JP5407506B2 - Visual inspection system - Google Patents

Description

  The present invention relates to a visual inspection system that visually inspects a display device such as a color filter.

  Generally, when a display device such as a color filter is manufactured, an inspector performs a visual inspection using an inspection apparatus before shipping the product to evaluate the quality of the final product (see, for example, Patent Documents 1 and 2). . When a large-sized substrate is used, the substrate to be inspected is automatically taken into the inspection table of a macro inspection machine for visual inspection, and is implemented by a mechanism for determining the presence or absence of defects such as unevenness, film surface contamination, film scratches, etc. Reference 2).

  Since visual inspection takes time to inspect, in order to maintain the productivity of the production line, as shown in Fig. 1, multiple macro inspection machines are installed adjacent to each other, and an inspector is assigned to each macro inspection table. Implemented. The inspector visually confirms the above defects, and if there is no problem, the inspector is shipped as a product.

  In the conventional visual inspection, since the visual inspection largely depends on the experience of the inspector, there is a problem that the inspection accuracy of the inspector varies and the reliability of the inspection is lowered.

  Furthermore, the increase in the size of the substrate to be inspected inevitably increases the number of defects on the substrate, and the macro inspection machine becomes enormous. It is necessary to move to contact the inspector of the other macro inspection machine, and it takes time to call attention to the inspector of the other macro inspection machine, so the serious defect is overlooked and the defective product is leaked to the customer The problem occurs.

JP 2003-98036 A Japanese Patent Laid-Open No. 7-270339

  The present invention has been made in view of such background art, and it is an object of the present invention to improve the reliability of inspection and prevent the outflow of defective products to customers when manufacturing large display devices such as color filters. .

In order to solve the above-mentioned problems in the present invention, first, in the invention of claim 1, a visual inspection system for performing a final quality inspection by visual inspection with a macro inspection machine before shipment of the display device,
Inspection result storage means for storing inspection result information in each macro inspection machine;
Determination condition storage means for storing determination conditions for comprehensively determining each inspection result information;
An inspection result determination means for comprehensively determining each inspection result information collected from the inspection result storage means while referring to the determination conditions stored in the determination condition storage means, and displaying the determination results on each macro inspection machine; It is set as the visual inspection system characterized by providing.

In order to solve the above-described problems in the present invention, first, in the invention of claim 1, a visual inspection system that performs final quality inspection by visual inspection with a plurality of macro inspection machines before shipment of the display device, A test result storage means for storing the test result information in the macro tester by including information indicating whether the test result information is notified to another macro tester ;
And a determination condition storage means for storing the determination condition for comprehensively determining the test result information, and notifies the test result information collected from the test result storing means to the determination condition to another macro inspection machine if it contains information which means that is obtained by a visual inspection system characterized that you notice the test result information which the information is included in the macro inspection machine.

  Further, the invention of claim 2 has an effect that it is possible to share an abnormality or a caution point issued by another inspector among all the inspectors in real time.

  Therefore, when manufacturing a large display device such as a color filter, there is an effect that the reliability of inspection can be improved and the outflow of defective products to customers can be prevented.

The figure which shows the example of the visual inspection mechanism implemented in the manufacturing line of a large sized display device. The figure which shows the hardware constitutions of the visual inspection system of this invention. The figure which shows the data item of a board | substrate passage history storage table. The figure which shows the data item of a macro test result storage table. The figure which shows the data item of a macro test result determination condition table.

  Hereinafter, an embodiment of the present invention will be described.

1. Overall Configuration As shown in FIG. 2, the visual inspection system of the present invention includes a macro inspection machine, a database system, and a macro inspection result determination system, which are connected to the Internet.

  The macro inspection machine includes a terminal installed in the vicinity thereof.

  An apparatus other than a macro inspection machine is also connected to the Internet, which is a device that constitutes a production line (hereinafter simply referred to as a production line) for large display devices such as color filters.

