JP5439525B2 - Optical input / output device - Google Patents

Description

  The present invention relates to an optical input / output device.

  For example, Japanese Patent Laid-Open No. 2004-279546 discloses one of optical input / output devices. This optical input / output device is hermetically sealed with a high purity inert gas in order to ensure long-term reliability. For this reason, an opening is provided in the housing, and the gas in the housing is replaced with an inert gas using the opening.

JP 2004-279546 A

  In the optical input / output device described above, the temperature rise when sealing the opening, specifically, the pressure inside the casing increases due to heating when the sealant is melted or cured at high temperature, and the sealant May be ejected to the outside of the housing, and a complete hermetic seal may not be achieved. Further, even if the opening can be completely hermetically sealed by adding a sufficient amount of sealant after the sealant is ejected, a part of the gas inside the casing flows out. This causes a change in the spatial refractive index inside the housing, resulting in deterioration of optical characteristics.

  The present invention has been made in consideration of such a situation, and an object thereof is to provide an optical input / output device with high long-term reliability.

An optical input / output device according to the present invention includes a casing having an internal space and an optical element disposed in the internal space. The housing has a through-hole that communicates between the external space of the housing and the internal space in order to replace the gas in the internal space. The optical input / output device is further disposed in the through-hole to temporarily seal the through-hole, and the optical input / output device is disposed closer to the external space than the temporary sealing means and is melted or welded by heating. And a sealing means for completely sealing the through hole.

  According to the present invention, an optical input / output device with high long-term reliability is provided.

FIG. 1 shows an optical input / output device according to the first embodiment. This is shown in the process of sealing the through hole for gas replacement. The 1st modification of 1st embodiment is shown. The 2nd modification of 1st embodiment is shown. The 3rd modification of 1st embodiment is shown. The 4th modification of 1st embodiment is shown. The 5th modification of 1st embodiment is shown. The 6th modification of 1st embodiment is shown. The 7th modification of 1st embodiment is shown. The optical input / output device by 2nd embodiment is shown.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<First embodiment>
An optical input / output device according to the first embodiment is shown in FIG. The optical input / output device 100 includes a housing 130 having an internal space 131 and an optical element 140 disposed in the internal space 131. The optical input / output device 100 is, for example, a wavelength selective switch that is a kind of optical communication module. The wavelength selective switch is a module having a function of switching wavelength-multiplexed signal light for each wavelength.

  The housing 130 includes a base 110 having a recess and a flat lid 120 that closes the recess of the base 110. The base 110 and the lid 120 are hermetically joined to each other to form an internal space 131. The base 110 is composed of a flat base portion 111 and a cylindrical side wall portion 112 positioned on the base portion 111. Here, for convenience, the base 110 is divided into a base part 111 and a side wall part 112, but the base part 111 and the side wall part 112 may be formed integrally. Of course, the base 110 may be manufactured by joining the base part 111 and the side wall part 112 separately.

  The optical element 140 includes an optical fiber array 141 for inputting / outputting wavelength multiplexed light, an optical lens 142 for converting signal light input from the input fiber of the optical fiber array 141 into parallel light, and the signal light for each wavelength. A dispersion element 143 for dispersing the signal light, an optical lens 144 for collecting the dispersed signal light of each wavelength, and switching the output destination by independently deflecting the collected signal light for each wavelength. And an optical deflector 145. The signal light of each wavelength switched by the optical deflector 145 is output from a desired output fiber of the optical fiber array 141.

  These optical components are installed on the optical base 146, and the optical base 146 is fixed to the base portion 111 of the base 110 via the damper 150.

  The side wall 112 of the base 110 has a through hole 113 for passing the fiber group 147 of the optical fiber array 141. The through hole 113 through which the fiber group 147 is passed is hermetically sealed using a sealant 114 such as solder. The base portion 111 of the base 110 has a through hole 115 through which a cable group 148 for supplying power and control signals to the optical deflector 145 is passed. The through-hole 115 through which the cable group 148 is passed is hermetically sealed using a sealant 116 such as solder.

  The housing 130 has a through-hole 160 for replacing gas in the internal space 131 of the housing 130. The through-hole 160 spatially communicates the internal space 131 of the housing 130 and the external space 132 of the housing 130. In the configuration of FIG. 1, the through-hole 160 is provided in the side wall portion 112 of the base 110, but may be provided in the base portion 111 of the base 110.

