JP2009015654A - Quality management system of work and quality management method of work - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a quality management system and method capable of monitoring the defect generation of a work almost in real time, promptly reporting it and improving usability. <P>SOLUTION: The quality management system of the work comprises: a defect counting means for preparing the counting data of the defects of the work (counting the number of defects) almost in real time; a first storage means for storing the counting data in a processing order almost in real time; a management chart preparation means for preparing a management table wherein the number of the defects of the work is arranged in the processing order from the counting data almost in real time; a first judgement means for judging whether or not the number of the defects of the work is equal to or more than an upper limit reference value or equal to or lower than a lower limit reference value from the management table almost in real time; a second judgement means for judging whether the change of the number of the defects is sudden or tendentious almost in real time when judging that the number of the defects of the work is equal to or more than the upper limit reference value or equal to or lower than the lower limit reference value; and a reporting means for reporting the judged results almost in real time. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a work quality control system and a work quality control method, and particularly preferably, monitors trends in time of work inspection data (such as the number of defects generated in a work) in real time, When a workpiece having a non-standard number of defects is detected, the equipment (device) in which the defect is detected is notified to a quality control worker or the like, and the occurrence of defects in the inspection data over time The present invention relates to a work quality control system and a work quality control method capable of reporting a trend.

  As a conventional work quality control method using workpiece inspection data, for example, there is a method of inspecting a workpiece by an inspection apparatus to acquire workpiece inspection data and accumulating the inspection data. In this case, for example, when a quality control worker (inspection worker) searches the stored inspection data every predetermined number or every predetermined time and finds abnormal inspection data, the quality control worker The person (inspector) etc. takes measures such as stopping the equipment (device) where the abnormality occurred.

  Such a method has the following problems. Most of the inspection data accumulated is inspection data of a workpiece whose number of defects is within a standard value (that is, a non-defective product). Searching and inspecting the inspection data of these workpieces is useful, on the other hand, because it guarantees that the workpiece corresponding to the inspection data is non-defective (within the standard value). is there. However, on the other hand, it is not necessary to inspect the non-defective product inspection data, and it can be said that searching and checking these data is a waste of time and labor.

  In addition, when abnormal inspection data is found, the quality control worker may have to take a predetermined measure such as stopping the equipment or investigating the cause. As a result, quality control workers and the like need to spend time and effort on the response, and during that time, inspection data may not be monitored. Then, even if another abnormal inspection data is generated in another facility while dealing with the occurrence of certain abnormal inspection data, the inspection worker is not aware of it and misses the abnormal inspection data. There is also a risk.

  As a method for investigating the cause when abnormal inspection data is detected, for example, the configuration described in Patent Document 1 and the configuration described in Patent Document 2 have been proposed. In the configuration described in Patent Document 1, first, the similarity between the inspection result of the workpiece (wafer) and the distribution of the defect in the workpiece in which the abnormal defect has occurred is quantitatively evaluated. Periodicity is analyzed. Then, the relationship between the analysis result and the construction method of each manufacturing apparatus is evaluated, and the cause process and apparatus of occurrence of an abnormal defect are estimated or determined.

  Further, the configuration described in Patent Document 2 can set the management standard of the parameter indicating the state of the semiconductor manufacturing apparatus to an optimum value. When a defect occurs in the characteristics of the manufactured correction circuit device, the process that caused the failure and the parameters of the semiconductor manufacturing device can be easily extracted.

  By the way, in the conventional configuration, the quality control of the workpiece may depend on the skill level of the quality control worker, and the quality of the workpiece may not be constant. In addition, when quality is suddenly deteriorated, there is a possibility that such collection and analysis of inspection data cannot be performed, and there is a possibility that an opportunity to find a workpiece having a defect may be missed. Furthermore, there is a method of monitoring inspection data by associating it with a process processing history of a workpiece. However, such linked inspection data monitoring is physically impossible for a quality control worker to constantly monitor all inspection data due to an increase in processing devices and fragmentation of management items.

  In addition, the configuration described in Patent Document 2 is a quality monitoring method performed in real time in a factory or the like, as usability for a quality control worker (in this case, a verification process for a determination made by the system, or a cause of occurrence of a defect is estimated. It is thought that the method of reporting to the quality control staff which equipment is to be used is insufficient.

  And in such a structure, it can be thought that time is required for the decision making process of a quality control worker. For example, in a factory that operates continuously for 24 hours (for example, a semiconductor manufacturing factory), if it takes time for the decision-making process, it will continue to produce workpieces (ie, defective products) having non-standard defects during that time. . Therefore, improvement of usability for quality control workers is important from the viewpoint of improving the yield of products.

  As described above, in the conventional configuration, it may not be possible to quickly determine which equipment (machine tool or the like) causes the workpiece defect (defect). In addition, for this reason, it is possible to grasp in real time which equipment has a workpiece defect, notify the quality control worker immediately, and the quality control worker who receives the notification immediately takes measures. It was difficult.

  Furthermore, the degree of usability is low in the conventional configuration. Therefore, it takes time and effort for the quality control worker to know which equipment is causing the work having non-standard defects (that is, defects). It may take. As a result, it may take time to stop production of a workpiece having a nonstandard defect, which hinders improvement in yield or causes reduction in yield.

JP 2003-100825 A JP-A-11-354396

  In view of the above circumstances, the problem to be solved by the present invention is to provide a quality management system and a quality management method for monitoring the occurrence of a workpiece defect in real time and promptly notifying a quality control worker, for example, A quality management system and a quality management method for grasping in real time what kind of defects are occurring in the equipment, and promptly informing quality management personnel, etc., and quality management capable of improving usability To provide a system and a quality management method, for example, to provide a quality management system and a quality management method for easily informing a quality management worker of which equipment is defective.

  In order to solve the above problems, the present invention provides a plurality of defect counting means for counting the number of defects and / or defects existing in a workpiece that has undergone predetermined processing in substantially real time, and the defects and / or counts counted by the defect counting means. Alternatively, a first storage unit that can store defective count data in substantially real time in the order of the workpieces that have undergone the predetermined processing, and the count data stored in the first storage unit, Based on the management chart creation means for creating a management table in which the number of existing defects and / or defects is arranged in the order of the work subjected to the predetermined processing in substantially real time, and the management table created by the management chart creation means In real time, it is determined whether the number of defects and / or defects of the workpiece is greater than or equal to the upper limit reference value and / or less than or equal to the lower limit reference value. The first determination means and the first determination means determine that the number of defects and / or defects of the workpiece is not less than an upper reference value and / or not more than a lower reference value. Whether the number of defects and / or defects that have suddenly exceeded the upper limit reference value or the lower limit reference value or the number of defects and / or defects that the workpiece has gradually depends on the order of the workpieces that have been treated. Second determination means for determining in real time whether the upper limit reference value or the lower limit reference value has been exceeded and the determination result of the first determination means and / or the second determination means The gist of the present invention is to provide a notification means for reporting the determination result in substantially real time.

