CN103163163A - X-ray inspection apparatus - Google Patents
X-ray inspection apparatus Download PDFInfo
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- CN103163163A CN103163163A CN2011104226198A CN201110422619A CN103163163A CN 103163163 A CN103163163 A CN 103163163A CN 2011104226198 A CN2011104226198 A CN 2011104226198A CN 201110422619 A CN201110422619 A CN 201110422619A CN 103163163 A CN103163163 A CN 103163163A
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- 238000007689 inspection Methods 0.000 title abstract description 5
- 230000007246 mechanism Effects 0.000 claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims abstract description 6
- 238000002594 fluoroscopy Methods 0.000 claims description 26
- 238000012876 topography Methods 0.000 claims description 18
- 230000000007 visual effect Effects 0.000 claims description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000003786 synthesis reaction Methods 0.000 claims description 2
- 230000002194 synthesizing effect Effects 0.000 claims 1
- 230000006870 function Effects 0.000 description 8
- 230000009471 action Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
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Abstract
The invention provides an X-ray inspection apparatus which can reliably obtain panoramic perspective images of required images through simple operation. The X-ray inspection apparatus can synthesize a plurality of local images to obtain the panoramic perspective images, and is provided with an optical camera (5) for shooting a to-be-inspected object W on an objective table 3. Appearance images of the to-be-inspected object W shot by the optical camera (5) is displayed on a display (15). On the appearance images, frames are used to specify required areas of the panoramic perspective images; a moving mechanism is automatically driven, wherein the moving mechanism enables relative positions of the objective table 3, an X-ray generating means (1) and an X-ray detector (2) to move; areas within specified frames are sequentially shot to obtain a plurality of the local images on a basis of a perspective magnification set to be a predetermination; and the local images are synthesized to construct the panoramic perspective images of specified areas, thereby enabling a setting operation for shooting of the panoramic perspective images to be easy.
Description
Technical field
The present invention relates to a kind of X ray checking device, this device utilizes resulting radioscopic images of checked property X-ray irradiation such as various industrial products, and there is zero defect inspection the inside to checked property on non-destructive basis.
Background technology
The X ray checking device that has zero defect to check to the inside of various industrial products on non-destructive basis, usually, have the structure that the objective table of checked property is loaded in configuration between X-ray generator and X-ray detector, objective table can be at the three-dimensional direction moving that comprises X ray optical axis direction (closure of X-ray generator and X-ray detector) usually.By making this objective table move to change the perspective multiplying power to the X ray optical axis direction, move on perpendicular plane by making objective table, can be so that center, the visual field also changes.Replace in addition objective table or make X-ray generator and X-ray detector mobile device together with objective table.
About the inspection X ray checking device used of the parts that are equipped with on circuit substrate, soldered ball etc., normally observe carrying out magnification fluoroscopy as the trickle section on the circuit substrate of checked property.Therefore, exist and be difficult to judge that the position of having an X-rayed is the problem at what position on checked property.Countermeasure as such problem, in the past, known have following such technology, that is, with lower multiplying power, thereby take the fluoroscopy images of checked property with the wider visual field, and with its storage, this fluoroscopy images is displayed in display, by specifying position and the size that should be exaggerated perspective on fluoroscopy images, makes the objective table automated movement to show the technology of enlarged image.(for example referring to Patent Document 1)
in addition, about being used for the X ray checking device of this purposes, due to the apparatus structure that has adopted take the fluoroscopy images that obtains high power as purpose, make the radioscopy image of the integral body of the checked properties such as circuit substrate to obtain, therefore, also known have following such technology, namely, the photographic camera that checked property on objective table is taken is set, with this photographic camera from taking with the roughly the same direction of the perspective direction of X ray, use this appearance images as map, overlapping demonstration perspective position all the time on this appearance images, perhaps specify position and the size that be exaggerated demonstration on this appearance images, make thus the objective table automated movement and show the technology of magnification fluoroscopy image.(for example referring to Patent Document 2)
Moreover, for X ray checking device, on principle, can not show the radioscopy image with the large visual field size of ratio sensor size, therefore also known have a device with so-called panorama function, that is, and and in order to obtain the radioscopy image in the wide visual field, take many fluoroscopy images when objective table is moved, these Image Mosaics are got up to form the device of 1 wide field-of-view image.(for example referring to Patent Document 3)
[prior art document]
[patent documentation]
Patent documentation 1 Japanese Patent Laid-Open 2001-255286 communique
Patent documentation 3 Japanese Patent Laid-Open 2004-037386 communiques
Summary of the invention
[problem that invention solves]
But, splice several radioscopy images and obtain in the device with panorama function of 1 wide visual field fluoroscopy images, known have when obtaining the general image of checked property also as the technology of putting down in writing in patent documentation 3, automatically detect the edge of checked property, and the function that topography is taken, but at the wide visual field fluoroscopy images of a part that obtains checked property, the operation of appointment coverage is more complicated often.For example, exist following such problem: although to beginning to take respectively method that a few width images set from present position by practical application on direction in length and breadth, but under these circumstances, be difficult to hold intuitively which type of scope is taken.