  The optical input / output device 100 also includes an intermediate member 181 and a pressure contact member 182 as temporary sealing means for temporarily sealing the through-hole 160, and sealing as a sealing means for completely sealing the through-hole. Agent 183 is provided. The intermediate member 181 is disposed in the through hole 160 and functions to close the through hole 160. The pressure contact member presses the intermediate member 181 against the wall surface of the through-hole 160 and is fixed to the inside of the through-hole 160 by a frictional force.

  The through-hole 160 has an inner opening end on the inner space 131 side and an outer opening end on the outer space 132 side, and the area of the inner opening end is smaller than the area of the outer opening end. The cross-sectional area of the intermediate member 181 perpendicular to the axis of the through hole 160 is larger than the area of the inner opening end of the through hole 160 and smaller than the area of the outer opening end of the through hole 160. Here, the axis of the through-hole 160 means a straight line connecting the centers of the inner opening end and the outer opening end of the through-hole 160. For example, the through-hole 160 has a first portion 161 that opens to the external space 132 and a second portion 162 that opens to the internal space 131. The first portion 161 and the second portion 162 are aligned on a straight line. For example, the first portion 161 has a cylindrical shape, the second portion 162 has a truncated cone shape, and both are continuous without a step.

  Since an optical module such as a wavelength selective switch is required to have long-term reliability, it is necessary to hermetically seal the atmosphere in the housing with a desired gas (inert gas such as nitrogen or argon) with high purity. is there.

  Solder joining or welding is often used for joining the base 110 and the lid 120 for hermetic sealing. However, the solder bonding inevitably affects the inside of the housing 130. In addition, resistance welding, which is mainly used to ensure airtightness while avoiding the influence of heat, requires that either the base 110 or the lid 120 has a thin structure. This is problematic in terms of ensuring rigidity when applied to the case 130 of a wavelength selective switch that requires a relatively large volume. Therefore, laser welding is used as a method that can be applied to hermetic sealing in a relatively large module such as a wavelength selective switch, and avoids the thermal effect during bonding.

  In the wavelength selective switch, it is necessary to pull out the fiber group 147 of the optical fiber array 141 and the cable group 148 for supplying power and control signals to the optical deflector 145 to the outside of the housing 130 while maintaining airtightness. There is. Therefore, a through hole 113 for the fiber group 147 is provided in the side wall 112 of the base 110, and the through hole 113 is sealed with a sealant 114 such as solder after the fiber group 147 is passed. Yes. Further, a through hole 115 for the cable group 148 is provided in the base portion 111 of the base 110, and the through hole 115 is sealed with a sealant 116 such as solder after the cable group 148 is passed. Yes.

  These joining and sealing are performed prior to sealing the gas replacement through-hole 160 provided in the side wall 112 of the base 110. The gas replacement through-hole 160 is used to replace unnecessary gas generated at the time of bonding or sealing. Accordingly, it is possible to prevent the gas from adhering to the optical element 140 to deteriorate the optical performance, and to avoid the pressure change caused by the volume expansion of the gas in the internal space 131 of the housing 130 due to heat generated at the time of bonding or the like. it can.

  A process of sealing the gas replacement through-hole 160 is shown in FIG. The through-hole 160 is sealed after the laser welding between the base 110 and the lid 120 and the sealing of the fiber group 147 and the cable group 148 are completed.

  1. [FIG. 2A] The internal space 131 of the housing 130 is evacuated through the through-hole 160.

  2. [FIG. 2B] A desired gas, for example, an inert gas such as nitrogen or argon is filled into the internal space 131 of the housing 130 through the through-hole 160.

  3. [FIG. 2 (c)] The intermediate member 181 is inserted into the through-hole 160. For example, the intermediate member 181 has a cross-sectional area slightly smaller than the cross-sectional area of the first portion 161 of the through-hole 160 and can be easily inserted into the first portion 161.

  4). [FIG. 2D] Subsequently, the pressure contact member 182 is press-fitted into the through-hole 160. As a result, the pressure contact member 182 presses the intermediate member 181 against the wall surface of the second portion 162 of the through-hole 160. The pressure contact member 182 is fixed inside the first portion 161 of the through-hole 160 by a frictional force. The intermediate member 181 is made of a material harder than the side wall portion 112 of the base 110. For this reason, when the intermediate member 181 is pressed against the wall surface of the through-hole 160, the through-hole 160 is deformed. The pressure contact member 182 is also made of a material harder than the side wall portion 112 of the base 110. For this reason, when the press-contact member 182 is press-fitted into the through-hole 160, the through-hole 160 is deformed. As a result, the through-hole 160 is temporarily sealed in a state where the intermediate member 181 is securely pressed against the wall surface of the through-hole 160.

