CN101542260A - Vibration test apparatus - Google Patents

Vibration test apparatus Download PDF

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Publication number
CN101542260A
CN101542260A CNA2008800002828A CN200880000282A CN101542260A CN 101542260 A CN101542260 A CN 101542260A CN A2008800002828 A CNA2008800002828 A CN A2008800002828A CN 200880000282 A CN200880000282 A CN 200880000282A CN 101542260 A CN101542260 A CN 101542260A
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CN
China
Prior art keywords
mentioned
worktable
driver
testing device
vibration testing
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Granted
Application number
CNA2008800002828A
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Chinese (zh)
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CN101542260B (en
Inventor
松本繁
宫下博至
村内一宏
长谷川正伸
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INTERNATIONAL MEASURING DEVICE CO Ltd
Kokusai Keisokuki KK
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INTERNATIONAL MEASURING DEVICE CO Ltd
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Application filed by INTERNATIONAL MEASURING DEVICE CO Ltd filed Critical INTERNATIONAL MEASURING DEVICE CO Ltd
Priority to CN201210065781.3A priority Critical patent/CN102607790B/en
Publication of CN101542260A publication Critical patent/CN101542260A/en
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Publication of CN101542260B publication Critical patent/CN101542260B/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M7/00—Vibration-testing of structures; Shock-testing of structures
    • G01M7/02—Vibration-testing by means of a shake table
    • G01M7/06—Multidirectional test stands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M7/00—Vibration-testing of structures; Shock-testing of structures
    • G01M7/02—Vibration-testing by means of a shake table
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/04—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism

Abstract

The present invention provides a vibration test apparatus for vibrating a table on which a test piece is secured. The apparatus comprises first and second actuators for vibrating a table in mutually perpendicular first and second directions, first coupling means for enabling the table to slide in the second direction with respect to the first actuator, and second coupling means for enabling the table to slide in the first direction with respect to the second actuator. Preferably, the apparatus further comprises a third actuator for vibrating the table in a third direction perpendicular to both the first and second directions and third coupling means for coupling the table to the third actuator slidably in the first and second directions, and the first and second coupling means couple the table to the first and second actuators slidably in the third direction.

Description

Vibration testing device
Technical area
The present invention relates to a kind of vibration testing device.
Background technology
Usually, engineering goods, mechanical part are subjected to the effect of alternate load when transporting and use.Breakage can take place because of tired in the object that is subjected to the alternate load effect sometimes, or shape, characteristic are changed.For this reason, when exploitation engineering goods and mechanical part, preferably sample (test film) is applied the performance that alternate load is observed sample.
In order to reach such purpose, used vibration testing device.Vibration testing device is the device described in TOHKEMY 2000-338010 communique for example, workpiece (test film) is fixed on the worktable, driver (actuator) by the outside makes this worktable along 1 axle, and 3 axles or 6 direction of principal axis vibrate.
In above-mentioned communique, disclose and a kind of worktable has been superposed to three layers and workpiece is fixed in structure (the 1st structure) on the worktable on upper strata.In the 1st structure, the worktable of lower floor is vibrated along the vertical direction, the worktable in middle level vibrates along left and right directions with respect to the worktable of lower floor, and the worktable on upper strata vibrates along fore-and-aft direction with respect to the worktable in middle level.In this structure, when the worktable of lower floor vibrates, be used to make the driver that vibration takes place for the worktable on middle level and upper strata also to carry out displacement; When vibration takes place for the worktable in middle level, be used to make the driver of the worktable vibration on upper strata also to carry out displacement.Therefore, can not make to interfere ground between a plurality of drivers, make the worktable on upper strata and the test film that is fixed thereon vibrates along 3 direction of principal axis.
In addition, in above-mentioned communique, disclose another structure of vibration testing device, be about to a plurality of drivers and be installed on the worktable and can make it vibrate (the 2nd structure) along 6 direction of principal axis.In the 2nd structure, can degree of freedom to a certain degree carry out displacement (driver can rotate around a certain axle) by making each driver, thereby driver can link along with the displacement of worktable to a certain degree.Thus, can not can make to interfere ground between a plurality of drivers, make worktable and the test film that is mounted thereon vibrates along 6 direction of principal axis.
In above-mentioned the 1st structure,, therefore there is the problem that need make vibrating device become very large-scale owing to be used to make the driver of the worktable vibration of lower floor need have the power (power) that 3 worktable and other 2 drivers are also vibrated.In addition, constitute the worktable that vibration takes place the worktable that will be used to make upper strata and middle level driver is individually fixed in middle level and lower floor, and vibrate with worktable.Therefore, driver self becomes the unbalanced load that puts on the worktable, may make to contain the error percentage that is caused by this unbalanced load in the vibration that imposes on workpiece.
In addition, in the 2nd structure, when the pendulum angle scope change that makes each driver exceeds about the several years greatly, can make between the driver to interfere.Therefore, for the amplitude that makes the worktable vibration becomes big, need make the driving shaft length of driver fully big, this is with the problem that occurs device is maximized.In addition, because driver self also will rotate, so be difficult to have used the ball screw framework of big weight servomotor to be used as driver, in fact available driver can only be limited to hydraulic unit driver and piezoelectric actuator.In addition, when making worktable carry out displacement, can change the direction (being that coordinate system changes) of the driving shaft of other drivers when driving a certain driver.Therefore, in order to obtain desired vibrational state, must consider that the variation of coordinate system calculates the parameter of giving each driver.Therefore, in the vibrating device as the 2nd structure, used to be used for the processor etc. that the parameter of each driver is given in high-speed computation, made the control system of device become complicated like this.
Summary of the invention
The present invention makes for addressing the above problem.That is, the object of the invention is to provide a kind of can need not to make device maximization, the complicated vibrating device that just worktable is vibrated with bigger amplitude.
According to the embodiment of the present invention, provide a kind of vibration testing device, it has: the 1st and the 2nd driver, and it can make worktable vibrate along the 1st and the 2nd mutually orthogonal direction respectively; The 1st links parts, and it can make worktable slide along the 2nd direction with respect to the 1st driver; The 2nd links parts, and it can make worktable slide along the 1st direction with respect to the 2nd driver.
Like this, in the vibration testing device of embodiments of the present invention, each driver can slide with respect to the worktable edge and the direction of the direction of vibration quadrature of this driver.Thus, even a certain driver makes the worktable vibration, worktable also can slide with respect to other drivers, and therefore, other drivers are not subjected to displacement yet, and the direction of vibration of other drivers can not change yet.Therefore, in the present invention,, each driver can make worktable and workpiece that the power of vibration takes place as long as having.In addition,, can under the situation that driver is rotated, worktable be vibrated, even thereby the driving shaft of driver is short that worktable is vibrated with long stroke according to the present invention.And certain driver can not influence the action of other drivers, therefore, need not to make the complicated worktable that just can make of control system of driver to vibrate with desired amplitude, frequency.Therefore, according to the present invention, need not to make device maximization, the complicated worktable that just can make to vibrate with bigger amplitude.
In addition, the vibration testing device of embodiments of the present invention also has: the 3rd driver, and it can make worktable vibrate along the 3rd direction vertical with the 1st and the 2nd direction; The 3rd links parts, itself so that worktable can worktable and the 3rd driver be connected with respect to the mode that the 3rd driver slides along the 1st and the 2nd direction; The the 1st and the 2nd links parts constitutes so that above-mentioned worktable is connected worktable and the 1st and the 2nd driver along the mode that the 3rd direction is slided respectively with respect to the 1st and the 2nd driver, and the vibration testing device that realization can be vibrated along three direction of principal axis.
Description of drawings
Fig. 1 is the vertical view of the vibration testing device of embodiments of the present invention.
Fig. 2 is a side view of observing the 1st driver of embodiments of the present invention from Y direction.
Fig. 3 is the vertical view of the 1st driver of embodiments of the present invention.
Fig. 4 observes the worktable of embodiments of the present invention and the side view of the 3rd driver from X-direction.
Fig. 5 observes the worktable of embodiments of the present invention and the side view of the 3rd driver from Y direction.
Fig. 6 is the block scheme of the control system in the vibration testing device of embodiments of the present invention.
Fig. 7 is the cut-open view of the semi-rigid shaft coupling (semirigidcoupling) of embodiments of the present invention.
Fig. 8 cuts off the slide block (runner block) of embodiments of the present invention and guide rail along a plane vertical with the long axis direction of guide rail and the cut-open view that forms.
Fig. 9 is the cut-open view of the I-I of Fig. 8.
