JP2010255765A

JP2010255765A - Bellows mechanism

Info

Publication number: JP2010255765A
Application number: JP2009107405A
Authority: JP
Inventors: Riki Senba; 力仙波; Yosuke Inoue; 陽輔井上
Original assignee: MIRAPURO KK; Mirapro Co Ltd
Current assignee: MIRAPURO KK; Mirapro Co Ltd
Priority date: 2009-04-27
Filing date: 2009-04-27
Publication date: 2010-11-11
Anticipated expiration: 2029-04-27
Also published as: JP5427464B2

Abstract

<P>PROBLEM TO BE SOLVED: To provide a bellows mechanism which is low in cost and safe and can be compactly configured as a whole. <P>SOLUTION: A free end portion is allowed freely displace in the inside of a connecting chamber by loosely fitting the free end portion within the connecting chamber of a flexible connection portion 21, and a device vibration applied on a plate 20 for upper end device installation is not transmitted directly from the plate 20 for upper end device installation to an oscillation control shaft 60. Accordingly, the device vibration on the plate 20 for upper end device installation is converted into mutual displacement of the oscillation control shaft 60 and the plate 20 for upper end device installation. An inhibition member attached to the connecting chamber in the flexible connection portion 21 regulates movement exceeding a fixed movement in axial direction Y of the oscillation control shaft 60 and holds the free end portion including the oscillation control shaft 60 inside the connecting chamber and prevents the oscillation control shaft 60 from being separated from the flexible connection portion 21. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明はベローズ機構に関し、例えば基板等を搬送する基板搬送装置等に用いるベローズ機構に関する。 The present invention relates to a bellows mechanism, and for example, relates to a bellows mechanism used in a substrate transport apparatus that transports a substrate or the like.

特許文献１には内径と外形の中心を相対的に偏心させることによって、周方向の各伸縮変位を変化させることによって、回転方向のねじれ成分を取り出すことができるので、１山では微少なねじれ量であるが、これを山数分乗することによって、実用的に必要なねじれ変位量を確保することができる溶接ベローズが開示された。 In Patent Document 1, since the center of the inner diameter and the outer shape are relatively decentered to change the expansion / contraction displacement in the circumferential direction, the twist component in the rotation direction can be taken out. However, a welding bellows that can secure a practically required torsional displacement amount by multiplying this by the number of peaks is disclosed.

また特許文献２には、第一ベローズ、第二ベローズの中空部内を大気圧に連通し、第一ベローズ、第二ベローズに複数枚の変形防止板を上下方向に等間隔に介設し、各変形防止板を複数本の補助ガイドレールによって案内する基板搬送装置が開示された。 In Patent Document 2, the hollow portions of the first bellows and the second bellows communicate with the atmospheric pressure, and a plurality of deformation prevention plates are provided at equal intervals in the vertical direction on the first bellows and the second bellows. There has been disclosed a substrate transfer apparatus for guiding a deformation prevention plate by a plurality of auxiliary guide rails.

図４に示すように上の特許文献１若しくは特許文献２に示された従来のベローズ機構１００は、上端装置設備用板２００と、上端積層板３００ａと、複数の積層板３００ｂと、下端装置設備用板４００と、を順にベローズ５００ａ及びベローズ５００ｂで繋いで構成されていた。 As shown in FIG. 4, the conventional bellows mechanism 100 shown in the above Patent Document 1 or Patent Document 2 includes an upper-end device board 200, an upper-end laminated board 300a, a plurality of laminated boards 300b, and a lower-end apparatus equipment. The plate 400 is connected by a bellows 500a and a bellows 500b in this order.

さらに詳細には、この従来のベローズ機構１００は、上端装置設備用板２００と、上端積層板３００ａと、伝動防止シャフト６００ａと、伝動防止ベローズ５００ａと、で構成する伝動防止層７００ａと、上端積層板３００ａと、複数の積層板３００ｂと、揺動防止シャフト６００ｂと、複数の運搬用ベローズ５００ｂと、で構成する運搬用伸縮層７００ｂと、を有していた。 More specifically, this conventional bellows mechanism 100 includes an upper end device equipment plate 200, an upper end laminated plate 300a, a transmission preventing shaft 600a, a transmission preventing bellows 500a, and a transmission preventing layer 700a. It had the elastic layer 700b for conveyance comprised with the board 300a, the some laminated board 300b, the rocking | fluctuation prevention shaft 600b, and the some bellows 500b for conveyance.

