JP5529035B2 - Detachable device, contact arm, and electronic component handling device - Google Patents

Description

The present invention, attachment apparatus for attaching and detaching the electronic component holding portions to contact arm to hold the electronic components, and to a contact arm and an electronic device handling apparatus having the same.

  In the manufacturing process of an electronic component such as a semiconductor integrated circuit element (hereinafter also referred to as DUT (Device Under Test)), the performance and function of the DUT are tested using an electronic component test apparatus.

  This electronic component testing apparatus includes a test head having a socket that is in electrical contact with the DUT, a tester that tests the DUT via the test head, and the DUT that is sequentially conveyed to the test head, and the DUT that has been tested is a test result. And a handler for classifying according to.

  In a handler of an electronic component test apparatus for a DUT (for example, a logic device) having a relatively short test time, a contact arm sucks and holds about 1 to 8 DUTs and simultaneously presses them against a socket.

  The contact arm has a device holding unit that holds the DUT by suction. In order to cope with a wide variety of DUTs, the device holding unit can be attached and detached from the contact arm. Further, the device holding portion is positioned with high accuracy on the contact arm by a positioning pin.

  When removing the device holding part attached to the contact arm, since the device holding part is firmly attached to the contact arm by the positioning pin, the device holding part must be pulled from the contact arm with a very strong force. For this reason, it takes a long time to remove the device holding unit, which hinders improvement in the operating rate of the electronic component testing apparatus.

An object of the present invention is to provide, attachment apparatus capable of achieving the operating rate improvement of electronic device test apparatus, and is to provide a contact arm and an electronic device handling apparatus having the same.

  According to the present invention, there is provided an attachment / detachment device for attaching / detaching an electronic component holding portion to / from a contact arm holding an electronic component, the holding means for holding the electronic component holding portion on the contact arm, and the holding means comprising the An attachment / detachment device is provided that includes separation means for separating the electronic component holding portion from the contact arm in conjunction with an operation of releasing the holding of the electronic component holding portion (see claim 1).

  Although not particularly limited in the above invention, the electronic component holding portion includes a plurality of positioning means for positioning the electronic component holding portion with respect to the contact arm, and the separating means has a plurality of contact portions that contact the electronic component holding portion. Preferably, the midpoints of the plurality of abutting portions and the midpoints of the plurality of positioning means substantially coincide (refer to claim 2).

  Although not particularly limited in the above invention, the electronic component holding portion includes a mounting portion having a groove on a side surface, a main body portion provided with the mounting portion on one main surface, and the other main surface of the main body portion. It is preferable that a flow path communicating with the suction portion is formed so as to penetrate through the mounting portion and the main body portion. Item 3).

  Although not particularly limited in the above invention, the holding means is provided on the contact arm so as to be slidable, and can be engaged with the groove. It is preferable to have a pressing part that presses (see claim 4).

  Although not particularly limited in the above invention, it is preferable to include an urging unit that urges the holding unit so that the holding unit holds the electronic component holding unit. ).

  Although not particularly limited in the above invention, the holding means is slidably provided on the contact arm, the separating means is rotatably supported by the contact arm, and the separating means is the holding means. It is preferable to press the electronic component holding part in a direction away from the contact arm by rotating with movement (see claim 6).

  Although not particularly limited in the above invention, the holding means is slidably provided on the contact arm, and the separating means is supported by the contact arm so as to be movable along the attaching / detaching direction of the electronic component holding portion. In addition, it is preferable that the separating unit presses the electronic component holding part in a direction away from the contact arm by linearly moving with the movement of the holding unit (see claim 7).

  According to this invention, the contact arm provided with the said attachment / detachment apparatus is provided (refer Claim 8).

  According to the present invention, an electronic component handling apparatus provided with the contact arm is provided (see claim 9).

  In the present invention, when the electronic component holding portion is removed from the contact arm, the separating means separates the electronic component holding portion from the contact arm along with the releasing operation of the holding means. Therefore, the electronic component holding part can be efficiently removed from the contact arm, and the operating rate of the electronic component testing apparatus is improved.

