JP5549407B2 - X-ray inspection equipment - Google Patents

Description

  The present invention uses an X-ray image obtained by irradiating an inspection object such as various industrial products with X-rays, and inspects the presence or absence of defects inside the inspection object based on non-destructiveness. About.

  In an X-ray inspection apparatus that inspects the presence or absence of internal defects of various industrial products in a non-destructive manner, a stage for mounting an inspection object is generally disposed between the X-ray generator and the X-ray detector. Usually, the stage is movable in a three-dimensional direction including the X-ray optical axis direction (direction connecting the X-ray generator and X-ray detection). The perspective magnification is changed by moving the stage in the X-ray optical axis direction, and the visual field center can be changed by moving the stage on a plane orthogonal thereto. There is also an apparatus for moving the X-ray generator and the X-ray detector in place of or along with the stage.

  In an X-ray inspection apparatus used for inspecting components and solder balls mounted on a circuit board, the details on the circuit board, which is an object to be inspected, are usually viewed through an enlarged perspective. Therefore, there is a problem that it is difficult to determine which position on the object to be examined is currently being viewed. As a countermeasure against such a problem, conventionally, a fluoroscopic image of an inspection object is taken and stored at a relatively low magnification, and thus with a wide field of view, and the fluoroscopic image is displayed on a display device, on the fluoroscopic image. A technique is known in which a magnified image is displayed by automatically moving a stage by designating a position and size to be magnified and transparent (see, for example, Patent Document 1).

  In addition, since an X-ray inspection apparatus used for this type of application employs an apparatus configuration for obtaining a high-magnification fluoroscopic image, an X-ray fluoroscopic image of an entire inspection object such as a circuit board can be obtained. For this purpose, an optical camera for photographing the object to be inspected on the stage is provided, and the optical camera is used to photograph from the substantially same direction as the fluoroscopic direction of the X-ray, and the appearance image is used as a map. A technology that displays the enlarged fluoroscopic image by automatically moving the stage by superimposing and displaying the fluoroscopic position on the external image or by specifying the position and size to be enlarged on the external image. Is known (see, for example, Patent Document 2).

  Furthermore, in principle, an X-ray inspection apparatus cannot display an X-ray transmission image with a visual field size larger than the detector size. Therefore, in order to obtain an X-ray transmission image with a wide field of view, multiple X-ray inspection apparatuses are moved while moving the stage. There is also known an apparatus having a so-called panoramic function in which X-ray fluoroscopic images are taken and these images are connected to form a single wide-field image (see, for example, Patent Document 3).

JP 2001-255286 A JP 2006-343193 A JP 2004-037386 A

  By the way, in an apparatus having a panoramic function for connecting a plurality of X-ray fluoroscopic images to obtain a single wide-field fluoroscopic image, the technique of the above-mentioned Patent Document 3 is used to obtain an entire image of an inspection object. As described above, the function to automatically detect the edge of the inspection object and take a partial image is known, but when obtaining a wide-field perspective image of a part of the inspection object, specify the imaging range. The operation to perform is often complicated. For example, a method of setting how many images to shoot in the vertical and horizontal directions from the current position has been put to practical use, but in this case, there is a problem that it is difficult to intuitively grasp which range is captured. is there.

  The present invention has been made in view of such a situation, and an object of the present invention is to provide an X-ray inspection apparatus capable of reliably obtaining a panoramic fluoroscopic image of a required region by a simple operation.