  5. [FIG. 2E] A space between the pressure contact member 182 and the side wall 112 of the base 110 is filled with a sealant 183. For example, the entire outer opening end of the through hole 160 is covered with the sealant 183. Thereby, the through-hole 160 is completely sealed. As a result, the housing 130 is completely hermetically sealed.

A typical example of the sealant 183 for completely sealing the through hole 160 is solder. In this case, there is a concern that the pressure in the internal space 131 of the housing 130 increases due to heating to melt the solder, and the internal gas is ejected together with the sealant 183. However, in the configuration of the present embodiment, since the intermediate member 181 is pressed against the wall surface of the through-hole 160 by the pressure contact member 182 (temporarily sealed state), the pressure in the internal space 131 of the housing 130 increases. Even so, the gas in the internal space 131 of the housing 130 is well prevented from being ejected from the through-hole 160. Therefore, it is possible to seal between the pressure contact member 182 and the side wall portion 112 of the base 110 without hindrance by using the sealant 183 accompanied by heating such as solder.
That is, according to the configuration of the present embodiment, even a sealing material with heating can be stably hermetically sealed, and ejection of gas inside the housing is prevented to prevent deterioration of optical characteristics. That is, an optical input / output device with high reliability for a long period can be provided.

  Naturally, several modifications can be considered in this embodiment.

(First modification)
A first modification is shown in FIG. 3, members denoted by the same reference numerals as those shown in FIGS. 1 and 2 are the same members. This modification is directed to another through-hole 163 that can replace the through-hole 160, and another intermediate member 184 and pressure-contact member 185 that can replace the intermediate member 181 and the press-contact member 182.

  As shown in FIG. 3, the through-hole 163 of this modification has a step in the middle. That is, the through-hole 163 includes a first portion 164 that opens to the external space 132, a second portion 165 that opens to the internal space 131, and a step portion 166 positioned between the first portion 164 and the second portion 165. Yes. The first portion 164, the second portion 165, and the step portion 166 are aligned on a straight line. The first portion 164 and the second portion 165 are continuous via the step portion 166. Both the first portion 164 and the second portion 165 have a cylindrical shape, and the cross-sectional area of the second portion 165 is smaller than the cross-sectional area of the first portion 164. The step portion 166 has a truncated cone shape.

  The intermediate member 184 has a convex curved surface. For example, the intermediate member 184 has a spherical shape such as a hemisphere, and the curved surface is a part of a spherical surface. The maximum cross-sectional area of the curved surface portion is larger than the cross-sectional area of the second portion 262. For this reason, the curved surface of the intermediate member 184 is pressed against the wall surface of the through-hole 163, for example, the stepped portion 166. That is, the surface of the intermediate member 184 pressed against the wall surface of the through-hole 163 is a curved surface. The press contact member 185 is press-fitted into the through-hole 163, and the side to be press-fitted is chamfered to facilitate press-fitting.

  The through-hole 163 having the stepped portion 166 as shown in FIG. 3 is easier to machine than the through-hole 160 having a tapered shape (conical truncated conical second portion 162) as shown in FIG. Therefore, it is advantageous in terms of cost. Further, the wall surface of the stepped portion 166 serves as a curved surface receiver for the intermediate member 184 and contributes to creating a reliable temporary sealing state when the intermediate member 184 is pressed.

  Other configurations of the intermediate member 184 and the pressure contact member 185 are the same as those of the intermediate member 181 and the pressure contact member 182.

(Second modification)
A second modification is shown in FIG. 4, members denoted by the same reference numerals as those shown in FIGS. 1 to 3 are similar members. This modification is directed to an intermediate pressure contact member that can replace the intermediate member 184 and the pressure contact member 185 of the first modification. The intermediate pressure contact member 186 has a hemispherical portion 186a and a cylindrical portion 186b. The hemispherical part 186a is located on the end face of the cylindrical part 186b, and the hemispherical part 186a and the cylindrical part 186b are integrally formed. The end surface of the cylindrical portion 186b where the hemispherical portion 186a is located is chamfered. The hemispherical portion 186a corresponds to the intermediate member 184 of the first modification, and the cylindrical portion 186b corresponds to the pressure contact member 185 of the first modification. That is, the intermediate pressure contact member 186 is substantially a structure in which the intermediate member 184 and the pressure contact member 185 of the first modification are integrated.