FIG. 1 is a schematic plan view showing an electronic component test apparatus according to a first embodiment of the present invention. FIG. 2 is a schematic cross-sectional view taken along the line II-II in FIG. FIG. 3 is a front view showing the holding unit in the first embodiment of the present invention. FIG. 4 is a front view showing a device holding unit in the first embodiment of the present invention. FIG. 5 is a top view of the device holding unit shown in FIG. FIG. 6 is a cross-sectional view of the attachment / detachment device according to the first embodiment of the present invention, and shows a state where the lever is at position C. 7 is a top view of the attachment / detachment device shown in FIG. FIG. 8 is a sectional view taken along line VIII-VIII in FIG. FIG. 9 is an enlarged view of a part IX in FIG. FIG. 10 is a cross-sectional view showing a state in which the holding head is attached to the attachment / detachment device in the first embodiment of the present invention, and is a view showing a state in which the lever is at the position B. FIG. 11 is a top view of the attachment / detachment device shown in FIG. FIG. 12 is a cross-sectional view of the attachment / detachment device according to the first embodiment of the present invention, and shows a state where the lever is at position A. FIG. 13 is a top view of the attachment / detachment device shown in FIG. FIG. 14 is a schematic plan view showing the positional relationship between the positioning pins and the contact blocks in the attachment / detachment device according to the first embodiment of the present invention. FIG. 15 is a cross-sectional view of the attachment / detachment device according to the second embodiment of the present invention. 16 is a top view of the attachment / detachment device shown in FIG. FIG. 17: is principal part sectional drawing of the attachment / detachment apparatus in 3rd Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Handler 200 ... Device pressing apparatus 401 ... Holding head 405 ... Positioning pin 500 ... Device holding part 510 ... Base 511 ... Positioning hole 520 ... Adsorption part 530 ... Head insertion part 531 ... Groove 600 ... Holding plate 630,640 ... Claw 650 ... Opening part 660,670 ... Pressing part 680 ... Lever 700 ... Abutting member 710,720 ... Abutting block
711, 721 ... Block body
712, 722 ... Rotating shaft

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<First Embodiment>
1 is a schematic plan view showing an electronic component testing apparatus according to a first embodiment of the present invention, FIG. 2 is a schematic cross-sectional view taken along the line II-II of FIG. 1, and FIG. 3 is a holding view according to the first embodiment of the present invention. It is a front view which shows a unit.

  The electronic component test apparatus 1 according to the first embodiment of the present invention is a test apparatus for testing a DUT such as a logic device that has a relatively short test time. As shown in FIGS. 1 and 2, the electronic component testing apparatus 1 includes a test head 3 having a socket 4 for making electrical contact with the DUT, a tester 5 for testing the DUT via the test head 3, and A handler 10 that sequentially transports the DUTs to the test head 3 and classifies the DUTs that have been tested according to the test results. The test head 3 and the tester 5 are electrically connected via a cable 6. ing.

  The test head 3 is disposed below the handler 10, and the DUT is pressed against the socket 4 of the test head 3 through the opening 12 formed in the base plate 11 of the handler 10.

  As shown in FIG. 1, the handler 10 includes stockers 111 to 113, a device supply device 120, a heat plate 130, buffers 140 and 150, a device pressing device 200, and a device classification device 160.

  In this handler 10, the device supply device 120 supplies the DUT from the supply stocker 111 to the device pressing device 200 via the heat plate 130 and the buffers 140 and 150, and the device pressing device 200 sends the DUT to the socket 4 of the test head 3. Press. After the tester 5 tests the DUT via the test head 3 in this state, the tested DUT is transferred from the device pressing device 200 to the device classification device 160 via the buffers 140 and 150 and classified according to the test result. Housed in the stocker 113.