  Here, it is preferable that the defect number counting means is provided in a plurality of predetermined facilities for performing the predetermined processing. The first storage means can collectively store the defect and / or defect count data present in the workpiece counted by the defect count means provided in the predetermined plurality of facilities in substantially real time. preferable.

  Further, the apparatus further comprises a second storage unit that stores history data including processing history data for each lot of workpieces, and the workpiece defect and / or defect count data stored in the first storage unit; The history data stored in the second storage unit may be associated with the history data.

  Further, the control chart creating means arranges the number of defects and / or defects existing in the work in the order of the work subjected to the processing based on the count data stored in the first storage means. Create a management table. It is preferable that a graph showing the number of defects and / or defects existing in the work in the order of the work subjected to the predetermined processing is created in substantially real time based on the management table.

  It is preferable that the notifying means can display a graph showing the number of defects and / or defects existing in the work created by the control chart creating means in the order of the work subjected to the predetermined processing.

  Further, when the first determination means determines that a workpiece having the number of defects or defects equal to or higher than the upper reference value and / or lower than the lower reference value has occurred, the notification means generates the work. When it is confirmed that the quality control worker has accepted the notification of the process, the management item of the process determined that the work has occurred is notified, and the quality control worker When it is confirmed that the notification of the management item of the process has been received, it is preferable to notify the apparatus related to the management item of the process determined to have generated the workpiece.

  Further, when the first determination means determines that a workpiece having the number of defects or defects equal to or higher than the upper reference value and / or lower than the lower reference value has occurred, the notification means generates the work. If it is not possible to confirm that the quality control worker has accepted the notification of the process, the notification of the determined process is continued, and the quality control worker When it is not possible to confirm that the notification has been received, the configuration may be such that the notification of the device relating to the management item of the process in which it is determined that the work has occurred is continued.

  Further, the number of defects or defects of the workpiece suddenly exceeds the upper limit reference value or the lower limit reference value by the second determination means, or the number of defects or defects of the workpiece gradually changes. It is preferable that the notification method by the notification means is different depending on the determination result as to whether the upper limit reference value or the lower limit reference value is exceeded.

  Further, the defect and / or defect present in the workpiece suddenly exceeds the upper limit reference value or the lower limit reference value, or the number of defects and / or defects present in the workpiece is gradually changed, so that the upper limit criterion. It is preferable that the upper limit reference value and the lower limit reference value are different depending on whether the value or the lower limit reference value is exceeded.

  Further, the present invention provides a counting step for counting the number of defects and / or defects existing in a workpiece that has undergone a predetermined process in substantially real time, and the counted data of the counted defects and / or defects is subjected to the predetermined process. A storage step for storing the workpieces in substantially real time in the order of the workpieces passed, and a management in which the number of defects and / or defects existing in the workpieces are arranged in the order of the workpieces subjected to the predetermined processing based on the stored count data. A management table creation step for creating a table in substantially real time, and based on the created management table, the number of defects and / or defects possessed by the work is greater than or equal to an upper limit reference value and / or less than or equal to a lower limit reference value. In the first determination step for determining whether or not the workpiece is in real time, and in the first determination step, the work is present. The number of defects and / or defects of the workpiece suddenly exceeds the upper reference value or the lower reference value. Whether the number of defects and / or defects that the workpiece has gradually changed according to the order of the workpiece subjected to the treatment and exceeded the upper limit reference value or the lower limit reference value, And a step of notifying the determination result of the first determination step and / or the determination result of the second determination step in substantially real time. Is.

  Here, the counting step for counting the number of defects is executed in a plurality of predetermined facilities for performing the predetermined processing, and in the storing step, the defect counting means provided in the predetermined plurality of facilities is counted. Preferably, the method is a method of storing defect data and / or defect count data existing in the workpiece together in substantially real time.

  Further, it is preferable that the history data including processing history data for each lot of workpieces is associated with the stored workpiece defect and / or defect count data.

  Further, based on the stored count data, a management table in which the number of defects and / or defects existing in the work is arranged in the order of the work subjected to the processing is created, and the management table is used based on the management table. The method is preferably a method of creating a graph showing the number of defects and / or defects present in a workpiece in the order of the workpiece subjected to the predetermined processing in substantially real time.

  Moreover, it is preferable that a graph showing the number of defects and / or defects existing in the created workpiece in the order of the workpiece subjected to the predetermined processing can be displayed.

  In addition, when it is determined that the number of defects or defects is equal to or higher than the upper limit reference value and / or a work having a lower limit reference value or less has occurred, whether the number of defects or defects is equal to or higher than the upper limit reference value If the process determined that a workpiece having a value equal to or lower than the lower limit reference value has occurred and the quality control worker confirms that the notification of the process has been accepted, the number of defects or defects is the upper limit reference value. In the case where it is confirmed that the management item of the process determined that the work that is above and / or below the lower reference value has occurred and the quality control worker has received the notification of the management item of the process is confirmed. It is preferable to notify a device relating to a management item of a process in which it is determined that a workpiece having the number of defects or defects equal to or higher than the upper limit reference value and / or lower than the lower limit reference value has occurred. Arbitrariness.

  In addition, when it is determined that the number of defects or defects is equal to or higher than the upper limit reference value and / or a work having a lower limit reference value or less has occurred, whether the number of defects or defects is equal to or higher than the upper limit reference value Informing the process that it is determined that a work that is less than or equal to the lower limit reference value has occurred, and if it is not possible to confirm that the quality control worker has received the notification of the process, continue the notification of the determined process, It may be a method of continuing notification of an apparatus related to a management item of a process in which it is determined that a workpiece having the number of defects or defects equal to or higher than an upper limit reference value and / or lower than the lower limit reference value has occurred.

  Here, the number of defects or defects that the workpiece has suddenly exceeds the upper limit reference value or the lower limit reference value, or the number of defects or defects that the workpiece has gradually changes to the upper limit reference value or The notification method may be different depending on the determination result as to whether or not the lower limit reference value is exceeded.

  Further, the defect and / or defect present in the workpiece suddenly exceeds the upper limit reference value or the lower limit reference value, or the number of defects and / or defects present in the workpiece is gradually changed, so that the upper limit criterion. The upper limit reference value and the lower limit reference value may be made different depending on whether the value or the lower limit reference value is exceeded.

  According to the present invention, the work quality management system according to the present invention determines whether defects and / or defects existing in the work are within the standard value in substantially real time, thereby improving usability. it can. Further, since the determination is made in substantially real time, when a workpiece having a defect and / or a defect is generated, a countermeasure can be taken promptly. Moreover, since the occurrence tendency of defects and / or defects is determined in substantially real time, the state of the facility can be grasped in substantially real time. In particular, by grasping the trend of the number of defects and / or defects, it is possible to take early measures against facilities and apparatuses.

  If a management table and a graph in which the number of defects and / or defects existing in the workpiece are arranged in the order of the workpiece subjected to the processing are created in substantially real time, the tendency of equipment and the like can be managed in substantially real time. Therefore, it is possible to grasp abnormalities such as equipment at an early stage and to cope with it early.

