JP5510387B2 - X-ray inspection equipment - Google Patents

Description

  The present invention relates to an X-ray inspection apparatus that performs an X-ray inspection on an object, and more particularly, to a technique for performing an X-ray inspection by performing X-ray fluoroscopic imaging or CT imaging on an object.

  Conventionally, this type of X-ray inspection apparatus is equipped with a function called “teaching” for presetting and registering observation points (that is, inspection positions) before X-ray inspection. By performing this teaching in advance, it becomes possible to perform an X-ray inspection according to the observation points registered by teaching.

  Note that X-ray inspection objects include mounting substrates, through-holes / patterns / solder joints of multilayer substrates, electronic components before mounting such as integrated circuits (ICs) placed on pallets, metal There are castings such as video decks.

  Among X-ray inspection apparatuses, there is an apparatus that uses an external appearance image by an optical camera to indicate which part of the entire sample (object) is currently being subjected to X-ray inspection (for example, Patent Document 1). reference). In an X-ray inspection apparatus, a sample is usually magnified and observed for details, but in an apparatus using an external image obtained by an optical camera, an entire image of the sample is optically captured by an optical camera in advance and obtained by optical imaging. By showing the currently observed part on the appearance image, the user can know which part of the sample is being observed.

  Some X-ray inspection apparatuses have a function of displaying a list of X-ray images taken in the past (X-ray fluoroscopic images in the case of fluoroscopic imaging). The user selects a target image from the displayed images, and executes various functions such as contrast adjustment, printing, and dimension measurement on the image.

JP 2006-343193 A

  However, when trying to retrieve an image of a target sample from a series of fluoroscopic images taken in the past, the X-ray fluoroscopic image may be taken by enlarging a part of the sample. It may be difficult to tell which sample was taken. In addition, even if it is known which sample was taken, there is a problem that it is difficult to know which part of the sample is taken only by the X-ray fluoroscopic image.

  The present invention has been made in view of such circumstances, and can search for an image captured in the past from an object, or can detect an object or an object in the object from an image captured in the past. An object of the present invention is to provide an X-ray inspection apparatus in which a part can be recognized.

In order to achieve such an object, the present invention has the following configuration.
That is, an X-ray inspection apparatus according to the present invention (the former invention) is an X-ray inspection apparatus that performs an X-ray inspection on an object, and an X-ray irradiation unit that irradiates the object with X-rays. X-ray detection means for acquiring the X-ray image of the object by detecting the irradiated X-ray and performing the X-ray inspection; and optical imaging of the object to detect the object An optical camera that acquires an appearance image, and a storage unit that stores the X-ray image acquired by the X-ray detection unit and the appearance image acquired by the optical camera in association with each other for each object. One of the target images from the X-ray image group composed of a plurality of the X-ray images stored in the storage means or the external image group composed of the plurality of external images is stored. Image selecting means to be selected and image selecting means Associated with the selected said one image, and the is characterized in further comprising a display means for reading and displaying other images stored in the past in the storage means.

  [Operation / Effect] According to the X-ray inspection apparatus according to the present invention (the former invention), the X-ray image acquired by the X-ray detection means and the appearance image acquired by the optical camera are mutually connected for each same object. The data are stored in the storage means in association with each other. Then, one of the target images is selected from one of the X-ray image group composed of a plurality of X-ray images stored in the storage means and the external image group composed of a plurality of external images. The selection means selects. The other image associated with the one image selected by the image selection means and stored in the past in the storage means is read out and displayed on the display means. If one image to be selected is an appearance image, an X-ray image that is the other image associated with the selected appearance image object (sample) can be displayed. Images taken in the past from the object can be searched. If one of the images to be selected is an X-ray image, an appearance image that is the other image associated therewith can be displayed from the selected X-ray image, and the image was taken in the past. The object can be understood from the image.

  In an example of the former invention described above, the image selecting means selects a target appearance image from a group of appearance images previously stored in the storage means, and the display means is the appearance image selected by the image selecting means. And X-ray images previously stored in the storage means are read out and displayed. In the case of this example, an X-ray image that is the other image associated therewith can be displayed from the object of the selected appearance image, and an image captured in the past from the object can be searched. it can.

  In the case of this example, in order to select the target external image from the external image group stored in the past in the storage means, it is preferable to display a list as follows. That is, the display means reads out the appearance images stored in the past in the storage means and displays them in a plurality of lists, and the image selection means selects a target image from a plurality of appearance images that are listed in the display means. By selecting the appearance image that becomes, the target appearance image is selected from the appearance image group stored in the past in the storage means. By using the list display, the appearance image can be easily selected visually.

  In this example, it is preferable that the display means displays the appearance image selected by the image selection means, and reads and displays an X-ray image associated with the appearance image and previously stored in the storage means. By displaying the selected appearance image together, the correspondence with the X-ray image can be easily understood.

  In another example of the above-described invention, the image selecting means selects a target X-ray image from a group of X-ray images previously stored in the storage means, and the display means is selected by the image selecting means. The external appearance image associated with the X-ray image and stored in the storage means in the past is read out and displayed. In the case of this example, an appearance image that is the other image associated with the selected X-ray image can be displayed, and an object can be known from images taken in the past.

  In the case of this example, in order to select a target X-ray image from among a group of X-ray images previously stored in the storage means, it is preferable to display a list as follows. In other words, the display means reads out X-ray images stored in the past in the storage means and displays a list of a plurality of X-ray images, and the image selection means displays an X-ray image group consisting of a plurality of X-ray images displayed in a list on the display means. By selecting a target X-ray image from among the X-ray images, a target X-ray image is selected from a group of X-ray images previously stored in the storage unit. By using the list display, it is possible to easily select an X-ray image visually.

  In this example, it is preferable that the display unit displays the X-ray image selected by the image selection unit, and reads and displays the appearance image associated with the X-ray image and previously stored in the storage unit. . By displaying the selected X-ray image together, the correspondence with the appearance image can be easily understood.

  An X-ray inspection apparatus (the latter invention) different from the X-ray inspection apparatus (the former invention) according to these inventions described above is an X-ray inspection apparatus that performs an X-ray inspection on an object. X-ray irradiating means for irradiating an object with an object, X-ray detecting means for detecting the irradiated X-ray and performing the X-ray inspection to acquire an X-ray image of the object, and an object An optical camera that acquires an appearance image of the object by optically photographing the object, and a plurality of X-ray images acquired by the X-ray detection unit and an appearance image acquired by the optical camera. And a plurality of X-ray images stored in the past in the storage means or the appearance. X-ray image of interest or outside of the image An image selection means for selecting one of the image segmentation portions, and the other image associated with the one image selected by the image selection means and previously stored in the storage means Display means for displaying and displaying the selected portion of the appearance image or the portion of the appearance image associated with the selected X-ray image as distinguished from other portions of the appearance image. It is a feature.

  [Operation / Effect] According to the X-ray inspection apparatus (the latter invention) according to the present invention, a plurality of X-ray images acquired by the X-ray detection means and an appearance image acquired by the optical camera are displayed for each same object. Are associated with each other and the X-ray image is associated with the corresponding portion of the appearance image and stored in the storage means. Then, the image selection means selects one of the X-ray images or appearance images as a target from among a plurality of X-ray images or appearance images stored in the storage means in the past. The other image associated with one image selected by the image selection means and stored in the storage means in the past is read out and displayed on the display means, and the selected portion of the appearance image or the selected X The section of the appearance image associated with the line image is identified from other parts of the appearance image and displayed on the display means. If one of the images to be selected is a section of an appearance image, an X-ray image that is the other image associated with the selected appearance image object (sample) is displayed. It is possible to search for images taken in the past from the object. If one of the images to be selected is an X-ray image, a section of the appearance image that is the other image associated with the selected X-ray image is assigned to another part of the appearance image. Can be identified and displayed, and it is possible to know which part of the object is in the image taken in the past.

