JP5427464B2 - A bellows mechanism of a substrate transfer device and a substrate transfer device using the bellows mechanism. - Google Patents

Description

The present invention relates to a substrate transfer apparatus which employs a bellows mechanism and a bellows mechanism of the substrate transfer apparatus.

  In Patent Document 1, since the center of the inner diameter and the outer shape are relatively decentered to change the expansion / contraction displacement in the circumferential direction, the twist component in the rotation direction can be taken out. However, a welding bellows that can secure a practically required torsional displacement amount by raising this by the number of peaks is disclosed.

  In Patent Document 2, the hollow portions of the first bellows and the second bellows communicate with the atmospheric pressure, and a plurality of deformation prevention plates are provided at equal intervals in the vertical direction on the first bellows and the second bellows. There has been disclosed a substrate transfer device for guiding a deformation prevention plate by a plurality of auxiliary guide rails.

As shown in FIG. 4, the bellows mechanism 100 of the conventional substrate transport apparatus shown in Patent Document 1 or Patent Document 2 above includes a substrate transport apparatus equipment plate 200, an upper end laminate 300a, and a plurality of laminates 300b. And the lower end device facility plate 400 are connected in order by a bellows 500a and a bellows 500b.

More specifically, this conventional bellows mechanism 100 of the substrate transport apparatus includes a substrate transfer apparatus for equipment plate 200, and the upper end laminates 300a, a transmission prevention shaft 600a, a transmission prevention bellows 500a, in transmission preventing layer constituting 700a, an upper end laminated plate 300a, a plurality of laminated plates 300b, a rocking prevention shaft 600b, and a plurality of conveying bellows 500b, and a transportation stretchable layer 700b.

In the transportable elastic layer 700b, the rocking prevention shaft 600b communicates the upper end laminate 300a and the plurality of laminates 300b, thereby causing excessive rocking during the bellows expansion and contraction in the transportable elastic layer 700b. I was in control.

Further, in the transmission preventing layer 700a, the transmission preventing shaft 600a has one end 610 connected to the board conveying device equipment plate 200 and the other end 620 connected to the upper end laminated plate 300a, so that the vibration of the device is prevented from transmitting. Absorption is performed only by 700a, and vibrations of a device (not shown) installed on the substrate transport apparatus equipment plate 200 are prevented from propagating to the transporting elastic layer 700b.

As shown in FIG. 5 (a), a substrate transport apparatus for equipment plate 200 in the transmission preventing layer 700a, when connected to one end 610 of the transmission preventing shaft 600a, a is provided in a substrate transfer apparatus for equipment plate 200 female The screw part 210 and the male screw part 630 provided at one end 610 of the transmission preventing shaft 600a are screwed together, and the adjusting tool 800 adjusts and controls the expansion / contraction movable range of the transmission preventing bellows 500a.

  Further, as shown in FIG. 5B, in the transportable elastic layer 700b, the upper end 630 of the anti-swing shaft 600b is connected to the screw portion 310 provided in the upper end laminate 300a to connect the upper end laminate 300a. A plurality of laminated plates 300b are connected to the upper end laminated plate 300a by screwing and connecting a screw portion 640 provided at the upper end 630 of the movement preventing shaft 600b.

In the conventional bellows mechanism 100 of the substrate transport apparatus configured as described above, it is necessary to arrange the transmission preventing bellows 500a only for the purpose of suppressing the transmission of the apparatus vibration. There was a problem of high costs.

Further, a unique space for arranging the transmission preventing bellows 500a is required, and there is a problem that the space efficiency is insufficient in that respect.

JP 2003-097709 A JP 2003-017543 A

An object of the present invention is to provide a bellows mechanism of a substrate transport apparatus that is inexpensive and safe and that can be configured compactly as a whole, and a substrate transport apparatus using the bellows mechanism.

Bellows mechanism of the substrate transfer apparatus according to the present invention, a substrate transport apparatus for equipment plate, a plurality of stacked plates, and the lower end device for equipment plate, a turn connected by a bellows, a substrate transport apparatus for equipment plate the flexible linking portion The flexible connecting portion is characterized in that a free end portion of a swing control shaft communicating with a plurality of laminated plates is loosely fitted and connected.

