JP5529455B2 - Chemical filter and its packing body and reticle case - Google Patents
Chemical filter and its packing body and reticle case Download PDFInfo
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- JP5529455B2 JP5529455B2 JP2009177846A JP2009177846A JP5529455B2 JP 5529455 B2 JP5529455 B2 JP 5529455B2 JP 2009177846 A JP2009177846 A JP 2009177846A JP 2009177846 A JP2009177846 A JP 2009177846A JP 5529455 B2 JP5529455 B2 JP 5529455B2
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- adhesive tape
- sided adhesive
- breathable
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- 239000000126 substance Substances 0.000 title claims description 55
- 238000012856 packing Methods 0.000 title description 2
- 239000002390 adhesive tape Substances 0.000 claims description 29
- 239000003463 adsorbent Substances 0.000 claims description 24
- 239000004745 nonwoven fabric Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 5
- 229920002050 silicone resin Polymers 0.000 claims description 5
- 239000000470 constituent Substances 0.000 claims description 4
- 230000003014 reinforcing effect Effects 0.000 claims description 4
- 238000005192 partition Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 19
- 239000000853 adhesive Substances 0.000 description 15
- 230000001070 adhesive effect Effects 0.000 description 15
- 238000000034 method Methods 0.000 description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 5
- 239000003729 cation exchange resin Substances 0.000 description 5
- 239000000835 fiber Substances 0.000 description 5
- 239000003957 anion exchange resin Substances 0.000 description 4
- 238000011109 contamination Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 150000001336 alkenes Chemical class 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000012943 hotmelt Substances 0.000 description 3
- 238000010943 off-gassing Methods 0.000 description 3
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 3
- 229920006267 polyester film Polymers 0.000 description 3
- 229920001225 polyester resin Polymers 0.000 description 3
- 239000004645 polyester resin Substances 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000011162 core material Substances 0.000 description 2
- -1 etc. Chemical compound 0.000 description 2
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 2
- 238000000752 ionisation method Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 101000931462 Homo sapiens Protein FosB Proteins 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 102100020847 Protein FosB Human genes 0.000 description 1
- 235000002597 Solanum melongena Nutrition 0.000 description 1
- 244000061458 Solanum melongena Species 0.000 description 1
- 239000003522 acrylic cement Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Packages (AREA)
- Separation Of Gases By Adsorption (AREA)
Description
本発明は、接着固定方式のケミカルフィルタ及びその梱包体に関する。更には、前記ケミカルフィルタを用いて化学物質を除去する仕組みのレチクルケースに関する。 The present invention relates to an adhesive fixing type chemical filter and a package thereof. Furthermore, the present invention relates to a reticle case having a mechanism for removing chemical substances using the chemical filter.
レチクル保管ボックスやレチクル搬送ボックスのようなレチクルケースなどは、化学物質を除去するケミカルフィルタの設置が容易ではない。特に、工程の不具合を防ぐためにケミカルフィルタの材質、形状、設置場所、設置方法が厳しく制約されている。
化学物質を除去する材料は一般に吸着剤等が用いられるが、該吸着剤は発塵の要因となる可能性があるため、HEPAフィルタやULPAフィルタろ材のような通気性シートを成形加工した通気性袋体に封入したケミカルフィルタが用いられている。
一方、レチクルケースに該ケミカルフィルタを設置するためには、枠等の治具を用いた専用の設置スペースを設けるか、或いは、接着等により固定することが必要となる。しかしながら、前者は既工程運用中のレチクルケースには適用することができず、また、後者はケミカルフィルタとの接着強度に難があり、使用後、剥がした際に接着成分がレチクルケース表面に残って汚染源となるといった不具合があった。
In a reticle case such as a reticle storage box or a reticle transport box, it is not easy to install a chemical filter for removing chemical substances. In particular, the material, shape, installation location, and installation method of the chemical filter are severely restricted in order to prevent process failures.