  The former invention and the latter invention may be combined. That is, in the former invention, as in the latter invention, the storage means stores the X-ray image in association with the corresponding portion of the appearance image, and the image selection means is stored in the past in the storage means. One of the plurality of X-ray images or appearance images is selected, and the display means is associated with the one image selected by the image selection means. The other image stored in the past in the storage means is read and displayed, and the selected portion of the appearance image or the portion of the appearance image associated with the selected X-ray image is displayed. Identify and display other parts.

  In the example of the latter invention described above (including the invention combining the former invention and the latter invention), the image selecting means is configured to select the target appearance image from the appearance images previously stored in the storage means. The section is selected, and the display means reads out and displays the X-ray image associated with the section of the appearance image selected by the image selection means and stored in the storage means in the past, and the selected appearance image. Is to be distinguished from other parts of the appearance image and displayed. In the case of this example, an X-ray image that is the other image associated therewith can be displayed from the object of the selected appearance image, and an image captured in the past from the object can be searched. it can.

  In the case of this example, it is preferable to display a list as follows in order to select the target appearance image segment from the appearance images stored in the past in the storage means. In other words, the display means reads out the appearance image division locations stored in the past in the storage means and displays them in a plurality of lists, and the image selection means is a target from among the plurality of division locations listed in the display means. By selecting the segment location, the segment location of the target appearance image is selected from the appearance images stored in the past in the storage means. By using the list display, it is possible to easily visually select the section of the appearance image.

  In this example, the display unit displays the section of the appearance image selected by the image selection unit, displays the selected section of the appearance image as distinguished from other parts of the appearance image, and displays the appearance. It is preferable to read out and display an X-ray image associated with the image segment and stored in the storage means in the past. By displaying the selected portion of the appearance image together, the correspondence with the X-ray image can be easily understood.

  Another example of the above-described invention (including the combination of the former invention and the latter invention) is that the image selecting means is a target from a plurality of X-ray images stored in the storage means in the past. The X-ray image is selected, and the display means reads out and displays the section of the appearance image associated with the X-ray image selected by the image selection means and stored in the storage means in the past, and is selected. In other words, the section of the appearance image associated with the X-ray image is displayed separately from the other parts of the appearance image. In the case of this example, it is possible to distinguish and display the section of the appearance image that is the other image associated with the selected X-ray image from other parts of the appearance image. It is possible to know which part of the object is in the captured image.

  In the case of this example, in order to select a target X-ray image from a plurality of X-ray images stored in the past in the storage unit, it is preferable to display a list as follows. That is, the display unit reads out X-ray images stored in the past in the storage unit and displays a list of a plurality of X-ray images, and the image selection unit selects the target X-ray image from the plurality of X-ray images displayed in the list on the display unit. By selecting a line image, a target X-ray image is selected from a plurality of X-ray images stored in the storage unit in the past. By using the list display, it is possible to easily select an X-ray image visually.

  In this example, the display unit displays the X-ray image selected by the image selection unit, reads out and displays the section of the appearance image associated with the X-ray image and stored in the storage unit in the past. It is preferable to display the section of the appearance image associated with the selected X-ray image by distinguishing it from other parts of the appearance image. By displaying the selected X-ray image together, the correspondence with the appearance image can be easily understood.

According to the X-ray inspection apparatus according to the present invention (the former invention), the X-ray image acquired by the X-ray detection means and the appearance image acquired by the optical camera are associated with each other for each same object, and the storage means Remember each. Then, one of the target images is selected from one of the X-ray image group composed of a plurality of X-ray images stored in the storage means and the external image group composed of a plurality of external images. The selection means selects. The other image associated with the one image selected by the image selection means and stored in the past in the storage means is read out and displayed on the display means. As a result, an image captured in the past from the object can be searched, or the object can be understood from the image captured in the past.
In addition, according to an X-ray inspection apparatus (the latter invention) different from the former invention, a plurality of X-ray images acquired by the X-ray detection means and an appearance image acquired by the optical camera for each same object. Are associated with each other and the X-ray image is associated with the corresponding portion of the appearance image and stored in the storage means. Then, the image selection means selects one of the X-ray images or appearance images as a target from among a plurality of X-ray images or appearance images stored in the storage means in the past. The other image associated with one image selected by the image selection means and stored in the storage means in the past is read out and displayed on the display means, and the selected portion of the appearance image or the selected X The section of the appearance image associated with the line image is identified from other parts of the appearance image and displayed on the display means. As a result, an image captured in the past from the object can be searched, or which part of the object can be determined from the image captured in the past.

It is the schematic block diagram and block diagram of the X-ray inspection apparatus which concern on each Example. (A)-(d) is one embodiment which registers an X-ray fluoroscopic image and an external appearance image in association with each other. (A), (b) is one embodiment of each file name after association. (A)-(d) is one embodiment of the image selection and display concerning Example 1. FIG. (A)-(d) is one embodiment of the image selection and display concerning Example 1. FIG. (A)-(c) is one embodiment of the image selection and display concerning Example 2. FIG. (A), (b) is one embodiment of the image selection and display concerning Example 2. FIG. (A), (b) is one embodiment of image selection and display according to the third embodiment, and (c), (d) are one embodiment of image selection and display according to the fourth embodiment.

Embodiment 1 of the present invention will be described below with reference to the drawings.
FIG. 1 is a schematic configuration diagram and a block diagram of an X-ray inspection apparatus according to each embodiment. In Example 1, including Examples 2 to 4 to be described later, an integrated circuit (IC) is described as an example of an object (sample), and an X-ray fluoroscopic image is taken as an example of an X-ray image. explain.

  As illustrated in FIG. 1, the X-ray inspection apparatus 1 according to the first to fourth embodiments drives an imaging unit 2 that images the object O, a stage 3 on which the object O is placed, and the stage 3. A stage driving unit 4; an imaging driving unit 5 that drives the imaging unit 2; a high voltage generating unit 6 that generates a high voltage to apply a tube current and a tube voltage to the X-ray tube 21 of the imaging unit 2; And an image processing unit 7 that performs various types of image processing on the X-ray detection signal obtained by the X-ray detector 22 and outputs an X-ray fluoroscopic image.

  The imaging unit 2 includes an X-ray tube 21 that irradiates the object O with X-rays, and an X-ray detector 22 that detects X-rays irradiated from the X-ray tube 21 and transmitted through the object O. The X-ray detector 22 is not particularly limited as exemplified by an image intensifier (II), a flat panel X-ray detector (FPD: Flat Panel Detector), and the like. In the present embodiment 1, including later-described embodiments 2 to 4, a flat panel X-ray detector (FPD) will be described as an example of the X-ray detector 22. The X-ray tube 21 corresponds to the X-ray irradiation means in the present invention, and the X-ray detector 22 corresponds to the X-ray detection means in the present invention.

  The FPD is composed of a plurality of detection elements arranged vertically and horizontally corresponding to pixels, and the detection elements detect X-rays and output detected X-ray data (charge signals) as X-ray detection signals. In this way, the X-ray tube 21 irradiates the X-ray toward the object O, and the X-ray detector 22 made of FPD detects the X-ray and outputs an X-ray detection signal. The imaging unit 2 including 21 and the X-ray detector 22 images the object O.

  The stage drive unit 4 includes a motor and a drive shaft (not shown). The stage 3 is horizontally moved in the X and Y directions, moved up and down in the Z direction, or rotated in the horizontal plane around the Z axis. . The object O is also moved by the movement of the stage 3, the object O is moved to the imaging position, the imaging unit 2 performs imaging, and X-ray inspection is performed.

