavefront are performed. A wavefront analyzer including a wavefront converter for providing a converted wavefront, an intensity map generator for providing a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and an output for displaying the amplitude and phase of the surface mapped wavefront An intensity map intensity map using device is provided.

  In the present invention, an object inspection method according to still another preferred embodiment is provided. The method propagates radiation through the object and obtains a plurality of phase-changed converted wavefronts corresponding to the wavefront to be inspected, and obtains a plurality of intensity maps of the plurality of phase-changed converted wavefronts, By using an intensity map to obtain an output that displays the amplitude and phase of the inspection target wavefront, the inspection target wavefront is analyzed to obtain an inspection target wavefront having an amplitude and phase.

  In this invention, the target object inspection apparatus which concerns on a more preferable embodiment is provided. The apparatus includes a wavefront acquisition device that obtains a wavefront to be inspected having an amplitude and phase by propagating radiation through an object, and a plurality of various phase changes corresponding to the wavefront to be inspected by analyzing the wavefront to be inspected. A wavefront analyzer including a wavefront converter that provides a converted wavefront; an intensity map generator that provides a plurality of intensity maps of the plurality of phase-changed converted wavefronts; and an amplitude of the wavefront to be inspected using the plurality of intensity maps And an intensity map utilization device for providing an output for displaying the phase.

  In the present invention, a spectroscopic analysis method according to still another preferred embodiment is provided. The method impinges radiation on an object, obtains a plurality of various phase-changed converted wavefronts corresponding to spectroscopic wavefronts having amplitude and phase, and obtains a plurality of intensity maps of the plurality of phase-changed converted wavefronts. Obtaining an output that displays the amplitude and phase of the spectral analysis wavefront using the plurality of intensity maps, and further obtaining an output that displays the spectral content of the radiation using the output that displays the amplitude and phase. The method comprises analyzing the spectroscopic wavefront.

  In the present invention, a spectroscopic analyzer is provided as a further preferred embodiment. The apparatus includes a wavefront acquisition device that obtains a spectroscopic wavefront having an amplitude and a phase by colliding radiation with an object, and a plurality of wavefront acquisition devices that analyze the spectroscopic wavefront and correspond to the spectroscopic wavefront that has an amplitude and a phase. A wavefront analyzer including a wavefront converter that provides various phase-changed converted wavefronts, an intensity map generator that provides a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and the plurality of intensity maps An intensity map utilization device that provides an output for displaying the amplitude and phase of a spectroscopic analysis wavefront, and a phase amplitude utilization device that obtains an output for displaying the spectral content of the radiation using the output for displaying the amplitude and phase. ing.

  In the present invention, a phase change analysis method according to a further preferred embodiment is provided. This method obtains a phase change analysis wavefront having amplitude and phase, obtains a converted wavefront by converting the phase change analysis wavefront, and applies a plurality of different phase changes to the converted wavefront to thereby convert a plurality of various phase-changed conversions. Obtaining a wavefront, obtaining a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and then using the plurality of intensity maps between the plurality of different phase changes applied to the transformed phase change analysis wavefront It consists of obtaining output that displays the differences.

  In the present invention, a phase change analyzer according to still another preferred embodiment is provided. The apparatus includes: a wavefront acquisition device that obtains a phase change analysis wavefront having amplitude and phase; a conversion processing device that obtains a converted wavefront by converting the phase change analysis wavefront; and at least one phase change applied to the converted wavefront. A phase change processing device that obtains at least one phase-changed converted wavefront; an intensity map generator that provides at least one intensity map of the phase-changed converted wavefront; and the plurality of intensity maps that are used for the conversion. It comprises an intensity map utilization device that provides an output that displays the difference between a plurality of different phase changes applied to the phase change analysis wavefront.

  The present invention provides a stored data retrieval method according to a further preferred embodiment. The method reflects a stored data retrieval wavefront having an amplitude and phase by reflecting radiation from a medium in which information is encoded and selecting the height of the medium at each of various different locations on the medium. Consists of getting. In this method, a plurality of various phase-changed converted wavefronts corresponding to the stored data retrieval wavefront are obtained, and then a plurality of intensity maps of the plurality of phase-changed converted wavefronts are obtained and the plurality of intensity maps are used. Preferably, the stored data retrieval wavefront is analyzed by obtaining an indication of the amplitude and phase of the stored data retrieval wavefront and then obtaining the information using a representation of the amplitude and phase.

  In the present invention, a stored data retrieval apparatus according to still another preferred embodiment is provided. The apparatus retrieves stored data having amplitude and phase by reflecting radiation from the medium in which information is encoded by selecting the height of the medium at each of various different locations on the medium. A wavefront obtaining apparatus that obtains a wavefront; a wavefront analyzing apparatus that analyzes the stored data search wavefront and that provides a plurality of various phase-changed converted wavefronts corresponding to the stored data search wavefront; An intensity map generator that operates to acquire a plurality of intensity maps of the converted wavefront of which phase has been changed and displays the amplitude and phase of the stored data retrieval wavefront using the plurality of intensity maps, and the amplitude and phase And a phase / amplitude utilization device that gives the information using the display of

  In the present invention, a three-dimensional image forming method according to still another preferred embodiment is provided. The method acquires a plurality of various phase-changed converted wavefronts corresponding to a three-dimensional image forming wavefront, and acquires a plurality of intensity maps of the plurality of various phase-changed converted wavefronts, and the plurality of intensity levels A third order having amplitude and phase is obtained by analyzing the 3D imaging wavefront by reflecting radiation from the analysis object by obtaining an output that displays the amplitude and phase of the 3D imaging wavefront using a map. It consists of each step of acquiring the original image forming wavefront.

  In the present invention, a three-dimensional image forming apparatus according to a further preferred embodiment is provided. The apparatus includes a wavefront acquisition apparatus that acquires a three-dimensional image forming wavefront having an amplitude and a phase by reflecting radiation from an analysis target, and a plurality of various phase-changed converted wavefronts corresponding to the three-dimensional image forming wavefront. A wavefront analyzer for analyzing a three-dimensional image forming wavefront provided with a wavefront conversion device, an intensity map generator for giving a plurality of intensity maps of the plurality of various phase-changed converted wavefronts, and using the plurality of intensity maps And an intensity map using device that provides an output for displaying the amplitude and phase of the three-dimensional image forming wavefront.

  In the present invention, a wavefront analysis method according to still another preferred embodiment is provided. The method acquires a plurality of converted wavefronts with various phase changes corresponding to the wavefront to be analyzed, acquires a plurality of intensity maps of the converted wavefronts with various phase changes, and uses the intensity maps to By obtaining an output indicating at least the phase of the wavefront to be analyzed by merging a plurality of intensity maps into a second plurality of merged intensity maps that are less than the first plurality of intensity maps, the second plurality of merged intensities Each of the maps is composed of steps for obtaining at least an output for displaying the phase of the wavefront to be analyzed and combining the outputs to give an emphasis on at least the phase of the wavefront to be analyzed.

  In the present invention, a wavefront analyzer according to still another preferred embodiment is provided. The apparatus includes: a wavefront converter that provides a plurality of various phase-changed converted wavefronts corresponding to an analysis target wavefront having an amplitude and a phase; and an intensity map that acquires a plurality of intensity maps of the plurality of phase-changed converted wavefronts The generator is configured to include an intensity map using device that acquires an output that displays at least the phase of the wavefront to be analyzed using the plurality of intensity maps. Further, the apparatus is configured to analyze at least each of the plurality of intensity maps from the plurality of intensity maps, and a plurality of merged intensity maps, wherein the plurality of intensity maps is a second plurality of merged intensity maps smaller than the first plurality of intensity maps. The apparatus further includes a display providing device that provides an output for displaying the phase of the target wavefront, and a highlight display providing device that combines the outputs to provide at least an emphasis display on the phase of the wavefront to be analyzed.

  In the present invention, a wavefront analysis method according to a further preferred embodiment is provided. The method acquires a plurality of various phase-changed converted wavefronts corresponding to an analysis target wavefront, acquires a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and uses the plurality of intensity maps to An output indicating at least the amplitude of the wavefront to be analyzed is obtained by merging a plurality of intensity maps into a second plurality of merged intensity maps less than the first plurality of intensity maps, and the second plurality of merged maps Each step includes the steps of obtaining an output indicating at least the amplitude of the wavefront to be analyzed from each of the intensity maps, and further giving an emphasis display on the amplitude of the wavefront to be analyzed by merging the outputs.

  In the present invention, a wavefront analyzer according to still another preferred embodiment is provided. The apparatus includes: a wavefront converter that provides a plurality of various phase-changed converted wavefronts corresponding to a wavefront to be analyzed; an intensity map generator that provides a plurality of intensity maps of the plurality of phase-changed converted wavefronts; Using the intensity map to obtain an output indicating at least the amplitude of the wavefront to be analyzed and merging the plurality of intensity maps into a second plurality of merged intensity maps less than the first plurality of intensity maps. An intensity map using device comprising an intensity merging device; a display providing device for providing an output for displaying at least the amplitude of the wavefront to be analyzed from each of the second plurality of merged intensity maps; and at least an wavefront to be analyzed by merging the outputs. Is provided with an emphasis display giving device for giving emphasis display on the amplitude of the.

  In the present invention, a wavefront analysis method according to still another preferred embodiment is provided. The method acquires a plurality of various phase-changed converted wavefronts corresponding to an analysis target wavefront, acquires a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and uses the plurality of intensity maps. Displaying at least the phase of the wavefront to be analyzed by representing the plurality of intensity maps as a function of the amplitude of the wavefront to be analyzed, the phase of the wavefront to be analyzed and the phase change function characterizing the plurality of various phase-changed converted wavefronts It consists of each process that gives output. Further, in the present method, the amplitude of the wavefront to be analyzed, the phase of the wavefront to be analyzed, and the complex function of the phase change function characterizing the plurality of converted wavefronts with various phase changes (where the complex function is the plurality of intensity maps). The complex function value is a dominant function of the complex function value at that position and the amplitude and phase of the wavefront to be analyzed at that position), and the complex function is defined as the plurality of intensities. A step of obtaining a numerical value for the phase using a complex function expressed as a map function and expressed as a function of the plurality of intensity maps is included.

  In the present invention, a wavefront analyzer according to a further preferred embodiment is provided. The apparatus includes: a wavefront converter that provides a plurality of various phase-changed converted wavefronts corresponding to a wavefront to be analyzed; an intensity map generator that provides a plurality of intensity maps of the plurality of phase-changed converted wavefronts; And an intensity map using device that gives at least the phase of the wavefront to be analyzed using the intensity map. An intensity map display device that represents the plurality of intensity maps as a function of an amplitude of the wavefront to be analyzed, a phase of the wavefront to be analyzed, and a phase change function that characterizes the plurality of converted wavefronts that have undergone various phase changes; Complex function limiting device for limiting the complex function of the phase change function that characterizes the amplitude of the target wavefront, the phase of the wavefront to be analyzed, and the plurality of converted wavefronts with various phase changes (wherein the complex function is included in the plurality of intensity maps) The intensity at each position is preferably a complex function value at that position and a dominant function of the amplitude and phase of the wavefront to be analyzed at that position). Further, as a typical example, the apparatus further includes a complex function display device that represents the complex function as a function of the plurality of intensity maps, and a numerical value for the phase using the complex function represented as a function of the plurality of intensity maps. A phase acquisition device for acquisition is provided.

In the present invention, a wavefront analysis method according to a further preferred embodiment is provided. In this method, a wavefront to be analyzed having an amplitude and a phase is subjected to Fourier transform processing to obtain a converted wavefront, and at least three different phase changes are added to a part of the converted wavefront in addition to a spatially uniform time-variant spatial phase change. Get the transformed wavefront
Representing the wavefront to be analyzed as a first complex function having an amplitude and phase identical to the amplitude and phase of the wavefront to be analyzed, wherein the plurality of intensity maps are a function of the first complex function and the spatially homogeneous A spatial function that represents a time-varying spatial phase change as a function of a spatial function that determines the time-varying spatial phase change, wherein the second complex function and phase having absolute values are the first function and the spatially homogeneous time-varying spatial phase change is determined. And a plurality of intensity maps, the amplitude of the wavefront to be analyzed corresponding to one of the at least three intensity maps, the absolute value of the second complex function, and the wavefront of the wave form to be analyzed. Expressed as a third function of the phase difference between the phase and the phase of the second complex function and the known phase delay caused by one of the at least three different phase changes, Solving the three functions to obtain the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the difference between the phase of the wavefront to be analyzed and the phase of the second complex function, and Solving the function to obtain the phase of the second complex function and adding the second complex function to the difference between the phase of the wavefront to be analyzed and the phase of the second complex function By obtaining a phase of the wavefront, a second Fourier transform process is performed to obtain at least three intensity maps of the at least three phase-changed transformed wavefronts, and the analysis using the at least three intensity maps It comprises each step of obtaining an output that displays at least one of the amplitude and phase of the target wavefront.

  In the present invention, a wavefront analyzer according to a further preferred embodiment is provided. The apparatus includes a first conversion processing device that obtains a converted wavefront by performing a Fourier transform process on a wavefront to be analyzed having an amplitude and a phase, and applying a spatially uniform time-variant spatial phase change to a part of the converted wavefront. A phase change processing device that obtains at least three converted wavefronts with various phase changes, and a second Fourier transform process on the at least three converted wavefronts with various phase changes to obtain at least three intensity maps. A two-conversion processing device is provided. The apparatus further includes, as a typical example, an intensity map using apparatus that provides an output for displaying the phase and amplitude of an analysis target wavefront using the at least three intensity maps, and the analysis target wavefront is converted into an amplitude and phase of the analysis target wavefront. A wavefront display device represented as a first complex function having the same amplitude and phase, and a function of a spatial function that determines the first complex function and the spatially uniform time-varying spatial phase change of the plurality of intensity maps. The first intensity map display device expressed as: A complex function limiting device for limiting a second complex function having an absolute value and a phase as a composition of the first complex function and the spatial function determining the spatially homogeneous time-varying spatial phase change; Each of the plurality of intensity maps includes an amplitude of the wavefront to be analyzed corresponding to the at least three intensity maps, an absolute value of the second complex function, a phase of the wavefront to be analyzed, and a phase of the second complex function. And a second intensity map display that represents the third function as a third function of the difference between and a known phase delay caused by one of the at least three different phase changes. As a typical example, the apparatus further solves the third function to obtain the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the phase difference between the phase of the wavefront to be analyzed and the second complex function. A first function solving device, a second function solving device for solving the second complex function to obtain a phase of the second complex function, and a difference between the phase of the wavefront to be analyzed and the phase of the second complex function And a phase acquisition device that acquires the phase of the wavefront to be analyzed by adding the phase of the second complex function.

  In the present invention, a wavefront analysis method according to a further preferred embodiment is provided. The method obtains a plurality of various phase-changed converted wavefronts corresponding to an analysis wavefront having amplitude and phase, obtains a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and Each step of acquiring the output of the second class display for at least the phase of the wavefront to be analyzed using the intensity map is included.

  In the present invention, a wavefront analyzer according to a further preferred embodiment is provided. The apparatus includes: a wavefront converter that provides a plurality of various phase-changed converted wavefronts corresponding to an analysis target wavefront having amplitude and phase; and an intensity map generation that provides a plurality of intensity maps of the plurality of phase-changed converted wavefronts. And an intensity map utilization apparatus that provides an output of a second class display for at least the phase of the wavefront to be analyzed using the plurality of intensity maps.

In the present invention, a surface mapping method according to a further preferred embodiment is provided. The method obtains a surface mapping wavefront of an analyte having amplitude and phase,
A plurality of various phase-changed converted wavefronts corresponding to the surface mapping wavefront to be analyzed are acquired, a plurality of intensity maps of the plurality of phase-changed converted wavefronts are acquired, and at least analyzed using the plurality of intensity maps The method includes the steps of analyzing the surface mapping wavefront of the analysis object by giving an output of a second class display about the phase of the surface mapping wavefront of the object.

  In the present invention, a surface mapping device according to a further preferred embodiment is provided. The apparatus includes a wavefront acquisition device that acquires a surface mapping wavefront of an analysis target having an amplitude and a phase by reflecting radiation from the surface, and analyzes the surface mapping wavefront of the analysis target and applies the analysis to the surface mapping wavefront of the analysis target. Corresponding wavefront analysis device comprising a plurality of various phase-changed converted wavefronts, an intensity map generating device for giving a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and the plurality of intensity maps And an intensity map using device that provides an output of a second class display for at least the phase of the surface mapping wavefront to be analyzed.

In the present invention, an object inspection method according to a further preferred embodiment is provided. The method obtains an object inspection wavefront to be analyzed having amplitude and phase by propagating radiation through the object;
Obtaining a plurality of various phase-changed converted wavefronts corresponding to the object inspection wavefront to be analyzed, obtaining a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and using the plurality of intensity maps The method includes the steps of analyzing the object inspection wavefront to be analyzed by obtaining an output of at least a second class display regarding the phase of the object inspection wavefront to be analyzed.

  In the present invention, an object inspection apparatus according to still another preferred embodiment is provided. The apparatus includes: a wavefront acquisition device that acquires an object inspection wavefront to be analyzed having an amplitude and phase by propagating radiation through the object; and an analysis of the object inspection wavefront to be analyzed and the analysis object A wavefront analyzer that includes a plurality of various phase-changed converted wavefronts corresponding to an object inspection wavefront; an intensity map generator that provides a plurality of intensity maps of the plurality of phase-changed converted wavefronts; An intensity map using device that provides an output of at least a second class display for the phase of the object inspection wavefront to be analyzed using the plurality of intensity maps is provided.

In the present invention, a spectroscopic analysis method according to still another preferred embodiment is provided. The method obtains a spectroscopic wavefront of an analyte having an amplitude and phase by causing radiation that impinges on the object,
A plurality of various phase-changed converted wavefronts corresponding to the spectral analysis wavefront to be analyzed are acquired, a plurality of intensity maps of the plurality of phase-changed converted wavefronts are acquired, and analysis is performed using the plurality of intensity maps Analyzing object by obtaining at least a second class display output for the phase of the target spectral analysis wavefront and obtaining an output for displaying the spectral content of the radiation using at least the second class display output for the phase Each of the steps for analyzing the spectroscopic wavefront is configured.

  In the present invention, a spectroscopic analyzer according to still another preferred embodiment is provided. The apparatus includes: a wavefront acquisition device that acquires an analysis target wavefront having an amplitude and phase by causing radiation that collides with an object; and an analysis target wavefront that analyzes the target analysis wavefront A wavefront analyzer including a wavefront converter that provides a plurality of various phase-changed converted wavefronts, an intensity map generator that acquires a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and the plurality of An intensity map using device that acquires an output of at least a second class display for the phase of the spectral analysis wavefront to be analyzed using an intensity map, and a spectrum of the radiation using an output of at least a second class display for the phase A phase amplitude utilization device for obtaining an output for displaying the contents is provided.

The present invention provides a stored data retrieval method according to a further preferred embodiment. The method includes analyzing an object having amplitude and phase by reflecting radiation from the medium where information is encoded by selecting the height of the medium at each of a variety of different locations on the medium. Get saved data search wavefront,
Obtaining a plurality of various phase-changed converted wavefronts corresponding to the stored data retrieval wavefront to be analyzed, obtaining a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and using the plurality of intensity maps Retrieving the analysis object by obtaining at least a second class display output for the phase of the stored data retrieval wavefront of the analysis object, and obtaining the information using at least a second class display output for the phase Each process includes analyzing each data search wavefront.

  In the present invention, a stored data retrieval apparatus according to still another preferred embodiment is provided. The apparatus can analyze an object having amplitude and phase by reflecting radiation from the medium where information is encoded at each of various different locations on the medium by selecting the height of the medium. A wavefront acquisition device for acquiring a stored data search wavefront; a wavefront conversion device for providing a plurality of various phase-changed converted wavefronts corresponding to a storage data search wavefront to be analyzed; and a plurality of the plurality of phase-changed converted wavefronts. About an intensity map generating apparatus for acquiring an intensity map, an intensity map using apparatus for acquiring an output of at least a second class display for the phase of the stored data search wavefront to be analyzed using the plurality of intensity maps, and the phase A phase amplitude utilization device that acquires the information using at least the output of the second class display.

  In the present invention, a three-dimensional image forming method according to still another preferred embodiment is provided. The method obtains a three-dimensional imaging wavefront of an analysis object having an amplitude and phase by reflecting radiation from the object being viewed, and a plurality of various phase changes corresponding to the three-dimensional imaging wavefront of the analysis object. Obtaining a plurality of intensity maps of the plurality of various phase-changed converted wavefronts, and using the plurality of intensity maps, at least a second phase regarding the phase of the three-dimensional image forming wavefront to be analyzed is obtained. Each step of analyzing the three-dimensional image forming wavefront to be analyzed is obtained by acquiring the output of the class display.

  In the present invention, a three-dimensional image forming apparatus according to a further preferred embodiment is provided. The apparatus includes a wavefront acquisition device that acquires a three-dimensional image forming wavefront of an analysis object having an amplitude and phase by reflecting radiation from a viewed object, and a plurality of corresponding wavefront acquisition wavefronts of the analysis object A wavefront conversion device that provides a converted wavefront with various phase changes, an intensity map generator that provides a plurality of intensity maps of the converted wavefronts with various phase changes, and a three-dimensional image of the analysis object using the plurality of intensity maps The apparatus includes a wavefront analyzer that analyzes the three-dimensional image forming wavefront to be analyzed, which includes an intensity map using device that obtains at least the output of the second class display regarding the phase of the formed wavefront.

  In the present invention, a wavefront analysis method according to a further preferred embodiment is provided. The method obtains a plurality of various phase-changed converted wavefronts corresponding to an analysis wavefront having at least spatially inhomogeneous amplitude and phase, and obtains a plurality of intensity maps of the plurality of phase-changed converted wavefronts. In addition, each of the steps includes obtaining an output for displaying at least the phase of the wavefront to be analyzed using the plurality of intensity maps.

  In the present invention, a wavefront analyzer according to a further preferred embodiment is provided. The apparatus includes a wavefront conversion device that provides a plurality of various phase-changed converted wavefronts corresponding to an analysis wavefront having at least spatially inhomogeneous amplitude and phase, and a plurality of intensities of the plurality of phase-changed converted wavefronts. An intensity map generation device that provides a map, and an intensity map utilization device that acquires an output that displays at least the phase of the wavefront to be analyzed using the plurality of intensity maps are provided.

  In the present invention, a surface mapping method according to still another preferred embodiment is provided. The method obtains a surface mapping wavefront of an analysis object having at least a spatially inhomogeneous amplitude and phase by reflecting radiation from the surface, and a plurality of various phase changes corresponding to the surface mapping wavefront of the analysis object. Obtaining a converted wavefront, obtaining a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and using the plurality of intensity maps to obtain an output indicating at least a phase of the surface mapping wavefront of the analysis target Thus, each step of analyzing the surface mapping wavefront to be analyzed is included.

  In the present invention, a surface mapping device according to a further preferred embodiment is provided. The apparatus includes a wavefront acquisition apparatus that acquires a surface mapping wavefront of an analysis object having at least a spatially inhomogeneous amplitude and phase by reflecting radiation from the surface, and a plurality of corresponding wavefront acquisition wavefronts of the analysis object A wavefront conversion device that provides a converted wavefront with various phase changes, an intensity map generator that acquires a plurality of intensity maps of the plurality of converted wavefronts with a phase change, and the analysis target using the plurality of intensity maps The apparatus includes a wavefront analyzer that analyzes the surface mapped wavefront of the analysis target, which includes an intensity map using device that acquires an output that displays at least the phase of the surface mapped wavefront.

  In the present invention, an object inspection method according to still another preferred embodiment is provided. The method obtains an object inspection wavefront to be analyzed having at least a spatially inhomogeneous amplitude and phase by propagating radiation through the object, and a plurality of various types corresponding to the object inspection wavefront to be analyzed. Obtaining a converted wavefront having a phase change, obtaining a plurality of intensity maps of the plurality of converted wavefronts having a phase change, and displaying at least a phase of the object inspection wavefront to be analyzed using the plurality of intensity maps Each step includes analyzing the object inspection wavefront to be analyzed by acquiring an output.

  In the present invention, an object inspection apparatus according to still another preferred embodiment is provided. This apparatus corresponds to a wavefront acquisition device for acquiring an object inspection wavefront of an analysis object having at least a spatially inhomogeneous amplitude and phase by propagating radiation through the object, and the object inspection wavefront of the analysis object A plurality of various phase-changed wavefront converters, a plurality of phase-changed wavefronts for obtaining a plurality of intensity maps, and an analysis using the plurality of intensity maps. The apparatus includes a wavefront analyzer that analyzes the object inspection wavefront to be analyzed, the apparatus using an intensity map that acquires an output that displays at least the phase of the target object inspection wavefront.

  In the present invention, a spectroscopic analysis method according to a further preferred embodiment is provided. The method obtains a spectroscopic wavefront of an analysis object having at least a spatially inhomogeneous amplitude and phase by colliding radiation with the object, and a plurality of various phase changes corresponding to the spectroscopic wavefront of the analysis object. Obtaining the converted wavefront, obtaining a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and using the plurality of intensity maps to obtain an output for displaying at least a phase of the spectral analysis wavefront to be analyzed By doing so, each step of analyzing the spectroscopic wavefront to be analyzed and at least using the output for displaying the phase to obtain the output for displaying the spectral content of the radiation is included.

  In the present invention, a spectroscopic analyzer according to still another preferred embodiment is provided. The apparatus is configured to analyze a spectroscopic wavefront of a wavefront acquiring apparatus that acquires a spectroscopic wavefront of an analysis object having at least a spatially inhomogeneous amplitude and phase by colliding radiation with an object, And a wavefront converter that provides a plurality of various phase-changed converted wavefronts corresponding to the spectral analysis wavefront to be analyzed, and an intensity map generator that acquires a plurality of intensity maps of the plurality of phase-changed converted wavefronts; An intensity map using device that acquires an output that displays at least a phase of the spectral analysis wavefront to be analyzed using the plurality of intensity maps, and an output that displays the spectral content of the radiation using an output that displays at least the phase And a wavefront analyzer having a phase amplitude utilization device for acquiring

  The present invention provides a stored data retrieval method according to still another preferred embodiment. The method uses a stored data retrieval wavefront of an analyte having an amplitude and phase by reflecting radiation from the medium where information is encoded by selecting the height of the medium at different locations on the medium. Obtaining a plurality of converted wavefronts with various phase changes corresponding to the stored data retrieval wavefront to be analyzed, obtaining a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and obtaining the plurality of intensities. Analyzing the stored data search wavefront of the analysis object by obtaining an output that displays at least the phase of the stored data search wavefront of the analysis object using a map, and using the output that displays at least the phase It is comprised including each process of acquiring.

  In the present invention, a stored data retrieval apparatus according to a further preferred embodiment is provided. The apparatus retrieves stored data for an analyte having amplitude and phase by reflecting radiation from the medium where information is encoded by selecting the height of the medium at different locations on the medium. A wavefront acquisition device for acquiring a wavefront; a wavefront conversion device for providing a plurality of various phase-changed converted wavefronts corresponding to the stored data retrieval wavefront to be analyzed; and a plurality of intensity maps of the plurality of phase-changed converted wavefronts. The analysis target storage data search wavefront comprising: an intensity map generation device that acquires the output; and an intensity map utilization device that acquires an output that displays at least a phase of the analysis target storage data search wavefront using the plurality of intensity maps. And a phase amplitude utilization device for acquiring the information using at least an output for displaying the phase.

  In the present invention, a three-dimensional image forming method according to still another preferred embodiment is provided. The method obtains a three-dimensional imaging wavefront of an analysis object having at least a spatially inhomogeneous amplitude and phase by reflecting radiation from the viewed object, and corresponds to the three-dimensional imaging wavefront of the analysis object Obtaining a plurality of various phase-changed converted wavefronts, obtaining a plurality of intensity maps of the plurality of various phase-changed converted wavefronts, and using the plurality of intensity maps, the three-dimensional image forming wavefront to be analyzed Each of the steps includes analyzing each of the three-dimensional image forming wavefronts to be analyzed by obtaining an output that displays at least the phase of the image.