  If the notifying means can display a graph showing the number of defects and / or defects existing in the work created by the control chart creating means in the order of the work subjected to the predetermined processing, for example, quality control The worker can visually grasp the tendency of abnormality of the device and equipment. Therefore, usability can be improved.

  When the first determination means determines that a workpiece having the number of defects or defects equal to or higher than the upper reference value and / or lower than the lower reference value has occurred, the notification means determines that the work has occurred. When the determined process is notified and the quality control worker confirms that the notification of the process has been received, the management item of the process determined that the work has occurred is notified, and the quality control worker When it is confirmed that the notification of the management item is received, the following operational effects can be obtained if the apparatus according to the management item of the process determined to have generated the workpiece is notified. In other words, the quality control worker selects a part where an abnormality has occurred (a part where the number of defects or defects is determined to be greater than or equal to the upper reference value and / or lower than the lower reference value) as any process. It is possible to know the location where an abnormality has occurred in the order of whether or not the process → which management item of the process is → which equipment or device included in the management item. Thus, it is possible to know the location where an abnormality has occurred from a large item to a small item. Therefore, it is excellent in usability for quality control workers.

  When the first determination means determines that a work has occurred in which the number of defects or defects is greater than or equal to the upper limit reference value and / or less than or equal to the lower limit reference value, the quality control worker accepts notification of the process. If it is not possible to confirm that it has been confirmed, the notification of the determined process is continued. If it is not possible to confirm that the quality control worker has received notification of the management item of the process, it is determined that the work has occurred. If the configuration is such that the notification of the device relating to the process management item is continued, the following operational effects can be obtained. That is, until the quality control worker takes some action on the notification, the notification means tells the quality control worker that the number of defects or defects is greater than or equal to the upper reference value and / or lower than the lower reference value. It will continue to notify that a certain work has occurred. For this reason, the quality control worker is forced to take an action for the abnormality semi-forcedly, and can cope with the abnormality of the device or the like at an early stage.

  If the notification method differs depending on whether the number of defects and / or defects present in the workpiece exceeds the upper limit value or the lower limit value, it is sudden or gradual over time. It is easy to make a prediction of the cause of occurrence, and it is easy to take an appropriate response to the abnormality.

  The upper reference value and the lower reference value depending on whether the number of defects and / or defects present in the workpiece exceeds the upper reference value or the lower reference value suddenly or gradually over time. If they are different, the following effects are obtained. That is, for example, if the upper limit reference value is gradually reduced over time compared to the case where it suddenly exceeds, it is possible to quickly grasp the tendency that equipment is abnormal, It can correspond to. On the other hand, if the upper limit criterion value when suddenly exceeded is large, it does not hinder early recognition of the tendency of becoming an abnormal state (that is, producing a workpiece having defects and / or defects). Thus, it becomes easy to accurately recognize the state of the apparatus.

  Embodiments of the present invention will be described below in detail with reference to the drawings.

  In the following description, an example applied to a manufacturing facility for manufacturing a TFT array substrate of a liquid crystal display panel will be described. Accordingly, the work referred to here mainly refers to a glass substrate, a semi-finished product (unfinished product) of a TFT array substrate, and the like. However, this invention is not limited to the structure applied to the manufacturing equipment of a liquid crystal display panel, but is shown as an example for description to the last.

  FIG. 1 is a block diagram showing a schematic configuration of a work quality management system 1 according to an embodiment of the present invention. As shown in FIG. 1, a work management system 1 according to an embodiment of the present invention includes a predetermined number of inspection devices 11, first storage means 12, second storage means 13, and third storage. Means 14, control chart creation means 15, first determination means 16, second determination means 17, notification means 18, and setting means 19 are provided.

  The inspection apparatus 11 is provided between predetermined apparatuses and facilities for various predetermined processes such as predetermined processing apparatuses and processing apparatuses (for example, a cleaning apparatus and an etching apparatus), or is attached to the predetermined apparatuses and facilities. It is provided along with it. Items to be inspected by each inspection device are determined according to the type of process (processing device or processing device). However, common inspection items include the number of defects and / or defects existing in the workpiece that has been processed or processed. That is, each inspection device 11 has a function as a defect number counting means that can count the number of defects and / or defects existing in a workpiece that has undergone predetermined processing or processing, etc., in substantially real time.

  The first storage means 12 can store the number of defects and / or defects present in each workpiece, counted by each inspection apparatus 11, in an intensive, cumulative and substantially real-time manner.

  The second storage means 13 stores history data for each work lot. The history data includes manufacturing history data such as processing steps, processing equipment, processing units, and processing times of the workpieces of each lot. The history data is read and stored, for example, from data managed by CIM (Computer Integrated Manufacturing) that exists separately from the work quality management system 1 according to the embodiment of the present invention.

  The management chart creation means 15 creates and updates the management table and the trend chart in substantially real time.

  The management table is a table in which the number of defects and / or defects existing in a work is arranged in the order of the work subjected to each processing or processing in each processing or processing. That is, by arranging the number of defects and / or defects present in the workpiece processed or processed by the processing apparatus or processing apparatus in the order of the processed or processed workpiece, defects and / or defects in the predetermined processing apparatus or processing apparatus are arranged. Or, it shows a change over time in the occurrence of defects.

  The trend control chart is a graph showing the number of defects and / or defects for each lot of work over time. That is, it is a graph showing the number of defects and / or defects present in each lot of workpieces in the order of the lots of workpieces subjected to predetermined processing or processing. Specifically, for example, on the horizontal axis (definition area), lots of workpieces that have been subjected to predetermined processing or processing are arranged in the order of workpiece lots that have been subjected to the processing or processing. The vertical axis indicates the number of defects and / or defects in each lot of the workpiece subjected to the processing or processing. As described above, this trend control chart shows a change with time of occurrence of defects and / or defects in a predetermined processing apparatus or processing apparatus for each lot of workpieces.

  The first determination means 16 determines whether the number of defects and / or defects existing in a workpiece that has been subjected to predetermined processing or machining is within the range of the reference value, that is, the reference value of the upper limit that is greater than or equal to the reference value of the lower limit. Determine if it is: In the present invention, the value of the lower limit reference value is sometimes referred to as “lower limit reference value”, and the value of the upper limit reference value is sometimes referred to as “upper limit reference value”. These lower limit reference value and upper limit reference value are appropriately set according to the type of workpiece, the processing apparatus, the processing apparatus, or the like.

  The upper reference value is an allowable upper limit value of the number of defects and / or defects existing in the workpiece. That is, a workpiece having a number of defects and / or defects smaller than the upper reference value is determined to be a non-defective product by the first determination means. On the other hand, the workpiece having the number of defects and / or defects equal to or greater than the upper reference value is determined as an abnormal workpiece by the first determination means. As described above, the upper limit reference value is a value set mainly for the purpose of work quality control.

  The lower limit reference value is an allowable lower limit value of the number of defects and / or defects present in the workpiece. That is, when the number of defects and / or defects of a workpiece that has undergone predetermined processing or processing is larger than the lower limit reference value, it is determined that the inspection device attached to the processing device or processing device is normal. On the other hand, when the number of defects and / or defects of the workpiece that has undergone predetermined processing or processing is smaller than the lower limit reference value, it is determined that the inspection device attached to the processing device or processing device is abnormal.

