JP5468216B2 - 過弗化物処理装置および過弗化物処理方法 - Google Patents
過弗化物処理装置および過弗化物処理方法 Download PDFInfo
- Publication number
- JP5468216B2 JP5468216B2 JP2008151200A JP2008151200A JP5468216B2 JP 5468216 B2 JP5468216 B2 JP 5468216B2 JP 2008151200 A JP2008151200 A JP 2008151200A JP 2008151200 A JP2008151200 A JP 2008151200A JP 5468216 B2 JP5468216 B2 JP 5468216B2
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- Prior art keywords
- exhaust gas
- perfluoride
- water
- pfc
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 title claims description 43
- 238000000034 method Methods 0.000 title claims description 16
- 238000000354 decomposition reaction Methods 0.000 claims description 141
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 99
- 238000006243 chemical reaction Methods 0.000 claims description 57
- 230000002378 acidificating effect Effects 0.000 claims description 39
- 238000001816 cooling Methods 0.000 claims description 34
- 239000003054 catalyst Substances 0.000 claims description 30
- 239000002351 wastewater Substances 0.000 claims description 22
- 150000003839 salts Chemical class 0.000 claims description 21
- 239000000126 substance Substances 0.000 claims description 15
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 9
- 229910052731 fluorine Inorganic materials 0.000 claims description 9
- 239000011737 fluorine Substances 0.000 claims description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 238000002203 pretreatment Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 254
- 229920006926 PFC Polymers 0.000 description 197
- 239000002253 acid Substances 0.000 description 58
- 239000007787 solid Substances 0.000 description 55
- 238000004519 manufacturing process Methods 0.000 description 52
- 239000004065 semiconductor Substances 0.000 description 42
- 239000011575 calcium Substances 0.000 description 37
- KRHYYFGTRYWZRS-UHFFFAOYSA-N hydrofluoric acid Substances F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 33
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 31
- 238000010438 heat treatment Methods 0.000 description 30
- 239000007921 spray Substances 0.000 description 21
- 229910004298 SiO 2 Inorganic materials 0.000 description 19
- 238000006386 neutralization reaction Methods 0.000 description 17
- 239000004973 liquid crystal related substance Substances 0.000 description 13
- 239000000843 powder Substances 0.000 description 13
- 229910004261 CaF 2 Inorganic materials 0.000 description 10
- 239000004744 fabric Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 238000003860 storage Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 8
- 238000004065 wastewater treatment Methods 0.000 description 8
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 7
- 229910002091 carbon monoxide Inorganic materials 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 239000000292 calcium oxide Substances 0.000 description 6
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 6
- 238000009434 installation Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 5
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 5
- 239000000460 chlorine Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000011144 upstream manufacturing Methods 0.000 description 5
- 229910001634 calcium fluoride Inorganic materials 0.000 description 4
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 230000008439 repair process Effects 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000011001 backwashing Methods 0.000 description 3
- 230000005587 bubbling Effects 0.000 description 3
- 229910052791 calcium Inorganic materials 0.000 description 3
- 239000004568 cement Substances 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010792 warming Methods 0.000 description 2
- BHPQYMZQTOCNFJ-UHFFFAOYSA-N Calcium cation Chemical compound [Ca+2] BHPQYMZQTOCNFJ-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- 229910001424 calcium ion Inorganic materials 0.000 description 1
