JP5482408B2 - Levitation transfer device - Google Patents

Description

  The present invention relates to a levitation conveyance apparatus that levitates and conveys a substrate such as a glass substrate in a conveyance direction.

  2. Description of the Related Art In recent years, various developments have been made on levitation conveyance devices in the field of clean conveyance, and there is one shown in Patent Document 1 (already filed by the applicant of the present application) as a prior art of levitation conveyance devices. And the structure of the levitating conveyance apparatus based on a prior art is as follows.

  That is, the levitation transfer apparatus according to the prior art includes an apparatus main body (apparatus frame), and the apparatus main body is provided with a transfer mechanism for transferring the substrate in the transfer direction. The apparatus main body is provided with a plurality of levitation units that float the substrate using the pressure of compressed air (an example of levitation gas) along the conveyance direction and the conveyance width direction orthogonal to the conveyance direction. . The interior of each levitation unit is connected to a compressed air supply source (an example of a levitation gas supply source) that supplies compressed air, and a nozzle that ejects compressed air is formed on the upper surface of each levitation unit. Yes. Here, normally, due to the demand for weight reduction and cost reduction (cost reduction), each floating unit is manufactured by resin injection molding, and the thickness of each floating unit is very thin. . In addition, a conveyance area | region (area | region for conveying a board | substrate) is dividedly formed (formed) by the several levitation unit.

  Therefore, the compressed air is supplied to the inside of each floating unit by the operation of the compressed air supply source, and the compressed air is ejected from the nozzle of each floating unit, and the transport mechanism is appropriately operated. Accordingly, the substrate can be floated and transported in the transport direction (conveyed in a floated state) while generating a compressed air pool layer (an example of a floating gas pool layer) between the plurality of floating units and the substrate.

  In addition to Patent Document 1, there is a prior art related to the present invention shown in Patent Document 2.

JP 2006-182563 A Japanese Patent No. 4333925

  By the way, as described above, each floating unit is manufactured by injection molding of resin, and since the thickness of each floating unit is thin, the rigidity of each floating unit is low and work associated with the floating conveyance of the substrate (for example, When performing adjustment of the floating unit, maintenance of the floating unit, recovery of a damaged substrate, etc., the operator needs to pay attention not to put weight on the floating unit. On the other hand, in recent years, with the increase in size of the substrate, the transfer area has also expanded in the transfer width direction, and an operator accesses the center side (central portion) of the transfer area in the transfer width direction without placing weight on the floating unit. It is not easy. For this reason, when the work associated with the floating transfer of the substrate is performed on the center side in the transfer width direction of the transfer area, there is a problem that the work is troublesome and complicated, and the work time becomes long.

  Note that the above-described problem also occurs when each floating unit is manufactured by, for example, aluminum sheet metal processing and the rigidity of each floating unit is low.

  Therefore, an object of the present invention is to provide a levitating and conveying apparatus having a novel configuration that can solve the above-described problems.

  The present invention relates to a levitation conveyance apparatus that floats and conveys a substrate in the conveyance direction, a conveyance mechanism that is provided in the apparatus main body and conveys the substrate in the conveyance direction, and conveyance that is perpendicular to the conveyance direction and the conveyance direction to the apparatus main body. A plurality of nozzles that are arranged along the width direction, are connected to a floating gas supply source that supplies a floating gas inside, and jets the floating gas on the upper surface, and floats the substrate using the pressure of the floating gas. And a plurality of floating units combined with a plurality of dedicated floating units and a plurality of combined floating units configured to be more rigid than the dedicated floating unit so that they can also be used as a scaffold. (In other words, the plurality of levitation units are divided into the plurality of dedicated levitation units and the plurality of scaffolding levitation units). The gist. Note that a transport region (a region for transporting a substrate) is defined by the plurality of floating units.

  Here, in the claims and the specification of the present application, “provided” means not only directly provided but also indirectly provided through another member and integrally formed. The term “arranged” includes not only directly disposed but also indirectly provided via another member. The “floating gas” means compressed air (air), argon gas, nitrogen gas and the like.

  According to the feature of the present invention, the floating gas is supplied to the inside of each floating unit by the operation of the floating gas supply source, the floating gas is ejected from the nozzle of each floating unit, and the transport mechanism is appropriately operated. . Thereby, the substrate can be floated and transported in the transport direction (conveyed in a state of being floated) (general action).