  That is, the fewer defects and / or defects that exist in a workpiece that has been subjected to predetermined processing or processing, the better. Ideally, the number of defects and / or defects is preferably zero. However, in reality, it is almost impossible to zero the number of defects and / or defects present in the workpiece.

  Therefore, there is usually a certain number of defects and / or defects in a workpiece that has been subjected to predetermined processing or processing. For this reason, when the inspection apparatus 11 detects and counts defects and / or defects present in the workpiece, if the number of defects and / or defects to be counted is less than a predetermined number, the inspection apparatus 11 It is thought that there is an abnormality in the inspection, or the inspection capability is remarkably reduced. That is, it is difficult to think that the number of defects and / or defects present in the workpiece is actually smaller than the certain predetermined number.

  Therefore, a lower limit reference value for the number of defects and / or defects existing in the workpiece is set. And when the defect and / or defect which exist in the workpiece | work detected and counted by the inspection apparatus 11 are values smaller than this lower limit reference value, the 1st determination means 12 has the abnormality in the said inspection apparatus 11. It is determined that there is a significant decrease in inspection capability. Thus, the lower limit reference value is a value that is set mainly for determining abnormality of the inspection apparatus.

  Two types of sudden upper limit reference value and trend upper limit reference value are set as the upper limit reference value. Similarly, two types of sudden lower limit reference value and trend lower limit reference value are set for the lower limit reference value.

  The sudden upper limit reference value determines that the work is abnormal when the number of defects and / or defects present in the work obtained and counted by the inspection apparatus 11 suddenly becomes larger than this value over time. It is a numerical value that serves as a reference. On the other hand, the tendency upper limit standard value is that when the number of defects and / or defects existing in the workpiece obtained and counted by the inspection apparatus gradually increases with time, and as a result, becomes larger than this value, It is a numerical value that serves as a reference for determining that the workpiece is abnormal.

  The sudden lower limit reference value indicates that when the number of defects and / or defects existing in the workpiece obtained and counted by the inspection device 11 suddenly becomes smaller than this value over time, an abnormality has occurred in the inspection device 11. Or a numerical value serving as a reference for determining that the inspection capability has changed significantly. On the other hand, the trend lower limit standard value is obtained when the number of defects and / or defects existing in the workpiece obtained and counted by the inspection apparatus 11 gradually decreases with time, and as a result, becomes smaller than this value. This is a numerical value serving as a reference for determining that an abnormality has occurred in the inspection apparatus 11 or that the inspection capability 11 has changed significantly.

  When the first determination unit 16 determines that the number of defects and / or defects existing in the workpiece is greater than the upper reference value, the second determination unit 17 suddenly increases the number of defects and / or defects. It is judged whether it is the one that has increased gradually or gradually. That is, it is determined whether a defect and / or a defect present in the workpiece has suddenly exceeded the sudden upper limit reference value or has gradually (trendously) exceeded the tendency upper limit reference value.

  Further, the second determination means 17 determines the number of defects and / or defects when the first determination means 16 determines that the number of defects and / or defects present in the workpiece is less than the lower limit reference value. It is judged whether it is a sudden decrease or a gradual decrease. In other words, whether the defects and / or defects existing in the workpiece suddenly fall below the sudden lower limit criterion value, or gradually (trend) decrease, and as a result, fall below the trend lower limit criterion value. Determine.

  The notification means 18 notifies the operator (for example, a quality control worker etc. The same applies hereinafter) of the determination result of the first determination means 16, the determination result of the second determination means 17, and the like. Specifically, the state of each process (that is, which process is normal and which process is abnormal), and the management item of the process determined to be abnormal (that is, in which inspection device the abnormality was detected) The state of the processing apparatus in which the inspection apparatus 11 that has detected the abnormality performs the inspection (that is, which of the apparatuses that the inspection apparatus 11 that has detected the abnormality is inspecting is normal and which is abnormal). Can be notified. Furthermore, a trend management chart of an arbitrary facility can be displayed. Therefore, it is possible to display a trend management chart of an apparatus in which an abnormality has occurred and to notify a change trend of the number of defects and / or defects existing in a workpiece processed or processed by the apparatus. The details of the configuration and operation of the notification means will be described later.

  The setting means 19 is for setting various parameters of the work quality management system 1 according to the embodiment of the present invention. The work quality management system 1 according to the embodiment of the present invention is set by an operator or the like. Specifically, a sudden upper limit reference value, a trend upper limit reference value, a sudden lower limit reference value, a trend lower limit reference value, and the like are set. In addition, in the case where there are a large number of inspection apparatuses 11, which inspection apparatus 11 is to be managed by the work quality management system 1 according to the embodiment of the present invention, the inspection apparatus 11 to be inspected inspects. Of the plurality of items, which item is to be managed by the work quality management system 1 according to the embodiment of the present invention is set.

  The third storage unit 14 stores the set value set by the setting unit 19. The contents of the work quality management system 1 according to the embodiment of the present invention are appropriately read out during operation. The work quality management system 1 according to the embodiment of the present invention operates based on the setting contents stored in the third storage unit 14.

  Next, a specific operation of the work quality management system 1 according to the embodiment of the present invention, that is, a work quality management method according to the embodiment of the present invention will be described. FIG. 2 is a flowchart showing an outline of the operation of the work quality management system 1 according to the embodiment of the present invention, that is, the flow of the work quality management method according to the embodiment of the present invention. Hereinafter, description will be given mainly with reference to this flowchart.

  First, the premise of operation | movement of the quality control system 1 of the workpiece | work concerning embodiment of this invention is demonstrated. Each inspection device 11 is operating, inspecting a workpiece, and continuously acquiring inspection data. The contents of the inspection data acquired by each inspection apparatus 11 are set by the setting means 19 and stored in the third storage means 14. Specifically, it differs depending on which process each inspection apparatus 11 is provided between, or which processing equipment is attached. However, many of them include the number of defects and / or defects present in the workpiece after a predetermined process or processing (that is, a predetermined process).

  In addition, each inspection device 11 and inspection data acquired by each inspection device 11 may or may not be designated for automatic monitoring. The inspection apparatus 11 and inspection data that are designated for automatic monitoring are managed by the work quality management system 1 (quality management method) according to the embodiment of the present invention. On the other hand, the inspection apparatus 11 and inspection data that are not designated for automatic monitoring are not managed by the work quality management system 1 (quality management method) according to the embodiment of the present invention.

  Note that which inspection device and inspection data are designated for automatic monitoring is determined by, for example, an operator. The contents set by the setting means 19 are stored in the third storage means 14.

  First, in step S <b> 1-1, the inspection data acquired by each inspection apparatus 11 is stored in the first storage unit 12 in a substantially real-time and accumulative manner. Next, in step S1-2, the inspection data stored in the first storage unit 12 is read and sent to the control chart creation unit 15.