  The supply stocker 111 stores a plurality of stacked trays that accommodate a large number of DUTs before the test. On the other hand, the empty stocker 112 stores a plurality of stacked trays that do not contain any DUT. The classification tray 113 stores a plurality of stacked trays containing tested DUTs. The classification trays 113 are respectively associated with predetermined test results, and all the trays stored in the same classification tray 113 contain DUTs having the same test results.

  Note that the two trays 113a shown in FIG. 1 are trays for storing DUTs with low-frequency test results, and are placed directly on the base frame 11 without being stored in the stocker.

  A tray transport device 115 for transporting the tray is provided above the stockers 111 to 113. The tray transfer device 115 moves the tray in which the DUT before the test is empty from the supply stocker 111 to the empty stocker 112, or moves the tray in which the DUT is empty from the empty stocker 112 to the classification stocker 113. .

  As shown in FIGS. 1 and 2, the device supply device 120 is supported by a pair of rails 121 installed on the base plate 11 along the X-axis direction, and supported by the pair of rails 121 so as to be movable in the X-axis direction. A movable rail 122, a movable head 123 supported by the movable rail 122 so as to be movable in the Y-axis direction, and two device holding portions 124 provided downward on the movable head 123. The two device holding portions 124 can be moved up and down independently of each other by an actuator (not shown) (that is, movable in the Z-axis direction). The device supply apparatus 120 has a range including the stockers 111 to 113, the heat plate 130, and the buffers 140 and 150 as an operable region. The number of device holding units 124 included in the device supply apparatus 120 is not particularly limited. For example, the device supply apparatus 120 may include four, eight, or sixteen device holding units 124.

  The heat plate 130 includes a metal plate 131 having a plurality of recesses 132 formed on the surface, and a heater (not shown) for heating the metal plate 131. The device supply apparatus 120 conveys the DUT before the test to the heat plate 130 and drops the DUT into the recess 132. When the DUT is heated to a predetermined temperature by the heat plate 130, the device supply device 120 holds the DUT again and moves it to the buffers 140 and 150.

  The first buffer 140 includes a rail 141 provided on the base plate 11 along the Y-axis direction, and two moving heads 142 and 143 provided on the rail 141 so as to be movable in the Y-axis direction. Yes. Two concave portions 144 are formed on the surfaces of the respective moving heads 142 and 143. The number of recesses 144 formed in one moving head 142, 143 is not particularly limited, and depends on the number of DUTs that can be tested simultaneously in electronic component testing apparatus 1 (hereinafter referred to as the number of simultaneous measurements). Can be set arbitrarily.

  Similarly, the second buffer 150 includes a rail 151 provided on the base plate 11 along the Y-axis direction, and two moving heads 152 and 153 provided on the rail 151 so as to be movable in the Y-axis direction. I have. Two concave portions 154 are formed on the surfaces of the moving heads 152 and 153. The number of recesses 154 formed in one moving head 152, 153 is not particularly limited, and can be arbitrarily set according to the number of simultaneous measurements.

  In any of the buffers 140 and 150, the first moving heads 142 and 152 and the second moving heads 143 and 153 can move independently of each other. When the DUT is conveyed by the device supply apparatus 120, the first moving heads 142 and 152 send the DUT to the device pressing apparatus 200. On the other hand, the second moving heads 143 and 153 convey the DUT after the test from the device pressing device 200 to the device classification device 160.

  The device pressing device 200 includes a rail 201 laid on the base plate 11 along the X-axis direction, two movable heads 202 and 203 supported by the rail 201 so as to be movable along the X-axis direction, and a movable head Two contact arms 300 attached to 202 and 203, respectively. The first movable head 202 and the second movable head 203 are movable independently of each other. Each contact arm 300 can be moved up and down by an actuator (not shown).

  In the device pressing apparatus 200, when the pre-test DUT is supplied by the first moving head 142 of the first buffer 140, the contact arm 300 attached to the first movable head 202 sucks and holds the DUT. Then, it is moved to the test head 3 and pressed against the socket 4. The DUT after this test is carried out to the device classification device 160 by the second moving head 143 of the first buffer 140.