  Similar to the stage drive unit 4, the imaging drive unit 5 includes a motor and a drive shaft (not shown). The image pickup unit 2 is moved horizontally in the X and Y directions in the drawing, moved up and down in the Z direction, or Z Rotate around the axis in a horizontal plane. Each of the X-ray detectors 22 is moved so that the X-ray tube 21 faces the X-ray detector 22, and then the X-ray inspection is performed. It is also possible to change the enlargement / reduction ratio in the X-ray examination by moving the X-ray tube 21 or the X-ray detector 22 up and down in the vertical direction (Z direction). It is also possible to incline the X-ray tube 21 or the X-ray detector 22 and take an image from an oblique direction (see a two-dot chain line in the figure).

  The high voltage generator 6 generates a high voltage and applies a tube current and a tube voltage to the X-ray tube 21 to generate X-rays from the X-ray tube 21 and irradiate the X-rays. The image processing unit 7 outputs an X-ray fluoroscopic image related to the object O by performing image processing such as gain correction, lag correction, and gradation correction on the X-ray detection signal. In this way, the image processing unit 7 performs image processing on the X-ray detection signal imaged by the imaging unit 2 (that is, the X-ray detection signal output from the X-ray detector 22), and generates an X-ray fluoroscopic image. By outputting, X-ray fluoroscopic imaging is performed on the object O. Then, an X-ray inspection is performed on the object O. The image processing unit 7 also outputs an appearance image related to the object O by performing image processing on a signal photoelectrically converted by the optical camera 12 described later. In FIG. 1, the image processing unit 7 combines the output of the X-ray fluoroscopic image and the output of the external appearance image, but it may of course be divided into an X-ray fluoroscopic image and an external appearance image.

  In addition, the X-ray inspection apparatus 1 includes a memory unit 8, an input unit 9, an output unit 10, and a controller 11. The memory unit 8 corresponds to the storage unit in the present invention, the input unit 9 corresponds to the image selection unit in the present invention, and the output unit 10 corresponds to the display unit in the present invention.

  The memory unit 8 writes and stores data such as an X-ray fluoroscopic image obtained by the image processing unit 7 via the controller 11, reads out the data as necessary, and reads the X-ray fluoroscopic image via the controller 11. Is output to the output unit 10 and output. The memory unit 8 includes a storage medium represented by a ROM (Read-only Memory), a RAM (Random-Access Memory), a hard disk, and the like. In the first embodiment, including later-described second to fourth embodiments, the memory unit 8 includes an X-ray image (X-ray fluoroscopic image in each embodiment) acquired by the X-ray detector 22 and an optical camera 12 described later. The table 8a stores the external appearance image acquired by the above-mentioned object in association with each other for each same object. In the first embodiment, the table 8a is an X-ray image (X-ray fluoroscopic image in each embodiment). Are stored in association with the corresponding portions of the appearance image. Specific functions of the table 8a will be described later.

  The input unit 9 sends data and commands input by the operator to the controller 11. The input unit 9 includes a pointing device represented by a mouse, a keyboard, a joystick, a trackball, a touch panel, and the like. In the present embodiment 1, including later-described embodiments 2 to 4, an X-ray image group consisting of a plurality of X-ray images (X-ray fluoroscopic images in each embodiment) previously stored in the table 8a or a plurality of external appearances. A function of selecting one of the target images from one of the external image groups of images, a plurality of X-ray images stored in the past in the table 8a (X-ray fluoroscopic images in each embodiment) Alternatively, the input unit 9 has a function of selecting any one of the X-ray image or the appearance image segment from the appearance image. These functions will be described later.

  The output unit 10 includes a display unit represented by a monitor, a printer, and the like. In the first embodiment, including later-described second to fourth embodiments, the imaging result of the imaging unit 2 and the imaging result of the optical camera 12 (to be described later) are displayed on the monitor of the output unit 10 and are displayed in the table 8a in the past. The stored imaging result is read and displayed on the monitor of the output unit 10. A specific configuration of the monitor will also be described later.

  The controller 11 comprehensively controls each part constituting the X-ray inspection apparatus 1. The above-described image processing unit 7 and controller 11 are constituted by a central processing unit (CPU) and the like. Data such as an X-ray fluoroscopic image obtained by the image processing unit 7 is written into the memory unit 8 through the controller 11 for storage or sent to the output unit 10 for output. When the output unit 10 is a display unit, output is displayed. When the output unit 10 is a printer, output printing is performed.

  Furthermore, the X-ray inspection apparatus 1 includes an optical camera 12 that performs optical imaging on the object O. The optical camera 12 is configured by a solid-state imaging device (CCD: Charge Coupled Device) or the like, irradiates light on the object O, and captures an optical image of the object O with a lens (not shown) of the optical camera 12. Thus, optical photographing is performed by performing photoelectric conversion with a CCD. And an external appearance image is acquired by optical photography. The position of the optical camera 12 and the imaging magnification (enlargement ratio / reduction ratio) are set so that an appearance image in substantially the same area as the X-ray fluoroscopic image can be acquired. The optical camera 12 can also perform optical imaging from an oblique direction in conjunction with or independently of the inclination of the X-ray tube 21 and the X-ray detector 22 (see the two-dot chain line in the figure). The optical camera 12 corresponds to the optical camera in the present invention.

  Next, specific configurations of the memory unit 8 (table 8a), the input unit 9, and the output unit 10 according to the first embodiment will be described with reference to FIGS. FIG. 2 shows an embodiment in which an X-ray fluoroscopic image and an appearance image are registered in association with each other, FIG. 3 shows an embodiment of each file name after association, and FIGS. 4 and 5 show an embodiment. 1 is an embodiment of image selection and display according to FIG.

  The user places and sets the object O (see FIG. 1) on the stage 3 (see FIG. 1), and then performs optical photographing with the optical camera 12 (see FIG. 1). As shown in a), the appearance image I is acquired and displayed on the monitor 10M of the output unit 10 (see FIG. 1). The user refers to the external appearance image I, moves the stage 3 so that the portion to be observed (X-ray inspection) is displayed on the X-ray fluoroscopic image, and the X-ray fluoroscopic image of the desired location is displayed on the monitor 10M. When displayed, the imaging unit 2 (see FIG. 1) performs imaging.

  Until the imaging unit 2 performs imaging, the X-ray tube 21 of the imaging unit 2 (see FIG. 1) emits X-rays having a weaker dose than that at the time of imaging, and the X-ray detector 22 of the imaging unit 2. Monitoring (see FIG. 1) is performed to display an X-ray fluoroscopic image obtained by detecting the X-ray on the monitor 10M. Then, monitoring is continued while performing fine adjustment by moving the stage 3 or the like until an X-ray fluoroscopic image of a desired location is displayed on the monitor 10M. When an X-ray fluoroscopic image of a desired location is displayed on the monitor 10M, the X-ray tube 21 emits X-rays with a dose stronger than that at the time of monitoring, and the X-ray detector 22 detects the X-ray and picks up the image. X-ray fluoroscopic image is acquired.

  As shown in FIG. 2B, an X-ray fluoroscopic image F at the time of imaging is displayed on the monitor 10M, and the X-ray fluoroscopic image F and the appearance image I on the monitor 10M are associated with each other to input unit 9 (FIG. 1). Register). The registration by the input unit 9 is not particularly limited. For example, the registration may be performed by pressing a registration button, or may be performed by clicking the registration button with the mouse and clicking, This may be done by touching a registration touch panel mounted on the monitor 10M.