  In the present invention, a three-dimensional image forming apparatus according to still another preferred embodiment is provided. The apparatus includes a wavefront acquisition device that acquires a three-dimensional image-forming wavefront of an analysis object having at least a spatially inhomogeneous amplitude and phase by reflecting radiation from the object being viewed, and the three-dimensional image of the analysis object Analyzing a formed wavefront and providing a plurality of various phase-changed converted wavefronts corresponding to the three-dimensional image forming wavefront to be analyzed, and a plurality of intensity maps of the plurality of various phase-changed converted wavefronts. An intensity map generation device to be acquired, and a wavefront analysis device including an intensity map utilization device that acquires an output for displaying at least a phase of the three-dimensional image forming wavefront to be analyzed using the plurality of intensity maps. ing.

  In the present invention, a wavefront analysis method according to a further preferred embodiment is provided. The method obtains a plurality of various phase-changed converted wavefronts corresponding to an analysis target wavefront having amplitude and phase, obtains a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and the plurality of intensities. Each step includes obtaining an output for displaying at least the amplitude of the wavefront to be analyzed using a map.

  In the present invention, a wavefront analyzer according to still another preferred embodiment is provided. The apparatus includes: a plurality of wavefront conversion apparatuses that provide a plurality of phase-changed converted wavefronts corresponding to an analysis target wavefront having an amplitude and a phase; and an intensity map generator that provides a plurality of intensity maps of the plurality of phase-changed converted wavefronts. And an intensity map utilization device that obtains an output that displays at least the amplitude of the wavefront to be analyzed using the plurality of intensity maps.

  In the present invention, a surface mapping method according to a further preferred embodiment is provided. The method obtains a surface mapping wavefront of an analysis object having an amplitude and phase by reflecting radiation from the surface, and obtains a plurality of various phase-changed converted wavefronts corresponding to the surface mapping wavefront of the analysis object, Obtaining a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and using the plurality of intensity maps to obtain an output indicating at least an amplitude of the surface mapping wavefront of the analysis object. Each step includes analyzing each of the mapping wavefronts.

In the present invention, an object inspection method according to still another preferred embodiment is provided. The method obtains an object inspection wavefront to be analyzed having amplitude and phase by propagating radiation through the object;
Obtaining a plurality of various phase-changed converted wavefronts corresponding to the object inspection wavefront to be analyzed, obtaining a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and using the plurality of intensity maps Each step of analyzing the object inspection wavefront to be analyzed is obtained by obtaining an output indicating at least the amplitude of the object inspection wavefront to be analyzed.

In the present invention, an object inspection apparatus according to still another preferred embodiment is provided. The apparatus includes a wavefront acquisition apparatus that acquires an object inspection wavefront to be analyzed having an amplitude and a phase by propagating radiation through the object;
Analyzing the object inspection wavefront to be analyzed and providing a plurality of various phase-changed converted wavefronts corresponding to the object inspection wavefront to be analyzed, and a plurality of the plurality of phase-changed converted wavefronts An intensity map generator for acquiring an intensity map of the object, and a wavefront analyzer including an intensity map utilization apparatus for acquiring an output for displaying at least the amplitude of the object inspection wavefront to be analyzed using the plurality of intensity maps. Configured.

  In the present invention, a spectroscopic analysis method according to a further preferred embodiment is provided. The method obtains a spectroscopic wavefront of an analysis object having an amplitude and a phase by colliding radiation with an object, and obtains a plurality of various phase-changed converted wavefronts corresponding to the spectroscopic wavefront of the analysis object. Obtaining a plurality of intensity maps of the plurality of phase-changed converted wavefronts, and using the plurality of intensity maps to obtain an output indicating at least the amplitude of the spectral analysis wavefront of the analysis object. Each step includes analyzing a spectroscopic wavefront and obtaining an output for displaying the spectral content of the radiation using at least an output for displaying the amplitude.

In the present invention, a spectroscopic analyzer according to a further preferred embodiment is provided. The apparatus includes a wavefront acquisition apparatus that acquires a spectroscopic wavefront of an analysis target having an amplitude and a phase by causing radiation to collide with an object;
Analyzing the spectral analysis wavefront of the analysis target, and providing a plurality of various phase-changed converted wavefronts corresponding to the spectral analysis wavefront of the analysis target, and a plurality of the plurality of phase-changed converted wavefronts An intensity map generator for acquiring an intensity map; a wavefront analyzer including an intensity map utilization apparatus for acquiring an output for displaying at least the amplitude of the spectral analysis wavefront to be analyzed using the plurality of intensity maps; and at least the amplitude And a phase amplitude utilization device that obtains an output for displaying the spectral content of the radiation using an output for displaying.

  Furthermore, in a preferred embodiment of the present invention, an analysis output is provided that displays amplitude and phase using the plurality of intensity maps.

  Furthermore, in a preferred embodiment of the present invention, a second class analysis output is provided that displays at least the phase using the plurality of intensity maps.

  Further, it is preferable to use the plurality of intensity maps in order to provide an analysis output that displays at least the phase.

  Further, in a preferred embodiment of the present invention, it is preferable to use the plurality of intensity maps to provide at least a second class analysis output indicating the amplitude.

  The converted wavefronts with various phase changes are preferably acquired by interference along the common optical path of the wavefront to be analyzed. Further, the converted wavefront having various phase changes can be realized additionally or alternatively by a method substantially different from performing the delta function phase change to the wavefront to be analyzed after the conversion.

  Furthermore, in a preferred embodiment of the present invention, an output displaying a phase substantially free of halo and shading off distortion can be obtained by using the plurality of intensity maps.

  Further, in a preferred embodiment of the present invention, the plurality of converted wavefronts having various phase changes are converted into a plurality of wavefronts converted into wavefronts by at least one spatial phase change process and a plurality of converted wavefronts after the spatial phase change process to the wavefront. Including the wavefront.

  Further, in a preferred embodiment of the present invention, the step of obtaining a plurality of converted wavefronts having various phase changes includes a step of converting the wavefront to be analyzed to obtain a converted wavefront, and a plurality of various converted wavefronts. A step of applying a phase change to obtain a plurality of various phase-changed converted wavefronts is included.

  Further, in a preferred embodiment of the present invention, the step of acquiring a plurality of various phase-changed converted wavefronts includes a step of applying various phase changes to the analysis target wavefront and acquiring a plurality of various phase-changed wavefronts. And a step of converting the plurality of wavefronts having various phase changes to obtain a plurality of converted wavefronts having various phase changes.

  Further, in a preferred embodiment of the present invention, the step of acquiring a plurality of converted wavefronts having various phase changes includes a step of converting the wavefront to be analyzed to acquire a converted wavefront and a plurality of different phase changes to the converted wavefront. In addition, at least one of obtaining a converted wavefront having a plurality of different phase changes, and obtaining a wavefront having a plurality of different phase changes by adding a plurality of different phase changes to the wavefront to be analyzed. A step of converting the wavefronts to which the plurality of different phase changes have been applied to obtain a converted wavefront to which the plurality of different phase changes have been added.

  Preferably, the plurality of different phase changes include a spatial phase change.

  Furthermore, in a preferred embodiment of the present invention, the plurality of different phase changes include a spatial phase change, and the plurality of different phase changes are time-variant to at least a part of the converted wavefront and a part of the analysis wavefront. Performed by applying a spatial phase change.

  Furthermore, in a preferred embodiment of the present invention, the plurality of different spatial phase changes are performed by applying a spatially uniform time-variant spatial phase change to at least a part of the converted wavefront and a part of the wavefront to be analyzed. Carried out.

  The transformation processed into at least one of the wavefronts to be analyzed and the plurality of wavefronts with different phase changes is a Fourier transform, and the operation of acquiring a plurality of intensity maps of the plurality of phase-changed converted wavefronts Preferably, a Fourier transform process to a wavefront to which the plurality of different phase changes are applied is included.

  Furthermore, in a preferred embodiment of the present invention, the step of obtaining a converted wavefront having a plurality of different phase changes includes a step of obtaining a converted wavefront by performing a Fourier transform process on the wavefront to be analyzed and a plurality of different wavefronts to the converted wavefront. At least one of the steps of obtaining a converted wavefront to which a plurality of different phase changes are applied by adding a phase change, and a wavefront having a plurality of different phase changes applied to the wavefront to be analyzed And obtaining a converted wavefront having a plurality of different phase changes by performing a Fourier transform process on the wavefront having the different phase changes. The plurality of different phase changes includes a spatial phase change, and the plurality of different spatial phase changes are spatially homogeneous time-variant spaces to at least a part of the converted wavefront and a part of the wavefront to be analyzed. This is accomplished by applying a phase change. Further, the plurality of different spatial phase changes include at least three phase changes, and the plurality of intensity maps include at least three intensity maps, and using these intensity maps, at least the amplitude and phase of the wavefront to be analyzed are included. Output that displays one is obtained. The three phase changes include representing the analysis target wavefront as a first complex function having the same amplitude and phase as the analysis target wavefront, and representing the plurality of intensity maps as a first complex function and a spatial Expressing the second complex function with absolute value and phase as the first complex function and determining the spatially homogeneous time-varying spatial phase change Defining each of the plurality of intensity maps as an amplitude of the wavefront to be analyzed, an absolute value of the second complex function, a phase of the wavefront to be analyzed and the second complex The difference between the phases of the function and the known phase delay caused by one of the at least three different phase changes, each corresponding to one of the at least three intensity maps. Expressing the second function to obtain the phase of the second complex function, and calculating the phase of the second complex function to the phase of the wavefront to be analyzed and the second complex function It includes acquiring the phase of the wavefront to be analyzed by adding to the difference between the phases.

  Furthermore, in a preferred embodiment of the present invention, the absolute value of the second complex function is obtained by approximating the absolute value to a constant degree polynomial.

  The phase of the second complex function is preferably obtained by expressing the second complex function as an eigenvalue problem when the complex function is an eigenvector obtained by iterative processing.

  Furthermore, in a preferred embodiment of the present invention, the phase of the second complex function approximates a Fourier transform of the spatial function that determines the spatially homogeneous time-varying spatial phase change to the polynomial, and the second complex function is converted to a polynomial. Obtained by the function to approach.

  Further, in a preferred embodiment of the present invention, the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the difference between the phase of the second complex function and the phase of the wavefront to be analyzed are the values of the plurality of intensity maps. Obtained by the least squares method, which increases accuracy as the number increases.

  Furthermore, in a preferred embodiment of the present invention, the plurality of different phase changes include at least four different phase changes, the plurality of intensity maps include at least four intensity maps, and the wavefront to be analyzed using the plurality of intensity maps. When obtaining an output that displays at least one of the amplitude and phase of the plurality of intensity maps, the plurality of intensity maps are calculated using the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, the phase of the wavefront to be analyzed and the second wavefront A difference between the phases of the complex function, a known phase delay caused by one of at least four different phase changes, each corresponding to one of the at least four intensity maps, and at least one additional unknown number relating to wavefront analysis. And the number of the additional unknowns is greater than the number of the plurality of intensity maps exceeding three. The third function is solved to determine the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, the difference between the phase of the wavefront to be analyzed and the phase of the second complex function, and the unknown. get.

  The phase change is preferably selected so that the contrast in the intensity map is maximized and the influence of noise on the phase of the wavefront to be analyzed is minimized.

  Furthermore, in a preferred embodiment of the present invention, each of the plurality of intensity maps is expressed by an amplitude of the analysis target wavefront, an absolute value of the second complex function, a phase between the analysis target wavefront and a phase of the second complex function. When expressed as a third function of the difference and a known phase delay caused by one of the at least three different phase changes, each corresponding to one of the at least three intensity maps, Neither the intensity map function nor the time-varying spatial phase change function, but the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the phase of the wavefront to be analyzed and the second complex function The fourth, fifth, and sixth complex functions that are functions of the difference between phases are limited, and each of the plurality of intensity maps corresponds to each of the fourth complex function and the plurality of intensity maps. Wherein it represents the known phase delay fifth complex function is multiplied to sign, and the sum of the sixth complex function which is multiplied by the cosine of the known phase delay corresponding to each of the plurality of intensity maps that.

  Furthermore, in a preferred embodiment of the present invention, the third function is solved to determine the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the phase of the wavefront to be analyzed and the phase of the second complex function. The step of obtaining the difference includes an amplitude of the analysis target wavefront, an absolute value of the second complex function, and a solution having a high numerical value for each of the difference between the phase of the analysis target wavefront and the phase of the second complex function. A method of obtaining two solutions of a solution having a low numerical value, and the enhanced absolute value solution satisfies the second complex function at each spatial position of either a solution having a high numerical value or a solution having a low numerical value among the two solutions. The two solutions are added together to obtain an enhanced absolute value solution for the absolute value of the second complex function, and a solution with a higher value or a lower value of the two solutions with the amplitude at each spatial position is Numerical value for absolute value solution In each position where a high solution is selected, a solution with a high numerical value is selected for the amplitude solution, and in each position where a solution with a low numerical value is selected for the absolute value solution, a solution with a low numerical value is selected for the amplitude solution. By selecting either a solution with a high numerical value or a solution with a low numerical value, the two solutions of the amplitude of the wavefront to be analyzed are added to obtain an emphasized amplitude solution, and the numerical value is high for the absolute value solution at each spatial position. In each position where a solution is selected, a solution having a high numerical value is selected for the difference solution, and in each position where a low numerical solution is selected for the absolute value solution, a low numerical solution is selected for the difference solution. By selecting the solution with the higher value or the solution with the lower value for the two solutions of the difference, the two solutions of the difference between the phase of the wavefront to be analyzed and the phase of the second complex function are added together. It is set to emphasize the difference solution.

  The spatially uniform time-varying spatial phase change is preferably applied to at least one spatial center of the converted wavefront and the wavefront to be analyzed.

  In addition to or instead of the above, the spatially uniform time-varying spatial phase change is preferably applied to a generally circular portion at the spatial center of at least one of the converted wavefront and the analysis wavefront.

  Furthermore, in a preferred embodiment of the present invention, the spatially uniform time-varying spatial phase change is applied to approximately half of at least one of the converted wavefront and the analysis wavefront.

  Furthermore, in a preferred embodiment of the present invention, the converted wavefront and the wavefront to be analyzed include a DC region and a non-DC region, and the spatially homogeneous time-varying spatial phase change is at least in both the DC region and the non-DC region. Given to some.

  Furthermore, in a preferred embodiment of the present invention, the phase component is added by adding a relatively high frequency component to the wavefront to be analyzed in order to increase the high frequency content of the converted wavefront having the plurality of different phase changes. Includes the addition of.

  Furthermore, in a preferred embodiment of the present invention, the information is encoded on the medium, so that the intensity value is reflected into the element of information stored at that position by reflection of light from each position on the medium. A plurality of intensity values are realized for each position by using the plurality of intensity maps, which fall within a corresponding predetermined numerical range, and a plurality of information elements are given for each position on the medium.

  It is preferable that the plurality of converted wavefronts having different phase changes include a plurality of wavefronts in which the phase is changed using at least a time-varying phase change function.

  In addition to or in place of the above, the converted wavefronts that have been subjected to the plurality of different phase changes include a plurality of wavefronts that have undergone a change in phase by applying at least a time-varying phase change function to the analysis target wavefront. include.

  Furthermore, in a preferred embodiment of the present invention, the at least time-varying phase change function is processed to the wavefront to be analyzed before wavefront conversion.

  Furthermore, in a preferred embodiment of the invention, the at least time-varying phase change function is processed for the wavefront to be analyzed following the wavefront transformation.

  Furthermore, in a preferred embodiment of the present invention, the at least time-varying phase change is a spatially homogeneous spatial function.

  The at least time-varying phase change function is processed into the spatial center of the wavefront to be analyzed.

  Further, in a preferred embodiment of the present invention, the wavefront to be analyzed includes a plurality of different wavefront components, and the converted wavefront having the different phase changes is at least one of the wavefronts to be analyzed and the wavefront to be analyzed. This is obtained by applying a phase change to a plurality of different wavefront components of the converted wavefront obtained by performing the conversion process to the wavefront.

  Furthermore, in a preferred embodiment of the present invention, the phase change is applied to a plurality of different wavefront components of the wavefront to be analyzed.

  Furthermore, in a preferred embodiment of the present invention, the phase change given to the plurality of different wavefront components is an object in which at least one of the wavefront to be analyzed and the converted wavefront is spatially changed in at least one of its thickness and refractive index. It is accomplished by passing through.

  In addition to or instead of the above, the phase change applied to the plurality of different wavefront components is performed by reflecting at least one of the analysis target wavefront and the converted wavefront from a spatially changing surface.

  Furthermore, in a preferred embodiment of the present invention, the phase change applied to the plurality of different wavefront components is selected to differ by a predetermined degree for at least some of the plurality of different wavefront components.

  Furthermore, in a preferred embodiment of the present invention, the plurality of different wavefront components are the same for some of the plurality of different wavefront components.

  The phase change applied to the plurality of different wavefront components is preferably a plurality of objects characterized in that at least one of the wavefront to be analyzed and the converted wavefront is spatially changed in at least one of the thickness and the refractive index. Brought by passing through.

  Further, in a preferred embodiment of the present invention, the step of acquiring a plurality of intensity maps is performed simultaneously for all of a plurality of different wavelength components, and the step of acquiring a plurality of intensity maps is provided with the plurality of different phase changes. A step of separating the converted wavefront into separate wavelength components is included.

  It is preferable that the plurality of converted wavefronts having different phase changes are separated by passing the converted wavefronts having different phase changes into the dispersion element.

  Further, in a preferred embodiment of the present invention, the analysis target wavefront includes a plurality of different polarization components, and the converted wavefront having the plurality of different phase changes is obtained by converting the analysis target wavefront and the analysis target wavefront. It is obtained by applying a phase change to a plurality of different polarization components of at least one of the obtained converted wavefronts.

  The phase change applied to the plurality of different polarization components is preferably different for at least some of the plurality of different polarization components.

  Furthermore, in a preferred embodiment of the present invention, the phase change applied to the plurality of different polarization components is preferably the same for at least some of the plurality of different polarization components.

  Further, in a preferred embodiment of the present invention, the step of obtaining a plurality of intensity maps of the converted wavefronts having the plurality of different phase changes includes a conversion process to the converted wavefronts having the plurality of different phase changes. .

  Further, in a preferred embodiment of the present invention, the plurality of intensity maps can be obtained by reflecting the wavefront from a reflecting surface so as to convert the plurality of converted wavefronts having different phase changes.

  Furthermore, in a preferred embodiment of the present invention, the step of obtaining the plurality of intensity maps of the converted wavefronts having the plurality of different phase changes includes the step of converting the converted wavefronts having the plurality of different phase changes. The converted wavefront including the plurality of different phase changes is included in the conversion wavefront to which the plurality of different phase changes are applied, and is at least one of the wavefront to which the analysis target wavefront and the plurality of different phase changes are applied. Reflected from the reflecting surface to be the same as the conversion process.

  Furthermore, in a preferred embodiment of the present invention, the conversion process to at least one of the wavefront to be analyzed and the wavefronts having the plurality of different phase changes is Fourier transform.

  In the step of obtaining an output for displaying at least one of the amplitude and phase of the wavefront to be analyzed using the plurality of intensity maps, the plurality of intensity maps are analyzed when at least one of the amplitude or phase is unknown. Receiving an output representing at least one mathematical function of the phase and amplitude of the wavefront and using the mathematical function to display at least one of the phase and amplitude.

  Furthermore, in a preferred embodiment of the present invention, in the step of obtaining an output for displaying at least one of the amplitude and phase of the wavefront to be analyzed using the intensity map, the plurality of intensity maps are at least one of phase and amplitude. Is an unknown and the phase and amplitude of the wavefront to be analyzed for which the plurality of different phase changes are known, and at least one mathematical function of the plurality of different phase changes, and using the mathematical function, the amplitude and A step of obtaining an output indicating at least one of the phases is included.

  Furthermore, in a preferred embodiment of the present invention, the plurality of intensity maps include at least four intensity maps, and using the plurality of intensity maps, obtaining an output that displays at least one of the amplitude and phase of the wavefront to be analyzed. Includes providing a plurality of indications for at least one of the amplitude and phase of the wavefront to be analyzed, each using a plurality of combinations of at least three of a plurality of intensity maps.

  It is preferable that the method further includes a step of obtaining a highlighted display of at least one of the amplitude and phase of the analysis target wavefront using a display of at least one of the amplitude and phase of the plurality of analysis target wavefronts.

  Furthermore, in a preferred embodiment of the present invention, the plurality of displays for at least one of the amplitude and the phase are at least a second class display for at least one of the amplitude and the phase of the wavefront to be analyzed.

  The step of acquiring a converted wavefront with a plurality of different phase changes includes a step of converting the wavefront to be analyzed to obtain a converted wavefront, and a plurality of different phases by applying a plurality of different phases and amplitude changes to the converted wavefront. At least one of the steps of obtaining a converted wavefront having a change, the steps of obtaining a plurality of different phases and amplitude changes to the wavefront to be analyzed to obtain a plurality of different phase and amplitude changes, and the plurality of steps Preferably, the method includes a step of converting the converted wavefronts having different phase and amplitude changes to obtain a plurality of converted wavefronts having different phase and amplitude changes.

  Furthermore, in a preferred embodiment of the present invention, the transformation process performed on at least one of the wavefront to be analyzed and the plurality of wavefronts having different phase and amplitude changes is a Fourier transform, and the plurality of different phase and amplitude changes. Includes at least three different phase and intensity changes, the plurality of different phase and amplitude changes converting at least one of a spatially homogeneous time-varying spatial phase change and a spatially homogeneous time-varying spatial amplitude change. At least one of the wavefronts and at least one of the wavefronts to be analyzed are applied, and the plurality of intensity maps include at least three intensity maps. In the step of obtaining an output for displaying at least one of the amplitude and phase of the wavefront to be analyzed using the plurality of intensity maps, the wavefront to be analyzed has the same amplitude and phase as the wavefront and amplitude of the wavefront to be analyzed. Having a first complex function having the plurality of intensity maps as a function of the first complex function and at least one of a spatially uniform time-varying spatial phase change and a spatially homogeneous time-varying spatial amplitude change. A step of representing as a function of the spatial function to be determined and a second complex function having an absolute value and a phase is limited as a function of the first complex function and a Fourier transform of the spatial function to determine a spatially homogeneous time-varying spatial phase change Each of the plurality of intensity maps includes a third relationship between an amplitude of the wavefront to be analyzed, an absolute value of the second complex function, and a difference between the phase of the wavefront to be analyzed and the phase of the second complex function. Are neither functions of the plurality of intensity maps or the time-varying spatial phase change, but the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the phase of the wavefront to be analyzed and the second complex function, respectively. The fourth, fifth, sixth and seventh complex functions, which are at least one function of the difference from the absolute value of, and one of the at least three different phase and amplitude changes corresponding to the at least three intensity maps. And limiting each of the plurality of intensity maps to a fourth complex function and a fifth function multiplied by the squared absolute value of the eighth function; Spatially uniform time-varying spatial phase change and spatially homogeneous, including the sum of the sixth function multiplied by the eighth function and the seventh function multiplied by the complex conjugate of the eighth function Limiting the at least one of the modified spatial amplitude changes as a spatial function, and solving the third function to analyze the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, the phase of the wavefront to be analyzed, and the second complex function Obtaining a difference from the absolute value; solving the second complex function to obtain a phase of the second complex function; and analyzing the phase of the second complex function with the phase of the wavefront to be analyzed and the second complex function A step of acquiring the phase of the wavefront to be analyzed by adding to the difference from the phase of.

  The wavefront to be analyzed preferably includes at least two wavelength components, and the acquisition of a plurality of intensity maps further includes acquiring at least two wavelength components of the converted wavefront whose phase has been changed, and each set. Separating the phase-converted converted wavefronts corresponding to the at least two wavelength components to obtain at least two sets of intensity maps corresponding to different ones of at least two wavelength components of the phase-changed converted wavefront And obtaining an output for displaying at least the phase of the wavefront to be analyzed using the plurality of intensity maps, and obtaining an output for displaying the phase of the wavefront to be analyzed from each of the at least two sets of intensity maps. And merging the outputs to give a 2π ambiguity highlight of the phase of the wavefront to be analyzed.

  Further, in a preferred embodiment of the present invention, the wavefront to be analyzed contains at least one one-dimensional component, and the wavefront to be analyzed is obtained by acquiring the wavefront to be analyzed with the plurality of different phase changes. Obtaining at least one component of the converted wavefront in a dimension orthogonal to the propagation direction by performing a one-dimensional Fourier transform process performed in a dimension perpendicular to the propagation direction of the plurality of different ones to each of the one-dimensional components Obtaining at least one one-dimensional component of a converted wavefront having a plurality of different phase changes by applying a phase change; and using the plurality of intensity maps to determine the amplitude and phase of the one-dimensional component of the wavefront to be analyzed Acquiring output that displays at least one of them is included.

  By imparting relative motion between the wavefront to be analyzed and a spatially varying time-qualified phase change element that occurs in an additional dimension orthogonal to both the propagation direction and the direction orthogonal to the propagation direction. Preferably, the plurality of different phase changes are applied to each of the one-dimensional components.

  Furthermore, in a preferred embodiment of the present invention, the analysis target wavefront includes a plurality of different wavelength components, and the plurality of different phase changes cause the plurality of different wavelengths of each of the plurality of one-dimensional components of the analysis target wavefront. Obtaining a plurality of intensity maps includes separating the plurality of one-dimensional components of the plurality of phase-changed converted wavefronts into separate wavelength components.

  Furthermore, in a preferred embodiment of the present invention, the one-dimensional Fourier transform processing to the wavefront to be analyzed includes an additional Fourier transform that minimizes crosstalk between different one-dimensional components of the wavefront to be analyzed.

  The wavefront to be analyzed is preferably an acoustic radiation wavefront.

  Furthermore, in a preferred embodiment of the present invention, the radiation reflected from the surface has a narrow band for a certain wavelength, and the phase of the wavefront to be analyzed is an inverse linear function of said wavelength with respect to structural changes on the surface. Proportional with ratio.

  Furthermore, in a preferred embodiment of the present invention, the radiation has a narrow band centered on at least two different wavelengths, and at least two wavelength components in the wavefront to be analyzed and at least two phases of the wavefront to be analyzed. Giving two indications, avoiding ambiguity in the mapping beyond the larger wavelengths of the two different wavelengths centered on the two narrow bands, the structural change in the surface of the colliding element where the radiation impinges, the thickness And highlight mapping of features including at least one of the structural changes in the device.

  Preferably, the object is substantially homogeneous in material and optical properties, and the phase of the wavefront to be analyzed is proportional to the thickness of the object.

  Furthermore, in a preferred embodiment of the present invention, it is preferable that the object is substantially uniform in thickness, and the phase of the analysis object inspection wavefront is proportional to the optical characteristic of the object.

  Further in accordance with a preferred embodiment of the present invention, the step of obtaining the wavefront to be analyzed is performed by reflecting the radiation from the object.

  Further, in addition to or instead of the above, the step of acquiring the wavefront to be analyzed is performed by propagating the radiation through the object.

  Further in accordance with a preferred embodiment of the present invention, the radiation is approximately a single wavelength, the phase of the wavefront to be analyzed is inversely proportional to the single wavelength, and at least a surface property and thickness of the impacted object. It is related to one side.

  According to a preferred embodiment of the present invention, when a lateral shift occurs in the plurality of different phase changes, a change corresponding to the plurality of intensity maps occurs, and this is used to display the lateral shift. Is preferably obtained.

  In the step of obtaining an output for displaying the difference between the plurality of different phase changes processed to the converted wavefront using the plurality of intensity maps, at least one of the phase and amplitude of the wavefront to be analyzed is known. Expressing the plurality of intensity maps as a mathematical function of at least one of the phase and amplitude of the wavefront to be analyzed and the plurality of different phase changes when the plurality of different phase changes are unknown; and the mathematical function Preferably, the method includes a step of obtaining an output that displays a difference between the plurality of different phase changes by using.

  The information encoded by selecting the height of the medium at each of various different positions on the medium can also be obtained by selecting the reflectivity of the medium at each of a plurality of different positions on the medium. The encoded information is obtained by selecting the height of the medium using the amplitude and phase indications, and the reflectivity of the medium is selected using the amplitude indications. The information encoded by is also acquired.