  The intermediate pressure contact member 186 cuts the hemispherical portion 186a from the cylindrical material, chamfers the end surface where the hemispherical portion 186a is formed, and cuts the cylindrical material from the end surface at a position corresponding to the length of the cylindrical portion 186b. Formed. The manufacture of the intermediate pressure contact member 186 is advantageous in reducing the cost because the number of processing steps is smaller than the method of separately manufacturing the intermediate member 184 and the pressure contact member 185 as in the first modification.

(Third modification)
A third modification is shown in FIG. In FIG. 5, members having the same reference numerals as those shown in FIGS. 1 to 4 are similar members. This modification is directed to another intermediate member 187 that can replace the intermediate member 184 of the first modification. The intermediate member 187 of this modification has a spherical shape. Spherical members are readily available and are available in various sizes and materials. Using these commercially available products for the intermediate member 187 is effective in reducing the cost.

(Fourth modification)
A fourth modification is shown in FIG. In FIG. 6, members having the same reference numerals as those shown in FIGS. 1 to 5 are the same members. This modification is directed to another engagement between the through hole 167 and the pressure contact member 185 instead of the engagement by press-fitting between the through holes 160 and 163 and the pressure contact members 182, 185 or the intermediate pressure contact member 186. In this modification, a female screw is provided in the first portion 168 of the through-hole 167, and a male screw that matches the female screw is provided in the pressure contact member 188. The pressure contact member 188 is engaged with the first portion 168 of the through hole 167 via a screw structure including a male screw and a female screw. That is, the press contact member 188 is screwed into the through-hole 167. The press contact member 188 is configured by a screw having no head, a so-called set screw. Since the tightening torque of the pressure contact member 188 can be measured using a torque wrench or the like, a stable pressure contact can be obtained, and a temporarily sealed state with stable quality can be created.

(Fifth modification)
A fifth modification is shown in FIG. 7, members denoted by the same reference numerals as those shown in FIGS. 1 to 6 are the same members. This modification is directed to another pressure contact member 189 that can replace the pressure contact member 188 of the fourth modification. In this modification, the pressure contact member 189 is configured by a countersunk screw having a countersunk head 189a. The opening end of the first portion 168 of the through-hole 167 is formed with a countersink and is countersunk in a dish shape. The peripheral edge of the dish-shaped head portion 189a and the base 110 are laser-welded, and the welded portion 190 formed by welding seals the through-hole 167. In this configuration, laser welding or a welded portion 190 formed thereby constitutes a sealing means.

  In this modified example, since the press contact member 189 is constituted by a countersunk screw, when the press contact member 189 reaches a desired position, the dish-shaped head portion 189 a hits the base 110. Thereby, pressure contact torque management using a torque wrench or the like becomes easier. Laser welding also applies stress directly to the weld, but since the weld is far from the screw structure, it can be reliably sealed without being affected as much as a set screw. Laser welding, unlike solder joint, does not require surface treatment at the joint, which is advantageous for cost reduction.

(Sixth modification)
A sixth modification is shown in FIG. 8, members denoted by the same reference numerals as those shown in FIGS. 1 to 7 are the same members. In the examples so far, the sealant 183 or laser welding is directly applied to the pressure contact members 182, 185, 188, 189 or the intermediate pressure contact member 186 in order to seal the through holes 160, 163. Then, another sealing member 191 that covers the through-hole 163 on the external space side is provided. The separate sealing member 191 is accommodated in a groove formed at the opening end of the first portion 164 and is disposed without a step with respect to the base 110. Another member 191 for sealing is laser welded to the base 110, and a welded portion 190 formed by welding seals the through-hole 163. In this configuration, the sealing member 191 and laser welding or a welded portion 190 formed thereby constitute sealing means.

  In the configuration in which sealant or laser welding is directly applied to the pressure contact member when sealing the through hole, the pressure contact member loosens due to the influence of external force such as heat or vibration, and the pressure of the intermediate member against the through hole is reduced. As a result, the temporarily sealed state cannot be maintained, and sealing may be incomplete. In this case, the gas inside the housing leaks and is sealed while being expanded, and the pressure inside the housing is reduced when the inside of the housing is in a room temperature state after sealing. In this modification, by providing the sealing separate member 191, it is possible to avoid an external force being directly transmitted to the pressure contact member 185 during the sealing operation. For this reason, for example, a sealing method such as laser welding can be positively selected. This provides a long-term highly reliable optical input / output device. Although there is a concern about an increase in cost due to the provision of the separate sealing member 191, as compared with a sealing method using solder or the like, a surface treatment or the like is unnecessary, which is rather advantageous for cost reduction.