  When the X-ray fluoroscopic image F is not an entire view of the object (sample) but an image relating to a part of the object O, as shown in FIG. It is registered by the input unit 9 in association with a portion (hereinafter referred to as “partition location”) P of I. The registration by the input unit 9 is not particularly limited. For example, the registration may be performed by clicking the pointer with the mouse on the segment P, or touching the segment P on the touch panel mounted on the monitor 10M. Or may be performed by directly inputting the coordinate position of the section P from the keyboard. As shown in FIG. 2D, in the same object O, when a new X-ray fluoroscopic image F ′ is associated with another section P ′, the X is processed in the same procedure as in FIG. The fluoroscopic image F ′ is registered by the input unit 9 in association with the section P ′ of the appearance image I.

  When the X-ray fluoroscopic image F and the external appearance image I are registered in association with each other for the same object O, the user determines whether there is a sample to be registered for another object O, and the registration is performed. If there is a target sample, registration is performed in the same procedure as in FIGS. 2 (a) to 2 (d). Note that registration for each object O is not necessarily performed continuously, and registration may be performed for each X-ray examination.

  By performing such registration, the X-ray fluoroscopic image F and the external appearance image I are associated with each other for each same object O, and are respectively stored in the table 8a (see FIG. 1) of the memory unit 8 (see FIG. 1). Remember. Further, by registering the X-ray fluoroscopic image F in association with the section P of the appearance image I, the X-ray fluoroscopic image F is associated with the corresponding section of the appearance image I and stored in the table 8a.

  As for the embodiment after the association, for example, as shown in FIG. 3A, a folder is created for each same object, and the X-ray image file and the appearance image file associated with each other are the same folder. Saved in. As shown in FIG. 3A, when the object is “Sample # A”, for example, a folder “Sample # A” is created, and a fluoroscopic image file related to “Sample # A” and “ The appearance image file “image_A” relating to “Sample # A” is stored in the same folder “Sample # A”. If the X-ray fluoroscopic image is associated with the corresponding location of the appearance image, as shown in FIG. 3A, for example, the X-ray fluoroscopic image file “address01_A” at the coordinate “# 01” of the location is shown. Are stored in the same folder “Sample # A”, and the X-ray fluoroscopic image file “address02_A” of the coordinate “# 02” of the section is stored in the same folder “Sample # A”. The same applies when the object is “Sample # B”.

  2A to 2D, a folder as shown in FIG. 3A is automatically created and each file is automatically saved. By manually creating a folder with the input unit 9 and manually saving each file, the X-ray fluoroscopic image and the external appearance image are associated with each other and stored in the table 8a, respectively, or the X-ray fluoroscopic image corresponds to the external appearance. The image may be stored in the table 8a in association with the image. Also, as shown in FIG. 3B, an index file or the like may be created and associated with each other by referring to each file from the index file. In this case, it is not always necessary to save each file in the same folder.

Next, each mode of image selection and display based on images stored in the past in the table 8a will be described with reference to FIGS. First, as shown in FIG. 4 (a), the monitor 10M includes an appearance image group I (here, four appearance images I ₁ , I ₂ , I ₃ , and so on) stored in the table 8a (see FIG. 1). I ₄ ) is read out and displayed in a list (in this case, four). Then, by the input unit 9 (see FIG. 1), the target external image from the external image group I displayed as a list on the monitor 10M (the external image I ₁ indicated by a thick frame in FIG. 4A). Select. By selecting in this way, the target external image is selected from the external image group stored in the table 8a by the input unit 9. The image selection by the input unit 9 is not particularly limited. For example, it may be performed by clicking the pointer with the mouse in accordance with the target external image, or the target external appearance on the touch panel mounted on the monitor 10M. It may be performed by touching the image, or may be performed by directly inputting a key corresponding to the target appearance image from the keyboard.

Next, as shown in FIG. 4 (b), the monitor 10M is adapted to display the appearance image I ₁ which is selected, associated with the appearance image I _1, and past stored X-ray fluoroscopy table 8a An image (here, X-ray fluoroscopic image group F ₁₀₀ consisting of 16 X-ray fluoroscopic images) is read and displayed. The X-ray fluoroscopic image group _{F 100,} as shown in FIG. 4 (c), consists of 16 X-ray fluoroscopic image _F 101 _{to F 116,} each of the X-ray fluoroscopic image _F 101 _{to F 116} is an external image Are stored in the table 8a in association with each of the sections.

In a state where the 16 X-ray fluoroscopic images F _{101 to} F ₁₁₆ stored in the table 8a are displayed as a list, the input unit 9 displays the 16 X-ray fluoroscopic images F _{101 to} F ₁₁₆ displayed as a list on the monitor 10M. An X-ray fluoroscopic image (X-ray fluoroscopic image F _{104 in} FIG. 4D) to be a target is selected from the inside. By selecting in this way, the target X-ray fluoroscopic image is selected by the input unit 9 from among a plurality of X-ray fluoroscopic images previously stored in the table 8a. Even in the case of selecting an X-ray fluoroscopic image associated with a segmented portion, the image selection by the input unit 9 is not particularly limited. For example, by clicking the pointer with the target X-ray fluoroscopic image with the mouse, May be performed by touching the target X-ray fluoroscopic image on the touch panel mounted on the monitor 10M, or a key corresponding to the target X-ray fluoroscopic image is directly input from the keyboard. It may be done by.

Furthermore, as shown in FIG. 4 (d), the monitor 10M displays the X-ray fluoroscopic image _{F 104} that is selected, reads the classification point P of appearance image _{I 1} associated with the X-ray fluoroscopic image _{F 104} And displaying the section P of the appearance image I ₁ associated with the selected X-ray fluoroscopic image F ₁₀₄ while distinguishing it from other parts of the appearance image I ₁ . In FIG. 4D, the segmented portion P is identified by a frame in order to identify and display it as another portion. However, as long as it identifies which portion has been photographed, it is not limited to the frame. For example, a colored marker You may identify by. Further, in order to emphasize the X-ray fluoroscopic image _{F 104} selected from among the X-ray fluoroscopic image _F 101 _{to F 116,} which are listed, X-ray fluoroscopic images other than X-ray fluoroscopic image _{F 104 F} 101 _{~F 116} The X-ray fluoroscopic image F ₁₀₄ may be displayed in an original size or enlarged without displaying the above. In order to clearly display the association, as shown in FIG. 4D, a line with an arrow connecting both images (the X-ray fluoroscopic image F ₁₀₄ and the appearance image I ₁ segment P) is displayed. Also good.

In FIG. 4C and FIG. 4D, among the plurality of X-ray fluoroscopic images (herein, 16 X-ray fluoroscopic images F _{101 to} F ₁₁₆ ) stored in the table 8a by the input unit 9 in the past. from selecting an X-ray fluoroscopic image ₁₀₄ of interest, the monitor 10M is associated with X-ray fluoroscopic image F ₁₀₄ selected, and past reading the stored segment portion P of appearance image I ₁ in the table 8a In addition to the display, the section P of the appearance image I ₁ associated with the selected X-ray fluoroscopic image F ₁₀₄ is distinguished from the other parts of the appearance image I ₁ and displayed. On the other hand, as shown in FIGS. 5A and 5B, the input unit 9 applies the object from the appearance images (appearance image I _{1 in} FIG. 5A) stored in the table 8a in the past. select partitioning portion P of appearance image I ₁ as the monitor 10M is associated with a classification point P of appearance image I ₁ which is selected, and the past stored X-ray fluoroscopic image in table 8a (in this case 16 with reading and displaying pieces of X-ray fluoroscopic image _{F 101} ~F _116), it is also possible to display the classification point P of appearance image I ₁ which is selected by identifying the other parts of the exterior image I _1.