  In order to maintain the productivity of the production line, a plurality of macro inspection machines are installed as a part of the production line adjacent to each other as shown in FIG. Using a macro inspection machine, the inspection substrate is inspected for unevenness, film scratches, color residue, etc., and substrate determination.

  All boards transported on the production line have individual identification codes (hereinafter also referred to as board codes), and each device constituting the production line has an identification code and a board transport control flag as well as board dispensing. Etc. are performed for data tracking to be transferred to the downstream device. By this data tracking, an identification code and a lot number are acquired for the substrate taken into the apparatus.

  The database system includes a substrate passage history database (DB), a macro inspection result storage database (DB), and a macro inspection result determination system database (DB).

2. Substrate passing history database The substrate passing history database receives from this device the substrate passing history such as information relating to the devices that have passed through all the boards manufactured in the production line and the positions in this device. It is stored and accumulated in a substrate passage history storage table as shown. This device, of course, includes a macro inspection machine.

  As shown in FIG. 3, the board passage history storage table includes data items such as “board code”, “LD loading date”, “LD loading cassette”, “apparatus ID”, “position ID”, “loading date”. , “Passing date” and “lot”.

  The value of the item “board code” is an identification code of the board to be inspected.

  The value of the item “LD input date and time” is the date and time when the item is input to the input device (LD).

  The value of the item “LD loading cassette” is the cassette ID of the cassette loaded from the loading device (LD).

  The value of the item “device ID” is an identification code of the corresponding device.

  The value of the item “position ID” is an identification code of a position in the corresponding apparatus.

  The value of the item “input date / time” is the input date / time to the corresponding device.

  The value of the item “passing date and time” is the date and time when the device is paid out.

  The value of the item “lot” is the lot number of the substrate to be inspected.

3. Macro inspection result storage database The macro inspection result storage database receives inspection result information in each macro inspection machine from each macro inspection machine, stores it in a macro inspection result storage table as shown in FIG.

  In the macro inspection result storage table, as shown in FIG. 4, the data items include “substrate code”, “determination”, “defect coordinates (range)”, “NG surface number”, “failure mode”, “inspection machine”. ”,“ Lot ”,“ inspection date / time ”,“ inspector ”,“ shared flag ”, and“ notification comment ”.

  The value of the item “board code” is an identification code of the board to be inspected.

  The value of the item “determination” is either OK (non-defective product) or NG (defective product) and represents the overall determination result of the substrate to be inspected.

  The value of the item “defect coordinates (range)” is the range of the X coordinate and the Y coordinate of the location where the defect has occurred.

  The value of the item “NG surface number” is the number of the surface that has been chamfered.

  The value of the item “Bad Mode” is the mode causing the surface drop.

  The value of the item “inspection machine” is an identification code of the inspection machine used for the inspection.

  The value of the item “lot” is the lot number of the substrate to be inspected.

  The value of the item “inspection date and time” is the date and time when the inspected substrate is inspected.

  The value of the item “inspector” is a person in charge of inspecting the board to be inspected.

  The value of the item “shared flag” takes 0 or 1, and in the case of 0, it means that the inspection result information is not notified to an inspector arranged in another macro inspection machine, while in the case of 1, This means that the inspection result information is notified to an inspector arranged in another macro inspection machine.

  The value of the item “notification comment” is a comment for notifying inspection result information to an inspector arranged in another macro inspection machine when the value of the shared flag is 1.

4). Macro inspection result determination system database The macro inspection result determination system database is used by the macro inspection result determination system to comprehensively determine the inspection result information and notify the inspector located in each macro inspection machine. Are received from the macro inspection result determination system, stored in a macro inspection result determination condition table as shown in FIG. 5, and accumulated.