  In addition to the above-described general action, the plurality of floating units are mixed with the plurality of dedicated floating units and the plurality of combined floating units configured so as to be used as a scaffold. Therefore, even if the transfer area expands in the transfer width direction with the increase in the size of the substrate, the operator can use the plurality of scaffold and levitating units as a scaffold or use the plurality of scaffold and levitating units as a scaffold. By riding on the body, it is possible to easily access the central side (central portion) of the transport area in the transport width direction (specific action).

  According to the present invention, since the operator can easily access the center side of the transport region in the transport width direction even if the transport region expands in the transport width direction as the substrate becomes larger, the transport When an operation associated with the floating conveyance of the substrate is performed on the center side in the conveyance width direction of the region, the operation can be simplified and the operation time can be greatly shortened.

It is a partial top view of the levitation conveyance apparatus which concerns on embodiment of this invention. It is an expanded sectional view of the arrow view part II in FIG. It is an expanded sectional view along the III-III line in FIG. It is a front view of the levitating conveyance apparatus which concerns on embodiment of this invention. It is the figure along the VV line in FIG. It is a figure which shows the state which changed the arrangement | positioning pattern of a some scaffolding levitating unit.

  An embodiment of the present invention will be described with reference to FIGS. In the drawings, “FF” indicates the forward direction, “FR” indicates the backward direction, “L” indicates the left direction, and “R” indicates the right direction.

  As shown in FIGS. 1, 4, and 5, a levitating and conveying apparatus 1 according to an embodiment of the present invention is an apparatus that levitates and conveys a substrate W such as a glass substrate in a conveying direction (front-rear direction), for example. An apparatus main body (apparatus frame) 3 extending in the transport direction is provided. Further, the apparatus main body 3 is provided so as to be connected between the support column 5 extending in the transport direction, the plurality of support columns 7 integrally provided on the lower side of the support table 5, and the plurality of support columns 7. And a plurality of connecting members 9 provided.

  The support 5 is provided with a transport mechanism 11 that transports the substrate W in the transport direction. The specific configuration of the transport mechanism 11 is as follows.

  Near the left end portion of the support 5, a plurality of first transport rollers 13 that support the back surface of the substrate W are provided at intervals in the transport direction via the bracket 15. It can rotate around an axis parallel to the conveyance width direction (left-right direction) orthogonal to the conveyance direction. Then, at appropriate positions near the left end of the support base 5, a plurality of (only one is shown) first transports that rotate a plurality of first transport rollers 13 in correspondence with each other around an axis parallel to the transport width direction. A motor 17 is provided along the transport direction. Further, a first drive shaft 19 extending in the transport direction is integrally provided on the output shaft of each first transport motor 17 via a coupling or the like, and each first drive shaft 19 is supported by the support base 5. The worm 21 and the worm wheel 23 are supported by the roller shafts of the plurality of first conveying rollers 13 that are supported around the shaft center (the shaft center of the first drive shaft 19) via a bearing or the like. It is linked and connected through.

  Similarly, a plurality of second transport rollers 25 that support the back surface of the substrate W are provided in the vicinity of the right end portion of the support base 5 at intervals in the transport direction via brackets 27, and each second transport roller. 25 is rotatable around an axis parallel to the conveyance width direction. Then, a plurality of (only one shown) second transports that rotate a plurality of second transport rollers 25 in a corresponding relationship around an axis parallel to the transport width direction at an appropriate position near the left end of the support base 5. A motor 29 is provided along the transport direction. Further, a second drive shaft 31 extending in the transport direction is integrally provided on the output shaft of each second transport motor 29 via a coupling or the like, and each second drive shaft 31 is provided on the support base 5. The worm 33 and the worm wheel 35 are supported on the roller shafts of the plurality of second transport rollers 25 that are supported around a shaft center (the shaft center of the second drive shaft 31) via a bearing or the like. It is linked and connected through.

  Instead of the transport mechanism 11 including the plurality of first transport rollers 13 and the plurality of second transport rollers 25 that support the back surface of the substrate W, the end portion of the substrate W can be gripped and moved in the front-rear direction. You may use another conveyance mechanism provided with the clamper.

  As shown in FIGS. 1, 3, and 5, the support 5 is provided with a plurality of chambers 37 that store compressed air (an example of floating gas) at intervals in the transport direction. The chamber 37 extends in the conveyance width direction. Further, a supply fan (a fan filter unit in the embodiment of the present invention) is provided on the lower surface of each chamber 37 as a compressed air supply source (an example of a floating gas supply source) that supplies compressed air to the inside of the chamber 37. 39) is provided via the bracket 41.