More specifically, as shown in FIG. 5A, the segmented portion P of the target appearance image I ₁ is arbitrarily selected by the input unit 9 from the appearance images I ₁ stored in the table 8a. Even when selecting a segmented location, image selection by the input unit 9 is not particularly limited. For example, the selection may be performed by clicking the pointer on the target segmented location with the mouse, or mounted on the monitor 10M. May be performed by touching the target segmented location on the touch panel, or by directly inputting the key corresponding to the target segmented location from the keyboard or directly inputting the coordinate position of the target segmented location. May be performed.

Furthermore, as shown in FIG. 5 (b), the monitor 10M is selected to display the classification point P appearance images I _1, selected other appearance image I ₁ of the partition point P the appearance image I ₁ And an X-ray fluoroscopic image (here, X-ray fluoroscopic image F ₁₀₁ ) associated with the section P of the appearance image I ₁ . Similarly, you may identify with a colored marker etc. other than a frame. Further, in order to emphasize the X-ray fluoroscopic image F ₁₀₁ associated with the section P from among the displayed X-ray fluoroscopic images F _{101 to} F ₁₁₆ , X-ray fluoroscopic images F other than the X-ray fluoroscopic image F ₁₀₁ are used. _The X-ray fluoroscopic image F ₁₀₁ may be displayed in the original size or enlarged without displaying _{101 to} F ₁₁₆ . In addition, in order to clearly display the association, as shown in FIG. 5B, a line with an arrow connecting both images (the X-ray fluoroscopic image F ₁₀₁ and the appearance image I ₁ segment P) is displayed. Also good.

Further, as shown in FIG. 5 (c) and FIG. 5 (d), the monitor 10M reads the classification portion P of appearance image I ₁ which is previously stored in a table 8a plurality (here, 16) listed in the and, the input unit 9, by selecting the divided portions of interest from among a plurality of sections points P displayed list on the monitor 10M, and from among the appearance image I ₁ which is previously stored in a table 8a it is also possible to select a division point of appearance image I ₁ made.

More specifically, as shown in FIG. 5 (c), the monitor 10M reads the classification portion P of appearance image I ₁ which is previously stored in a table 8a plurality (here, 16) to list on . Then, the target section is selected from the plurality of sections P displayed on the monitor 10M by the input unit 9. By selecting in this way, the input unit 9 selects a segmented portion of the target appearance image I ₁ from the appearance images I ₁ stored in the past in the table 8a.

Furthermore, as shown in FIG. 5 (d), the monitor 10M displays the division points of the exterior image I ₁ which is selected, identified as elsewhere in selected segment places the appearance images I ₁ (e.g. colored and displays such as identification) to the marker to display the X-ray fluoroscopic image associated with the segment portion of the exterior image I _1. Similarly, in order to clearly display the associations, as shown in FIG. 5 (d), may be displayed arrowed lines connecting both images (divided portions of the X-ray fluoroscopic image-appearance images I ₁₎ .

  According to the X-ray inspection apparatus according to the first embodiment having the above-described configuration, the X-ray image acquired by the X-ray detector 22 (X-ray fluoroscopic image in each embodiment) and the optical camera 12 are acquired. The appearance image is associated with each other for each same object and stored in the table 8a. Then, one target image (the book) is selected from one of the X-ray image group composed of a plurality of X-ray images stored in the table 8a and the external image group composed of a plurality of external images. In the first embodiment, the appearance image) is selected by the input unit 9. The other image (X-ray fluoroscopic image in the first embodiment) associated with one image (appearance image) selected by the input unit 9 and stored in the table 8a in the past is read and displayed on the monitor 10M. . When one image to be selected is an appearance image as shown in FIG. 4A, an X-ray image that is the other image associated with the object (sample) of the selected appearance image. (X-ray fluoroscopic image) can be displayed, and images taken in the past from the object can be searched.

  In the first embodiment, as shown in FIG. 4 (a), a target appearance image is selected from the appearance image groups stored in the table 8a in the past by the input unit 9, and the monitor 10M The X-ray image (X-ray fluoroscopic image) associated with the appearance image selected in 9 and stored in the table 8a in the past is read and displayed. In this case, an X-ray image (X-ray fluoroscopic image) which is the other image associated with the selected object of the appearance image can be displayed, and images captured in the past from the object can be displayed. You can search.

  In the case of the first embodiment, in order to select a target appearance image from a group of appearance images stored in the past in the table 8a, a list is preferably displayed as shown in FIG. That is, the monitor 10M reads out the appearance images stored in the past in the table 8a and displays a list of a plurality of appearance images, and the input unit 9 selects an object from the appearance image group including a plurality of appearance images displayed as a list on the monitor 10M. By selecting the appearance image to be, the target appearance image is selected from the group of appearance images previously stored in the table 8a. By using the list display, the appearance image can be easily selected visually.

  In the first embodiment, preferably, as shown in FIG. 4B, the monitor 10M displays the appearance image selected by the input unit 9 and is associated with the appearance image and stored in the table 8a in the past. The stored X-ray image (X-ray fluoroscopic image) is read and displayed. By displaying the selected appearance image together, the correspondence with the X-ray image (X-ray fluoroscopic image) can be easily understood.

  Further, according to the X-ray inspection apparatus according to the first embodiment, a plurality of X-ray images (X-ray fluoroscopic images) acquired by the X-ray detector 22 and an appearance image acquired by the optical camera 12 are the same target. Each object is associated with each other, and an X-ray image (X-ray fluoroscopic image) is stored in the table 8a in association with a corresponding portion of the appearance image. Then, one of the X-ray images or the appearance images of the target among the plurality of X-ray images or appearance images stored in the table 8a in the past (FIG. 4 (c), FIG. 4 ( In d), the X-ray fluoroscopic image) is selected by the input unit 9. The other image (appearance image in FIGS. 4 (c) and 4 (d)) associated with one image (X-ray fluoroscopic image) selected by the input unit 9 and stored in the table 8a in the past is displayed. The information is read out and displayed on the monitor 10M, and the selected portion of the appearance image or the portion of the appearance image associated with the selected X-ray image (the selected X in FIGS. 4C and 4D). The section of the appearance image associated with the fluoroscopic image) is identified from other parts of the appearance image and displayed on the monitor 10M. When one image to be selected is an X-ray image (X-ray fluoroscopic image) as shown in FIG. 4C, the selected X-ray image (X-ray fluoroscopic image) is associated with it. The section of the appearance image, which is the other image, can be identified and displayed from the other parts of the appearance image, and the portion in the object can be identified from the images taken in the past.

  In the first embodiment, the display modes of FIGS. 4A and 4B are combined with the display modes of FIGS. 4C and 4D, and FIGS. 4A to 4D are combined. ) Are sequentially performed as a series of image selection and display. That is, after the display modes of FIGS. 4 (a) and 4 (b), the table 8a has an X-ray image (X-ray fluoroscopic image) as in the display modes of FIGS. 4 (c) and 4 (d). ) In association with the corresponding portion of the appearance image corresponding thereto, and the X-ray image or appearance image as a target from among a plurality of X-ray images or appearance images previously stored in the table 8a by the input unit 9 One image (X-ray fluoroscopic image in FIGS. 4C and 4D) is selected, and the monitor 10M selects one image (X-ray fluoroscopic image) selected by the input unit 9. ) And the other image (appearance image) previously stored in the table 8a is read out and displayed, and the appearance image associated with the selected portion of the appearance image or the selected X-ray image is displayed. Section location (selected in Fig. 4 (c), Fig. 4 (d) The classification portion) of appearance image associated with the X-ray fluoroscopic image, and displays the identified elsewhere the appearance image.

