JP2009072651A - Stuck foreign matter removing apparatus and stuck foreign matter removing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stuck foreign matter removing apparatus and method, for removing a foreign matter stuck to the surface of a travelling sheet-like object and preventing re-sticking, stably over a long period of time. <P>SOLUTION: The stuck foreign matter removing apparatus includes an air blowing means A that is installed at least on one surface of a travelling sheet-like object and capable of blowing air to the sheet-like object and a sucking means that is arranged in a manner covering the direction in which the air blown from the air blowing means A is reflected on the surface of the sheet-like object, wherein an air blowing means B capable of blowing air in the opposite direction of the air blown from the air blowing means A, is provided in a region C between a position where the air blown from the air blowing means A is collided with the surface of the sheet-like object and a position of the installation of the sucking means. Also, the stuck foreign matter removing method is disclosed. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an attached foreign matter removing apparatus and an attached foreign matter removing method that can remove foreign matter attached to the surface of a sheet-like material in-line.

  In recent years, quality requirements for polymer films are becoming stricter, and requirements standards for adhered foreign substances on films are increasing year by year. Therefore, in the manufacturing process of a sheet-like material represented by a polymer film, dust adhering to the surface of the sheet-like material is generally removed.

  Conventionally, a method of transferring a foreign matter to an adhesive rubber by bringing an adhesive rubber roll into contact with the sheet-like material is known for removing the adhered foreign matter on the surface of the sheet-like material (see, for example, Patent Document 1). However, in this method, if foreign matter accumulates on the roll surface, the adhesive strength is reduced and the dust removal performance is lowered. Therefore, there is a problem that maintenance such as cleaning and replacement of the roll is required periodically. Also known is a method in which a rotating brush is brought into contact with the surface of a running sheet to remove dust from the surface and collected by a suction facility. However, the brush damages or damages the sheet. There was a fear. Furthermore, there is a problem that fibrous foreign matters and foreign matters having a size of several tens of microns cannot be completely removed with an adhesive roll or a rotating brush.

  As means for solving the above problems, there has been proposed a dust removal method in which ultrasonic air is jetted onto the surface of a sheet-like material to float and suck foreign matter (for example, see Patent Document 2). However, there are cases in which foreign matter has a size of several microns to over 1 millimeter, and there are cases where large foreign matter and heavy foreign matter cannot be removed by this method. There was a problem that it decreased.

  For such a problem, on the upstream side of the winding process of the sheet-like material, compressed air is blown onto the sheet-like material by an air blowing means installed at a certain interval from the sheet-like material, and is arranged in the vicinity of the air blowing means. A method and an apparatus for removing foreign matter by a collecting means have been proposed. Here, the collecting means may be installed at a distance of several centimeters or more from the sheet-like material since it may cause damage to the sheet-like material and cause damage to the sheet-like material when it contacts the sheet-like material. However, in the vicinity of the air collision part, the compressed air blown against the sheet-like material flows more along the sheet-like material than the amount reflected from the surface of the sheet-like material to the atmosphere. In many cases, the adhering foreign matter blown off by the air passes through the region between the sheet-like material and the collecting means, and the dust removal performance is deteriorated.

Also, a method has been proposed in which an air guide having a curved surface is installed on the upper part of a sheet-like material, and the traveling direction of the air flow along the sheet-like material surface is changed using the Coanda effect (for example, Patent Document 3). reference). However, when using the Coanda effect, the curved surface portion of the air guide must be brought close to the surface of the sheet-like material, and the sheet-like material comes into contact with the curved surface due to vibration of the sheet-like material, thereby reducing the quality of the sheet-like material. There is a case. In this method, foreign matter having a shape of several nm to several μm at the maximum is targeted for removal, but the adhering foreign matter having a large weight or shape does not ride on the flow along the air guide and scatters along the surface of the sheet-like material. Tend to. For this reason, the further improvement was calculated | required.
JP 2003-181945 A JP 11-235559 A JP 2005-34782 A

  In view of the above circumstances, it is an object of the present invention to provide a method for removing foreign matter adhering to the surface of a sheet-like object while traveling and an attached foreign matter removing apparatus.

