JP5518399B2 - Seismic isolation device - Google Patents

Description

  The present invention relates to a seismic isolation device that imparts seismic isolation performance to seismic isolation objects.

  Conventionally, a seismic isolation device is interposed between a base-isolated object (superstructure) such as a building and the substructure, and the natural frequency of the base-isolated object is shifted from the dominant period band of seismic motion to the long-period side, and the response acceleration In order to prevent damage to the seismic isolation object (by making the seismic isolation object seismic isolation) by reducing the size of the object.

  In addition, in this type of seismic isolation device (isolation device), for example, as disclosed in Patent Document 1, one of the opposing surfaces of the seismic isolation object (isolation object) and the lower structure below it is provided. A sliding plate provided, a support member having a base end attached to the other of the opposing surfaces and having a tip projecting toward the sliding plate, and being interposed between the tip of the supporting member and the sliding plate, the seismic isolation Rolling bearing members consisting of many small spheres that transmit the load of the object to the lower structure, ring-shaped friction materials that are provided on the outer periphery of the rolling bearing members and slidably contact the sliding plate, and obtain a reaction force on the support member There is a configuration including an urging means for urging and pressing the friction material toward the sliding plate. That is, the seismic isolation device includes a rolling support mechanism including a rolling support member and a support member that supports the load of the seismic isolation object and transmits the load to the lower structure, and a friction damper mechanism including a friction material and its biasing means. It is configured as a rigid sliding bearing that integrates

  In this seismic isolation device, since the load of the seismic isolation object is rigidly supported by the lower structure via the rolling support mechanism, the weight of the seismic isolation object adversely affects the biasing force of the friction material of the friction damper mechanism. The damping force by the friction damper mechanism can be adjusted to an appropriate value and maintained.

JP 2000-55117 A

  On the other hand, for example, semiconductor / electronic device manufacturing factories (precise environmental facilities that require a precise environment) exhibit seismic isolation performance in the event of an earthquake, as well as severe microscopic vibrations in the micron range even during normal operation due to microfabrication. Control is required. In existing semiconductor / electronic device manufacturing factories that are not seismically isolated, only the floors on which precision equipment (important and seismic isolation objects) such as production equipment and inspection equipment are placed are seismically isolated. Or place a precision device on the seismic isolation floor constructed with a seismic isolation device between the floor (substructure) and make only individual precision devices a spot isolation system (equipment isolation) , Spot isolation).

  However, when the seismic isolation floor is constructed as described above and the precision equipment is made seismic isolation, the uneven load becomes prominent due to the placement of the precision equipment, and the final precision is also at the time of construction of the seismic isolation floor. There is a case where the arrangement of the equipment is not decided, the load distribution of the seismic isolation floor is not decided, or the arrangement of the precision equipment is changed during the construction and the load distribution is changed. For this reason, the above-described seismic isolation device in which the loading load disclosed in Patent Document 1 is rigidly supported by the rolling bearing mechanism and the bearing pressure is determined by the loading load may not be able to be handled.

  Even in the friction damper mechanism configured so that the weight of the seismic isolation object does not adversely affect the urging force of the friction material of the friction damper mechanism, it is possible to change the There is a possibility that the bearing surface pressure cannot be maintained at an appropriate value and proper damping performance cannot be exhibited.

  Furthermore, it is expected that the seismic behavior will be accompanied by a large torsion due to the uneven load, but the above-mentioned seismic isolation device cannot suppress the torsion of the seismic isolation floor and can suitably exhibit the seismic isolation performance. It may not be possible.

  In view of the above circumstances, an object of the present invention is to provide a seismic isolation device that can maintain a stable bearing surface pressure regardless of an overload.

  In order to achieve the above object, the present invention provides the following means.

The seismic isolation device of the present invention is supported by a base spring through a leaf spring, an upper sliding member urged downward by the leaf spring, and a lower structure disposed below the base isolation floor. A rigid sliding bearing comprising a lower sliding member that is fixed and is pressed by a pressing force corresponding to a biasing force by the leaf spring , which causes predetermined vibrational energy to act and friction from the upper sliding member ; An X-axis rail extending in the direction and fixed to the lower structure, a Y-axis rail extending in the other horizontal direction perpendicular to the X-axis rail and fixed to the base isolation floor, and an upper end of the Y-axis rail A guide rail support comprising a rail, a connecting support member whose lower end is connected to the X-axis rail so as to be able to advance and retreat, and a damping force for absorbing the applied vibration energy and the seismic isolation floor at the original position. Generates resilience to return to Characterized in that it comprises a damping and restoration mechanism for.