  In the first embodiment, as shown in FIG. 5A, the input unit 9 selects a target appearance image segment from the appearance images stored in the table 8a in the past, and the monitor 10M The X-ray image (X-ray fluoroscopic image) associated with the section of the appearance image selected by the input unit 9 and previously stored in the table 8a is read and displayed, and the section of the selected appearance image is displayed. It is distinguished from other parts of the appearance image and displayed. In this case, an X-ray image (X-ray fluoroscopic image) which is the other image associated with the selected object of the appearance image can be displayed, and images captured in the past from the object can be displayed. You can search.

  In the first embodiment, preferably, as shown in FIG. 5B, the monitor 10M displays the section of the appearance image selected by the input unit 9, and displays the section of the selected appearance image as the appearance. The X-ray image (X-ray fluoroscopic image) associated with the section of the appearance image and stored in the past in the table 8a is read and displayed while being distinguished from other parts of the image and displayed. By displaying the selected portion of the appearance image together, the correspondence with the X-ray image (X-ray fluoroscopic image) can be easily understood.

  In the first embodiment, as shown in FIG. 5 (c), as in FIG. 5 (a), a segmented portion of the target appearance image is selected by the input unit 9, and the monitor 10M associates with the segmented location. The displayed X-ray image (X-ray fluoroscopic image) is displayed, and the segmented portion of the selected appearance image is distinguished from other portions of the appearance image and displayed.

  In the case of the first embodiment, in order to select the target appearance image section from the appearance images stored in the past in the table 8a, a list is preferably displayed as shown in FIG. 5C. Yes. That is, the monitor 10M reads out the appearance image segment locations stored in the past in the table 8a and displays them in a plurality of lists, and is selected from the plurality of segment locations listed on the monitor 10M by the input unit 9. By selecting the segmented portion, the segmented portion of the target appearance image is selected from the appearance images stored in the table 8a in the past. By using the list display, it is possible to easily visually select the section of the appearance image.

Next, Embodiment 2 of the present invention will be described with reference to the drawings.
6 and 7 show an embodiment of image selection and display according to the second embodiment. The portions common to the above-described first embodiment are denoted by the same reference numerals and the description thereof is omitted. As shown in FIG. 1, the X-ray inspection apparatus 1 according to the second embodiment has the same configuration as the X-ray inspection apparatus 1 according to the first embodiment.

  In Example 1 mentioned above, after the display mode of FIG. 4 (a) and FIG.4 (b), the display mode of FIG.4 (c) and FIG.4 (d), FIG.5 (a) and FIG.5 (b). Although the display mode of FIG. 5 or the display mode of FIG. 5C and FIG. 5D was performed, in the second embodiment, the display mode of FIG. 4A and FIG. It starts from the display mode of (a) to FIG. 6 (c) or the display mode of FIG. 7 (a) and FIG. 7 (b). That is, after selecting one target image (appearance image in the first embodiment) from either one of the X-ray image group or the appearance image group as in the first embodiment, the one image is selected. In the second embodiment, without displaying the other image (X-ray fluoroscopic image in the first embodiment) associated with the (appearance image), a target X-ray image from a plurality of X-ray images or appearance images. Alternatively, after selecting any one of the appearance image segmentation locations (appearance image segmentation location in the second embodiment), the other image associated with the one image (appearance image segmentation location) (this embodiment) 2 is displayed as shown in FIG. 6A to FIG. 6C or FIG. 7A and FIG. 7B.

  More specifically, as shown in FIG. 6A, the appearance image I stored in the table 8a (see FIG. 1) is read and displayed on the monitor 10M. Then, as shown in FIG. 6B, a segment P of the target appearance image I is arbitrarily selected from the appearance image I by the input unit 9 (see FIG. 1). Even when selecting a segmented location, image selection by the input unit 9 is not particularly limited. For example, the selection may be performed by clicking the pointer on the target segmented location with the mouse, or mounted on the monitor 10M. May be performed by touching the target segmented location on the touch panel, or by directly inputting the key corresponding to the target segmented location from the keyboard or directly inputting the coordinate position of the target segmented location. May be performed.

  Further, as shown in FIG. 6C, the monitor 10M displays the segmented portion P of the selected appearance image I, and displays the selected segmented portion P of the appearance image I as another portion of the appearance image I. The X-ray fluoroscopic image F associated with the segment P of the appearance image I is displayed while being identified (here, identified by a frame). Similarly, you may identify with a colored marker etc. other than a frame. In order to clearly display the association, as shown in FIG. 6C, a line with an arrow connecting the two images (the X-ray fluoroscopic image F and the appearance image I section P) may be displayed. .

  Further, as shown in FIG. 7A, the monitor 10M reads out the divided portions P of the appearance image I stored in the past in the table 8a and displays them in a list (in this case, 16 pieces). Then, the target section is selected from the plurality of sections P displayed on the monitor 10M by the input unit 9. By selecting in this way, the division part of the target appearance image I is selected by the input unit 9 from the appearance images I stored in the table 8a in the past.

  Further, as shown in FIG. 7B, the monitor 10M displays the section of the selected appearance image I and distinguishes it from other sections of the selected appearance image I (for example, a colored marker) And the X-ray fluoroscopic image F associated with the section of the appearance image I is displayed. Similarly, in order to clearly display the association, as shown in FIG. 7B, a line with an arrow connecting both images (the X-ray fluoroscopic image F and the appearance image I) may be displayed. .

  Regarding the operation and effect of the second embodiment, the display modes of FIGS. 6A to 6C are the same as the display modes of FIGS. Omitted. 7A and 7B are the same as the display modes of FIGS. 5C and 5D, and the description thereof is omitted.

Next, Embodiment 3 of the present invention will be described with reference to the drawings.
FIG. 8A and FIG. 8B are one embodiment of image selection and display according to the third embodiment. The portions common to the first and second embodiments described above are denoted by the same reference numerals and the description thereof is omitted. As shown in FIG. 1, the X-ray inspection apparatus 1 according to the third embodiment has the same configuration as the X-ray inspection apparatus 1 according to the first and second embodiments.

  In the first embodiment described above, one of the target images in the X-ray image group composed of a plurality of X-ray images or the external image group composed of a plurality of external images is an external image. The X-ray fluoroscopic image as the other image is displayed after selecting the external image as the one image. In the third embodiment, one image is an X-ray fluoroscopic image and the other image is X. After selecting the fluoroscopic image, the appearance image as the other image is displayed.

First, as shown in FIG. 8A, the monitor 10M has an X-ray fluoroscopic image group F (here, four X-ray fluoroscopic images F ₁ and F ₂ ) stored in the table 8a (see FIG. 1). , F ₃ , F ₄ ) are read out and displayed in a list (in this case, four). Then, an X-ray fluoroscopic image as a target from among the X-ray fluoroscopic image group F displayed as a list on the monitor 10M by the input unit 9 (see FIG. 1) (X shown by a thick frame in FIG. 8A). A fluoroscopic image F ₁ ) is selected. By selecting in this way, the target X-ray fluoroscopic image is selected from the X-ray fluoroscopic image group stored in the table 8a in the past by the input unit 9. The image selection by the input unit 9 is not particularly limited. For example, the image selection may be performed by clicking the pointer with a target X-ray fluoroscopic image with a mouse, or the target on the touch panel mounted on the monitor 10M. It may be performed by touching the X-ray fluoroscopic image, or by directly inputting a key corresponding to the target X-ray fluoroscopic image from the keyboard.

