JP5454999B2 - Dust suction method and dust suction device - Google Patents

Description

  The present invention relates to a dust suction method capable of reliably sucking dust such as dust and chips generated when a scribe line is formed on a substrate such as a glass plate or when a break occurs without contacting the substrate. The present invention relates to a dust suction device.

  When manufacturing a glass substrate, generally scribing the surface of the glass substrate, which is a brittle material, forming a scribe line, applying a predetermined load to the glass substrate, and breaking (breaking) along the formed scribe line. Thus, the glass substrate is made a desired size. When a scribe line is formed, the surface of the glass substrate is shaved, and when a break occurs, cracks and the like are generated, so that dust such as glass dust and glass chips is generated.

  In order to remove dust generated by processing a brittle material, for example, in Patent Document 1, air is blown almost uniformly over the entire width of the conveyed punched sheet surface to raise dust such as paper dust and bounce off the sheet surface. A dust collector that sucks in dust such as paper dust that rises with air is disclosed. Further, Patent Document 2 discloses a glass plate cutting method in which air is blown onto a planned cutting line at an angle of 20 to 40 degrees with respect to the surface of a stationary glass substrate, and glass dust is sucked and discharged by a suction nozzle. .

Further, in Patent Document 3, processing air is blown out in a direction of about 45 degrees oblique to a traveling paper sheet, dust such as paper dust is floated by the attracted peripheral gas, and processing air, peripheral gas, paper dust, etc. A paper dust removing device for sucking dust is disclosed.
JP-A-10-71596 JP 2006-89325 A JP 2006-26752 A

  However, it is not possible to assure that almost all of the dust that has floated is sucked by the method of blowing powdered air to float and sucking air as disclosed in Patent Documents 1 to 3. Therefore, there is a high possibility that the surrounding environment is contaminated by powdered dust that has not been sucked, and it is difficult to withstand continuous use for a long time from the viewpoint of the health of the operator.

  In addition, a device for removing dust generated on a surface of a glass substrate by bringing a blade into contact with the surface of the glass substrate has been developed, such as an automobile wiper. However, the dust is often generated on the cut surface, and the dust generated when the scribe line is formed is brought into the scribe line by the blade and may be scattered at the time of the break.

  The present invention has been made in view of such circumstances, and provides a dust suction method and a dust suction device capable of reliably sucking dust without contacting the generated dust and without scattering to the surroundings. Objective.

  In order to achieve the above object, the dust suction method according to the first aspect of the present invention is characterized in that an opening is formed at both ends, an air flow is generated inside a straight pipe portion having a constant cross-sectional shape and an axial line extending substantially linearly. A pressure is generated, and outside peripheral gas is sucked together with dust from a suction opening that opens to the outside of the straight pipe portion between the openings at both ends.

  In the first invention, openings are formed at both ends, a straight pipe part having an axial line extending substantially linearly with a constant cross-sectional shape is provided, and a suction opening is created by generating an air flow inside the straight pipe part. A negative pressure is generated near the part. When the negative pressure is generated, the surrounding gas outside the suction opening is sucked into the straight pipe portion, and dust is sucked together with the sucked surrounding gas. Therefore, since no gas is directly blown onto the dust, the surrounding environment is not contaminated, for example, the dust rises and scatters to the surroundings, and only the dust can be reliably sucked without contacting the substrate.

Further, the dust suction method according to the first invention, further, to the surface of the substrate supported below the suction opening, said substantially parallel to the axis of the straight pipe section, yet maintain a substantially constant distance It is characterized by relative movements.

Furthermore, according to the first aspect of the present invention, the axis of the straight pipe portion is moved substantially in parallel with the surface of the substrate supported below the suction opening while maintaining a substantially constant distance. Only dust can be reliably sucked without contact.

The dust suction method according to the first aspect of the invention is further characterized by injecting gas toward the opening at one end of the straight pipe portion and sucking the gas from the opening at the other end of the straight pipe portion. To do.