In order to solve the above-described problems, an X-ray inspection apparatus according to the present invention includes a stage on which an object to be inspected is provided between an X-ray generator and an X-ray detector that are arranged to face each other. A moving mechanism for moving the stage, the X-ray generator, and the X-ray detector relatively in the three-axis direction including the X-ray optical axis direction, and based on the imaging magnification and imaging field of view according to the relative position of the stage In an X-ray inspection apparatus provided with a display that displays an X-ray fluoroscopic image of a photographed object to be inspected on a display, a plurality of partial fluoroscopic images obtained by multiple times of imaging are synthesized, so that the minimum by the apparatus Panorama image synthesis means for synthesizing a perspective image of a wider area than the field of view of the image at a magnification, an optical camera for photographing the inspection object on the stage, and an appearance for displaying an appearance image of the inspection object by the optical camera Statue display hand A panorama shooting area designating unit for designating an area to be synthesized by the panorama image synthesizing unit on the appearance image by a frame, and the moving mechanism is automatically driven when designated by the panorama shooting area designating unit. Then, with the shooting magnification set to the specified magnification, the region within the specified frame is sequentially shot and displayed as a partial image to the panoramic image combining unit, and displayed by the appearance image display unit On the appearance image of the object to be inspected, when there is a designation by the fluoroscopic area designating means for designating the area within the range of the imaging magnification that can be set by the apparatus as a fluoroscopic area, and the fluoroscopic area designating means, There is provided fluoroscopic visual field automatic setting means for automatically positioning the moving mechanism so that the area within the designated frame and the fluoroscopic area coincide with each other, and the frame designated on the appearance image is provided. From of come, the designated frame is characterized by that it comprises a discriminating means for discriminating which one of the specified fluoroscopic area specifying means and the panoramic imaging area designation means (claim 1).

  The present invention uses an appearance image of an object to be inspected with an optical camera as a map, and an operator intuitively determines the range of a panoramic fluoroscopic image to be obtained by designating an area to be panoramicly photographed on the appearance image with a frame. It is possible to grasp it.

  In other words, the appearance image of the inspection object photographed with the optical camera is displayed on the display, and by specifying the frame on the image, the photographing magnification is set to the specified magnification (usually the lowest magnification. However, it is limited to the lowest magnification) In order to cover the area within the frame, the moving mechanism is driven so that the partial image is automatically captured at a predetermined photographing magnification.

Further, in the present invention, for normal shooting other than the panoramic shooting function , that is, shooting within the range of the shooting magnification that can be set by the apparatus, a perspective area specifying means for specifying a frame on the appearance image is provided and the frame is specified. Automatically determines from the size of the frame whether it is a panoramic shooting area designation or a simple fluoroscopic area designation, and moves the moving mechanism based on the action according to the judgment result. Drive control. Therefore, the operator does not need to specify whether panoramic shooting or enlarged perspective is used.

  According to the present invention, when obtaining a panoramic fluoroscopic image of a wide area that cannot be obtained by a single fluoroscopy or photographing, the operation automatically shifts to a partial image photographing operation simply by specifying a frame on the appearance image of the inspection object. Therefore, the operator does not need to perform an operation such as setting an initial position for partial image shooting or setting the number of vertical and horizontal shots as in the prior art, and at the same time, the operation can be simplified. It is possible to intuitively grasp the area to be photographed.

In addition, as in the present invention, when a function for designating a fluoroscopic region such as an enlarged fluoroscopic image with a frame on the external appearance image of the object to be inspected is provided, the panorama is automatically set according to the size of the frame specified on the external appearance image. If it is configured to discriminate between photographing or enlarged fluoroscopy and perform an operation according to the discrimination result, a required operation is automatically performed simply by setting a frame, so that the operator's setting operation is further simplified. be able to.

It is a block diagram of embodiment of this invention. FIG. 6 is a flowchart showing the designation of the field of view for perspective observation and the designation of the photographing range of the panoramic perspective image according to the embodiment of the present invention, and the apparatus operation based on the designation. It is a figure which shows the example (A) of the designation | designated of the frame on the external appearance image in the case of performing normal fluoroscopic observation by embodiment of this invention, and the example (B) of the fluoroscopic image obtained by the designation. It is a figure which shows the example (A) of designation | designated of the frame on the external appearance image in the case of obtaining a panoramic fluoroscopic image by embodiment of this invention, and the example (B) of the panoramic fluoroscopic image obtained by the designation | designated.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a configuration diagram of an embodiment of the present invention, and is a diagram illustrating a schematic diagram illustrating a schematic structure of a device and a block diagram illustrating a main functional configuration of a control device.