  On the other hand, when the pre-test DUT is supplied by the first moving head 152 of the second buffer 150, the contact arm 300 attached to the second movable head 203 sucks and holds the DUT for testing. Move to head 3 and press against socket 4. The DUT after this test is carried out to the device classification device 160 by the second moving head 153 of the second buffer 150.

  Each contact arm 300 can simultaneously hold a number of DUTs corresponding to the number of simultaneous measurements. For example, when the number of simultaneous measurements is two as in this example, two device holding units 500 are provided in one contact arm 300, and two DUTs are simultaneously held by one contact arm 300. It is possible.

  As shown in FIG. 3, the contact arm 300 includes an arm main body 301 fixed to the movable heads 202 and 203 of the device pressing device 200, and a holding unit 400 attached to the lower end of the arm main body 400A.

  The holding unit 400 is detachably attached to the arm main body 301. By changing the number of the device holding units 500 and changing the pitch as the DUT type is switched, one contact arm can be obtained. 300 is compatible with a wide variety of DUTs. As shown in FIG. 3, the holding unit 400 includes a unit main body 410 and a holding head 401 provided at the tip of a rod 450 protruding from the unit main body 410.

  A guide hole 412 is formed on the upper surface of the unit main body 410 so as to correspond to the guide pins 402 provided in the arm main body 301. When the holding unit 400 is mounted on the arm main body 301, the holding unit 400 can be easily and accurately positioned with respect to the arm main body 301 by inserting the guide pins 402 into the guide holes 412. .

  Two through holes 411 are formed on the lower surface of the unit body 410. A rod 450 is inserted into each through hole 411 so as to be movable up and down. The rod 450 has a large-diameter portion 451 larger than the inner diameter of the through hole 411 at its upper end. Normally, the large diameter portion 451 is locked to the periphery of the through hole 411.

  Two diaphragm cylinders 440 are provided inside the unit main body 410. The pressing portion 441 of each diaphragm cylinder 440 is in contact with the upper end of the rod 450 and can press the holding head 401 with a predetermined pressing force via the rod 450.

  On the other hand, a holding head 401 is attached to the lower end of each rod 450. A heater 403 is embedded in each holding head 401, and the temperature of the DUT held by suction can be maintained. In addition, a temperature sensor 404 is embedded in each holding head 401, and ON / OFF control of the heater 403 can be performed based on the measurement result of the temperature sensor 404.

  Also, as shown in FIG. 3, each holding head 401 is equipped with a device holding unit 500 that directly contacts the DUT during holding. The device holding unit 500 is detachably attached to the holding head 401.

  4 is a front view showing the device holding unit in the first embodiment of the present invention, FIG. 5 is a top view of the device holding unit shown in FIG. 4, and FIG. 6 is a sectional view of the attachment / detachment device in the first embodiment of the present invention. 7 is a top view of the attachment / detachment device shown in FIG. 6, FIG. 8 is a sectional view taken along line VIII-VIII in FIG. 6, and FIG. 10 shows a state in which the holding head is attached to the attachment / detachment device in the first embodiment of the present invention. FIG. 11 is a cross-sectional view showing a state where the lever is at position B, FIG. 11 is a top view of the attachment / detachment device shown in FIG. 10, and FIG. 12 is a sectional view of the attachment / detachment device according to the first embodiment of the present invention. FIG. 13 is a top view of the attachment / detachment device shown in FIG. 12, and FIG. 14 is a schematic plan view showing the arrangement relationship between the positioning pins and the contact blocks in the attachment / detachment device of the first embodiment of the present invention. .

  As illustrated in FIGS. 4 and 5, the device holding unit 500 includes a base 510, a suction unit 520, and a head insertion unit 530. A passage 540 communicating with the passage of the holding head 401 passes through the base 510, the suction portion 520, and the head insertion portion 530.

  The adsorbing part 520 is a prismatic block, and the above-described flow path 540 is provided in the center thereof. In addition, a suction pad 521 (not shown) connected to a negative pressure source (not shown) via a flow path is provided below the suction part 520. When the suction pad 521 contacts the DUT, the DUT is held by the negative pressure in the flow path 540.