Description of reference numerals
1, vibration testing device; 2, device pedestal; 100, worktable; 200, the 1st driver; 210, driving mechanism; 212, servomotor; 216, bearing portion; 218, ball-screw; 219, ball-shaped nut; 230, connect mechanism; 231, way station; 231a, Y-axis slide block; 231b, Z axle slide block; 232, nut guide; 234, Y-axis guide rail; 235, Z axis rail; 250, position detection component; 260, shaft coupling; 300, the 2nd driver; 400, the 3rd driver; 410, driving mechanism; 412, servomotor; 416, bearing portion; 418, ball-screw; 419, ball-shaped nut; 430, connect mechanism; 431, way station; 431a, X-axis slide block; 431b, Y-axis slide block; 432, movable framework; 433, Z axle slide block; 434, X-axis guide rail; 435, Y-axis guide rail; 437, Z axis rail; 460, shaft coupling; A, regulator
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.Fig. 1 is the vertical view of the vibration testing device of embodiments of the present invention.The vibration testing device 1 of present embodiment will be fixed on the worktable 100 as the workpiece of vibration test object, use the 1st, the 2nd, the 3rd driver 200,300,400 that worktable 100 and workpiece placed on it are vibrated along 3 mutually orthogonal direction of principal axis.In addition, in the following description, to make the direction (above-below direction among Fig. 1) of worktable 100 vibrations be defined as X-direction by the 1st driver 200, to make the direction (left and right directions among Fig. 1) of worktable 100 vibration be defined as Y direction by the 2nd driver 300, and will to make the direction of worktable vibration by the 3rd driver 400 be that vertical direction (among Fig. 1 direction) vertical with paper is defined as Z-direction.
Fig. 6 is the block scheme of control system of the vibration testing device of embodiments of the present invention.In the 1st, the 2nd, the 3rd driver 200,300,400, be respectively equipped with vibration transducer 220,320,420.Output according to these vibration transducers, 10 pairs the 1st of control assemblies, the 2nd, the 3rd driver 200,300,400 (specifically being servomotor 212,312,412) carry out FEEDBACK CONTROL, can make worktable 100 and the workpiece that is mounted thereon vibrates with desired amplitude and frequency (usually these parameters being set as the function of time).
1st, the 2nd, the 3rd driver 200,300,400 constitutes by motor, power transfer member etc. is installed to respectively on the substrate 202,302,402.This substrate 202,302,402 by not shown bolt in the device pedestal 2 on.
In addition, on device pedestal 2, on a plurality of positions, dispose regulator A near substrate 202,302,402.Regulator A has: be fixed in the internal thread part A1 on the device pedestal 2 and be screwed to external thread part A2 on this internal thread part A1 by bolt AB.External thread part A2 is the columned member that is formed with ridge on barrel surface, external thread part A2 is engaged in the threaded hole that is formed on the internal thread part A1 and it is rotated, and can make the substrate advance and retreat of external thread part A2 with respect to correspondence thus.The end of external thread part A2 (from the near side of pairing substrate) form roughly ball planar and with side butt corresponding to the substrate of this teat, can finely tune the position of substrate thus.In addition, the other end (from a pairing substrate side far away) at external thread part A2 is formed with the hexagon ring that not shown hex wrench is used.In addition, in case with substrate 202,302,402 fixing after, be installed on the external thread part A2 with being about to nut A3, so that external thread part A2 can not taken place to become flexible because of vibration test is delivered to regulator A from substrate vibration etc.Nut A3 installs in the mode of one end and internal thread part A1 butt, from this state nut A3 is screwed into and internal thread part A1 is pushed, make external thread part A2 and internal thread part A1 be subjected to the effect of axial force, utilize this axial force and ridge between external thread part A2 and internal thread part A1 produces friction force, make the internal thread part A1 can be loosening from external thread part A2 by this friction force.
Then, the formation to the 1st driver 200 describes.Fig. 2 is a side view of observing the 1st driver 200 of embodiments of the present invention from Y direction (right side from Fig. 1 to the left).This side view has carried out partial cutaway for showing internal structure.In addition, Fig. 3 represents the internal structure after the biopsy cavity marker devices in the vertical view of the 1st driver 200.In addition, in following explanation, will be along being defined as " X-axis positive dirction " to the direction of the X-axis of worktable 100 from the 1st driver 200, and will be along being defined as " X-axis negative direction " to the direction of the X-axis of the 1st driver from worktable 100.
As shown in Figure 2, by welding, will be fixed on substrate 202 by the framework 222 that many beam 222a that are soldered mutually and top board 222b constitute.In addition, by not shown bolt, the base plate 242 that will be used to make worktable 100 (Fig. 1) that the driving mechanism 210 of vibration takes place and be used to support the supporting device 240 of connect mechanism 230 is fixed to the top board 222b of framework 222, and described connect mechanism 230 is used for and will be delivered to worktable by the oscillating movement that driving mechanism 210 produces.
Driving mechanism 210 has servomotor 212, shaft coupling 260, bearing portion 216, ball-screw 218 and ball-shaped nut 219.Shaft coupling 260 links up the driving shaft 212a and the ball-screw 218 of servomotor 212.In addition, bearing portion 216 is supported by bearing support plate 244, and bearing portion 216 is with rotating mode rotating bearing ball leading screw 218, and this bearing support plate 244 vertically is fixed on the base plate 242 of supporting device 240 by welding.Ball-shaped nut 219, is also engaged with ball-screw 218 so that ball-shaped nut 219 does not support around its mobile mode simultaneously by bearing support plate 244.Therefore, when driving servomotor 212, make the ball-screw rotation, make ball-shaped nut 219 along its axial (being X-direction) advance and retreat.Motion with this ball-shaped nut 219 is delivered on the worktable 100 by connect mechanism 230, and worktable 100 is driven along X-direction thus.And, control servomotor 212 by the sense of rotation of servomotor 212 being switched with the short cycle, worktable 100 is vibrated along X-direction with desired amplitude and cycle.
On the upper surface of the base plate 242 of supporting device 240, be welded with motor support plate 246 in the mode vertical with base plate 242.On a face (face of X-axis negative direction side) of motor support plate 246, servomotor 212 is arranged with driving shaft 212a and motor support plate 246 perpendicular mode cantilever support.Motor support plate 246 is provided with peristome 246a, makes the driving shaft 212a of servomotor 212 pass this peristome 246a, and links at the another side side and the ball-screw 218 of motor support plate 246.
Therefore in addition, on motor support plate 246, on motor support plate 246, particularly the weld part 242 of itself and base plates is applied with big bending stress to servomotor 212 by cantilever support.In order to cushion this bending stress, between base plate 242 and motor support plate 246, be provided with rib 248.
Bearing portion 216 has a pair of thrust angular contact ball bearing 216a, the 216b (216a is positioned at X-axis negative direction side, and 216b is positioned at X-axis positive dirction side) that makes up with positive combination.Thrust angular contact ball bearing 216a, 216b are accommodated among the hollow part of bearing support plate 244.The one side of thrust angular contact ball bearing 216b (one side of X-axis positive dirction side) is provided with bearing plate 216c, use bolt 216d that this bearing plate 216c is fixed on the bearing support plate 244, thus thrust angular contact ball bearing 216b is pushed away to the X-axis negative direction.In addition, in ball-screw 218, on the barrel surface adjacent, be formed with threaded portion 218a with the X-axis negative direction side of bearing portion 216.On this threaded portion 218, installed and interior week formed the female axle collar 217.By making the axle collar 217 rotate and move, thrust angular contact ball bearing 216a is pushed away to the positive dirction of X-axis along the X-axis positive dirction with respect to ball-screw 218.Like this, thrust angular contact ball bearing 216a and 216b are pushed away to close direction mutually, therefore, both are close to mutually and optimal preload is put on bearing 216a, 216b.
Then, the structure to linking part 230 describes.Linking part 230 has: nut guide 232, a pair of Y-axis guide rail 234, a pair of Z axis rail 235, way station 231, a pair of X-axis guide rail 237, a pair of X-axis slide block 233 and slide block installation component 238.
Nut guide 232 is fixed on the ball-shaped nut 219.In addition, a pair of Y-axis guide rail 234 is the guide rails that extend to Y direction together, and is fixed in the end of the X-axis positive dirction side of nut guide 232 along the vertical direction side by side.In addition, a pair of Z axis rail 235 is the guide rails that extend to Z-direction together, and is fixed in the end of the X-axis negative direction side of worktable 100 side by side along Y direction.Way station 231 is blocks, be provided with the Y-axis slide block 231a that engages with described each Y-axis guide rail 234 and be provided with the Z axle slide block 231b that engages with each Z axis rail 235 in the one side of its X-axis positive dirction side in the one side of its X-axis negative direction side, way station 231 constitutes and can slide on Y-axis guide rail 234 and Z axis rail 235 these two guide rails in addition.
That is, way station 231 can slide along Z-direction with respect to worktable 100, and can slide along Y direction with respect to nut guide 232.Therefore, nut guide 231 can slide along Y direction and Z-direction with respect to worktable 100.Therefore, even utilize other driver 300 and/or 400 that worktable 100 is vibrated along Y direction and/or Z-direction, nut guide 232 is subjected to displacement.That is, can not make because of worktable 100 carries out the bending stress that displacement produces along Y direction and/or Z-direction and be applied on ball-screw 218, bearing 216 and the shaft coupling 260 etc.