Adsorbents are generally used as materials for removing chemical substances. However, since the adsorbents may cause dust generation, air permeability such as HEPA filters and ULPA filter media is molded and processed. A chemical filter sealed in a bag is used.
On the other hand, in order to install the chemical filter on the reticle case, it is necessary to provide a dedicated installation space using a jig such as a frame or to fix it by bonding or the like. However, the former cannot be applied to a reticle case that is already in operation, and the latter has difficulty in bonding strength with a chemical filter, and adhesive components remain on the reticle case surface when peeled off after use. There was a problem of becoming a pollution source.
本発明は、面方向、幅方向ともに均一で薄手のケミカルフィルタを容易に貼り付けるための仕組みと前記ケミカルフィルタを貼り付け設置したレチクルケースを提供することを目的とする。 It is an object of the present invention to provide a mechanism for easily attaching a thin chemical filter that is uniform in both the surface direction and the width direction, and a reticle case on which the chemical filter is attached.
本発明者等は、かかる要望に応えるべく鋭意検討の結果、通気性シートと粒状吸着剤からなるケミカルフィルタに両面接着テープを熱接着することにより両者が強固に固着することを見出し、本発明をなすに至った。
本発明のケミカルフィルタはかかる知見に基づきなされたもので、請求項１記載の通り、通気性シートで粒状吸着剤を挟持した板状ろ材を通気性袋体に収容してなるケミカルフィルタにおいて、前記通気性袋体は、表面に補強用不織布を有するＨＥＰＡフィルタ用ろ材またはＵＬＰＡフィルタ用ろ材であり、両面接着テープの一面を前記通気性袋体の表面の少なくとも対向する２辺に貼り、該両面接着テープの一面を該通気性袋体に熱接着し、両面接着テープの他面は、レチクルケース表面に接着され前記ケミカルフィルタを固定するために使用されることを特徴とする。
また、請求項２記載のケミカルフィルタは、請求項１記載のケミカルフィルタにおいて、前記通気性袋体は区画壁で仕切られた複数の区画室を備えることを特徴とする。
また、請求項３記載のケミカルフィルタは、請求項１または２記載のケミカルフィルタにおいて、前記両面接着テープの構成材が、シリコーン系樹脂を含まないことを特徴とする。
また、請求項４記載のケミカルフィルタは、請求項１乃至３の何れかに記載のケミカルフィルタにおいて、前記両面接着テープの熱接着は、通気性シートを熱接着させて前記通気性袋体を形成する際の加熱温度を利用して行われたものであることを特徴とする。
また、本発明のケミカルフィルタ梱包体は、請求項５に記載の通り、請求項１乃至４の何れかに記載のケミカルフィルタを密封化シートで脱気密封化したことを特徴とする。
また、本発明のレチクルケースは、請求項６に記載の通り、請求項１乃至４の何れかに記載のケミカルフィルタをレチクルケースの下方中央部に前記両面接着テープの他面で固定し、使用後の該ケミカルフィルタを取り外し可能としたことを特徴とする。
As a result of intensive studies to meet such demands, the present inventors have found that the double-sided adhesive tape is thermally bonded to a chemical filter composed of a breathable sheet and a granular adsorbent, thereby firmly fixing both of the present invention. It came to an eggplant.
Chemical filter of the present invention has been made based on such knowledge, as claimed in claim 1, wherein, in the chemical filter comprising accommodating the plate-shaped filter material which sandwiches particulate adsorbent breathable sheet breathable bag, the The breathable bag is a filter medium for HEPA filter or ULPA filter having a reinforcing nonwoven fabric on the surface, and one side of a double-sided adhesive tape is attached to at least two opposite sides of the surface of the breathable bag, and the double-sided adhesive One side of the tape is thermally bonded to the breathable bag, and the other side of the double-sided adhesive tape is bonded to the surface of the reticle case and used to fix the chemical filter .