(Seventh modification)
A seventh modification is shown in FIG. 9, members denoted by the same reference numerals as those shown in FIGS. 1 to 7 are the same members. In this modification, the engagement by the press-fitting between the through-hole 163 and the pressure contact member 185 in the sixth modification is performed, and the engagement between the through-hole 167 and the pressure contact member 188 in the fourth modification via a screw structure. The configuration is changed to This modified example has the same advantages as the sixth modified example, and the engagement via the screw structure is less likely to loosen than the engagement by press-fitting, so it is even longer than the sixth modified example. An optical input / output device with high period reliability is provided.

<Second Embodiment>
FIG. 10 shows an optical input / output device according to the second embodiment. 10, members denoted by the same reference numerals as those shown in FIG. 1 are similar members, and detailed description thereof is omitted. In the following, explanation will be given with emphasis on the different parts. That is, the part which is not touched by the following description is the same as that of 1st embodiment.

  In the optical input / output device 200 of the present embodiment, the housing 230 includes a base 210 having a recess and a flat lid 220 that closes the recess of the base 210. The base 210 and the lid 220 are joined together in an airtight manner to form an internal space 231.

  The base 210 substantially has a configuration in which the through hole 160 is omitted from the base 110 of the first embodiment.

  The lid 220 has a thick portion 221 that is partially thick. The thick portion 221 has a through-hole 260 for replacing the gas in the internal space 231 of the housing 230. The through hole 260 spatially connects the internal space 231 of the housing 230 and the external space 232 of the housing 230.

  Further, the optical input / output device 200 further includes an intermediate member 281 and a pressure contact member 282 as temporary sealing means for temporarily sealing the through-hole 260, and a sealing as sealing means for completely sealing the through-hole. A stop agent 283 is provided. The intermediate member 281 is disposed in the through hole 260 and functions to close the through hole 260. The pressure contact member presses the intermediate member 281 against the wall surface of the through hole 260 and is fixed to the inside of the through hole 260 by a frictional force.

  The through-hole 260 has an inner opening end on the inner space 231 side and an outer opening end on the outer space 232 side, and the area of the inner opening end is smaller than the area of the outer opening end. The cross-sectional area of the intermediate member 281 perpendicular to the axis of the through hole 260 is larger than the area of the inner opening end of the through hole 260 and smaller than the area of the outer opening end of the through hole 260. More specifically, the through-hole 260 has a first portion 261 that opens to the external space 232 and a second portion 262 that opens to the internal space 231. The first portion 261 and the second portion 262 are aligned on a straight line. For example, both the first portion 261 and the second portion 262 have a columnar shape and are continuous via a stepped portion 263. The cross-sectional area of the second portion 262 is smaller than the cross-sectional area of the first portion 261. The intermediate member 281 has a portion that is at least larger than the cross-sectional area of the second portion 262. Here, the cross-sectional area means an area perpendicular to the axis of the through hole 260. The axis of the through hole 260 means a straight line connecting the centers of the inner opening end and the outer opening end of the through hole 260 or a straight line in which the first portion 261 and the second portion 262 are aligned.

In this embodiment, the same advantages as those of the first embodiment can be obtained. That is, since the sealing operation is performed in a temporarily sealed state in which the intermediate member 281 is pressed against the wall surface of the through-hole 260 by the pressure contact member 282, the pressure in the internal space 231 of the housing 230 is caused by heat generated during the sealing operation. Even if it rises, the gas in the internal space 231 is well prevented from being ejected from the through-hole 260.
That is, even a sealing material with heating can be stably hermetically sealed, preventing ejection of gas inside the housing and preventing deterioration of optical characteristics. Therefore, a highly reliable optical input / output device can be provided for a long time.

  Also for this embodiment, the intermediate member, the pressure contact member, and the sealing means of each modification of the first embodiment may be applied.

  The embodiments of the present invention have been described above with reference to the drawings. However, the present invention is not limited to these embodiments, and various modifications and changes can be made without departing from the scope of the present invention. Also good. The various modifications and changes described here include an implementation in which the above-described embodiments are appropriately combined.