A pair of X-axis guide rail 237 is the guide rails that extend to X-direction together, and is fixed in side by side along Y direction on the base plate 242 of supporting device 240.X-axis slide block 233 engages with described each X-axis guide rail 237, and can slide along X-axis guide rail 237.Slide block installation component 238 is being fixed in the member of the bottom surface of nut guide 232 to the extended mode in Y direction both sides, and X-axis slide block 233 is fixed on the bottom of slide block installation component 238.Like this,, nut guide 232 is directed on the X-axis guide rail 237, thus, nut guide 232 can be only moved along X-direction by slide block installation component 238 and X-axis slide block 233.
Like this, the moving direction of nut guide 232 is limited in X-direction, therefore, when driving servomotor 212 ball-screw 218 is rotated, makes nut guide 232 and the worktable that engages with this nut guide 232 100 is advanced and retreat along X-direction.
On the 238a of a side (side in front of among Fig. 2, right side among Fig. 3) of the Y direction side of slide block installation component 238, dispose position detection component 250.Position detection component 250 has: along X-direction 3 proximity transducers 251 arranged side by side at certain intervals, be arranged at detection on the side 238a of slide block installation component 238 with plate 252 and the sensor support plate 253 that is used to support proximity transducer 251.Proximity transducer 251 is to detect whether the element of what object near the front of each proximity transducer (for example 1 millimeter in) is arranged.Because the side 238a of slide block installation component 238 and proximity transducer 251 leave fully,, proximity transducer 251 whether is positioned at before each proximity transducer 251 so detecting to detect with plate 252.The control assembly 10 of vibration testing device 1 for example can utilize the testing result of proximity transducer 251 to come servomotor 212 is carried out FEEDBACK CONTROL (Fig. 6).
In addition, on the base plate 242 of supporting device 240, be provided with the confinement block 236 that disposes to come the mode of clamping X-axis slide block 233 from the X-direction both sides.This confinement block 236 is used to limit the moving range of nut guide 232.That is, drive servomotor 212 nut guide 232 is continued when the X-axis positive dirction moves, final, the confinement block 236 that is disposed at X-axis positive dirction side is contacted with slide block installation component 238, nut guide 232 can't be moved to the X-axis positive dirction again.Continue under the situation that the X-axis negative direction moves, the confinement block 236 that is disposed at X-axis negative direction side to be contacted with slide block installation component 238 at nut guide 232, nut guide 232 can't be moved to the X-axis negative direction again.
As above Shuo Ming the 1st driver 200 has identical construction with the 2nd driver 300 except this point of direction different (X-axis and Y-axis are exchanged) is set.Therefore, omitted detailed description to the 2nd driver 300.
Then, the structure to the 3rd driver 400 of embodiments of the present invention describes.Fig. 4 is a side view of observing worktable 100 and the 3rd driver 400 from X-direction (from the below of Fig. 1 upward).This side view also is to have carried out partial cutaway for the demonstration internal structure.In addition, Fig. 5 observes the worktable 100 of embodiments of the present invention and the side view of the 3rd driver 400 from Y direction (from the left side of Fig. 1 to the right).Fig. 5 has carried out partial cutaway for the demonstration internal structure.In addition, in the following description, will be along being defined as the Y-axis positive dirction to the direction of the Y-axis of worktable 100 from the 2nd driver 300, will be along being defined as the Y-axis negative direction to the direction of the Y-axis of the 2nd driver 300 from worktable 100.
Shown in Fig. 4 and 5, substrate 402 be provided with by many beam 422a that extend along vertical direction and be configured to from above cover the framework 422 that the top board 422b of this many beam 422a constitutes.The lower end of each beam 422a is welded on the upper surface of substrate 402, and the upper end of each beam 422a is welded on the lower surface of top board 422b.In addition, by not shown bolt, the bearing support plate 442 of supporting device 440 is fixed on the top board 422b of framework 422.This bearing support plate 442 is the members that are used for supporting respectively driving mechanism 410 and connect mechanism 430, described driving mechanism 410 is used to make worktable 100 (Fig. 1) to vibrate along the vertical direction, and the oscillating movement that described connect mechanism 430 is used for being driven by driving mechanism 410 is delivered to worktable.
Driving mechanism 410 has: servomotor 412, shaft coupling 460, bearing portion 416, ball-screw 418 and ball-shaped nut 419.Shaft coupling 460 is used for the driving shaft 412a of servomotor 412 and ball-screw 418 are linked up.In addition, bearing portion 416 is fixed on the above-mentioned bearing support plate 442, and comes rotating bearing ball leading screw 418 in rotating mode.Ball-shaped nut 419 can be supported by bearing support plate 442 around its mobile mode not make it, engages with ball-screw 418 simultaneously.Therefore, when driving servomotor 412, make the ball-screw rotation, make ball-shaped nut 419 along its axial (being Z-direction) advance and retreat.By connect mechanism 430, the motion of this ball-shaped nut 419 is delivered on the worktable 100, worktable 100 is driven along Z-direction thus.And, control servomotor 412 by the rotation direction of servomotor 412 being switched with the short cycle, worktable 100 was vibrated along Z-direction (above-below direction) with desired amplitude and cycle.
By 2 webs 443, below the bearing support plate 442 of supporting device 440, fix the motor support plate 446 of along continuous straight runs (XY plane) expansion.Lower surface suspention in motor support plate 446 is fixed with servomotor 412.Motor support plate 446 is provided with peristome 446a, and the driving shaft 412a of servomotor 212 passes this peristome 446a, and is connected at the upper surface side and the ball-screw 418 of motor support plate 446.
In addition, in the present embodiment, therefore the size of axial (above-below direction, the Z-direction) of servomotor 412 is disposed on the position that is lower than substrate 402 major part of servomotor 412 greater than the height of framework 422.Therefore, at device pedestal 2, be provided with the blank part 2a that is used to take in servomotor 412.In addition, substrate 402 is provided with and is used for the opening 402a that servomotor 412 passes.
The 442 ground settings of bearing support plate are run through in bearing portion 416.In addition, the bearing portion 216 (Fig. 2, Fig. 3) in the structure of bearing portion 416 and the 1st driver 200 is same, therefore, has omitted detailed explanation.
Then, the structure to linking part 430 describes.Linking part 430 has: movable framework 432, a pair of X-axis guide rail 434, a pair of Y-axis guide rail 435, a plurality of way station 431, two pairs of Z axis rails 437 and two pairs of Z axle slide blocks 433.
Movable framework 432 has: be fixed in ball-shaped nut 419 the 432a of frame portion, be fixed in the top board 432b of the 432a of frame portion upper end and the fixing sidewall 432c of mode that extends with X-direction two edge downwards from top board 432b.A pair of Y-axis guide rail 435 is the guide rails that extend to Y direction together, and is fixed in side by side along X-direction on the upper surface of top board 432b of movable framework 432.In addition, a pair of X-axis guide rail 434 is the guide rails that extend to X-direction together, and is fixed in the lower surface of worktable 100 side by side along Y direction.Way station 431 is blocks, be provided with the X-axis slide block 431a that engages with X-axis guide rail 434 on top, be provided with the Y-axis slide block 431b that engages with each Y-axis guide rail 435 in the bottom, and constitute and on X-axis guide rail 434 and Y-axis guide rail 435 these two guide rails, to slide.In addition, on each position that X-axis guide rail 434 and Y-axis guide rail 435 intersect, a way station 431 is set respectively.X-axis guide rail 434 and Y-axis guide rail 435 respectively are provided with 2, and therefore, X-axis guide rail 434 has 4 places to intersect with Y-axis guide rail 435.Thereby in the present embodiment, use 4 way stations 431.
Like this, each way station 431 can slide along X-direction with respect to worktable 100, and can slide along Y direction with respect to movable framework 432.That is, movable framework 432 can slide along X-direction and Y direction with respect to worktable 100.Therefore, even worktable 100 is vibrated along X-direction and/or Y direction, movable framework 432 is subjected to displacement by other drivers 200 and/or 300.That is,, worktable 100 can not be applied on ball-screw 418 or bearing 416, the shaft coupling 460 etc. because of carrying out the bending stress that displacement produces along X-direction and/or Y direction.
In addition, in the present embodiment,, therefore the interval of X-axis guide rail 434 and Y-axis guide rail 435 is set wideer than the Y-axis guide rail 234 and the Z axis rail 235 of the 1st driver 200 owing to weight bigger worktable 100 and workpiece are arranged at movable framework 432 upper supports.Therefore, when only constituting equally when worktable 100 being linked up with movable framework 432, way station is maximized, and the load that puts on the movable framework 432 is increased by a way station with the 1st driver 200.Therefore, in the present embodiment, constitute each part of intersecting and dispose small-sized way station 431, the magnitude of load that puts on the movable framework 432 can be suppressed to be essential bottom line at X-axis guide rail 434 and Y-axis guide rail 435.