- 159000000007 calcium salts Chemical class 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 229910052602 gypsum Inorganic materials 0.000 description 1
- 239000010440 gypsum Substances 0.000 description 1
- 239000008235 industrial water Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Treating Waste Gases (AREA)
- Gas Separation By Absorption (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
- Catalysts (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008151200A JP5468216B2 (ja) | 2008-06-10 | 2008-06-10 | 過弗化物処理装置および過弗化物処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008151200A JP5468216B2 (ja) | 2008-06-10 | 2008-06-10 | 過弗化物処理装置および過弗化物処理方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002158505A Division JP4214717B2 (ja) | 2002-05-31 | 2002-05-31 | 過弗化物処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008246485A JP2008246485A (ja) | 2008-10-16 |
| JP2008246485A5 JP2008246485A5 (enExample) | 2010-07-01 |
| JP5468216B2 true JP5468216B2 (ja) | 2014-04-09 |
Family
ID=39972059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008151200A Expired - Lifetime JP5468216B2 (ja) | 2008-06-10 | 2008-06-10 | 過弗化物処理装置および過弗化物処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5468216B2 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12275661B2 (en) | 2023-07-14 | 2025-04-15 | Claros Technologies Inc. | Methods and systems of iodine capture from aqueous solutions |
| US12534390B2 (en) | 2023-07-14 | 2026-01-27 | Claros Technologies Inc. | Methods and systems of nitrate removal in aqueous systems for improved PFAS destruction |
| US12545601B2 (en) | 2025-01-10 | 2026-02-10 | Claros Technologies Inc. | Methods and systems of photosensitizer recovery for improved PFAS destruction |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6343120B2 (ja) | 2013-03-19 | 2018-06-13 | 昭和電工株式会社 | 過弗化物の処理装置、過弗化物の処理方法およびプログラム |
| JP6085203B2 (ja) * | 2013-03-19 | 2017-02-22 | 昭和電工株式会社 | 過弗化物の処理装置および過弗化物の処理方法 |
| JP6129631B2 (ja) * | 2013-04-22 | 2017-05-17 | 昭和電工株式会社 | 過弗化物の処理装置 |
| JP6097625B2 (ja) | 2013-04-22 | 2017-03-15 | 昭和電工株式会社 | 弗化カルシウムの製造方法および弗化カルシウムの製造装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3266759B2 (ja) * | 1995-06-14 | 2002-03-18 | 株式会社日立製作所 | 有機ハロゲン化合物の処理方法及びその処理装置 |
| JPH10216479A (ja) * | 1997-01-31 | 1998-08-18 | Mitsui Chem Inc | 三弗化窒素ガスの除害方法 |
| JP3217034B2 (ja) * | 1997-11-14 | 2001-10-09 | 株式会社日立製作所 | 過弗化物の処理方法及びその処理装置 |
| JPH11218318A (ja) * | 1998-02-03 | 1999-08-10 | Air Liquide Japan Ltd | 排ガス処理設備 |
| JP3796618B2 (ja) * | 1998-11-24 | 2006-07-12 | 日立造船株式会社 | フロン燃焼排ガスの浄化方法 |
| JP3994605B2 (ja) * | 1999-11-26 | 2007-10-24 | 株式会社日立製作所 | Ｐｆｃガスの処理方法及び処理装置 |
| JP2001219031A (ja) * | 2000-02-08 | 2001-08-14 | Air Liquide Japan Ltd | パーフルオロ化合物の分解方法及び分解装置 |
-
2008
- 2008-06-10 JP JP2008151200A patent/JP5468216B2/ja not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12275661B2 (en) | 2023-07-14 | 2025-04-15 | Claros Technologies Inc. | Methods and systems of iodine capture from aqueous solutions |
| US12351498B2 (en) | 2023-07-14 | 2025-07-08 | Claros Technologies Inc. | Methods and systems of PFAS destruction using UV irradiation at 222 nanometers |
| US12473222B2 (en) | 2023-07-14 | 2025-11-18 | Claros Technologies Inc. | Methods and systems for recycling materials during PFAS destruction |
| US12515974B2 (en) | 2023-07-14 | 2026-01-06 | Claros Technologies Inc. | Methods and systems of iodine capture from aqueous solutions |
| US12534390B2 (en) | 2023-07-14 | 2026-01-27 | Claros Technologies Inc. | Methods and systems of nitrate removal in aqueous systems for improved PFAS destruction |
| US12545601B2 (en) | 2025-01-10 | 2026-02-10 | Claros Technologies Inc. | Methods and systems of photosensitizer recovery for improved PFAS destruction |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008246485A (ja) | 2008-10-16 |
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