  In this invention, since the seismic isolation floor is supported by the guide rail support so as to be movable on a horizontal plane and the vertical movement of the seismic isolation floor is restricted, the mounted precision equipment (the seismic isolation object) Even when an uneven load is generated on the base-isolated floor, it is possible to prevent a large twist from occurring in the behavior of the base-isolated floor during the earthquake due to the uneven load. As a result, the seismic isolation floor and the seismic isolation object can be suitably supported regardless of the overload.

  In addition, since the upper sliding member of the rigid sliding bearing is supported by the base isolation floor via a leaf spring, the lower sliding member is pressed by a stable pressing force (bearing surface pressure) by this leaf spring, regardless of the upper load. can do. Further, since the upper sliding member is supported via the leaf spring, the horizontal rigidity of the rigid sliding support can be ensured. Thereby, although it is made to slide with respect to an earthquake, it is possible to prevent friction from being broken while securing rigidity with respect to a small excitation force such as a slight vibration.

Further, in the seismic isolation structure of the present invention, the rigid sliding support is interposed between the upper sliding member and the lower sliding member, and expands and contracts vertically to adjust the pressing force by the leaf spring. A lower block whose upper surface is a tapered surface in a state where the elastic member is placed on the lower sliding member, and a vertically movable upper surface above the lower block, and a lower surface is a tapered surface. It is desirable that the upper block is configured to include a wedge-shaped sliding block that is disposed between the lower block and the upper block and is provided so as to be movable forward and backward .

  In the present invention, the pressing force (bearing surface pressure) from the upper sliding member to the lower sliding member can be easily adjusted by expanding and contracting the expansion and contraction member, so that it can surely slide against an earthquake. However, it is possible to prevent friction from being broken while securing rigidity with respect to a small excitation force such as slight vibration.

  According to the seismic isolation device of the present invention, the seismic isolation floor and the seismic isolation object can be suitably seismically isolated by the guide rail support regardless of the overload. In addition, the rigid sliding support can prevent friction from being broken while securing rigidity against a small excitation force such as slight vibration. As a result, it is possible to provide a seismic isolation device that exhibits appropriate damping performance without being able to maintain the bearing surface pressure at an appropriate value due to an uneven load or a change in the load distribution of the base isolation floor. .

It is a top view which shows the seismic isolation apparatus which concerns on one Embodiment of this invention. It is the X1-X1 arrow view figure of FIG. FIG. 2 is an X2-X2 arrow view of FIG. 1. It is the figure which expanded the rigid sliding support shown in FIG.

  Hereinafter, a seismic isolation device according to an embodiment of the present invention will be described with reference to FIGS. This embodiment is for spot-isolating precision equipment (seismic isolation object) such as production equipment and inspection equipment provided in a semiconductor / electronic device manufacturing factory (a precision environment facility that requires a precision environment), for example. It relates to seismic isolation devices.

As shown in FIG. 1 to FIG. 3, the seismic isolation device A of the present embodiment has a rectangular disk-shaped seismic isolation floor main body 1 a on which the precision device M is placed, and the seismic isolation floor main body 1 a mounted thereon. A base-isolated floor 1 consisting of a substantially rectangular frame-like board-like frame 1b, a base (lower structure) 3 disposed below the base-isolated floor 1 and fixed on the floor F of the factory, for example, A plurality of oil dampers 4 that are interposed between the seismic floor 1 and the base 3 and generate a damping force that absorbs ground motion (vibration energy) and a restoring force that returns the seismic isolation floor 1 to its original position when an earthquake occurs. And spring damper 5 (attenuation / restoration mechanism) , and is installed between the base isolation floor 1 and the base 3, and the base isolation floor 1 and precision equipment M are supported movably on a horizontal plane to provide base isolation performance. The guide rail support 6 to be transmitted and the micro vibration generated by, for example, the excitation force of the precision device M itself are transmitted to the base 3 for support. And a rigid sliding bearing 7 for the purpose. Here, the plurality of oil dampers 4 and the spring dampers 5 are provided so that one end is connected to the seismic isolation floor 1 (frame 1b) and the other end is connected to the base 3, and a damping force and a restoring force are suitably generated during an earthquake. It is arranged as appropriate.

