JP5420323B2 - 分子ポンプ - Google Patents

分子ポンプ Download PDF

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Publication number
JP5420323B2
JP5420323B2 JP2009148192A JP2009148192A JP5420323B2 JP 5420323 B2 JP5420323 B2 JP 5420323B2 JP 2009148192 A JP2009148192 A JP 2009148192A JP 2009148192 A JP2009148192 A JP 2009148192A JP 5420323 B2 JP5420323 B2 JP 5420323B2
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JP
Japan
Prior art keywords
molecular pump
casing
thread groove
wall portion
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009148192A
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English (en)
Japanese (ja)
Other versions
JP2011007049A5 (enExample
JP2011007049A (ja
Inventor
昌司 井口
哲郎 大林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Vacuum Ltd
Original Assignee
Osaka Vacuum Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Vacuum Ltd filed Critical Osaka Vacuum Ltd
Priority to JP2009148192A priority Critical patent/JP5420323B2/ja
Publication of JP2011007049A publication Critical patent/JP2011007049A/ja
Publication of JP2011007049A5 publication Critical patent/JP2011007049A5/ja
Application granted granted Critical
Publication of JP5420323B2 publication Critical patent/JP5420323B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2009148192A 2009-06-23 2009-06-23 分子ポンプ Active JP5420323B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009148192A JP5420323B2 (ja) 2009-06-23 2009-06-23 分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009148192A JP5420323B2 (ja) 2009-06-23 2009-06-23 分子ポンプ

Publications (3)

Publication Number Publication Date
JP2011007049A JP2011007049A (ja) 2011-01-13
JP2011007049A5 JP2011007049A5 (enExample) 2012-08-02
JP5420323B2 true JP5420323B2 (ja) 2014-02-19

Family

ID=43563987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009148192A Active JP5420323B2 (ja) 2009-06-23 2009-06-23 分子ポンプ

Country Status (1)

Country Link
JP (1) JP5420323B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9771940B2 (en) 2013-12-27 2017-09-26 Shimadzu Corporation Vacuum pump
US10132329B2 (en) 2013-12-25 2018-11-20 Shimadzu Corporation Vacuum pump

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202013008470U1 (de) 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP6386737B2 (ja) * 2014-02-04 2018-09-05 エドワーズ株式会社 真空ポンプ
EP3135919B1 (de) * 2015-08-24 2019-02-20 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN109253926A (zh) * 2018-10-19 2019-01-22 太原理工大学 模拟巷道围岩全长锚固质量检测的拉拔试验装置及方法
JP7467882B2 (ja) * 2019-10-28 2024-04-16 株式会社島津製作所 真空ポンプ
JP7336392B2 (ja) * 2020-01-24 2023-08-31 エドワーズ株式会社 真空ポンプおよびステータコラム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09303289A (ja) * 1996-05-14 1997-11-25 Osaka Shinku Kiki Seisakusho:Kk 分子ポンプの表面処理方法
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2005194921A (ja) * 2004-01-06 2005-07-21 Boc Edwards Kk 分子ポンプ
JP4703279B2 (ja) * 2004-06-25 2011-06-15 株式会社大阪真空機器製作所 複合分子ポンプの断熱構造

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10132329B2 (en) 2013-12-25 2018-11-20 Shimadzu Corporation Vacuum pump
US9771940B2 (en) 2013-12-27 2017-09-26 Shimadzu Corporation Vacuum pump

Also Published As

Publication number Publication date
JP2011007049A (ja) 2011-01-13

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