The two pairs of Z axis rails 437 are the guide rails that extend to Z-direction, fix side by side along Y direction respectively on each sidewall 432c of movable framework 432 that each is a pair of.Z axle slide block 433 engages respectively with this Z axis rail 437 respectively, and can slide along Z axis rail 437.By slide block installation component 438, Z axle slide block 433 is fixed on the upper surface of top board 422b of framework 422.Slide block installation component 438 integral body form L word cross sectional shape, and it has: with the side plate 438a of the sidewall 432c almost parallel of movable framework 432 configuration be fixed in the base plate 438b of this side plate 438a lower end.In addition, in the present embodiment, especially when being fixed in center of gravity height and the big workpiece of weight on the worktable 100, will be applied on the movable framework 432 around the big moment that X-axis and/or Y-axis are rotated easily.For this reason, use rib to reinforce slide block installation component 438, so that it can bear this rotating torque.Specifically, a pair of the 1st rib 438c being set, also be provided with the 2nd rib 438d that rides between this a pair of the 1st rib 438c by the side plate 438a at the Y direction two ends of slide block installation component 438 and the corner that base plate 438b forms.
Like this, Z axle slide block 433 is fixed on the framework 422, and can be in the 437 enterprising line slips of Z axis rail.Therefore, movable framework 432 can slide along the vertical direction, and limits movable framework 432 and move to the direction except that above-below direction.Like this, the moving direction of movable framework 432 is limited only to be above-below direction, therefore, when ball-screw 418 is rotated, then makes movable framework 432 and the worktable 100 that engages with this movable framework 432 is advanced and retreat along the vertical direction.
In addition, in the 3rd driver 400, also be provided with the position detection component (not shown) same with the position detection component 250 (Fig. 2,3) of the 1st driver 200.According to the testing result of this position detection component, the control assembly 10 of vibration testing device 1 can be controlled (Fig. 6) within the limits prescribed with the height of movable framework 432.
As mentioned above, in the present embodiment, between mutually orthogonal each driver of driving shaft and worktable 100, be provided with two pairs of guide rails and constitute the way station that can on this guide rail, slide.Thus, with respect to each driver, worktable 100 can slide at any direction on the plane vertical with the driving direction of its driver.Therefore, even make worktable 100 carry out displacement, load, the moment that produces because of this displacement can be applied on other drivers yet, and other drivers and worktable 100 be remained the mutual state that engages by way station by a certain driver.That is,, also each driver can be remained the state that worktable is subjected to displacement even worktable carries out displacement in position arbitrarily.Therefore, in the present embodiment, can drive simultaneously that 3 drivers 200,300,400 make worktable 100 and the workpiece that is fixed thereon vibrates along 3 direction of principal axis.
Then, the structure to shaft coupling 260,360 and 460 describes.Shaft coupling 260,360 has the structure same with shaft coupling 460, in following explanation, only shaft coupling 460 is described, and has omitted explanation to shaft coupling 260,360.Fig. 7 is the amplification view of the axial region of the driving shaft 412a of expression shaft coupling 460 and the AC servomotor 412 that links mutually by this shaft coupling 460 and ball-screw 418.
As shown in Figure 7, shaft coupling 460 is semi-rigid shaft couplings that the bolt 464 of a plurality of (being made as 6 in the present embodiment) that link up by the outer shroud 462,463 of the interior ring 461 of nylon system, a pair of duralumin system and with above-mentioned wheel constitutes.In the central authorities of interior ring 461, circular hole 461a, the 461b that inside is interconnected be arranged on coaxial on.The internal diameter of circular hole 461a is made as the such size of driving shaft 412a that can seamlessly insert AC servomotor 412, the internal diameter of circular hole 461b is made as the such size of axial region that can seamlessly insert ball-screw 418.In addition, in the present embodiment, the axial region diameter of ball-screw 418 is less than the driving shaft 412a of AC servomotor 412, thereby the external diameter of circular hole 461b is less than the external diameter of circular hole 461a.
Periphery at the direction of principal axis central portion of interior ring 461 is formed with flange part 461c.Be formed with the tapering of axially extending respectively from two face inboards of flange part 461c.Lateral surface 461d, the 461e in each tapering is for the closer to the more little coniform conical surface of direction of principal axis top external diameter.In addition, the inboard of a pair of outer shroud 462,463 of ring 461 is formed with the medial surface 462a with cone shape, the through hole of 463a respectively in clipping.Outer shroud 462,463 is configured towards the mode of interior ring side with the direction that the conical surface that makes medial surface 462a, 463a respectively launches.Medial surface 462a, the 463a of the cone-shaped of outer shroud 462,463 has the cone angle identical with lateral surface 461d, the 461e of interior ring 461 respectively.And, so that the mode that the medial surface 462a of outer shroud 462 overlaps with the lateral surface 461d of interior ring 461 and the medial surface 463a of outer shroud 463 overlaps with the lateral surface 461e of interior ring 461 is inserted into the tapering that is formed at the two ends of interior ring 461 in the through hole of outer shroud 462,463.
In addition, around the through hole of outer shroud 463, the axis that internal thread 463b equally spaced is formed at through hole is on the circumference at center, and described internal thread 463b engages with the external thread of the top ends that is formed at bolt 464.In addition, on the flange part 461c of outer shroud 462 and interior ring 461, be formed with bolt hole (circular hole) 462b, 461f respectively in the corresponding position of internal thread 463b with outer shroud 463.6 bolts 464 (only illustrating 2 among Fig. 7) pass the bolt hole 462b of outer shroud 462 and the bolt hole 461f of interior ring 461 engages with the internal thread 464b of outer shroud 340.
With the top a of the driving shaft 412a of AC servomotor 412 from below be inserted in the circular hole 461a of ring 461 and with the top of the axial region of ball-screw 418 from above be inserted into the circular hole 461b after, bolt 464 is inserted among bolt hole 462b, the 461f, and then is screwed among the internal thread 464b; Ring 461 in then clipping from both sides by outer shroud 462 and outer shroud 463 powerfully, and 2 taperings of ring 461 are embedded into respectively in the through hole of outer shroud 462,4623 very darkly in making.Therefore, according to the principle of joggle, stronger side pressure is applied on the axial region of the driving shaft 412a of AC servomotor 412 and ball-screw 418 respectively from circular hole 461a, the 461b of interior ring 461.Therefore, between circular hole 461a, 461b and driving shaft 412a, ball-screw 418, produce very strong friction force respectively, make driving shaft 412a and ball-screw 418 connect to one by interior ring 461.
As shown in Figure 7, the interior ring 461 that is only formed by the nylon resin as viscoelastic body between outer shroud 452 and the outer shroud 463 supports.In addition, as shown in Figure 7, in shaft coupling 460, the interval that makes the top of the axial region of the top of driving shaft 412a of AC servomotor 412 and ball-screw 418 separate small (for example about 1 millimeter) links.Therefore, under situation about being subjected to from the acting force that makes the direction that axial compression contracts of motor, elastic deformation is given birth in environment-development in can making, and the interval of this driving shaft 412a and ball-screw 418 is narrowed down, thus axial acting force is absorbed in the shaft coupling 460, the axial acting force that is delivered to the ball-screw side is significantly decayed.In the present embodiment, when comparing in the mensuration frequency field in vibration test, the vibration damping rate of interior ring 461 is roughly maximum under the natural vibration frequency of driving shaft 412a.In view of the above, make effectively driving shaft 412a axially or the vibration damping that makes progress of the footpath of axle.In addition, the vibration damping rate of the interior ring 461 of the natural vibration frequency of driving shaft 412a needn't be roughly maximum in measuring frequency field, but preferred at least greater than the frequency averaging value of measuring in the frequency field.
On the other hand, as mentioned above, making the interval on top of axial region of the top of driving shaft 412a of AC servomotor 412 and ball-screw 418 less is 1 millimeter, and makes the whole circumference and interior being integral of ring on the top of each.Therefore, on torsional direction, carry out sufficient rigidity and link, can not have the gap and the rotation of the driving shaft 412a of AC servomotor 412 is driven (backlash) and be delivered to exactly on the ball-screw 418.
In the present embodiment, as mentioned above, between driver 200,300,400 and worktable 100, be provided with linking part with guiding mechanism that guide rail and slide block are combined.In addition, be provided with same guiding mechanism in driver 200,300,400, this guiding mechanism is used to guide the nut of the ball screw framework of each driver.Use accompanying drawing, the structure of these guiding mechanisms is elaborated.In addition, though the following description is the guiding mechanism (Fig. 5) that constitutes at Z axle slide block 433 and Z axis rail 437 by the 3rd driver 400, other guiding mechanisms also have same structure.