  In step S 1-3, history data is read from the second storage unit 13, and the inspection data read from the first storage unit 12 and the second storage unit 13 for the work lot or work. The read history data is linked. That is, the inspection data and the history data are linked for each work or for each lot.

  Next, in step S1-4, it is determined whether or not the previously read inspection data is inspection data that is designated for automatic monitoring. In step S1-5, the inspection data not designated for automatic monitoring is removed. That is, the inspection device and inspection data that are not designated for automatic monitoring are not processed any further. Whether or not the previously read inspection data is designated for automatic monitoring is determined by the control chart creation means 15 by reading the setting value stored in the third storage means 14.

  In step S <b> 1-6, the control chart creating unit 15 reads the history data associated with the inspection data read from the first storage unit 12 from the second storage unit 13. More specifically, the control chart creating means 15 includes a lot such as a lot to which the work from which each inspection data has been acquired, history data of the work, a history of processing process or processing process designated for automatic monitoring, processing time, and the like. Data (that is, history data of processing or machining for a predetermined workpiece) is read out.

  In step S1-7, the management chart creating means 15 creates a management table for each inspection apparatus 11 based on the inspection data and history data that have been read and selected. Furthermore, a trend management chart is created based on the created management table.

  The management table is a table in which the number of defects and / or defects existing in a work is arranged in the order of the work subjected to each processing or processing in each processing or processing. That is, by arranging the number of defects and / or defects present in the workpiece processed or processed by the processing apparatus or processing apparatus in the order of the processed or processed workpiece, defects and / or defects in the predetermined processing apparatus or processing apparatus are arranged. Or it shows the change over time of the occurrence of defects.

  The trend control chart is a graph showing the number of defects and / or defects for each lot of work over time. That is, it is a graph showing the number of defects and / or defects present in each lot of workpieces in the order of the lots of workpieces subjected to predetermined processing or processing. Specifically, for example, on the horizontal axis (definition area), lots of workpieces that have been subjected to predetermined processing or processing are arranged in the order of workpiece lots that have been subjected to the processing or processing. The vertical axis indicates the number of defects and / or defects in each lot of the workpiece subjected to the processing or processing. As described above, this trend control chart shows a change with time of occurrence of defects and / or defects in a predetermined processing apparatus or processing apparatus for each lot of workpieces.

  Then, the management chart creation means 15 continues to update the created management table and the trend management chart. That is, the inspection data is accumulated over time. Therefore, after creating the management table and the trend management chart, the additionally accumulated examination data and history data are read out and added to the created management table and the trend management chart. This addition of data is an update of the management table and the trend management chart.

  The horizontal axis (definition area) of the trend control chart is a lot of work. The lot order is the order in which the predetermined processing or processing is performed for the predetermined processing or processing. Therefore, updating the trend management chart is a process of adding the last data in order of the predetermined processing or processing. In other words, the trend management chart is a graph in which the number of defects and / or defects existing in a workpiece that has undergone predetermined processing or processing is arranged in the order of the workpiece that has undergone the predetermined processing or processing. Then, by updating the trend management chart, data is added in the order of the workpiece subjected to the predetermined processing or processing.

  As described above, the trend management chart is a graph showing how the inspection data is changed in the order of the workpiece or the lot of workpieces that has passed through the set process. In other words, this trend management chart is a graph showing the temporal trend of the inspection data.

  FIG. 3 is a diagram showing a specific example of the trend management chart. As shown in the figure, in the trend chart, the horizontal axis is a workpiece or a lot of workpieces, and the vertical axis is inspection data, for example, the number of defects and / or defects present in the workpiece. The horizontal axis of workpieces or workpiece lots are arranged in the order of processing or processing set for display. In other words, it follows the passage of time. The vertical axis is inspection data corresponding to the workpiece or the lot of the workpiece. Therefore, the change with time of the inspection data can be read from this trend control chart.

  Returning to FIG. Next, the first determination means 16 reads the trend control chart that has been created and continued to be updated in substantially real time, and in step S1-8, the number of defects and / or defects present in the work is within the standard value range. Determine whether. Specifically, it is determined in real time whether the number of defects and / or defects present in the workpiece does not exceed the sudden upper limit reference value and does not fall below the sudden lower limit reference value. The “sudden upper limit reference value” and “sudden lower limit reference value” are appropriately set according to the type of workpiece, the processing device, the processing device, or the like.

  As described above, the sudden upper limit reference value is abnormal when the number of defects and / or defects existing in the workpiece obtained and counted by the inspection apparatus suddenly becomes larger than this value over time. It is a numerical value that serves as a reference for judging. Sudden lower limit standard value is whether the inspection device is abnormal when the number of defects and / or defects present in the workpiece obtained and counted by the inspection device suddenly becomes smaller than this value over time, Alternatively, it is a numerical value that serves as a reference for determining that the inspection capability has changed significantly.

  If the number of defects and / or defects present in the workpiece is greater than the sudden upper limit reference value, and the first determination means 16 determines that the second determination means 17 performs the following in step S1-9: Make such a determination. That is, the number of defects and / or defects existing in the workpiece suddenly increases over time and becomes a value larger than the sudden upper limit reference value, or the number of defects and / or defects present in the workpiece gradually increases. As a result, it is determined whether or not the sudden upper limit reference value is exceeded.

  On the other hand, if the first determination means 16 determines that the number of defects and / or defects present in the workpiece is less than the sudden lower limit reference value, the second determination means 17 in step S1-9 The following determination is made. That is, the number of defects and / or defects existing in the workpiece suddenly decreases with time and becomes a value smaller than the sudden lower limit reference value, or the number of defects and / or defects present in the workpiece gradually increases. As a result, it is determined whether or not it falls below the sudden lower limit reference value.

  In addition, when it is set to a value larger than the sudden upper limit reference value, the second determination means 17 gradually increases the number of defects and / or defects present in the workpiece, and as a result, As a result, it is rare to determine that the sudden upper limit criterion value has been exceeded. Similarly, when the sudden lower limit reference value is set to a value smaller than the trend lower limit reference value, the number of defects and / or defects existing in the workpiece gradually decreases, and as a result, the sudden lower limit It is considered rare to determine that the value is below the reference value.

  That is, when the sudden upper limit standard value is set to a value larger than the trend upper limit standard value, the number of defects and / or defects existing in the workpiece gradually increases, and as a result, the sudden upper limit standard value is increased. Before the value is exceeded, the trend threshold is exceeded. Then, it is determined that an abnormality has occurred at this stage. For this reason, it is considered rare to determine that the sudden upper limit reference value has been exceeded.

  Similarly, when the sudden lower limit reference value is set to a value smaller than the trend lower limit reference value, the number of defects and / or defects existing in the workpiece gradually decreases, and as a result, the sudden upper limit Before falling below the threshold, the trend falls below the lower threshold. Then, it is determined that an abnormality has occurred at this stage. For this reason, it is considered rare to determine that the sudden lower limit reference value has been exceeded.