  As a result of intensive studies to solve the above-mentioned problems, the present inventor has made the foreign matter removal air in an arbitrary direction by causing the air to collide with the foreign matter removal air when removing the foreign matter adhering to the sheet-like material. The present invention has been completed by finding a method for controlling the flow.

  That is, the first of the present invention is an air blowing means A that is installed on at least one surface of a running sheet-like material and can blow air against the sheet-like material, and the air blowing means. A device for removing adhered foreign matter having suction means arranged so as to cover the direction in which the air blown from A is reflected on the surface of the sheet-like object, and the air blown from the air blowing means A is on the surface of the sheet-like object An air blowing means B capable of blowing air in a direction opposite to the air blown from the air blowing means A with respect to a region C between the position where the air blows and the suction means setting position. The present invention relates to a feature of the adhered foreign matter removing apparatus.

  A preferred embodiment relates to the attached foreign matter removing apparatus, wherein the flow rate of the air blown from the air blowing means B is smaller than the air blown from the air blowing means A.

  A preferred embodiment is characterized in that, in the adhered foreign matter removing apparatus, a charge suppressing means for removing static electricity charged in the sheet-like material is provided on at least one surface of the sheet-like material on the upstream side of the production process. The present invention relates to any one of the attached foreign matter removing apparatuses.

  A preferred embodiment relates to any one of the attached foreign matter removing apparatuses, wherein the air blowing means A is installed so as to blow air at a position where the sheet-like material passes on a roll curved surface.

  A preferred embodiment relates to any one of the above adhered foreign matter removing devices, characterized in that in the attached foreign matter removing device, the sheet-like material travels while being gripped by a pin rail in a tenter.

  A preferred embodiment relates to any one of the attached foreign matter removing devices, wherein the sheet-like material is a polyimide film.

  A preferred embodiment relates to any one of the attached foreign matter removing devices, wherein a direction in which air is blown from the air blowing means A is opposite to a direction in which the sheet-like material travels.

  In the second aspect of the present invention, air was blown from the air blowing means A installed on at least one surface of the traveling sheet-like material, and was blown from the air blowing means A. An adhering foreign matter removing method for sucking adhering foreign matter on a sheet-like material by suction means arranged so as to cover the direction in which air is reflected on the surface of the sheet-like material, wherein the air blown from the air blowing means A is the sheet-like material Air from air blowing means B capable of blowing air in a direction opposite to the air blown from the air blowing means A to the area C between the position where it collides with the object surface and the suction means installation position. The present invention relates to a method for removing adhering foreign matter characterized by spraying water.

  A preferred embodiment relates to the attached foreign matter removing method, wherein the flow rate of the air blown from the air blowing means B is smaller than the air blown from the air blowing means A.

  In a preferred embodiment, any of the adhered foreign substances is characterized in that static electricity charged on the sheet-like material is removed by a charge suppressing means provided on at least one surface of the sheet-like material upstream of the production process. It relates to a removal method.

  A preferred embodiment relates to any one of the attached foreign matter removing methods, wherein the air blowing means A blows air at a position where the sheet-like material passes on a curved roll surface.

  A preferred embodiment relates to any one of the attached foreign matter removing methods, wherein the sheet-like object travels while being held in a tenter by a pin rail.

  A preferred embodiment relates to any one of the attached foreign matter removing methods, wherein the sheet-like material is a polyimide film.

  A preferred embodiment relates to any one of the attached foreign matter removing methods, wherein a direction in which air is blown from the air blowing means A is opposite to a direction in which the sheet-like material travels.