Fig. 8 is the cut-open view that slide block 433 and guide rail 437 is blocked along a plane vertical with the long axis direction of guide rail 437, and Fig. 9 is the cut-open view of the I-I of Fig. 8.As Fig. 8 and shown in Figure 9, on slide block 433, be formed with recess round guide rail 437, in this recess, be formed with axially extended 4 groove 433a, 433a ' along guide rail 435.In this groove 433a, 433a ', take in the ball 433b of a plurality of stainless steels.On guide rail 437, on the position relative, be respectively arranged with groove 437a, 437a ' with groove 433a, the 433a ' of slide block 433, ball 433b is sandwiched between groove 433a and the groove 437a or between groove 433a ' and the groove 437a '. Groove 433a, 433a ', the cross sectional shape of 437a, 437a ' are circular-arc, and the radius of its radius-of-curvature and ball 433b about equally.Therefore, make ball 433b with almost zero-lash state and groove 433a, 433a ', 437a, 437a ' be contact closely.
In the inside of slide block 433, be respectively arranged with 4 balls and keep out of the way path 433c with each groove 433a almost parallel.As shown in Figure 8, groove 433a with keep out of the way path 433c and be connected with each other by U word path 433d at two ends separately, groove 433a, groove 437a, keep out of the way path 433c and U word path 433d is formed for making ball 433b round-robin circulating path.Keep out of the way path 433c and groove 433a ', 437a ' also are formed with same circulating path.
Therefore,, roll on 437a, the 437a ', on circulating path, circulate simultaneously when slide block 433 carries out making a plurality of ball 433b at groove 433a, 433a ' when mobile on guide rail 437.Therefore,, also can come supporting slide block, and ball 433b is rolled, thus the axial resistance of guide rail be remained lessly, therefore, slide block 433 is moved smoothly on guide rail 437 by a plurality of balls even apply big load to the direction of guide rail beyond axially.In addition, the internal diameter of keeping out of the way path 433c and U word path 433d is a bit larger tham the diameter of ball 433b, and it is minimum to keep out of the way the friction force that produces between path 433c and U word path 433d and the ball 433b, thereby can the circulation of ball 433b not counteracted.
As shown in Figure 8, the row that are sandwiched in two row ball 433b between groove 433a and the groove 437a form the thrust angular contact ball bearing that contact angle is roughly 45 ° positive combination type.The contact angle of this moment be meant the line that groove 433a and groove 437a and the contacted contact point of ball 433b is connected to each other, with the angle of radially (from the direction of slide block) formation of linear guide to guide rail.Like this thrust angular contact ball bearing of Xing Chenging can support the footpath in the opposite direction (from the direction of guide rail) to slide block and laterally (with radially with the direction of this two directions while quadrature of advance and retreat direction of slide block, i.e. left and right directions among the figure) load.
Equally, to be formed with contact angle (angle that the line that the contact point that groove 433a ' and groove 437a ' are contacted with ball 433b is connected to each other and the footpath of linear guide form round about) be the thrust angular contact ball bearing of 45 ° positive combination type to the row that are sandwiched in two row ball 433b between groove 433a ' and the groove 437a '.This thrust angular contact ball bearing can support radially and horizontal load.
In addition, the row that are sandwiched in two row ball 433b between the central groove (on the left of among the figure) of a groove (left side among the figure) and groove 433a ' in the middle of groove 433a and the groove 437a and groove 437a ' respectively also are formed with the thrust angular contact ball bearing of positive combination type.The row that are sandwiched in two row ball 433b between central another groove (left side among the figure) of another central groove of groove 433a and groove 437a (left side among the figure) and groove 433a ' and groove 437a ' equally respectively yet are formed with the thrust angular contact ball bearing of positive combination type.
Like this, in the guiding mechanism of present embodiment, by the thrust angular contact ball bearing of positive combination type to act on respectively radially, the footpath round about, horizontal load supports, thereby can to act on lead rail axis to beyond direction on big load support fully.
As mentioned above, the vibration testing device of present embodiment has: can make the 1st and the 2nd driver that worktable vibrates along mutually orthogonal the 1st and the 2nd direction (X-axis and Y direction) respectively, can make worktable the 1st link parts and can make worktable the 2nd link parts with respect to the 2nd driver along what the 1st direction was slided along what the 2nd direction was slided with respect to the 1st driver.
In above-mentioned vibration testing device, each driver can slide with respect to the worktable edge and the direction of the direction of vibration quadrature of its driver.Thus, even by a certain driver worktable is vibrated, worktable also can slide with respect to other drivers, therefore, other drivers is subjected to displacement, and the direction of vibration of other drivers is changed.Therefore, in the present invention,, each driver can make worktable and workpiece that the power of vibration takes place as long as having.In addition,, can not make driver worktable be vibrated, even thereby the driving shaft of driver is short that worktable is vibrated with long stroke according to the present invention with rotating.In addition, because a certain driver can not influence the action of other drivers, so the complicated worktable that just can make of the control system of driver is vibrated with desired amplitude and frequency.Therefore, according to the present invention, need not to make device maximization, the complicated worktable that just can make to vibrate with bigger amplitude.
In addition, in the formation of present embodiment, can not make driver be subjected to displacement and rotate as mentioned above, therefore, driver adopts the ball screw framework that drives with servomotor easily.Ball screw framework can not become the oil leakage phenomenon of problem in hydraulic unit driver, and worktable is vibrated with the stroke that is far longer than piezoelectric actuator.
Be used for the also semi-rigid shaft coupling of preferred such structure of shaft coupling that the ball-screw with the rotating shaft of servomotor and above-mentioned ball screw framework links up, promptly constitute no gap, have flexible and can hinder vibration transfer on the extending direction of driving shaft of motor along bending direction.According to this structure, have high responsiveness ground and drive feed screw, even and how much exist axle offset also can not produce great internal strain and can successfully drive, and then can block vibration on the driving shaft direction of motor.
Semi-rigid shaft coupling preferably has the viscoelasticity member of being made by resin or rubber.In addition, semi-rigid shaft coupling constitutes, and the attenuation rate of the vibration of the driving shaft of servomotor is maximum under the natural vibration frequency of driving shaft.According to such formation, utilize viscoelasticity member in the semi-rigid shaft coupling can make effectively from motor by the driving shaft transmission axially or the vibration damping that makes progress of the footpath of axle, and make such vibration be delivered to outgoing side hardly.
In addition, preferred semi-rigid shaft coupling has: as a pair of outer shroud of rigid body member be disposed at the interior ring that comprises elastomeric element or viscoelasticity member between this a pair of outer shroud.Center at outer shroud is formed with taper hole, the center of interior ring be formed with for this in the cylindric through hole of the axle break-through that links of ring.In addition, being formed with at the axial two ends of interior ring periphery can be respectively and the conical surface of the interior Zhou Peihe of the taper hole of a pair of outer shroud.In the through hole of ring, make the interior week and the conical surface butt of interior ring of the taper hole of a pair of outer shroud in the driving shaft of feed screw and servomotor is inserted into respectively, and the use bolt should interfix by a pair of outer shroud, thus by interior ring connection shaft.According to such formation, the semi-rigid shaft coupling that can be achieved as follows with extremely simple structure: can come transmitter shaft output with high responsiveness, and can absorption axes to vibration.
In addition, so that the nut of ball screw framework is merely able to come the guiding mechanism of guiding nut to have along the axially movable mode of ball-screw: be fixed in the part 1 on the framework of vibration testing device and be fixed in part 2 on the nut, side in the middle of part 1 and the part 2 has guide rail, and the opposing party has the slide block that engages with guide rail and can move along this guide rail, preferred slide block has following structure: recess, and it is round guide rail; Groove, its moving direction along slide block in recess forms; Keep out of the way the path, it is formed at the inside of slide block, and links to each other with the moving direction two ends of groove in the mode with groove formation closed-loop path; A plurality of balls, it circulates in the closed-loop path, and when being arranged in groove and guide rail carry out butt.And, in slide block, be formed with 4 above-mentioned closed-loop paths, preferably has following structure: make the ball in the groove that is disposed at 2 closed-loop paths in these 4 closed-loop paths respectively have the contact angle of roughly ± 45 spend, be disposed at the footpath that ball in the groove of other 2 closed-loop paths has with guiding mechanism respectively and form round about roughly ± 45 contact angles of spending with the radially formation of linear guide.
Even like this guiding mechanism of Gou Chenging its radially, the footpath applied load round about and transversely respectively, slide block is successfully moved along guide rail.And, can utilize such guiding mechanism to the nut channeling conduct, therefore, even be equipped with on the worktable of vibrating device under the situation that the big workpiece of weight vibrates, also can not make the nut of feed screw mechanism take place to become flexible, and can successfully move along guide rail.
In addition, the preferred the 1st and the 2nd binding parts have the way station that is configured in corresponding between the driver of worktable respectively; The 1st way station that links parts can only slide with respect to worktable along a direction vertical with the 1st direction, and can be only along sliding with respect to the 1st driver with all vertical direction of this direction and this two direction of the 1st direction; The 2nd way station that links parts can only slide with respect to worktable along a direction vertical with the 2nd direction, and can be only along sliding with respect to above-mentioned the 2nd driver with all vertical direction of this direction and this two direction of the 2nd direction.