  The guide rail support 6 of this embodiment is each arrange | positioned at the four corner | angular part side of the seismic isolation floor 1 formed in planar view substantially rectangular disk shape. Each guide rail support 6 extends in one horizontal direction, and extends in the other horizontal direction orthogonal to the X-axis rail 6a and the X-axis rail 6a fixed to the base 3, and the seismic isolation floor 1 ( A Y-axis rail 6b fixed to the frame 1b), and a connecting support member 6c that has an upper end connected to the Y-axis rail 6b and a lower end connected to the X-axis rail 6a along the rails 6a and 6b. ing. The seismic isolation floor 1 and precision device M are supported by the guide rail support 6 configured in this manner so as to be movable on the horizontal plane with respect to the floor F and the base 3 (seismic isolation support), and rigidly joined vertically. The movement in the vertical direction is restricted.

  On the other hand, as shown in FIG. 1, the rigid sliding bearings 7 of the present embodiment are arranged symmetrically one by one on the outer side on both side ends with the center of the seismic isolation floor 1 in between. Further, as shown in FIGS. 2 and 4, these rigid sliding bearings 7 are supported on the base isolation floor 1 via a leaf spring 7a, and an upper sliding member 7b urged downward by the leaf spring 7a, respectively. The lower sliding member 7c fixed on the base 3 disposed below the seismic isolation floor 1, and the vertically extending and contracting member 8 interposed between the upper sliding member 7b and the lower sliding member 7c. And is configured. Further, the upper sliding member 7b urged downward with the leaf spring 7a connected in this way presses the elastic member 8 interposed between the lower sliding member 7c downward, and through this elastic member 8, the plate It is provided so as to press the lower sliding member 7c with a pressing force (supporting surface pressure) according to the bias of the spring 7a.

  Furthermore, in this embodiment, as shown in FIGS. 1, 2 and 4, the upper end is connected to the extending member 1c extending outward in the horizontal direction from the frame 1b on both side ends of the seismic isolation floor 1, and the support extends downward. A member 9 is provided, and a leaf spring 7a is provided with one end connected to the support member 9 and the other end connected to the upper sliding member 7b. As a result, the upper sliding member 7b is supported on the seismic isolation floor 1 (frame 1b) via the leaf spring 7a, the supporting member 9 and the extending member 1c, and the rigid sliding bearing 7 configured as described above is supported by the leaf spring 7a. Therefore, the rigidity in the horizontal direction is fixed so that the slight vibration can be reliably transmitted to and supported by the base 3.

  Further, the elastic member 8 of the present embodiment is a leveling block, and as shown in FIG. 4, a lower block 8 a whose upper surface is a tapered surface when placed on the lower sliding member 7 c, and a lower side The upper block 8b is provided between the upper and lower blocks 8a and 8b, and the upper and lower tapered surfaces are provided on the tapered surfaces of the blocks 8a and 8b. A wedge-shaped sliding block 8d that is provided in contact with each other and that moves the adjustment bolt 8c back and forth by a rotation operation is provided. The telescopic member 8 configured in this way moves the sliding block 8d to advance when the adjustment bolt 8c is rotated forward, for example, and moves the upper block 8b upward. Further, when the adjustment bolt 8c is reversely rotated, the sliding block 8d is retracted and moved so as to lower the upper block 8b. That is, the adjustment bolt 8c can be expanded and contracted in the vertical direction by such a rotation operation. By such an expansion / contraction member 8, the upper sliding member 7b urged by the leaf spring 7a is changed to the lower sliding member 7c via the expansion / contraction member 8. The applied pressing force (bearing surface pressure) can be adjusted.

  Next, the operation and effect of the seismic isolation device A having the above configuration will be described.

  First, when an earthquake occurs, the ground motion is transmitted to the floor F and the vibration energy is transmitted to the seismic isolation device A through the floor F. At this time, as in the prior art, damping force and recovery force are generated in the oil damper 4 and the spring damper 5 connected to the frame 1b (base isolation floor 1), and the vibration energy is absorbed.

  In this embodiment, since the seismic isolation floor 1 is supported by the guide rail support 6, the connection support member 6c moves so as to advance and retreat along the X-axis rail 6a and the Y-axis rail 6b, respectively. As a result, the seismic isolation floor 1 moves freely on the horizontal plane even when the precision device M is placed and the uneven load is remarkable. Is shifted from the dominant period band of seismic motion to the long period side, and the response acceleration is reduced.