運搬用伸縮層７００ｂでは、揺動防止シャフト６００ｂが、上端積層板３００ａと、複数の積層板３００ｂと、を連通することによって、運搬用伸縮層７００ｂにてベローズ伸縮の際における過度な揺動を制御していた。
また、伝動防止層７００ａでは、伝動防止シャフト６００ａが、その一端６１０を上端装置設備用板２００と連結し、他端６２０を上端積層板３００ａと連結することによって、装置の振動を伝動防止層７００ａのみで吸収し、運搬用伸縮層７００ｂに上端装置設備用板２００に設置された装置（図示せず）の振動が伝搬することを防止していた。 In the transportable elastic layer 700b, the rocking prevention shaft 600b communicates the upper end laminate 300a and the plurality of laminates 300b, thereby causing excessive rocking during the bellows expansion and contraction in the transportable elastic layer 700b. I was in control.
Further, in the transmission preventing layer 700a, the transmission preventing shaft 600a connects one end 610 to the upper apparatus plate 200 and the other end 620 to the upper laminated board 300a, thereby suppressing the vibration of the apparatus. The vibration of the apparatus (not shown) installed in the board 200 for an upper end apparatus equipment was prevented from propagating to the conveyance elastic layer 700b.

図５（ａ）に示すように、伝動防止層７００ａにおける上端装置設備用板２００と、伝動防止シャフト６００ａの一端６１０と、を連結する際は、上端装置設備用板２００に備えた雌螺号部２１０と、伝動防止シャフト６００ａの一端６１０に備えた雄螺号部６３０と、を螺合連結し、調整具８００にて伝動防止ベローズ５００ａの伸縮可動範囲を調整制御していた。 As shown in FIG. 5A, when connecting the upper end device equipment plate 200 in the transmission preventing layer 700a and the one end 610 of the transmission preventing shaft 600a, the female screw portion provided in the upper end device equipment plate 200 is connected. 210 and a male screw part 630 provided at one end 610 of the transmission preventing shaft 600a are screwed together, and the adjustment tool 800 adjusts and controls the range of expansion and contraction of the transmission preventing bellows 500a.

また図５（ｂ）に示すように、運搬用伸縮層７００ｂでは、揺動防止シャフト６００ｂの上端６３０を、上端積層板３００ａと連結するために上端積層板３００ａに備えた螺号部３１０と、揺動防止シャフト６００ｂの上端６３０に備えた螺号部６４０とを螺合連結して、上端積層板３００ａに対し複数の積層板３００ｂを連結していた。 Further, as shown in FIG. 5B, in the transportable elastic layer 700b, the upper end 630 of the rocking prevention shaft 600b is connected to the screw portion 310 provided in the upper end laminate 300a to connect with the upper end laminate 300a. A plurality of laminated plates 300b are connected to the upper end laminated plate 300a by screwing and connecting a screw portion 640 provided at the upper end 630 of the movement preventing shaft 600b.

以上のように構成される従来のベローズ機構１００では、装置振動の伝動を抑制することのみを目的とする伝動防止ベローズ５００ａを配置する必要があることから製造にも手間が掛かり、コスト高になるという問題があった。
また伝動防止ベローズ５００ａを配置するための固有のスペースが必要となり、その点でスペース効率が不十分であるという問題があった。 In the conventional bellows mechanism 100 configured as described above, it is necessary to arrange the transmission preventing bellows 500a only for the purpose of suppressing the transmission of the apparatus vibration. There was a problem.
In addition, a unique space for arranging the transmission preventing bellows 500a is required, and there is a problem that the space efficiency is insufficient.

特開２００３−０９７７０９号公報JP 2003-097709 A 特開２００３−０１７５４３号公報JP 2003-017543 A

本発明は、安価で安全であり、かつ全体としてコンパクトに構成できるベローズ機構を提供することを目的とする。 An object of the present invention is to provide a bellows mechanism that is inexpensive and safe and can be configured compactly as a whole.

本発明に係るベローズ機構は、上端装置設備用板と、複数の積層板と、下端装置設備用板と、を順にベローズで繋ぎ、上端装置設備用板は柔軟連結部を備え、該柔軟連結部に複数の積層板を連通する揺動制御シャフトを連結することを特徴とする。 The bellows mechanism according to the present invention includes a bellows unit for connecting an upper end device facility plate, a plurality of laminated plates, and a lower end device facility plate in order, and the upper end device facility plate includes a flexible coupling portion. A swing control shaft that communicates with a plurality of laminated plates is connected to the first and second plates.