At this, for example the 1st way station that links parts can be the 2nd direction with respect to a direction of two glide directions in the middle of above-mentioned worktable and the slip of the 1st driver, and the direction that the 2nd way station that links parts can carry out with respect to two glide directions of worktable and the slip of the 2nd driver is the 1st direction.
In addition, for way station can be slided with respect to worktable, for example, preferably a platform in worktable and the way station is provided with at least 1 guide rail that can extend with respect to the direction that worktable slides along way station, and in the middle of worktable and the way station another is provided with the slide block that engages with guide rail.In addition, can slide with respect to driver in order to make way station, for example, preferably in the middle of way station and the pairing driver is provided with at least 1 guide rail that can extend with respect to the direction that pairing driver slides along way station; And another in the middle of way station and the pairing driver is provided with the slide block that engages with guide rail.
In addition, worktable and way station and/or way station and driver many guide rails and the slide block that also can constitute by the configuration that is parallel to each other links up.According to such formation, when driver makes worktable produce vibration, in the turning moment that can produce hardly between worktable and the way station and between way station and the driver around direction of vibration.The result obtains desired vibrational state easily.
In addition, slide block also can have following member: recess, and it is round guide rail; Groove, its in recess along the moving direction of slide block and form; Keep out of the way the path, it is formed at the inside of slide block, and links to each other with the moving direction two ends of groove in the mode with groove formation closed-loop path; A plurality of balls, it circulates in the closed-loop path, and when being arranged in groove and guide rail carry out butt.In addition, in slide block, form 4 described closed-loop paths, preferably has following formation: make the ball in the groove that is disposed at 2 closed-loop paths in the middle of these 4 closed-loop paths respectively have the contact angle of roughly ± 45 spend, be disposed at the footpath that ball in the groove of other 2 closed-loop paths has with guiding mechanism respectively and form round about roughly ± 45 contact angles of spending with the radially formation that is provided with the guiding mechanism of guide rail and slide block.
Even like this guiding mechanism of Gou Chenging its radially, the footpath be applied with load round about and laterally, slide block is successfully moved along guide rail.And therefore, utilize such guiding mechanism to guide way station, even, also can make way station not take place successfully to move along guide rail loosely being equipped with on the worktable of vibrating device under the situation that the big workpiece of weight vibrates.
In addition, the vibration testing device of present embodiment has: make the 3rd driver that worktable vibrates along the 3rd direction (Z-direction) vertical with the 1st and the 2nd direction two directions and make worktable the 3rd link parts with respect to the 3rd driver along what the 1st and the 2nd direction linked slidably; The the 1st and the 2nd binding parts constitute above-mentioned worktable is linked along the 3rd direction slidably with respect to the 1st and the 2nd driver.Constitute according to this, can realize can be along the vibration testing device of three direction of principal axis vibrations.
Claims (according to the modification of the 19th of treaty)
1. (after the revisal) a kind of vibration testing device comprises:
Pedestal;
Worktable, it is used to install workpiece;
The 1st driver, it can make above-mentioned worktable vibrate along the 1st direction of level;
The 2nd driver, it can make above-mentioned worktable edge vibrate with the 2nd direction of the level of above-mentioned the 1st direction quadrature;
The 3rd driver, it can make above-mentioned worktable vibrate along the 3rd direction vertical with the 1st and the 2nd direction two directions;
The 1st links parts, and it is connected above-mentioned worktable and above-mentioned the 1st driver with respect to the mode of above-mentioned the 1st driver along the 2nd direction and the slip of the 3rd direction can make above-mentioned worktable;
The 2nd links parts, and it is connected above-mentioned worktable and above-mentioned the 2nd driver with respect to the mode of above-mentioned the 2nd driver along the 1st direction and the slip of the 3rd direction can make above-mentioned worktable,
The 3rd links parts, and it is connected above-mentioned worktable and above-mentioned the 3rd driver with respect to the mode that above-mentioned the 3rd driver slides along the 1st and the 2nd direction can make above-mentioned worktable,
The above-mentioned the 3rd links parts comprises:
Movable part, it is configured between above-mentioned the 3rd driver and the above-mentioned worktable, under the driving of above-mentioned the 3rd driver, can move along above-mentioned the 3rd direction;
1 pair of supporting member, they are fixed on the said base, from the above-mentioned movable part of two-side supporting and above-mentioned movable part can be slided along above-mentioned the 3rd direction;
And way station, it is configured between above-mentioned movable part and the above-mentioned worktable,
The above-mentioned the 3rd way station that links parts can only slide with respect to above-mentioned worktable along a direction in the above-mentioned the 1st and the 2nd direction, and can slide with respect to the above-mentioned the 3rd movable part that links parts along another direction in the above-mentioned the 1st and the 2nd direction;
Link on the way station of parts and the side in the above-mentioned worktable the above-mentioned the 3rd and to be provided with 1 pair of guide rail, this 1 pair of guide rail can extend with respect to the direction that this worktable slides along the 3rd way station that links parts, link the above-mentioned the 3rd and to be provided with on the way station of parts and the opposing party in the above-mentioned worktable respectively and this 1 pair of slide block that guide rail engages
Link on the way station of parts and the side in the movable part the above-mentioned the 3rd and to be provided with 1 pair of guide rail, this 1 pair of guide rail can extend with respect to the direction that the 3rd movable part that links parts slides along the 3rd way station that links parts, link the above-mentioned the 3rd and to be provided with on the way station of parts and the opposing party in the movable part respectively and this 1 pair of slide block that guide rail engages
Link on the 1 pair of supporting member of parts and the side in the movable part the above-mentioned the 3rd and to be provided with 2 pairs of guide rails that extend along above-mentioned the 3rd direction, on the 1 pair of supporting member of above-mentioned the 3rd binding parts and the opposing party in the movable part, be provided with respectively and these 2 pairs of slide blocks that guide rail engages.
2. (after the revisal) vibration testing device according to claim 1 is characterized in that, above-mentioned driver has respectively:
Servomotor;
Rotatablely moving of above-mentioned servomotor is converted to the ball screw framework of translation motion of the driving direction of this driver.
3. vibration testing device according to claim 2 is characterized in that,
This vibration testing device also has the shaft coupling that the ball-screw with the rotating shaft of above-mentioned servomotor and above-mentioned ball screw framework links up,
Above-mentioned shaft coupling constitutes no gap and has flexiblely along the bending direction of rotating shaft, and can hinder the axial transfer of vibration of driving of above-mentioned motor.
4. vibration testing device according to claim 3 is characterized in that, above-mentioned semi-rigid shaft coupling comprises the viscoelasticity member.
5. vibration testing device according to claim 4 is characterized in that at least a portion of above-mentioned viscoelasticity member is formed by resin.
6. vibration testing device according to claim 4 is characterized in that at least a portion of above-mentioned viscoelasticity member is formed by rubber.
7. vibration testing device according to claim 3 is characterized in that, it is roughly maximum under the natural vibration frequency of this driving shaft that above-mentioned semi-rigid shaft coupling constitutes the attenuation rate of the axial vibration of driving of above-mentioned servomotor.
8. vibration testing device according to claim 3 is characterized in that, above-mentioned semi-rigid shaft coupling has:
A pair of outer shroud, it is to run through the rigid body member that is formed with taper hole at the center;
Interior ring, it is made of elastic component or viscoelasticity member, be configured between the above-mentioned a pair of outer shroud, be formed with the cylindric through hole that the axle that links for ring in this passes at the center, being formed with at the direction of principal axis two ends of periphery can be respectively and the conical surface of the interior Zhou Peihe of the taper hole of above-mentioned a pair of outer shroud;
The driving shaft of above-mentioned ball-screw and above-mentioned servomotor is inserted in the through hole of above-mentioned interior ring, make above-mentioned a pair of outer shroud taper hole interior week and above-mentioned in the conical surface butt of ring, by using bolt that above-mentioned a pair of outer shroud is interfixed by interior ring connection shaft.
9. vibration testing device according to claim 2 is characterized in that,
So that the nut of above-mentioned ball screw framework is merely able to guide the guiding mechanism of this nut to have along the axially movable mode of above-mentioned ball-screw: be fixed in the part 1 on the framework of above-mentioned vibration testing device and be fixed in the part 2 of this nut,
Side in above-mentioned part 1 and the part 2 has guide rail, and the opposing party has the slide block that can engage with above-mentioned guide rail and move along this guide rail,
Above-mentioned slide block has:
Recess, it is round above-mentioned guide rail;
Groove, its moving direction along above-mentioned slide block in above-mentioned recess forms;
Keep out of the way the path, it is formed at the inside of above-mentioned slide block, and links to each other with the above-mentioned moving direction two ends of above-mentioned groove in the mode with above-mentioned groove formation closed-loop path;
A plurality of balls, it circulates in above-mentioned closed-loop path, and when being arranged in above-mentioned groove and above-mentioned guide rail butt.
