JP2011007049A5 - - Google Patents

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Publication number
JP2011007049A5
JP2011007049A5 JP2009148192A JP2009148192A JP2011007049A5 JP 2011007049 A5 JP2011007049 A5 JP 2011007049A5 JP 2009148192 A JP2009148192 A JP 2009148192A JP 2009148192 A JP2009148192 A JP 2009148192A JP 2011007049 A5 JP2011007049 A5 JP 2011007049A5
Authority
JP
Japan
Prior art keywords
side wall
exhaust port
pump according
molecular pump
wall portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009148192A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011007049A (ja
JP5420323B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009148192A priority Critical patent/JP5420323B2/ja
Priority claimed from JP2009148192A external-priority patent/JP5420323B2/ja
Publication of JP2011007049A publication Critical patent/JP2011007049A/ja
Publication of JP2011007049A5 publication Critical patent/JP2011007049A5/ja
Application granted granted Critical
Publication of JP5420323B2 publication Critical patent/JP5420323B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2009148192A 2009-06-23 2009-06-23 分子ポンプ Active JP5420323B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009148192A JP5420323B2 (ja) 2009-06-23 2009-06-23 分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009148192A JP5420323B2 (ja) 2009-06-23 2009-06-23 分子ポンプ

Publications (3)

Publication Number Publication Date
JP2011007049A JP2011007049A (ja) 2011-01-13
JP2011007049A5 true JP2011007049A5 (enExample) 2012-08-02
JP5420323B2 JP5420323B2 (ja) 2014-02-19

Family

ID=43563987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009148192A Active JP5420323B2 (ja) 2009-06-23 2009-06-23 分子ポンプ

Country Status (1)

Country Link
JP (1) JP5420323B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202013008470U1 (de) 2013-09-24 2015-01-08 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP6390098B2 (ja) * 2013-12-25 2018-09-19 株式会社島津製作所 真空ポンプ
JP6331491B2 (ja) 2013-12-27 2018-05-30 株式会社島津製作所 真空ポンプ
JP6386737B2 (ja) * 2014-02-04 2018-09-05 エドワーズ株式会社 真空ポンプ
EP3135919B1 (de) * 2015-08-24 2019-02-20 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN109253926A (zh) * 2018-10-19 2019-01-22 太原理工大学 模拟巷道围岩全长锚固质量检测的拉拔试验装置及方法
JP7467882B2 (ja) * 2019-10-28 2024-04-16 株式会社島津製作所 真空ポンプ
JP7336392B2 (ja) 2020-01-24 2023-08-31 エドワーズ株式会社 真空ポンプおよびステータコラム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09303289A (ja) * 1996-05-14 1997-11-25 Osaka Shinku Kiki Seisakusho:Kk 分子ポンプの表面処理方法
DE10107341A1 (de) * 2001-02-16 2002-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2005194921A (ja) * 2004-01-06 2005-07-21 Boc Edwards Kk 分子ポンプ
JP4703279B2 (ja) * 2004-06-25 2011-06-15 株式会社大阪真空機器製作所 複合分子ポンプの断熱構造

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