上端装置設備用板に備える柔軟連結部に複数の積層板を連通する揺動制御シャフトを連結することによって、上端装置設備用板に伝達される装置振動を、柔軟連結部で吸収して、複数層構成のベローズ部には伝達されないようにしたので、コスト高の原因となる伝動防止層を設けずに複数層構成のベローズ機構を構成することができる。 By connecting a swing control shaft that communicates a plurality of laminated plates to the flexible connecting portion provided in the upper end device facility plate, the apparatus vibration transmitted to the upper end device facility plate is absorbed by the flexible connecting portion, Since it is not transmitted to the bellows portion having a layer structure, a bellows mechanism having a plurality of layers structure can be formed without providing a transmission preventing layer that causes high cost.

揺動制御シャフトに対する装置振動の伝動を抑制すること目的とし、上端装置設備用板に備える柔軟連結部には、揺動制御シャフトの有する自由端部を遊嵌するようにすることができる。 For the purpose of suppressing the transmission of device vibration to the swing control shaft, the free end portion of the swing control shaft can be loosely fitted to the flexible connecting portion provided in the upper end device equipment plate.

上端装置設備用板に備える柔軟連結部が、揺動制御シャフトの有する自由端部を遊嵌することによって、装置振動が上端装置設備用板から直接的に揺動制御シャフトに伝動されることを防止することができる。
すなわち柔軟連結部が、揺動制御シャフトの有する自由端部を遊嵌することによって、装置振動の伝動は、上端装置設備用板と、揺動制御シャフトと、の相互揺動若しくは相互変位に変換することができる。 The flexible connecting portion provided on the upper end device equipment plate loosely fits the free end portion of the swing control shaft so that the device vibration is transmitted directly from the upper end device equipment plate to the swing control shaft. Can be prevented.
In other words, the flexible coupling part loosely fits the free end of the swing control shaft, so that the transmission of the device vibration is converted into mutual swing or mutual displacement between the upper end device equipment plate and the swing control shaft. can do.

上端装置設備用板に備える柔軟連結部は、揺動制御シャフトの軸方向の動きのみを制止することを目的とする連結室を有するようにすることができる。 The flexible connection part provided in the upper-end device equipment plate may have a connection chamber for the purpose of restricting only the axial movement of the swing control shaft.

連結室にて、揺動制御シャフトの軸方向の動きのみを制止することによって、装置振動の伝動に起因する上端装置設備用板と揺動制御シャフトとの相互揺動の方向を揺動制御シャフトの軸方向に対する垂直方向のみに規制することができる。
揺動制御シャフトの軸方向は、基板等を搬送する際に伸縮するベローズの運搬用ベローズ伸縮方向と同じ方向であることから、これと直交する水平方向の振動は上端装置設備用板と揺動制御シャフトとの連結室における相互変位に変換して吸収することができる。 By restricting only the axial movement of the swing control shaft in the connection chamber, the swing control shaft determines the mutual swing direction between the upper device plate and the swing control shaft due to the transmission of the device vibration. It is possible to regulate only in the direction perpendicular to the axial direction.
Since the axial direction of the swing control shaft is the same direction as the bellows expansion / contraction direction of the bellows that expands / contracts when transporting the substrate, etc., the horizontal vibration perpendicular to this is the same as the top end equipment plate. It can be converted into mutual displacement in the connecting chamber with the control shaft and absorbed.

上端装置設備用板に備える柔軟連結部の有する連結室は、揺動制御シャフトの有する自由端部を該連結室の内側に保持する制止部材を備えるのもよい。
制止部材にて、自由端部を連結室内側に保持することによって、揺動制御シャフトが柔軟連結部から外れるのを防ぐと同時に、装置振動の伝動に起因する上端装置設備用板と揺動制御シャフトとの相互揺動の方向を揺動制御シャフトの軸方向に対する垂直方向のみに規制することができる。 The connection chamber which the flexible connection part with which an upper end apparatus equipment board is equipped with may have a stop member which holds the free end part which a rocking | fluctuation control shaft has inside this connection chamber.
By holding the free end on the inside of the connecting chamber with a restraining member, the swing control shaft is prevented from being detached from the flexible connecting portion, and at the same time, the upper end device equipment plate and the swing control are caused by the transmission of the device vibration. The direction of mutual swinging with the shaft can be restricted only in the direction perpendicular to the axial direction of the swing control shaft.