The chemical filter according to claim 2 is the chemical filter according to claim 1, wherein the breathable bag body includes a plurality of compartments partitioned by a partition wall.
The chemical filter according to claim 3 is the chemical filter according to claim 1 or 2, wherein the constituent material of the double-sided adhesive tape does not contain a silicone-based resin.
Moreover, the chemical filter according to claim 4 is the chemical filter according to any one of claims 1 to 3, wherein the double-sided adhesive tape is thermally bonded by thermally bonding a breathable sheet to form the breathable bag body. It is performed using the heating temperature at the time of carrying out.
Moreover, the chemical filter package of the present invention is characterized in that, as described in claim 5, the chemical filter according to any one of claims 1 to 4 is deaerated and sealed with a sealing sheet.
Moreover, the reticle case of the present invention is used, as described in claim 6, wherein the chemical filter according to any one of claims 1 to 4 is fixed to the lower center portion of the reticle case with the other surface of the double-sided adhesive tape. The chemical filter later can be removed.
本発明によれば、ケミカルフィルタに両面接着テープを貼って備え付けたため、レチクルケースに格別の工夫をすることなく貼り付け設置することができる。
また、該ケミカルフィルタと該両面接着テープとを熱接着したため、両者間の接着強度が向上し、使用後、レチクルケースから剥がす際に、接着剤等の剥がし残りがなく除去できる。
また、前記ケミカルフィルタの化学物質除去性能が90%以上であるようにした場合、レチクルケースから発生する化学物質によるレチクルの汚染を防止することができる。
また、特に構成材である剥離ライナーは、通常、ポリエステル樹脂フィルムや紙などの表面にシリコーン系樹脂を塗布して剥離性を高めており、これが接着成分に移行することによって汚染源となるので、例えばオレフィン樹脂等の製膜により、両面接着テープの構成材が有害な汚染要因であるシリコーン系樹脂を含まないようにした場合、剥離性と低アウトガス性の両方を満足させることができる。
According to the present invention, since the double-sided adhesive tape is attached to the chemical filter, it can be attached and installed on the reticle case without any special contrivance.
In addition, since the chemical filter and the double-sided adhesive tape are thermally bonded, the adhesive strength between the two is improved, and the adhesive filter or the like can be removed without being peeled off when being peeled off from the reticle case after use.
Further, when the chemical filter has a chemical substance removal performance of 90% or more, the contamination of the reticle by the chemical substance generated from the reticle case can be prevented.
In particular, the release liner, which is a constituent material, usually has a silicone resin applied to the surface of a polyester resin film, paper, etc. to improve the peelability, and this becomes a source of contamination by shifting to an adhesive component. When the constituent material of the double-sided adhesive tape does not contain a silicone-based resin, which is a harmful contamination factor, by forming a film of olefin resin or the like, both peelability and low outgassing properties can be satisfied.
以下、本発明の接着式ケミカルフィルタを実施するための最良の形態について説明する。
吸着材を構成する通気性シートとしては、熱可塑性樹脂等の合成繊維からなる不織布が好ましく、例えば、乾式法、湿式法、スパンレース法、スパンボンド法、メルトブロー法等の方法により製造されるもの等が挙げられ、前記通気性シートは起毛を施されたものが特に好ましい。尚、通気性シートを構成する不織布に起毛が施されていると、起毛によって粒状吸着剤の散布時の分散性が向上し、また、粒状吸着剤と不織布の固着強度が増し、粒状吸着剤が空間的に接着され、除去対象となるガスとの接触がよくなるため、粒状吸着剤の除去効率が向上する。尚、前記不織布への粒状吸着剤の固定は粉末状ホットメルト樹脂による固定が好ましいが、不織布を熱融着繊維で構成したり、熱融着繊維を含ませて、この熱融着繊維で固定する等、固定手段は特に限定されるものではない。
Hereinafter, the best mode for carrying out the adhesive chemical filter of the present invention will be described.