  In this embodiment, since the guide rail support 6 is provided on each of the four corners of the seismic isolation floor 1 to support the seismic isolation floor 1, each of the guides is transmitted when the vibration energy of the earthquake motion is transmitted. By moving freely on a horizontal plane as described above by the rail support 6, a large twist is not generated in the seismic isolation floor 1 even when an uneven load is applied. Furthermore, since the seismic isolation floor 1 is supported by restricting the vertical movement by the guide rail bearings 6, the seismic isolation floor 1 does not move so that the seismic isolation support is pulled upward by the earthquake motion. It is also reliably prevented from moving up and down.

  Therefore, the precision device M placed on the base isolation floor 1 has fallen due to the earthquake motion by including the guide rail support 6 together with the oil damper 4 and the spring damper 5 conventionally provided in this type of base isolation device A. The damage caused by an earthquake is surely prevented and protected. And the seismic isolation device A of this embodiment prevents the damage of the precision equipment M due to the earthquake, so that the business recovery and recovery after the disaster can be aimed at early, from the viewpoint of BCP (Business Continuity Plan) In this way, seismic isolation is also preferable.

  Note that the guide rail support 6 need not be limited in its installation position and number as long as the seismic isolation floor 1 can be freely moved on a horizontal plane while reliably preventing the seismic isolation floor 1 from being twisted. And when such a guide rail support 6 constructs the seismic isolation floor 1 and tries to make the precision equipment M seismic isolation, the uneven load becomes remarkable by the arrangement of the precision equipment M, or the seismic isolation floor 1 In the case where the final placement of precision equipment M is not decided at the time of construction, the load distribution of seismic isolation floor 1 is not decided, or the placement of precision equipment M is changed during construction and the load distribution changes. Even if it exists, since it is only necessary to support the seismic isolation floor 1 movably on a horizontal plane, it can be easily handled.

  On the other hand, during normal operation (normal time) using the precision instrument M, for example, the excitation force generated by the precision instrument M itself, the excitation force caused by the person moving on the floor, Micro-vibration occurs due to the excitation force caused by the traveling of an automobile or the like.

  On the other hand, in the seismic isolation device A of the present embodiment, since the upper sliding member 7b of the rigid sliding support 7 is supported by the leaf spring 7a, the expansion / contraction member 8 is expanded / contracted so that the upper sliding member 7b The pressing force (support surface pressure) to the lower sliding member 7c can be adjusted to an arbitrary magnitude. In particular, when the seismic isolation floor 1 is constructed and seismic isolation of the precision equipment M is attempted, the uneven load becomes prominent due to the placement of the precision equipment M, or the final precision equipment even when the base isolation floor 1 is constructed. Even if the arrangement of M is not decided, the load distribution of the seismic isolation floor 1 is not decided, or the arrangement of the precision equipment M is changed during the construction and the load distribution is changed, the upper sliding member 7b Is supported by the seismic isolation floor 1 via the leaf spring 7a, the bearing surface pressure can be adjusted to a desired magnitude regardless of the loading load, and the adjusted bearing surface pressure can be maintained.

  In the present embodiment, the urging force (pressing force) of the leaf spring 7a is adjusted in advance by the expansion / contraction member 8 to adjust the bearing surface pressure so that the friction is broken and slips against an earthquake. The vibration between the upper sliding member 7b (expandable member 8) and the lower sliding member 7c is prevented from breaking against the excitation force due to vibration. Accordingly, the bearing surface pressure cannot be maintained at an appropriate value due to an uneven load or a change in the load distribution of the base isolation floor, and an appropriate damping performance is exhibited.

  Therefore, in the seismic isolation device A of the present embodiment, the guide rail support 6 supports the seismic isolation floor 1 such that the seismic isolation floor 1 is movable on the horizontal plane and the vertical movement of the seismic isolation floor 1 is regulated and supported. Even when an uneven load is generated on the seismic isolation floor 1 due to the mounted precision device M, it is possible to prevent a large twist from occurring in the behavior of the base isolation floor 1 during an earthquake due to this uneven load. Thereby, the seismic isolation floor 1 and thus the precision device M can be suitably seismically isolated regardless of the loading.

  Further, since the upper sliding member 7b of the rigid sliding bearing 7 is supported on the seismic isolation floor 1 via the leaf spring 7a, a stable pressing force (bearing surface pressure) by the leaf spring 7a regardless of the loading load. Thus, the lower sliding member 7c can be pressed, and the rigidity of the rigid sliding bearing 7 in the horizontal direction can be ensured. Thereby, although it is made to slide with respect to an earthquake, it is possible to prevent friction from being broken while securing rigidity with respect to a small excitation force such as a slight vibration.