  The X-ray generator 1 generates X-rays having a cone-beam-like spread vertically upward, and a two-dimensional X-ray detector 2 is disposed opposite to the X-ray generator 1. A stage 3 for mounting the inspection object W is disposed between the X-ray generator 1 and the X-ray detector 2, and the stage 3 is connected to the X-ray generator 1 and the X-ray by driving the moving mechanism 4. It can move in a total of three axial directions: a direction connecting the line detector 2 (z-axis direction) and directions orthogonal to each other (x and y-axis directions) on a plane orthogonal to the line detector 2. By moving the stage 3, it is possible to change the observation position and the perspective magnification.

  X-rays generated from the X-ray generator 1 pass through the inspection object W on the stage 3 and enter the X-ray detector 2 to be detected, and the detection output is temporarily transmitted through the image data capturing circuit 10. It is sent to the storage unit 11.

  Above the stage 3, an optical camera 5 is disposed adjacent to the X-ray detector 2. The optical camera 5 can capture an entire image of the inspection object W on the stage 3, and the stage 3 is positioned at a fixed position with respect to the optical camera 5 at the time of capturing. The imaging output of the inspection object W from the optical camera 5 is stored in the appearance image storage unit 13 via the image data capturing circuit 12.

  The contents stored in the fluoroscopic image storage unit 11 and the appearance image storage unit 13 are appropriately called as described later according to instructions from the display control unit 14 and displayed on the display 15. The stored content of the fluoroscopic image storage unit 11 is substantially the same as the fluoroscopic image based on the fluoroscopic data acquired through the image data acquisition circuit 10 in the display unit 15 in normal fluoroscopic work, that is, fluoroscopic work other than panoramic photography described later. Displayed in real time. In addition to such a fluoroscopic image display area, the display 15 displays an appearance image of the inspection object W captured via the image data capturing circuit 12 and stored in the appearance image storage unit 13. An area is set, and this appearance image is always displayed on the display 15.

  In panoramic photography to be described later, partial images that are sequentially photographed are stored in the perspective image storage unit 11, and after the partial images are photographed, the partial images are captured and joined by the image composition unit 18. A panoramic perspective image is constructed. The combined panoramic fluoroscopic image is displayed on the display 15 through the display control unit 14.

  The display control unit 14 is placed under the control of the control unit 16, and the control unit 16 is also under the control of the moving mechanism 4, and an operation unit 17 including a mouse, a keyboard, a joystick and the like is connected thereto. By operating the operation unit 17, the moving mechanism 4 can be driven to move the stage 3 by an arbitrary direction and distance.

  In addition, by dragging the mouse of the operation unit 17 or the like, a rectangular frame can be designated and displayed on the appearance image displayed on the display unit 15 at an arbitrary position and size. By setting the frame, the control unit 15 gives a drive control command to the moving mechanism 4 according to a procedure described later, and automatically acquires a fluoroscopic image in the frame.

  Here, the image data capturing circuits 10 and 12, the perspective image storage unit 11 and the appearance image storage unit 13, the display control unit 14, the display unit 15, the control unit 16, the operation unit 17 and the image composition unit 18 are actually 1 is configured by a computer and its peripheral devices, and implements functions written in an installed program. In FIG. 1, for convenience of explanation, each main function is represented by a block diagram.

  Next, the operation of the above embodiment of the present invention will be described. FIG. 2 is a flowchart showing the designation of the field of view for perspective observation and the designation of the photographing range of the panoramic perspective image and the operation of the apparatus based on the designation according to the embodiment of the present invention.

  After the operator sets the inspection object W on the stage 3 and acquires the appearance image, the range is designated by a frame on the appearance image displayed on the display unit 15. By specifying the frame, it is automatically determined whether the specification is for performing normal fluoroscopic observation or for performing panoramic photography. For example, if the specified frame range is smaller than the visual field size at the minimum magnification by the device, it is determined as normal fluoroscopic observation, and the specified frame range is larger than the visual field size at the minimum magnification. Is determined to perform panoramic photography.