  In step S1-9, the number of defects and / or defects existing in the workpiece has suddenly changed over time and has become larger than the sudden upper limit reference value by the second determination means 17 or suddenly. When it is determined that the value is smaller than the lower limit reference value, in step S1-10, the notification unit 19 notifies that. A specific notification mode will be described later.

  Next, in step S1-11, the second determination means 17 determines whether or not the number of defects and / or defects existing in the workpiece has gradually increased and exceeded the tendency upper limit criterion value, or It is determined whether or not the value gradually decreases and falls below the lower trend threshold value. In those cases, the notification means 19 notifies that in step S1-12. A specific notification mode will be described later.

  In addition, when the sudden upper limit reference value is set to a value larger than the trend upper limit reference value, the number of defects and / or defects existing in the workpiece suddenly increases with time and the upper limit of the trend is reached. A phenomenon that exceeds the standard value or a phenomenon that suddenly decreases with time and falls below the lower limit standard value may occur. However, in step S1-11, in these cases, that is, when the number of defects and / or defects existing in the workpiece suddenly increases with time and exceeds the upper limit trend value, or When the value suddenly decreases with time and falls below the lower limit trend value, the notification means does not operate.

  In step S1-13, whether to continue or end the operation of the work quality management system 1 according to the embodiment of the present invention is selected. When the continuation of the operation is selected in step S1-13 and the process returns to step S1-1, the inspection apparatus 11 should have acquired new inspection data, and the operation is performed for the new inspection data. Will be executed. In step S1-13, such an operation is repeated until the end of the operation is selected.

  Next, the detailed configuration and operation of the notification unit 18 will be described.

  FIG. 4 is a block diagram schematically showing the outline of the configuration of the notification means 18. As shown in FIG. 4, the notification unit 18 includes a display unit 181, a display control unit 182, and a display operation unit 183.

  The display means 181 is preferably capable of displaying predetermined information on the screen. More preferably, the display device has a predetermined display area and can display characters and diagrams. For example, a liquid crystal display panel or a CRT can be suitably applied to the display means 181. The display control unit 182 controls the display unit 181. The display operation unit 183 is an input device for operating the display unit 181 and is operated to select, for example, what kind of characters and charts are displayed on the display unit 181.

  As a specific display operation unit 183, for example, a keyboard or the like, a touch panel type can be applied as the display unit 181, and predetermined input can be performed by the touch panel 181.

  FIGS. 5A and 5B show a normal display screen of the display unit 181 of the notification unit 18 of the work quality management system 1 according to the embodiment of the present invention. Hereinafter, this display screen is referred to as a “first display screen”. The first display screen displays each process of the workpiece manufacturing equipment and the state of each process.

  FIG. 5A is a display screen when all the processes are normal. As shown in FIG. 5A, when the predetermined process is normal, “Good” is displayed for the process. Strictly, it is as follows.

  Here, “when the predetermined process is normal” refers to a state in which the number of defects and / or defects existing in the workpiece by the first determination unit 16 is within a reference value. If the signal sent from the control chart creating means 15 to the notifying means 18 indicates that “the number of defects and / or defects existing in the workpiece is within the reference value”, the notifying means 18 The process to which the inspection data belongs is displayed as “Good”.

  For a certain inspection data, if the number of defects and / or defects present in the workpiece suddenly exceeds the sudden upper limit reference value over time, the number of defects and / or defects present in the workpiece suddenly increases over time. If the number of defects and / or defects present in the workpiece gradually exceeds the tendency upper limit value over time, the number of defects and / or defects present in the workpiece will increase over time. Therefore, in any case where the value gradually falls below the trend lower limit reference value, a signal indicating that fact is sent from the control chart creation means 15 to the notification means 18.

  When the notification means 18 receives the signal indicating that, the first of the display means 181 displays that fact on the display screen. Specifically, the display of the process to which the inspection apparatus in which the abnormal inspection data is generated belongs is changed from “Good” to “Alarm”. FIG. 5B shows an example of a screen in which the determination display is changed from “Good” to “Alarm” in step 3.

  The display method of “Alarm” is not limited to simply changing the character, but may be a method of changing the character color or the background color. Specifically, “Alarm” may be displayed in white on a red background, or a display in which white display on a red background and red display on a white background are alternately repeated. In other words, it is preferable that the display is easy to call the operator's attention. Thereby, the worker can easily know which process has an abnormality among a plurality of processes.

  When the first screen is changed to such a screen (as shown in FIG. 5B), the operator uses the display operation unit 183 to select and click the “Alarm”. For example, in the case of a touch panel screen, the location where “Alarm” is displayed is pressed. When the operation is executed by the operator, the display control unit 182 switches the screen display. FIG. 6 is a screen switched from the first screen. Hereinafter, the screen that is switched from the first screen by the above operation is referred to as a “second display screen”.

  When the operator selects the “Alarm” and does not click, the display means continues to display the “Alarm”. In other words, unless the operator selects the “Alarm” and clicks, the “Alarm” display is continued.

  On the second display screen, first, the inspection devices designated for automatic monitoring, such as “inspection device 1”, “inspection device 2”, “inspection device 3”,. . And it is displayed so that it can be understood which inspection device 11 has acquired abnormal inspection data among the inspection devices 11 listed. Specifically, as shown in FIG. 6, the inspection apparatus 11 is displayed in reverse video. Thereby, the operator can know which inspection device 11 out of a plurality of inspection devices 11 the inspection device 11 that acquired the abnormal inspection data is.

  Abnormal inspection data means that the number of defects and / or defects existing in the workpiece suddenly exceeded the sudden upper limit reference value over time, or the number of defects and / or defects present in the workpiece over time. Either the number of defects and / or defects existing in the workpiece suddenly falls below the lower limit criterion value, or the number of defects and / or defects present in the workpiece gradually exceeds the upper limit criterion value over time, or the number of defects and / or defects present in the workpiece over time Either gradually falls below the lower trend threshold.

  When the screen is switched to the second display screen, the operator selects the inspection device 11 that has acquired the abnormal inspection data displayed on the screen, and clicks it. When the inspection device 11 that acquired the abnormal inspection data is selected and clicked, the display control unit 182 displays the item linked to the inspection device 11 so as to be displayed on the screen of the display unit 181. To do. And about the installation which detected abnormal test | inspection data, it displays that the number of the defects and / or defects which exist in a workpiece | work is abnormal.

  Specifically, as shown in FIG. 6, the expanded display screen includes an item indicating the facility (device) that is inspected by the inspection device 11 that acquired the abnormal data, and in some cases, attached to the facility. An item indicating a specific facility to be (or included) and an item indicating whether the number of defects generated in the specific facility is abnormal are displayed.

  Then, the display control unit 182 and the display unit 181 display “Alarm” in the item of the number of defects for the equipment in which the number of defects outside the range of the standard value has occurred. In addition, “Good” is displayed in the item of the number of defects in the equipment whose number of defects is within the standard value range. Thereby, the worker can know in which equipment an abnormal defect and / or defect has occurred.

  Then, the operator selects “Alarm” display from the items displayed so as to be expanded on the screen, and clicks on it.