  For example, the through hole 113 for the fiber group 147 and the through hole 115 for the cable group 148 are provided in the side wall 112 and the base 111 of the bases 110 and 210, respectively, in the embodiment. 130, 230, that is, the base 110, 210 and the lid 120, 120 may be provided anywhere.

  Further, the shape of the through hole for gas replacement is not limited to the shape of the through holes 160, 163, 167, and 260 exemplified in the description of the embodiment, and any of the conditions described in the present specification. As long as the above is satisfied, it may have any shape.

DESCRIPTION OF SYMBOLS 100 ... Optical input / output device, 110 ... Base, 111 ... Base part, 112 ... Side wall part, 113 ... Through-hole, 114 ... Sealing agent, 115 ... Through-hole, 116 ... Sealing agent, 120 ... Cover, 130 ... Housing 131 131 Internal space 132 External space 140 Optical element 141 Optical fiber array 142 Optical lens 143 Dispersive element 144 Optical lens 145 Optical deflector 146 Optical base 147 ... Fiber group, 148 ... Cable group, 150 ... Damper, 160 ... Through hole, 161 ... First part, 162 ... Second part, 163 ... Through hole, 164 ... First part, 165 ... Second part, 166 ... Step part 167 ... Through-hole, 168 ... First part, 181 ... Intermediate member, 182 ... Pressure contact member, 183 ... Sealant, 184 ... Intermediate member, 185 ... Pressure contact member, 186 ... Intermediate pressure contact member, 186a ... Sphere portion, 186b ... cylindrical portion, 187 ... intermediate member, 188 ... pressure contact member, 189 ... pressure contact member, 189a ... head, 190 ... welded portion, 191 ... separate member for sealing, 200 ... light input / output device, 210 ... Base, 220 ... Lid, 221 ... Thick part, 230 ... Housing, 231 ... Internal space, 232 ... External space, 260 ... Through-hole, 261 ... First part, 262 ... Second part, 263 ... Step part, 281 ... Intermediate member, 282 ... pressure contact member, 283 ... sealant.

Claims (15)

A housing having an internal space;
An optical element disposed in the internal space,
The housing has a through-hole for replacement of gas in the internal space connecting the external space and the internal space of the housing, and
Temporary sealing means arranged in the through hole for temporarily sealing the through hole;
An optical input / output device provided with sealing means that is disposed closer to the external space than the temporary sealing means, and is melted or welded by heating to completely seal the through hole.   The temporary sealing means includes an intermediate member that is disposed in the through hole and closes the through hole, and a pressure contact member that presses the intermediate member against the wall surface of the through hole and is fixed to the inside of the through hole by a frictional force. The optical input / output device according to claim 1.   The through hole has an inner opening end on the inner space side and an outer opening end on the outer space side, and the area of the inner opening end is smaller than the area of the outer opening end and is perpendicular to the axis of the through opening. The optical input / output device according to claim 2, wherein a cross-sectional area of the intermediate member is larger than an area of the inner opening end of the through hole and smaller than an area of the outer opening end of the through hole.   The through hole has a first portion opened to the outer space side and a second portion opened to the inner space side, and the sectional area of the second portion is smaller than the sectional area of the first portion, The optical input / output device according to claim 3, wherein the intermediate member has at least a portion larger than a cross-sectional area of the second portion.   The optical input / output device according to claim 4, wherein a surface of the intermediate member pressed against the wall surface of the through hole is a curved surface.   The optical input / output device according to claim 4, wherein the intermediate member has a spherical shape.   The optical input / output device according to claim 4, wherein the intermediate member and the pressure contact member are integrated.   The optical input / output device according to claim 4, wherein the pressure contact member is screwed into the through hole.   The optical input / output device according to claim 4, wherein the press contact member is press-fitted into the through hole.   The optical input / output device according to claim 4, wherein the sealing unit includes a sealing agent for sealing the pressure contact member.   The optical input / output device according to claim 4, wherein the sealing unit includes welding the pressure contact member to the housing.   The optical input / output device according to claim 4, wherein the sealing unit includes a separate member for sealing that covers the through hole on the external space side.   The optical input / output device according to claim 12, wherein the sealing unit includes welding the separate member for sealing to the casing.   The optical input / output device according to claim 4, wherein the housing includes a base having a recess and a lid that closes the recess, and the through-hole is provided in the base.   The optical input / output device according to claim 4, wherein the housing includes a base having a recess and a lid that closes the recess, and the through hole is provided in the lid.

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