  According to the present invention, it is possible to guide the foreign matter removal air into the collecting means with high accuracy, and the foreign matter adhering to the surface of the sheet-like material can be dispersed without spoiling the quality of the sheet-like material. While preventing reattachment, it can be removed stably over a long period of time. Furthermore, according to the present invention, it is possible to efficiently collect foreign substances having a shape and weight that have been difficult to collect.

  The present invention is installed on at least one surface of a traveling sheet-like object, and is blown from the air blowing means A and air blowing means A capable of blowing air to the sheet-like object. In the attached foreign matter removing apparatus having suction means arranged so as to cover the direction in which air is reflected on the surface of the sheet-like object, the position where the air blown from the air blowing means A collides with the surface of the sheet-like object, and An attached foreign matter removing apparatus comprising air blowing means B capable of blowing air in a direction opposite to the air blown from the air blowing means A to the area C between the suction means installation position And its method.

  The sheet-like material in the present invention is a so-called sheet-like material having a very small scale in the thickness direction with respect to the surface direction, and the thickness and width are not particularly limited. For example, a film, a sheet, Examples include thin films and continuous paper.

  Here, the state of traveling is, for example, a state in which a sheet-like material is continuously conveyed in the production process, and is not particularly limited.

  In the present invention, the adhering foreign material is, for example, dust, dust, dust, fiber, human hair, fine powder, sheet-like material pieces, and the like, and is particularly limited as long as it adheres to the sheet-like material. is not. Here, the sheet-like material piece includes, for example, foreign matter generated from the sheet-like material during traveling, such as cutting waste generated when slitting the sheet-like material and waste generated when breaking. For example, in the case where the sheet-like material is a polyimide film, it is generally performed to pierce the end of the film into a pin sheet in order to hold the film, but also includes film scraps generated at this time.

  Hereinafter, the attached foreign matter removing apparatus and the attached foreign matter removing method according to the present invention will be described with reference to FIGS. In addition, the following embodiment is an example which actualized this invention, Comprising: The thing of the character which limits the technical scope of this invention is not.

  FIG. 1 is a schematic diagram showing a schematic configuration of a conventional push-pull type adhered foreign material removing apparatus.

  In FIG. 1, reference numeral 1 denotes a sheet-like object that travels in the direction of arrow X. An air nozzle 2 having an angle adjusted to θ so that foreign matter removing air travels in the traveling direction of the sheet-like object 1 is installed on the upper part of the traveling sheet-like object 1. The foreign matter 3 adhering to the surface of the sheet-like material 1 is blown away by the foreign matter removing air blown from the air nozzle 2. 4 is a collection means, for example, a suction hood connected to a suction blower generator via a hose. The suction hood is installed so as to cover the reflection direction of the foreign matter removal air, that is, the scattering direction of the foreign matter 3. However, if the suction hood comes into contact with the sheet-like object, the sheet-like object may be damaged or wrinkled. Therefore, it cannot be installed in close contact with the sheet. However, the reflection direction of the foreign matter removal air is various, and particularly in the vicinity of the collision part between the foreign matter removal air and the sheet-like object 1, the amount of air blown to the sheet-like object is reflected from the surface of the sheet-like object to the suction hood side. The amount that flows along the sheet is larger than that. Therefore, in this method, there is a problem that most of the adhered foreign matter 3 blown off by the foreign matter removing air passes between the sheet-like material and the collecting means, and the dust removal performance is deteriorated.

  FIG. 2 is a schematic diagram showing a schematic configuration of the attached foreign matter removing apparatus and the attached foreign matter removing method according to the present invention.