  When an “Alarm” display is selected and clicked from an item displayed to be expanded on the screen by the operator, the display control means changes the screen displayed by the display means. That is, the contents of the items on the upper side of the items for which “Alarm” is displayed and the trend management chart (see FIG. 3) are displayed. Thereby, the operator can easily know which equipment in which which inspection device 11 in which process is inspecting has an abnormality. At the same time, since the trend control chart is displayed, it is possible to easily grasp the transition of the number of defects and / or defects existing in the workpiece in the inspection apparatus 11 or the facility.

  Note that the trend chart displayed on the screen of the display unit 181 may be displayed in a manner that makes it easy to know which data is abnormal and what is abnormal. preferable. For example, in a trend chart, some or all of the sudden upper limit reference value, unexpected lower limit reference value, trend upper reference value, and trend lower reference value are displayed, and which data is outside the range of which reference value. You may make it easy to know. Further, data outside the predetermined standard value range may be displayed with a display color different from that of the data within the standard value range. In this way, it is easy to identify what kind of abnormality is occurring in which work lot.

  Then, the worker confirms the trend management chart, and based on the trend management chart, carries out a survey of the work of the lot in which an abnormality has occurred. When it is determined that the work of the lot is a defective product, the processing apparatus or the machine tool that has processed the work of the lot, and the equipment in which abnormal inspection data is detected is stopped. At the same time, the display operation means 183 of the notification means 18 is operated to release the alarm.

  On the other hand, when it is determined that the work of the lot is not enough to be handled as a defective product (for example, when it is determined that the work can be allowed to flow as it is), the facility where the alarm is generated Inspect. Then, it is determined whether the operation can be performed as it is or whether the operation should be stopped once. When it is determined that the operation can be performed as it is, the alarm is canceled using the display operation unit of the notification unit. On the other hand, when it is determined that the operation of the facility should be stopped, the operation of the facility is stopped and the alarm is canceled using the display operation unit 183 of the notification unit 18.

  After stopping the equipment, investigate the cause and take countermeasures so that it can be operated again.

  FIG. 7 is a flowchart showing the operation of the notification unit 18 of the quality management system 1 according to the embodiment of the present invention. Since the details of the operation of the notification means of the quality management system 1 according to the embodiment of the present invention are as described above, the operation of the notification means 18 will be briefly described here.

  In step S2-1, it is determined whether “Alarm” is displayed in any process on the first screen. If there is no display, the determination is continued. If the “Alarm” display has occurred, it is determined in step S2-2 whether the “Alarm” display has been selected and clicked by the operator. When the “Alarm” display is selected and clicked by the operator, the process proceeds to step S2-3, and the screen displayed by the display unit is changed from the first screen display to the second screen display. If no operation is performed by the operator in step S2-2, the “Alarm” display is continued.

  After changing from the first screen display to the second screen display (step S2-3), in step S2-4, it is determined whether or not an inspection apparatus displaying “Alarm” is selected and clicked. The If it is determined in step S2-4 that the inspection apparatus 11 displaying “Alarm” is selected and clicked, the process proceeds to step S2-5. On the other hand, if no operation is performed by the worker, the “Alarm” display is continued in step S2-4.

  In step S2-5, the display control unit 182 and the display unit 181 display the items linked to the inspection apparatus so as to be developed on the screen of the display unit. Then, “Alarm” display indicating that the number of defects and / or defects present in the workpiece is abnormal is performed for the equipment that has detected abnormal inspection data.

  Then, the process proceeds to step S2-6. In step S2-6, the operator selects “Alarm” display in S2-5, and it is determined whether the “Alarm” display is clicked by the display operation unit. If it is determined that the “Alarm” display has been clicked, the process proceeds to step S2-7. When it is determined in step S2-6 that no operation is performed by the worker, the “Alarm” display is continued.

  If it is determined in step S2-6 that the “Alarm” display in step S2-5 has been clicked or the like, and the process proceeds to step S2-7, the item “Alarm” is displayed in step S2-7. The contents of the higher-level items and the trend chart are displayed.

  Then, the process proceeds to step S2-8. In step S2-8, it is determined whether or not an operation for canceling the “Alarm” display has been performed. When it is determined that an operation for canceling the “Alarm” display is performed, the “Alarm” display is canceled. On the other hand, when it is determined that the operation for canceling the “Alarm” display is not performed, the “Alarm” display is continued.

  As described above, from the start of the display of the contents and trend control chart of the items on the upper side of the item displaying “Alarm”, until it is determined that the operation of canceling the “Alarm” display has been performed. In the meantime, workers etc. perform the following actions.

  The trend control chart is confirmed, and based on the trend management chart, the work of the lot in which an abnormality has occurred is investigated. When it is determined that the work of the lot is a defective product, the processing apparatus or the machine tool that has processed the work of the lot, and the equipment in which abnormal inspection data is detected is stopped.

  On the other hand, when it is determined that the work of the lot is not enough to be handled as a defective product (for example, when it is determined that the work can be allowed to flow as it is), the facility where the alarm is generated Inspect. Then, it is determined whether the operation can be performed as it is or whether the operation should be stopped once. On the other hand, when it is determined that the operation of the facility should be stopped, the operation of the facility is stopped.

  The work quality management system according to the embodiment of the present invention and the work quality management method according to the embodiment of the present invention have been described in detail above, but the present invention is not limited to the embodiment. Various modifications can be made without departing from the spirit of the present invention.

It is the block diagram which showed the outline of the structure of the quality control system of the workpiece | work concerning embodiment of this invention. It is the flowchart which showed the outline of the flow of operation | movement of the quality control system of the workpiece | work concerning embodiment of this invention. It is the figure which showed the specific example of the tendency management chart. It is the block diagram which showed the outline of the structure of an alerting | reporting means. It is a schematic diagram of a 1st screen, (a) shows the display state which does not have the above in all processes, (b) shows the display state which has detected abnormal test | inspection data in process 3. FIG. It is a schematic diagram of a 2nd display screen. It is the flowchart which showed the operation | movement of an alerting | reporting means.

Explanation of symbols

1 work quality control system 11 inspection device 12 first storage means 13 second storage means 14 third storage means 15 control chart creation means 16 first determination means 17 second determination means 18 notification means 181 display means 182 Display control means 183 Display operation means 19 Setting means

Claims (18)