  Further in accordance with a preferred embodiment of the present invention the radiation reflected from the object has a narrow band of approximately constant wavelength, and the phase of the wavefront to be analyzed is an inverse linear function of the wavelength with respect to structural changes in the object. The ratio is proportional.

  Furthermore, the present application provides a phase change analysis method according to another preferred embodiment of the present invention. The method acquires a phase change analysis wavefront of an analysis target having an amplitude and a phase, converts the phase change analysis wavefront of the analysis target to acquire a conversion wavefront, and gives at least one phase change to the conversion wavefront Obtaining at least one converted wavefront having a phase change, obtaining at least one intensity map of the converted wavefront having the phase change, and using the intensity map, an output display of the phase change applied to the converted wavefront It is comprised including each process of acquiring.

  Further in accordance with a preferred embodiment of the present invention, the phase change is a phase delay having a numerical value selected from a plurality of predetermined values, and the phase change output display includes a numerical value for the phase delay. .

  Furthermore, the present application provides a wavefront analysis method according to another preferred embodiment of the present invention. The method acquires a converted wavefront having a plurality of different phase changes corresponding to an analysis target wavefront having amplitude and phase, acquires a plurality of intensity maps of the converted wavefronts having the plurality of phase changes, and Each step of acquiring an output for displaying at least one of the amplitude and the phase of the wavefront to be analyzed using the intensity map.

  Furthermore, the present application provides a wavefront analyzer according to another preferred embodiment of the present invention. The apparatus obtains a converted wavefront that has received a plurality of different amplitude changes corresponding to an analysis target wavefront having an amplitude and a phase, and a plurality of intensity maps of the converted wavefronts that have received the plurality of amplitude changes. An intensity map generation device and an intensity map utilization device that acquires an output for displaying at least one of the amplitude and phase of the wavefront to be analyzed using the plurality of intensity maps are configured.

Further provided herein is a surface mapping method according to another preferred embodiment of the present invention. The method obtains a surface mapped wavefront having an amplitude and phase by reflecting radiation from the surface;
Obtaining a converted wavefront subjected to a plurality of different amplitude changes corresponding to the surface mapped wavefront, obtaining a plurality of intensity maps of the converted wavefront subjected to the plurality of different amplitude changes, and using the plurality of intensity maps Each step of analyzing the surface mapped wavefront by acquiring an output indicating at least one of the amplitude and phase of the surface mapped wavefront is configured.

Further provided herein is a surface mapping device according to another preferred embodiment of the present invention. The apparatus includes a wavefront acquisition apparatus that acquires a surface mapping wavefront of an analysis target having an amplitude and a phase by reflecting radiation from a surface;
Analyzing the surface mapping wavefront of the analysis object and providing a converted wavefront subjected to a plurality of different amplitude changes corresponding to the surface mapping wavefront of the analysis object; and a conversion wavefront receiving the plurality of amplitude changes. An intensity map generator for acquiring a plurality of intensity maps, and a wavefront analyzer including an intensity map using apparatus for acquiring an output for displaying the amplitude and phase of the surface mapping wavefront to be analyzed using the plurality of intensity maps. It is prepared for.

Furthermore, in the present application, an object inspection method according to another preferred embodiment of the present invention is provided. The method obtains an object inspection wavefront having amplitude and phase by propagating radiation through the object,
Obtaining a converted wavefront subjected to a plurality of different amplitude changes corresponding to the object inspection wavefront, obtaining a plurality of intensity maps of the converted wavefront subjected to the plurality of amplitude changes, and using the plurality of intensity maps The method includes the steps of analyzing the object inspection wavefront by obtaining an output that displays at least one of the amplitude and phase of the object inspection wavefront.

The present application further provides an object inspection apparatus according to another preferred embodiment of the present invention. The apparatus includes a wavefront acquisition apparatus that acquires an object inspection wavefront to be analyzed having an amplitude and a phase by propagating radiation through the object;
A wavefront converter for analyzing the object inspection wavefront to be analyzed and providing a converted wavefront subjected to a plurality of different amplitude changes corresponding to the object inspection wavefront of the analysis object; and a conversion receiving the plurality of amplitude changes A wavefront comprising an intensity map generation device that acquires a plurality of intensity maps of a wavefront, and an intensity map utilization device that acquires an output that displays the amplitude and phase of the object inspection wavefront to be analyzed using the plurality of intensity maps It is configured with an analyzer.

Furthermore, the present application provides a spectroscopic analysis method according to a preferred embodiment of the present invention. The method obtains a spectroscopic wavefront having amplitude and phase by impinging radiation on an object,
Obtaining a plurality of different converted amplitude wavefronts corresponding to the spectroscopic wavefront having amplitude and phase, obtaining a plurality of intensity maps of the converted wavefronts subjected to the plurality of amplitude changes, and obtaining the plurality of intensity maps; To obtain an output for displaying at least one of the amplitude and phase of the spectroscopic analysis wavefront, and to obtain an output for displaying the spectral content of the radiation using an output for displaying at least one of the amplitude and phase. The method includes the steps of analyzing the spectroscopic wavefront.

Furthermore, the present application provides a spectroscopic analyzer according to still another preferred embodiment of the present invention. The apparatus includes a wavefront acquisition apparatus that acquires a spectroscopic wavefront of an analysis target having an amplitude and a phase by causing radiation to collide with an object;
Analyzing a spectral analysis wavefront of the analysis object and providing a converted wavefront subjected to a plurality of different amplitude changes corresponding to the spectral analysis wavefront of the analysis object; and a converted wavefront subjected to the plurality of amplitude changes. An intensity map generator for acquiring a plurality of intensity maps; and a wavefront analyzer including an intensity map using device for acquiring an output for displaying the amplitude and phase of the spectral analysis wavefront to be analyzed using the plurality of intensity maps; ,
The apparatus includes a phase amplitude utilization device that obtains an output for displaying the spectral content of the radiation using an output for displaying the amplitude and phase.

  Furthermore, the present application provides an amplitude change analysis method according to a preferred embodiment of the present invention. This method acquires an amplitude change analysis wavefront having an amplitude and a phase, converts the amplitude change analysis wavefront to obtain a converted wavefront, and gives a plurality of different amplitude changes to the converted wavefront to thereby give a plurality of different amplitude changes. The plurality of converted wavefronts having undergone a plurality of amplitude changes are obtained, and the plurality of intensity maps of the converted wavefronts having undergone the plurality of amplitude changes are obtained, and the plurality of amplitudes added to the converted amplitude change analysis wavefront using the plurality of intensity maps Each step is configured to acquire an output indicating a difference between different amplitude changes.

  Furthermore, the present application provides an amplitude change analyzer according to another preferred embodiment of the present invention. The apparatus includes a wavefront acquisition apparatus that acquires an amplitude change analysis wavefront of an analysis target having an amplitude and a phase, a conversion processing apparatus that converts the amplitude change analysis wavefront of the analysis target to acquire a conversion wavefront, and the conversion wavefront Amplitude change processing device for acquiring a converted wavefront subjected to a plurality of different amplitude changes by applying a plurality of different amplitude changes to the waveform, and an intensity map generating device for acquiring a plurality of intensity maps of the converted wavefronts subjected to the plurality of amplitude changes And an intensity map using device for acquiring an output for displaying a difference between a plurality of different amplitude changes applied to the converted wavefront using the plurality of intensity maps.

Furthermore, the present application provides a stored data retrieval method according to another preferred embodiment of the present invention. The method obtains a stored data retrieval wavefront having amplitude and phase by reflecting radiation from the medium where information is encoded by selecting the height of the medium at each of various different locations on the medium. And
Obtaining a converted wavefront subjected to a plurality of different amplitude changes corresponding to the stored data search wavefront, obtaining a plurality of intensity maps of the converted wavefront subjected to the plurality of amplitude changes, and using the plurality of intensity maps Analyzing each of the stored data search wavefronts by obtaining a display of at least one of an amplitude and a phase of the stored data search wavefront, and acquiring each of the information using at least one display of the amplitude and phase. It is configured.

Furthermore, the present application provides a stored data retrieval apparatus according to a preferred embodiment of the present invention. The apparatus retrieves stored data for an analyte having amplitude and phase by reflecting radiation from the medium where information is encoded by selecting the height of the medium at each of a variety of different locations on the medium. A wavefront acquisition device for acquiring a wavefront;
A wavefront conversion device that analyzes the stored data retrieval wavefront of the analysis object and provides a converted wavefront subjected to a plurality of different amplitude changes corresponding to the stored data retrieval wavefront of the analysis object; and the conversion that receives the plurality of amplitude changes A wavefront comprising an intensity map generating device for acquiring a plurality of intensity maps of a wavefront, and an intensity map using device for acquiring an output for displaying the amplitude and phase of the stored data search wavefront to be analyzed using the plurality of intensity maps An analysis device;
The apparatus includes a phase amplitude utilization device that acquires the information using an output that displays the amplitude and phase.

In the present application, a three-dimensional image forming method according to another preferred embodiment of the present invention is provided. The method obtains a three-dimensional imaging wavefront having an amplitude and phase by reflecting radiation from an object to be examined,
Obtaining a converted wavefront subjected to a plurality of different amplitude changes corresponding to the three-dimensional image forming wavefront, obtaining a plurality of intensity maps of the converted wavefront subjected to the plurality of amplitude changes, and using the plurality of intensity maps The method includes the steps of analyzing the three-dimensional image forming wavefront by obtaining an output that displays at least one of the amplitude and phase of the three-dimensional image forming wavefront.

The present application further provides a three-dimensional image forming apparatus according to a preferred embodiment of the present invention. The apparatus includes a wavefront acquisition apparatus that acquires a three-dimensional image forming wavefront of an analysis object having an amplitude and a phase by reflecting radiation from an object to be inspected;
Analyzing the three-dimensional image forming wavefront to be analyzed, and providing a converted wavefront subjected to a plurality of different amplitude changes corresponding to the three-dimensional image forming wavefront to be analyzed; and the plurality of different amplitude changes. An intensity map generator for acquiring a plurality of intensity maps of the received converted wavefront, and an intensity map using apparatus for acquiring an output for displaying the amplitude and phase of the three-dimensional image forming wavefront to be analyzed using the plurality of intensity maps It is comprised including the wavefront analyzer provided with.

  The present application further provides a wavefront analysis method according to a preferred embodiment of the present invention. The method obtains a converted wavefront subjected to a plurality of different amplitude changes corresponding to the wavefront to be analyzed, acquires a plurality of intensity maps of the converted wavefront subjected to the plurality of amplitude changes, and uses the plurality of intensity maps. An output indicating at least the phase of the wavefront to be analyzed is obtained by merging the plurality of intensity maps into a second plurality of merged intensity maps less than the first plurality of intensity maps; Each of the plurality of merged intensity maps including at least an output for displaying the phase of the wavefront to be analyzed and combining the outputs to give at least an emphasis on the phase of the wavefront to be analyzed. Has been.

The present application further provides a wavefront analyzer according to a preferred embodiment of the present invention. The apparatus includes a wavefront conversion device that provides a converted wavefront that has been subjected to a plurality of different phase changes corresponding to a wavefront to be analyzed having an amplitude and a phase;
An intensity map generator for acquiring a plurality of intensity maps of the converted wavefront subjected to the plurality of amplitude changes;
Using the intensity map to obtain an output indicating at least the phase of the wavefront to be analyzed, and converting the plurality of intensity maps into a second plurality of merged intensity maps less than the first plurality of intensity maps; An intensity merging device for merging, a display providing device for providing an output for displaying at least the phase of the wavefront to be analyzed from each of the second plurality of merging intensity maps, and a phase of at least the wavefront to be analyzed by merging the outputs Is provided with an intensity map utilization device provided with an emphasis display giving device for giving emphasis display.

  The present application further provides a wavefront analysis method according to another preferred embodiment of the present invention. The method acquires a converted wavefront subjected to a plurality of different amplitude changes corresponding to a wavefront to be analyzed, acquires a plurality of intensity maps of the converted wavefronts subjected to the plurality of amplitude changes, and converts the intensity maps to the intensity map Obtaining an output indicating at least the amplitude of the wavefront to be analyzed by merging into a smaller second plurality of merged intensity maps, and at least the amplitude of the wavefront to be analyzed from each of the second plurality of merged intensity maps Are obtained, and the outputs are combined to provide at least an emphasis display on the amplitude of the wavefront to be analyzed.

  The present application further provides a wavefront analyzer according to a preferred embodiment of the present invention. The apparatus includes: a wavefront converter that provides a converted wavefront that has undergone a plurality of different phase changes corresponding to a wavefront to be analyzed having amplitude and phase; and an intensity that provides a plurality of intensity maps of the converted wavefronts that have undergone the plurality of amplitude changes. A map generator and an output for displaying at least the amplitude of the wavefront to be analyzed using the plurality of intensity maps, and merging the plurality of intensity maps into a second plurality of merged intensity maps less than the intensity map; An intensity merging device, a display providing device for providing an output for displaying at least the amplitude of the wavefront to be analyzed from each of the second plurality of merged intensity maps, and an amplitude of the wavefront to be analyzed by merging the outputs. At least an intensity map using device including an emphasis display giving device for giving emphasis display is provided.

  In the present application, a wavefront analysis method according to a preferred embodiment of the present invention is provided. The method acquires a converted wavefront subjected to a plurality of different amplitude changes corresponding to a wavefront to be analyzed, acquires a plurality of intensity maps of the converted wavefront subjected to the plurality of amplitude changes, and uses the plurality of intensity maps Expressing the plurality of intensity maps as a function of an amplitude change function characterizing the amplitude of the wavefront to be analyzed, the phase of the wavefront to be analyzed and the converted wavefront having undergone the plurality of different amplitude changes, Each step includes obtaining an output for displaying a phase. Limiting the amplitude of the wavefront to be analyzed, the phase of the wavefront to be analyzed, and the complex function of the amplitude change function that characterizes the converted wavefront subjected to the plurality of different amplitude changes, and the intensity at each position in the plurality of intensity maps is A complex function characterized in that it is a function governing the numerical value of the complex function at that position and the amplitude and phase values of the wavefront to be analyzed at that position, and represents the complex function as a function of the plurality of intensity maps, It is preferable to obtain a numerical value for the phase by using the complex function expressed as a function of the plurality of intensity maps.

  In this application, a wavefront analyzer according to a preferred embodiment of the present invention is provided. The apparatus obtains a converted wavefront that has received a plurality of different phase changes corresponding to a wavefront to be analyzed having amplitude and phase, and a plurality of intensity maps of the converted wavefronts that have received the plurality of amplitude changes. An intensity map generator and an output for displaying at least the phase of the wavefront to be analyzed, and the plurality of intensity maps are subjected to amplitude of the wavefront to be analyzed, phase of the wavefront to be analyzed and the plurality of different amplitude changes. Intensity map display device represented as a function of an amplitude change function characterizing the converted wavefront, and the amplitude change function characterizing the converted wavefront subjected to the amplitude of the wavefront to be analyzed, the phase of the wavefront to be analyzed and the plurality of different amplitude changes An intensity map using device provided with a complex function defining device for limiting the complex function is configured. The complex function is characterized in that the intensity at each position in the plurality of intensity maps is a function that governs the complex function at that position and the numerical value of the amplitude and phase of the wavefront to be analyzed at that position. Preferably, the function display device represents the complex function as a function of the plurality of intensity maps, and the phase acquisition device acquires a numerical value for the phase using a complex function represented as a function of the plurality of intensity maps.

  The present application further provides a wavefront analysis method according to another preferred embodiment of the present invention. The method obtains a converted wavefront by subjecting a wavefront to be analyzed having an amplitude and a phase to a Fourier transform process, and applies a spatially uniform time-varying spatial amplitude change to a part of the converted wavefront to provide at least three different amplitude changes. And receiving the converted wavefront, and performing the second Fourier transform process to obtain at least three intensity maps of the converted wavefront whose amplitude has been changed. The method uses at least three intensity maps to represent the wavefront to be analyzed as a first complex function having the same amplitude and phase as the wavefront and amplitude of the wavefront to be analyzed, wherein the plurality of intensity maps are the first complex function and the Expressed as a function of the spatial function that determines the spatially uniform time-varying spatial amplitude change, the second complex function and phase having absolute values as the first complex function and the spatially uniform time-varying spatial amplitude change as determined Limiting each of the plurality of intensity maps as the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the difference between the phase of the wavefront to be analyzed and the phase of the second complex function. , And as a third function of a known amplitude decay caused by one of at least three different amplitude changes, each corresponding to one of at least three intensity maps, Solve the third function to obtain the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the difference between the phase of the wavefront to be analyzed and the phase of the second complex function, and solve the second complex function to obtain the second Obtaining the phase of the complex function, and obtaining the phase of the wavefront to be analyzed by adding the phase of the second complex function to the difference between the phase of the wavefront to be analyzed and the phase of the second complex function, It is preferable to obtain an output indicating at least one of the phase and the amplitude of the signal.

  In the present application, a wavefront analyzer according to still another preferred embodiment of the present invention is provided. The apparatus includes: a first conversion device that obtains a converted wavefront by performing a Fourier transform process on a wavefront to be analyzed having an amplitude and a phase; and applying a spatially uniform time-varying spatial amplitude change to a part of the converted wavefront. An amplitude change processing device that obtains three different converted amplitude wavefronts; a second transformation device that obtains at least three intensity maps by Fourier transforming the converted wavefronts that have given at least three different amplitude changes; An output for displaying at least one of the phase and amplitude of the wavefront to be analyzed is obtained using the at least three intensity maps, and the object to be analyzed is a first complex function having the same amplitude and phase as the amplitude and phase of the wavefront to be analyzed A wavefront display device representing a wavefront; and a plurality of intensity maps, a first complex function and a function of a spatial function that determines a spatially uniform time-varying spatial amplitude change. A first intensity map display device, and a second complex function having an absolute value and phase as a composition of Fourier transform of the first complex function and the spatial function for determining the spatially uniform time-varying spatial amplitude change A complex function limiting device for limiting, and each of the plurality of intensity maps, the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, the difference between the phase of the wavefront to be analyzed and the phase of the second complex function, and A second intensity map display device representing the third function of a known phase delay caused by one of the at least three different amplitude changes corresponding to one of the at least three intensity maps, and solving and analyzing the third function A first function solving apparatus for obtaining the amplitude of the target wavefront, the absolute value of the second complex function, and the difference between the phase of the wavefront to be analyzed and the phase of the second complex function, and solving the second complex function The second complex function solver that obtains the phase of the two complex functions and the phase of the wavefront to be analyzed by adding the phase of the second complex function to the difference between the phase of the wavefront to be analyzed and the phase of the second complex function And an intensity map utilization device including a phase acquisition device.

  Furthermore, according to a preferred embodiment of the present invention, the converted wavefront subjected to the plurality of different amplitude changes is obtained by interference of the wavefront to be analyzed along a common optical path.

  The step of acquiring a converted wavefront subjected to a plurality of different amplitude changes includes a step of converting the wavefront to be analyzed to obtain a converted wavefront and a plurality of different amplitude changes by applying a plurality of different amplitude changes to the converted wavefront. At least one of the steps of obtaining the received converted wavefront, the step of giving a plurality of different amplitude changes to the wavefront to be analyzed to obtain a wavefront that has received a plurality of different amplitude changes, and the plurality of different amplitude changes Preferably, the method includes a step of converting the wavefront to obtain a converted wavefront subjected to a plurality of different amplitude changes.

  Further in accordance with a preferred embodiment of the present invention, the plurality of different amplitude changes include a spatial amplitude change.

  Further, according to a preferred embodiment of the present invention, the plurality of different amplitude changes include a spatial amplitude change, and the plurality of different spatial amplitude changes are obtained by converting a time-variant spatial amplitude change into a part of a converted wavefront and an analysis wavefront. It is accomplished by giving to at least one of the parts.

  Further in accordance with a preferred embodiment of the present invention, the plurality of different spatial amplitude changes are performed by applying a spatially uniform time-varying spatial amplitude change to at least one of the converted wavefront and the analyzed wavefront. It is what is done.

  The transformation process performed on at least one of the wavefront to be analyzed and the wavefront subjected to amplitude change as a plurality of steps is Fourier transform, and the acquisition of a plurality of intensity maps of the converted wavefront subjected to the plurality of amplitude changes Preferably, a Fourier transform process to a transformed wavefront that has undergone a plurality of different amplitude changes is included.

  Furthermore, according to a preferred embodiment of the present invention, in this method, for obtaining a converted wavefront subjected to a plurality of different amplitude changes, a step of acquiring a converted wavefront by subjecting the wavefront to be analyzed to Fourier transform and a plurality of converted wavefronts are obtained. To obtain a converted wavefront subjected to a plurality of different amplitude changes, and to obtain a converted wavefront subjected to a plurality of different amplitude changes by applying a plurality of different amplitude changes to the wavefront to be analyzed And a step of obtaining a converted wavefront subjected to a plurality of different amplitude changes by performing a Fourier transform process on the wavefront subjected to the plurality of different amplitude changes, and the plurality of different amplitude changes include a spatial amplitude change. The plurality of different amplitude changes are performed by applying a spatially uniform time-varying spatial amplitude change to at least one of the converted wavefront and the analyzed wavefront. The plurality of different spatial amplitude changes include at least three different amplitude changes, the plurality of intensity maps include at least three intensity maps, and an analysis target wavefront using the plurality of intensity maps. To obtain an output that displays at least one of amplitude and phase, the analysis target wavefront is represented as a first complex function having the same amplitude and phase as the analysis target wavefront, and the plurality of intensity maps are represented by a first complex map. Express as a function and a function of a spatial function that determines spatially uniform time-varying spatial amplitude variation, and determine a second complex function having amplitude and phase as the first complex function and the spatially uniform time-varying spatial amplitude variation Each of the plurality of intensity maps is defined as the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, the phase of the wavefront to be analyzed and the second complex function. Expressing the third function as a third function of the difference between the phases, and a known amplitude attenuation caused by one of the at least three different amplitude changes, each corresponding to one of the at least three intensity maps. And obtain the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the difference between the phase of the wavefront to be analyzed and the phase of the second complex function, and solve the second complex function to obtain the phase of the second complex function. Each step of acquiring and acquiring the phase of the wavefront to be analyzed by adding the phase of the second complex function to the difference between the phase of the wavefront to be analyzed and the phase of the second complex function is included.

  Further in accordance with a preferred embodiment of the present invention, the plurality of different amplitude changes include at least four different amplitude changes, the plurality of intensity maps include at least four intensity maps, and the plurality of intensity maps. In order to obtain an output that displays at least one of the amplitude and phase of the wavefront to be analyzed by using each of the plurality of intensity maps, the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, the phase of the wavefront to be analyzed and A difference between the phases of the second complex function, a known amplitude attenuation caused by one of the at least four different amplitude changes, each corresponding to one of the at least four intensity maps, and at least one associated with wavefront analysis Representing the third intensity map as a third function of additional unknowns less than or equal to a number greater than 3 by the number of The amplitude of the target wave front, the absolute value of the second complex function, obtaining a difference and the unknown between the phase of the phase and the second complex function to be analyzed wavefront is included.

  Further in accordance with a preferred embodiment of the present invention, the amplitude change is selected so that the contrast of the intensity map is maximized and the influence of noise on the phase of the wavefront to be analyzed is minimized.

  Furthermore, according to a preferred embodiment of the present invention, each of the plurality of intensity maps is represented by the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, the difference between the phase of the wavefront to be analyzed and the absolute phase of the second complex function. And displaying each of the plurality of intensity maps as a third function of a known amplitude decay caused by one of the at least three different amplitude changes, each corresponding to one of the at least three intensity maps. Alternatively, although not a function of the time-varying spatial amplitude change, each is a function of the amplitude of the analysis target wavefront, the absolute value of the second complex function, and the difference between the phase of the analysis target wavefront and the phase of the second complex function. Defining fourth, fifth and sixth complex functions, and multiplying the plurality of intensity maps by a fourth function, the known amplitude attenuation corresponding to each of the plurality of intensity maps. Step expressed as the sum of the sixth complex function which is multiplied by the elementary function, and known amplitude attenuation which is squaring corresponds to each of the plurality of intensity maps are included.

Further, according to a preferred embodiment of the present invention, the third function is solved to obtain the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the difference between the phase of the wavefront to be analyzed and the phase of the second complex function. The process includes
Obtaining two solutions, a high value and a low value, for each of the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the difference between the phase of the wavefront to be analyzed and the phase of the second complex function,
About the absolute value of the second complex function by selecting one of the two solutions at each spatial location, the higher or lower, so that the emphasized absolute value solution satisfies the second complex function Merging these two solutions into an enhanced absolute value solution, and at each position where the higher numerical solution is selected for the absolute value solution, the higher numerical solution is selected for the amplitude solution, and the lower numerical solution is the At each position selected for the absolute value solution, either the high value solution or the low value solution of the two solutions of the amplitude at each spatial position is selected so that the low value solution is selected for the amplitude solution. By combining the two solutions for the amplitude of the wavefront to be analyzed into the enhanced amplitude solution by selecting, the phase of the wavefront to be analyzed and the second complex at each position where the high numerical solution is selected for the absolute value solution The high numerical value solution is selected for the difference solution between the phase of the function, and the low numerical solution is selected for the difference solution at each position where the low numerical solution is selected for the absolute value solution. Each step of merging the two solutions for the difference into the highlighted difference solution by selecting one of the two solutions for the difference at each spatial location. It is included.

  Further in accordance with a preferred embodiment of the present invention, the spatially uniform time-varying spatial amplitude change described above is processed into a spatial center portion of at least one of the converted wavefront and the wavefront to be analyzed.

  Additionally or alternatively, the spatially uniform time-varying spatial amplitude change is processed to approximately half of the converted wavefront and / or the wavefront to be analyzed.

  The method of the present invention further includes a step of adding a phase component including a relatively high frequency component to the wavefront to be analyzed in order to increase the high frequency component of the converted wavefront subjected to the plurality of different amplitude changes. Is preferred.

  Further in accordance with a preferred embodiment of the present invention, the information is encoded on the medium such that the intensity value corresponds to the information component stored at that position on the medium by reflection of light from each position. It is realized that it falls within a predetermined numerical value, and by using the plurality of intensity maps, a plurality of intensity values are realized for each position to provide a plurality of components of information for each position on the medium.

  Further, according to a preferred embodiment of the present invention, the converted wavefront subjected to the plurality of different amplitude changes includes a plurality of wavefronts whose amplitudes are changed by applying at least a time-varying amplitude change to the analysis target wavefront. ing.

  Further, according to a preferred embodiment of the present invention, the analysis target wavefront includes a plurality of different wavelength components, and the converted wavefront subjected to the plurality of different amplitude changes converts the analysis target wavefront and the analysis target wavefront. This is obtained by giving an amplitude change to a plurality of different wavelength components of at least one of the converted wavefronts obtained by this.

  Preferably, the amplitude change is applied to a plurality of different wavelength components of the analysis target wavefront, and the amplitude change applied to the plurality of different wavelength components is transmitted through the target object whose wavelength component is spatially changed and the analysis target wavefront and This is accomplished by passing at least one of the converted wavefronts.

  Furthermore, according to a preferred embodiment of the present invention, the amplitude change given to the plurality of different wavelength components is caused by reflecting at least one of the wavefront to be analyzed and the converted wavefront from the surface where the reflection of the wavelength component changes spatially. Carried out.

  Further in accordance with a preferred embodiment of the present invention, the amplitude change applied to the plurality of different wavelength components is selected to differ to a predetermined degree for at least some of the plurality of different wavelength components.

  Further in accordance with a preferred embodiment of the present invention, the amplitude change applied to the plurality of different wavelength components is selected such that at least some of the plurality of different wavelength components are the same.

  The amplitude change given to the plurality of different wavelength components is performed by passing at least one of the wavefront to be analyzed and the converted wavefront through the plurality of objects, each of which has a spatially varying propagation of the wavelength component. It is preferable.

  Furthermore, according to a preferred embodiment of the present invention, in the method of the present invention, acquisition of a plurality of intensity maps is performed simultaneously for all of a plurality of different wavelength components, and the acquisition of the plurality of intensity maps includes the plurality of different amplitude changes. A step of separating the received converted wavefront into separate wavelength components is included.