  In FIG. 2, reference numeral 1 denotes a sheet-like object that travels in the direction of arrow Y. An air nozzle 2, which is an air blowing means A, is installed at the upper part of the traveling sheet 1 so that the angle is adjusted to θ so that the foreign substance removal air advances in the direction opposite to the traveling direction of the sheet 1. The foreign matter 3 adhering to the surface of the sheet-like material 1 is blown away by the foreign matter removing air blown from the air nozzle 2. 4 is a collection means, for example, a suction hood connected to a suction blower generator via a hose. The suction hood of the collecting means 4 is installed at a distance from the sheet-like material so as to cover the reflection direction of the foreign matter removing air and not to contact the sheet-like material. Reference numeral 5 denotes an air nozzle that is an air blowing means B, and passes auxiliary air that travels in the opposite direction of the foreign matter removing air blown from the air nozzle 2 between the suction hood of the collecting means 4 and the sheet-like material 1. It sprays toward area 6 which is area C.

  According to the above configuration, since the auxiliary air from the air nozzle 5 collides with the foreign matter removal air traveling between the surface of the sheet-like material 1 and the collecting means 4, the foreign matter removal air is collected with the surface of the sheet-like material 1. Inflow between the means 4 is suppressed. Further, by adjusting the flow rate and blowing angle of the auxiliary air from the air nozzle 5, the collision position with the foreign matter removing air can be controlled. Therefore, the traveling direction of the foreign matter removal air is changed, the foreign matter removal air is guided into the suction hood of the collection means 4, and the foreign matter removal air and the suction force of the collection means 4 are both effectively sucked. It becomes possible. Moreover, when the foreign material has adhered to both surfaces of the sheet-like object 1, it is preferable to install the adhered foreign material removal apparatus similar to the above also on the opposite surface of the sheet-like object 1 shown in FIG.

  Furthermore, by installing a charge suppression means upstream of the apparatus of the present invention, it is possible to support the detachment of the attached foreign matter 3 from the surface of the sheet-like object 1 and enhance the foreign matter removing effect. Here, the charging suppression means means means for reducing the charging voltage accumulated in the sheet-like material 1 on the upstream side of the process, and is not particularly limited. From the standpoint of preventing the occurrence of the above, it is preferable to suppress the charging voltage in a non-contact manner on the sheet-like object 1 such as a static elimination bar or an ionizer. The charging suppression means may be installed on at least one side, and it is preferable to suppress the charging voltage of the sheet-like material 1 to ± 0.5 kV or less.

  The air spraying means A only needs to include an air nozzle 2 connected to an air supply source, and more preferably can supply air via a dehumidifying mechanism or an air filter. As the air nozzle 2, for example, a flat type air nozzle (TAIFU-JET type) manufactured by Ikeuchi Co., Ltd. can be used.

  Here, the foreign matter removal air sprayed on the sheet-like material 1 is not particularly limited, but compressed air is preferable because the foreign matter removal effect is higher as the ejection speed is higher. Here, when the air ejection speed is too high, the sheet-like object 1 may be charged and foreign matter may be attracted in reverse, and further, wrinkles and breakage may occur, which may adversely affect the quality of the sheet-like object 1 itself. is there. Therefore, it is necessary to adjust the pressure of the foreign matter removal air in accordance with the scattered state of the attached foreign matter, preferably 0.1 MPa to 0.6 MPa, and more preferably 0.2 MPa to 0.5 MPa. preferable.

  The angle of the foreign matter removal air supplied from the air blowing means A, that is, the angle θ formed between the extended line of the air discharged from the air nozzle 2 and the sheet 1 is preferably an acute angle, for example, θ is 20 ° to 20 °. A range of 50 ° is preferable. When θ is close to a right angle, foreign matter removal air reflected on the sheet-like object 1 may be reflected in a plurality of directions on the sheet-like object 1 plane. Since it flows almost in parallel with the object 1, there is a tendency that the foreign matter removing air hardly hits the attached foreign matter 3.

  Further, it is preferable that the air blowing means A is installed so as to blow air over the entire width direction of the sheet-like material 1 so that the adhered foreign matter can be removed over the entire surface of the sheet-like material. For example, a flat and long air nozzle may be used, a plurality of flat air nozzles may be installed in one row with respect to the width direction of the sheet-like object 1, and a dead space between the air nozzles may be used. A plurality of flat air nozzles may be installed in a staggered arrangement to cover the zone.