  In the macro inspection result determination condition table, as shown in FIG. 5, the data items include “condition No”, “notification level”, “notification comment”, “determination surface number”, “coordinate (range)”, “coordinate”. There are “Margin X”, “Coordinate margin Y”, “Defect mode”, “Threshold number of cases”, “Ripple range”, and “Notification inspection machine”.

  The value of the item “condition No.” is a number for identifying the determination condition, and is added by 1 every time a new macro inspection result determination condition is set.

  The value of the item “notification level” is a priority level for notifying the determination result, and takes a value of 0, 1, or 2. Each of 0, 1, and 2 means a sharing level, a caution level, and a serious level, and the priority of notification increases in this order.

  The value of the item “notification comment” is a comment attached to the notification of the determination result, and is arbitrarily set.

  The value of the item “determination surface number” is a condition that indicates how to determine the value of the item “NG surface number” in the macro inspection result storage table. Is set. 0 means that the value of the item “NG surface number” is not used for determination. 1 means that the inspection result information of the substrates having the same value of the item “NG surface number” is extracted. 2 means that the inspection result information of the substrate having the designated value of the item “NG surface number” is extracted.

  The value of the item “coordinate (range)” is a condition that indicates how to determine the value of the item “defect coordinate (range)” in the macro inspection result storage table. The value of is set. 0 means that the value of the item “defect coordinates (range)” is not used for determination. 1 means that inspection result information of substrates having the same value of the item “defect coordinates (range)” is extracted. 2 means that the inspection result information of the substrate having the designated value of the item “defect coordinates (range)” is extracted.

  The value of the item “coordinate margin X” takes into account the deviation of the X coordinate registered as the value of the item “defect coordinate (range)” in the macro inspection result storage table, and the value of this item “defect coordinate (range)” It is used when considering the margin from, and is arbitrarily set.

  The value of the item “coordinate margin Y” takes into account the deviation of the Y coordinate registered as the value of the item “defect coordinate (range)” in the macro inspection result storage table, and the value of this item “defect coordinate (range)” It is used when considering the margin from, and is arbitrarily set.

  The value of the item “defective mode” is a condition indicating how to determine the value of the item “defective mode” in the macro inspection result storage table, and is set to one of 0, 1, and 2. The 0 means that the value of the item “defective mode” is not used for determination. 1 means that inspection result information of substrates having the same value of the item “defective mode” is extracted. 2 means that the inspection result information of the substrate having the designated value of the item “defective mode” is extracted.

  The value of the item “threshold number threshold” indicates how many times the condition indicated by the values of the above-mentioned items “judgment surface number”, “coordinate (range)” and “bad mode” is notified. , Set arbitrarily.

  The value of the item “Ripple range” is notified that there is a possibility that a defect has spread when the conditions indicated by the values of the above-mentioned items “Judgment surface number”, “Coordinate (range)” and “Bad mode” are met. This indicates the range of substrates to be set, and any one of 1, 2, and 3 is set. Each of 1, 2, and 3 means notifying that there is a risk that a defect has spread to the set number of sheets, the current lot, and the current input cassette.

  The value of the item “notification inspection machine” designates which inspection machine the determination result is to be notified to, and is set to one of 0 and 1. 0 means that the determination result is notified to inspectors arranged in all inspection machines. 1 means notifying the determination result to the inspector arranged in the designated inspection machine.

5. Determination of Inspection Result Information by Macro Inspection Result Determination System Hereinafter, various processes related to determination of inspection result information using determination conditions by the macro inspection result determination system will be described.

5.1. Setting of Macro Inspection Result Determination Condition An inspector or administrator can newly register a determination condition in the macro inspection result determination condition table on the macro inspection result determination condition system, and change or delete the registered condition.

  Every time a new registration is made, a value increased by 1 is issued and entered by the macro inspection result determination condition system in the item “condition No” of the macro inspection result determination condition table. Only the values of data items other than “Condition No” can be input, changed, or deleted by the inspector or administrator.