A plurality of defect counting means for counting the number of defects and / or defects existing in a workpiece that has undergone predetermined processing in substantially real time;
First storage means capable of storing defect and / or defect count data counted by the defect counting means in substantially real time in the order of the workpieces having undergone the predetermined processing;
Based on the count data stored in the first storage means, a management table in which the number of defects and / or defects existing in the workpiece is arranged in the order of the workpiece subjected to the predetermined processing is created in substantially real time. Control chart creation means;
Based on the management table created by the control chart creating means, it is determined in substantially real time whether the number of defects and / or defects of the work is greater than or equal to the upper limit reference value and / or less than or equal to the lower limit reference value. First determining means to perform,
When the first determination means determines that the number of defects and / or defects that the workpiece has is not less than the upper reference value and / or not more than the lower reference value, the number of defects and / or defects that the workpiece has. The number of defects and / or defects of the workpiece gradually changes according to the order of the workpieces that have been treated, or the upper limit reference value or A second determination means for determining whether or not the lower limit reference value is exceeded in substantially real time;
An informing means for informing the determination result of the first determination means and / or the determination result of the second determination means in substantially real time;
A workpiece quality control system characterized by comprising:   The defect number counting means is provided in a plurality of predetermined facilities for performing the predetermined processing, and the first storage means is present in a workpiece counted by the defect counting means provided in the predetermined plurality of facilities. 2. The work quality control system according to claim 1, wherein count data of defects and / or defects can be collectively stored in substantially real time.   The apparatus further comprises second storage means for storing history data including processing history data for each lot of workpieces, and the workpiece defect and / or defect count data stored in the first storage means, and the first The work quality management system according to claim 1 or 2, wherein the history data stored in the second storage means is linked.   The management chart creating means is a management table in which the number of defects and / or defects existing in the work is arranged in the order of the work subjected to the processing based on the count data stored in the first storage means. And a graph showing the number of defects and / or defects existing in the work in the order of the work subjected to the predetermined processing based on the management table. The work quality control system according to any one of claims 1 to 3.   The informing means can display a graph showing the number of defects and / or defects existing in the work created by the control chart creating means in the order of the work subjected to the predetermined processing. Item 5. The work quality control system according to Item 4. In the case where the first determination means determines that a work has occurred in which the number of defects or defects is not less than the upper reference value and / or not more than the lower reference value,
The informing means informs the process of determining that the workpiece has occurred,
If it is confirmed that the quality control worker has received the notification of the process, the management item of the process determined that the work has occurred,
If it is confirmed that a quality control worker has received notification of the management item of the process, informing the device related to the management item of the process determined that the work has occurred,
The work quality control system according to any one of claims 1 to 5, wherein: In the case where the first determination means determines that a work has occurred in which the number of defects or defects is not less than the upper reference value and / or not more than the lower reference value,
The informing means informs the process of determining that the workpiece has occurred,
If quality control personnel cannot confirm that the process notification has been accepted, continue the notification of the determined process,
If it is not possible to confirm that the quality control worker has received the notification of the management item of the process, continuing the notification of the device according to the management item of the process determined that the work has occurred
The work quality control system according to any one of claims 1 to 6, wherein:   The number of defects or defects of the workpiece suddenly exceeds the upper limit reference value or the lower limit reference value by the second determination means, or the number of defects or defects of the workpiece is gradually changed. The quality of the workpiece according to any one of claims 1 to 7, wherein a notification method by the notification means is different according to a determination result as to whether an upper limit reference value or a lower limit reference value is exceeded. Management system.   Defects and / or defects present in the workpiece suddenly exceed the upper limit reference value or the lower limit reference value, or the number of defects and / or defects present in the workpiece is gradually changed and the upper limit reference value or 9. The work quality management system according to claim 1, wherein the upper limit reference value and the lower limit reference value are different depending on whether the lower limit reference value is exceeded. A counting step for counting in real time the number of defects and / or defects present in a workpiece that has undergone predetermined processing;
A storage step of storing the counted defect and / or defect count data in substantially real time in the order of the workpieces that have undergone the predetermined processing;
A management table creating step for creating a management table in which the number of defects and / or defects existing in the workpiece are arranged in the order of the workpieces that have undergone the predetermined processing based on the stored count data;
Based on the created management table, a first determination for determining in real time whether the number of defects and / or defects of the workpiece is greater than or equal to an upper limit reference value and / or less than or equal to a lower limit reference value. Steps,
In the first determination step, when it is determined that the number of defects and / or defects that the workpiece has is not less than the upper reference value and / or not more than the lower reference value, the number of defects and / or defects that the workpiece has. The number of defects and / or defects of the workpiece gradually changes according to the order of the workpieces that have been treated, or the upper limit reference value or A second determination step for determining in substantially real time whether the lower limit reference value is exceeded;
Informing the determination result of the first determination step and / or the determination result of the second determination step in substantially real time;
A work quality control method characterized by comprising:   The counting step for counting the number of defects is executed in a plurality of predetermined facilities for performing the predetermined processing, and the storage step is present in the work counted by the defect counting means provided in the predetermined plurality of facilities. 11. The work quality control method according to claim 10, wherein defect data and / or defect count data to be stored are collectively stored in substantially real time.   12. The history data including processing history data for each lot of workpieces and the stored count data of defects and / or defects of the workpieces are linked to each other. Quality control method of work.   Based on the stored count data, create a management table in which the number of defects and / or defects existing in the workpiece are arranged in the order of the workpieces that have been subjected to the processing, and based on the management table, 13. The work according to claim 10, wherein a graph showing the number of existing defects and / or defects in order of the work subjected to the predetermined processing is created in substantially real time. Quality control method.   The work quality control according to claim 13, wherein a graph showing the number of defects and / or defects existing in the created work in order of the work subjected to the predetermined processing can be displayed. Method. When it is determined that the number of defects or defects is greater than or equal to the upper reference value and / or a workpiece that is less than or equal to the lower reference value has occurred,
Informing the process of determining that the number of the defects or defects is greater than or equal to the upper reference value and / or that a workpiece having a lower reference value or less has occurred,
When it is confirmed that a quality control worker has received the notification of the process, it is determined that a work has occurred in which the number of the defects or defects is equal to or higher than the upper reference value and / or lower than the lower reference value. Inform process management items,
When it was confirmed that a quality control worker received notification of the management item of the process, there was a work in which the number of the defects or defects was not less than the upper limit value and / or not more than the lower limit value. Informing the device related to the management item of the process determined to be,
The work quality control method according to any one of claims 10 to 14, wherein: When it is determined that the number of defects or defects is greater than or equal to the upper reference value and / or a workpiece that is less than or equal to the lower reference value has occurred,
Informing the process of determining that the number of the defects or defects is greater than or equal to the upper reference value and / or that a workpiece having a lower reference value or less has occurred,
If quality control personnel cannot confirm that the process notification has been accepted, continue the notification of the determined process,
When it is not possible to confirm that the quality control worker has received the notification of the management item of the process, there is a work in which the number of the defects or defects is equal to or higher than the upper reference value and / or lower than the lower reference value. Continuing the notification of the device related to the management item of the process determined to be,
The work quality control method according to any one of claims 10 to 15, wherein:   The number of defects or defects that the workpiece has has suddenly exceeded the upper limit reference value or lower limit reference value, or the number of defects or defects that the workpiece has has gradually changed to the upper limit reference value or lower limit reference value. The work quality control method according to any one of claims 10 to 16, wherein the notification method is different according to a determination result of whether or not the value exceeds.   Defects and / or defects present in the workpiece suddenly exceed the upper limit reference value or the lower limit reference value, or the number of defects and / or defects present in the workpiece is gradually changed and the upper limit reference value or 18. The work quality control method according to claim 10, wherein the upper limit reference value and the lower limit reference value differ depending on whether the lower limit reference value is exceeded.

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