  On the upper surface of each chamber 37, a plurality of hollow levitation units 43 that float the substrate W using the pressure of compressed air are arranged along the transport direction and the transport width direction, in other words, support A plurality of levitation units 43 are arranged on the table 5 along a conveyance direction and a conveyance width direction via a plurality of chambers 37. In addition, the plurality of floating units 43 are arranged in a plurality of rows in the transport width direction and the transport direction (in the embodiment of the present invention, six rows in the transport width direction and 20 or more rows in the transport direction). In addition, a transport region (region for transporting the substrate W) T is partitioned (formed) by the plurality of floating units 43. Further, each levitation unit 43 can be attached to and detached from the chamber 37 by a plurality of mounting bolts 45, in other words, can be attached to and detached from the support base 5 through the chamber 37. And the concrete structure of each levitation unit 43 is as follows.

  A hollow floating unit leg 47 is provided on the upper surface of the chamber 37, and the inside of the floating unit leg 47 communicates with the inside of the chamber 37, in other words, the inside of each floating unit 43. Is connected to a supply fan 39 via a chamber 37. Further, a floating rectangular head unit 49 having a hollow rectangular shape is provided on the upper part of the floating unit leg 47, and the inside of the floating unit head 49 communicates with the inside of the floating unit leg 47.

  The levitation unit head 49 includes a rectangular outer member 51 provided on the upper portion of the levitation unit leg 47 and having an upper opening, and an island member provided on the inner side of the outer member 51 via a plurality of support pins 53. 55. Further, a rectangular frame-like nozzle 57 that ejects compressed air is defined between the inner edge of the outer member 51 and the outer edge of the island member 55. In other words, a rectangular frame is formed on the upper surface of each floating unit 43. A frame-shaped nozzle 57 is formed. Here, the nozzle 57 of each levitation unit 43 is inclined toward the center of the levitation unit 43 with respect to the vertical direction (the direction perpendicular to the upper surface of the levitation unit 43), as shown in Japanese Patent Laid-Open No. 2006-182563. It is configured.

  Instead of forming the rectangular frame-shaped nozzles 57 on the upper surface of the levitation unit 43, a plurality of nozzles in the form of slits or round holes may be formed.

  The main part of the embodiment of the present invention will be described.

  As shown in FIGS. 1 and 2, the plurality of levitation units 43 include a plurality of dedicated levitation units 43B configured to be more rigid than the dedicated levitation units 43A so that they can also be used as a plurality of dedicated levitation units 43A. (The floating unit 43 which is colored gray in the figure) is mixed. In other words, the plurality of levitation units 43 are divided into a plurality of dedicated levitation units 43A and a plurality of scaffolding levitation units 43B.

  Here, each dedicated levitation unit 43A is manufactured by resin injection molding. Each scaffold / levitation unit 43B is manufactured by resin injection molding or resin block machining, and the thickness of each scaffold / levitation unit 43B is greater than the thickness of the dedicated levitation unit 43A. It has become. Further, a plurality of reinforcing pins 59 that reinforce the scaffolding floating unit 43B are provided between the floating unit head 49 and the upper surface of the chamber 37 in each scaffolding floating unit 43B. In addition, instead of being composed of resin, each scaffold and levitating unit 43B may be composed of metal such as stainless steel.

  As shown in FIG. 1, the arrangement pattern (arrangement state) of the plurality of scaffolding floating units 43 </ b> B is a plurality of rows at intervals in the conveyance direction (in the embodiment of the present invention, five or more rows). Is set to a row pattern. In addition, instead of setting the arrangement pattern of the plurality of scaffolding levitating units 43B in a row pattern, as shown in FIG. 6A, as shown in FIG. 2), or a zigzag pattern that staggers along the transport direction as shown in FIG. 6B, or any other appropriate arrangement pattern. It does not matter.

  Here, the row pattern generally divides the transport region T into a plurality of blocks in the transport direction, and a plurality of persons are accompanied by work related to the floating transport of the substrate W (adjustment of the floating unit 43, maintenance of the floating unit, etc. It is suitable for the case of collecting a damaged substrate W). In addition, the column pattern is generally suitable for a case where a plurality of people perform work associated with the floating conveyance of the substrate W from both sides of the conveyance region T in the conveyance width direction. Further, the staggered pattern is generally suitable for a case where a small number (one or two) of workers perform work associated with floating conveyance of the substrate W while proceeding in the conveyance direction in the conveyance region T.