  Hereinafter, an example of determination conditions for common defects will be described as an example of setting determination conditions.

  The common defect is a defect when the same defect exists on a plurality of substrates, and oversight of the common defect leads to a serious quality claim.

  The value of the item “notification level” is 2 (serious level), the value of the item “notification comment” is “common defect detected!”, The value of the item “judgment surface number” is 1 (match), and the item “coordinates” The value of (range) ”is 1 (match), the value of item“ coordinate margin X ”is arbitrarily, the value of item“ coordinate margin Y ”is arbitrarily, and the value of item“ defective mode ”is 1 (match) By setting the value of the item “threshold number threshold” arbitrarily, the value of the item “Ripple range” to 2 (current lot), and the value of the item “Notification inspection machine” to 0 (all), It becomes possible to determine a common defect from the results of inspection by a plurality of macro inspection machines and notify the inspector arranged in each macro inspection machine.

5.2. Substrate Passing History and Inspection Result Information Registration by Macro Inspection Machine In the following a to f, a processing flow relating to substrate passage history and inspection result information registration by the macro inspection machine will be described. Note that the inspector sets an inspector code from a terminal installed in the vicinity of the macro inspection machine in advance and holds it in the macro inspection machine before carrying out the inspection.

  a. The substrate to be inspected is automatically transferred to each macro inspection machine. At this time, the macro inspection machine receives and holds the identification code and lot number of the board from the upstream apparatus. Further, the macro inspection machine stores the received board identification code and lot number and the cassette identification code loaded from the loading device (LD) in the board passage history storage table in the items “board code” and “lot”, respectively. As the value of the item “LD input cassette” in real time.

  b. When the substrate to be inspected is set in the macro inspection machine, the inspector visually inspects the set substrate to be inspected for the presence of uneven defects, film scratches, color residue, and the like.

  c. The inspector determines whether the substrate is defective or not detected, and determines the substrate.

  d. At the time of board determination, the inspector inputs or selects at least the following macro inspection result information at a terminal installed near the macro inspection machine. First, either OK or NG is input or selected as the value of the item “board determination”. If there is a chamfer, the number of the chamfered surface is input or selected as the value of the item “NG surface number”, and the defect coordinates X and coordinates are entered as the value of the item “defect coordinates (range)”. The range of Y is input or selected, and the mode causing the chamfer is input or selected as the value of the item “defective mode”.

  e. The inspector registers the macro inspection result information input or selected above at the terminal. The macro inspection machine combines the registered macro inspection result information with the board identification code, lot number, own device code, and inspector code held in the macro inspection machine for each board. In addition, item “substrate determination”, item “NG surface number”, item “defect coordinate (range)”, item “defective mode”, item “substrate code”, item “lot”, item “inspector”, item “ Stored as “inspector” value.

  f. Information stored in the macro inspection result storage table is used in the macro inspection result determination system.

5.3. Determination of Inspection Result Information by Macro Inspection Result Determination System A flow of processing related to determination of inspection result information by the macro inspection result determination system will be described in the following a to i.

a. The macro inspection result determination system collects inspection result information of each macro inspection machine stored in the macro inspection result determination condition table.

  b. The macro inspection result determination system refers to the condition indicated as the value of each item of “determination surface number”, “coordinate (range)”, and “defective mode” preset in the macro inspection result determination condition table one by one. Then, the substrate corresponding to one of the conditions is extracted from the collected inspection result information.

  c. The number of items corresponding to the conditions indicated as the values of each item of “determination surface number”, “coordinate (range)”, and “defective mode” of the macro inspection determination conditions set in advance in the macro inspection result determination condition table is “ The processes of ab are repeated until the value of “number threshold” is reached, and when the value of the item “number threshold” is reached, the process proceeds to the next process d.

  d. The macro inspection result determination system compares the substrate code between the substrate passage history storage table and the inspection result information of each macro inspection machine, and the board that has passed the macro inspection machine and the board that is to be put into the macro inspection machine from now on And a list of substrate codes applicable to the set number of sheets, the original lot, and the current cassette indicated by the value of the item “Ripple Range” is grasped.