  In addition, as the distance L1 between the tip of the air nozzle 2 and the sheet-like object 1 in FIG. 2 increases, the air ejected from the air nozzle 2 attenuates and diffuses. Therefore, it is better to set L1 as small as possible. The removal effect is improved. However, if the tip of the air nozzle 2 and the sheet-like object 1 come into contact with each other, the sheet-like object 1 may be broken, scratched, or wrinkled. Therefore, L1 is preferably a distance that does not contact the tip of the air nozzle 2 even when the sheet-like object 1 vibrates, and is preferably, for example, 50 mm or less.

  The foreign matter removal air blown from the air blowing means A is preferably blown continuously, but pulsed blowing is possible as long as the object of the present invention is achieved.

  Further, in order to prevent vibration and breakage of the sheet-like material 1 at the time of foreign object removal air spraying, as shown in FIG. It is also effective to blow off the adhered foreign matter 3 by blowing the removal air.

  The direction in which the foreign substance removing air is blown from the air blowing means A may be the traveling direction of the sheet-like object 1 or the opposite direction, but is opposite to the direction in which the sheet-like article 1 travels in that the adhered foreign substance 3 is easily peeled off. Is preferable.

  As the air blowing means B, the same apparatus and air as the air blowing means A described above can be used. Here, the flow rate of the auxiliary air blown from the air blowing means B shown as the air nozzle 5 is preferably the same as or smaller than the flow rate of the foreign matter removing air blown from the air blowing means A. It is necessary to adjust the flow rate of the auxiliary air in accordance with the scattered state of the adhered foreign matter, and it is preferable to adjust the flow rate of the auxiliary air to about 60 to 80% of the flow rate of the foreign matter removing air.

  The direction of blowing the auxiliary air supplied from the air blowing means B needs to be adjusted to be opposite to the blowing direction of the foreign matter removing air, but the angle of the auxiliary air, that is, the extension of the air discharged from the air nozzle 5 The angle formed by the line and the sheet-like object 1 is not particularly limited.

  Furthermore, the nozzle shape, arrangement, etc. of the air blowing means B are set as appropriate as in the air blowing means A described above. Further, the distance L2 between the tip of the air nozzle 5 and the sheet-like object 1 in FIG. 2 may be set as appropriate as long as the auxiliary air blows into the region C and the tip of the air nozzle 5 does not contact the sheet-like object.

  As shown in 6 in FIG. 2 or 3, the region C includes a position where the foreign matter removing air blown from the air blowing means A collides with the sheet-like object 1, and an installation position of the collecting means 4. Refers to the area between.

The adhered foreign matter 3 can be collected in the suction hood by both the pressure of the foreign matter removing air blown from the air blowing means A and the suction force of the suction blower in the collecting means. Therefore, the suction force of the collecting means does not necessarily have to be strong, but the air flow from the opening portion to the hose connection portion needs to be generated in the suction hood. Therefore, it is preferable that the air volume toward the inside of the hood at the suction hood opening position of the collecting means 4 is 3 m ³ / min or more, and the opening area of the suction hood is at least twice the sectional area of the suction hose connection part It is preferable to set the air velocity at the suction hose connection portion to be larger than the air velocity at the opening portion of the suction hood.