  The step of separating the converted wavefronts subjected to the plurality of different amplitude changes is performed by passing the converted wavefronts subjected to the plurality of different amplitude changes through a dispersive element.

  Further, according to a preferred embodiment of the present invention, the analysis target wavefront includes a plurality of different polarization components, and the converted wavefront subjected to the plurality of different amplitude changes is obtained by converting the analysis target wavefront and the analysis target wavefront. This is accomplished by applying amplitude changes to a plurality of different polarization components of at least one of the converted wavefronts.

  The amplitude change applied to the plurality of different polarization components is different for at least some of the plurality of different polarization components.

  Further in accordance with a preferred embodiment of the present invention, the amplitude change imparted to the plurality of different polarization components is the same for at least some of the plurality of different polarization components.

  Further, according to a preferred embodiment of the present invention, the step of obtaining the plurality of intensity maps of the converted wavefronts subjected to the plurality of different amplitude changes includes the step of converting the converted wavefronts subjected to the plurality of different amplitude changes. It is.

  Further in accordance with a preferred embodiment of the present invention, the plurality of intensity maps transform the converted wavefronts subjected to the plurality of different amplitude changes by reflecting the converted wavefronts subjected to the plurality of different amplitude changes from the reflecting surface. Obtained by.

  Further in accordance with a preferred embodiment of the present invention, the transform provided to at least one of the wavefront to be analyzed and the transformed wavefront subjected to a plurality of different amplitude changes is a Fourier transform.

  Furthermore, according to a preferred embodiment of the present invention, in the step of obtaining an output for displaying at least one of the amplitude and the phase of the wavefront to be analyzed using a plurality of intensity maps, the plurality of intensity maps are analyzed with an unknown number. Receiving an output representing as a mathematical function of at least one of the amplitude and phase of the wavefront and using the mathematical function to display at least one of the amplitude and phase of the wavefront to be analyzed.

  The plurality of intensity maps include at least four intensity maps, and the step of obtaining an output for displaying at least one of the amplitude and the phase of the wavefront to be analyzed using the intensity map is at least 3 of the plurality of intensity maps. Preferably, the method includes a step of providing a plurality of displays for at least one of the amplitude and the phase of the wavefront to be analyzed using a plurality of combinations.

  Furthermore, the method of the present invention includes the step of providing a highlighted display of at least one of the amplitude and phase of the analysis target wavefront using a plurality of displays for at least one of the amplitude and phase of the analysis target wavefront.

  Furthermore, according to a preferred embodiment of the present invention, the step of obtaining the converted wavefront including at least one one-dimensional component in the analysis target wavefront and receiving the plurality of different amplitude changes is performed on the analysis target wavefront. Performing a one-dimensional Fourier transform process performed in a dimension orthogonal to the propagation direction of the wavefront to be analyzed to obtain at least one one-dimensional component of the converted wavefront in a dimension orthogonal to the propagation direction; and to each one-dimensional component Obtaining at least one one-dimensional component of the converted wavefront subjected to the plurality of different amplitude changes by giving a plurality of different amplitude changes, and the amplitude and phase of the position-dimensional component of the wavefront to be analyzed using the plurality of intensity maps A step of acquiring an output for displaying at least one of the following.

  The plurality of different amplitude changes are within a dimension orthogonal to the propagation direction and to a dimension orthogonal to the propagation direction between components that generate a time-dependent amplitude change spatially changing with the wavefront to be analyzed. Preferably, each of the one-dimensional components is provided by providing a relative movement that exists within the provided orthogonal dimension.

  Additionally or alternatively, the one-dimensional Fourier transform applied to the analysis target wavefront includes an additional Fourier transform that minimizes crosstalk between different one-dimensional components of the analysis target wavefront.

The wavefront to be analyzed is preferably an acoustic radiation wavefront.
Further in accordance with a preferred embodiment of the present invention the radiation reflected from the surface has a narrow band of constant wavelengths and the phase of the wavefront to be analyzed is an inverse linear function of the wavelength with respect to structural changes in the surface. It is configured to be proportional with a ratio.

  Further in accordance with a preferred embodiment of the present invention, the radiation has at least two narrow bands, each centered at a different wavelength, and at least two wavelength components in the wavefront to be analyzed and at least two phases for the phase of the wavefront to be analyzed. Giving an indication and avoiding ambiguity in the mapping over the larger one of the different wavelengths centered on the two narrow bands, the structural change in the surface of the impinging component impinged by radiation, the thickness and said component Enabling enhancement mapping of features including at least one of the structural changes therein.

  Further, when a lateral shift occurs in the plurality of different amplitude changes, a corresponding change occurs in the plurality of intensity maps, and thus the display of the lateral shift is obtained using the result. .

  The present invention further provides an amplitude change analysis method according to another preferred embodiment. The method acquires an amplitude change analysis wavefront of an analysis target having an amplitude and a phase, converts the amplitude change analysis wavefront of the analysis target to acquire a conversion wavefront, and gives at least one amplitude change to the conversion wavefront. Obtaining a converted wavefront to which at least one amplitude change has been applied, obtaining at least one intensity map of the converted wavefront to which the amplitude change has been applied, and using the intensity map to obtain an amplitude change applied to the converted wavefront Each step includes obtaining each output to be displayed.

Further in accordance with a preferred embodiment of the present invention the information encoded by selecting the height of the medium at each of a variety of different locations on the medium is at each of a plurality of different locations on the medium. It is also possible to encode by selecting the reflectivity of the medium, and in the step of obtaining the information using the display of at least one of the amplitude and phase, the medium using the display about the phase At least one of obtaining information encoded by selecting a height and obtaining information encoded by selecting reflectivity of the medium using an indication of amplitude.
Still further in accordance with a preferred embodiment of the present invention the radiation reflected from the object has a narrow band of constant wavelengths, and the phase of the wavefront to be analyzed is the wavelength relative to the structural change in the object. It is comprised so that it may be proportional with the ratio which is an inverse linear function of.
Understanding and evaluation of the present invention can be made by the following drawings and the following description.

FIG. 3 is a simplified illustration, partly schematic and partly illustrated, of a wavefront analysis function operating in accordance with a preferred embodiment of the present invention. 1B is a partially simplified and partially block simplified illustration of a wavefront analysis system suitable for performing the functions shown in FIG. 1A according to a preferred embodiment of the present invention. FIG. The simplified functional block diagram for demonstrating the function of FIG. 1A which gives a time-variation phase change to a conversion wave front. The simplified functional block diagram for demonstrating the function of FIG. 1A which gives a time-variation phase change to a wave front prior to conversion of a wave front. The simplified functional block diagram for demonstrating the function of FIG. 2 which gives the conversion wavefront the spatial phase change which changes non-spatially by time-variation. The simplified functional block diagram for demonstrating the function of FIG. 3 which gives the spatial phase change which changes to a wave front by time-variation non-spatially prior to conversion of a wave front. The simplified functional block diagram for demonstrating the function of FIG. 1A which gives a phase change to several different wavelength components of a conversion wave front. The simplified functional block diagram for demonstrating the function of FIG. 1A which gives a phase change to several different wavelength components of a wavefront prior to conversion of a wavefront. The simplified functional block diagram for demonstrating the function of FIG. 1A which gives a phase change to several different polarization components of a conversion wave front. The simplified functional block diagram for demonstrating the function of FIG. 1A which gives a phase change to several different polarization components of a wave front prior to conversion of a wave front. FIG. 1B is a simplified functional block diagram for explaining the function of FIG. 1A in which the wavefront to be analyzed includes at least one one-dimensional component. FIG. 10B is a simplified illustration, partly schematic and partly illustrated, of a wavefront analysis system suitable for performing the functions shown in FIG. 10A according to a preferred embodiment of the present invention. The simplified block diagram for demonstrating the function shown to FIG. 1A by which additional conversion is added after a spatial phase change process. The simplified block diagram for demonstrating the function shown in FIG. 1A which provides the information regarding the wavefront to be analyzed, such as the display of the amplitude and phase of a wavefront, using an intensity map. In FIG. 1A, the transformation process to the wavefront to be analyzed is a Fourier transform, at least three different spatial phase changes are applied to the transformed wavefront, and at least three intensity maps are used to obtain an indication of at least the phase of the wavefront. The simplified functional block diagram for demonstrating a part of shown function. FIG. 1B is a simplified illustration partially partially illustrated and partially illustrated in part of a preferred embodiment of the wavefront analysis system of the method illustrated in FIG. 1B. 1B is a simplified illustration partially illustrating and partially illustrating a surface mapping system using the functions and structures illustrated in FIGS. 1A and 1B. FIG. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a simplified explanatory diagram partially illustrating the object inspection system using the functions and structures illustrated in FIGS. 1A and 1B and partially illustrating the same. 1B is a simplified illustration partially illustrating and partially illustrating a phase change analysis system using the functions and structures illustrated in FIGS. 1A and 1B. FIG. 1B is a simplified illustration partially illustrating and partially illustrating a phase change analysis system using the functions and structures illustrated in FIGS. 1A and 1B. FIG. 1A is a simplified illustration partially illustrating and partially illustrating a stored data retrieval system using the functions and structures illustrated in FIGS. 1A and 1B. FIG. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a simplified explanatory diagram partially illustrating and partially illustrating a three-dimensional image forming system using the functions and structures illustrated in FIGS. 1A and 1B. FIG. 6 is a simplified schematic illustration, partly schematic and partly illustrated, for explaining a wavefront analysis function operating according to another preferred embodiment of the present invention. FIG. 21B is a simplified schematic illustration, partially schematic and partially block diagram illustrating a wavefront analysis system suitable for performing the function shown in FIG. 21A according to another preferred embodiment of the present invention. FIG. 22 is a simplified illustration partially illustrating and partially illustrating the surface mapping system using the functions and structures illustrated in FIGS. 21A and 21B.

Reference is now made to FIG. 1A, which is a partially schematic and partially pictorial illustration illustrating a wavefront analysis function that operates in accordance with a preferred embodiment of the present invention. In summary, the functions shown in FIG. 1A include the following subordinate functions.
A. A function of acquiring a converted wavefront subjected to a plurality of different phase changes corresponding to a wavefront to be analyzed having an amplitude and a phase;
B. C. a function of acquiring a plurality of intensity maps of the converted wavefront subjected to the plurality of phase changes; A function of acquiring an output for displaying at least one of the phase and amplitude of the wavefront to be analyzed or possibly both using the plurality of intensity maps.

  As shown in FIG. 1A, the first subordinate function indicated by A can be realized by the following functions.

  A wavefront that can be represented by a plurality of light point sources is generally designated 100. The wavefront 100 has a wavelength characteristic that is typically spatially inhomogeneous, indicated by a solid line and generally indicated at 102. The wavefront 100 also has an amplitude characteristic that is typically spatially inhomogeneous, indicated by dotted lines and generally indicated at 103. In the conventional method, such a wavefront can be acquired by receiving light from any object by reading an optical disc such as a DVD or a compact disc 104, for example.

  The main object of the present invention is to measure a phase characteristic such as indicated by reference numeral 102 that is not easy to measure. Another object of the present invention is to measure the amplitude characteristic, such as indicated by symbol 103, by an enhancement scheme. Yet another object of the present invention is to measure both the phase characteristic 102 and the amplitude characteristic 103. Although there are various techniques for performing such measurements, the present invention provides methodologies over known techniques, particularly in terms of relative non-responsiveness to noise.

  The conversion denoted by reference numeral 106 is processed into the wavefront 100 to be analyzed to obtain a converted wavefront. A preferred transform is a Fourier transform. The resulting converted wavefront is denoted here by reference numeral 108.

  A plurality of different phase changes indicated by optical path delays 110, 112 and 114 are applied to the converted wavefront 108, preferably a spatial phase change, and a converted wavefront which is provided with a plurality of different phase changes indicated by reference numerals 120, 122 and 124, respectively. To be acquired. It can be seen that the difference between the individual converted wavefronts that gave the different phase changes shown is due to the fact that some of the converted wavefronts are variously delayed with respect to the other parts. The difference in phase change that is processed to the converted wavefront is illustrated by the change in thickness of the optical path delays 110, 112, and 114 in FIG. 1A.

  As can be seen from FIG. 1A, the second subordinate function indicated by the symbol B is realized by transforming, preferably Fourier transforming, the transformed wavefront given the plurality of phase changes. Alternatively, the lower function B can be realized without using the Fourier transform by propagating the converted wavefront with different phase changes over the expanded space. Finally, function B requires detection of the intensity characteristics of the converted wavefront that has undergone a plurality of different phase changes. Such detection is output as an intensity map, examples of which are indicated by reference numerals 130, 132 and 134.

As shown in FIG. 1A, the third subordinate function indicated by the symbol C is realized by the following functions.
A function of representing a plurality of intensity maps, such as maps 130, 132, and 134, as a mathematical function of at least one of the phase and amplitude of the wavefront to be analyzed and the plurality of different phase changes, such as using the computer 136; And at least one or possibly both of the phases are unknown, and the plurality of different phase changes, typically indicated by optical path delays 110, 112 and 114 to the converted wavefront 108, are known, and a computer 136, etc. The function of acquiring at least one of the amplitude and phase of the wavefront to be analyzed or, if possible, the display using the at least one mathematical function, the phase function denoted by reference numeral 138 and the reference numeral 139 The displayed amplitude functions are the phase characteristic 102 and amplitude characteristic of the wavefront 100, respectively. The property 103 is shown. In this example, the wavefront 100 indicates information contained in the compact disc or DVD 104.

  In a preferred embodiment of the present invention, the plurality of intensity maps are composed of at least four intensity maps. In this case, the function of acquiring at least the phase of the wavefront to be analyzed using the plurality of intensity maps uses at least the phase of the wavefront to be analyzed using a plurality of combinations each of at least three intensity maps of the plurality of intensity maps. A function that gives an indication about is included.

  It is preferable that the method system further includes a function of giving an emphasis display on at least the phase of the wavefront to be analyzed using a plurality of displays regarding at least the phase of the wavefront to be analyzed.

  In a preferred embodiment of the present invention, the plurality of intensity maps are composed of at least four intensity maps. In this case, the function of obtaining an output for displaying at least the amplitude of the wavefront to be analyzed using the plurality of intensity maps uses a plurality of combinations of at least three of the plurality of intensity maps, respectively. A function of giving a plurality of displays at least in amplitude is included.

  It is preferable that the method system further includes a function of giving an emphasis display on at least the amplitude of the wavefront to be analyzed using a plurality of displays regarding at least the amplitude of the wavefront to be analyzed.

  In this method, it is recognized that both the amplitude and phase highlights of the wavefront to be analyzed can be acquired.

  In a preferred embodiment of the present invention, at least some of the plurality of displays relating to the amplitude and phase are at least a second class display about the amplitude and phase of the wavefront to be analyzed.

  In a preferred embodiment of the present invention, an analysis output is provided that displays amplitude and phase using the plurality of intensity maps.

  It is preferable that the phase-change converted wavefront is acquired by interference of a wavefront to be analyzed along a common optical path.

  In a preferred embodiment of the invention, the converted wavefront subjected to the plurality of different phase changes is realized in a substantially different manner than performing a delta function phase change on the converted wavefront, whereby the delta function phase change is achieved. Gives a homogeneous phase for a small spatial region with the delta function characteristics of the converted wavefront.

  In another preferred embodiment of the present invention, the plurality of intensity maps are used to display the phase of the wavefront to be analyzed that is substantially free of halos and shading-off distortion, which is a feature of many existing phase contrast methods. Output is obtained.

  In another embodiment of the present invention, it is possible to process the output indicating the phase of the wavefront to be analyzed to obtain the wavefront to be analyzed in the polarization state.

  In still another embodiment of the present invention, the plurality of intensity maps are used, the plurality of intensity maps are merged with a second plurality of merged intensity maps that are less than the first plurality of intensity maps, and the second An output that displays at least the phase of the wavefront to be analyzed from each of the plurality of merged intensity maps, and an output that displays the phase of the wavefront to be analyzed by merging the outputs and obtaining an emphasis on the phase of the wavefront to be analyzed. It is possible to obtain.

  In still another embodiment of the present invention, the plurality of intensity maps are used, and the plurality of intensity maps are merged into a second plurality of merged intensity maps that are fewer than the first plurality of intensity maps. Obtaining an output indicating at least the amplitude of the wavefront to be analyzed from each of the plurality of merged intensity maps, and combining the outputs to provide an emphasis on the amplitude of the wavefront to be analyzed. Can be obtained.

  Furthermore, in a preferred embodiment of the present invention, a plurality of different intensity maps of the converted wavefronts having the plurality of phase changes obtained by obtaining the plurality of different phase changes corresponding to the wavefront to be analyzed by the above-described method system are obtained. And at least a second class display for the phase of the wavefront to be analyzed using the intensity map.

  In addition, or in place of the above, in a preferred embodiment of the present invention, the above-described method system obtains a converted wavefront having a plurality of different phase changes corresponding to a wavefront to be analyzed, and converts the plurality of phase changes. A plurality of intensity maps of the wavefront can be acquired and used to acquire a second class display for at least the amplitude of the wavefront to be analyzed using the plurality of intensity maps.

  In still another embodiment of the present invention, the function of acquiring the converted wavefronts with the plurality of different phase changes includes converting the wavefront to be analyzed to acquire the converted wavefront, and then transferring the converted wavefront to the converted wavefront. Includes different phase and amplitude changes, i.e., each change is either a phase change, an amplitude change or a combination of a phase change and an amplitude change to obtain a converted wavefront with multiple different phase and amplitude changes It is.

  In still another embodiment of the present invention, the wavefront to be analyzed is composed of at least two wavelength components. In such a case, the function of acquiring a plurality of intensity maps includes acquiring at least two wavelength components of the converted wavefront whose phase has been changed, and separate each of the at least two wavelength components of the converted wavefront having its phase changed. In order to obtain at least two sets of intensity maps corresponding to one, the function of separating the phase-converted converted wavefronts corresponding to the at least two wavelength components is included.

  Subsequently, using the plurality of intensity maps, an output for displaying the phase of the wavefront to be analyzed is obtained from each of the at least two sets of intensity maps, and the phase of the wavefront to be analyzed is highlighted by merging the outputs. To give an output indicating the amplitude and phase of the wavefront to be analyzed. During the highlighting, once the phase value exceeds 2π, there is no 2π ambiguity that occurred in the past when detecting the phase of a single wavelength wavefront.

  It is recognized that the wavefront to be analyzed may be an acoustic radiation wavefront.

  It is also recognized that the wavefront to be analyzed may be an electromagnetic wave radiation wavefront having a suitable wavelength such as visible light, infrared light, ultraviolet light, X-ray radiation or the like.

  Furthermore, the wavefront 100 can be represented by a relatively small number of point sources and limited by a relatively small spatial area. In such a case, the intensity characteristics of the converted wavefront with the plurality of different phase changes can be detected by a detector composed of a single detection pixel or only a few detection pixels. Further, an output that displays at least one of the phase and amplitude of the wavefront to be analyzed, or if possible, can be provided by the computer 136 in a simple manner.

  Reference is now made to FIG. 1B, which is a partially schematic and partially block schematic illustration of a wavefront analysis system suitable for performing the functions shown in FIG. 1A according to a preferred embodiment of the present invention. As shown in FIG. 1B, the wavefront, indicated here as 150, is focused by a lens 152 onto a phase manipulator 154 that is preferably located in the focal plane of the lens 152. This phase manipulator 154 causes a phase change, which may be, for example, a spatial light modulator or a series of different transparent spatially inhomogeneous objects.

  The second lens 156 is disposed on a detector 158 such as a CCD detector so as to form an image of the wavefront 150. The second lens 156 is preferably arranged so that the detector 158 is located in the focal plane of the lens. The output of detector 158 is preferably supplied to data storage processing circuitry 160 that performs function C described above with reference to FIG. 1A.

  Reference is now made to FIG. 2, which is a simplified functional block diagram illustrating the function of FIG. 1A that applies a time-varying phase change to the converted wavefront. As shown in FIG. 2 and as described above with reference to FIG. 1A, the wavefront 200 is preferably transformed to provide a transformed wavefront 208.

  A first phase change, preferably a spatial phase change, is applied to the converted wavefront 208 at a first time T1, indicated by reference numeral 210, to generate a converted wavefront 212 whose phase has changed at time T1. The phase-changed converted wavefront 212 is detected by the detector 158 (FIG. 1B) to generate an intensity map denoted by reference numeral 214 as an example, and this map is stored by the circuit configuration 160 (FIG. 1B).

  A second phase change, preferably a spatial phase change, is then applied to the converted wavefront 208 at a second time T2, indicated at 220, to produce a converted wavefront 222 that has undergone a phase change at time T2. The phase-changed converted wavefront 222 is detected by the detector 158 (FIG. 1B) to generate an intensity map denoted by reference numeral 224 as an example, and this map is stored by the circuit configuration 160 (FIG. 1B).

  A third phase change, preferably a spatial phase change, is then applied to the converted wavefront 208 at a third time T3, indicated at 220, to produce a converted wavefront 232 that has undergone a phase change at time T3. The phase-changed converted wavefront 232 is detected by the detector 158 (FIG. 1B) to generate an intensity map indicated by reference numeral 234 as an example, and this map is stored by the circuit configuration 160 (FIG. 1B).

  In the present invention, any suitable number of spatial phase changes can be continuously performed and stored and used.

  In a preferred embodiment of the present invention, at least some of the phase changes 210, 220, and 230 are spatial phase changes caused by applying a spatial phase change to a portion of the converted wavefront 208.

  In another preferred embodiment of the present invention, at least some of the phase changes 210, 220, and 230 are spatial phase changes caused by applying a time-varying spatial phase change to a portion of the converted wavefront 208.

  In another preferred embodiment of the present invention, at least some of the phase changes 210, 220, and 230 are caused by applying a time-varying spatial phase change to a portion of the converted wavefront 208, resulting in a spatially phase-changed converted wavefront. Spatial phase changes that generate 212, 222, and 232 and then generate spatially varying intensity maps 214, 224, and 234, respectively.

  Reference is now made to FIG. 3, which is a simplified functional block diagram illustrating the function of FIG. 1A in which a time-varying phase change is applied to the wavefront prior to wavefront conversion. As shown in FIG. 3, a first phase change, preferably a spatial phase change, is applied to the converted wavefront 300 at a first time T <b> 1 indicated by reference numeral 310. After the processing of the first phase change to the wavefront 300, conversion to this wavefront, preferably Fourier transform processing, is performed to generate a converted wavefront 312 whose phase has changed at time T1. The phase-change converted wavefront 312 is detected by the detector 158 (FIG. 1B) to generate an intensity map denoted by reference numeral 314 as an example, and this map is stored by the circuit configuration 160 (FIG. 1B).

  A second phase change, preferably a spatial phase change, is then applied to the wavefront 300 at a second time T2, indicated at 320. After the second phase change is processed on the wavefront 300, the wavefront is converted, preferably Fourier-transformed, to generate a converted wavefront 322 whose phase has changed at time T2. The phase-changed converted wavefront 322 is detected by the detector 158 (FIG. 1B) to generate an intensity map denoted by reference numeral 324 as an example, and this map is stored by the circuit configuration 160 (FIG. 1B).

  A third phase change, preferably a spatial phase change, is then applied to the wavefront 300 at a third time T3, indicated by reference numeral 330. After the third phase change is processed on the wavefront 300, the wavefront is converted, preferably Fourier-transformed, to generate a converted wavefront 332 whose phase has changed at time T3. The phase-changed converted wavefront 332 is detected by the detector 158 (FIG. 1B) to generate an intensity map denoted by reference numeral 334 as an example, and this map is stored by the circuit configuration 160 (FIG. 1B).

  In the present invention, any suitable number of spatial phase changes can be continuously performed and stored and used.

  In a preferred embodiment of the present invention, at least some of the phase changes 310, 320, and 330 are spatial phase changes caused by applying a spatial phase change to a portion of the converted wavefront 300.

  In another preferred embodiment of the present invention, at least some of the phase changes 310, 320, and 330 are spatial phase changes caused by applying a time-varying spatial phase change to a portion of the converted wavefront 300.

  In another preferred embodiment of the present invention, at least some of the phase changes 310, 320, and 330 are caused by applying a time-varying spatial phase change to a portion of the converted wavefront 300, resulting in a spatially phase-changed converted wavefront. Spatial phase changes that generate 312, 322, and 332 and then generate spatially varying intensity maps 314, 324, and 334, respectively.

  Reference is now made to FIG. 4, which is a simplified functional block diagram illustrating the function of FIG. 2 when a time-varying non-spatially varying spatial phase change is applied to the converted wavefront. As shown in FIG. 4 and as described above with reference to FIG. 1A, the wavefront 400 is transformed to provide a transformed wavefront 408. A preferred transformation method is Fourier transformation.

  The first phase change is processed for the converted wavefront 408 at a first time T1 indicated by reference numeral 410. This phase change is preferably accomplished by processing a spatially uniform spatial phase delay D represented by D = D 1 into a constant spatial region of the converted wavefront 408. Therefore, the phase delay value at time T1 in the constant space region of the converted wavefront is D1, while no phase delay is given in other regions of the converted wavefront, and thus the phase delay value is D = 0.

  As a result of the processing, the first spatial phase change 410 generates a converted wavefront 412 whose phase is spatially changed at time T1. The spatially phase-converted converted wavefront 412 is detected by the detector 158 (FIG. 1B) to generate a spatially varying intensity map denoted by reference numeral 414 as an example, and this map is used as the circuit configuration 160 (FIG. 1B). Save by.

  Next, the second spatial phase change is processed to the converted wavefront 408 at the second time T2 indicated by reference numeral 420. This phase change is preferably accomplished by processing a spatially uniform spatial phase delay D represented by D = D2 into a certain spatial region of the converted wavefront 408. Thus, in the constant space region of the converted wavefront, the phase delay value at time T2 is D2, while no phase delay is processed in the other regions of the converted wavefront, and the phase delay value is D = 0. .

  Through the above processing, the second spatial phase change 420 generates a converted wavefront 422 whose phase is spatially changed at time T2. The spatially phase-converted converted wavefront 422 is detected by the detector 158 (FIG. 1B) to generate a spatially varying intensity map denoted by reference numeral 424 as an example, and this map is used as the circuit configuration 160 (FIG. 1B). Save by.

  Next, a third spatial phase change process is performed on the converted wavefront 408 at a third time T3 indicated by reference numeral 430. This phase change is preferably accomplished by processing a spatially uniform spatial phase delay D represented by D = D3 into a certain spatial region of the converted wavefront 408. Thus, in the constant space region of the converted wavefront, the phase delay value at time T3 is D3, while no phase delay is processed in the other regions of the converted wavefront, and the phase delay value is D = 0. .

  Through the above processing, the third spatial phase change 403 generates a converted wavefront 432 having a spatial phase change at time T3. The spatially phase-converted converted wavefront 432 is detected by the detector 158 (FIG. 1B) to generate a spatially varying intensity map denoted by reference numeral 434 as an example, and this map is used as the circuit configuration 160 (FIG. 1B). Save by.

  In the present invention, any suitable number of spatial phase changes can be continuously performed and stored and used.

  In the preferred embodiment of the present invention, the processed transform to wavefront 400 is a Fourier transform, which provides a Fourier transform wavefront 408. Furthermore, the plurality of phase-changed converted wavefronts 412, 422 and 432 can be further transformed, preferably by Fourier transformation, prior to detection.

  According to a preferred embodiment of the present invention, the spatial region of the transformed wavefront 408 in which spatially uniform spatial phase delays D1, D2 and D3 are processed at times T1, T2 and T3, respectively, is the spatial domain of the transformed wavefront 408. This is the central area.

  According to an embodiment of the present invention, the wavefront is converted to a phase component composed of relatively high frequency components in order to increase the high frequency components of the converted wavefront 408 before processing the spatially uniform spatial phase delay into the spatial domain. It is possible to add to the wavefront 400 before doing so.

  Further in accordance with a preferred embodiment of the present invention, the spatial domain of transformed wavefront 408 in which the spatially uniform spatial phase delays D1, D2, and D3 are processed at times T1, T2, and T3, respectively, is the space of transformed wavefront 408. The central region, the transform processed to the wavefront 400 is a Fourier transform, and the plurality of phase-shifted transformed wavefronts 412, 422 and 432 are Fourier transformed before their detection.