10. vibration testing device according to claim 9 is characterized in that, above-mentioned slide block is formed with 4 above-mentioned closed-loop paths,
The ball that is disposed at respectively in the groove of 2 closed-loop paths in above-mentioned 4 closed-loop paths has the contact angle of roughly ± 45 spending with the radially formation of guiding mechanism, is disposed at ball in the groove of other 2 closed-loop paths respectively and has footpath with above-mentioned guiding mechanism and form round about roughly ± contact angles of 45 degree.
11. vibration testing device according to claim 1 is characterized in that,
The the above-mentioned the 1st and the 2nd links parts has the way station that is disposed between the above-mentioned the 1st and the 2nd driver and the above-mentioned worktable respectively,
The above-mentioned the 1st way station that links parts can only slide with respect to above-mentioned worktable along a direction vertical with the 1st direction, and only edge and this direction direction vertical with this two direction of the 1st direction slided with respect to above-mentioned the 1st driver,
The above-mentioned the 2nd way station that links parts can only slide with respect to above-mentioned worktable along a direction vertical with the 2nd direction, and only edge and this direction direction vertical with this two direction of the 2nd direction slided with respect to above-mentioned the 2nd driver.
12. vibration testing device according to claim 11 is characterized in that,
One direction of two glide directions that the above-mentioned the 1st way station that links parts can slide with respect to above-mentioned worktable and above-mentioned the 1st driver is the 2nd direction,
One direction of two glide directions that the above-mentioned the 2nd way station that links parts can slide with respect to above-mentioned worktable and above-mentioned the 2nd driver is the 1st direction.
(13. after the revisal) vibration testing device according to claim 11, it is characterized in that, link in the parts the above-mentioned the 1st and the 2nd, a platform in above-mentioned worktable and the above-mentioned way station is provided with at least 1 guide rail that can extend with respect to the direction that above-mentioned worktable slides along above-mentioned way station, and another in above-mentioned worktable and the above-mentioned way station is provided with the slide block that engages with above-mentioned guide rail.
(14. after the revisal) vibration testing device according to claim 13 is characterized in that,
Link in the parts the above-mentioned the 1st and the 2nd,, above-mentioned worktable and above-mentioned way station are linked up in the mode that can slide by many guide rails of configuration and a plurality of slide blocks that engage respectively with above-mentioned many guide rails of being parallel to each other.
15. vibration testing device according to claim 13 is characterized in that, above-mentioned slide block has:
Recess, it is round above-mentioned guide rail;
Groove, its moving direction along above-mentioned slide block in above-mentioned recess forms;
Keep out of the way the path, it is formed at the inside of above-mentioned slide block, and links to each other with the above-mentioned moving direction two ends of above-mentioned groove in the mode with above-mentioned groove formation closed-loop path;
A plurality of balls, it circulates in above-mentioned closed-loop path, and when being arranged in above-mentioned groove and above-mentioned guide rail butt.
16. vibration testing device according to claim 15 is characterized in that,
In above-mentioned slide block, form 4 above-mentioned closed-loop paths,
The ball that is disposed at respectively in the groove of 2 closed-loop paths in above-mentioned 4 closed-loop paths has the contact angle of roughly ± 45 spend with the radially formation that is provided with the guiding mechanism of above-mentioned guide rail and above-mentioned slide block, is disposed at the footpath that ball in the groove of other 2 closed-loop paths has with above-mentioned guiding mechanism respectively and forms round about roughly ± 45 contact angles of spending.
(17. after the revisal) vibration testing device according to claim 11 is characterized in that,
Link in the parts the above-mentioned the 1st and the 2nd, the side in above-mentioned way station and the pairing driver is provided with at least 1 guide rail of the direction extension that can slide with respect to the driver of above-mentioned correspondence along above-mentioned way station,
The opposing party in the middle of above-mentioned way station and the pairing driver is provided with the slide block that engages with above-mentioned guide rail.
(18. after the revisal) vibration testing device according to claim 17, it is characterized in that, link in the parts the above-mentioned the 1st and the 2nd, by many guide rails of configuration and a plurality of slide blocks that engage with above-mentioned many guide rails respectively of being parallel to each other, above-mentioned way station and pairing driver are linked up in the mode that can slide.
19. vibration testing device according to claim 17 is characterized in that, above-mentioned slide block has:
Recess, it is round above-mentioned guide rail;
Groove, its moving direction along above-mentioned slide block in above-mentioned recess forms;
Keep out of the way the path, it is formed at the inside of above-mentioned slide block, and links to each other with the above-mentioned moving direction two ends of above-mentioned groove in the mode with above-mentioned groove formation closed-loop path;
A plurality of balls, it circulates in above-mentioned closed-loop path, and when being arranged in above-mentioned groove and above-mentioned guide rail butt.
20. vibration testing device according to claim 19 is characterized in that,
In above-mentioned slide block, form 4 above-mentioned closed-loop paths,
The ball that is disposed at respectively in the groove of 2 closed-loop paths in above-mentioned 4 closed-loop paths has the contact angle of roughly ± 45 spend with the radially formation that is provided with the guiding mechanism of above-mentioned guide rail and above-mentioned slide block, is disposed at the footpath that ball in the groove of other 2 closed-loop paths has with above-mentioned guiding mechanism respectively and forms round about roughly ± 45 contact angles of spending.
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(24. deletion)
(25. deletion)
(26. after the revisal) vibration testing device according to claim 25, it is characterized in that, link in the parts the above-mentioned the 3rd, by many guide rails of configuration and a plurality of slide blocks that engage with above-mentioned many guide rails respectively of being parallel to each other, above-mentioned worktable and above-mentioned way station are linked up in the mode that can slide.
(27. deletion)
(28. after the revisal) vibration testing device according to claim 27, it is characterized in that, link in the parts the above-mentioned the 3rd, by many guide rails of configuration and a plurality of slide blocks that engage with above-mentioned many guide rails respectively of being parallel to each other, above-mentioned way station and driver are linked up in the mode that can slide.
29. (after the revisal) vibration testing device according to claim 23 is characterized in that, above-mentioned the 3rd direction is a vertical direction,
The above-mentioned the 3rd links parts has a plurality of way stations.

Claims (29)

1. vibration testing device comprises:
Worktable, it is used to install workpiece;
The 1st driver, it can make above-mentioned worktable vibrate along the 1st direction;
The 2nd driver, it can make above-mentioned worktable along vibrating with the 2nd direction of above-mentioned the 1st direction quadrature;
The 1st links parts, and it is connected above-mentioned worktable and above-mentioned the 1st driver with respect to the mode that above-mentioned the 1st driver slides along the 2nd direction can make above-mentioned worktable;
The 2nd links parts, and it is connected above-mentioned worktable and above-mentioned the 2nd driver with respect to the mode that above-mentioned the 2nd driver slides along the 1st direction can make above-mentioned worktable.
2. vibration testing device according to claim 1 is characterized in that, the above-mentioned the 1st and the 2nd driver has respectively:
Servomotor,
With rotatablely moving of above-mentioned servomotor is converted to along the ball screw framework of the translation motion of the 1st or the 2nd direction.
3. vibration testing device according to claim 2 is characterized in that,
This vibration testing device also has the shaft coupling that the ball-screw with the rotating shaft of above-mentioned servomotor and above-mentioned ball screw framework links up,
Above-mentioned shaft coupling constitutes no gap and has flexiblely along the bending direction of rotating shaft, and can hinder the axial transfer of vibration of driving of above-mentioned motor.
4. vibration testing device according to claim 3 is characterized in that, above-mentioned semi-rigid shaft coupling comprises the viscoelasticity member.
5. vibration testing device according to claim 4 is characterized in that at least a portion of above-mentioned viscoelasticity member is formed by resin.
6. vibration testing device according to claim 4 is characterized in that at least a portion of above-mentioned viscoelasticity member is formed by rubber.
7. vibration testing device according to claim 3 is characterized in that, it is roughly maximum under the natural vibration frequency of this driving shaft that above-mentioned semi-rigid shaft coupling constitutes the attenuation rate of the axial vibration of driving of above-mentioned servomotor.
8. vibration testing device according to claim 3 is characterized in that, above-mentioned semi-rigid shaft coupling has:
A pair of outer shroud, it is to run through the rigid body member that is formed with taper hole at the center;
Interior ring, it is made of elastic component or viscoelasticity member, be configured between the above-mentioned a pair of outer shroud, be formed with the cylindric through hole that the axle that links for ring in this passes at the center, being formed with at the direction of principal axis two ends of periphery can be respectively and the conical surface of the interior Zhou Peihe of the taper hole of above-mentioned a pair of outer shroud;
The driving shaft of above-mentioned ball-screw and above-mentioned servomotor is inserted in the through hole of above-mentioned interior ring, make above-mentioned a pair of outer shroud taper hole interior week and above-mentioned in the conical surface butt of ring, by using bolt that above-mentioned a pair of outer shroud is interfixed by interior ring connection shaft.