In the first invention, the gas is injected toward the opening at one end of the straight pipe portion, and the gas is sucked from the opening at the other end of the straight pipe portion, thereby generating an air flow inside the straight pipe portion and negatively The pressure can be generated, and the generated negative pressure can suck the dust in the vicinity of the suction opening together with the surrounding gas outside the suction opening.

Further, the dust suction method according to the second invention, Oite the first invention, wherein in the direction of the air flow inside the straight pipe portion, characterized in that relatively moves the straight pipe section relative to the surface of the substrate And

In the second invention, dust can be reliably sucked without contacting the substrate by moving the straight tube portion relative to the surface of the substrate along the direction of the air flow inside the straight tube portion.

A dust suction method according to a third aspect of the present invention is characterized in that, in any one of the first and second aspects, a laminar air flow is generated inside the straight pipe portion.

In the third aspect of the invention, by generating a laminar air flow inside the straight pipe portion, a negative pressure can be reliably generated, and dust can be sucked together with the surrounding gas outside the suction opening.

The dust suction method according to a fourth aspect of the present invention is the dust suction method according to any one of the first to third aspects of the present invention, wherein the straight pipe portion has one end of the straight pipe portion, and the other end of the straight pipe portion has a reduced flow section. It is characterized by connecting each of the expanding pipe portions whose area gradually increases.

According to the fourth aspect of the present invention, the straight pipe portion is connected to one end of the straight pipe portion by a contracted pipe portion in which the pipe cross-sectional area gradually decreases and the other end of the straight pipe portion in which the pipe cross-sectional area gradually increases. The flow velocity becomes the fastest inside, a laminar airflow can be generated more reliably, and dust can be sucked together with the surrounding gas outside the suction opening.

The dust suction method according to a fifth aspect of the present invention is characterized in that, in the sixth aspect, the contracted tube portion and the expanded tube portion share an axis with the straight tube portion.

In the fifth aspect of the invention, the contracted tube portion and the expanded tube portion share an axis with the straight tube portion, so that even when the straight tube portion is shortened, a laminar air flow is easily generated inside the straight tube portion. In addition, it is possible to increase the degree of design freedom for the air flow path entering the contracted pipe section and the air flow path exiting the flow expanding pipe section.

  Next, in order to achieve the above object, a dust suction device according to an eighth aspect of the present invention is the dust suction device for sucking dust, wherein openings are formed at both ends, and the axis extends substantially linearly with a constant cross-sectional shape. The straight pipe portion includes a suction opening that opens to the outside between the openings at both ends, and the opening at one end of the straight pipe portion is connected to a gas injection mechanism that injects gas. An opening at the other end of the straight pipe part is connected to a gas suction mechanism for sucking gas, and an air flow is generated inside the straight pipe part to generate a negative pressure, and the suction opening part The outer peripheral gas is sucked into the straight pipe part together with dust.

In the sixth invention, openings are formed at both ends, a straight pipe part having an axial line extending substantially linearly with a constant cross-sectional shape is provided, and the straight pipe part opens to the outside between the openings at both ends. A suction opening is provided. The opening at one end of the straight pipe portion is connected to a gas injection mechanism that injects gas, and the opening at the other end is connected to a gas suction mechanism that sucks gas. An air flow is generated inside the straight pipe portion to generate a negative pressure, and surrounding gas outside the suction opening is sucked into the straight pipe portion together with dust. The surrounding gas outside the suction opening is sucked into the straight pipe part from the suction opening and sucks dust together with the sucked ambient gas. Therefore, since no gas is directly blown onto the dust, the surrounding environment is not contaminated, for example, the dust rises and scatters to the surroundings, and only the dust can be reliably sucked without contacting the substrate.

  With the above configuration, an air flow is generated inside the straight pipe portion to generate a negative pressure, and the surrounding gas outside the suction opening is sucked into the straight pipe portion together with dust. The surrounding gas outside the suction opening is sucked into the straight pipe part from the suction opening and sucks dust together with the sucked ambient gas. Therefore, since no gas is directly blown onto the dust, the surrounding environment is not contaminated, for example, the dust rises and scatters to the surroundings, and only the dust can be reliably sucked without contacting the substrate.