  The head insertion portion 530 is a columnar convex portion whose upper portion is chamfered, and is provided on the upper surface of the base 510. A groove 531 that can be engaged with a holding plate 600 described later is formed on the side surface of the head insertion portion 530. Further, the above-described flow path 540 is provided in the center of the head insertion portion 530.

  The base 510 is a plate that can come into contact with the bottom surface of the holding head 401, and as described above, the flow path 540 is provided in the center thereof. In addition, positioning holes 511a and 511b are provided on the upper surface of the base 510 at positions corresponding to positioning pins 405a and 405b described later.

  As shown in FIG. 8, an insertion hole 407 into which the head insertion part 530 of the device holding part 500 can be inserted is formed at the bottom of the holding head 401.

  As shown in FIGS. 6 and 7, the holding head 401 slides in the X direction to hold or release the device holding unit 500, and the holding plate 600 opens the device holding unit 500. Accordingly, contact blocks 710 and 720 that separate the holding head 401 and the device holding unit 500, a spring 800 that biases the holding plate 600 to be held at a fixed position, and a positioning that positions the device holding unit 500 at a predetermined position. Pins 405a and 405b.

  In the present embodiment, the holding plate 600 is supported inside the bottom of the holding head 401 so as to be slidable in the X direction, as shown in FIG. As shown in FIG. 7, the holding plate 600 is a substantially Y-shaped plate having first and second branch portions 610 and 620, and has a size through which the head insertion portion 530 of the device holding portion 500 can pass. The first and second pawls 630 and 640 engageable with the groove 531 of the device holding unit 500, and the first and second contact blocks 710 and 720 by the sliding movement of the holding plate 600. The first and second pressing portions 660 and 670 for pressing the lever and a lever 680 that allows the holding plate 600 to be slid from the outside.

  As shown in FIG. 7, the first claw 630 is provided at the tip of the first branch 610 and protrudes in a convex shape toward the inside. As shown in FIG. 9, the tip surfaces of the first and second claws 630 are inclined surfaces 631 whose upper sides are cut off, and can be engaged with the inner wall of the groove 531 formed in the head insertion portion 530 of the device holding portion 500. It has become. In FIG. 9, for convenience of explanation, the slope 631 and the groove 531 are illustrated as not in contact with each other, but actually, the slope 631 and the groove 531 are in contact with each other.

  The 2nd nail | claw 640 is also provided in the front-end | tip of the 2nd branch part 620, and protrudes in convex shape toward the inner side. Similar to the first claw 630, it has an inclined surface 641 at its tip that can be engaged with the inclined groove 531 of the head insertion portion 530.

  In addition, as shown in FIG. 7, the first branch portion 610 is formed with a slant portion 632 from the first claw 630 to the opening 650, and the first claw 630 is gradually formed by the sliding movement of the holding plate 600. And the groove 531 are engaged or separated. Similarly, the oblique portion 642 is formed in the second branch portion 620 from the first claw 640 to the opening 650.

  When the first and second claws 630 and 640 are engaged with the groove 531, the device holding unit 500 is supported by the holding plate 600 so as not to drop due to its own weight. Further, the thrust in the X direction due to the sliding movement of the holding plate 600 is converted into the Z direction by the inclined surfaces 631 and 641 and the inclined portions 632 and 642, and the device holding unit 500 is pushed upward. In this state, since the upper surface of the base 510 of the device holding unit 500 is in close contact with the bottom surface 401 a of the holding head 401, the upper limit of movement in the Z direction of the device holding unit 500 is regulated by the bottom surface 401 a of the holding head 401. Therefore, the device holding unit 500 is firmly held by the slopes 631 and 641 of the first and second claws 630 and 640 and the bottom surface 401 a of the holding head 401.