  According to another embodiment of the invention, the region of the transformed wavefront 408 in which the spatially homogeneous spatial phase delays D1, D2, and D3 are processed at times T1, T2, and T3, respectively, is a space of the transformed wavefront 408. It is a generally circular region at the center.

  According to yet another embodiment of the present invention, the region of the transformed wavefront 408 in which the spatially homogeneous spatial phase delays D1, D2, and D3 are processed at times T1, T2, and T3, respectively, is the transformed wavefront 408. Is an area that covers approximately half of the entire limited area.

  Further, according to a preferred embodiment of the present invention, the converted wavefront 408 includes a non-spatial modulation area and a non-DC area called a DC area for displaying an image of a light source that generates the wavefront 400. The region of the transformed wavefront 408 where the spatially uniform spatial phase delays D1, D2, and D3 are processed at times T1, T2, and T3, respectively, includes at least a portion of both the DC region and the non-DC region. It is.

  Reference is now made to FIG. 5, which is a simplified functional block diagram for illustrating the function of FIG. 3 in which a spatial phase change that varies non-spatially with time variation is processed into the wavefront before the wavefront conversion.

  As shown in FIG. 5, the first spatial phase change is processed for the wavefront 500 at a first time T <b> 1 indicated by reference numeral 510. This phase change is preferably carried out by processing a spatially homogeneous spatial phase delay D indicated by the description D = D 1 into a certain spatial region of the wavefront 500. Therefore, the phase delay value at time T1 in the spatial region of the wavefront is D1, while there is no phase delay processing in the other regions of the wavefront and the phase delay value is D = 0.

  Subsequent to the processing of the first spatial phase change on the wavefront 500, a transformation, preferably a Fourier transform, is performed on the wavefront to produce a transformed wavefront 512 that is spatially phase changed at time T1. The spatially phase-converted converted wavefront 512 is detected by a detector 158 (FIG. 1B) to generate a spatially varying intensity map denoted by reference numeral 514 as an example, and this map is used as a circuit configuration 160 (FIG. 1B). Save by.

  Next, the second spatial phase change process is performed on the wavefront 500 at time T <b> 2 indicated by reference numeral 520. This phase change is preferably accomplished by processing the spatially uniform spatial phase delay D shown by the description D = D2 into a certain spatial region of the wavefront 500. Thus, the phase delay value at time T2 in the constant space region of the wavefront is D2, while there is no phase delay processing in the other regions of the wavefront, so the phase delay value is D = 0.

  Subsequent to the processing of the second spatial phase change for wavefront 500, a transform, preferably a Fourier transform, is performed on the wavefront to produce a transformed wavefront 522 that is spatially phase-changed at time T2. The spatially phase-converted converted wavefront 522 is detected by the detector 158 (FIG. 1B) to generate a spatially varying intensity map denoted by reference numeral 524 as an example, and this map is used as the circuit configuration 160 (FIG. 1B). Save by.

  Next, a third spatial phase change process is performed on the wavefront 500 at a third time T3 indicated by reference numeral 530. This phase change is preferably accomplished by processing the spatially uniform spatial phase delay D shown by the description D = D3 into a certain spatial region of the wavefront 500. Thus, the phase delay value at time T3 in the constant space region of the wavefront is D3, while in the other regions of the wavefront there is no phase delay processing and therefore the phase delay value is D = 0.

  Following the processing of the third spatial phase change for wavefront 500, a transform, preferably a Fourier transform, is performed on the wavefront to produce a transformed wavefront 532 that is spatially phase-changed at time T3. The spatially phase-converted converted wavefront 532 is detected by the detector 158 (FIG. 1B) to generate a spatially varying intensity map denoted by reference numeral 534 as an example, and this map is represented by the circuit configuration 160 (FIG. 1B). Save by.

  In the present invention, any suitable number of spatial phase changes can be continuously performed and stored and used.

  According to a preferred embodiment of the present invention, the spatial region of the wavefront 500 where the spatially homogeneous spatial phase delays D1, D2 and D3 are processed at times T1, T2 and T3, respectively, is spatially centered on the wavefront 500. It is a certain area.

  According to the embodiment of the present invention, in order to increase the high-frequency component of the wavefront 500, a phase component composed of a relatively high-frequency component can be added to the wavefront 500 before performing the spatial phase change processing of the wavefront 500.

  Further in accordance with a preferred embodiment of the present invention, the spatial region of the wavefront 500 where the spatially uniform spatial phase delays D1, D2, and D3 are processed at times T1, T2, and T3, respectively, The central region, the transform is a Fourier transform, and the plurality of phase-changed wavefronts 512, 522 and 532 are Fourier transformed before their detection.

  According to another embodiment of the present invention, the region of the wavefront 500 where the spatially homogeneous spatial phase delays D1, D2 and D3 are processed at times T1, T2 and T3, respectively, It is a generally circular area at the center.

  According to yet another embodiment of the present invention, the region of the wavefront 500 where the spatially homogeneous spatial phase delays D1, D2 and D3 are processed at times T1, T2 and T3, respectively, is defined by the wavefront 500. This is an area that covers approximately half of the entire area.

  Further, according to a preferred embodiment of the present invention, the wavefront 500 includes a non-spatial modulation region and a non-DC region, which are referred to as a DC region for displaying an image of a light source that generates the wavefront 500. The region of the wavefront 500 where the spatially uniform spatial phase delays D1, D2, and D3 are processed at times T1, T2, and T3, respectively, includes at least a portion of both the DC region and the non-DC region. ing.

  Reference is now made to FIG. 6, which is a simplified functional block diagram illustrating the function of FIG. 1A processing phase changes to a plurality of different wavelength components of the converted wavefront. As shown in FIG. 6, a wavefront 600 composed of a plurality of different wavelength components is preferably converted to obtain a converted wavefront 602. This transformation is preferably a Fourier transformation.

  Similar to the wavefront 600, the converted wavefront 602 includes a plurality of different wavelength components indicated by reference numerals 604, 606 and 608. It will be appreciated that both wavefront 600 and converted wavefront 602 may include any suitable number of wavelength components.

  A plurality of phase changes, indicated by reference numerals 610, 612 and 614, preferably spatial phase changes, are processed into the respective wavelength components 604, 606 and 608 of the converted wavefront and a plurality of different phase changes indicated by reference numerals 620, 622 and 624, respectively. The converted wavefront component is given.

  The phase-changed transformed wavefront components 620, 622, and 624 are preferably transformed by a Fourier transform and then detected by a detector 158 (FIG. 1B) and vary spatially as indicated by reference numerals 630, 632, and 634, respectively. Generate an intensity map. These intensity maps are then stored by circuitry 160 (FIG. 1B).

  According to embodiments of the present invention, phase changes 610, 612, and 614 pass converted wavefront 602 through an object having at least its thickness and refractive index varying spatially to introduce different spatial phase delays to wavelength component 604 of the converted wavefront. , 606 and 608, respectively.

  According to another embodiment of the present invention, phase changes 610, 612, and 614 reflect the converted wavefront 602 from a spatially varying surface, resulting in different spatial phase delays to the converted wavefront wavelength components 604, 606, and 608, respectively. It is accomplished by processing.

  According to another embodiment of the present invention, the phase changes 610, 612, and 614 cause the converted wavefront 602 to pass through a plurality of objects having characteristics that spatially vary at least one of its thickness and refractive index. It is realized by. The spatial variation in the thickness or refractive index of a plurality of objects is such that the phase changes 610, 612, and 614 are different to a predetermined degree selected for at least some of the plurality of different wavelength components 604, 606, and 608. Selected.

  Alternatively, the spatial change in thickness or refractive index of the plurality of objects is selected such that phase changes 610, 612 and 614 are the same as at least some of the plurality of different wavelength components 604, 606 and 608.

  Alternatively, in an embodiment of the present invention, the phase changes 610, 612 and 614 are time-varying spatial phase changes. In such a case, the plurality of phase-changed converted wavefront components 620, 622, and 624 include a plurality of different phase-changed converted wavefronts for each of the wavelength components, and the intensity maps 630, 632, and 634 include Includes a time-varying intensity map for each wavelength component.

  In an embodiment of the invention called “white light”, all wavelength components can be detected with a single detector, producing a time-varying intensity map that displays several wavelength components.

  According to another embodiment of the present invention, the plurality of phase-changed converted wavefront components 620, 622, and 624 are, for example, by spatial separation performed by passing the phase-changed converted wavefront components through a dispersive element. Etc. to be decomposed into separate wavelength components. In such a case, intensity maps 630, 632, and 634 are provided simultaneously for all of the plurality of different wavelength components.

  Reference is now made to FIG. 7 which is a simplified functional block diagram for explaining the function of FIG. 1A in which the phase change is processed into a plurality of different wavelength components of the wavefront prior to wavefront conversion. As shown in FIG. 7, the wavefront 700 comprises a plurality of different wavelength components 704, 706 and 708. It will be appreciated that this wavefront may contain any suitable number of wavelength components.

  A plurality of phase changes, preferably spatial phase changes, indicated by reference numerals 710, 712 and 714 are processed into respective wavelength components 704, 706 and 708 of the wavefront.

  Subsequent to the processing of the spatial phase change for the wavefront components 704, 706 and 708, a transformation, preferably a Fourier transformation process, is performed on the wavefront component to perform a plurality of different phase change rows indicated at 720, 722 and 724, respectively. Gives the transformed wavefront component.

  These phase-change processed converted wavefront components 720, 722, and 724 are then detected using a detector 158 (FIG. 1B), and the examples vary spatially as shown at 730, 732, and 734. Generate an intensity map. These intensity maps are then stored by circuit configuration 160 (FIG. 1B).

  In accordance with an embodiment of the present invention, the phase changes 710, 712 and 714 cause the wavefront wavelength components 704, 706 and 708 to pass through the wavefront 700 through objects whose thickness and refractive index vary spatially. This is accomplished by performing different spatial phase change processing on each of these.

  In accordance with another embodiment of the present invention, phase changes 710, 712 and 714 reflect wavefront 700 from a spatially varying surface and a different spatial phase delay process to each of wavelength components 704, 706 and 708 of the wavefront. It is accomplished by doing.

  According to yet another embodiment of the invention, the phase changes 710, 712, and 714 cause the wavefront 700 to pass through a plurality of objects having characteristics that spatially vary at least one of its thickness and refractive index. It is realized by. The spatial changes in the thickness or refractive index of these objects are selected such that the phase changes 710, 712, and 714 differ from at least some of the plurality of different wavelength components 704, 706, and 708 to a selected predetermined range. .

  Alternatively, the spatial changes in the thickness or refractive index of these objects are selected such that the phase changes 710, 712, and 714 are the same as at least some of the plurality of different wavelength components 704, 706, and 708.

  Reference is now made to FIG. 8, which is a simplified functional block diagram for explaining the function of FIG. 1A in which phase change processing is performed on a plurality of different polarization components of the converted wavefront. As shown in FIG. 8, a wavefront 800 composed of a plurality of different polarization components is preferably converted and obtained as a converted wavefront 802. This transformation is preferably a Fourier transformation. Similar to wavefront 800, converted wavefront 802 includes a plurality of different polarization components indicated by reference numerals 804 and 806. These polarization components 804 and 806 can be either spatially different or spatially identical, but are recognized as being different from each other with respect to polarization. Also, both wavefront 800 and converted wavefront 802 preferably each include two polarization components, but it will be appreciated that any suitable number of polarization components may be included.

  A plurality of phase changes indicated by reference numerals 810 and 812, preferably a spatial phase change process, is performed on each polarization component 804 and 806 of the converted wavefront 802 to give a plurality of different phase changes indicated by reference numerals 820 and 822, respectively. The converted wavefront component is given.

  It will be appreciated that phase changes 810 and 812 may differ from at least some of the plurality of different polarization components 804 and 806. Alternatively, the phase changes 810 and 812 may be the same as at least some of the plurality of different polarization components 804 and 806.

  These converted wavefront components 820 and 822 that have undergone the phase change processing are detected using a detector 158 (FIG. 1B), and an intensity map that changes spatially as shown by reference numerals 830 and 832 is generated. These intensity maps are then stored by circuit configuration 160 (FIG. 1B).

  Reference is now made to FIG. 9 which is a simplified functional block diagram for explaining the function of FIG. 1A in which the phase change processing is performed on a plurality of different polarization components of the wavefront before the wavefront conversion. As shown in FIG. 9, the wavefront 900 is composed of a plurality of different polarization components 904 and 906. The wavefront preferably includes two polarization components, but it will be appreciated that any suitable number of polarization components may be included.

  A plurality of phase changes, preferably spatial phase changes, indicated by reference numerals 910 and 912 are processed into respective polarization components 904 and 906 of the wavefront.

  It will be appreciated that phase changes 910 and 912 may differ from at least some of the plurality of different polarization components 904 and 906. Alternatively, phase changes 910 and 912 may be the same as at least some of the plurality of different polarization components 904 and 906.

  Subsequent to the processing of the spatial phase change for wavefront components 904 and 906, a transformation, preferably a Fourier transformation process is performed on the wavefront component to produce a plurality of different phase changes, indicated by reference numerals 920 and 922, respectively. Give ingredients.

  The transformed wavefront components 920 and 922 that have undergone phase change processing are then detected using detector 158 (FIG. 1B) to generate spatially varying intensity maps, as shown by reference numerals 930 and 932, for example. . These intensity maps are then stored by circuit configuration 160 (FIG. 1B).

  Reference is now made to FIG. 10A, which is a simplified functional block diagram for explaining the function of FIG. 1A in which the wavefront to be analyzed is composed of at least one one-dimensional component. In the embodiment of FIG. 10A, a one-dimensional Fourier transform process is performed on the wavefront. This conversion is preferably performed in a dimension orthogonal to the propagation direction of the analysis target wavefront, so that at least a one-dimensional component of the analysis target wavefront 1 is acquired in the dimension orthogonal to the propagation direction.

  A plurality of different phase change processes are performed on each of the at least one one-dimensional component to obtain at least one one-dimensional component of the plurality of phase-changed converted wavefronts.

  A plurality of intensity maps are used to obtain an output indicating the amplitude and phase of at least one one-dimensional component of the wavefront to be analyzed.

  As shown in FIG. 10A, a plurality of different phase changes are processed into at least one one-dimensional component of the converted wavefront. In the illustrated embodiment, typically five one-dimensional components are shown and are designated by reference numerals 1001, 1002, 1003, 1004 and 1005. The wavefront is preferably transformed by a Fourier transform. By the conversion of the wavefront, the five one-dimensional components 1001, 1002, 1003, 1004, and 1005 are converted into five corresponding one-dimensional components of the converted wavefronts denoted by reference numerals 1006, 1007, 1008, 1009, and 1010, respectively. .

  Each of the three phase changes indicated by reference numerals 1011, 1012, and 1013 is processed into one-dimensional components 1006, 1007, 1008, 1009, and 1010 of the converted wavefront and is generalized by reference numerals 1016, 1018, and 1010. Generate a transformed wavefront.

  In the illustrated embodiment, the phase-changed converted wavefront 1016 includes five one-dimensional components, indicated by reference numerals 1021, 1022, 1023, 1024, and 1025, respectively.

  In the illustrated embodiment, the phase-changed converted wavefront 1018 includes five one-dimensional components, indicated by reference numerals 1031, 1032, 1033, 1034, and 1035, respectively.

  In the illustrated embodiment, the phase-changed converted wavefront 1020 includes five one-dimensional components, denoted as 1041, 1042, 1043, 1044, and 1045, respectively.

  The phase-shifted converted wavefronts 1016, 1018 and 1020 are detected by detector 158 (FIG. 1B) and generate three intensity maps, generalized by reference numerals 1046, 1048 and 1050.

  In the illustrated embodiment, the intensity map 1046 includes five one-dimensional intensity map components denoted by reference numerals 1051, 1052, 1053, 1054, and 1055, respectively.

  In the illustrated embodiment, the intensity map 1048 includes five one-dimensional intensity map components, denoted 1061, 1062, 1063, 1064 and 1065, respectively.

  In the illustrated embodiment, the intensity map 1050 includes five one-dimensional intensity map components denoted by reference numerals 1071, 1072, 1073, 1074, and 1075, respectively.

  The intensity maps 1046, 1048 and 1050 are stored by the circuit configuration 160 (FIG. 1B).

  According to the embodiment of the present invention, the wavefront to be analyzed indicated by the one-dimensional components 1001, 1002, 1003, 1004, and 1005 in FIG. 10A is composed of a plurality of different wavelength components, and the plurality of different phase changes 1011, 1012, and 1013. Are processed into a plurality of different wavelength components for each of the plurality of one-dimensional components of the wavefront to be analyzed. Obtaining the plurality of intensity maps 1046, 1048 and 1050 includes separating the plurality of one-dimensional components of the plurality of phase-changed converted wavefronts 1016, 1018 and 1020 into separate wavelength components.

  Separating a plurality of one-dimensional components of the plurality of phase-changed converted wavefronts into separate wavelength components is accomplished by passing the plurality of phase-changed converted wavefronts 1016, 1018, and 1020 through a dispersive element. The

  Reference is now made to FIG. 10B, which is a partially schematic and partially pictorial illustration illustrating a wavefront analysis system suitable for performing the functions of FIG. 10A according to a preferred embodiment of the present invention.

  As shown in FIG. 10B, the wavefront denoted here by 1080 and including the five one-dimensional components 1081, 1082, 1083, 1084 and 1085 is preferably a short axis transposable phase located in the focal plane of the lens 1086. It is focused by a cylindrical lens 1086 on the manipulator 1087. The lens 1086 performs a one-dimensional Fourier transform of each of the one-dimensional wavefront components 1081, 1082, 1083, 1084, and 1085 along the Y axis.

  As shown in FIG. 10B, the phase manipulator 1087 is orthogonal to the propagation direction of the wavefront along the Z-axis and is orthogonal to the axis of transformation performed by the lens 1086, here labeled Y-axis. Spatially including typically five different phase delay regions arranged to provide a phase delay to one of the one-dimensional components of a portion of the object along an axis designated herein as the X axis. Preferably, it comprises a plurality of local phase delay elements such as non-homogeneous transparent objects.

  A second lens 1088, preferably a cylindrical lens, is arranged to image the one-dimensional components 1081, 1082, 1083, 1084 and 1085 on a detector 1089 such as a CCD detector. The second lens 1088 is preferably arranged so that the detector 1089 is within its focal plane. The output of detector 1089 is preferably supplied to a data storage processing circuitry 1090 that performs function C described above with reference to FIG. 1A.

  Relative motion along the X-axis is provided between the optical system composed of the phase manipulator 1087, the lenses 1086 and 1088, the detector 1089, and the one-dimensional wavefront components 1081, 1082, 1083, 1084 and 1085. This relative movement is a movement that aligns substantially different phase delay regions such that different wavefront components and preferably each wavefront component passes through each phase delay region of the phase manipulator 1087.

  A feature in the embodiment of FIGS. 10A and 10B is that each one-dimensional component of the wavefront is processed separately. Thus, referring to the configuration of FIG. 10B, the five one-dimensional wavefront components 1081, 1082, 1083, 1084 and 1085 are each focused by a corresponding separate portion of the cylindrical lens 1086, and the corresponding separate portion of the cylindrical lens 1088. Respectively, and each wavefront component passes through a separate region of the phase manipulator 1087. Accordingly, the images of the five one-dimensional wavefront components 1081, 1082, 1083, 1084, and 1085 at the detector 1089 will appear as separate clear images denoted by reference numerals 1091, 1092, 1093, 1094, and 1095, respectively. It will be appreciated that these images will appear on separate detectors that simultaneously comprise detector 1089, rather than a monolithic detector.

  According to an embodiment of the invention, the transform processed to the wavefront includes an additional Fourier transform. This additional Fourier transform can be performed using the lens 1086 or an additional lens, and minimizes crosstalk between one-dimensional components having different wavefronts. In such a case, it is preferable that the converted wavefront whose phase has been changed is further converted. This further conversion process can be performed by the lens 1088 or an additional lens.

  Reference is now made to FIG. 11, which is a simplified functional block diagram for explaining the function of FIG. 1A for performing additional conversion following the processing of the spatial phase change. As shown in FIG. 11 and as described above with reference to FIG. 1A, the wavefront 1100 is preferably Fourier transformed, and a plurality of phase changes are processed into the transformed wavefront to indicate a plurality of reference numerals 1120, 1122, and 1124, respectively. Give different converted wavefronts with different phases.

  The phase-changed transformed wavefront is then transformed, preferably by a Fourier transform, and then detected by detector 158 (FIG. 1B), producing a spatially varying intensity map, shown by reference 1130, 1132 and 1134 as examples. . These intensity maps are then stored by circuitry 160 (FIG. 1B).

  It will be appreciated that any suitable number of different phase-shifted converted wavefronts can be obtained and then converted into a corresponding plurality of intensity maps stored for use in accordance with the present invention.

  Reference is now made to FIG. 12, which is a simplified functional block diagram for explaining the function of FIG. 1A in which an intensity map is used to provide information about the wavefront to be analyzed, such as display of wavefront amplitude and phase. As shown in FIG. 12, and as described above with reference to FIG. 1A, the wavefront 1200 is preferably transformed by a Fourier transform and phase-shifted by a phase-changing function to indicate the numbers indicated by reference numerals 1210, 1212 and 1214, respectively. Individual, preferably at least three different phase changes are obtained. The phase-changed converted wavefronts 1210, 1212 and 1214 are then detected by a detector 158 (FIG. 1B) to produce a spatially varying intensity map, indicated by reference numerals 1220, 1222 and 1224 as examples.

  A converted wavefront in which the intensity map scheduled in parallel with the generation of the plurality of intensity maps, such as intensity maps 1220, 1222, and 1224, has undergone different phase changes indicated by the amplitude of the wavefront 1200, the phase of the wavefront 1200, and 1230 Expressed as a first function of the phase change function characterizing 1210, 1212 and 1214.

  According to a preferred embodiment of the present invention, at least one of the phase and amplitude of the wavefront is unknown, or both the phase and amplitude are unknown. The phase change function is known.

  The wavefront phase and amplitude and the first function of the phase change function are then solved by computer 136 (FIG. 1A) as shown at 1235 and as a second function of intensity maps 1220, 1222 and 1224 shown at 1240. It is displayed for at least one of the wavefront amplitude and phase, if possible.

  Next, the second function is processed using the intensity maps 1220, 1222 and 1224 at the portion indicated by reference numeral 1242. As part of this process, the detected intensity maps 1220, 1222 and 1224 are substituted as a second function. This process can be performed using the computer 136 (FIG. 1A) and provides information about the wavefront 1200 such as a display of at least one or both of the wavefront amplitude and phase, if possible.

  According to still another embodiment of the present invention, the plurality of intensity maps are composed of at least four intensity maps. In such a case, the function of obtaining the display of at least one of the phase and amplitude of the wavefront 1200 using the plurality of intensity maps uses a plurality of combinations in which each combination includes at least three intensity maps of the plurality of intensity maps. A function of providing a plurality of indications regarding at least one of the phase and amplitude of the wavefront 1200 is included. The method system further includes a function of providing an emphasis display on at least one of the phase and amplitude of the wavefront 1200 using a plurality of displays relating to at least one of the phase and amplitude of the wavefront 1200.

  According to a preferred embodiment of the present invention, at least some of the plurality of displays for the amplitude and phase are at least a second class display for the amplitude and phase of the wavefront 1200.

  According to another embodiment of the present invention, the first function is solved as a function of several unknowns, and as indicated by reference numeral 1240, some unknowns, such as at least one of the amplitude and phase of the wavefront 1200, are intensified. It is possible to obtain the second function by representing it as a second function of the map.

Therefore, in the step of solving the first function,
Defining a complex function of the amplitude of the wavefront 1200, the phase of the wavefront 1200, and a phase change function characterizing the transformed wavefronts 1210, 1212 and 1214 that have undergone different phase changes (the complex function is the plurality of intensities). The intensity at each position in the map is a function governing the numerical value of the complex function at that position and the amplitude and phase of the wavefront 1200 at the same position),
Expressing the complex function as a third function of the plurality of intensity maps 1220, 1222 and 1224;
Obtaining a numerical value for an unknown such as at least one of phase and amplitude of the wavefront 1200 using a complex function represented as a function of the plurality of intensity maps;
It is included.

  In this embodiment, the complex function may be another complex function having the same amplitude and phase as the wavefront 1200 and a phase change function characterizing the transformed wavefronts 1210, 1212 and 1214 subjected to the different phase changes. A convolution of Fourier transform is preferable.

  Next, the conversion process to the wavefront to be analyzed is Fourier transform, and at least three different spatial phase changes are processed to the converted wavefront, and at least three intensity maps are used to obtain an indication of at least one of the wavefront phase and amplitude. Reference is made to FIG. 13, which is a simplified functional block diagram for explaining the functions of FIG. 1A.

  As described above with reference to FIG. 1A, the wavefront 100 to be analyzed (FIG. 1A) is transformed and phase-changed by at least three different spatial phase changes determined by the spatial function, and the reference numerals 120, 122, and 124 ( A converted wavefront subjected to at least three different phase changes shown in FIG. 1A) is obtained. These converted wavefronts are then detected by detector 158 (FIG. 1A), producing a spatially varying intensity map, shown by reference 130, 132 and 134 (FIG. 1A) as examples. As shown in FIG. 13 and as described as sub-function C described above with reference to FIG. 1A, the intensity map is used to display at least one or both of the phase and amplitude of the wavefront to be analyzed, if possible. Output is obtained.

Next, returning to FIG. 13, the wavefront to be analyzed is the first function f (x) = A (x) e ^{iφ (x)} ,
(Where x is a general representation of the spatial position). The complex function has an amplitude distribution A (x) and a phase distribution φ (x) that are the same as the amplitude and phase of the wavefront to be analyzed. The first complex function f (x) = A (x) e ^{iφ (x)}
Is denoted by reference numeral 1300.

  As described above with reference to FIG. 1A, each of the plurality of different spatial phase changes is preferably transformed by processing a spatially homogeneous spatial phase delay having a known numerical value into a constant spatial region of the transformed wavefront. Processed to wavefront. As shown in FIG. 13, the spatial function for determining these different phase changes is indicated by G, and an example for the phase delay value θ is indicated by reference numeral 1304.

  The function G is a spatial function of phase change processed at each spatial position of the converted wavefront. In the particular example indicated by reference numeral 1304, the spatially uniform spatial phase delay having a numerical value θ is represented by a converted wavefront as indicated by the central portion of the function having a numerical value θ that is greater than the numerical value of the function in other cases. Processed into a spatial center area.

A plurality of predicted intensity maps represented by the spatial functions I ₁ (x), I ₂ (x), and I ₃ (x) are expressed as functions of the first complex function f (x) and the spatial function G denoted by reference numeral 1308, respectively. Is done.

Subsequently, the second complex function S (x) having the absolute value | S (x) | and the phase α (x) is a convolution of the Fourier transform of the first complex function f (x) and the spatial function G. Limited. The second complex function denoted by reference numeral 1312 has the following formula: S (x) = f (x) * ξ (G) = | S (x) | e ^{iα (x)}
The symbol * represents convolution and ξ (G) is the Fourier transform of the function G.

  The difference between the phase φ (x) of the wavefront and the phase α (x) of the second complex function is indicated by Ψ (x) indicated by reference numeral 1316.

  Each of the predicted intensity maps is expressed as f (x) and a function of G indicated by reference numeral 1308, as an absolute value and phase limiting function of S (x) indicated by reference numeral 1312, and Ψ (x) indicated by reference numeral 1316. Each of the predicted intensity maps is represented as a wavefront amplitude A (x), a second complex function absolute value | S (x) |, and a difference between the wavefront phase and the second complex function phase Ψ ( x), and a third function of the known phase delay caused by one of the at least three different phase changes, each corresponding to one of the at least three intensity maps.

This third function is indicated by reference numeral 1320, each preferably having the general formula:
I _n (x) = | A (x) + (e ^iθn −1) | S (x) | e ^{−iΨ (x)} | ² ,
Contains three functions. Here, I _n (x) is a predicted intensity map, and n = 1, 2 or 3. Of the three functions, θ1, θ2, and θ3 are each processed into the spatial region of the converted wavefront to generate intensity maps I ₁ (x), I ₂ (x), and I ₃ (x), respectively. A known number of homogeneous spatial phase delays that result in a spatial phase change.