The breathable sheet constituting the adsorbent is preferably a non-woven fabric made of synthetic fibers such as a thermoplastic resin, for example, produced by a method such as a dry method, a wet method, a spunlace method, a spunbond method, or a melt blow method. The air-permeable sheet is particularly preferably a brushed sheet. In addition, if the nonwoven fabric which comprises a breathable sheet is brushed, the dispersibility at the time of dispersion | distribution of a granular adsorbent is improved by brushing, and the adhering strength of a granular adsorbent and a nonwoven fabric increases, and a granular adsorbent becomes Since it is adhered spatially and the contact with the gas to be removed is improved, the removal efficiency of the particulate adsorbent is improved. The granular adsorbent is preferably fixed to the non-woven fabric by powdered hot melt resin. However, the non-woven fabric may be composed of heat-bonded fibers, or heat-bonded fibers may be included and fixed with the heat-bonded fibers. The fixing means is not particularly limited.
これら通気性シートで粒状吸着剤を挟持した吸着材を構成するには、有機ガス除去用粒状活性炭、酸性ガス除去用イオン交換体、アルカリガス除去用イオン交換体等を、前記通気性シートで挟持し、前記球状吸着剤の固定に使用した、粉末状ホットメルト樹脂や熱融着繊維等によって、前記シートを固定して、発生するガス量、ガス種等合わせて適切な大きさに裁断形成すればよい。尚、吸着材の大きさは、例えば、縦110mm×横15mm、厚み1.2mm等任意の大きさに形成することができる。 In order to construct an adsorbent in which a particulate adsorbent is sandwiched between these breathable sheets, an organic gas removing granular activated carbon, an acidic gas removing ion exchanger, an alkali gas removing ion exchanger, etc. are sandwiched between the breathable sheets. Then, the sheet is fixed with the powdered hot melt resin or heat-sealing fiber used for fixing the spherical adsorbent, and the gas generated, gas type, etc. are combined and cut into an appropriate size. That's fine. The adsorbent can be formed in any size, for example, 110 mm long × 15 mm wide and 1.2 mm thick.
前記吸着材としては、有機ガス用、酸性ガス用、アルカリ性ガス用のものを用いるのが好ましく、有機ガス用としては、粒状活性炭が挙げられ、特に、形状に制限はないが、水分率5％以下のものが好ましい。酸性ガス用としては、アニオン交換樹脂及びカチオン交換樹脂の併用使用とし、アニオン交換樹脂に対して、カチオン交換樹脂を20〜500質量％としたものが好ましい。アルカリ性ガス用としては、カチオン交換樹脂を用いることが好ましい。ここで、アニオン交換樹脂は粒径300〜1300μｍの重炭酸型陰イオン交換樹脂を、カチオン交換樹脂は粒径300〜1300μｍのＨ型陽イオン交換樹脂が用いられるが、特にこれに限定されるものではない。 As the adsorbent, those for organic gas, acid gas, and alkaline gas are preferably used. Examples of organic gas include granular activated carbon, and the shape is not particularly limited, but the moisture content is 5%. The following are preferred. For acid gas, an anion exchange resin and a cation exchange resin are used in combination, and the cation exchange resin is preferably 20 to 500% by mass with respect to the anion exchange resin. It is preferable to use a cation exchange resin for the alkaline gas. Here, the anion exchange resin is a bicarbonate type anion exchange resin having a particle size of 300 to 1300 μm, and the cation exchange resin is an H type cation exchange resin having a particle size of 300 to 1300 μm. is not.