  As shown in FIG. 7, the opening 650 is a space surrounded by the first and second branch portions 610 and 620, and the outer diameter of the head insertion portion 530 does not interfere with the head insertion portion 530 of the device holding portion 500. Is also a large space. As shown in FIG. 11, the head insertion portion 530 of the device holding portion 500 is inserted into the insertion hole 407 of the holding head 401 by sliding the holding plate 600 so that the opening 650 overlaps the insertion hole 407. Is possible.

  As shown in FIGS. 6 and 7, the first and second pressing portions 660 and 670 are convex portions provided on the side surfaces of the first and second branch portions 610 and 620. It protrudes toward the outer side from the branch parts 610 and 620.

  The first pressing portion 660 can come into contact with the first contact block 710 by the sliding movement of the holding plate 600. The arrangement of the first pressing portions 660 in the X direction is determined relatively to the arrangement of the first claws 630, the openings 650, and the first contact blocks 710. That is, when the first claw 630 is engaged with the groove 531 as shown in FIG. 7 due to the sliding movement of the holding plate 600, the first pressing portion 660 and the first contact block 710 are separated. ing. Moreover, as shown in FIG. 11, immediately after the 1st nail | claw 660 and the groove | channel 531 isolate | separated, the 1st press part 660 and the 1st contact block 710 are not contact | abutting. On the other hand, as shown in FIGS. 12 and 13, when the holding plate 600 further slides, the first pressing portion 660 and the first contact block 710 come into contact with each other.

  The second pressing portion 670 can come into contact with the second contact block 720 by the sliding movement of the holding plate 600. The arrangement of the second pressing portion 670 in the X direction is the same as that of the first pressing portion 660 and is provided on the second branch portion 620 so as to be symmetric with respect to the first pressing portion 660. As a result, the first and second pressing portions 660 and 670 contact, separate from, or press the first and second contact blocks 710 and 720 substantially simultaneously.

  As shown in FIG. 6, the lever 680 is disposed at the end of the Y shape in the holding plate 600 and is exposed from the bottom of the holding head 401. Thereby, the slide operation of the holding plate 600 is possible from the outside of the contact arm 300. As shown in FIGS. 6, 10, and 12, the holding plate 600 slides by pushing the lever 680 toward the left.

  As shown in FIG. 7, the two springs 800 are provided inside the bottom portion of the holding head 401 so as to press the ends of the first and second branch portions 610 and 620. These springs 800 urge the holding plate 600 to the right in the figure so as to keep the first and second claws 630 and 640 and the groove 531 engaged. Thereby, it is possible to prevent the device holding unit 500 from being inadvertently detached from the contact arm 300. The spring 800 may be omitted. Further, when the lever 680 is at the position A, the holding plate 600 may hold the device holding unit 500.

As shown in FIG. 6, the positioning pin 405 includes a first pin 405a and a second pin 405b. As shown in FIG. 14, the midpoint of the first pin 405a and the second pin 405b and the midpoint of the first abutment block 710 and the second abutment block 720 substantially coincide with each other. ing. In other words, the midpoint _{M 0} shown in FIG. 14, the positioning pins 405a, to also at the midpoint of the 405 b, is also the center point of the contact blocks 710 and 720.

  On the other hand, as shown in FIG. 5, first and second positioning holes 511a and 511b are also provided on the upper surface of the base 510 of the device holding unit 500 at positions corresponding to the first and second pins 405a and 405b. It is done. The first positioning hole 511a is provided in the vicinity of the lower right corner of the base 510 in the figure, and the second positioning hole 511b is provided in the vicinity of the upper left corner of the base 510 in the figure.

  When the device holding unit 500 is mounted, the first and second pins 405a and 405b are inserted into the first and second positioning holes 511a and 511b, so that the device holding unit 500 is attached to the holding head 401. Positioning with high accuracy.

  As shown in FIG. 7, the first and second contact blocks 710 and 720 are disposed so as to be adjacent to the outside of the first and second branch portions 610 and 620 of the holding plate 600. The midpoints of the first and second contact blocks 710 and 720 substantially coincide with the midpoint of the first pin 405a and the second pin 405b as described above. This makes it possible to apply a force evenly to the pins 405a and 405b and the positioning holes 511a and 511b during separation.