本発明に係るベローズ機構は、上端装置設備用板と、複数の積層板と、下端装置設備用板と、を順にベローズで繋ぎ、上端装置設備用板は柔軟連結部を備え、該柔軟連結部に複数の積層板を連通する揺動制御シャフトを連結することによって、ベローズを配置した伝動防止層を特に設ける必要はなく、安価で安全であり、かつ全体としてコンパクトに構成することができる。 The bellows mechanism according to the present invention comprises a bellows for sequentially connecting an upper end device equipment plate, a plurality of laminated plates, and a lower end device equipment plate with a bellows, and the upper end device equipment plate includes a flexible connecting portion, the flexible connecting portion By connecting a swing control shaft that communicates a plurality of laminated plates to each other, it is not necessary to provide a transmission preventing layer in which a bellows is disposed, and it can be inexpensive and safe and can be configured compactly as a whole.

ベローズ機構の端面断面図。End face sectional drawing of a bellows mechanism. ベローズ機構の部分拡大端面断面図。The partial expanded end surface sectional view of a bellows mechanism. ベローズ機構の部分拡大端面断面図。The partial expanded end surface sectional view of a bellows mechanism. 従来のベローズ機構の端面断面図。End surface sectional drawing of the conventional bellows mechanism. （ａ）従来のベローズ機構の部分拡大端面断面図。（ｂ）従来のベローズ機構の他の部分拡大端面断面図。(A) Partial expanded end surface sectional drawing of the conventional bellows mechanism. (B) The other partial expanded end surface sectional drawing of the conventional bellows mechanism.

本発明のベローズ機構を実施するための形態を、以下図面を参照して説明する。
図１の端面断面図を示すように、ベローズ機構１０は、上端装置設備用板２０と、複数の積層板３０と、下端装置設備用板４０と、を順にベローズ５０（ａ、ｂ、ｃ）で繋ぎ、上端装置設備用板２０は柔軟連結部２１を備え、該柔軟連結部２１に複数の積層板３０を連通する揺動制御シャフト６０を連結する。 The form for implementing the bellows mechanism of this invention is demonstrated with reference to drawings below.
As shown in the end cross-sectional view of FIG. 1, the bellows mechanism 10 includes an upper end device equipment plate 20, a plurality of laminated plates 30, and a lower end device equipment plate 40 in order, a bellows 50 (a, b, c). The upper end device equipment plate 20 includes a flexible connecting portion 21, and a swing control shaft 60 that connects the plurality of laminated plates 30 to the flexible connecting portion 21 is connected.

複数層構成のベローズ機構１０は装置振動の伝動を、上端装置設備用板２０に繋いだベローズ５０ａのみでは無く、ベローズ５０ｂ、ｃにも伝動する。よって、複数層における特定のベローズのみに過大負荷が掛かることなく、特定のベローズに著しい損傷が偏って生じることの無い、耐久性の高いベローズ機構１０を構成することができる。 The multi-layered bellows mechanism 10 transmits device vibration not only to the bellows 50a connected to the upper-end device equipment plate 20, but also to the bellows 50b and 50c. Therefore, it is possible to configure a highly durable bellows mechanism 10 that does not apply excessive load to only the specific bellows in the plurality of layers and does not cause significant damage to the specific bellows.

図２に柔軟連結部２１と、揺動制御シャフト６０と、を連結する部分の拡大端面断面図を示す。図に示すように、上端装置設備用板２０に備える柔軟連結部２１は、連結室２２を有し、該連結室２２は制止部材２３を備える。揺動制御シャフト６０の有する自由端部６１は連結室２２内に遊嵌する。 FIG. 2 shows an enlarged end cross-sectional view of a portion connecting the flexible connecting portion 21 and the swing control shaft 60. As shown in the drawing, the flexible connecting portion 21 provided in the upper-end apparatus equipment plate 20 includes a connecting chamber 22, and the connecting chamber 22 includes a restraining member 23. A free end 61 of the swing control shaft 60 is loosely fitted in the connection chamber 22.