前記通気性シートで粒状吸着剤を挟持した吸着材を収容するための通気性袋体を構成するシートとしては、圧損が低く、捕集効率も高く、ボロン、リン等を発生せず、弗酸等の酸性ガスに対する耐性を持ち、しかも長寿命のエアフィルタ用濾材等が挙げられ、ポリテトラフルオロエチレン多孔膜の少なくとも一方の面に補強用支持体層を積層して複合膜としたエアフィルタ用濾材等のHEPA用ろ材、ULPA用ろ材等の多孔膜の使用が好ましい。この場合、多孔膜の密面を外側に、粗面を内側に向けて重ねるようにするのが好ましい。 The sheet constituting the breathable bag body for containing the adsorbent sandwiching the particulate adsorbent with the breathable sheet has low pressure loss, high collection efficiency, no generation of boron, phosphorus, etc., and hydrofluoric acid For example, a filter medium for air filters that has resistance to acidic gases such as long-life, and is a composite film in which a reinforcing support layer is laminated on at least one surface of a polytetrafluoroethylene porous film. Use of a porous membrane such as a filter medium for HEPA such as a filter medium or a filter medium for ULPA is preferred. In this case, it is preferable to overlap the porous film with the dense surface facing outward and the rough surface facing inward.
前記通気性シートを袋体にする方法は特に制限はなく、２枚のシートを重ね合わせ、周囲をヒートシールなどによりシールしてもよく、或いは、１枚のシートを折り返して重ね合わせたものの周囲をヒートシールなどによりシールするようにしてもよい。
前記通気性袋体は、例えば、ヒートシールによって、区画壁で仕切られた複数の区画室を備えるようにしてもよい。
The method for forming the air-permeable sheet into a bag body is not particularly limited, and two sheets may be overlapped and the periphery may be sealed by heat sealing or the like, or the periphery of one sheet folded and overlapped May be sealed by heat sealing or the like.
For example, the air-permeable bag body may include a plurality of compartments partitioned by compartment walls by heat sealing.
HEPA・ULPA用ろ材の補強用不織布は表面の粗さにより、両面接着テープなどの接着剤との相性がよくないため接着強度が弱くて、そのままレチクルケースの表面などに貼ると、剥すときに接着剤がレチクルケース側に残ってしまう。これを防ぐために、本発明では、両面テープをHEPA・ULPA用ろ材の不織布の表面に貼り、熱接着することにより接着強度を強くした。 The non-woven fabric for reinforcing filter media for HEPA / ULPA is not compatible with adhesives such as double-sided adhesive tape due to the roughness of the surface, so the adhesive strength is weak. The agent remains on the reticle case side. In order to prevent this, in the present invention, a double-sided tape is applied to the surface of the nonwoven fabric of the filter medium for HEPA / ULPA and thermally bonded to increase the adhesive strength.
両面接着テープは、接着成分としてアクリル樹脂系やゴム系の材料を用い、必要に応じて芯材として不織布やポリエステルフィルムなどを用いて補強し、表裏両面の接着性を達成する。特に、発塵防止を考慮する場合には、繊維素材により発塵汚染源となる不織布を用いず、ポリエステルフィルムを用いるとよい。さらに、接着剤の両面に剥離性の良い剥離ライナーを設けることにより、使用時まで接着性を保護する。この剥離ライナーは、ポリエステルフィルムや不織布などの表面に、剥離性を向上する目的でシリコーン系樹脂膜やオレフィン膜などを設けたものを用いることができる。特に、低アウトガス性を考慮する場合には、接着剤に移行することにより汚染源となるシリコーン系樹脂を用いず、オレフィン系の製膜を施したものを用いるとよい。 The double-sided adhesive tape uses an acrylic resin-based or rubber-based material as an adhesive component and reinforces with a non-woven fabric or a polyester film as a core material as necessary to achieve adhesiveness on both sides. In particular, when considering prevention of dust generation, it is preferable to use a polyester film without using a nonwoven fabric which is a source of dust generation due to the fiber material. Furthermore, by providing release liners with good peelability on both sides of the adhesive, the adhesiveness is protected until use. As this release liner, a surface provided with a silicone resin film, an olefin film or the like can be used on the surface of a polyester film or a nonwoven fabric for the purpose of improving the peelability. In particular, when considering low outgassing properties, it is preferable to use an olefin-based film without using a silicone-based resin that becomes a contamination source by shifting to an adhesive.