  Hereinafter, the present invention will be described in detail with reference to the drawings illustrating embodiments thereof. FIG. 1 is a schematic diagram showing the principle of a dust suction method according to an embodiment of the present invention.

  As shown in FIG. 1, the dust suction device according to the embodiment of the present invention is relative to a scribing device for scribing a brittle substrate B such as a glass plate and / or a support base (not shown) of a break device for breaking. The straight pipe part 114 has a straight pipe part 114 which is disposed above the brittle substrate B that moves in a moving manner and has a circular shape with a substantially constant cross section in the direction of the axis 114a. A suction opening 111 for sucking dust existing outside is provided.

  Both ends of the straight pipe portion 114 are open, and are connected to a gas injection device 15 for injecting gas and a suction device 13 for inhaling gas, respectively. The gas injected from the gas injection device 15 passes through the straight pipe portion 114 and is sucked by the suction device 13. Accordingly, an air flow from the gas injection device 15 side toward the suction device 13 side is generated inside the straight pipe portion 114.

  The brittle substrate B moves relative to the straight pipe portion 114 along the direction of the airflow inside the straight pipe portion 114. By doing in this way, the dust which exists in the suction opening part 111 vicinity can be attracted | sucked reliably.

  FIG. 2 is a schematic view showing a state in which gas flows in the vicinity of the suction opening 111. The straight pipe portion 114 is provided with an air flow that is as close as possible to the laminar flow. By flowing at a relatively high flow velocity in the vicinity of the suction opening 111, a negative pressure is generated inside the straight pipe portion 114 in the vicinity of the suction opening 111. Occur. Accordingly, since the pressure inside the straight pipe portion 114 is lower than the atmospheric pressure, the ambient gas outside the vicinity of the suction opening 111 is sucked into the straight pipe portion 114. Thereby, the dust existing in the vicinity of the suction opening 111 is guided from the suction opening 111 to the inside of the straight pipe portion 114 by the flow of the surrounding gas, and is guided to the suction device 13 by the air flow generated inside. The

  The straight pipe portion 114 may be arranged in a cylindrical shape as shown in FIG. 1 with the suction opening 111 facing the brittle substrate B side. Actually, the straight pipe portion 114 has an elliptic cylinder shape or a rectangular tube shape extending in a direction substantially orthogonal to the direction of relative movement, and the suction opening 111 is slit-shaped toward the brittle substrate B side. Is provided. FIG. 3 is a perspective view schematically showing the configuration of the straight pipe portion 114 of the dust suction device according to the present embodiment.

  As shown in FIG. 3, the brittle substrate B relatively moves in a direction substantially orthogonal to the slit-like suction opening 111 opened at the lower portion of the straight pipe portion 114 while maintaining a certain distance. Thereby, dust existing on the surface of the brittle substrate B is sucked into the straight pipe portion 114 from the slit-like suction opening portion 111.

  Note that the straight pipe portion 114 may be connected to one end of the reduced-flow pipe portion whose pipe cross-sectional area gradually decreases and the other end thereof may be connected to the current-spread pipe section whose pipe cross-sectional area gradually increases. FIG. 4 is a perspective view showing a configuration of the straight pipe portion 114 when the straight pipe portion 114 has a cylindrical shape.

  As shown in FIG. 4, with respect to the relative movement direction 161 of the straight pipe portion 114 with respect to the brittle substrate B, the contraction pipe portion 162 is disposed on the front side (left side as viewed in FIG. 4), and the opposite side (FIG. 4 is illustrated). On the right side), a flow expanding pipe portion 163 is formed. The flow velocity gradually increases as the airflow approaches the straight pipe portion 114 due to the contracted pipe portion 162, and the flow velocity becomes maximum when passing through the straight pipe portion 114. Airflow is likely to occur. On the other hand, since the flow velocity is gradually reduced by the flow expanding pipe portion 163, a vortex is hardly generated in the airflow that has passed through the straight pipe portion 114, and the airflow in the straight pipe portion 114 is not easily disturbed.