  As shown in FIG. 6, the first contact block 710 includes a block main body 711 and a first rotation shaft 712. The bottom surface 715 of the block main body 711 is in contact with the base 510 of the device holding unit 500, and the side surface 714 can come into contact with the first pressing unit 660 when the holding plate 600 slides. The rotation shaft 712 supports the block body 711 so as to be rotatable at an eccentric position, and is fixed in the holding head 401 so as to protrude toward the first branch portion 610. When the first block main body 711 rotates rightward in the drawing around the rotation shaft 712, the lower right corner 713 of the block main body 711 is lowered and presses the base 510 of the device holding unit 500.

  Similar to the first contact block 710, the second contact block 720 includes a block body 721 and a rotation shaft 722, and is disposed adjacent to the second branch portion 620. Similar to the first contact block 710, the block main body 721 rotates about the rotation shaft 722 to press the base 510 of the device holding unit 500.

  As described above, the first and second pressing portions 660 and 670 press the first and second abutting blocks 710 and 720 substantially simultaneously, so that the first and second abutting portions are pressed. Blocks 710 and 720 also press the base 510 simultaneously.

  Next, a series of operations for attaching and detaching the device holding unit 500 will be described.

  In the state in which the device holding unit 500 is held by the holding head 401, as shown in FIGS. 6 and 7, the spring 800 biases the holding plate 600, so that the first and second claws 630, The state where 640 and the groove 531 are engaged is maintained.

  As shown in FIGS. 6, 10 and 12, when the lever 680 is pressed from position C to position A in the figure, the holding plate 600 slides to the left. When the lever 680 passes the position B, as shown in FIGS. 10 and 11, the first and second claws 630 and 640 and the groove 531 are separated, and the device holding unit 500 is in a releasable state.

  When the lever 680 slides further to the left from the position B, the first and second pressing portions 660 and 670 come into contact with the first and second contact blocks 710 and 720. When the lever 680 is further pressed to the left, as shown in FIGS. 12 and 13, the first and second pressing portions 660 and 670 press the first and second contact blocks 710 and 720, and the first and second contact blocks 710 and 720 are pressed. The second contact block rotates about the respective rotation shafts 712 and 722. By this rotation, the corner portions 713 and 723 of the first and second contact blocks 710 and 720 press the upper surface of the base 510 of the device holding unit 500 and push down the device holding unit 500.

  When the lever 680 is pressed to the position A, the first and second contact blocks 710 and 720 further push down the device holding unit 500, and the first and second positioning holes 511 a and 511 b of the base 510 and the holding head 401 are pressed. The first and second pins 405 a and 405 b provided on the bottom surface 401 a are separated from each other, and the device holding unit 500 is completely separated from the holding head 401.

  Next, an operation for attaching the device holding unit 500 will be described. Even when the device holding unit 500 is not attached, the first and second claws 630 and 640 are positioned above the insertion hole 407 as shown in FIG. Therefore, the lever 680 is pressed to the position B, and the opening 650 is overlapped with the insertion hole 407.

  From this state, the head insertion part 530 of the device holding part 500 is inserted into the insertion hole 407 of the holding head 401. At this time, by inserting the positioning pin 405 into the positioning hole 511 of the device holding unit 500, the device holding unit 500 is easily and accurately positioned with respect to the holding head 401.

  When the upper surface of the base 510 of the device holding unit 500 comes into contact with the bottom surface 401a of the holding head 500, the lever 680 is released. As a result, the holding plate 600 returns to the position shown in FIG. 6 by the bias of the spring 800, and the first and second claws 630 and 640 engage with the groove 531 to fix the device holding unit 500 to the holding head 401. The

<Second Embodiment>
15 is a cross-sectional view of the attachment / detachment device according to the second embodiment of the present invention, and FIG. 16 is a top view of the attachment / detachment device shown in FIG.