  Further, at this time, the support surface pressure from the upper sliding member 7b to the lower sliding member 7c can be easily adjusted by expanding and contracting the expansion and contraction member 8, and it is sure to slide against an earthquake. In addition, it is possible to prevent friction from being broken while securing rigidity with respect to a small excitation force such as micro vibration.

  Therefore, according to the seismic isolation device A of the present embodiment, the seismic isolation floor 1 and thus the precision device M can be suitably seismically isolated by the guide rail support 6 regardless of the loading load, and can be stabilized by the rigid sliding support 7. Therefore, it is possible to keep the bearing surface pressure maintained and to ensure that the friction is not broken while ensuring rigidity for small excitation forces such as micro vibrations. It is possible to provide the seismic isolation device A that exhibits appropriate damping performance without being able to maintain the bearing surface pressure at an appropriate value due to changes or the like.

  As mentioned above, although embodiment of the seismic isolation apparatus which concerns on this invention was described, this invention is not limited to said one Embodiment, In the range which does not deviate from the meaning, it can change suitably. For example, in this embodiment, the seismic isolation floor 1 on which the precision device M is placed is composed of the seismic isolation floor main body 1a and the frame 1b, and the guide rail bearing 6 and the rigid sliding bearing 7 are attached to the frame 1b and the base 3. It is assumed that the seismic isolation floor 1 is not necessarily provided with the frame 1b, and the base 3 is not necessarily provided, and the guide base 1 is not provided. The base isolation device A may be configured by connecting the rail bearing 6 and the rigid sliding bearing 7 directly to the base isolation floor main body 1a (base isolation floor 1) and the floor F (lower structure).

  Further, in the present embodiment, the elastic member 8 is a leveling block. However, if the upper and lower sliding member 7c is configured to be vertically extendable so that a desired pressing force is applied to the lower sliding member 7c, It is not necessary to limit to a leveling block. Further, the elastic member 8 may not necessarily be interposed between the upper sliding member 7b and the lower sliding member 7c, and the upper sliding member 7b may be directly brought into contact with the lower sliding member 7c and pressed. . In this case, by setting the deformation amount of the leaf spring 7a within a non-linear spring region in which the fluctuation of the elastic force of the leaf spring 7a is small, a desired pressing force (bearing surface pressure) is obtained as in the present embodiment. Thus, the lower sliding member 7c can be pressed and maintained.

  In this embodiment, the oil damper 4 and the spring damper 5 are provided as additional damping in the seismic isolation device A. However, other additional damping such as a laminated rubber bearing may be provided.

  Further, in the present embodiment, the description has been given on the assumption that the precision device M is spot-isolated by the seismic isolation device A. For example, a floor F on which a plurality of precision devices M in a factory are placed is used as a base 1 may be applied to seismic isolation of the entire floor F of the floor.

1 Base-isolated floor 1a Base-isolated floor body 1b Frame 3 Base (lower structure)
4 Oil damper 5 Spring damper 6 Guide rail bearing 6a X-axis rail 6b Y-axis rail 6c Connection support member 7 Rigid sliding bearing 7a Leaf spring 7b Upper sliding member 7c Lower sliding member 8 Telescopic member A Seismic isolation device F Floor

Claims (2)

An upper sliding member supported on the base isolation floor via a leaf spring and biased downward by the leaf spring, and a lower structure disposed below the base isolation floor and fixed to the upper sliding member From a rigid sliding bearing comprising a lower sliding member pressed by a pressing force according to the biasing force by the leaf spring that acts as a predetermined vibration energy and breaks friction ,
An X-axis rail extending in one horizontal direction and fixed to the lower structure; a Y-axis rail extending in another horizontal direction perpendicular to the X-axis rail and fixed to the base isolation floor; A guide rail support comprising a connecting support member connected to the Y-axis rail, the lower end of the Y-axis rail being connected to the X-axis rail so as to freely advance and retract, and
A seismic isolation device comprising: a damping force that absorbs applied vibration energy and a damping / restoring mechanism that generates a restoring force that returns the seismic isolation floor to its original position . The seismic isolation device according to claim 1,
The rigid sliding support is interposed between the upper sliding member and the lower sliding member, and includes an expansion / contraction member for adjusting the pressing force by the leaf spring by vertically extending and contracting ,
The elastic member is placed on the lower sliding member, and is provided with a lower block whose upper surface is a tapered surface and a vertically movable upper surface above the lower block, and a lower surface is a tapered surface. A seismic isolation device comprising an upper block, and a wedge-shaped sliding block disposed between the lower block and the upper block and provided to be movable forward and backward .

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