9. vibration testing device according to claim 2 is characterized in that,
So that the nut of above-mentioned ball screw framework is merely able to guide the guiding mechanism of this nut to have along the axially movable mode of above-mentioned ball-screw: be fixed in the part 1 on the framework of above-mentioned vibration testing device and be fixed in the part 2 of this nut,
Side in above-mentioned part 1 and the part 2 has guide rail, and the opposing party has the slide block that can engage with above-mentioned guide rail and move along this guide rail,
Above-mentioned slide block has:
Recess, it is round above-mentioned guide rail;
Groove, its moving direction along above-mentioned slide block in above-mentioned recess forms;
Keep out of the way the path, it is formed at the inside of above-mentioned slide block, and links to each other with the above-mentioned moving direction two ends of above-mentioned groove in the mode with above-mentioned groove formation closed-loop path;
A plurality of balls, it circulates in above-mentioned closed-loop path, and when being arranged in above-mentioned groove and above-mentioned guide rail butt.
10. vibration testing device according to claim 9 is characterized in that, above-mentioned slide block is formed with 4 above-mentioned closed-loop paths,
The ball that is disposed at respectively in the groove of 2 closed-loop paths in above-mentioned 4 closed-loop paths has the contact angle of roughly ± 45 spending with the radially formation of guiding mechanism, is disposed at ball in the groove of other 2 closed-loop paths respectively and has footpath with above-mentioned guiding mechanism and form round about roughly ± contact angles of 45 degree.
11. vibration testing device according to claim 1 is characterized in that,
The the above-mentioned the 1st and the 2nd links parts has the way station that is disposed between the above-mentioned the 1st and the 2nd driver and the above-mentioned worktable respectively,
The above-mentioned the 1st way station that links parts can only slide with respect to above-mentioned worktable along a direction vertical with the 1st direction, and only edge and this direction direction vertical with this two direction of the 1st direction slided with respect to above-mentioned the 1st driver,
The above-mentioned the 2nd way station that links parts can only slide with respect to above-mentioned worktable along a direction vertical with the 2nd direction, and only edge and this direction direction vertical with this two direction of the 2nd direction slided with respect to above-mentioned the 2nd driver.
12. vibration testing device according to claim 11 is characterized in that,
One direction of two glide directions that the above-mentioned the 1st way station that links parts can slide with respect to above-mentioned worktable and above-mentioned the 1st driver is the 2nd direction,
One direction of two glide directions that the above-mentioned the 2nd way station that links parts can slide with respect to above-mentioned worktable and above-mentioned the 2nd driver is the 1st direction.
13. vibration testing device according to claim 11, it is characterized in that, a platform in above-mentioned worktable and the above-mentioned way station is provided with at least 1 guide rail that can extend with respect to the direction that above-mentioned worktable slides along way station, and in above-mentioned worktable and the above-mentioned way station another is provided with the slide block that engages with above-mentioned guide rail.
14. vibration testing device according to claim 13 is characterized in that,
By many guide rails of configuration and a plurality of slide blocks that engage respectively with above-mentioned many guide rails of being parallel to each other, above-mentioned worktable and above-mentioned way station are linked up in the mode that can slide.
15. vibration testing device according to claim 13 is characterized in that, above-mentioned slide block has:
Recess, it is round above-mentioned guide rail;
Groove, its moving direction along above-mentioned slide block in above-mentioned recess forms;
Keep out of the way the path, it is formed at the inside of above-mentioned slide block, and links to each other with the above-mentioned moving direction two ends of above-mentioned groove in the mode with above-mentioned groove formation closed-loop path;
A plurality of balls, it circulates in above-mentioned closed-loop path, and when being arranged in above-mentioned groove and above-mentioned guide rail butt.
16. vibration testing device according to claim 15 is characterized in that,
In above-mentioned slide block, form 4 above-mentioned closed-loop paths,
The ball that is disposed at respectively in the groove of 2 closed-loop paths in above-mentioned 4 closed-loop paths has the contact angle of roughly ± 45 spend with the radially formation that is provided with the guiding mechanism of above-mentioned guide rail and above-mentioned slide block, is disposed at the footpath that ball in the groove of other 2 closed-loop paths has with above-mentioned guiding mechanism respectively and forms round about roughly ± 45 contact angles of spending.
17. vibration testing device according to claim 11 is characterized in that,
Side in above-mentioned way station and the pairing driver is provided with at least 1 guide rail that can extend with respect to the direction that the driver of above-mentioned correspondence slides along above-mentioned way station,
The opposing party in the middle of above-mentioned way station and the pairing driver is provided with the slide block that engages with above-mentioned guide rail.
18. vibration testing device according to claim 17, it is characterized in that, by many guide rails of configuration and a plurality of slide blocks that engage with above-mentioned many guide rails respectively of being parallel to each other, above-mentioned way station and pairing driver are linked up in the mode that can slide.
19. vibration testing device according to claim 17 is characterized in that, above-mentioned slide block has:
Recess, it is round above-mentioned guide rail;
Groove, its moving direction along above-mentioned slide block in above-mentioned recess forms;
Keep out of the way the path, it is formed at the inside of above-mentioned slide block, and links to each other with the above-mentioned moving direction two ends of above-mentioned groove in the mode with above-mentioned groove formation closed-loop path;
A plurality of balls, it circulates in above-mentioned closed-loop path, and when being arranged in above-mentioned groove and above-mentioned guide rail butt.
20. vibration testing device according to claim 19 is characterized in that,
In above-mentioned slide block, form 4 above-mentioned closed-loop paths,
The ball that is disposed at respectively in the groove of 2 closed-loop paths in above-mentioned 4 closed-loop paths has the contact angle of roughly ± 45 spend with the radially formation that is provided with the guiding mechanism of above-mentioned guide rail and above-mentioned slide block, is disposed at the footpath that ball in the groove of other 2 closed-loop paths has with above-mentioned guiding mechanism respectively and forms round about roughly ± 45 contact angles of spending.
21. vibration testing device according to claim 1 is characterized in that, this vibration testing device has:
Can make the 3rd driver that above-mentioned worktable vibrates along the 3rd direction vertical with the 1st and the 2nd direction two directions,
With the 3rd binding parts that above-mentioned worktable and above-mentioned the 3rd driver are connected in the mode that above-mentioned worktable is slided along the 1st and the 2nd direction with respect to above-mentioned the 3rd driver,
The the 1st and the 2nd links parts comes respectively above-mentioned worktable and the 1st and the 2nd driver to be connected along the mode that the 3rd direction is slided with respect to the 1st and the 2nd driver can make above-mentioned worktable.
22. vibration testing device according to claim 21 is characterized in that, above-mentioned the 3rd driver utilizes servomotor driving ball screw framework that above-mentioned worktable is vibrated.
23. vibration testing device according to claim 21 is characterized in that,
The above-mentioned the 3rd links parts has the way station that is disposed between above-mentioned the 3rd driver and the above-mentioned worktable,
The above-mentioned the 3rd way station that links parts can only slide with respect to above-mentioned worktable along a direction vertical with the 3rd direction, and only edge and this direction direction vertical with this two direction of the 3rd direction slided with respect to above-mentioned the 1st driver.
24. vibration testing device according to claim 23 is characterized in that,
The above-mentioned the 3rd way station that links parts can be the described the 1st and the 2nd direction with respect to two glide directions of above-mentioned worktable and the slip of above-mentioned the 1st driver.
25. vibration testing device according to claim 23 is characterized in that,
Side in the middle of above-mentioned worktable and the above-mentioned way station is provided with at least 1 guide rail that can extend with respect to the direction that above-mentioned worktable slides along above-mentioned way station,
The opposing party in the middle of above-mentioned worktable and the above-mentioned way station is provided with the slide block that engages with above-mentioned guide rail.
26. vibration testing device according to claim 25 is characterized in that, by many guide rails of configuration and a plurality of slide blocks that engage with above-mentioned many guide rails respectively of being parallel to each other, above-mentioned worktable and above-mentioned way station is linked up in the mode that can slide.
27. vibration testing device according to claim 23 is characterized in that,
Side in the middle of above-mentioned way station and the pairing driver is provided with at least 1 guide rail that can extend with respect to the direction that the driver of above-mentioned correspondence slides along above-mentioned way station,
The opposing party in the middle of above-mentioned way station and the pairing driver is provided with the slide block that engages with above-mentioned guide rail.
28. vibration testing device according to claim 27, it is characterized in that, by many guide rails of configuration and a plurality of slide blocks that engage with above-mentioned many guide rails respectively of being parallel to each other, above-mentioned way station and pairing driver are linked up in the mode that can slide.
29. vibration testing device according to claim 23 is characterized in that, above-mentioned the 3rd direction is a vertical direction,
Above-mentioned the 3rd driver has a plurality of way stations.
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