  Then, the effect | action and effect of embodiment of this invention are demonstrated.

  By supplying compressed air to the inside of each chamber 37 by the operation of each supply fan 39, the compressed air is supplied to the inside of each floating unit 43, and the compressed air is ejected from the nozzle 57 of each floating unit 43. Further, the plurality of first conveyance rollers 13 are rotated around the axis by driving each first conveyance motor 17, and the plurality of second conveyance rollers 25 are rotated around the axis by driving each second conveyance motor 29. . As a result, a compressed air pool layer (an example of a floating gas pool layer) S is generated between the plurality of floating units 43 and the substrate W (see FIGS. 2 and 3), and the substrate W is floated and transported in the transport direction (floating). (Conveyed in a state of being allowed to move) (general action).

In addition to the above-described general action, the plurality of floating units 43 include a plurality of dedicated floating units 43A that are constructed with high rigidity so that they can also be used as a scaffold with a plurality of dedicated floating units 43A manufactured by resin injection molding. Since the units 43B are mixed, even if the transport region T is expanded in the transport width direction with the increase in the size of the substrate W, the operator can use a plurality of scaffolding and floating units 43B as scaffolds, By riding the body on the plurality of scaffolding levitating units 43B, it is possible to easily access the central side (central part) in the transport width direction of the transport region T (specific action (1)).

  In addition, since each levitation unit 43 can be attached to and detached from the chamber 37 (in other words, the support base 5) by a plurality of mounting bolts 45, as described above, a plurality of scaffolding levitation units 43B are disposed. Among the various arrangement patterns, the arrangement pattern that is most suitable for the user can be selected and set according to the work environment at the site (including the number of workers, the size of the work space, etc.) ( Specific action (2)).

  Therefore, according to the embodiment of the present invention, the operator can easily access the center side of the transport region T in the transport width direction even when the transport region T expands in the transport width direction as the substrate W becomes larger. Therefore, when the work accompanying the floating transportation of the substrate W is performed on the center side in the transportation width direction of the transportation area T, the work can be simplified and the working time can be greatly shortened.

  In addition, since the arrangement pattern of the plurality of scaffolding levitation units 43B can be selected and set by the user according to the work environment at the site from various arrangement patterns, the substrate W is floated and conveyed. It is possible to further increase the efficiency of the work accompanying.

  In addition, this invention is not restricted to description of the above-mentioned embodiment, It can implement in a various aspect. Further, the scope of rights encompassed by the present invention is not limited to these embodiments.

W substrate 1 levitation transport device 3 device body 5 support base 11 transport mechanism 13 first transport roller 17 first transport motor 25 second transport roller 29 second transport motor 37 chamber 39 supply fan 43 levitation unit 43A dedicated levitation unit 43B Levitation unit 45 Mounting bolt 47 Levitation unit leg 49 Levitation unit head 51 Outer member 53 Support pin 55 Island member 57 Nozzle 59 Reinforcement pin

Claims (5)

In a levitation transport device that floats and transports a substrate in the transport direction,
A transport mechanism provided in the apparatus body for transporting the substrate in the transport direction;
A nozzle that is disposed in the apparatus main body along the transport direction and a transport width direction orthogonal to the transport direction, is connected to a floating gas supply source that supplies the floating gas inside, and a nozzle that ejects the floating gas is formed on the upper surface. A plurality of levitation units that levitate the substrate using the pressure of the levitation gas, and
The plurality of levitation units are characterized in that a plurality of dedicated levitation units are mixed with a plurality of levitation units combined with a scaffold configured to be more rigid than the dedicated levitation unit so that they can also be used as a scaffold. A floating transport device.   The levitation conveyance apparatus according to claim 1, wherein each dedicated levitation unit is manufactured by resin injection molding.   The levitation conveyance apparatus according to claim 1, wherein each levitation unit is detachable from the apparatus main body.   The levitation conveyance apparatus according to any one of claims 1 to 3, wherein a thickness of each of the scaffolding levitation units is greater than a thickness of the dedicated levitation unit.   4. The levitation conveyance apparatus according to claim 1, wherein each of the scaffold and levitation units is made of metal. 5.