The present invention is the invention of making in view of such problem, and the present invention can obtain the X ray checking device of panoramic perspective image of desired zone as problem by shirtsleeve operation reliably to provide a kind of just.
in order to solve above-mentioned problem, X ray checking device in the present invention, it is being provided with the objective table that carries checked property mutually relatively between X-ray generator of configuration and X-ray detector, and have travel mechanism and display, described travel mechanism makes this objective table, X-ray generator and X-ray detector relatively move on the three-dimensional that comprises the X ray optical axis direction, described display will be shown in display based on the shooting multiplying power of the relative position of described objective table and the radioscopy image of taking checked property captured under the visual field, described X ray checking device is characterised in that, comprise: the panoramic picture synthesis unit, it synthesizes takes by several a plurality of partial perspective images that obtain, the fluoroscopy images in the zone of the looking away of the image during synthetic minimum multiplying power than this X ray checking device thus, photographic camera, it takes the checked property on described objective table, the appearance images display unit, it shows the appearance images of the checked property that described photographic camera is captured, pan-shot Region specification unit, it utilizes frame to specify on this appearance images should be by the synthetic zone of described panoramic picture synthesizer, with topography's automatic shooting unit, it is when the appointment that this pan-shot Region specification unit has been arranged, automatically drive described travel mechanism, be set as under the state of regulation multiplying power will take multiplying power, zone in specified frame is taken successively, and captured image is offered described panoramic picture synthesizer (technical scheme 1) as topography.
Here, in X ray checking device of the present invention, formation (technical scheme 2) below preferred the employing, it also comprises: the see-through area designating unit, and it specifies zone in the scope of the shooting multiplying power that this X ray checking device can set as see-through area on the appearance images of the shown checked property of described appearance images display unit with frame; Perspective automatic setting unit, the visual field, it automatically positions described travel mechanism when the appointment of described see-through area designating unit has been arranged, so that the zone in specified frame is consistent with see-through area; And judging unit, it is according to the size of the frame of appointment on described appearance images, and the frame that judges this appointment is the appointment of pan-shot Region specification unit or the appointment of see-through area designating unit.
The present invention be the appearance images of checked property that photographic camera is taken the photograph as map, and on this appearance images, by specify the zone of wanting pan-shot with frame, the operator can hold the scope of the panoramic perspective image that obtains intuitively.
That is, show the appearance images of the checked property of taking the photograph with photographic camera in display, designating frame on this appearance images is made as the regulation multiplying power and (is generally minimum multiplying power will take multiplying power thus.But be not limited to minimum multiplying power) the basis on, drive travel mechanism, and shooting multiplying power according to the rules automatically takes topography, to cover the zone in this frame.
In addition, the invention that technical scheme 2 is related, for the common shooting beyond the pan-shot function, the i.e. shooting of the scope of the shooting multiplying power that can set of this device, be provided with on appearance images the see-through area designating unit with the frame appointment, and when the appointment of frame has been arranged, judge automatically that according to the size of frame this appointment is the appointment in pan-shot zone, still the only appointment of see-through area, and drive travel mechanism according to the action control based on judged result.Therefore, the operator not need to specify be pan-shot or magnification fluoroscopy etc.
[effect of invention]
According to the present invention, in the time will obtaining once to have an X-rayed or take the panoramic perspective image in the wide zone that can't obtain, only by specify the shooting action that just can automatically be transitioned into topography with frame on the appearance images of checked property, therefore the operator does not need to set the initial position of taking for topography as in the past or sets the operation of photographic images number on direction in length and breadth etc., operation become simpler in, can also intuitively hold the zone that should carry out pan-shot.