Next, as shown in FIG. 8 (b), the monitor 10M is adapted to display the X-ray fluoroscopic image F ₁ which is selected, associated with the X-ray fluoroscopic image F _1, and is previously stored in a table 8a read-out appearance image I ₁ and displays.

  According to the X-ray inspection apparatus according to the second embodiment having the above-described configuration, an X-ray image group composed of a plurality of X-ray images stored in the table 8a in the past or an appearance image group composed of a plurality of appearance images. One of the target images (X-ray fluoroscopic image in the third embodiment) is selected by the input unit 9 from any one of the image groups. The other image (appearance image in the third embodiment) associated with one image (X-ray fluoroscopic image) selected by the input unit 9 and stored in the table 8a in the past is read and displayed on the monitor 10M. . When one image to be selected is an X-ray image (X-ray fluoroscopic image) as shown in FIG. 8A, the selected X-ray image (X-ray fluoroscopic image) is associated with it. The appearance image which is the other image can be displayed, and the object can be understood from the images taken in the past.

  In the third embodiment, as shown in FIG. 8A, the input unit 9 selects a target X-ray image (X-ray fluoroscopic image) from the X-ray image group stored in the table 8a in the past. The monitor 10M reads out and displays an external image associated with the X-ray image (X-ray fluoroscopic image) selected by the input unit 9 and stored in the table 8a in the past. In this case, from the selected X-ray image (X-ray fluoroscopic image), an appearance image that is the other image associated with the selected X-ray image can be displayed, and the object can be known from the image captured in the past. it can.

  In the case of the third embodiment, in order to select a target X-ray image (X-ray fluoroscopic image) from a group of X-ray images stored in the past in the table 8a, it is preferable to select the X-ray image shown in FIG. It is displayed as a list. That is, the monitor 10M reads X-ray images (X-ray fluoroscopic images) stored in the past in the table 8a and displays a plurality of lists, and the input unit 9 displays a plurality of X-ray images (listed on the monitor 10M). By selecting the target X-ray image (X-ray fluoroscopic image) from among the X-ray image group consisting of X-ray fluoroscopic images), the target is selected from the X-ray image group stored in the table 8a in the past. An X-ray image (X-ray fluoroscopic image) is selected. By using the list display, selection of an X-ray image (X-ray fluoroscopic image) can be easily performed visually.

  In the third embodiment, preferably, as shown in FIG. 8B, the monitor 10M displays the X-ray image (X-ray fluoroscopic image) selected by the input unit 9 and the X-ray image (the corresponding X-ray image). The external appearance image associated with the X-ray fluoroscopic image) and stored in the table 8a in the past is read and displayed. By displaying the selected X-ray image (X-ray fluoroscopic image) together, the correspondence with the appearance image can be easily understood.

Next, a fourth embodiment of the present invention will be described with reference to the drawings.
FIG. 8C and FIG. 8D are one embodiment of image selection and display according to the fourth embodiment. The portions common to the above-described first to third embodiments are denoted by the same reference numerals and the description thereof is omitted. Moreover, as shown in FIG. 1, the X-ray inspection apparatus 1 which concerns on the present Example 4 is the same structure as the X-ray inspection apparatus 1 which concerns on Examples 1-3.

  In Example 1 mentioned above, after the display mode of FIG. 4 (a) and FIG.4 (b), the display mode of FIG.4 (c) and FIG.4 (d), FIG.5 (a) and FIG.5 (b). Although the display mode of FIG. 5 or the display mode of FIG. 5C and FIG. 5D was performed, in the fourth embodiment, the display mode of FIG. 4A and FIG. Starting from the display mode of (c) and FIG. 8 (d). That is, after selecting one target image (appearance image in the first embodiment) from either one of the X-ray image group or the appearance image group as in the first embodiment, the one image is selected. In the fourth embodiment, without displaying the other image (X-ray fluoroscopic image in the first embodiment) associated with the (appearance image), the target X-ray image from among a plurality of X-ray images or appearance images. Alternatively, after selecting any one image (X-ray fluoroscopic image in the fourth embodiment) of the section of the appearance image, the other image (in this fourth embodiment) associated with the one image (X-ray fluoroscopic image). (Appearance image) is displayed as shown in FIG. 8 (c) and FIG. 8 (d).

Specifically, as shown in FIG. 8 (c), the monitor 10M is configured to display an X-ray fluoroscopic image (here, an X-ray fluoroscopic image group F including 16 X-ray fluoroscopic images) stored in the table 8a. ₁₀₀ ) are read out and displayed in a list (in this case, 16). As with Figure 4 of Example 1 (c), the X-ray fluoroscopic image group _{F 100,} as shown in FIG. 8 (c), consists of 16 X-ray fluoroscopic image _F 101 _{to F 116,} each of X The fluoroscopic images F _{101 to} F ₁₁₆ are stored in the table 8 a in association with each segmented portion of the appearance image.

In a state where the 16 X-ray fluoroscopic images F _{101 to} F ₁₁₆ stored in the table 8a are displayed as a list, the input unit 9 displays the 16 X-ray fluoroscopic images F _{101 to} F ₁₁₆ displayed as a list on the monitor 10M. An X-ray fluoroscopic image (X-ray fluoroscopic image F _{104 in} FIG. 8D) to be a target is selected from the inside. By selecting in this way, the target X-ray fluoroscopic image is selected by the input unit 9 from among a plurality of X-ray fluoroscopic images previously stored in the table 8a. Even in the case of selecting an X-ray fluoroscopic image associated with a segmented portion, the image selection by the input unit 9 is not particularly limited. For example, by clicking the pointer with the target X-ray fluoroscopic image with the mouse, May be performed by touching the target X-ray fluoroscopic image on the touch panel mounted on the monitor 10M, or a key corresponding to the target X-ray fluoroscopic image is directly input from the keyboard. It may be done by.

Furthermore, as shown in FIG. 8 (d), the monitor 10M displays the X-ray fluoroscopic image _{F 104} that is selected, reads the classification point P of appearance image _{I 1} associated with the X-ray fluoroscopic image _{F 104} And displaying the section P of the appearance image I ₁ associated with the selected fluoroscopic image F ₁₀₄ as distinguished from other parts of the appearance image I ₁ (for example, by identifying with a colored marker). To do. As in FIG. 4D of the first embodiment, in order to emphasize the X-ray fluoroscopic image F ₁₀₄ selected from the list-displayed X-ray fluoroscopic images F _{101 to} F ₁₁₆ , other than the X-ray fluoroscopic image F _104. the X-ray fluoroscopic image _{F 104} without displaying the X-ray fluoroscopic image _F 101 _{to F 116} may be displayed or enlarge in the full size. Further, in order to clearly display the association, as shown in FIG. 8D, a line with an arrow connecting both the images (the X-ray fluoroscopic image F ₁₀₄ and the appearance image I ₁ section P) is displayed. Also good.

  Regarding the operation and effect of the fourth embodiment, since the display modes of FIGS. 8C and 8D are the same as the display modes of FIGS. 4C and 4D, the description will be given. Omitted.

  The present invention is not limited to the above-described embodiment, and can be modified as follows.

  (1) In each of the above-described embodiments, an integrated circuit (IC) has been described as an example of an object (sample), but is not limited thereto. X-rays on an object by X-ray fluoroscopic imaging of the object, as exemplified by through-holes / patterns / solder joints of multilayer boards, castings of metals, molded products such as video decks, etc. What is necessary is just to inspect.

  (2) In each of the above-described embodiments, an X-ray inspection is performed on an object by performing X-ray fluoroscopic imaging on the object. However, an X-ray on the object is performed by performing CT imaging on the object. You may apply when carrying out an inspection. Moreover, you may apply when performing a X-ray inspection combining X-ray fluoroscopy and CT imaging.