柔軟連結部２１の連結室２２内に自由端部６１を遊嵌することによって、自由端部６１は連結室２２内側において自在に変位し、したがって、上端装置設備用板２０に加えられる装置振動は上端装置設備用板２０から直接に揺動制御シャフト６０に伝動されることはない。したがって上端装置設備用板２０上の装置振動は上端装置設備用板２０と、揺動制御シャフト６０との相互変位に変換される。
柔軟連結部２１における連結室２２に取り付けられる制止部材２３は、揺動制御シャフト６０の軸方向Ｙの一定以上の動きを規制し、揺動制御シャフト６０の有する自由端部６１を連結室２２の内側に保持し、揺動制御シャフト６０が柔軟連結部２１から外れるのを防ぐ。
以上のように、連結室２２を有することによって、基板等を搬送する際に伸縮するベローズ５０ａ、ｂ、ｃに上端装置設備用板２０に加えられる装置振動を伝達させることなく、安全な基板等の運送を安定したサイクルで担えるベローズ機構１０とすることができる。 By loosely fitting the free end 61 in the connecting chamber 22 of the flexible connecting portion 21, the free end 61 is freely displaced inside the connecting chamber 22, so that the device vibration applied to the upper end device equipment plate 20 is There is no direct transmission from the upper end device equipment plate 20 to the swing control shaft 60. Accordingly, the device vibration on the upper device rack 20 is converted into mutual displacement between the upper device rack 20 and the swing control shaft 60.
The restraining member 23 attached to the connecting chamber 22 in the flexible connecting portion 21 restricts the movement of the swing control shaft 60 in the axial direction Y beyond a certain level, and the free end 61 of the swing control shaft 60 is provided in the connecting chamber 22. It holds inside and prevents the rocking | fluctuation control shaft 60 from coming off from the flexible connection part 21. FIG.
As described above, by having the connection chamber 22, a safe substrate or the like without transmitting the device vibration applied to the upper device plate 20 to the bellows 50 a, b and c that expand and contract when the substrate or the like is conveyed. The bellows mechanism 10 can carry the above in a stable cycle.

図３示すように、フローティングジョイント７０にて上端装置設備用板２０と、揺動制御シャフト６０と、を連結するのもよい。
フローティングジョイント７０は、上端装置設備用板２０に備える、制止部材２３を備えた連結室２２を有する柔軟連結部２１であり、揺動制御シャフト６０の有する自由端部６１と上端装置設備用板２０を相互変位自在に連結する。 As shown in FIG. 3, the upper-end apparatus equipment plate 20 and the swing control shaft 60 may be connected by a floating joint 70.
The floating joint 70 is a flexible connecting portion 21 having a connecting chamber 22 with a restraining member 23, which is provided in the upper-end device equipment plate 20. The free joint 61 and the upper-end device equipment plate 20 that the swing control shaft 60 has. Are connected to each other so as to be freely displaced.

１０ベローズ機構
２０上端装置設備用板
２１柔軟連結部
２２連結室
２３制止部材
３０積層板
４０下端装置設備用板
５０（ａ、ｂ、ｃ）ベローズ
６０揺動制御シャフト
６１自由端部
７０フローティングジョイント
Ｙ軸方向
Ｘ軸方向に対する垂直方向 DESCRIPTION OF SYMBOLS 10 Bellows mechanism 20 Upper end apparatus equipment board 21 Flexible connection part 22 Connection chamber 23 Stopping member 30 Laminated board 40 Lower end apparatus equipment board 50 (a, b, c) Bellows 60 Oscillation control shaft 61 Free end part 70 Floating joint Y Axial direction X Perpendicular to the axial direction

Claims

The upper end device equipment plate, the plurality of laminated plates, and the lower end device equipment plate are sequentially connected by a bellows, and the upper end device equipment plate includes a flexible connecting portion, and the plurality of laminated plates communicate with the flexible connecting portion. A bellows mechanism characterized by connecting a swing control shaft.

The bellows mechanism according to claim 1, wherein the flexible connecting portion provided in the upper end device equipment plate loosely fits a free end portion of the swing control shaft.

The bellows mechanism according to claim 1 or 2, wherein the flexible connecting portion provided in the upper-end device equipment plate has a connecting chamber that restrains only the axial movement of the swing control shaft.

The bellows according to claim 3, wherein the connecting chamber of the flexible connecting portion provided in the upper-end device facility plate includes a restraining member that holds the free end of the swing control shaft inside the connecting chamber. mechanism.