JP5455533B2 - 圧力制御装置 - Google Patents
圧力制御装置 Download PDFInfo
- Publication number
- JP5455533B2 JP5455533B2 JP2009232490A JP2009232490A JP5455533B2 JP 5455533 B2 JP5455533 B2 JP 5455533B2 JP 2009232490 A JP2009232490 A JP 2009232490A JP 2009232490 A JP2009232490 A JP 2009232490A JP 5455533 B2 JP5455533 B2 JP 5455533B2
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- Japan
- Prior art keywords
- pressure
- fluid
- port
- allowable
- differential
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Measuring Fluid Pressure (AREA)
- Control Of Fluid Pressure (AREA)
Description
2 制御対象
3 ノズルフラッパ弁
5 基準圧力発生装置(基準圧力発生手段)
7 差圧計
8 制御コントローラ(制御手段)
9 電磁弁
10a、10b 圧力スイッチ(許容圧力設定手段)
11 リレー(電磁弁を動作させる手段)
Claims (1)
- 流体装置に供給する流体の圧力を、前記流体装置に前記流体を供給する配管に接続されたノズルフラッパ弁によって制御する圧力制御装置において、
第1ポート及び第2ポートを有し、前記第1ポートと前記第2ポートとの間に印加された圧力の圧力差を計測する差圧計と、
前記第1ポートに接続され、前記差圧計に印加する基準圧力を調整可能な基準圧力発生手段と、
前記第2ポートに接続され、前記基準圧力発生手段及び前記配管のうちいずれか一方に前記第2ポートが連通するよう切り替わる電磁弁と、
前記配管の流体圧力及び前記基準圧力のそれぞれの許容圧力範囲の設定を調整可能な許容圧力設定手段と、
設定された前記流体の目標圧力及び前記差圧計の計測値に基づいて、前記ノズルフラッパ弁を制御すると共に、設定された前記目標圧力と同期して、前記差圧計に印加する前記基準圧力と、前記流体圧力及び前記基準圧力のそれぞれの前記許容圧力範囲とを変化させるように前記基準圧力発生手段及び前記許容圧力設定手段を制御する制御手段と、
前記許容圧力設定手段の設定により、前記流体圧力及び前記基準圧力がそれぞれ前記許容圧力範囲内にあるときに、前記第2ポートを前記配管に連通させ、前記流体圧力及び前記基準圧力のうちいずれか一方が前記許容圧力範囲外にあるときに、前記第2ポートを前記基準圧力発生手段に連通させるよう、前記電磁弁を動作させる手段と、を備えたことを特徴とする圧力制御装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009232490A JP5455533B2 (ja) | 2009-10-06 | 2009-10-06 | 圧力制御装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2009232490A JP5455533B2 (ja) | 2009-10-06 | 2009-10-06 | 圧力制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011081548A JP2011081548A (ja) | 2011-04-21 |
JP5455533B2 true JP5455533B2 (ja) | 2014-03-26 |
Family
ID=44075553
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2009232490A Expired - Fee Related JP5455533B2 (ja) | 2009-10-06 | 2009-10-06 | 圧力制御装置 |
Country Status (1)
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JP (1) | JP5455533B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017037933A1 (ja) * | 2015-09-04 | 2017-03-09 | トヨタすまいるライフ株式会社 | 密封性検査装置 |
CN106872097A (zh) * | 2017-04-28 | 2017-06-20 | 广东省中山市质量计量监督检测所 | 一种带保护装置的微差压变送器 |
JP2019200067A (ja) | 2018-05-14 | 2019-11-21 | 横河電機株式会社 | 測定システム、測定方法及び圧力測定装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61249120A (ja) * | 1985-04-26 | 1986-11-06 | Sumitomo Electric Ind Ltd | 差圧計を用いたチヤンバ内圧力制御装置 |
JPH0676939B2 (ja) * | 1986-03-10 | 1994-09-28 | 横河電機株式会社 | 差圧測定装置 |
JP2004177280A (ja) * | 2002-11-27 | 2004-06-24 | Kimmon Mfg Co Ltd | 差圧測定装置 |
JP4340883B2 (ja) * | 2004-03-31 | 2009-10-07 | 横河電機株式会社 | 電空変換器あるいはバルブポジショナ |
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2009
- 2009-10-06 JP JP2009232490A patent/JP5455533B2/ja not_active Expired - Fee Related
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JP2011081548A (ja) | 2011-04-21 |
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