  (3) In each of the above-described embodiments, when an appearance image section is arbitrarily selected (see FIGS. 5A and 6B), or a plurality of images (appearance images and X-ray images) are provided. When selecting an image after displaying the list, it was selected after the image was displayed, but the key or coordinate corresponding to the image was stored in advance in the table in association with the key or coordinate without displaying the image. Each of the images may be selected by inputting to.

  (4) In each of the above-described embodiments, a frame, a colored marker, and the like are exemplified to identify the segmented part from other parts. For example, the classification part may be identified as a white image (an image with a high pixel value) or a black image (an image with a low pixel value), or the pixel value may be changed so as to provide contrast to surrounding parts. Or may be identified with a mosaic.

  (5) In Example 1 mentioned above, after the display mode of FIG. 4 (a) and FIG.4 (b), the display mode of FIG.4 (c) and FIG.4 (d), FIG.5 (a) and FIG.5. Although the display mode of (b) or the display mode of FIGS. 5 (c) and 5 (d) has been performed, only the display mode of FIGS. 4 (a) and 4 (b) may be performed.

DESCRIPTION OF SYMBOLS 1 ... X-ray inspection apparatus 8 ... Memory part 8a ... Table 9 ... Input part 10 ... Output part 10M ... Monitor 12 ... Optical camera 21 ... X-ray tube 22 ... X-ray detector F ... X-ray fluoroscopic image I ... Appearance image O … Object

Claims (15)

An X-ray inspection apparatus that performs an X-ray inspection on an object,
X-ray irradiation means for irradiating an object with X-rays;
X-ray detection means for acquiring an X-ray image of the object by detecting the irradiated X-ray and performing the X-ray inspection;
An optical camera that obtains an appearance image of the object by optically photographing the object, and
Storage means for storing the X-ray image acquired by the X-ray detection means and the appearance image acquired by the optical camera in association with each other for each same object;
One target image is selected from either the X-ray image group consisting of a plurality of the X-ray images stored in the storage means or the appearance image group consisting of the plurality of appearance images. Image selection means to
An X-ray examination apparatus comprising: display means for reading out and displaying the other image associated with the one image selected by the image selection means and stored in the storage means in the past. The X-ray inspection apparatus according to claim 1,
The image selection means selects a target appearance image from the appearance image group stored in the past in the storage means,
The display means reads out and displays an X-ray image associated with the appearance image selected by the image selection means and stored in the storage means in the past. The X-ray inspection apparatus according to claim 2,
The display means reads out the appearance images stored in the past in the storage means and displays them in a plurality of lists,
The image selection means selects the target appearance image from a plurality of appearance images composed of the plurality of appearance images displayed in a list on the display means, so that the appearance images stored in the storage means in the past are selected. An X-ray inspection apparatus, wherein a target appearance image is selected from a group. In the X-ray inspection apparatus according to claim 2 or 3,
The display means displays the appearance image selected by the image selection means, and reads and displays an X-ray image associated with the appearance image and previously stored in the storage means. X-ray inspection equipment. The X-ray inspection apparatus according to claim 1,
The image selecting means selects a target X-ray image from the group of X-ray images stored in the past in the storage means,
The X-ray inspection apparatus, wherein the display unit reads out and displays an appearance image associated with the X-ray image selected by the image selection unit and previously stored in the storage unit. The X-ray inspection apparatus according to claim 5,
The display means reads the X-ray images stored in the past in the storage means and displays a plurality of lists in a list,
The image selecting means selects a target X-ray image from a group of X-ray images composed of a plurality of X-ray images displayed in a list on the display means, and is stored in the storage means in the past. An X-ray inspection apparatus, wherein a target X-ray image is selected from the X-ray image group. In the X-ray inspection apparatus according to claim 5 or 6,
The display means displays the X-ray image selected by the image selection means, and reads and displays an appearance image associated with the X-ray image and previously stored in the storage means. X-ray inspection equipment. In the X-ray inspection apparatus according to any one of claims 1 to 7,
The storage means stores the X-ray image in association with the section of the appearance image corresponding to the X-ray image,
The image selection means selects any one of a plurality of X-ray images or appearance images stored in the storage means in the past, and a target X-ray image or appearance image section,
The display means reads and displays the other image associated with the one image selected by the image selection means and stored in the storage means in the past, and the selected appearance image section or An X-ray inspection apparatus characterized in that a section of an appearance image associated with a selected X-ray image is distinguished from other parts of the appearance image and displayed. An X-ray inspection apparatus that performs an X-ray inspection on an object,
X-ray irradiation means for irradiating an object with X-rays;
X-ray detection means for acquiring an X-ray image of the object by detecting the irradiated X-ray and performing the X-ray inspection;
An optical camera that obtains an appearance image of the object by optically photographing the object, and
A plurality of X-ray images acquired by the X-ray detection means and an appearance image acquired by the optical camera are associated with each other for each same object, and the X-ray image is associated with a corresponding portion of the appearance image. Storage means for storing each;
Image selecting means for selecting any one of X-ray images or appearance image sections of interest from a plurality of X-ray images stored in the storage means in the past or the appearance image;
The other image associated with the one image selected by the image selecting means and stored in the past in the storage means is read out and displayed, and the section of the selected appearance image or the selected X-ray is displayed. An X-ray inspection apparatus comprising: display means for distinguishing and displaying a section of the appearance image associated with the image from other parts of the appearance image. The X-ray inspection apparatus according to claim 8 or 9,
The image selecting means selects a target appearance image segment from the appearance images stored in the past in the storage means,
The display means reads out and displays an X-ray image associated with the appearance image classification portion selected by the image selection means and stored in the storage means in the past, and classifies the selected appearance image. An X-ray inspection apparatus characterized in that a location is distinguished from other locations of the appearance image. The X-ray inspection apparatus according to claim 10,
The display means reads out the section of the appearance image stored in the past in the storage means and displays a plurality of lists in a list,
The image selection unit selects a target segment from a plurality of the segment locations displayed in a list on the display unit, thereby selecting a target from the appearance images stored in the storage unit in the past. The X-ray inspection apparatus characterized by selecting the division | segmentation location of the external appearance image which becomes. The X-ray inspection apparatus according to claim 10 or 11,
The display means displays the section of the appearance image selected by the image selection means, displays the section of the selected appearance image as distinguished from other parts of the appearance image, and displays the appearance image. An X-ray inspection apparatus that reads out and displays an X-ray image that is associated with the divided section and is stored in the storage unit in the past. The X-ray inspection apparatus according to claim 8 or 9,
The image selection unit selects a target X-ray image from a plurality of the X-ray images stored in the past in the storage unit,
The display means reads out and displays the section of the appearance image associated with the X-ray image selected by the image selection means and stored in the storage means in the past, and displays the selected X-ray image on the selected X-ray image. An X-ray inspection apparatus characterized in that a section of an associated appearance image is identified and displayed from another part of the appearance image. The X-ray inspection apparatus according to claim 13,
The display means reads the X-ray images stored in the past in the storage means and displays a plurality of lists in a list,
The image selection unit selects a target X-ray image from the plurality of X-ray images displayed in a list on the display unit, so that the plurality of X-ray images stored in the storage unit in the past are selected. An X-ray inspection apparatus characterized by selecting a target X-ray image from among the above. The X-ray inspection apparatus according to claim 13 or 14,
The display means displays the X-ray image selected by the image selection means, reads out and displays the section of the appearance image associated with the X-ray image and stored in the storage means in the past. An X-ray inspection apparatus characterized in that a section of an appearance image associated with a selected X-ray image is distinguished from other parts of the appearance image and displayed.

Images