In addition, invention as related in technical scheme 2, have in the lump in the situation that utilize the function of the see-through area of fluoroscopy images that frame specify to amplify etc. on the appearance images of checked property, be pan-shot or enlarge perspective according to the big or small automatic decision of frame specified on appearance images, and according to the judged result execution action, adopt such formation, only just can automatically carry out required action by setting frame, so operator's setting operation becomes easier.
Description of drawings
Fig. 1 is the pie graph of example of the present invention.
Fig. 2 illustrates according to the visual field of the fluoroscopic observation of example of the present invention to specify and the appointment of the coverage of panoramic perspective image, and based on the process flow diagram of the device action of this appointment.
Fig. 3 is illustrated in the example (B) that carries out in the situation of common fluoroscopic observation on the appearance images example (A) of designating frame and the fluoroscopy images by this appointment gained according to example of the present invention.
Fig. 4 is illustrated in the situation that example according to the present invention obtains the panoramic perspective image example (B) of on the appearance images example (A) of designating frame and the panoramic perspective image by this appointment gained.
[explanation of symbol]
1 X-ray generator
2 X-ray detectors
3 objective tables
4 travel mechanisms
5 photographic cameras
10,12 image data acquisition circuit
11 fluoroscopy images storage parts
13 appearance images storage parts
14 display control units
15 displays
16 control parts
17 operating portions
18 images synthesize section
The C appearance images
F, the F frame.
Embodiment
Below, with reference to accompanying drawing, example of the present invention is described.
Fig. 1 is the pie graph of example of the present invention, the block diagram that its major function of putting down in writing in the lump and illustrating the schematic diagram of general structure of indication device and expression control device consists of.
The direction emission that X-ray generator 1 makes progress to vertical has the X ray of the expansion of cone-shaped beam shape, is relatively set with the X-ray detector 2 of bidimensional above this X-ray generator 1.Between X-ray generator 1 and X-ray detector 2, be provided with for the objective table 3 that loads checked property W, driving by travel mechanism 4, this objective table 3 can the mutually perpendicular direction (x, y direction of principal axis) on the closure (Z-direction) of X-ray generator 1 and X-ray detector 2 and perpendicular plane amounts on 3 direction of principal axis and moves.By the movement of this objective table 3, can carry out the change of observation place, the change of perspective multiplying power.
Incide X-ray detector 2 from the X ray of X-ray generator 1 emission through the checked property W on objective table 3, by its detection, it detects output and temporarily is sent to fluoroscopy images storage part 11 via image data acquisition circuit 10.
Above objective table 3, be adjacent to be provided with photographic camera 5 with X-ray detector 2.This photographic camera 5 can be taken the general image of the checked property W on objective table 3, when taking, with respect to photographic camera 5, objective table 3 is positioned on certain position.From the shooting output of the checked property W of this photographic camera 5 outputs, store appearance images storage part 13 into via image data acquisition circuit 12.
The memory contents of above-mentioned fluoroscopy images storage part 11 and appearance images storage part 13 is suitably called as described later, and is shown in display 15 according to the instruction from display control unit 14.The memory contents of fluoroscopy images storage part 11 is presented on display 15 with realtime graphic based on the fluoroscopy images by the obtained fluoro data of image data acquisition circuit 10 when to carry out common perspective operation be perspective operation beyond pan-shot described later like this substantially.In addition, in display 15 except the viewing area of such fluoroscopy images, also be set with by view data and obtain the viewing area that circuit 12 obtained and be stored in the appearance images of the checked property W in appearance images storage part 13, this appearance images shows when normal in display 15.
In pan-shot described later, the topography of being taken successively is stored in respectively in fluoroscopy images storage part 11, after the shooting of topography finishes, each topography is input to image and synthesizes in section 18, and splice therein, construct out thus a width panoramic perspective image, the panoramic perspective image after this is synthetic shows in display 15 via display control unit 14.
In addition, the mouse by drag operation operating portion 17 etc. can be specified optional position and the size of rectangle frame and show on the appearance images in being shown in display 15.By the setting of above-mentioned frame, control part 15 will drive steering order and transfer to travel mechanism 4 according to following order, thereby automatically obtain the fluoroscopy images in frame.