  When it is determined that normal fluoroscopic observation is performed, the stage 3 is moved in the x, y, and z axis directions and automatically positioned so that the designated frame and the field of view of the X-ray detector 2 coincide. An example is shown in FIG. As shown in FIG. 6A, when a frame f smaller than the visual field size at the minimum magnification is designated on the appearance image C, it is determined that it is normal fluoroscopic observation, and the frame f and the visual field coincide with each other. Then, the stage 3 is automatically positioned to obtain a fluoroscopic image T as shown in FIG.

  On the other hand, when it is determined that the panorama shooting is performed, the stage 3 is moved in the z-axis direction so as to obtain the minimum magnification, and a plurality of partial images are shot so as to cover the designated frame. An example is shown in FIG. As shown in FIG. 5A, when a frame F larger than the field size at the minimum magnification is designated on the appearance image C, it is determined that the panorama shooting is performed, and the stage 3 is moved to the position of the minimum magnification in the z-axis direction. After moving to, the stage 3 is moved in the x and y directions so as to capture the upper left position of the frame F so as to cover the frame F, for example, as shown in FIG. Photographs and sequentially captures partial images P2, P3,. These partial images P1, P2,... Are stored in the perspective image storage unit 11. Then, after the photographing of all the partial images covering the frame F is completed, the partial images P1, P2,... Are connected in the image composition unit 18 to construct one panoramic image P0 and display it on the display 15. indicate. When photographing the partial images P1, P2,..., A known method such as overlapping adjacent portions can be employed.

  According to the above-described embodiment of the present invention, the operator does not need to specify in advance whether it is normal fluoroscopic observation such as magnified fluoroscopy or panoramic shooting, and specifies a frame according to an area to be viewed. Then, since the apparatus automatically performs the operation thereafter, the operation becomes easier as compared with the conventional apparatus of this type.

  Here, in the above embodiment, only the stage 3 is moved in each direction for changing the magnification and changing the visual field position. However, the X-ray generator 1 or the X-ray detector 2 is moved in each direction. It can also be configured.

DESCRIPTION OF SYMBOLS 1 X-ray generator 2 X-ray detector 3 Stage 4 Movement mechanism 5 Optical camera 10 and 12 Image data capture circuit 11 Perspective image memory | storage part 13 Appearance image memory | storage part 14 Display control part 15 Display 16 Control part 17 Operation part 18 Image Composite part C appearance image f, F frame

Claims (1)

A stage for mounting an object to be inspected is provided between the X-ray generator and the X-ray detector arranged opposite to each other, and the stage, the X-ray generator and the X-ray detector are relatively moved to each other. A display that includes a moving mechanism that moves in three axial directions including the optical axis direction, and displays an X-ray fluoroscopic image of the object to be inspected based on the imaging magnification and the imaging field according to the relative position of the stage on the display. In the X-ray inspection apparatus equipped with the instrument,
A panoramic image combining means for combining a plurality of partial perspective images obtained by a plurality of photographing operations to combine a perspective image of an area wider than the field of view of the image at the minimum magnification by the apparatus, and an object on the stage. An optical camera for photographing the inspection object, an appearance image display means for displaying an appearance image of the inspection object by the optical camera, and panorama photographing for designating a region to be synthesized on the appearance image by the panorama image synthesizing means with a frame When designated by the area designating means and the panoramic shooting area designating means, the moving mechanism is automatically driven to sequentially photograph the area within the designated frame with the photographing magnification set to the specified magnification. Partial image automatic photographing means to be supplied as a partial image to the panoramic image synthesizing means,
On the appearance image of the object to be inspected displayed by the appearance image display means, a fluoroscopic area designating means for designating an area within the range of the photographing magnification that can be set by the apparatus as a fluoroscopic area, and the fluoroscopic area designating means When there is designated by the above, it is provided with a fluoroscopic visual field automatic setting means for automatically positioning the moving mechanism so that the area in the designated frame and the fluoroscopic area coincide with each other, and the frame designated on the appearance image An X-ray inspection apparatus comprising: a determination unit that determines whether the designated frame is designated as the panoramic imaging region designation unit or the fluoroscopic region designation unit based on the size of the panorama image.