両面接着テープの貼る位置と形状は特に限定はないが、接着剤からの発ガスなどを考慮してなるべく使用量は少ないのが好ましい。また、レチクルのロード作業に不具合を起こさない形状が好ましい。従って、例えば、図１に示すように、レチクルケース２０のドア側フロント方向にＨ字型に10mm巾の両面接着テープ１０を貼る態様等が挙げられる。尚、図１中、１はケミカルフィルタを示し、板状ろ材２を収容した通気性袋体３が４つの区画室３ａ，３ａ，３ａ，３ａに区画形成され、各区画室３ａのそれぞれに板状ろ材２が収容されている。図１に示すものは、通気性袋体を形成する際のヒートシールに際しての加熱温度を利用して、前記両面接着テープ１０と前記通気性袋体３を熱接着するようにしたものである。 The position and shape of the double-sided adhesive tape are not particularly limited, but it is preferable that the amount used is as small as possible in consideration of gas generation from the adhesive. Further, a shape that does not cause a problem in the loading operation of the reticle is preferable. Therefore, for example, as shown in FIG. 1, there is a mode in which a double-sided adhesive tape 10 having a width of 10 mm is pasted in an H shape in the door-side front direction of the reticle case 20. In FIG. 1, reference numeral 1 denotes a chemical filter, and a breathable bag 3 containing a plate-like filter medium 2 is partitioned into four compartments 3a, 3a, 3a, 3a, and each compartment 3a has a plate shape. The filter medium 2 is accommodated. 1 is one in which the double-sided adhesive tape 10 and the air-permeable bag body 3 are thermally bonded using the heating temperature at the time of heat sealing when forming the air-permeable bag body.
以下、本発明の具体的な実施例を説明する。本実施例は、本発明のケミカルフィルタをレチクルケースに設置した例を示すものである。
まず、粒状吸着材を有機繊維製不織布からなる通気性シートで挟持して、粉末状ホット
メルト樹脂で通気性シートと有機ガス用粒状吸着剤（粒状活性炭、目付500g/m2）を固定した吸着シートを得て、これを裁断し、縦110mm×横15mm×厚み1.2mmの吸着材を得た。
上記吸着材を、ULPA用ろ材（PET製不織布とPTFE膜を交互積層したもの）からなる袋体に収容した。尚、この袋体は、粗面を内側にして２枚のULPA用ろ材（1枚に難燃剤や可塑剤などアウトガスとなるものを少なくした芯材のないタイプの０．１５ｍｍアクリル接着剤層の両面に０．０７５ｍｍの剥離ライナーを有する０．３０ｍｍの両面接着テープをＨ字型に貼った状態）を重ね合わせ、周囲を加熱温度１８０℃で熱接着するとともに３本の区画壁を設け、４個の区画室を設け、各区画室に前記吸着材を、それぞれ１つ宛収容させてケミカルフィルタを作成した。
本実施例では、前記２枚のULPA用ろ材を袋体にする際の熱接着時に、その加熱温度を利用して前記両面接着テープを前記ULPA用ろ材に熱接着するようにした。
Hereinafter, specific examples of the present invention will be described. In this example, the chemical filter of the present invention is installed in a reticle case.
First, an adsorbent in which a granular adsorbent is sandwiched between breathable sheets made of organic fiber non-woven fabric, and the breathable sheet and granular adsorbent for organic gas (granular activated carbon, basis weight 500 g / m 2 ) are fixed with a powdered hot melt resin. A sheet was obtained and cut to obtain an adsorbent having a length of 110 mm × width of 15 mm × thickness of 1.2 mm.