Here, the synthetic section 18 of above-mentioned image data acquisition circuit 10 and 12, fluoroscopy images storage part 11 and appearance images storage part 13, display controller 14, display 15, control part 16, operating portion 17 and image is actually by computing machine and peripheral equipment thereof and consists of, be used for realizing being written into the function of mounted program, but the convenience of Fig. 1 in order to illustrate expressed each main function in the mode of block scheme.
Below, the effect of above example of the present invention is described.Fig. 2 shows according to the visual field of the fluoroscopic observation of example of the present invention and specifies and the appointment of the coverage of panoramic perspective image, and based on the process flow diagram of the device action of this appointment.
The operator is being placed on checked property W on objective table 3 and after obtaining appearance images, by frame specified scope on the shown appearance images that goes out of display 15.According to the appointment of this frame, this appointment of automatic decision is be used to carrying out common fluoroscopic observation or being used for carrying out pan-shot.For example, in the situation that the visual field size of the scope of appointed frame during than the minimum multiplying power of this device is little, be judged as common fluoroscopic observation, in the situation that the visual field size of the scope of appointed frame during than minimum multiplying power is large, is judged as and carries out pan-shot.
When being judged as common fluoroscopic observation, make objective table 3 at x, y moves on the z direction of principal axis, and automatically positions, so that appointed frame is consistent with the field range of X-ray detector 2.The example is shown in Figure 3.As shown in Fig. 3 (A), during the little frame f of the visual field size when having specified than minimum multiplying power on the outward appearance image C, be judged as common fluoroscopic observation, automatically objective table 3 is positioned so that this frame f is consistent with the visual field, thus, obtain the fluoroscopy images T as shown in Fig. 3 (B), and show in display 15.
On the other hand, when being judged as pan-shot, objective table 3 is moved in order to reach minimum multiplying power on the z axle, take many topographies, to cover specified frame.This example illustrates at Fig. 4.Just as Fig. 4 (A) as shown in, in the large frame F of the visual field size when appointment is than minimum multiplying power on the outward appearance image C, be judged as pan-shot, at moving stage 3 on the z direction of principal axis to the position of minimum multiplying power, for covering frame F, as shown in Fig. 4 (B), for example for taking the position, the upper left corner of frame F, make objective table 3 at x, move on the y direction of principal axis, take the P1 of topography, and carry out successively the P2 of topography, P3 ... shooting.The P1 of these topographies, P2 ... be stored in fluoroscopy images storage part 11.In addition, after the shooting of whole topography of covering frame F is completed, synthesize the splicing P1 of each topography in section 18 at image, P2 ... thereby, form a width panoramic picture P0, and show in display 15.At the P1 of topography, P2 ... shooting the time, can adopt to make the mutually adjacent known gimmick such as overlap.
According to above example of the present invention, it is common fluoroscopic observation or the pan-shots such as magnification fluoroscopy that operator no longer needs appointment in advance, only according to the Region specification frame of wanting to observe, device just can automatically perform action afterwards, this compares with the device of this kind before, operates more simple.
In above example, for the change that realizes multiplying power and the change of position, the visual field only make objective table 3 move up in each side, but also can make X-ray generator 1 and even X-ray detector 2 move on all directions here.
Claims (2)
1. X ray checking device, it is being provided with the objective table that carries checked property mutually relatively between X-ray generator of configuration and X-ray detector, and have travel mechanism and display, described travel mechanism makes this objective table, X-ray generator and X-ray detector relatively move on the three-dimensional that comprises the X ray optical axis direction, described display will be shown in display with the radioscopy image of taking checked property captured under the visual field in the shooting multiplying power of the relative position based on described objective table
Described X ray checking device is characterised in that, comprising:
The panoramic picture synthesis unit, it is synthetic takes by several a plurality of partial perspective images that obtain, the fluoroscopy images in the zone of the looking away of the image when synthesizing thus the minimum multiplying power than this X ray checking device;
Photographic camera, it takes the checked property on described objective table;
The appearance images display unit, it shows the appearance images of the checked property that described photographic camera is captured;
Pan-shot Region specification unit, it utilizes frame to specify on this appearance images should be by the synthetic zone of described panoramic picture synthesizer; With
Topography's automatic shooting unit, it is when the appointment that this pan-shot Region specification unit has been arranged, automatically drive described travel mechanism, be set as under the state of regulation multiplying power will take multiplying power, zone in specified frame is taken successively, and captured image is offered described panoramic picture synthesizer as topography.