Any fixed spatial the third function at position x0 is preferably A only at the same spatial location x _0, [psi and | recognized to be a function of | S.

  The intensity map is indicated by reference numeral 1324.

The third function solves at least three equations for at least three intensity maps I ₁ (x ₀ ), I ₂ (x ₀ ) and I ₃ (x ₀ ) in at least three different phase delays θ 1, θ 2 and θ 3. Is solved for each of the specific spatial positions. This process is typically repeated for all spatial positions, the wavefront amplitude A (x), the absolute value of the second complex function | S (x) |, and the wavefront phase and second complex function indicated by reference numeral 1328. The difference Ψ (x) between is obtained.

  Then, once A (x), | S (x) |, and Ψ (x) are known, the above equation limiting the second complex function indicated by reference numeral 1312 is for a substantial number of spatial positions 'x'. Comprehensively solved, the phase α (x) of the second complex function indicated by reference numeral 1332 is obtained.

  Finally, as indicated by reference numeral 1336, the phase φ (x) of the wavefront to be analyzed is added by adding the phase α (x) of the second complex function to the difference Ψ (x) between the phase of the wavefront and the phase of the second complex function. ) Is obtained.

  According to an embodiment of the present invention, the absolute value of the second complex function is preferably obtained for all specific spatial positions x by approximating the absolute value | S | of the second complex function to a constant degree polynomial in the spatial position x0. The value | S | is obtained.

According to another preferred embodiment of the present invention, the phase α of the second complex function is represented by representing the second complex function S (x) as an eigenvalue problem such as S = S · M, where M is a matrix. (X) is obtained, and the complex function is an eigenvector of a matrix obtained by an iterative process. Examples of such iterative processing are S ₀ = | S |, S _{n + 1} = S _n M / || S _n M ||
Where n is the number of iteration steps.

According to still another preferred embodiment of the present invention, the Fourier transform of the spatial function G that determines the spatial phase change is approximated to the polynomial in the position x, and the second complex function S (x) is replaced by the polynomial in the position x. To the second complex function according to these approximations:
S (x) = [(A (x) e ^{iψ (x)} / | S (x) |) S (x)] * ξ [G]
The phase α (x) of the second complex function is obtained by solving an equation that limits (where the function A (x) e ^{iΨ (x)} / | S (x) | is known).

  According to yet another preferred embodiment of the present invention, at any position x, this position In (x), where n = 1, 1, by a best fit method such as least squares, preferably first order least squares. 2, N, N are the number of intensity maps), the amplitude A (x) of the wavefront to be analyzed, the absolute value | S (x) | of the second complex function, and the second complex function And the difference Ψ (x) between the phase of the wavefront and the phase of the wavefront. The accuracy of this process increases as the number N of the plurality of intensity maps increases.

According to a preferred embodiment of the present invention, the plurality of different phase changes are composed of at least four different phase changes, the plurality of intensity maps are composed of at least four intensity maps, and the function indicated by reference numeral 1320 is Each of the predicted intensity maps
Wavefront amplitude A (x),
Absolute value of second complex function | S (x) |
The difference Ψ (x) between the phase of the wavefront and the phase of the second complex function,
The number of known phase delays caused by one of the at least four different phase changes, each corresponding to one of the at least four intensity maps, and at least one additional unknown is determined by the number At least one additional unknown related to wavefront analysis, the number of intensity maps of which is less than or equal to 3
It can be expressed as a third function of

  The third function 1320 is then solved by solving at least four equations derived from at least four intensity maps at at least four different phase delays to determine the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, the wavefront And the phase difference of the second complex function and the at least one additional unknown are obtained.

In another preferred embodiment of the invention, the plurality of different spatial phase changes are caused and intensity maps I ₁ (x), I ₂ (x),. . . The homogeneous spatial phase delays θ ₁ , θ ₂ ... Θ _n processed into the spatial region of the transformed wavefront that generates I _N (x) maximize the contrast of the intensity map and on the phase of the wavefront to be analyzed Selected to minimize the effects of noise.

In a more preferred embodiment of the present invention, each of the predicted intensity maps includes a wavefront amplitude A (x), an absolute value | S (x) | of the second complex function, a phase of the wavefront and a phase of the second complex function. A difference 1320 between Ψ (x) and a third function of the known phase delay θi caused by one of the at least three different phase changes, each corresponding to one of the at least three intensity maps. Are not functions of the plurality of intensity maps, and are not functions of the spatial function G that determines phase change, respectively, β ₀ (x), β _s (x), and β _c (x). It includes several functions that limit the fourth, fifth, and sixth complex functions shown. The fourth, fifth and sixth complex functions are the wavefront amplitude A (x), the absolute value | S (x) | of the second complex function, and the difference Ψ ( x), and each of the plurality of intensity maps I _n (x) is represented by the formula:
I _n (x) = β ₀ (x) + β _c (x) cos (θ _n ) + β _s (x) sin (θ _n ),
(Where θ _n is the numerical value of the phase delay corresponding to the intensity map I _n (x)). Preferably the formula I _n (x) = | A (x) + (e ^iθn −1) | S (x) | e− ^{iΨ (x)} | ²
Each intensity map I _n (x) expressed as is (n is 1, 2,... N), then the formula I _n (x) = β ₀ (x) + β _c (x) cos (θ _n ) + Β _s (x) sin (θ _n ),
Is preferably expressed as: In the formula,
^{_{β 0 (x) = A (}} x) 2 + 2 | S (x) | 2 - 2A (x) | S (x) | cos (Ψ)
β _c (x) = 2A (x) | S (x) | cos (Ψ) −2 | S (x) | ²
β _s (x) = 2A (x) | S (x) | sin (Ψ).

The method scheme described above also uses different least intensity I (θ ₁ ). . . . From I (θ _N )
I (θ _N ) = β ₀ + β _c cos θ _N + sin θ _N
The third function 1320 is solved by calculating the values of β ₀ , β _c , and β _s that best fit. Subsequently, the amplitude A (x) is
A (x) = √ (β ₀ (x) + β _c (x))
The calculated absolute value of the second complex function | S (x) | a ^| S (x) | second class formulas for ^{2 | S (x) | 4} - β 0 (x) | S (x) | 2 + (Β _c (x) ² + β _s (x) ² ) / 4 = 0
And Ψ (x) is obtained by the formula Ψ (x) = arg (β _c (x) +2 | S (x) | ² + iβ _s (x))
Sought by.

In still another preferred embodiment of the present invention, the third function indicated by reference numeral 1320 is solved and the amplitude A (x) of the wavefront and the absolute value | S (x) | And the function of obtaining the difference Ψ (x) between the phase of the wavefront and the phase of the second complex function,
Obtain two solutions indicated by | S _h (x) | and | S _l (x) | for the absolute value | S (x) | of the second complex function, that is, a high numerical value solution and a low numerical value solution, respectively. And a high numerical solution | S _h (x ₀ ) | and a low numerical solution | S _l (x ₀ ) | at each spatial position x ₀ so that the enhanced absolute value solution satisfies the second complex function denoted by reference numeral 1312. Merging the two solutions into an enhanced absolute value solution | S (x) | for the absolute value of the second complex function by selecting either
Features are included.

The method system further includes:
High numerical solutions Ah (x) and Ψh (x) and low numerical solutions Al for the amplitude A (x) of the wavefront to be analyzed and the difference Ψ (x) between the phase of the wavefront and the phase of the second complex function, respectively. Obtaining two solutions of (x) and Ψl (x);
If | S _h (x0) | is selected for the absolute value solution at each spatial position x0, A _h (x0) is selected for the amplitude solution, and | S _l (x ₁ ) | at each position x ₁ Of the high numerical solution A _h (x ₀ ) and the low numerical solution A ₁ (x ₁ ) so that A ₁ (x1) is selected for the amplitude solution. Merging the two amplitude solutions A _h (x) and A ₁ (x) into an enhanced amplitude solution by selecting one at each spatial location x0, and | S _h (at each spatial location x ₀ If x ₀ ) | is selected for the absolute value solution, ψ _h (x ₀ ) is selected for the solution of the difference between the wavefront phase and the phase of the second complex function, and | S _{l at} each position x1 _(x 1) | for said absolute value solution One of if is-option Ψ _{1 (x 1)} solution of the high value as is selected for the solution of the difference Ψ _{h (x 0)} and low resolution numbers Ψ _{1 (x 0)} each Merging the two solutions ψ _h (x) and ψ ₁ (x) for the difference into the solution of the difference emphasized by selecting at spatial position x ₀ ;
Is preferably included.

Further, in an embodiment of the present invention, the step of obtaining the converted wavefront subjected to the plurality of different phase changes by processing the plurality of different phase changes into the converted wavefront further includes a conversion subjected to the plurality of different phase and amplitude changes. Amplitude changes that produce wavefronts are included. These amplitude changes result in homogeneous phase delays θ ₁ , θ ₂ . . . . θ _N is a known amplitude attenuation processed to the same spatial region of the converted wavefront to be processed, preferably the spatial region is limited by the spatial function G.

The amplitude attenuation is σ ₁ , σ ₂ . . . . The nth change (where n = 1, 2,... n) indicated by σ _N and processed into the converted wavefront includes a phase change θ _n and an amplitude attenuation θ _n . It will be appreciated that some of the phase changes may be equal to zero showing no phase change, and some of the amplitude attenuation may be equal to the number of units showing no amplitude attenuation.

In the present embodiment, each of the predicted intensity maps I _n (x) indicated by reference numeral 1320 represents the wavefront amplitude A (x), the absolute value | S (x) | of the second complex function, the phase of the wavefront and the second The function represented by the third function of the phase difference Ψ (x) between the phases of the complex function and the phase delay θn further represents each of the predicted intensity maps as a function of the amplitude attenuation σ _n , and sign β ₀ ( None of x), β ₁ (x), β ₂ (x), and β ₃ (x) is a function of the plurality of intensity maps, and a function of a spatial function G that determines phase and amplitude changes. Not the ability to limit the fourth, fifth, sixth and seventh complex functions (where the fourth, fifth, sixth and seventh complex functions are respectively the amplitude A (x) of the wavefront, the second complex function) The absolute value of the function | S (x) |, the function of the difference Ψ (x) between the phase of the wavefront and the phase of the second complex function Preferably)
a function for limiting the eighth function indicated by μ as a combination of phase delay and amplitude attenuation (the eighth function includes a phase change θ _n and an amplitude attenuation σ _n for the n-th change processed to the converted wavefront; have been indicated by _n, this combination mu _n is the formula ^{_{μ n = σ n e iθn -}} 1
And each of the intensity maps I _n (x) is represented by the formula I _n (x) = β ₀ (x) + β ₁ (x) | μ _n | ² + β ₂ (x) μ _n + β ₃ (x) (μ _n ￣)
( ^Where β ₀ (x) = A ² (x), β ₁ (x) = | S (x) | ² , β ₂ (x) = A (x) | S (x) | e ^{−iΨ ( x)} , β ₃ (x) = A (x) | S (x) | e ^{iΨ (x)} )
Function represented as,
Is included.

The above-described method system further includes the different intensities I _n (x) from the formula I _n (x) = β ₀ (x) + β ₁ (x) | μ _n | ² + β ₂ (x) μ _n + β ₃ (X) (μ _n ￣)
A function for solving the third function by calculating numerical values of β ₀ (x), β ₁ (x), β ₂ (x), and β ₃ (x) that are best suited to the above is included. Next, the amplitude A (x) is obtained by A (x) = √ (β ₀ (x)), and the absolute value | S (x) | of the second complex function is | S (x) | = √ ( β ₁ (x)) and Ψ (x) is determined by solving e ^{iΨ (x)} = angle (β ₃ (x)).

It will be appreciated that the amplitude attenuations σ ₁ , σ ₂ ,... Σ _N may be unknown. In such a case, an additional intensity map is obtained, but the number of unknowns is less than or equal to the number by which the plurality of intensity maps exceed 3. The unknown is obtained in a manner similar to that described above, in which case there is at least one unknown associated with wavefront analysis.

  Reference is now made to FIG. 14, which is a simplified schematic illustration of a partially schematic and partially pictorial illustration of a preferred embodiment of a wavefront analysis system of the type shown in FIG. 1B. As shown in FIG. 14, the wavefront, here designated 1400, is partially propagated through the beam splitter and then focused by the lens 1404 onto the phase manipulator 1406, preferably located at the focal plane of the lens 1404. The phase manipulator 1406 may be, for example, a spatial light modulator or a series of different transparent and spatially non-uniform objects.

  A reflection surface 1408 for reflecting the wavefront 1400 after the wavefront 1400 passes through the phase manipulator 1406 is disposed. The reflected wavefront is imaged on a detector 1410 such as a CCD detector via a beam splitter 1402 by a lens 1404. The beam splitter 1402 and the detector 1410 are arranged such that the detector 1410 is within the focal plane of the lens 1404. The output of the detector 1410 is preferably supplied to a data storage processing circuit 1412 that performs function C described above with reference to FIG. 1A.

  By adding a reflective surface 1408 to the image forming system, the phase delay caused by the phase manipulator 1406 is doubled, enabling image formation with a single lens 1404, and further enabling a more compact system overall.

  Reference is now made to FIG. 15, which is a simplified illustration of a partially schematic and partially pictorial illustration of a surface mapping system using the functions and structures of FIGS. 1A and 1B. As shown in FIG. 15, a beam of radiation, such as light or acoustic energy, is supplied from a radiation source 1500, optionally via a beam expander 1502, onto a beam splitter 1504 that reflects at least a portion of the radiation onto the surface to be inspected. Is done. The radiation reflected from the inspected surface 1506 is a surface mapped wavefront having amplitude and phase and containing information about the surface 1506. A portion of the radiation incident on the surface 1506 is reflected from the surface 1506, propagates through the beam splitter 1504, and passes through a focusing lens 1508, preferably on a phase manipulator 1510 located at the imaging surface of the radiation source 1500. Focused.

  The phase manipulator 1510 may be, for example, a spatial light modulator or a series of different transparent spatially inhomogeneous objects. It will be appreciated that the phase manipulator 1510 can be configured such that a substantial portion of the radiation focused thereon is reflected therefrom. Alternatively, it will be appreciated that the phase manipulator 1510 can be configured such that a substantial portion of the radiation focused thereon is propagated therethrough.

  A second lens 1512 is arranged to image the surface 1506 on a detector 1514 such as a CCD detector. The second lens 1512 is preferably arranged so that the detector 1514 is within its focal plane. The output of the detector 1514 is a set of intensity maps, an example of which is indicated by reference numeral 1515, but is preferably supplied to a data storage processing circuit 1516 that performs the function C described above with reference to FIG. 1A. An output is provided that displays at least one or both of the phase and amplitude of the surface mapping wavefront, if possible. This output is preferably further processed to obtain information about the surface 1506, such as structural changes and surface reflectivity.

  In a preferred embodiment of the present invention, the radiation beam supplied from the radiation source 1500 has a narrow wavelength band for a constant center wavelength, and the phase of the radiation reflected by the surface 1506 is changed with respect to structural changes in the surface 1506. It is made proportional with the ratio which is an inverse linear function of the center wavelength of.

In another preferred embodiment of the present invention has at least two narrow wavelength band centered at different wavelengths as shown in the supplied radiation beam respectively λ _1, ··· λ _n from a radiation source 1500. In such a case, the radiation reflected from the surface 1506 has at least two wavelength components centered at wavelengths λ ₁ ,... Λ _n , respectively, and at least two indications about the phase of the surface mapping wavefront are obtained. The Each such display corresponds to a different wavelength component of the reflected radiation. Wherein said different wavelengths lambda ₁ and mapping numbers in different spatial locations in figures surface of the mapping at a given spatial location in the _surface, if it exceeds the maximum wavelength of the · · · lambda _n, 2 [pi By avoiding ambiguities in the mapping, known as ambiguities, these at least two representations can then be merged to allow enhanced mapping of the surface 1506. By appropriately selecting the wavelengths λ ₁ ,... Λ _n , this ambiguity can be removed when the difference in the mapping values at the different positions is smaller than the product of all wavelengths.

  In yet another preferred embodiment of the present invention, the phase manipulator 1510 performs a plurality of different spatial phase change processing on the radiation wavefront reflected from the surface 1506 and Fourier transformed by the lens 1508. The processing of the plurality of different spatial phase changes provides a transformed wavefront subjected to a plurality of different phase changes that are subsequently detected by detector 1514.

  In yet another preferred embodiment of the invention, at least three different spatial phase changes are processed by the phase manipulator 1510 to generate at least three different intensity maps 1515. The at least three intensity maps are used by the data storage processing circuit 1516 to obtain an output indicating at least the phase of the surface mapped wavefront. In this case, preferably, when the wavefront to be analyzed (FIG. 13) is a surface mapping wavefront, the data storage processing circuit 1516 performs the function C described above with reference to FIG. 1A in the method described above with reference to FIG. .

  Furthermore, in a preferred embodiment of the present invention, the radiation beam supplied from radiation source 1500 consists of a plurality of different wavelength components, whereby a plurality of wavelengths into the surface mapping wavefront and then into the converted wavefront that impinges on phase manipulator 1510. Ingredients are given. In this case, the phase manipulator may be an object whose thickness, refractive index, and surface structure are spatially changed. This spatial change of the phase manipulator generates a different spatial phase change for each of the wavelength components, thereby providing a converted wavefront subjected to a plurality of different phase changes that are subsequently detected by detector 1514.

  Reference is now made to FIG. 16, which is a simplified illustration partially illustrating and partially illustrating the object inspection system using the functions and structures of FIGS. 1A and 1B. As can be seen from FIG. 16, a radiation beam such as light or acoustic energy is optionally transmitted from a radiation source 1600 through a beam expander, and at least a part of an inspection object is supplied onto a transparent object 1602. The radiation propagated through the inspection object 1602 has an amplitude and phase and is an object inspection wavefront containing information about the object 1602. At least a portion of the radiation propagated through the object 1602 is focused via a focusing lens 1604, preferably on a phase manipulator 1606 located on the imaging surface of the radiation source 1600.

  The phase manipulator 1606 may be, for example, a spatial light modulator or a series of different transparent spatially inhomogeneous objects. It will be appreciated that the phase manipulator 1606 can be configured such that substantially a portion of the radiation focused onto the manipulator is reflected from the manipulator. Alternatively, the phase manipulator 1606 can be configured such that substantially a portion of the radiation focused onto the manipulator is propagated through the manipulator.

  A second lens 1608 is arranged to form an image of the object 1602 on a detector such as a CCD detector. The second lens 1608 is preferably arranged so that the detector 1610 is within its focal plane. The output of the detector 1610 exemplifying a set of intensity maps denoted by reference numeral 1612 is preferably supplied to a data storage processing circuit 1614 performing the function C described above with reference to FIG. An output is provided that displays at least one of phase and amplitude, or both if possible. This output is preferably further processed to obtain information about the object 1602, such as the thickness map, refractive index, or propagation properties of the object.

  According to a preferred embodiment of the present invention, the radiation beam supplied from the radiation source 1600 has a narrow wavelength band with a constant center wavelength, and the object 1602 is substantially homogeneous in material and other optical properties. The phase of the radiation propagated through the object 1602 is proportional to the thickness of the object 1602.

  In another preferred embodiment of the present invention, the radiation beam supplied from the radiation source 1600 has a narrow wavelength band with a constant center wavelength, the object 1600 is substantially uniform in thickness, and the object 1602 is. The phase of the radiation propagating through the object 1602 is proportional to optical properties such as refractive index or density of the object 1602. It will be appreciated that the object 1602 may be a photoconductive element such as an optical fiber.

In another preferred embodiment of the present invention, it has at least two narrow wavelength band centered at different wavelengths as shown in the supplied radiation beam respectively λ _1, ··· λ _n from a radiation source 1600. In such a case, the radiation propagated through the object 1602 has at least two wavelength components centered at wavelengths λ ₁ ,... Λ _n , respectively, and at least two indications about the phase of the object inspection wavefront are obtained. Is done. Each such display corresponds to a different wavelength component of the converted radiation. These at least two representations are then substantially merged so that the numerical value of the mapping at a certain spatial position in the object becomes the numerical value of the mapping at a different spatial position in the object at the different wavelengths λ ₁ ,. When the maximum wavelength of λ _n is exceeded, emphasis mapping of characteristics such as thickness of the object 1602 is possible by avoiding ambiguity in the mapping known as 2π ambiguity. If the difference in the numerical values of the mappings at different positions is less than the product of all wavelengths, proper selection of the wavelengths λ ₁ ,... Λ _n leads to removing this ambiguity.

  In yet another preferred embodiment of the invention, the phase manipulator 1606 processes a plurality of different spatial phase changes through the object 1602 and processes the radiated wavefront that has been Fourier transformed by the lens 1604. Processing the plurality of different phase changes produces transformed wavefronts that have undergone the plurality of different phase changes, which can then be detected by detector 1610.

  In yet another preferred embodiment of the present invention, at least three different spatial phase changes are processed by the phase manipulator 1606 to generate at least three different intensity maps 1612. The at least three intensity maps 1612 are used by a data storage processing circuit 1614 to obtain an output that displays at least the phase of the object inspection wavefront. In such a case, the data storage processing circuit 1614 preferably functions as described above with reference to FIG. 1A by the method described above with reference to FIG. 13 in which the analysis target wavefront (FIG. 13) is the target inspection wavefront. Perform C.

  Furthermore, in a preferred embodiment of the present invention, the radiation beam supplied from radiation source 1600 comprises a plurality of different wavelength components, so that a plurality of wavelength components in the object inspection wavefront and then in the converted wavefront impinging on phase manipulator 1606. Is given. In such a case, the phase manipulator 1606 may be an object in which at least one of its thickness, refractive index, and surface structure changes spatially. This spatial change of the phase manipulator generates a different spatial phase change for each of the wavelength components to provide a transformed wavefront that has undergone a plurality of different phase changes that are subsequently detected by detector 1610.

  Reference is now made to FIG. 17, which is a simplified schematic diagram partially illustrating and partially illustrating the spectroscopic analysis system using the functions and structures of FIGS. 1A and 1B. As can be seen in FIG. 17, a beam of radiation, such as light or acoustic energy, is supplied from a radiation source 1700 to be tested, optionally via a beam expander, onto a known element 1702, such as a single etalon or a plurality of etalons. . Element 1702 is intended to generate an input wavelength having at least a changing phase or intensity. The radiation propagated through the element 1702 is a spectroscopic wavefront having amplitude and phase and containing information about the spectrum of the radiation source 1700. At least a portion of the radiation propagated through element 1702 is focused via focusing lens 1704 onto a phase manipulator 1706 that is preferably located on the imaging surface of radiation source 1700.

  The phase manipulator 1706 is, for example, a spatial light modulator or a series of different transparent and spatially inhomogeneous objects. It will be appreciated that the phase manipulator 1706 can be configured such that substantially a portion of the radiation focused on the manipulator is reflected therefrom. Alternatively, the phase manipulator 1706 can be configured such that substantially a portion of the radiation focused on the manipulator is propagated therethrough.

  A second lens 1708 is arranged to image the element 1702 on a detector 1710 such as a CCD detector. This second lens 1708 is preferably arranged so that the detector 1710 fits into its focal plane. The output of the detector 1710, exemplified by a set of intensity maps denoted by reference numeral 1712, is preferably supplied to a data storage processing circuit 1714 that performs function C described above with reference to FIG. 1A, and the phase of the spectral analysis wavefront. And an output that displays at least one or both of the amplitudes if possible. This output is preferably further processed to obtain information about the source 1700, such as the spectrum of the radiation supplied from the source 1700.

  According to a preferred embodiment of the present invention, the spectroscopic wavefront is obtained by reflecting the radiation supplied from a radiation source 1700 from an element 1702.

  According to another preferred embodiment of the invention, the spectroscopic wavefront is obtained by propagating the radiation supplied from a radiation source 1700 through element 1702.

  According to a further preferred embodiment of the present invention, the radiation beam supplied from the radiation source 1700 has a narrow wavelength band having a central wavelength, and the phase of the radiation impinging on the object 1702 is the central wavelength supplied from the radiation source 1700. And inversely proportional to the surface characteristics and / or thickness of the element 1702.

  According to another preferred embodiment of the present invention, the plurality of intensity maps are output to display at least one or possibly both of the phase and amplitude of the spectroscopic wavefront, the phase and amplitude of the spectroscopic wavefront and the phase. To obtain by representing as a mathematical function of at least one of a plurality of different phase changes processed by manipulator 1706 (wherein at least one or possibly both of said phase and amplitude is unknown and said different phase The function that causes the change is known), and the plurality of intensity maps 1712 are used by the data storage processing circuit 1714. This at least one mathematical function is subsequently used to obtain an output indicating at least the phase of the spectroscopic wavefront.

  According to yet another preferred embodiment of the present invention, the phase manipulator 1706 propagates a plurality of different spatial phase changes through the element 1702 and processes it into a radiated wavefront that is Fourier transformed by the lens 1704. The processing of the plurality of different spatial phase changes generates a converted wavefront subjected to the plurality of different phase changes, and these wavefronts are subsequently detected by the detector 1710.

  In accordance with yet another preferred embodiment of the present invention, at least three different spatial phase change processes are performed by the phase manipulator 1706 to generate at least three different intensity maps 1712. The data storage processing circuit 1714 obtains an output for displaying at least the phase of the spectroscopic analysis wavefront using the at least three intensity maps. In such a case, the data storage processing circuit 1714 preferably performs the function C described above with reference to FIG. 1A by the method described above with reference to FIG. 13 when the wavefront to be analyzed (FIG. 13) is the spectral analysis wavefront. To do.

  Further in accordance with a preferred embodiment of the present invention, the radiation beam supplied from radiation source 1700 is comprised of a plurality of different wavelength components, thereby providing a plurality of beams in the spectroscopic wavefront and subsequently in the converted wavefront impinging on phase manipulator 1706. Are given. In this case, the phase manipulator may be an object whose thickness, refractive index, and surface structure change spatially. The spatial change of the phase manipulator provides a converted wavefront that has undergone a plurality of different phase changes that are subsequently detected by detector 1710 by causing different spatial phase changes for each of the wavelength components.

  According to a preferred embodiment of the present invention, the phase manipulator 1706 comprises a plurality of objects each characterized in that at least one of its thickness and refractive index varies spatially. The spatial changes in thickness or refractive index of the plurality of objects are such that the phase change processed by the phase manipulator 1706 differs to a predetermined degree selected for at least some of the wavelength components provided by the radiation source 1700. It is possible to select.

  The object is specifically selected such that the phase change processed to the expected wavelength of the radiation source is substantially different from the phase change processed to the actual wavelength of the radiation source. Alternatively, the spatial change in thickness or refractive index of the plurality of objects is such that the phase change processed by the phase manipulator 1706 is the same for at least some of the different wavelength components provided by the radiation source 1700. You may choose.

  According to another embodiment of the invention, each of the known elements consists of a plurality of objects characterized in that at least one of its thickness and refractive index varies spatially. The spatial change in the thickness or refractive index of the plurality of objects is caused by the wavelength component of the input wavefront generated by passing the wavelength component of the radiation supplied by the radiation source 1700 through the element 1702. It may be selected to differ to a predetermined degree selected for at least some of the wavelength components provided by 1700.

  The object is specifically selected such that the wavelength component of the input wavefront generated by the expected wavelength of the radiation source is substantially different from the wavelength component of the input wavefront generated by the actual wavelength of the radiation source. . Alternatively, the spatial change in the thickness or refractive index of the plurality of objects is caused by the wavelength component of the input wavefront generated by passing the wavelength component of the radiation supplied by the radiation source 1700 through the element 1702. It may be selected to be the same for at least some of the wavelength components provided by the radiation source 1700.

  Reference is now made to FIG. 18, which is a partially schematic and partially pictorial illustration illustrating a phase change analysis system using the functions and structures of FIGS. 1A and 1B. As can be seen from FIG. 18, a known wavefront 1800, which is a phase change analysis wavefront having amplitude and phase, is Fourier transformed through the focusing lens 1802, and preferably to the wavefront 1800, and is preferably placed in the focal plane of the lens 1802. Focus on the phased manipulator 1804. The phase manipulator processes a plurality of different phase changes into the converted phase change analysis wavefront.