  When the current lot is set as the value of the item “Ripple Range”, a list of substrate codes is grasped by the following processes (1) to (4).

  (1) A list of substrates inspected by each macro inspection machine in the same lot is acquired from the macro inspection result storage table.

  (2) A list of substrates recovered by the recovery device (ULD) in the previous process is acquired from the substrate passage history storage table.

  (3) The board list acquired in (1) is used as a list of boards passing through the macro inspection machine in the same lot, and the board list acquired in (1) is excluded from the board list acquired in (2). In the same lot, a list of substrates to be input to the macro inspection machine is listed.

  (4) When the value of the item “notification level” is set to a serious level, the board list acquired in (1) is listed as requiring re-inspection.

  When the value of the item “Ripple Range” is set for the current cassette, the list of board codes is grasped by the following processes (i) to (iV).

  (I) A list of substrates inspected by each macro inspection machine in the same cassette is acquired from the macro inspection result storage table.

  (Ii) The substrate passage history of the loading device (LD) in which the cassette is loaded is referred to from the substrate passage history storage table, and a list of substrates loaded from the cassette is acquired.

  (Iii) The board list acquired in (i) is used as a list of boards passing through the macro inspection machine in the same cassette, and the board list acquired in (i) is excluded from the board list acquired in (ii). In the same cassette, the list is made as a list of substrates to be loaded into the macro inspection machine.

  (IV) When the value of the item “notification level” is set to a serious level, the board list acquired in (i) is listed as requiring re-inspection.

  e. The macro inspection result determination system includes at least the values of the macro inspection condition items “Condition No”, “Notification Level”, “Notification Level”, “Ripple Range”, and “Notification Inspection Machine” in the macro inspection result determination condition table. The determination information including the values of the items “lot”, “NG surface number”, “defect coordinates (range)”, and “failure mode” of the inspection result information of the substrate corresponding to the macro inspection result determination condition, The board list grasped in d is set as the determination result in the notification information.

  f. The macro inspection result determination system notifies the set notification information to each macro inspection device indicated by the value of the item “notification inspection device”.

  g. Each macro inspection machine that has received the notification information from the macro inspection result determination system refers to the received notification information, and the acquired item “notification level” has a high value on the terminal installed in its own device. Inform the inspector by displaying notification information in order.

  h. Each macro inspection machine that has received the notification information from the macro inspection result determination system compares the received notification information with the notification information that is currently displayed (history retention) that received the notification information, Alternatively, it is determined whether the information is existing, and in the case of new information, the contents of the notification information storage unit held for each board code are updated.

  The displayed notification information can be held and deleted in units of board codes on the terminal on the macro inspection machine side.

  i. Repeat ah.

  By using such a determination process, it is possible to prevent a variation in inspection accuracy in a macro inspection machine and oversight of a serious defect such as a common defect.

6). Notification of inspection result information to other inspection machines by the macro inspection result determination system Notification of inspection result information to other inspection machines by the macro inspection result determination system can be performed when macro inspection result determination conditions are not set in advance or between inspectors. Used for information sharing. Hereinafter, various processes related to the inspection result information notification to other inspection machines by the macro inspection result determination system will be described.