2. X ray checking device as claimed in claim 1, it also comprises:
The see-through area designating unit, it specifies zone in the scope of the shooting multiplying power that this X ray checking device can set as see-through area on the appearance images of the shown checked property of described appearance images display unit with frame;
Perspective automatic setting unit, the visual field, it automatically positions described travel mechanism when the appointment of described see-through area designating unit has been arranged, so that the zone in specified frame is consistent with see-through area; With
Judging unit, it is according to the size of the frame of appointment on described appearance images, and the frame that judges this appointment is the appointment of pan-shot Region specification unit or the appointment of see-through area designating unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104226198A CN103163163A (en) | 2011-12-16 | 2011-12-16 | X-ray inspection apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104226198A CN103163163A (en) | 2011-12-16 | 2011-12-16 | X-ray inspection apparatus |
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| CN103163163A true CN103163163A (en) | 2013-06-19 |
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| CN2011104226198A Pending CN103163163A (en) | 2011-12-16 | 2011-12-16 | X-ray inspection apparatus |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107976298A (en) * | 2017-12-11 | 2018-05-01 | 大连锐进科技发展有限公司 | A kind of mouse detection apparatus |
| CN110383051A (en) * | 2017-04-11 | 2019-10-25 | 东芝It·控制系统株式会社 | X ray checking device |
| CN111351810A (en) * | 2020-03-30 | 2020-06-30 | 山东省分析测试中心 | Analysis method for fracture failure behavior of metal with multi-scale defects |
| CN114531767A (en) * | 2022-04-20 | 2022-05-24 | 深圳市宝润科技有限公司 | Visual X-ray positioning method and system for handheld X-ray machine |
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| JP2003028812A (en) * | 2001-07-17 | 2003-01-29 | Shimadzu Corp | Radioscopic apparatus |
| US7016109B2 (en) * | 2002-09-10 | 2006-03-21 | Olympus Optical Co., Ltd. | Microscopic image capture apparatus and microscopic image capturing method |
| JP2006343193A (en) * | 2005-06-08 | 2006-12-21 | Shimadzu Corp | X-ray fluoroscope |
| CN102124320A (en) * | 2008-06-18 | 2011-07-13 | 苏尔吉克斯有限公司 | A method and system for stitching multiple images into a panoramic image |
| WO2011114610A1 (en) * | 2010-03-18 | 2011-09-22 | パナソニック株式会社 | Omnidirectional image processing device and omnidirectional image processing method |
-
2011
- 2011-12-16 CN CN2011104226198A patent/CN103163163A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003028812A (en) * | 2001-07-17 | 2003-01-29 | Shimadzu Corp | Radioscopic apparatus |
| US7016109B2 (en) * | 2002-09-10 | 2006-03-21 | Olympus Optical Co., Ltd. | Microscopic image capture apparatus and microscopic image capturing method |
| JP2006343193A (en) * | 2005-06-08 | 2006-12-21 | Shimadzu Corp | X-ray fluoroscope |
| CN102124320A (en) * | 2008-06-18 | 2011-07-13 | 苏尔吉克斯有限公司 | A method and system for stitching multiple images into a panoramic image |
| WO2011114610A1 (en) * | 2010-03-18 | 2011-09-22 | パナソニック株式会社 | Omnidirectional image processing device and omnidirectional image processing method |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110383051A (en) * | 2017-04-11 | 2019-10-25 | 东芝It·控制系统株式会社 | X ray checking device |
| CN107976298A (en) * | 2017-12-11 | 2018-05-01 | 大连锐进科技发展有限公司 | A kind of mouse detection apparatus |
| CN111351810A (en) * | 2020-03-30 | 2020-06-30 | 山东省分析测试中心 | Analysis method for fracture failure behavior of metal with multi-scale defects |
| CN114531767A (en) * | 2022-04-20 | 2022-05-24 | 深圳市宝润科技有限公司 | Visual X-ray positioning method and system for handheld X-ray machine |
| CN114531767B (en) * | 2022-04-20 | 2022-08-02 | 深圳市宝润科技有限公司 | Visual X-ray positioning method and system for handheld X-ray machine |
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Application publication date: 20130619 |