By connecting a swing control shaft that communicates a plurality of laminated plates to the flexible connection part provided on the board for substrate transfer equipment , the flexible connection part absorbs the apparatus vibration transmitted to the board for board transfer equipment. Since the transmission is not transmitted to the multi-layered bellows portion, the bellows mechanism of the multi-layered substrate transport apparatus can be configured without providing a transmission preventing layer that causes high costs.

By freely fitting a free end portion of the swing control shaft to the flexible connecting portion provided in the board for transporting equipment, the transmission of the apparatus vibration to the swing control shaft is suppressed.

The flexible connecting part provided on the board for substrate transport equipment is loosely fitted to the free end of the swing control shaft, so that the apparatus vibration is directly transmitted from the board for board transport equipment to the swing control shaft. This can be prevented.

In other words, the flexible coupling part loosely fits the free end portion of the swing control shaft, so that the transmission of the apparatus vibration is caused by mutual swing or mutual displacement between the board transport device equipment plate and the swing control shaft. Can be converted.

The flexible connection part provided in the board for substrate transfer equipment may have a connection chamber for the purpose of restricting only the movement of the swing control shaft in the axial direction.

By controlling only the axial movement of the swing control shaft in the connection chamber, swing control is performed on the direction of mutual swing between the substrate transport equipment plate and the swing control shaft caused by the transmission of the device vibration. It can be restricted only in the direction perpendicular to the axial direction of the shaft.

Axial swing control shaft, since it is the same direction as the carrying bellows contracting direction of the stretchable bellows in transporting the substrate or the like, the horizontal direction of the vibration substrate transfer apparatus for equipment plate and swinging perpendicular thereto It can be converted into mutual displacement in the connecting chamber with the dynamic control shaft and absorbed.

The connection chamber which the flexible connection part with which a board | substrate for board | substrate conveyance apparatus equips has has may be provided with the control member which hold | maintains the free end part which a rocking | fluctuation control shaft has inside this connection chamber.

By holding the free end on the inside of the connecting chamber with the restraining member, the swing control shaft is prevented from coming off from the flexible connecting portion, and at the same time, it swings with the board for the substrate transport device due to the transmission of the device vibration. The direction of mutual rocking with the control shaft can be restricted only in the direction perpendicular to the axial direction of the rocking control shaft.

In addition, the board | substrate conveyance apparatus as needed can be comprised suitably using the bellows mechanism of the above board | substrate conveyance apparatus of this invention.

Bellows mechanism of the substrate transfer apparatus according to the present invention, a substrate transport apparatus for equipment plate, a plurality of stacked plates, and the lower end device for equipment plate, a turn connected by a bellows, a substrate transport apparatus for equipment plate the flexible linking portion provided, the flexible coupling portion by coupling loosely fit the free end portion having a swing control shaft that communicates a plurality of laminated plates is not particularly necessary to provide the transmission prevention layer disposed bellows, inexpensive It is safe and can be configured compactly as a whole. The substrate transfer apparatus according to the present invention is inexpensive and safe and can be configured compactly as a whole.

The end surface sectional view of the bellows mechanism of a substrate transportation device . The partial expanded end surface sectional view of the bellows mechanism of a substrate conveyance device . The partial expanded end surface sectional view of the bellows mechanism of a substrate conveyance device . End surface sectional drawing of the bellows mechanism of the conventional board | substrate conveyance apparatus . (A) Partial expanded end surface sectional drawing of the bellows mechanism of the conventional board | substrate conveyance apparatus . (B) The other partial expanded end surface sectional drawing of the bellows mechanism of the conventional board | substrate conveyance apparatus .

The form for implementing the bellows mechanism of the board | substrate conveyance apparatus of this invention is demonstrated with reference to drawings below.

As shown in the end cross-sectional view of FIG. 1, the bellows mechanism 10 of the substrate transfer apparatus includes a substrate transfer apparatus facility plate 20, a plurality of laminated plates 30, and a lower end apparatus facility plate 40 in order. , B, c), the board transport apparatus equipment plate 20 includes a flexible connecting portion 21, and the flexible control portion 21 is connected to a swing control shaft 60 that communicates a plurality of laminated plates 30.