  FIG. 5 is a perspective view showing a configuration of the straight pipe portion 114 when the straight pipe portion 114 has a rectangular tube shape. Similar to FIG. 4, with respect to the relative movement direction 161 of the straight pipe portion 114 with respect to the brittle substrate B, the contraction pipe portion 162 is disposed on the front side (left side as viewed in FIG. 5), and the opposite side (facing toward FIG. 5). In the right side), the flow expansion pipe portion 163 is formed. As the airflow approaches the straight pipe portion 114, the flow velocity increases by the contracted pipe portion 162, and a laminar flow tends to occur when passing through the straight pipe portion 114. On the other hand, a vortex is hardly generated in the airflow that has passed through the straight pipe portion 114 by the flow expanding pipe portion 163, and the airflow in the straight pipe portion 114 is not easily disturbed.

  Moreover, even if the total length in the axial direction of the straight pipe part 114 is comparatively short, the straight pipe part 114 and the flow expansion pipe part 163 share the axis line with the straight pipe part 114. It is possible to prevent the airflow flowing in from the inflow side opening from flowing out from the suction opening 111, and a laminar airflow can be easily generated inside the straight pipe portion 114. Furthermore, it is possible to increase the degree of freedom in designing the air flow path entering the contracted pipe section 162 and the air flow path exiting from the flow expanding pipe section 163.

  By generating a laminar flow in the straight pipe portion 114 in this way, a negative pressure can be stably generated inside the straight pipe portion 114 in the vicinity of the suction opening 111, and dust can be sucked stably. It becomes possible.

  FIG. 6 is a cross-sectional view of the configuration of the dust suction device 1 according to the embodiment of the present invention to which the above-described dust suction method is applied, along a plane along the moving direction of the brittle substrate B. As shown in FIG. 6, the dust suction device 1 according to the embodiment of the present invention is on a scribe device for scribing a brittle substrate B and / or a support base 2 of a break device for breaking, and relatively in the direction of the arrow. It is disposed above the moving brittle substrate B, and a suction opening 111 for sucking dust is provided at the lower end of the main body 11.

  The main body 11 is formed with a gas passage 112 that is a flow path through which gas can pass. In the gas passage portion 112, the cross-sectional area gradually decreases toward the lower side on the side (the left side 112a in FIG. 6) toward which the brittle substrate B moves relatively, and the brittle substrate B moves relatively. On the farther side (the right side 112b in FIG. 6), the cross-sectional area is formed so as to gradually increase toward the upper side. As a result, like the contracted tube portion 162 and the expanded tube portion 163 shown in FIGS. 4 and 5, the flow velocity of the gas flowing through the interior is accelerated, and a laminar air flow is generated in the straight tube portion 114. The flow velocity of the gas flowing through is decelerated to prevent the generation of turbulence and vortex. Furthermore, since the pressure loss of the airflow in the gas passage part 112 is reduced, the gas injection device 15 and the suction device 13 can be downsized.

  The gas sucked by the suction device 13 shown in FIG. 1 is jetted from the gas jetting device 15 in FIG. 1 by the gas jetting unit 113 inside the main body 11 in FIG. 6 via the connected jet pipe. The airflow that has passed through the straight pipe portion 114 is sucked up by the connected suction device 13 (FIG. 1) through the suction tube 12 at the upper end of the gas passage portion 112.

A pair of rectifying members 117 and 117 are disposed inside the gas passage portion 112 with the straight pipe portion 114 interposed therebetween. By arranging the rectifying members 117 and 117 in the vicinity of the central portion of the gas passage portion 112, the airflow in the vicinity of the central portion circulates outward, and the suction force in the vicinity of the central portion is reduced. On the other hand, when the sucked air current is pushed outward, the suction force of the end portion of the gas passage portion 112 where the suction force is relatively small increases. Therefore, it is possible to correct the suction force inside the gas passage portion 112 to be uniform in a direction substantially orthogonal to the moving direction of the brittle substrate B.
The dust sucked from the suction opening 111 passes through the inside of the main body 11 and is sucked into the suction device 13 (FIG. 1) through the suction pipe 12.