  The phase manipulator 1804 may be, for example, a spatial light modulator or a series of different transparent and spatially non-homogeneous objects. It will be appreciated that the phase manipulator 1804 can be configured such that substantially a portion of the radiation focused on the manipulator is reflected therefrom. Alternatively, the phase manipulator 1804 can be configured such that substantially a portion of the radiation focused on the manipulator is propagated therethrough.

  A second lens 1806 is arranged to image the wavefront 1800 on a detector 1808 such as a CCD detector. The second lens 1806 is preferably arranged so that the detector 1808 is within its focal plane. The output of the detector 1808 taking as an example a set of intensity maps denoted by reference numeral 1810 is the number of converted wavefronts subjected to the different amplitude changes processed by the phase manipulator 1804 using the plurality of intensity maps. Preferably, it is supplied to a data storage processing circuit 1812 that obtains an output indicating the difference between the different phase changes.

  In a preferred embodiment of the invention, lateral shifts appear in the different phase changes. These deviations are caused, for example, by vibrations of the phase manipulator or by impurities in the phase manipulator. As a result, a corresponding change also appears in the plurality of intensity maps 1810, and a display of these lateral shifts can be obtained.

  In another preferred embodiment of the present invention, the plurality of intensity maps 1810 are used by the data storage processing circuit 1812, and at least the phase and amplitude of the wavefront 1800 are known and the plurality of different phase changes are unknown. If the phase manipulator 1804 represents the plurality of intensity maps as a mathematical function of the phase and amplitude of the phase change analysis wavefront and at least one of the plurality of different phase changes processed by the phase manipulator 1804. An output is obtained that displays the difference between the processed different phase changes. This at least one mathematical function is subsequently used to obtain an output indicating at least the difference between the plurality of different phase changes.

  In still another preferred embodiment of the present invention, the phase manipulator 1804 performs a plurality of different spatial phase change processes on the wavefront 1800 Fourier-transformed by the lens 1802. A plurality of different phase-changed converted wavefronts are provided by the plurality of different spatial change processes, and these converted wavefronts are subsequently detected by detector 1808.

  In yet another preferred embodiment of the present invention, at least three different spatial phase change processes are performed by the phase manipulator 1804 to generate at least three different intensity maps 1810. The at least three intensity maps are used by a data storage processing circuit 1812 to obtain an output that displays at least the difference between the plurality of phase changes. In such a case, the data storage processing circuit 1814 is preferably configured such that the wavefront to be analyzed (FIG. 13) is a known phase change analysis wavefront and the spatial phase change processed by the phase manipulator 1804 is unknown. In a manner similar to that described above, function C described above with reference to FIG. 1A is performed.

  Further, in a preferred embodiment of the present invention, wavefront 1800 is comprised of a plurality of different wavelength components, thereby providing a plurality of wavelength components in the converted wavefront that impinges on phase manipulator 1804. In such a case, the phase manipulator may be an object in which at least one of its thickness, refractive index, and surface structure changes spatially. This spatial change of the phase manipulator causes a different spatial phase change for each of the wavelength components, resulting in a plurality of different phase-changed converted wavefronts that will subsequently be detected by detector 1808.

  In yet another embodiment of the present invention, the phase manipulator 1804 applies a phase change of 1 to the radiation focused onto each spatial position above it, thereby generating a 1 intensity map 1810 as the output of the detector 1808. The In such a case, the data storage processing circuit 1812 obtains at least an output for displaying the phase change processed by the phase manipulator 1804 using the intensity map and the known wavefront 1800.

  According to the method scheme, the phase change processed by the phase manipulator may be a phase delay having a value selected from one of a plurality of predetermined values including a possible zero phase delay, and data storage The output indication of the phase change obtained by the processing circuit 1812 is the numerical value for the phase delay. In such a case, the phase manipulator is a medium that stores information with different values of the phase delay at various different positions on the manipulator where the numerical value of the phase delay constitutes stored information. May be. The storage information encoded in the numerical values having different phase delays is retrieved by the data storage processing circuit 1812. In such a case, it is recognized that the wavefront 1800 also consists of a plurality of different wavelength components, generating a plurality of intensity maps, followed by an increase in the information encoded on the phase manipulator at the various different locations.

  Reference is now made to FIG. 19, which is a partially schematic and partially pictorial illustration illustrating a stored data retrieval system using the functions and configurations of FIGS. 1A and 1B. As can be seen from FIG. 19, an optical storage medium such as a DVD or compact disc can be enlarged by selecting the height of the medium at each of various different positions on the medium, as indicated by reference numeral 1902. The encoded information is stored on the medium. At each position of the medium, the height of the medium is one of several defined heights or levels. The specified level of the media at a location limits the information stored at that location.

  A radiation beam, such as light or acoustic energy, is supplied from a radiation source 1904 such as a laser or LED, optionally via a beam expander, to a beam splitter 1906 that reflects at least a portion of the radiation onto the surface of the medium 1900. . The radiation reflected from an area 1908 where the radiation impinges on its surface on the medium is a stored data retrieval wavefront having amplitude and phase and containing information stored in the area. At least a portion of the radiation incident on the area 1908 is reflected from the area 1908 and through a beam splitter 1906 to an imaging system 1910 comprising a phase manipulator or other device that generates a varying phase function. Propagated.

  The image forming system 1910 performs the functions A and B described above with reference to FIG. 1A to obtain a plurality of different phase-changed converted wavefronts corresponding to the stored data retrieval wavefront and the plurality of different phase-changed converted wavefronts. Get multiple intensity maps.

  Preferably, the image forming system 1910 includes a first lens 1508 (FIG. 15), a phase manipulator 1510 (FIG. 15), a second lens 1512 (FIG. 15), and a detector 1514 (FIG. 15). The output of the image forming system 1910 is preferably supplied to a data storage processing circuit 1912 that performs the function C described above with reference to FIG. 1A, and outputs at least one or both of the phase and amplitude of the stored data retrieval wavefront. The output to be displayed is given. This output is preferably further processed to read the information encoded in area 1908 of media 1900 and display it on display device 1914.

  In a preferred embodiment of the present invention, the radiation beam supplied from radiation source 1904 has a narrow wavelength band having a constant center wavelength, and the phase of the radiation reflected from medium 1900 is an inverse linear function of the center wavelength of the radiation. Is proportional to the structural change in the medium 1900 containing the encoded information.

In another preferred embodiment of the present invention, the radiation beam supplied from radiation source 1904, respectively lambda _1, has at least two narrow wavelength band centered at different wavelengths shown in · · · lambda _n. In such a case, the radiation reflected from the area 1908 in media 1900, respectively wavelengths lambda _1, has at least two wavelength components centered · · · lambda _n.

At least two representations of the phase of the stored data retrieval wavefront are acquired, each representation corresponding to a different individual wavelength component of the reflected radiation. These at least two display emphasizes the mapping subsequently merged with the surface areas 1908 of media 1900, thereby said wavelength lambda ₁ that value of different heights above the medium at a given _position, the · · · lambda _n The search for the information is emphasized by avoiding ambiguity in the map, known as 2π ambiguity, when the maximum wavelength is exceeded.

In such a case, the range of possible heights at each location in area 1908 may exceed the maximum wavelength value of the different wavelengths without ambiguity in reading the height. Such an extended dynamic range allows more information to be stored on the medium 1900 than would otherwise be possible. Appropriate selection of the wavelengths λ ₁ ,... Λ _n reduces such ambiguity if the height difference of the media in the area 1908 at different locations is less than the product of all wavelengths multiplied. It will guide you to remove it.

  In yet another preferred embodiment of the present invention, the phase manipulator incorporated into the imaging system 1910 is directed against a radiation wavefront reflected from the medium 1900 and similarly Fourier transformed by a lens incorporated into the imaging system. Multiple different spatial phase changes. The processing of the plurality of different spatial phase changes provides a plurality of different phase-changed converted wavefronts that are subsequently detected by a detector incorporated into the imaging system 1910.

  In yet another preferred embodiment of the present invention, at least three spatial phase change processes are performed by a phase manipulator incorporated into the imaging system to generate output for at least three different intensity maps from the imaging system. . The at least three intensity maps are used by a data storage processing circuit 1912 to obtain an output indicating at least the phase of the stored data search wavefront. In such a case, when the analysis target wavefront (FIG. 13) is a stored data search wavefront, the data storage processing circuit 1912 preferably performs the function C described above with reference to FIG. Carry out.

  Further, in an embodiment of the present invention, the radiation beam supplied from radiation source 1904 is comprised of a plurality of different wavelength components that impinge upon the stored data retrieval wavefront and subsequently into a phase manipulator incorporated into imaging system 1910. A plurality of wavelength components are given in the converted wavefront. In this case, the phase manipulator may be an object in which at least one of its thickness, refractive index, and surface structure changes spatially. The spatial change of the phase manipulator produces a different spatial phase change for each of the wavelength components to provide a plurality of different phase-changed converted wavefronts that are subsequently detected by a detector incorporated into the imaging system 1910.

  In another embodiment of the present invention, the intensity value of the intensity map resulting from the light reflected from the position and passing through the imaging system 1910, each at a certain height, is within a predetermined range. The information is encoded on the medium by selecting to fit. This range corresponds to the component of the information stored at the position. By using the plurality of intensity maps, a plurality of intensity values are realized for each position, and each intensity value falls within a numerical value within a specific range. The resulting range of intensity values provides information comprising a plurality of components for each location on the medium 1900.

  In such a case, the retrieval of information stored in the area 1908 on the media from the output of the imaging system 1910 saved each of the intensity values generated at each location to their corresponding ranges and then at that location. This is performed by the data storage processing circuit 1912 by a direct method such as mapping to information.

  The methodologies also include using a phase manipulator incorporated into the imaging system that processes at least the time-varying phase change function into a transformed data retrieval wavefront that impacts the imaging system. The time-varying phase change function provides the plurality of intensity maps.

  Alternatively or additionally, the radiation beam supplied from radiation source 1904 is comprised of a plurality of different wavelength components, thereby providing a plurality of wavelength components in the stored data retrieval wavefront. The plurality of different phase-changed converted wavefronts are obtained by processing at least one phase change into a plurality of different wavelength components of the stored data retrieval wavefront. The phase-changed converted wavefront data search wavefront may be detected by a single detector or alternatively, a plurality of separate different wavelength components, each detected by a separate detector, such as by a dispersive element or the like. Can be separated.

  In still other embodiments of the present invention, the medium 1900 may have different reflectivity coefficients for the radiation supplied from the light source 1904 at each of a variety of different locations on the medium. The reflectance of the radiation may be different at each position on the medium. The reflectance is one of several constant values, and the specific numerical value limits at least a part of the information stored at the position.

  In such a case, the information encoded on the medium 1900 can be obtained by selecting the height of the medium at each of a variety of different locations on the medium and of the medium at each of a variety of different locations on the medium. Encoding can be done by selecting the refractive index. According to such a method, more information can be stored at each position on the medium than the amount of information that can be stored otherwise. Further, in such a case, in the step of obtaining the encoded information using the display of the amplitude and phase of the stored data search wavefront, by selecting the height of the medium using the display about the phase Obtaining the encoded information and obtaining the encoded information by selecting the reflectivity using an indication of the amplitude.

  In yet another embodiment of the invention, the information is encoded onto the medium in several layers in the medium. This information is encoded by selecting the height of the media at each of various different locations on each layer of the media. Each of these layers placed on top of other layers in the medium 1900 is partially reflective and partially propagated. The radiation beam from the radiation source 1904 impinging on the medium 1900 is partially reflected from the top, the first layer of the medium, and partially propagated to the layers below the layer. The energy propagated by the second layer is partially reflected, and partially propagated to the layer below it, etc., until the radiation propagated through all layers is partially reflected from the lowest layer. In such a case, the radiation source 1904 is preferably provided with a focusing system that focuses the radiation onto each layer of the media 1900 to retrieve information stored on the layers. Instead of or in addition to the above, the image forming system may be provided with a confocal microscope apparatus for distinguishing between different layers.

  Area 1908 of media 1900 is relatively small in area and may consist of a single field into which information is encoded, or may include nearby fields. In such a case, the detector incorporated in the image forming system 1910 can be limited to a single or several detection pixels. Further, the output that displays at least one or preferably both of the phase and amplitude of the stored data retrieval wavefront provided by circuit 1912 includes at least one of the height and reflectivity of the medium at that location or location included in area 1908. Or, if possible, both are included.

  In yet another embodiment of the present invention, the stored data retrieval wavefront includes at least one one-dimensional component corresponding to at least one one-dimensional area of the area 1908 on the medium 1900. In such a case, the image forming system 1910 is preferably similar to the image forming system described above with reference to FIG. 10B. The system includes a first lens, such as a cylindrical lens 1086 (FIG. 10B).

  The first lens generates a one-dimensional Fourier transform performed along an axis extending orthogonal to the propagation direction of the data inspection wavefront, and at least one primary of the converted wavefront in a dimension orthogonal to the propagation direction. It is preferred to provide the original component. The first lens, such as lens 1086, focuses the stored data retrieval wavefront onto a phase manipulator, such as a uniaxial transposable phase manipulator 1087 (FIG. 10B), preferably located in the focal plane of lens 1086. The phase manipulator 1087 processes a plurality of different phase changes for each of at least one one-dimensional component of the converted wavefront to obtain at least one one-dimensional component of the plurality of phase-changed converted wavefronts.

  The image forming system further includes a second lens such as a cylindrical lens 1088 (FIG. 10B) arranged to image the at least one one-dimensional component of the stored data retrieval wavefront onto a detector such as a CCD detector. It is included. Further, the circuit 1912 uses the plurality of intensity maps to obtain an output that displays at least one or preferably both of the amplitude and phase of the at least one one-dimensional component of the data search wavefront.

  Furthermore, according to the method scheme, as described above with reference to FIG. 10B, the phase manipulators 1087 typically extend perpendicular to the wavefront propagation direction and are axes of transformation produced by the lens 1086. Spatially inhomogeneous including several different phase delay regions arranged to process the phase delay to one of at least one one-dimensional component at a fixed position of the object along a phase manipulator axis orthogonal to It is preferable to provide multiple local phase delay elements such as transparent objects.

  In such a case, relative movement is imparted between the image forming system 1910 and the medium 1900 along the phase manipulator axis. This relative movement preferably continues with different wavefront components corresponding to different portions of the area 1908 on the medium 1900 so that each wavefront component passes through each phase delay region of the phase manipulator. And match.

  It will be appreciated that the relative movement between the image forming system 1910 and the at least one one-dimensional wavefront component is obtained by rotating the medium about the axis of the medium while the image forming system is not moving.

  It is particularly a feature in this embodiment that the at least one one-dimensional component of the wavefront is processed separately. Accordingly, the at least one one-dimensional wavefront component corresponding to a one-dimensional portion of the area 1908 is focused by the remote portion of the first cylindrical lens of the imaging system 1910 and is imaged by the corresponding remote portion of the second cylindrical lens. Formed and passed through a distinct area of the phase manipulator. Each image of the one-dimensional portion of area 1908 at the detector incorporated in imaging system 1910 is therefore a separate and distinct image. It will be appreciated that these images can be displayed on a separate detector or monolithic detector.

  In an embodiment of the invention, the transform processed into the stored data retrieval wavefront includes an additional Fourier transform. This additional Fourier transform is performed by the first cylindrical lens or additional lens of the image forming system 1910 and acts to minimize crosstalk between different one-dimensional components of the wavefront. In such a case, it is preferable that an additional conversion, such as that provided by an additional lens proximate to the second cylindrical lens, be processed into the phase-changed converted wavefront. In such a case, it is preferable that a conversion process is further performed on the phase-converted converted wavefront. This further conversion process can be performed by the second cylindrical lens or additional lens of the image forming system 1910.

  Reference is now made to FIG. 20, which is a partially schematic and partially illustrated schematic illustration illustrating a three-dimensional image forming system using the functions and structures of FIGS. 1A and 1B. As can be seen from FIG. 20, a beam of radiation, such as light or acoustic energy, that reflects at least a portion of the radiation from a radiation source 2000 onto a three-dimensional object 2006 to be imaged, optionally via a beam expander. It is supplied onto the splitter 2004. The radiation reflected from the object 2006 is a three-dimensional imaging wavefront having amplitude and phase and containing information about the object 2006. At least a portion of the radiation incident on the surface of the object 2006 is reflected from the object 2006, propagated through the beam splitter 2004, and preferably through the focusing lens 2008, preferably the imaging surface of the radiation source 2000. Focused on a phase manipulator 2010 located in

  The phase manipulator 2010 may be, for example, a spatial light modulator or a series of different transparent spatially inhomogeneous objects. It will be appreciated that the phase manipulator can be configured such that substantially a portion of the radiation focused onto the manipulator is reflected from the manipulator. Alternatively, it will be appreciated that the phase manipulator 2010 can be configured such that substantially a portion of the radiation focused onto the manipulator is propagated through the manipulator.

  A second lens 2012 is arranged to form an image of the object 2006 on a detector 2014 such as a CCD detector. The second lens 2012 is arranged so that the detector 2014 is within its focal plane. The output of the detector 2014, for example a set of intensity maps indicated by reference numeral 2016, is preferably supplied to the data storage processing circuit 2016 performing the function C described above with reference to FIG. An output is provided that displays at least one or both of the wavefront phase and amplitude. This output is preferably further processed to obtain information about the object 2006 such as the three-dimensional shape of the object.

  In a preferred embodiment of the present invention, the radiation beam supplied from the radiation source 2000 has a narrow wavelength band with a constant center wavelength, and the phase of the radiation reflected from the object 2006 is changed in structure in the object surface 2006. And a ratio that is an inverse linear function of the center wavelength of the radiation.

In another preferred embodiment of the present invention, the radiation beam supplied from radiation source 2000, respectively lambda _1, has at least two narrow wavelength band centered at different wavelengths shown in · · · lambda _n Yes. In such a case, the radiation reflected from the object 2006 has at least two wavelength components centered at wavelengths λ ₁ ,... Λ _n , respectively, and at least two indications about the phase of the three-dimensional imaging wavefront. To be acquired. Each such display corresponds to a different wavelength component of the converted wavefront. These at least two representations are subsequently merged to allow an enhanced mapping of the object 2006 by avoiding 2π ambiguity in the 3D image formation.

  In still another preferred embodiment of the present invention, the phase manipulator 2010 performs a plurality of spatial phase change processes on the radiation wavefront reflected from the surface 2006 and Fourier transformed by the lens 2008. A plurality of different phase-changed converted wavefronts are provided by the plurality of different spatial phase change processes, and these converted wavefronts can subsequently be detected by the detector 2014.

  In yet another preferred embodiment of the present invention, at least three different spatial phase change processes are performed by the phase manipulator 2010 to generate at least three different intensity maps 2015. The at least three intensity maps are used by the data storage processing circuit 2016 to obtain an output indicating at least the phase of the three-dimensional image forming wavefront. In this case, the data storage processing circuit 2016 performs the function C described above with reference to FIG. 1A by the method described above with reference to FIG. 13 when the wavefront to be analyzed (FIG. 13) is the three-dimensional image forming wavefront. Carry out.

  Furthermore, in a preferred embodiment of the present invention, the radiation beam supplied from the radiation source 2000 is composed of a plurality of different wavelength components, so that the three-dimensional imaging wavefront and the conversion wavefront colliding with the phase manipulator 2010 are formed. Are provided with a plurality of wavelength components. In this case, the phase manipulator 2010 may be an object in which at least one of its thickness, refractive index, and surface structure changes spatially. This spatial change of the phase manipulator causes a different spatial phase change for each of the wavelength components, thereby providing a plurality of different phase-changed converted wavefronts that are subsequently detected by detector 2014.

Reference is now made to FIG. 21A, which is a partially schematic and partially pictorial illustration illustrating a wavefront analysis function that operates in accordance with another preferred embodiment of the present invention. The functions shown in FIG. 21A can be summarized as including the following sub-functions.
A. A function of obtaining a plurality of different amplitude-converted converted wavefronts corresponding to the wavefront to be analyzed having amplitude and phase;
B. C. a function of obtaining the plurality of intensity maps of the plurality of amplitude-changed converted wavefronts; A function of acquiring an output for displaying at least one of the phase and amplitude of the wavefront to be analyzed or preferably both using the plurality of intensity maps.

As shown in FIG. 21A, the first subordinate function indicated by A is realized by the following functions.
A wavefront that can be represented by a plurality of point sources of light is designated 2100 throughout. The wavefront 2100 has a typically spatially non-homogeneous phase characteristic, as indicated by the solid line and labeled 2102 throughout. The wavefront 2100 also has a typically non-homogeneous amplitude characteristic, as indicated by the dotted line and labeled 2103 throughout. Such a wavefront is obtained by a conventional method of receiving light from an appropriate object by reading an optical disc such as a DVD or a compact disc 2104, for example.

  The main object of the present invention is to measure a phase characteristic which cannot be easily measured as indicated by reference numeral 2102. Another object of the present invention is to measure amplitude characteristics, such as that shown at 2103, in an enhanced manner. Yet another object of the present invention is to measure both the phase characteristic 2102 and the amplitude characteristic 2103. Although there are various techniques for performing such measurements, it is recognized that the present invention is a methodologies that are superior to known techniques to date, especially from the relative insensitivity to noise.

  The conversion wavefront is obtained by processing the conversion represented by reference numeral 2106 to the wavefront 2100 to be analyzed. A preferred transformation method is Fourier transformation. The converted wavefront generated by the above is denoted by reference numeral 2108.

  A plurality of different amplitude changes indicated by light attenuation components 2110, 2112, and 2114, or even a spatial amplitude change, are processed into the converted wavefront 2108, thereby changing a plurality of different amplitudes indicated by reference numerals 2120, 2122, and 2124. A converted wavefront is acquired. It will be appreciated that the described difference between each of the plurality of different amplitude-changed converted wavefronts is due to a portion of the converted wavefront being attenuated differently than the rest.

  As shown in FIG. 21A, the second sub-function indicated by B is preferably implemented by processing a Fourier transform into the plurality of different amplitude-changed transformed wavefronts. Alternatively, this second subordinate function can be realized by propagating the converted wavefront with different amplitudes on an expanded space without using Fourier transform. Finally, function B requires detection of the intensity characteristics of the converted wavefronts with different amplitudes. The output of such detection is the intensity map, examples of which are indicated by reference numerals 2130, 2132 and 2134 in the figure.

As shown in FIG. 21A, the third subordinate function indicated by C is the following function:
A function of representing a plurality of intensity maps, such as maps 2130, 2132, and 2134, as a mathematical function of the wavefront to be analyzed and a plurality of different amplitude changes in phase and at least one mathematical function, such as by using a computer 2136 And at least one or preferably both of the amplitudes are unknown, and the plurality of different amplitude changes shown as light attenuation components 2110, 2112 and 2114 processed into the converted wavefront 2108 are typically known), and by the computer 2136 And so forth, using the at least one mathematical function, here represented by the phase function denoted by reference numeral 2138 and the amplitude function denoted by reference numeral 2139, respectively, representing the phase characteristic 2102 and amplitude characteristic 2103 of the wavefront 2100 At least one of the phase and amplitude of the target wavefront Or, if possible, it is realized by the function of acquiring the display for both. In this example, the wavefront 2100 can represent the information contained in a compact disc or DVD.

  According to an embodiment of the present invention, the plurality of intensity maps are composed of at least four intensity maps. In such a case, the function of obtaining an output for displaying at least the phase of the wavefront to be analyzed using the plurality of intensity maps includes a combination of a plurality of intensity maps each consisting of at least three intensity maps of the plurality of intensity maps. Is used to provide a plurality of displays for at least the phase of the wavefront to be analyzed.

  It is preferable that the method system includes a function of giving an emphasis display on at least the phase of the wavefront to be analyzed using the plurality of indications on at least the phase of the wavefront to be analyzed.

  According to an embodiment of the present invention, the plurality of intensity maps are composed of at least four intensity maps. In such a case, the function of obtaining an output for displaying at least the amplitude of the wavefront to be analyzed using the plurality of intensity maps includes a plurality of intensity maps, each of which is at least three intensity maps of the plurality of intensity maps. A function of giving a plurality of displays about at least the amplitude of the wavefront to be analyzed using a combination is included.

  The method system also includes a function of giving a highlighted display of at least the amplitude of the wavefront to be analyzed using a plurality of displays about at least the amplitude of the wavefront to be analyzed.

  It will be appreciated that in this method, highlighting is obtained for both the phase and amplitude of the wavefront.

  In a preferred embodiment of the present invention, at least some of the plurality of displays for the amplitude and phase are at least a second class display for the amplitude and phase of the wavefront to be analyzed.

  In a preferred embodiment of the invention, the plurality of intensity maps are used to provide an analytical output that displays the amplitude and phase.

  It is preferable that the converted wavefront whose amplitude is changed is acquired by interference of a wavefront to be analyzed along a common optical path.

  In another preferred embodiment of the present invention, an output is obtained that displays the phase of the wavefront to be analyzed in which the halos and shading-off distortions that are characteristic of the conventional “phase contrast” method are substantially eliminated.

  In still another preferred embodiment of the present invention, the plurality of intensity maps are merged into a second plurality of merged intensity maps that are less than the first plurality of intensity maps, and the second plurality of merged intensity maps Obtaining an output indicating the phase of the wavefront to be analyzed from each, and combining the outputs to give an emphasis on the phase of the wavefront to be analyzed, thereby using the plurality of intensity maps to determine the phase of the wavefront to be analyzed Output can be obtained.

  In yet another preferred embodiment of the present invention, the plurality of intensity maps are merged into a second plurality of merged intensity maps that are less than the first plurality of intensity maps, and the second plurality of merged intensity maps. To obtain an output indicating at least the amplitude of the wavefront to be analyzed from each of them, and by combining the outputs to give an emphasis on the amplitude of the wavefront to be analyzed, the wavefront to be analyzed using the plurality of intensity maps An output indicating the amplitude of the signal can be obtained.

  Further, in a preferred embodiment of the present invention, to obtain a plurality of different amplitude-changed converted wavefronts corresponding to the wavefront to be analyzed, to obtain a plurality of intensity maps of the plurality of amplitude-changed converted wavefronts, and The method system can be used to obtain an output of at least a second class display for the phase of the wavefront to be analyzed using the plurality of intensity maps.

  In addition to or in place of the above, in a preferred embodiment of the present invention, in order to obtain a plurality of different converted wavefronts with different amplitudes corresponding to the wavefront to be analyzed, a plurality of intensities of the plurality of converted wavefronts with changed amplitudes The method scheme can be used to obtain a map and to obtain at least a second class display output for the amplitude of the wavefront to be analyzed using the plurality of intensity maps.

  In still another preferred embodiment of the present invention, the function of acquiring the plurality of converted wavefronts having different amplitudes is a function of converting the wavefront to be analyzed to obtain a converted wavefront, and then a plurality of the converted wavefronts to the converted wavefront. Consists of the ability to process different phase and amplitude changes (ie, each of these changes is either a phase change, an amplitude change or a combination of a phase change and an amplitude change) to obtain a plurality of different phase and amplitude changed converted wavefronts Is.

  In still another preferred embodiment of the present invention, the wavefront to be analyzed is composed of at least two wavelength components. In such a case, the function of obtaining a plurality of intensity maps includes obtaining at least two wavelength components of the amplitude-changed converted wavefront, and each set of the at least two of the converted wavefronts having the amplitude changed. In order to obtain at least two sets of intensity maps corresponding to the individual components of the wavelength component, a function of separating the converted wavefront whose amplitude has been changed according to the at least two wavelength components is included.

  Subsequently, the plurality of intensity maps are used, an output for displaying the phase of the wavefront to be analyzed is obtained from each of the at least two sets of intensity maps, and an output for giving an emphasis on the phase of the wavefront to be analyzed is merged By doing so, an output indicating the amplitude and phase of the wavefront to be analyzed is given. In the emphasis display, once the phase value exceeds 2π, the 2π ambiguity that has conventionally occurred when detecting a wavefront of a single wavelength is eliminated.

  The wavefront to be analyzed may be an acoustic radiation wavefront.

