JP5434317B2 - エピタキシャルウェーハの製造方法 - Google Patents
エピタキシャルウェーハの製造方法 Download PDFInfo
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- JP5434317B2 JP5434317B2 JP2009161572A JP2009161572A JP5434317B2 JP 5434317 B2 JP5434317 B2 JP 5434317B2 JP 2009161572 A JP2009161572 A JP 2009161572A JP 2009161572 A JP2009161572 A JP 2009161572A JP 5434317 B2 JP5434317 B2 JP 5434317B2
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- Prior art keywords
- epitaxial
- wafer
- temperature
- haze level
- epitaxial growth
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims description 48
- 235000012431 wafers Nutrition 0.000 claims description 122
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims description 37
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 34
- 229910052710 silicon Inorganic materials 0.000 claims description 34
- 239000010703 silicon Substances 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 16
- 239000002245 particle Substances 0.000 claims description 16
- 238000000137 annealing Methods 0.000 claims description 9
- 239000007789 gas Substances 0.000 description 40
- 239000002994 raw material Substances 0.000 description 18
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 16
- 239000005052 trichlorosilane Substances 0.000 description 16
- 238000005229 chemical vapour deposition Methods 0.000 description 15
- 238000005259 measurement Methods 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 239000000758 substrate Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000006722 reduction reaction Methods 0.000 description 2
- 238000007665 sagging Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 239000005049 silicon tetrachloride Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000005979 thermal decomposition reaction Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
- 238000009615 fourier-transform spectroscopy Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
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Description
このエピタキシャルウェーハにおいて、ヘイズレベルが、KLA−Tencor社製パーティクルカウンター(SP−1)によるDWNモードでの測定で、0.050〜0.080ppmであり、平坦度が、エッジロールオフで−14nmから+14nmの範囲内であれば、ヘイズレベルが低いので、微小サイズのパーティクルの測定に支障をきたすことがなく、また、エッジロールオフが低く維持されているので、デバイスの製造可能な領域を広くとることができ、望ましい。
Claims (3)
- シリコンウェーハの表面にシリコン層をエピタキシャル成長させるエピタキシャルウェーハの製造方法において、
原料ガスとしてジクロロシランを使用し、900〜1150℃の温度範囲内でエピタキシャル成長させ、
得られるエピタキシャルウェーハのヘイズレベルをポリッシュドウェーハのヘイズレベルよりも悪化させず、かつ平坦度に優れたものとし、
前記エピタキシャル成長の温度領域を供給律速領域とすることを特徴とするエピタキシャルウェーハの製造方法。 - 前記エピタキシャル成長の温度領域を1000〜1050℃の温度範囲内とし、
得られるエピタキシャルウェーハのヘイズレベルを、KLA−Tencor社製パーティクルカウンター(SP−1)によりDWNモードで測定した場合に、0.050〜0.080ppmとし、かつ、平坦度を、エッジロールオフが−14nmから+14nmの範囲内となるように向上させることを特徴とする請求項1に記載のエピタキシャルウェーハの製造方法。 - 前記エピタキシャル成長の前に、シリコンウェーハにプレアニール処理を施すことを特徴とする請求項1または2に記載のエピタキシャルウェーハの製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009161572A JP5434317B2 (ja) | 2009-07-08 | 2009-07-08 | エピタキシャルウェーハの製造方法 |
US13/380,982 US8753962B2 (en) | 2009-07-08 | 2010-07-08 | Method for producing epitaxial wafer |
DE112010004362T DE112010004362T5 (de) | 2009-07-08 | 2010-07-08 | Epitaxialwafer und verfahren zur herstellung desselben |
KR1020127001399A KR101408913B1 (ko) | 2009-07-08 | 2010-07-08 | 에피택셜 웨이퍼 및 그 제조 방법 |
PCT/JP2010/004446 WO2011004602A1 (ja) | 2009-07-08 | 2010-07-08 | エピタキシャルウェーハおよびその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009161572A JP5434317B2 (ja) | 2009-07-08 | 2009-07-08 | エピタキシャルウェーハの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011018725A JP2011018725A (ja) | 2011-01-27 |
JP5434317B2 true JP5434317B2 (ja) | 2014-03-05 |
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Application Number | Title | Priority Date | Filing Date |
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JP2009161572A Active JP5434317B2 (ja) | 2009-07-08 | 2009-07-08 | エピタキシャルウェーハの製造方法 |
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JP (1) | JP5434317B2 (ja) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10025871A1 (de) * | 2000-05-25 | 2001-12-06 | Wacker Siltronic Halbleitermat | Epitaxierte Halbleiterscheibe und Verfahren zu ihrer Herstellung |
EP2337062A3 (en) * | 2003-01-27 | 2016-05-04 | Taiwan Semiconductor Manufacturing Company, Limited | Method for making semiconductor structures with structural homogeneity |
DE102005045339B4 (de) * | 2005-09-22 | 2009-04-02 | Siltronic Ag | Epitaxierte Siliciumscheibe und Verfahren zur Herstellung von epitaxierten Siliciumscheiben |
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- 2009-07-08 JP JP2009161572A patent/JP5434317B2/ja active Active
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