  As described above, according to the present embodiment, the straight pipe portion 114 having openings at both ends and having a constant cross-sectional shape and the axis 114a extending substantially linearly is provided. A negative pressure is generated in the vicinity of the suction opening 111 by generating an air flow. When the negative pressure is generated, the surrounding gas outside the suction opening 111 is sucked into the straight pipe 114 from the suction opening 111, and dust is sucked together with the sucked surrounding gas. Therefore, since no gas is blown directly onto the dust, the dust does not contaminate the surrounding environment, such as rising and scattering to the surroundings, and only the dust is ensured without bringing the blades etc. into contact with the brittle substrate B. Can be aspirated.

  Various modifications and replacements are possible within the scope of the present invention. For example, in order to supply gas directly to the straight pipe portion 114 or to smoothly exhaust gas from the straight pipe portion 114, the gas injection device 15 and the suction device 13 may be arranged in both ends of the straight pipe portion 114. good.

It is a schematic diagram which shows the principle of the dust suction method which concerns on embodiment of this invention. It is a schematic diagram which shows the state through which the gas of the suction opening vicinity flows. It is a perspective view which shows typically the structure of the straight pipe | tube part of the dust suction apparatus which concerns on this Embodiment. It is a perspective view which shows the structure of a straight pipe part in case a straight pipe part is cylindrical shape. It is a perspective view which shows the structure of a straight pipe part in case a straight pipe part is a rectangular tube shape. It is sectional drawing in the surface along the moving direction of a brittle board | substrate which shows the structure of the dust suction apparatus which concerns on embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Dust suction apparatus 11 Main body part 13 Suction apparatus 111 Suction opening part 112 Gas passage part 113 Gas injection part 114 Straight pipe part 117 Rectification member B Brittle board | substrate (board | substrate)

Claims (5)

Forming openings at both ends,
Gas is injected into the straight pipe part with a constant cross-sectional shape and the axis extending almost linearly , toward the opening connected to the reduced flow pipe part where the pipe cross-sectional area at one end of the straight pipe part gradually decreases. And generating a negative pressure by generating an air flow by sucking a gas from an opening connected to a flow expanding pipe part where the pipe cross-sectional area of the other end of the straight pipe part gradually increases ,
Relative to the surface of the substrate supported under the suction opening opening downward outside of said straight tube portion between the opening portions at both ends, substantially parallel to the axis of the straight tube portion in the axial direction, yet By relatively moving the suction opening with respect to the surface of the substrate while maintaining the distance substantially constant,
A dust suction method comprising sucking the surrounding gas outside the suction opening together with dust. 2. The dust suction method according to claim 1, wherein the straight pipe portion is moved relative to the surface of the substrate along a direction of an air flow inside the straight pipe portion. Dust suction method according to any one of claims 1 or 2, characterized in that to produce a laminar flow of air flow inside the straight tube portion. The dust suction method according to claim 1 , wherein the contracted tube portion and the expanded tube portion share an axis with the straight tube portion. In a dust suction device that sucks dust,
An opening is formed at both ends, and has a straight pipe portion with an axial line extending substantially linearly with a constant cross-sectional shape,
Straight pipe portion is provided with a suction opening which opens downward outside between the opening portions at both ends,
The opening at one end of the straight pipe part is formed with a contracted pipe part in which the cross-sectional area of the pipe gradually decreases, and is connected to a gas injection mechanism for injecting gas, and the opening at the other end of the straight pipe part is a pipe A flow expanding pipe portion with a gradually increasing cross-sectional area is formed, and connected to a gas suction mechanism for sucking gas,
The dust suction is characterized in that an air flow is generated inside the straight pipe portion to generate a negative pressure, and surrounding gas outside the suction opening is sucked into the straight pipe portion together with dust. apparatus.

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