The multi-layered bellows mechanism 10 transmits the vibration of the apparatus not only to the bellows 50a connected to the board 20 for board transport apparatus equipment but also to the bellows 50b and 50c. Therefore, it is possible to configure the bellows mechanism 10 of the highly durable substrate transport apparatus, in which only a specific bellows in a plurality of layers is not overloaded, and the specific bellows is not significantly damaged.

FIG. 2 shows an enlarged end cross-sectional view of a portion where the flexible connecting portion 21 and the swing control shaft 60 are connected. As shown in the figure, the flexible connecting portion 21 provided in the board transport apparatus equipment plate 20 includes a connecting chamber 22, and the connecting chamber 22 includes a restraining member 23. A free end 61 of the swing control shaft 60 is loosely fitted in the connection chamber 22.

By loosely fitting the free end 61 in the connecting chamber 22 of the flexible connecting portion 21, the free end 61 is freely displaced inside the connecting chamber 22, and thus the apparatus vibration applied to the board 20 for board transport equipment. Is not directly transmitted from the substrate transfer apparatus equipment plate 20 to the swing control shaft 60. Thus apparatus vibrations on a substrate transport apparatus for equipment plate 20 and the substrate transfer apparatus for equipment plate 20, are converted into each other displacement between the swing control shaft 60.

The restraining member 23 attached to the connecting chamber 22 in the flexible connecting portion 21 restricts the movement of the swing control shaft 60 in the axial direction Y beyond a certain level, and the free end 61 of the swing control shaft 60 is provided in the connecting chamber 22. It holds inside and prevents the rocking | fluctuation control shaft 60 from coming off from the flexible connection part 21. FIG.

As described above, by having the connection chamber 22, a safe substrate can be obtained without transmitting the device vibration applied to the substrate transfer apparatus facility plate 20 to the bellows 50a, b, c that expand and contract when the substrate is transferred. It is possible to provide a bellows mechanism 10 of a substrate transfer apparatus that can carry such transport in a stable cycle.

As shown FIG. 3, a substrate transport apparatus for equipment plate 20 at the floating joint 70, a swing control shaft 60, may be to connect the.

The floating joint 70 is a flexible connecting portion 21 having a connecting chamber 22 provided with a restraining member 23, which is provided in the substrate transfer device equipment plate 20, and the free end portion 61 of the swing control shaft 60 and the substrate transfer device equipment. The plates 20 are connected to each other so as to be freely displaced.

DESCRIPTION OF SYMBOLS 10 ... Bellows mechanism of board | substrate conveyance apparatus , 20 ... Board for board | substrate conveyance apparatus equipment, 21 ... Flexible connection part, 22 ... Connection chamber, 23 ... Stopping member, 30 ... Laminate board 40 ... lower end device equipment plate, 50 (a, b, c) ... bellows, 60 ... swing control shaft, 61 ... free end, 70 ... floating joint, Y ..Axial direction, X ... perpendicular to the axial direction

Claims (4)

A substrate transfer device for equipment plate, a plurality of stacked plates, in turn connected by bellows and the lower unit for equipment plate, a substrate transfer apparatus for equipment plate comprising a flexible connecting portion, the flexible coupling portion has a plurality of stacked plates A bellows mechanism for a substrate transport apparatus, wherein a free end portion of a swing control shaft that communicates with each other is loosely fitted and connected.

2. The bellows mechanism for a substrate transport apparatus according to claim 1 , wherein the flexible connection portion provided in the board for the substrate transport apparatus has a connection chamber that stops only the movement of the swing control shaft in the axial direction.

Connecting chamber having flexible connecting portion provided on the substrate transfer apparatus for equipment plate, the free end having a swing control shaft according to claim 2, characterized in that it comprises a stop member for holding the inside of the connecting chamber The bellows mechanism of the substrate transfer device .
A substrate transport apparatus comprising the bellows mechanism according to claim 1.

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