The adsorbent was housed in a bag made of a ULPA filter medium (a laminate of PET non-woven fabric and PTFE membranes alternately laminated). This bag body is composed of two ULPA filter media with a rough surface on the inside (a 0.15 mm acrylic adhesive layer of a type without a core material that reduces outgassing such as flame retardant and plasticizer on one sheet) A state in which a 0.30 mm double-sided adhesive tape having a 0.075 mm release liner on both sides is attached to an H-shape, and the surroundings are thermally bonded at a heating temperature of 180 ° C. and three partition walls are provided. A plurality of compartments were provided, and a chemical filter was prepared by accommodating one adsorbent in each compartment.
In this example, the double-sided adhesive tape was thermally bonded to the ULPA filter medium by using the heating temperature at the time of thermal bonding when the two ULPA filter media were formed into a bag.
（実施例１）
両面接着テープの通気性袋体への接着は、熱接着で両面接着テープを固定した。このとき、両面接着テープの剥離ライナーは、ポリエステル樹脂フィルムにオレフィン製膜を施した、シリコーン系樹脂を用いないものとした。
Example 1
Adhesion of the double-sided adhesive tape to the breathable bag was fixed by thermal adhesion. At this time, the release liner of the double-sided adhesive tape did not use a silicone resin in which an olefin film was formed on a polyester resin film.
（実施例２）
両面接着テープの通気性袋体への接着は、熱接着で両面接着テープを固定した。このとき、両面接着テープの剥離ライナーは、ポリエステル樹脂フィルムにシリコーン系樹脂製膜を施したものとした。
(Example 2)
Adhesion of the double-sided adhesive tape to the breathable bag was fixed by thermal adhesion. At this time, the release liner of the double-sided adhesive tape was obtained by applying a silicone resin film to a polyester resin film.
（比較例１）
両面接着テープの通気性袋体への接着は、熱接着せずに両面接着テープを貼り付けた。
(Comparative Example 1)
Adhesion of the double-sided adhesive tape to the breathable bag body was performed by adhering the double-sided adhesive tape without thermal bonding.
（比較例２）
ケミカルフィルタを使用しなかった。
(Comparative Example 2)
No chemical filter was used.
接着性は、レチクルケースにケミカルフィルタを貼り付けたときの不具合（剥れや浮き）について目視にて確認した。 Adhesiveness was visually confirmed for defects (peeling and floating) when a chemical filter was attached to the reticle case.
剥離性は、レチクルケースからケミカルフィルタを剥がしたときに接着剤が該レチクルケースに残るか否かを目視にて確認し、残分がない場合を○とした。 The peelability was evaluated by visually confirming whether or not the adhesive remained in the reticle case when the chemical filter was peeled off from the reticle case.
ＴＯＣ除去率は、レチクルケース(内寸：207×196×50mm、容積：２リットル)のドア側にケミカルフィルタを接着設置し本発明の効果を確認した。即ち、ケミカルフィルタの設置前後の有機ガスをテナックス系の捕集剤に吸着凝集し、ガスクロマトグラフ質量分析法を用いて分析した。
具体的には、P&T(日本分析工業製JHS-100A)付のGC-MS(日立製M-9000)を用い、下記の条件で発ガス分析を行った。
＜ガスクロマトグラフ分析条件＞
カラム：J&WキャピラリカラムDB-5MS(長さ30m、内径0.25mm)
カラム温度：40℃、3分ホールド
40〜220℃、20分(昇温速度： 9℃/分)
220〜300℃、8分(昇温速度：10℃/分)
300℃、3分ホールド
注入口温度：250℃
キャリアガス：He 1.5ml/min
スプリット比：1：10
＜質量分析計条件＞
イオン化法：EI(エレクトロンイオン化法)
検出器（3DQ）温度：250℃
フォトマルチプライア：350V
＜P&T条件＞
吸着管パージ温度：230℃
コールドトラップ温度：−60℃
パージガス流量：He 50ml/min
吸着管パージ時間：15分
The TOC removal rate was confirmed by attaching a chemical filter to the door side of a reticle case (inner dimensions: 207 × 196 × 50 mm, volume: 2 liters) to confirm the effect of the present invention. That is, the organic gas before and after the installation of the chemical filter was adsorbed and aggregated on a Tenax-based collecting agent and analyzed using gas chromatography mass spectrometry.