6.1. Substrate Passing History and Inspection Result Information Registration by Macro Inspection Machine In the following a to f, a processing flow relating to substrate passage history and inspection result information registration by the macro inspection machine will be described. Note that the inspector sets an inspector code from a terminal installed in the vicinity of the macro inspection machine in advance and holds it in the macro inspection machine before carrying out the inspection.

  a. The substrate to be inspected is automatically transferred to each macro inspection machine. At this time, the macro inspection machine receives and holds the identification code and lot number of the board from the upstream apparatus. Further, the macro inspection machine stores the received board identification code and lot number and the cassette identification code loaded from the loading device (LD) in the board passage history storage table in the items “board code” and “lot”, respectively. As the value of the item “LD input cassette” in real time.

  b. When the substrate to be inspected is set in the macro inspection machine, the inspector visually inspects the set substrate to be inspected for the presence of uneven defects, film scratches, color residue, and the like.

  c. The inspector determines whether the substrate is defective or not detected, and determines the substrate.

  d. At the time of board determination, the inspector inputs or selects at least the following inspection result information at a terminal installed near the macro inspection machine. First, either OK or NG is input or selected as the value of the item “board determination”. If there is a chamfer, the number of the chamfered surface is input or selected as the value of the item “NG surface number”, and the defect coordinates X and coordinates are entered as the value of the item “defect coordinates (range)”. The range of Y is input or selected, and the mode causing the chamfer is input or selected as the value of the item “defective mode”.

  e. When it is desired to notify the inspector of the macro inspection result information at the time of board determination, the following additional information is also input or selected as macro inspection result information together with the macro inspection result information. First, as the value of the item “shared flag”, 1 is input or selected, which means that the macro inspection result information is notified to an inspector arranged in another macro inspection machine. Also, as an item “notification comment”, a comment to be notified to another inspector is input or selected.

  On the other hand, if the macro inspection result information is not notified to another inspector, it means that the macro inspection result information is not notified to the inspector arranged in another macro inspection machine as the value of the item “shared flag”. Enter or select.

  f. The inspector registers the inspection result information input or selected above at the terminal. The macro inspection machine stores the registered inspection result information in the macro inspection result information table together with the board identification code, lot number, own device code, and inspector code held in the macro inspection machine for each board. , Item “substrate determination”, item “NG surface number”, item “defect coordinate (range)”, item “defective mode”, item “common flag”, item “notification comment”, item “substrate code”, item “ Stored as values of “lot”, item “inspector”, and item “inspector”.

6.2. Notification of Macro Inspection Result Information to Other Inspection Machines by Macro Inspection Result Determination System In the following a to e, a processing flow relating to notification of inspection result information to other inspection machines by the macro inspection result determination system will be described.

  a. The macro inspection result determination system collects inspection result information of each macro inspection machine stored in the macro inspection result determination condition table.

  b. The macro inspection result determination system extracts items whose value of the item “common flag” is 1 from the collected macro inspection result information.

  c. Based on the extracted macro inspection result information, the macro inspection result determination system obtains values of the item “lot”, the item “NG surface number”, the item “defect coordinates (range)”, the item “defective mode”, and the item “notification comment”. Then, at least notification information including these values is notified to each macro inspection machine.

  d. Each macro inspection machine displays the notification information received from the macro inspection result determination system on a terminal installed in its own apparatus.

  The displayed notification information can be held and deleted on the terminal on the macro inspection machine side.

  e. The macro inspection result determination system changes the value of the item “common flag” to 0 for the macro inspection result information that provides the value of each item included in the notification information at the stage when the notification information is notified to each macro inspection machine. At the same time, the value of the item “common flag” in the macro inspection result determination condition table is also changed to 0 to prevent re-notification at the next processing.

By this notification process, it is possible to share abnormalities, cautions, etc. issued from other inspectors among all the inspectors in real time.

Claims (1)

A visual inspection system that performs final quality inspection by visual inspection with a plurality of macro inspection machines before shipment of the display device,
Inspection result storage means for storing in the inspection result information in each macro inspection machine, including information indicating whether to notify the inspection result information to other macro inspection machines ;
And a determination condition storage means for storing the determination condition for comprehensively determining the test result information,
If it contains information which means that notifies the test result information collected from the test result storing means to the determination condition to another macro inspection machine, the said test result information to which the information is contained visual inspection system characterized that you notify the macro inspection machine.

Images