  An attachment / detachment device according to a second embodiment of the present invention will be described with reference to FIGS. 15 and 16. In addition, the same code | symbol is attached | subjected to the member same as 1st Embodiment, and the description is abbreviate | omitted. The difference of the configuration of the attachment / detachment device in the second embodiment from the first embodiment is the configuration of the contact member.

  The contact member 700 according to the second embodiment of the present invention includes first and second contact blocks 710 and 720 as shown in FIGS. 15 and 16. The first and second contact blocks 710 and 720 are provided on the upper surface of the base 510 of the device holding unit 500, and the first and second contact blocks 710 and 720 can be inserted into the bottom of the holding head 401. A block insertion hole (not shown) is provided. The first and second contact blocks 710 and 720 are both blocks having slopes 716 and 726, and the slopes 716 and 726 and the first and second pressing portions 660 and 670 can contact each other. Yes.

  When the device holding unit 500 is separated from the holding head 401, the holding plate 600 is slid and the first and second pressing portions 660 and 670 are inclined surfaces 716 and 716 of the first and second contact blocks 710 and 720, respectively. When 726 is pressed, the thrust in the X direction of the slide movement is converted into the Z direction by the slope, and the first and second contact blocks 710 and 720 are lowered. Thereby, the upper surface of the base 510 of the device holding unit 500 is pressed, and the device holding unit 500 is separated from the holding head 401.

  In addition, the relationship between the pressing portions 660 and 670 and the inclined surfaces 716 and 726 of the contact blocks 710 and 720 may be reversed, and the pressing portions 660 and 670 may be provided with inclined surfaces. Or you may provide a slope in both the press parts 660 and 670 and the contact blocks 710 and 720. FIG.

  The embodiment described above is described for facilitating the understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

For example, as shown in FIG. 17, the holding plate 600 is deformed so as to protrude downward as the slide moves, and the holding plate 600 presses the base 510 of the device holding unit 500, thereby holding the device holding unit 500. It may be separated from the head 401.

Claims (9)

An attachment / detachment device for attaching / detaching an electronic component holding part to a contact arm holding an electronic component,
Holding means for holding the electronic component holding portion on the contact arm;
Separating means for separating the electronic component holding unit from the contact arm in conjunction with an operation of releasing the holding of the electronic component holding unit by the holding unit;
A detachable apparatus comprising: A plurality of positioning means for positioning the electronic component holding part with respect to the contact arm;
The separating means includes a plurality of contact portions that contact the electronic component holding portion,
The attachment / detachment device according to claim 1, wherein a midpoint of the plurality of contact portions substantially coincides with a midpoint of the plurality of positioning means. The electronic component holder is
A mounting part having a groove on the side surface;
A main body provided with the mounting portion on one main surface;
A suction portion that is provided on the other main surface of the main body and sucks and holds the electronic component;
The attachment / detachment device according to claim 2, wherein a flow path communicating with the adsorption portion is formed so as to penetrate through the attachment portion and the main body portion. The holding means is
An engagement portion provided on the contact arm so as to be slidable and engageable with the groove;
A pressing part that presses the separating means in accordance with the movement of the engaging part;
The attachment / detachment device according to claim 3 which has.   The attachment / detachment device according to any one of claims 1 to 4, further comprising a biasing unit that biases the holding unit so that the holding unit holds the electronic component holding unit. The holding means is slidably provided on the contact arm,
The separating means is rotatably supported by the contact arm,
The attachment / detachment device according to any one of claims 1 to 5, wherein the separation unit presses the electronic component holding part in a direction away from the contact arm by rotating with the movement of the holding unit. The holding means is slidably provided on the contact arm,
The separating means is supported by the contact arm so as to be movable along the attaching / detaching direction of the electronic component holding portion,
The attachment / detachment device according to any one of claims 1 to 5, wherein the separation unit presses the electronic component holding part in a direction away from the contact arm by linearly moving with the movement of the holding unit.   The contact arm provided with the attachment / detachment apparatus in any one of Claims 1-7. An electronic component handling apparatus comprising the contact arm according to claim 8.

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