Specifically, gas generation analysis was performed under the following conditions using a GC-MS (Hitachi M-9000) with P & T (Nippon Analytical Industries JHS-100A).
<Gas chromatographic analysis conditions>
Column: J & W capillary column DB-5MS (length 30m, inner diameter 0.25mm)
Column temperature: 40 ° C, hold for 3 minutes
40-220 ° C, 20 minutes (Temperature increase rate: 9 ° C / min)
220-300 ° C, 8 minutes (Temperature increase rate: 10 ° C / min)
300 ℃, 3 minutes hold inlet temperature: 250 ℃
Carrier gas: He 1.5ml / min
Split ratio: 1:10
<Mass spectrometer conditions>
Ionization method: EI (electron ionization method)
Detector (3DQ) temperature: 250 ℃
Photomultiplier: 350V
<P & T conditions>
Adsorption tube purge temperature: 230 ° C
Cold trap temperature: -60 ° C
Purge gas flow rate: He 50ml / min
Suction tube purge time: 15 minutes
表から明らかなとおり、本発明品によりレチクルケースから発生したＴＯＣを９０％以上除去できることが確認された。 As is apparent from the table, it was confirmed that 90% or more of the TOC generated from the reticle case can be removed by the product of the present invention.
本発明によれば、面方向、幅方向ともに均一で、薄手のシート状に形状付与が容易で、しかも吸着容量の大きなケミカルフィルタ及びその梱包体並びに前記ケミカルフィルタを設置したレチクルケースが得られ、また前記ケミカルフィルタをウェーハを保管するＦＯＵＰ、ＦＯＳＢなどの半導体用密閉容器にも適用でき、産業上の利用可能性がある。 According to the present invention, a chemical filter that is uniform in both the surface direction and the width direction, can be easily shaped into a thin sheet, and has a large adsorption capacity, and a packing case thereof, and a reticle case in which the chemical filter is installed, are obtained. The chemical filter can also be applied to semiconductor sealed containers such as FOUP and FOSB for storing wafers, and has industrial applicability.
１ ケミカルフィルタ
２ 板状ろ材
３ 通気性袋体
３ａ 区画室
１０ 両面接着テープ
２０ レチクルケース
DESCRIPTION OF SYMBOLS 1 Chemical filter 2 Plate-shaped filter medium 3 Breathable bag 3a Compartment room 10 Double-sided adhesive tape 20 Reticle case
Claims (6)
前記通気性袋体は、表面に補強用不織布を有するＨＥＰＡフィルタ用ろ材またはＵＬＰＡフィルタ用ろ材であり、
両面接着テープの一面を前記通気性袋体の表面の少なくとも対向する２辺に貼り、該両面接着テープの一面を該通気性袋体に熱接着し、
両面接着テープの他面は、レチクルケース表面に接着され前記ケミカルフィルタを固定するために使用されることを特徴とするケミカルフィルタ。 In a chemical filter comprising a plate-shaped filter medium sandwiched with a particulate adsorbent with a breathable sheet in a breathable bag body,
The breathable bag body is a filter medium for HEPA filter or ULPA filter having a reinforcing nonwoven fabric on the surface,
Affixing one side of the double-sided adhesive tape to at least two opposite sides of the surface of the breathable bag, thermally bonding one side of the double-sided adhesive tape to the breathable bag ,
The other side of the double-sided adhesive tape is adhered to the surface of the reticle case and used to fix the chemical filter.
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