  In the collecting means 4, the shape and direction of the suction hood can be determined in accordance with the scattering direction of the adhered foreign matter 3 that has been blown off. The suction hood of the collecting means 4 is preferably installed so as to cover the entire region from the opposite side in consideration of the direction in which the foreign matter removing air blown onto the sheet-like material 1 is reflected. Moreover, since the foreign substance removal air sprayed on the sheet-like material 1 from the air blowing means A diffuses slightly in the width direction, the width of the suction hood is preferably made wider than the width of the sheet-like material 1. Furthermore, the distance L3 between the suction hood and the sheet-like object 1 is preferably made as small as possible in order to improve the probability that the adhered foreign matter 3 blown off by the foreign matter removal air will be scattered in the suction hood. However, if the suction hood comes into contact with the sheet-like object 1, it may cause breakage, scratches, wrinkles, etc. of the sheet-like object 1, so that L3 needs to be kept at a distance that does not contact even if the sheet-like object 1 vibrates. . Therefore, for example, the suction hood is preferably installed so that L3 is 50 mm or less, more preferably 30 mm or less.

  Here, the traveling direction of the foreign matter removal air reflected from the sheet-like material 1 changes depending on the angle θ of the air nozzle 2 and the air discharge speed, and further the thickness and running speed of the sheet-like material 1 and the deflection caused by the foreign matter removal air. To do. Therefore, it is possible to determine the shape and direction of the suction hood by roughly grasping the air reflection direction in advance, and to check the status of foreign matter removal air passing between the suction hood and the sheet-like object 1 It is preferable to determine the use conditions of the means B.

  In the production process of a sheet-like material, when a mechanism for carrying the sheet-like material by piercing the pin is provided, in addition to foreign matters such as dust, dust, fibers, etc. Although sheet pieces of up to several hundred μm are generated, the present invention is also effective for foreign substances of this size.

  In the production process, an example of transporting a sheet-like material by staking it into a pin is, for example, production of a polyimide film, but the polyimide film held and conveyed by a pin is likely to generate the above-mentioned sheet-like material piece. The attached foreign matter removing apparatus and the attached foreign matter removing method according to the present invention are particularly suitable for producing a polyimide film as a sheet-like material.

  As described above, as a method of removing the foreign matter adhering to the surface of the sheet-like material, the air-blasting means A installed on at least one surface of the traveling sheet-like material is applied to the sheet-like material. In the attached foreign matter removing method of sucking the attached foreign matter of the sheet-like material by the suction means arranged so as to cover the direction in which the air blown from the air blowing means A is reflected on the surface of the sheet-like material, The opposite direction of the air blown from the air blowing means A to the region C between the position where the air blown from the air blowing means A collides with the surface of the sheet-like object and the suction means installation position Applying a foreign matter removal method characterized by blowing air from air blowing means B that can blow air on Foreign body removal is possible.

  Hereinafter, although the embodiment of the present invention is described based on an example, the present invention is not limited to the following example.

Example 1
For the imide resin film with a thickness of 25 μm, the attached foreign matter removing device shown in FIG. 3 is installed at an arbitrary position in the film width direction, and a filter is provided at the connection site between the suction hood and the suction hose. The number of foreign objects was counted. On the upstream side of the attached foreign matter removing apparatus shown in FIG. 3, 20 to 40 film pieces having a maximum diameter of 100 to 1000 μm are artificially attached to the effective width region of the air blowing means A on the film surface. . For the air blowing means A and B, a flat type air nozzle made by Ikeuchi (TAIFU-Jet type) is used, a pressure gauge is attached to the connection part of each air nozzle, and the original pressure of the air blowing means A is 0.30 ( MPa), the original pressure of the air blowing means B was set to 0.10 (MPa). Further, the distance between the tip of each air nozzle and the film with respect to the film on the roll was 30 mm, and the spray angle of each air was about 35 ° in the tangential direction of the film. Air blowing by each nozzle was simultaneously performed for 1 second or more, and among the adhered foreign matters, the ratio of scattering from the adhesion position and the ratio of being captured in the suction device were evaluated.

(Example 2)
Evaluation was performed under the same conditions as in Example 1 except that the original pressure of the air blowing means B was 0.20 (MPa).

(Example 3)
Evaluation was performed under the same conditions as in Example 1 except that the original pressure of the air blowing means B was set to 0.30 (MPa).