  The wavefront to be analyzed may be any suitable electromagnetic wave radiation such as visible light, infrared light, ultraviolet light, X-rays and the like.

  Furthermore, it will be appreciated that the wavefront 2100 can be represented by a relatively small number of point sources and can be limited to a relatively small spatial region. In such a case, the detection of the intensity characteristics of the plurality of converted wavefronts with different amplitudes can be performed by a detector composed of a single detection pixel or several detection pixels. Further, an output for displaying at least one or preferably both of the phase and amplitude of the wavefront to be analyzed is given by a direct method using a computer 2136.

  According to an embodiment of the present invention, the plurality of different amplitude changes 2110, 2112 and 2114, preferably a spatial amplitude change, can be accomplished by processing a time-varying spatial amplitude change into a portion of the converted wavefront 2108.

  According to a preferred embodiment of the present invention, the plurality of different amplitude changes 2110, 2112 and 2114 can be accomplished by processing a spatially uniform time-varying spatial amplitude change into a portion of the converted wavefront 2108.

  According to an embodiment of the present invention, each of the wavefront 2100 and the converted wavefront 2108 is composed of a plurality of different wavelength components. In this case, the plurality of different spatial amplitude changes are performed by performing amplitude change processing on each of the plurality of different wavelength components of the converted wavefront. The amplitude change may be spatially different, or the amplitude may be attenuated differently for each different wavelength component.

  According to another embodiment of the present invention, each of the wavefront 2100 and the converted wavefront 2108 is composed of a plurality of different polarization components. In such a case, the plurality of different spatial amplitude changes are performed by performing an amplitude change process on each of the plurality of different polarization components of the converted wavefront. The amplitude change may be spatially different, or the amplitude may be attenuated differently for different polarization components.

According to another embodiment of the present invention, the transform 2106 processed to the wavefront 2100 is a Fourier transform, and the plurality of different spatial amplitude changes are made up of at least three different amplitude changes to form one of the converted wavefronts 2108. The plurality of intensity maps 2130, 2132 and 2134 are composed of at least three intensity maps. In such a case, the function of acquiring the output for displaying the amplitude and phase of the wavefront to be analyzed using the plurality of intensity maps includes:
A function of representing the wavefront 2100 to be analyzed as a first complex function having the same amplitude and phase as the wavefront and amplitude of the wavefront to be analyzed;
The ability to represent the intensity map as a function of the first function and a spatial function that determines the spatially uniform time-varying spatial amplitude change;
The ability to limit the second complex function having an absolute value and phase as a convolution of the first complex function and a Fourier transform of the spatial function determining the spatially homogeneous time-varying spatial amplitude attenuation;
The plurality of intensity maps;
The amplitude of the wavefront to be analyzed,
The absolute value of the second complex function,
The difference between the phase of the wavefront to be analyzed and the phase of the second complex function, and the known amplitude attenuation caused by one of the at least three different amplitude changes to which one of the at least three intensity maps respectively corresponds. A function expressed as a third function of
A function of solving the third function to obtain the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the phase between the phase of the wavefront to be analyzed and the phase of the second complex function;
Analysis by adding the phase of the second complex function to the difference between the phase of the wavefront to be analyzed and the phase of the second complex function; A function to acquire the phase of the target wavefront is included.

  Reference is now made to FIG. 21B, which is a partially pictorial simplified partial block diagram illustrating a wavefront analysis system suitable for performing the functions of FIG. 21A in accordance with a preferred embodiment of the present invention. As shown in FIG. 21B, the wavefront designated here 2150 is focused by a lens 2152 onto an amplitude attenuator 2154 that is preferably located in the focal plane of the lens 2152. The amplitude attenuator 2154 produces an amplitude change, such as amplitude attenuation, and the attenuator can be, for example, a spatial light modulator or a series of different partially transparent objects.

  A second lens 2156 is disposed on a detector such as a CCD detector to form an image of the wavefront 2156. The second lens 2156 is preferably arranged so that the detector 2158 is within its focal plane. The output of the detector 2158 is preferably supplied to a data storage processing circuit 2160 that performs the function C described above with reference to FIG. 21A.

  Reference is now made to FIG. 22 which is a partially schematic and partially pictorial illustration illustrating a surface mapping system using the functions and structures of FIGS. 21A and 21B. As shown in FIG. 22, a beam of radiation, such as light or acoustic energy, on a beam splitter 2204 that reflects at least a portion of the radiation from a radiation source 2200, optionally through a beam expander 2202, onto a surface 2206 to be examined. Supplied to. The radiation reflected from the inspected surface is a surface mapped wavefront, the wavefront having amplitude and phase, and including information about the surface 2206. At least a portion of the radiation incident on the surface 2206 is reflected from the surface 2206, propagates through the beam splitter 2204, and is preferably disposed on the imaging surface of the radiation source 2200 through the focusing lens 2208. Focused onto an amplitude attenuator 2210.

  The amplitude attenuator 2210 may be, for example, a spatial light modulator or a series of different partially transparent non-spatial homogeneous objects. The amplitude attenuator 2210 can be configured to reflect a substantial portion of the radiation focused on the attenuator. Alternatively, the amplitude attenuator 2210 can be configured such that a substantial portion of the radiation focused on the attenuator is propagated through the attenuator.

  A second lens 2212 is arranged to image the surface 2206 onto a detector 2214 such as a CCD detector. This second lens 2212 is preferably arranged so that the detector 2214 is within its focal plane. The output of the detector 2214 taking the set of intensity maps indicated by reference numeral 2215 as an example is preferably supplied to the data storage processing circuit 2216 performing the function C described above with reference to FIG. It is preferable to provide an output that displays at least one of the phase and amplitude, or preferably both. This output is preferably further processed to obtain information about the surface 2206, such as structural changes and reflectivity of the surface.

  According to a preferred embodiment of the present invention, the radiation beam supplied from the radiation source 2200 has a narrow wavelength band having a constant center wavelength, and the phase of the radiation reflected from the surface 2206 is defined as a structural change in the surface 2206. The proportionality is based on a ratio that is an inverse linear function of the center wavelength of the radiation.

According to one embodiment of the present invention, it has at least two narrow wavelength band centered at different wavelengths as shown in the radiation source 2200, respectively radiation beam supplied code lambda _{1 from,} · · · lambda _n. In such a case, each wavelength lambda ₁ radiation is reflected from the surface 2206 _has at least two wavelength components centered · · · lambda _n.

At least two displays are obtained for the phase of the surface mapped wavefront. Each of these displays corresponds to a different wavelength component of the reflected radiation. These at least two display, the wavelength lambda ₁ that value of the mapping at a given spatial location is different the numerical mapping at different spatial locations in said surface in said _plane, the maximum wavelength of the · · · lambda _n min If it does, it will be merged substantially by avoiding ambiguity in the map known as 2π ambiguity, allowing for enhanced mapping of the surface 2206. If the difference between the value of the mapping at different locations is smaller than the product of multiplication of all wavelengths, the wavelength lambda _1, the ambiguity is removed by appropriate selection of the · · · lambda _n.

  In a preferred embodiment of the present invention, the amplitude attenuator 2210 performs a plurality of different spatial amplitude change processes on the radiation wavefront reflected from the surface 2206 and Fourier transformed by the lens 2208. The processing of the plurality of different spatial amplitude changes provides a converted wavefront subjected to the plurality of different amplitude changes, which are subsequently detected by detector 2214.

  According to yet another preferred embodiment of the present invention, at least three different spatial amplitude changes are processed by amplitude attenuator 2210 to generate at least three different intensity maps 2215. The at least three intensity maps are used by the data storage processing circuit 2216 to obtain an output that displays at least one or preferably both of the phase and amplitude of the surface mapping wavefront. In this case, the data storage processing circuit 2216 performs the function C described above with reference to FIG. 21A when the wavefront to be analyzed (FIG. 21A) is a surface mapped wavefront.

  Further in accordance with a preferred embodiment of the present invention, the radiation beam supplied from radiation source 2200 is comprised of a plurality of different wavelength components, thereby in the converted wavefront impinging on the surface mapping wavefront and subsequently on the amplitude attenuator 2210. Gives a plurality of wavelength components. In such a case, the amplitude attenuator may be an object whose reflection or propagation is spatially changed. Such a spatial change of the amplitude attenuator generates a different spatial amplitude change for each of the wavelength components, thereby providing a converted wavefront that has undergone a plurality of different amplitude changes that are subsequently detected by detector 2214. It will be appreciated that the amplitude attenuation generated by the amplitude attenuator 2210 may be different for each of the different wavelength components.

  According to an embodiment of the invention, the surface 2206 is the surface of the medium on which information is encoded in the medium by selecting the height of the medium at each of various different locations on the medium. In such a case, information encoded on the medium is acquired using the display about the amplitude and phase of the surface mapping wavefront provided by the data storage processing circuit 2216.

  It will be appreciated that other processes such as those described above with reference to FIGS. 16-20 can be performed according to the method of the present invention in which amplitude attenuation is performed instead of phase manipulation. Further, it will be appreciated that all of the processing described above with reference to FIGS. 15-20 can be performed according to the method of the present invention in which both amplitude attenuation and phase manipulation are performed.

  It will be appreciated by those skilled in the art that the present invention is not limited to the scope shown and described. The present invention includes not only combinations and partial combinations of the features described above, but also modifications and variations of those features not found in the prior art that those skilled in the art will appreciate upon reading the above disclosure.

Claims (43)

Obtaining a plurality of converted wavefronts having undergone different phase changes from an analysis target wavefront having amplitude and phase , wherein each converted wavefront comprises a spatial portion that has received one of a plurality of different phase changes. The plurality of different phase changes change over time; and
Obtaining a plurality of intensity maps of a plurality of converted wavefronts subjected to the phase change;
Using the plurality of intensity maps to obtain an output indicating the amplitude and phase of the wavefront to be analyzed. The step of using comprises using the plurality of intensity maps to obtain an output that at least indicates the phase of the wavefront to be analyzed;
To obtain the output, combine the plurality of intensity maps into a second plurality of combined intensity maps that are less than the first plurality of intensity maps, and the second plurality of combined maps. Obtaining at least an output indicating the phase of the wavefront to be analyzed from each of the intensity maps;
The wavefront analysis method according to claim 1, further comprising providing at least a phase highlighting of the wavefront to be analyzed by combining the outputs. The step of using comprises using the plurality of intensity maps to obtain an output that at least indicates the phase of the wavefront to be analyzed;
To get the output:
Representing the plurality of intensity maps as a function of the amplitude of the wavefront to be analyzed, the phase of the wavefront to be analyzed, and a phase change function characterizing a plurality of converted wavefronts that have undergone the different phase changes;
A complex function of the amplitude of the wavefront to be analyzed, the phase of the wavefront to be analyzed, and the phase change function characterizing the plurality of converted wavefronts that have undergone the different phase changes, wherein the plurality of intensity maps Defining a complex function characterized by the intensity at each position being primarily a function of the value of the complex function at the position and the amplitude and phase of the wavefront to be analyzed at the position;
The wavefront analysis according to claim 1, wherein the complex function is expressed as a function of the plurality of intensity maps, and the plurality of values for the phase are determined by using the complex function expressed as a function of the plurality of intensity maps. Method. The step of using is
The wavefront analysis method according to claim 1, further comprising: using the plurality of intensity maps to obtain an output of at least a second class instruction of the phase of the wavefront to be analyzed. The method according to claim 1, wherein the wavefront to be analyzed is a surface mapping wavefront obtained by reflecting radiation from a surface. The method according to claim 1, wherein the analysis target wavefront is a target investigation wavefront obtained by transmitting radiation through an object. The wavefront to be analyzed is a spectral analysis wavefront obtained by impinging radiation on an object;
The method according to any of claims 1 to 4, further comprising using the output indicative of the amplitude and phase to obtain an output indicative of the spectral content of the radiation. The wavefront to be analyzed is a stored data retrieval wavefront obtained by reflecting radiation from a medium having information encoded by selecting the height of the medium at each of a plurality of different locations on the medium;
The method according to claim 1, further comprising using the output indicating the amplitude and phase to obtain the information. The method according to claim 1, wherein the converted wavefront subjected to the different phase change is obtained by interference of the wavefront to be analyzed along a common optical path. The process of obtaining a plurality of converted wavefronts subjected to different phase changes is as follows:
Obtaining one transformed wavefront by applying one transformation to the wavefront to be analyzed;
Obtaining a plurality of converted wavefronts that have undergone different phase changes by applying a plurality of different phase changes to the converted wavefront. The several different that the phase change The method of claim 10 caused by applying the position phase change to at least one of a portion of a part with the analyzed wavefront of the conversion wavefront. The process of obtaining a plurality of converted wavefronts subjected to different phase changes is as follows:
Obtaining one transformed wavefront by applying a Fourier transform to the wavefront to be analyzed, and obtaining a plurality of transformed wavefronts subjected to different phase changes by applying a plurality of different phase changes to the transformed wavefront And at least one of
Obtaining a plurality of wavefronts that have undergone different phase changes by applying a plurality of different phase changes to the wavefront to be analyzed;
Obtaining a plurality of converted wavefronts subjected to different phase changes by applying a Fourier transform to the plurality of wavefronts subjected to the different phase changes, and
The several different that the phase change is brought about by applying a phase change to at least one of a portion of the analysis target wavefront and part of said conversion wavefront,
The several different that the phase change comprises at least three different phase changes,
The plurality of intensity maps includes at least three intensity maps;
Using the plurality of intensity maps to obtain an output indicative of at least one of the amplitude and phase of the wavefront to be analyzed;
Representing the wavefront to be analyzed as a first complex function having the same amplitude and phase as the amplitude and phase of the wavefront to be analyzed;
Said plurality of intensity maps, a first complex function, a step as a function of the spatial functions, to control the phase change,
A second complex function having an absolute value and phase, the steps of defining a first complex function, as a Fourier transform and, convolution integral of the spatial function governing said phase change,
Each of the plurality of intensity maps includes a difference between the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the phase of the wavefront to be analyzed and the phase of the second complex function. And representing as a third function of a known phase delay generated by one of the at least three different phase changes, each corresponding to one of the at least three intensity maps;
To obtain the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the difference between the phase of the wavefront to be analyzed and the phase of the second complex function. Solving the function of
Solving the second complex function to obtain the phase of the second complex function;
Obtaining the phase of the analysis target wavefront by adding the phase of the second complex function to a difference between the phase of the analysis target wavefront and the phase of the second complex function. Item 10. The method according to any one of Items 1 to 9. The method according to claim 11 , wherein the phase change is applied to a spatial center of at least one of the converted wavefront and the analysis wavefront. The analysis target wavefront has a plurality of different wavelength components, and the plurality of converted wavefronts subjected to the different phase changes were obtained by applying one transformation to the analysis target wavefront and the analysis target wavefront one conversion wavefronts, the relative at least one of the plurality of different wavelength components, the method according to any one of claims 1 to 13, obtainable by applying one of the phase change. The analysis target wavefront has a plurality of different polarization components, and the plurality of converted wavefronts subjected to the different phase changes are obtained by applying a single transformation to the analysis target wavefront and the analysis target wavefront. the method according to any one of claims 1 to 13, obtainable by applying one of the phase change for one conversion wavefronts, at least one polarization component different that is. Obtaining a plurality of intensity maps of a plurality of converted wavefronts subjected to the different phase changes,
The method according to any one of claims 1 to 15 including the step of applying a single transformation on a plurality of converted wave having received the different phase changes. Using the plurality of intensity maps to obtain an output indicative of at least one of the amplitude and phase of the wavefront to be analyzed;
Representing the plurality of intensity maps as at least one mathematical function of the amplitude and phase for which at least one of the wavefronts to be analyzed is unknown;
The method of any of claims 1,4～ 11 and 14 to 16 and a step of obtaining an output indicating at least one of the amplitude and phase by using the at least one mathematical function. Obtaining a plurality of converted wavefronts subjected to the different phase changes,
Obtaining one transformed wavefront by applying one transformation to the wavefront to be analyzed, and applying a plurality of different phase and amplitude changes to the transformed wavefront At least one of obtaining a converted wavefront;
Obtaining a plurality of converted wavefronts subjected to different phase and amplitude changes by applying a plurality of different phase and amplitude changes to the wavefront to be analyzed;
It claims 1-9 comprising obtaining a plurality of transformed wavefronts that received different phase and amplitude changes by applying the different phases and a plurality of conversion wavefronts one conversion to that received amplitude change, 11 and 14 The method in any one of -16 . The wavefront to be analyzed has at least two wavelength components;
The step of obtaining the plurality of intensity maps also divides the converted wavefront subjected to the phase change according to the at least two wavelength components to obtain at least two wavelength components of the converted wavefront subjected to the phase change. Obtaining at least two sets of intensity maps corresponding to different ones of the at least two wavelength components of the converted wavefront subjected to the phase change, and obtaining an output at least indicative of the phase of the wavefront to be analyzed Using the plurality of intensity maps for:
Obtaining an output indicative of the phase of the wavefront to be analyzed from each of the at least two sets of intensity maps;
19. A method according to any one of claims 1 to 18 , comprising combining the outputs to provide a 2π unambiguous highlight of the phase of the wavefront to be analyzed. The wavefront to be analyzed has at least one one-dimensional component;
Obtaining a converted wavefront subjected to the plurality of different phase changes,
Applying to the wavefront to be analyzed a one-dimensional Fourier transform made in a dimension perpendicular to the direction of propagation of the wavefront to be analyzed, thereby providing at least one converted wavefront of the dimension perpendicular to the direction of propagation. Obtaining a one-dimensional component;
Obtaining at least one one-dimensional component of the converted wavefront subjected to a plurality of different phase changes by applying a plurality of different phase changes to each of the at least one one-dimensional component;
It said plurality of intensity maps, claim 1～9,11～ 15 that is used to obtain an output indicating at least one of the amplitude and phase of the at least one one-dimensional component of the analyzed wavefront, 18 and 19 The method in any one of. The radiation is
Each having at least two narrow bands centered on different wavelengths,
Providing at least two wavelength components in the wavefront to be analyzed and at least two indications of the phase of the wavefront to be analyzed;
This avoids ambiguity in the mapping beyond the larger of the two different wavelengths with the two narrowband centers, allowing an enhanced mapping of the features of the impacted element that the radiation is colliding with. ,
7. A method according to claim 5 or 6, wherein the features include at least one of a surface, a thickness geometric change and a geometric change of the element. A wavefront converter for providing a plurality of converted wavefronts subjected to different phase changes from a wavefront to be analyzed having an amplitude and a phase, wherein each of the converted wavefronts receives one of a plurality of different phase changes. A wavefront converter having a portion, wherein the plurality of different phase changes change over time ;
An intensity map generator for providing a plurality of intensity maps of a plurality of converted wavefronts subjected to the phase change;
An intensity map utilization device that uses the plurality of intensity maps to obtain an output indicating the amplitude and phase of the wavefront to be analyzed. The intensity map utilization device is:
An intensity combiner that combines the plurality of intensity maps into a second plurality of combined intensity maps that is less than the first plurality of intensity maps;
An indication provider that at least provides an output indicative of the phase function of the wavefront to be analyzed from each of the second plurality of combined intensity maps;
The wavefront analysis apparatus according to claim 22 , further comprising: an enhancement instruction provider that combines the outputs to at least provide a phase highlighting of the wavefront to be analyzed. The intensity map utilization device is:
Intensity map representation representing the plurality of intensity maps as a function of the amplitude of the wavefront to be analyzed, the phase of the wavefront to be analyzed, and a phase change function characterizing the plurality of transformed wavefronts that have undergone the different phase changes. And
A complex function of the amplitude of the wavefront to be analyzed, the phase of the wavefront to be analyzed, and the phase change function characterizing the plurality of converted wavefronts that have undergone the different phase changes, wherein the plurality of intensity maps Complex function definition that defines a complex function characterized by the intensity at each position being primarily a function of the value of the complex function at the position and the amplitude and phase of the wavefront to be analyzed at the position And
A complex function expression representing the complex function as a function of the plurality of intensity maps;
The wavefront analyzer according to claim 22 , further comprising: a phase acquirer that obtains a plurality of values for the phase by using the complex function expressed as a function of the plurality of intensity maps. The wavefront analysis apparatus according to claim 22 , wherein the intensity map utilization unit uses the plurality of intensity maps to obtain an output of at least a second class instruction of the phase of the wavefront to be analyzed. The wavefront to be analyzed is a surface mapping wavefront;
The wavefront analyzer according to any one of claims 22 to 25 , further comprising a wavefront acquirer that obtains the surface mapping wavefront by reflecting radiation from a surface. The analysis target wavefront is a target survey wavefront,
The wavefront analyzer according to any one of claims 22 to 25 , further comprising a wavefront acquirer that obtains the target investigation wavefront by transmitting radiation through the object. The wavefront to be analyzed is a spectral analysis wavefront;
A wavefront acquirer for obtaining said spectral analysis wavefront by impinging radiation on an object;
The wavefront analyzer according to any one of claims 22 to 25 , further comprising: a phase and amplitude user that uses the output indicating the amplitude and phase to obtain an output indicating the spectral content of the radiation. The analysis target wavefront is a stored data retrieval wavefront,
A wavefront acquirer that obtains the stored data retrieval wavefront by reflecting radiation from the medium having information encoded by selecting a height of the medium at each of a plurality of different locations on the medium;
The wavefront analyzer according to any one of claims 22 to 25 , comprising: a phase and amplitude user that uses the output indicating the amplitude and phase in order to obtain the information. Said wavefront transformer, the different conversion wavefront subjected to the phase change, the wavefront analyzer according to any one of claims 22-29 to provide the interference of the analyte wavefront along a common optical path. The wavefront converter is
A transformation applicator that obtains one transformed wavefront by applying one transformation to the wavefront to be analyzed;
The wavefront analyzer according to any one of claims 22 to 30 , further comprising: a phase change applicator that obtains a plurality of converted wavefronts that have received different phase changes by applying a plurality of different phase changes to the converted wavefront. The several different that the phase change, the wavefront analyzer according to claim 31 caused by applying a phase change to a portion of at least one of a portion between said analyte wavefront of the conversion wavefront. The wavefront converter is
A conversion applicator that obtains one converted wavefront by applying Fourier transform to the wavefront to be analyzed, and a plurality of converted wavefronts that have undergone different phase changes by applying a plurality of different phase changes to the converted wavefront. A phase change applicator that obtains a plurality of wavefronts having different phase changes by applying a plurality of different phase changes to the wavefront to be analyzed,
A transformation applicator for obtaining a plurality of transformed wavefronts subjected to different phase changes by applying a Fourier transform to the plurality of wavefronts subjected to the different phase changes, and
The several different that the phase change is effected by a phase change, is applied to at least one of a portion of a part with the analyzed wavefront of the conversion wavefront,
The several different that the phase change comprises at least three different phase changes,
The plurality of intensity maps includes at least three intensity maps;
The intensity map utilization device is:
A wavefront representer that represents the wavefront to be analyzed as a first complex function having the same amplitude and phase as the amplitude and phase of the wavefront to be analyzed;
It said plurality of intensity maps, a first complex function, and spatial function governing said phase change, a first intensity map renderer expressed as a function of,
A second complex function having an absolute value and phase, and the first complex function, and complex function definer which defines as a Fourier transform and, convolution integral of the spatial function governing said phase change,
Each of the plurality of intensity maps includes a difference between the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the phase of the wavefront to be analyzed and the phase of the second complex function. A second intensity map representation that represents as a third function each of the known phase delays generated by one of the at least three different phase changes, each corresponding to one of the at least three intensity maps When,
To obtain the amplitude of the wavefront to be analyzed, the absolute value of the second complex function, and the difference between the phase of the wavefront to be analyzed and the phase of the second complex function. A first function solver that solves the function of
A second function solver for solving the second complex function to obtain the phase of the second complex function;
Adding a phase of the second complex function to a difference between the phase of the analysis target wavefront and the phase of the second complex function to obtain the phase of the analysis target wavefront; The wavefront analyzer according to any one of claims 22 to 30 . The phase change, the wavefront analyzer according to any one of claims 32 or 33 is applied to at least one of the spatial center of the analyzed wavefront and the conversion wavefront. It said plurality of conversion wavefront undergo different phase changes, claims 22 to include a plurality of wavefronts with at least time-varying phase that is changing a phase change function by the phase changer to be applied to the analyzed wavefront 30. The wavefront analyzer according to any one of 30 . The wavefront to be analyzed is
A plurality of different wavelength components, and the wavefront converter is at least one of the analysis wavefront and a conversion wavefront obtained by a conversion applicator that applies a conversion to the analysis wavefront. The wavefront analyzer according to any one of claims 22 to 34 , wherein a plurality of converted wavefronts subjected to the different phase changes are obtained by applying one phase change to a plurality of different wavelength components. The target wavefront has a plurality of different polarization components, and the wavefront transformer is a transform obtained by the target wavefront and a transform applicator that applies a transform to the target wavefront. The wavefront analyzer according to any one of claims 22 to 34 , which is obtained by applying one phase change to a plurality of different polarization components of at least one of the wavefronts . The intensity map generator is
The wavefront analyzer according to any one of claims 22 to 37 , further comprising a second conversion applicator that applies one conversion to the plurality of converted wavefronts that have undergone the different phase changes. The intensity map utilization device is:
An intensity map representer representing the plurality of intensity maps as at least one mathematical function of the amplitude and phase, at least one of the wavefronts of analysis being unknown;
Wavefront analyzer according to any one of claims 22, 25-32 and 35-38 including a function solver that using the at least one mathematical function to obtain an output indicating at least one of said amplitude and phase. The wavefront converter is
A conversion applicator that obtains one converted wavefront by applying one conversion to the wavefront to be analyzed, and a different phase and amplitude change by applying a plurality of different phase and amplitude changes to the converted wavefront A plurality of phase and amplitude change applicators for obtaining a plurality of converted wavefronts, or a plurality of phase and amplitude changes applied by applying a plurality of different phase and amplitude changes to the wavefront to be analyzed. A phase and amplitude change applicator to obtain a converted wavefront;
It claims 22-30 comprising conversion applier to obtain a plurality of conversion wavefront received a different phase and amplitude changes by applying the different phase and amplitude changes the received plurality of single conversion to convert wavefronts, 32 wavefront analyzer according to any one of and 36-38. The wavefront to be analyzed has at least two wavelength components;
The intensity map generator also obtains at least two wavelength components of the converted wavefront subjected to the phase change by dividing the converted wavefront subjected to the phase change according to the at least two wavelength components. A wavefront divider that obtains at least two sets of intensity maps corresponding to different ones of the at least two wavelength components of the converted wavefront subjected to the phase change, and the intensity map utilization unit includes the phase of the wavefront to be analyzed. an output indicative of, along with obtaining from each of said at least two sets of intensity maps, claim including a phase obtainer that gives the phase of the analyzed wavefront combining the output, 2 [pi ambiguity without enhanced instruction 22 40. The wavefront analyzer according to any of 40 . The wavefront to be analyzed has at least one one-dimensional component;
The wavefront converter is
Applying to the wavefront to be analyzed a one-dimensional Fourier transform made in a dimension perpendicular to the direction of propagation of the wavefront to be analyzed, thereby providing at least one converted wavefront of the dimension perpendicular to the direction of propagation. A transformation applicator for obtaining a one-dimensional component;
Applying a plurality of different phase changes to each of the at least one one-dimensional component to obtain at least one one-dimensional component of a plurality of converted wavefronts subjected to different phase changes; and
The intensity map utilization device obtains an output indicating at least one of the amplitude and phase of the at least one one-dimensional component of the wavefront to be analyzed. 22 to 30 , 32 to 34 , 36 to 37 , 40 42. The wavefront analyzer according to any one of 41 and 41 . The radiation has at least two narrow bands, each centered on a different wavelength, and provides at least two wavelength components in the wavefront to be analyzed and at least two indications of the phase of the wavefront to be analyzed. ,
This allows for an enhanced mapping of the characteristics of the impacted elements that the radiation is colliding by avoiding ambiguity in the mapping beyond the larger of the different wavelengths with the two narrowband centers. West,
The wavefront analyzer according to any one of claims 26 to 27 , wherein the feature includes at least one of a surface, a geometric change in thickness, and a geometric change in the element.

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