(Comparative Example 1)
Evaluation was performed under the same conditions as in Example 1 except that air blowing from the air blowing means B was not performed.

  Table 1 shows the verification results of the examples and comparative examples. When the air blowing means A and the air blowing means B are used in combination, the ratio of the foreign matter captured in the suction device is the time when the air blowing means A is used alone. It was confirmed that there was an improvement.

The figure which shows an example of the adhering foreign material removal apparatus which concerns on the conventional embodiment. The figure which shows an example of the adhering foreign material removal apparatus which concerns on embodiment of this invention. The figure which shows an example of the adhering foreign material removal apparatus which concerns on embodiment of this invention.

Explanation of symbols

1 Sheet 2 Air blowing means A
3 Adhering foreign matter 4 Collecting means 5 Air blowing means B
6 Area C between the position where the foreign matter removing air blown from the air blowing means A collides with the sheet-like object 1 and the installation position of the collecting means 4

Claims (14)

Air blowing means A installed on at least one surface of the running sheet-like material and capable of blowing air to the sheet-like material, and the air blown from the air blowing means A is sheet-like An adhered foreign matter removing device having suction means arranged to cover the direction of reflection on the object surface,
The opposite direction of the air blown from the air blowing means A to the region C between the position where the air blown from the air blowing means A collides with the surface of the sheet-like object and the suction means installation position An attached foreign matter removing apparatus comprising air blowing means B capable of spraying air on the surface.   2. The attached foreign matter removing apparatus according to claim 1, wherein a flow rate of air blown from the air blowing unit B is smaller than air blown from the air blowing unit A. 3.   3. The adhering foreign matter removing apparatus, comprising: charge suppression means for removing static electricity charged on the sheet-like material on at least one surface of the sheet-like material upstream of the manufacturing process. The adhering foreign material removing device according to 1.   The attached foreign matter removing apparatus according to any one of claims 1 to 3, wherein the air blowing means A is installed so as to blow air at a position where the sheet-like material passes on a curved roll surface. .   The adhered foreign matter removing apparatus according to any one of claims 1 to 4, wherein the sheet-like object travels while being gripped by a pin rail in a tenter.   6. The attached foreign matter removing apparatus according to claim 1, wherein the sheet-like material is a polyimide film.   The adhered foreign matter removing apparatus according to claim 1, wherein a direction in which air is blown from the air blowing unit A is opposite to a direction in which the sheet-like material travels. Air is blown to the sheet from the air blowing means A installed on at least one surface of the traveling sheet, and the air blown from the air blowing means A is on the surface of the sheet. An attached foreign matter removing method of sucking attached foreign matter on a sheet-like material by suction means arranged to cover the direction of reflection,
The opposite direction of the air blown from the air blowing means A to the region C between the position where the air blown from the air blowing means A collides with the surface of the sheet-like object and the suction means installation position A method for removing adhering foreign matter, characterized in that air is blown from an air blowing means B capable of blowing air onto the surface.   The method for removing attached foreign matter according to claim 8, wherein the flow rate of air blown from the air blowing means B is smaller than the air blown from the air blowing means A.   The attached foreign matter removal according to claim 8 or 9, wherein static electricity charged on the sheet-like material is removed by a charge suppression means provided on at least one surface of the sheet-like material upstream of the production process. Method.   The method for removing attached foreign matter according to any one of claims 8 to 10, wherein the air blowing means A blows air at a position where the sheet-like material passes on a roll curved surface.   The method for removing adhered foreign matter according to any one of claims 8 to 11, wherein the sheet-like material travels while being gripped by a pin rail in the tenter.   The method for removing attached foreign matter according to claim 8, wherein the sheet-like material is a polyimide film.   The method for removing attached foreign matter according to any one of claims 8 to 13, wherein a direction in which air is blown from the air blowing means A is opposite to a direction in which the sheet-like material travels.

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